CN113028277B - Vacuum box type helium leak detection recovery system - Google Patents

Vacuum box type helium leak detection recovery system Download PDF

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Publication number
CN113028277B
CN113028277B CN202110230080.XA CN202110230080A CN113028277B CN 113028277 B CN113028277 B CN 113028277B CN 202110230080 A CN202110230080 A CN 202110230080A CN 113028277 B CN113028277 B CN 113028277B
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Prior art keywords
valve
box
connecting valve
vacuum box
rod
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CN202110230080.XA
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Chinese (zh)
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CN113028277A (en
Inventor
刘勇
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Anhui Bowei Photoelectric Technology Co ltd
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Anhui Bowei Photoelectric Technology Co ltd
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Priority to CN202110230080.XA priority Critical patent/CN113028277B/en
Publication of CN113028277A publication Critical patent/CN113028277A/en
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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C5/00Methods or apparatus for filling containers with liquefied, solidified, or compressed gases under pressures
    • F17C5/06Methods or apparatus for filling containers with liquefied, solidified, or compressed gases under pressures for filling with compressed gases
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00Details of vessels or of the filling or discharging of vessels
    • F17C13/04Arrangement or mounting of valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17DPIPE-LINE SYSTEMS; PIPE-LINES
    • F17D1/00Pipe-line systems
    • F17D1/02Pipe-line systems for gases or vapours
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17DPIPE-LINE SYSTEMS; PIPE-LINES
    • F17D3/00Arrangements for supervising or controlling working operations
    • F17D3/01Arrangements for supervising or controlling working operations for controlling, signalling, or supervising the conveyance of a product
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/02Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205Accessories or associated equipment; Pump constructions
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0107Single phase
    • F17C2223/0123Single phase gaseous, e.g. CNG, GNC

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)

Abstract

The invention discloses a vacuum box type helium leak detection recovery system, wherein one end of a vacuum box is fixedly communicated with a sixth connecting valve, an eighth connecting valve and a ninth connecting valve respectively through connecting pipes, and one end of the eighth connecting valve, which is far away from the vacuum box, is fixedly communicated with a leak through connecting pipes. After the leakage is detected by the novel recovery system, helium in the workpiece is pumped out by a mechanical pump and is sent into the recovery tank. Simultaneously, the main compressor compresses helium in the recovery tank to the inside of the gas storage tank for centralized collection; the accommodating vehicle can be conveyed into the vacuum box to work together with the workpiece, and the limiting device can be extruded to work in the accommodating vehicle putting process, so that the limiting plate can be tilted, the workpiece at the top of the accommodating vehicle and the accommodating vehicle can be effectively limited, and the accommodating vehicle and the workpiece at the top of the accommodating vehicle are prevented from moving and shaking in the detection process.

Description

Vacuum box type helium leak detection recovery system
Technical Field
The invention relates to a recovery system, in particular to a vacuum box type helium leak detection recovery system.
Background
Helium leak detection is carried out on a vacuum box, helium is used as a tracer gas according to the basic leak detection principle of helium leak detection, a workpiece is filled into the vacuum box, and then the leakage condition of the workpiece can be judged rapidly and accurately with high precision through a helium leak detector.
In the vacuum box helium leak detection work, a small amount of helium flows out, the cost of helium is relatively expensive, if the outflow of the helium is very easy to cause waste, and a large-size workpiece is easy to displace in the process of being put into the vacuum box helium leak detection work, so that the normal operation of detection is influenced, and even the workpiece is possibly damaged, therefore, the vacuum box helium leak detection recovery system is provided.
Disclosure of Invention
The invention aims to provide a vacuum box type helium leak detection recovery system, which aims to solve the problems in the background technology.
