CN220895471U - Film expanding device - Google Patents

Abstract

The utility model provides a film expanding device, which comprises: the device comprises a base, a lifting ring, a membrane expanding ring, a buckling and pressing assembly, a jacking and pressing assembly, a membrane collapsing frame and a driving assembly; the film expansion ring is positioned at one side of the lifting ring facing the first direction, the film expansion ring is fixedly connected with the lifting ring, the surface of the lifting ring is provided with a conveying opening and a mounting groove, and the film expansion ring covers the conveying opening and the mounting groove; the driving assembly is connected with the lifting ring and used for driving the lifting ring to move along a first direction relative to the film collapse frame; the pressing assembly is positioned at the outer side of the lifting ring, the conveying opening is positioned at one end of the lifting ring, which faces the pressing assembly, one end of the pressing assembly is pivoted with the lifting ring along the second direction, the jacking assembly is positioned at one side of the pressing assembly, which is away from the lifting ring, one end of the jacking assembly is fixedly connected with the base, and the other end of the jacking assembly is movably connected with the pressing assembly; the jacking component is used for pushing the buckling component to turn over relative to the lifting ring. The utility model can ensure the uniformity of the film expansion.

Description

Film expanding device

Technical Field

The utility model relates to the technical field of semiconductor packaging, in particular to a film expanding device.

Background

Before picking up the chip, a film expansion process is generally required to be performed on the wafer ring in order to ensure the stability of chip pick-up. Wherein, there is blue membrane on the slice ring, and the chip is attached to on the blue membrane.

The existing film expanding device generally has the operation process that the film expanding station of the lifting ring is horizontally inserted into the film expanding station of the lifting ring through the conveying opening on the lifting ring, so that the film expanding device clamps the film ring between the lifting ring and the film expanding ring along the Z direction. And then, driving the film breaking frame to move relative to the film ring along the Z direction so as to enable the film breaking frame to contact with the blue film on the film ring from the inner side of the lifting ring and drive the chip on the blue film to move relative to the film ring along the Z direction, thereby realizing film expansion treatment on the film ring.

The existing film expanding device can improve the film expanding efficiency compared with manual operation, but the part of the film expanding ring positioned above the conveying opening is always in a suspended state due to the existence of the conveying opening. In this way, the film expansion ring is easy to deform at the position corresponding to the conveying opening in the film expansion treatment process of the film expansion ring, so that the uniformity of film expansion is affected.

Disclosure of utility model

In order to solve the problems, the membrane expanding device provided by the utility model can automatically limit the membrane expanding ring positioned at the conveying opening by arranging the jacking component and the membrane collapsing frame, and prevent the membrane expanding ring from deforming when expanding the membrane of the membrane expanding ring, so that the uniformity of the membrane expanding can be ensured.

The utility model provides a film expanding device, comprising: the device comprises a base, a lifting ring, a membrane expanding ring, a buckling and pressing assembly, a jacking and pressing assembly, a membrane collapsing frame and a driving assembly;

The film expanding ring is positioned at one side of the lifting ring facing the first direction, the film expanding ring is fixedly connected with the lifting ring, a conveying opening and a mounting groove are formed in the surface of the lifting ring facing the first direction, the mounting groove penetrates through the inner side wall of the lifting ring and is used for loading the film carrier ring, the conveying opening is respectively communicated with the outer side wall of the lifting ring and the mounting groove, the film expanding ring covers the conveying opening and the mounting groove, and the film collapsing frame is positioned at the inner side of the lifting ring;

The driving assembly is connected with the lifting ring and is used for driving the lifting ring to move along the linear direction of the first direction relative to the film-breaking frame and driving the film-breaking frame to spread the film on the film-breaking frame when the lifting ring moves away from the first direction;

the pressing assembly is positioned at the outer side of the lifting ring, the conveying opening is positioned at one end of the lifting ring, which faces the pressing assembly, one end of the pressing assembly is pivoted with the lifting ring along the second direction, the jacking assembly is positioned at one side of the pressing assembly, which is away from the lifting ring, one end of the jacking assembly is fixedly connected with the base, and the other end of the jacking assembly is movably connected with the pressing assembly;

The jacking component is used for pushing the buckling component to turn over relative to the lifting ring when the lifting ring moves away from the first direction, so that the other end of the buckling component is buckled on one side of the membrane expanding ring facing the first direction and is abutted against the membrane expanding ring.