In order to achieve the above purpose, the present invention provides the following technical solutions: a vacuum box type helium leak detection recovery system comprises a vacuum box, a first connecting valve, a second connecting valve, a Roots pump, a first mechanical pump, a helium mass spectrometer leak detector, a third connecting valve, a second mechanical pump, a fourth connecting valve, a helium filling recovery system, a fifth connecting valve, a sixth connecting valve, a seventh connecting valve, an eighth connecting valve, a ninth connecting valve and a leak hole, wherein one end of the vacuum box is fixedly communicated with the sixth connecting valve, the eighth connecting valve and the ninth connecting valve respectively through connecting pipes, one end of the eighth connecting valve far away from the vacuum box is fixedly communicated with the leak hole through connecting pipes, one end of the sixth connecting valve and one end of the ninth connecting valve far away from the vacuum box are fixedly communicated with outside helium and air through connecting pipes respectively, one end of the vacuum box is fixedly communicated with the first connecting valve through connecting pipes, one end of the vacuum box is fixedly communicated with one end of the third connecting valve through connecting pipes, one end of the third connecting valve is far away from the vacuum box is fixedly communicated with one end of the vacuum mass spectrometer through connecting pipes, one end of the other three-way valves is fixedly communicated with one end of the vacuum box is sequentially and is fixedly communicated with one another three-way valve through connecting pipes, one end of the three-way valves is fixedly connected with one end of the vacuum box is fixedly communicated with one another three-way valve, one end of the three-way valve is fixedly communicated with a fifth connecting valve through a connecting pipe, one end of the fifth connecting valve, which is far away from the three-way valve, is fixedly communicated with SF6 gas, the other connecting position of the three-way valve is fixedly communicated with a fourth connecting valve through a connecting pipe, and one end of the fourth connecting valve, which is far away from the three-way valve, is fixedly communicated with one end of the helium filling recovery system.
Preferably, the vacuum box comprises box, joint strip, guide rail, hold car and stop device, the one end of box sets up to opening the setting, the joint strip that rubber material made has been laid to the open one side outer wall of box, the bottom fixed mounting of box inner wall has the guide rail of symmetric distribution, the top joint of guide rail has the hold car, hold the car by placing board, mounting groove, spacing gyro wheel, fixed screw nail, mount pad, bracing piece and push rod and constitute, the mounting groove has been seted up in the bottom of placing the board and the position of corresponding guide rail runs through, the inside fixed mounting of mounting groove has spacing gyro wheel, spacing gyro wheel's bottom joint is in the top of guide rail, the top of placing the board has the mount pad of symmetric distribution through multiunit fixed screw nail fixed mounting, the top fixed mounting of mount pad has the bracing piece of symmetric distribution, the bottom fixed mounting of box inner wall is used for the fixed stop device who holds the car.
Preferably, stop device comprises installation piece, head rod, second connecting rod, third connecting rod, limiting plate, cushion, work box, slide, reset spring, telescopic link and pulley, the axis department fixed mounting of box inner wall bottom has the installation piece, the fixed surface of installation piece installs the head rod, the both ends of head rod surface respectively fixed mounting have the second connecting rod that the level set up and the third connecting rod that inclines to set up, the bottom of box inner wall just is located the bottom fixed mounting of second connecting rod has the cushion, and the one end fixed mounting who keeps away from the head rod surface in the second connecting rod that belongs to has the limiting plate, the bottom of box inner wall just is located the below fixed mounting of third connecting rod has the work box, the inner wall sliding connection of work box has the slide, the bottom fixedly connected with reset spring of slide, reset spring's bottom fixed mounting is in the bottom of work box inner wall, the top fixedly connected with telescopic link of slide, the top of telescopic link runs through the top of work box and extends to the outside of work box, the surface of telescopic link, fixed mounting has the bottom that contacts with the pulley of third connecting rod.
Preferably, a plurality of groups of pressure relief holes are formed in the surfaces of the support rod and the push rod in a penetrating manner.
Preferably, the box body is made of stainless steel, and the inner surface of the box body is polished and cleaned after being processed.
Preferably, the first connecting rod, the second connecting rod, the third connecting rod, the limiting plate, the cushion block, the working box, the sliding plate and the telescopic rod are all made of rigid materials.
Compared with the prior art, the invention has the following beneficial effects:
1. after the leakage is detected by the novel recovery system, helium in the workpiece is pumped out by a mechanical pump and is sent into the recovery tank. Simultaneously, the main compressor compresses helium in the recovery tank to the inside of the gas storage tank for centralized collection;
2. the accommodating vehicle can be conveyed into the vacuum box to work together with the workpiece, and the limiting device can be extruded to work in the accommodating vehicle putting process, so that the limiting plate can be tilted, the workpiece at the top of the accommodating vehicle and the accommodating vehicle can be effectively limited, and the accommodating vehicle and the workpiece at the top of the accommodating vehicle are prevented from moving and shaking in the detection process.
Drawings
FIG. 1 is a schematic diagram of the system of the present invention;
FIG. 2 is a schematic diagram of the front view of the vacuum box of the present invention;
FIG. 3 is a schematic diagram of a side cross-sectional structure of a vacuum box according to the present invention;
fig. 4 is an enlarged view of the structure a of the present invention.
In the figure: a vacuum box, a first connecting valve, a second connecting valve, a Roots pump, a first mechanical pump, a helium mass spectrometer leak detector, a third connecting valve, a second mechanical pump, a fourth connecting valve, a helium recovery system, a fifth connecting valve, a sixth connecting valve, a seventh connecting valve, a eighth connecting valve, a ninth connecting valve, a 16 leak hole, a box body, a sealing rubber strip, a guide rail, a 20 containing vehicle, a 21 placing plate, a 22 mounting groove, a 23 limit roller, a 24 fixed screw nail, a 25 mounting seat, a 26 supporting rod, a 27 push rod, a 28 limiting device, a 29 mounting block, a 30 first connecting rod, a 31 second connecting rod, a 32 third connecting rod, a 33 limiting plate, a 34 cushion block, a 35 working box, a 36 sliding plate, a 37 reset spring, a 38 telescopic rod, a 39 pulley and a 40 pressure release hole.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1-4, the present invention provides a technical solution: a vacuum box type helium leak detection recovery system comprises a vacuum box 1, a first connecting valve 2, a second connecting valve 3, a Roots pump 4, a first mechanical pump 5, a helium mass spectrometer leak detector 6, a third connecting valve 7, a second mechanical pump 8, a fourth connecting valve 9, a helium filling recovery system 10, a fifth connecting valve 11, a sixth connecting valve 12, a seventh connecting valve 13, an eighth connecting valve 14, a ninth connecting valve 15 and a leak hole 16, wherein one end of the vacuum box 1 is fixedly communicated with a sixth connecting valve 12, the eighth connecting valve 14 and the ninth connecting valve 15 through connecting pipes, one end of the eighth connecting valve 14 far from the vacuum box 1 is fixedly communicated with the leak hole 16 through connecting pipes, one end of the sixth connecting valve 12 and one end of the ninth connecting valve 15 far from the vacuum box 1 are fixedly communicated with the outside through connecting pipes, one end of the vacuum box 1 is fixedly communicated with the first connecting valve 2 through connecting pipes, a connecting pipe between the vacuum box 1 and the first connecting valve 2 is fixedly communicated with a second connecting valve 3 through a three-way valve 3, one end of the third connecting valve 3 is fixedly communicated with one end of the vacuum box 1 far from the third connecting valve 1 through a three-way valve group of connecting valves 6, one end of the third connecting valves is fixedly communicated with one end of the three-way valves 1 is fixedly communicated with one end of the three-way valves 6 through connecting valves 6, one end of the three-way valves is fixedly communicated with one end of three-way valves 3 is fixedly communicated with one end of three-way valves respectively, the other connecting hole of three-way valve is located to be fixedly connected with another three-way valve through the connecting pipe, the one end of three-way valve is fixedly connected with fifth connecting valve 11 through the connecting pipe, the one end that three-way valve was kept away from to fifth connecting valve 11 is fixedly connected with SF6 gas, the other junction of three-way valve is fixedly connected with fourth connecting valve 9 through the connecting pipe, the one end that three-way valve was kept away from to fourth connecting valve 9 is fixedly connected with the one end of filling helium recovery system 10.
Preferably, the vacuum box 1 comprises box 17, joint strip 18, guide rail 19, hold car 20 and stop device 28, the one end of box 17 sets up to open the setting, the joint strip 18 that rubber materials made has been laid to the open one side outer wall of box 17, the bottom fixed mounting of box 17 inner wall has symmetrical distribution's guide rail 19, the top joint of guide rail 19 has holds car 20, hold car 20 comprises placing plate 21, mounting groove 22, spacing gyro wheel 23, fixed screw 24, mount pad 25, bracing piece 26 and push rod 27, the bottom of placing plate 21 just corresponds the position of guide rail 19 and runs through and has seted up mounting groove 22, the inside fixed mounting of mounting groove 22 has spacing gyro wheel 23, the bottom joint of spacing gyro wheel 23 is in the top of guide rail 19, the top of placing plate 21 has symmetrical distribution's mount pad 25 through multiunit fixed screw 24 fixed mounting, the top fixed mounting of mount pad 25 has symmetrical distribution's bracing piece 26, the top of bracing piece 26 passes through push rod 27 fixed connection, the bottom of box 17 inner wall 20 fixed mounting is used for fixing the stop device of holding.