Optionally, the film expanding device further includes: an elastic reset piece;

One end of the elastic resetting piece is connected with the buckling component, and the other end of the elastic resetting piece is connected with the lifting ring;

The elastic reset piece is used for driving the buckling and pressing assembly to turn over towards the direction where the jacking and pressing assembly is located.

Optionally, the crimping assembly includes: a buckling plate and a fine adjustment pressing rod;

One end of the buckling plate is pivoted with the lifting ring along the second direction, and the other end of the buckling plate is in threaded connection with the fine adjustment compression bar;

When the buckling plate buckles the membrane expanding ring, the buckling plate is in contact with the membrane expanding ring through the fine adjustment pressing rod.

Optionally, the buckling plate includes: the device comprises a first fixing screw, a buckling sub-plate and a supporting sub-plate;

the buckling sub-plate is provided with a first waist-shaped hole along a first direction, and one end of a first fixing screw penetrates through the first waist-shaped hole to be in threaded connection with one end of the supporting sub-plate so as to fix the buckling sub-plate and the supporting sub-plate;

The other end of the supporting sub-plate is pivoted with the lifting ring along the second direction, and the other end of the buckling sub-plate extends towards the direction of the lifting ring and is in threaded connection with the fine-tuning compression bar.

Optionally, the jacking assembly includes: a support bar and a roller;

One end of the supporting rod is fixedly connected with the base; the roller is in rolling connection with the buckling component and is pivoted with the other end of the supporting rod along the second direction; the roller is used for pushing the buckling component to overturn relative to the lifting ring when the lifting ring moves away from the first direction, so that the other end of the buckling component is buckled on one side of the membrane expanding ring facing the first direction and is abutted against the membrane expanding ring.

Optionally, the jacking assembly further comprises: the fixing seat and the second fixing screw;

The fixing base is provided with a second waist-shaped hole, and one end of a second fixing screw penetrates through the second waist-shaped hole to be in threaded connection with the base so as to fix the fixing base and the base.

Optionally, the jacking assembly further comprises: a locking member;

The fixed seat is provided with a sliding hole towards the surface of the first direction, the supporting rod is connected with the fixed seat in a sliding manner along the linear direction of the first direction through the sliding hole, the locking piece is movably connected with the fixed seat, and the locking piece is used for fixing the supporting rod and the fixed seat.

Optionally, the fixing base includes: the device comprises a mounting part, a supporting part and a holding part;

The support part and the enclasping part are both positioned at one side of the mounting part facing the first direction, the second waist-shaped hole is positioned on the mounting part, one end of the support part is fixedly connected with the mounting part, and the other end of the support part is fixedly connected with one end of the enclasping part, so that the enclasping part is in a suspended state;

The sliding hole is located the enclasping portion, enclasping opening has been seted up to the one end that enclasping portion deviates from the supporting part, enclasping opening runs through enclasping portion and communicates with the sliding hole along first direction, the one end of locking piece pass enclasping opening and with enclasping portion threaded connection, the other end of locking piece is located enclasping portion outside and is used for extruding mutually with enclasping portion.

Optionally, the stent ring comprises: a first arc portion and a second arc portion;

The first arc part and the second arc part are symmetrically fixed at one side of the membrane expansion ring facing the first direction, and the opposite ends of the first arc part and the second arc part are arranged at intervals to form a first avoidance opening;

The lifting ring is provided with a second avoidance opening corresponding to the first avoidance opening, the second avoidance opening penetrates through the lifting ring along the linear direction of the fourth direction, and the fourth direction is perpendicular to the first direction and the second direction.

Optionally, the film expanding device further includes: slide rail and manipulator;

The slide rail is fixedly arranged on the outer side of the lifting ring, the manipulator is connected with the slide rail in a sliding manner along the linear direction of the fourth direction, and the manipulator is used for pulling the sheet ring into or pushing the sheet ring out of the mounting groove through the conveying opening.