Preferably, the limiting device 28 is composed of a mounting block 29, a first connecting rod 30, a second connecting rod 31, a third connecting rod 32, a limiting plate 33, a cushion block 34, a working box 35, a sliding plate 36, a return spring 37, a telescopic rod 38 and a pulley 39, wherein the mounting block 29 is fixedly mounted at the bottom center shaft of the inner wall of the working box 17, the first connecting rod 30 is fixedly mounted on the surface of the mounting block 29, a second connecting rod 31 and a third connecting rod 32 which are horizontally arranged are respectively and fixedly mounted at two ends of the outer surface of the first connecting rod 30, a cushion block 34 is fixedly mounted at the bottom of the inner wall of the working box 17 and positioned at the bottom of the second connecting rod 31, the limiting plate 33 is fixedly mounted at one end, far away from the outer surface of the first connecting rod 30, of the second connecting rod 31, the working box 35 is fixedly mounted at the bottom of the inner wall of the working box 17 and positioned below the third connecting rod 32, the sliding plate 36 is slidably connected with the inner wall of the working box 35, the return spring 37 is fixedly mounted at the bottom of the inner wall of the working box 35, the top of the sliding plate 36 is fixedly connected with the second connecting rod 31 and the third connecting rod 32 is fixedly mounted at the bottom of the inner wall of the working box 35, the top of the sliding plate 36 is fixedly connected with the top of the pulley 39, the top of the sliding plate 38 is fixedly connected with the top of the pulley 39 and fixedly connected with the top of the pulley 39, and the top of the outer pulley 39 is fixedly arranged at the top of the top pulley 35 and fixedly connected with the top pulley top of the pulley 39.
Preferably, a plurality of groups of pressure relief holes 40 are provided on the surfaces of the support bar 26 and the push rod 27.
Preferably, the case 17 is made of stainless steel, and the inner surface thereof is polished and cleaned after being processed.
Preferably, the first connecting rod 30, the second connecting rod 31, the third connecting rod 32, the limiting plate 33, the cushion block 34, the working box 35, the sliding plate 36 and the telescopic rod 38 are all made of rigid materials.
In use, first of all,
1. vacuumizing large leakage detecting device
1) When leakage detection is performed, a workpiece is firstly placed at the top of the containing vehicle 20, the workpiece is pushed into the vacuum box 1 by using a human, then the workpiece is connected with a system, and then the door of the vacuum box 1 is closed;
2) After the box door is closed, the first connecting valve 2 and the third connecting valve 7 are opened, the second connecting valve 3, the fourth connecting valve 9, the fifth connecting valve 11, the sixth connecting valve 12, the seventh connecting valve 13 and the ninth connecting valve 15 are closed, so that the vacuum box 1 and a workpiece placed in the vacuum box can be vacuumized, the vacuum value in the workpiece and the vacuum value of the vacuum box 1 are monitored, and the pressure in the workpiece is ensured to be less than or equal to 0.05MPa;
3) When the pressure in the vacuum box is 50Pa, the pressure is maintained for a certain time when the pressure in the workpiece is pumped to 5000Pa, the change of the vacuum values in the workpiece and the vacuum box 1 is measured, if the change of the vacuum degree in the vacuum box 1 does not exceed a set value, the workpiece is free from large leakage, otherwise, the workpiece is free from large leakage, the system automatically gives audible and visual alarm, and if the workpiece is free from large leakage, the vacuum pumping is continued to detect middle and micro leakage.
2. Micro leakage detector
1) If no large leakage is found, when the vacuum values of the vacuum box 1 and the workpiece reach the requirements, filling low-pressure helium (such as 0.01 Mpa) into the workpiece, and simulating the working environment of the workpiece to detect micro leakage. If the work piece disqualification system will report to the police, otherwise the system gives the suggestion.
2) For unqualified products, the system sends out an alarm signal, then the vacuum box 1 is filled with air, and helium is filled into the workpiece until the pressure is 150000pa (absolute pressure) (the process also needs to keep the pressure difference between the inside and the outside of the workpiece to be no more than 0.05 Mpa), then the detection procedure is stopped, the workpiece is removed from the vacuum box 1, and suspicious points such as joints, welding seams and the like are manually detected to determine leakage points (a suction gun leak detector for the leakage points is recommended to be additionally searched by a required party, and the device is not included). If there is no small leak, the system automatically proceeds to the next procedure.
3. Helium recovery
And after the micro leakage detection is qualified, automatically entering a recovery program. After the leak detection, helium in the workpiece is pumped out by the first mechanical pump 5 and the second mechanical pump 8 and is sent into the recovery tank. And simultaneously, the main compressor compresses helium in the recovery tank to the gas storage tank. When the pressure or concentration in the gas storage tank is lower than the specified value, helium needs to be supplemented to keep enough pressure and concentration of helium in the gas storage tank.
When the holding vehicle 20 works, firstly, a workpiece needs to be placed on the top of the placing plate 21, then the supporting rod 26 and the pushing rod 27 are pushed, the placing plate 21 and the limiting roller 23 at the bottom of the placing plate 21 move along the surface of the guide rail 19, and the other end of the placing plate 21 can squeeze the obliquely arranged third connecting rod 32 to move downwards in the moving process, so that the first connecting rod 30 can rotate along the inside of the mounting block 29, the second connecting rod 31 and the limiting plate 33 in the original horizontal state are lifted upwards, the top of the limiting plate 33 can be overlapped on the side wall of the placing plate 21 after the holding vehicle 20 is completely placed, so that the holding vehicle 20 and the workpiece at the top of the holding vehicle can be limited, and when the holding vehicle 20 is pulled out after detection is completed, the restoring spring 37 can provide a certain restoring force for the sliding plate 36, the telescopic rod 38 and the pulley 39, so that the third connecting rod 32 is gradually restored to the lifted state, and the second connecting rod 31 and the limiting plate 33 are gradually lowered to be in the horizontal state, so that the holding vehicle 20 can be separated from the inside of the box body 17 along the guide rail 19.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (6)

1. The utility model provides a vacuum box helium leak hunting recovery system, including vacuum box (1), first connecting valve (2), second connecting valve (3), roots pump (4), first mechanical pump (5), helium mass spectrum leak detector (6), third connecting valve (7), second mechanical pump (8), fourth connecting valve (9), fill helium recovery system (10), fifth connecting valve (11), sixth connecting valve (12), seventh connecting valve (13), eighth connecting valve (14), ninth connecting valve (15) and leak (16), its characterized in that: one end of the vacuum box (1) is fixedly communicated with a sixth connecting valve (12), an eighth connecting valve (14) and a ninth connecting valve (15) through connecting pipes, one end of the eighth connecting valve (14) far away from the vacuum box (1) is fixedly communicated with a leak hole (16) through connecting pipes, one ends of the sixth connecting valve (12) and the ninth connecting valve (15) far away from the vacuum box (1) are fixedly communicated with outside helium and air through connecting pipes respectively, one end of the vacuum box (1) is fixedly communicated with a first connecting valve (2) through connecting pipes, a connecting pipe part between the vacuum box (1) and the first connecting valve (2) is fixedly communicated with a second connecting valve (3) through a three-way valve, one end of the second connecting valve (3) far away from the three-way valve is fixedly communicated with a helium mass spectrometer (6) through connecting pipes, one end of the first connecting valve (2) far away from the vacuum box (1) is fixedly communicated with a Roots pump (4) and a first mechanical pump (5) through connecting pipes in sequence, one end of the vacuum box (1) is fixedly communicated with a first mechanical pump (7) through connecting pipes, one end of the other end of the vacuum box (1) is fixedly connected with a three-way valve (7) through connecting pipes, one end of the three-way valve is fixedly connected with another connecting pipe (7) through connecting pipe, the one end that one set of connecting pipe was kept away from in the fixed intercommunication of seven connecting valve (13) is kept away from the fixed intercommunication of three-way valve and air, another connecting hole department of three-way valve is through the fixed intercommunication of connecting pipe has another three-way valve, the one end of three-way valve is kept away from the fixed intercommunication of connecting pipe has fifth connecting valve (11), the one end that three-way valve was kept away from in fifth connecting valve (11) is kept away from with SF6 gaseous fixed intercommunication, another junction of three-way valve is kept away from through the fixed intercommunication of connecting pipe has fourth connecting valve (9), the one end that three-way valve was kept away from to fourth connecting valve (9) is kept away from the one end fixed intercommunication of helium recovery system (10) with filling.
2. A vacuum chamber helium leak detection recovery system according to claim 1 wherein: the vacuum box (1) comprises a box body (17), sealing rubber strips (18), guide rails (19), a containing vehicle (20) and a limiting device (28), one end of the box body (17) is arranged to be opened, the sealing rubber strips (18) made of rubber materials are paved on the outer wall of the opened surface of the box body (17), symmetrically distributed guide rails (19) are fixedly installed at the bottom of the inner wall of the box body (17), the containing vehicle (20) is clamped at the top of the guide rails (19), the containing vehicle (20) comprises a containing plate (21), a mounting groove (22), limiting rollers (23), fixing threaded nails (24), a mounting seat (25), a supporting rod (26) and a pushing rod (27), the bottom of the containing plate (21) is provided with a mounting groove (22) corresponding to the position of the guide rails (19), the inside of the mounting groove (22) is fixedly provided with limiting rollers (23), the bottom of the limiting rollers (23) is clamped at the top of the guide rails (19), the top of the containing plate (21) is fixedly provided with the supporting rod (25) which is symmetrically distributed through a plurality of groups of fixing threaded nails (24), the supporting rod (27) is fixedly connected with the top of the supporting rod (27), the bottom of the inner wall of the box body (17) is fixedly provided with a limiting device (28) for fixing the holding vehicle (20).
3. A vacuum chamber helium leak detection recovery system according to claim 2 wherein: the limiting device (28) consists of a mounting block (29), a first connecting rod (30), a second connecting rod (31), a third connecting rod (32), a limiting plate (33), a cushion block (34), a working box (35), a sliding plate (36), a reset spring (37), a telescopic rod (38) and a pulley (39), wherein the mounting block (29) is fixedly mounted at the middle shaft of the bottom of the inner wall of the box body (17), the first connecting rod (30) is fixedly mounted on the surface of the mounting block (29), a second connecting rod (31) which is horizontally arranged and a third connecting rod (32) which is obliquely arranged are respectively and fixedly mounted at two ends of the outer surface of the first connecting rod (30), the bottom of the inner wall of the box body (17) is fixedly mounted with the cushion block (34) at the bottom of the second connecting rod (31), the limiting plate (33) is fixedly mounted at one end of the outer surface of the second connecting rod (31) which is far away from the first connecting rod (30), the working box (35) is fixedly mounted below the third connecting rod (32), the inner wall of the working box (35) is slidingly connected with the bottom of the sliding plate (36), the sliding plate (37) is fixedly connected with the bottom of the sliding plate (37), the top fixedly connected with telescopic link (38) of slide (36), the top of telescopic link (38) runs through the top of work box (35) and extends to the outside of work box (35), the surface fixed mounting of telescopic link (38) has pulley (39), the top of pulley (39) contacts with the bottom of third connecting rod (32).
4. A vacuum chamber helium leak detection recovery system according to claim 2 wherein: a plurality of groups of pressure relief holes (40) are formed in the surfaces of the supporting rods (26) and the pushing rods (27) in a penetrating mode.
5. A vacuum chamber helium leak detection recovery system according to claim 1 wherein: the box body (17) is made of stainless steel, and the inner surface of the box body is polished and cleaned after being processed.
6. A vacuum chamber helium leak detection recovery system according to claim 3 wherein: the manufacturing materials of the first connecting rod (30), the second connecting rod (31), the third connecting rod (32), the limiting plate (33), the cushion block (34), the working box (35), the sliding plate (36) and the telescopic rod (38) are all rigid materials.
CN202110230080.XA 2021-03-02 2021-03-02 Vacuum box type helium leak detection recovery system Active CN113028277B (en)

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CN114563135B (en) * 2022-03-02 2023-02-03 苏州中科科美科技有限公司 Full-automatic air tightness detection device and detection method

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