According to the film expanding device provided by the embodiment of the utility model, the lifting ring is driven by the driving component to move along the linear direction where the first direction is located, so that the lifting ring can move away from the first direction, and in the process of expanding the film on the film-breaking frame, the pressing component is made to press the outer side wall of the buckling component, so that the buckling component is turned inwards until being buckled on one side of the film-expanding ring towards the first direction and is abutted against the film-expanding ring, and further, the deformation of the part of the film-expanding ring located at the conveying opening in the first direction in the film expanding process can be avoided, and the uniformity of the film expansion is affected.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments or the conventional techniques of the present application, the drawings required for the descriptions of the embodiments or the conventional techniques will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments of the present application, and other drawings may be obtained according to the drawings without inventive effort for those skilled in the art.

FIG. 1 is a schematic structural view of a membrane expanding device according to an embodiment of the present application;

FIG. 2 is a schematic exploded view of a membrane diffusion device according to an embodiment of the present application;

FIG. 3 is a schematic partial structure diagram of a film expanding device in an embodiment of the application when expanding a film on a film ring;

FIG. 4 is a schematic structural view of a membrane expanding device according to an embodiment of the present application;

FIG. 5 is a schematic block diagram of a crimping assembly in accordance with one embodiment of the present application;

FIG. 6 is a schematic partial structure diagram of a film expanding device in an embodiment of the application when expanding a film on a wafer ring;

FIG. 7 is a schematic block diagram of a jacking assembly according to one embodiment of the present application;

Fig. 8 is a schematic partial structure diagram of a film expanding device after loading a wafer ring according to an embodiment of the present application.

Reference numerals:

1. A base; 2. a lifting ring; 21. a transfer opening; 22. a second avoidance opening; 23. a mounting groove; 3. a membrane expanding ring; 31. a first arc portion; 32. a second arc portion; 33. a first avoidance opening; 4. a buckling component; 41. a buckling plate; 411. a first set screw; 412. buckling the sub-board; 413. supporting the sub-board; 414. a first waist-shaped hole; 42. fine-tuning a compression bar; 43. a rotation shaft; 44. a fixed block; 5. a jacking assembly; 51. a support rod; 52. a roller; 53. a step pin; 54. a spacer bush; 55. a fixing seat; 551. a mounting part; 552. a support part; 553. a clasping portion; 554. a slide hole; 555. a second waist-shaped hole; 556. holding the opening tightly; 56. a second set screw; 57. a locking member; 61. a film collapse frame; 62. a drive assembly; 63. a slide rail; 64. a manipulator; 641. a mechanical arm; 642. a clamping part; 65. an elastic reset piece; 7. and a sheet ring.

Detailed Description

In order that the application may be readily understood, a more complete description of the application will be rendered by reference to the appended drawings. Embodiments of the application are illustrated in the accompanying drawings. This application may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein in the description of the application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

Spatially relative terms, such as "under", "below", "beneath", "under", "above", "over" and the like, may be used herein to describe one element or feature's relationship to another element or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use and operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements or features described as "under" or "beneath" other elements would then be oriented "on" the other elements or features. Thus, the exemplary terms "below" and "under" may include both an upper and a lower orientation. Furthermore, the device may also include an additional orientation (e.g., rotated 90 degrees or other orientations) and the spatial descriptors used herein interpreted accordingly.

It will be understood that when an element is referred to as being "fixedly connected" to another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. In contrast, when an element is referred to as being "directly on" another element, there are no intervening elements present. The terms "vertical," "horizontal," "left," "right," and the like are used herein for illustrative purposes only.

As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," and/or the like, specify the presence of stated features, integers, steps, operations, elements, components, or groups thereof, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or groups thereof.

An embodiment of the present utility model provides a film expanding device, referring to fig. 1 and 2, including: base 1, lift ring 2, expand membrane ring 3, withhold subassembly 4, roof pressure subassembly 5, burst membrane frame 61 and drive assembly 62.

Wherein the film expansion ring 3 is positioned at one side of the lifting ring 2 facing the first direction; the film expanding ring 3 is fixedly connected with the lifting ring 2 through screws; the surface of the lifting ring 2 facing the first direction is provided with a conveying opening 21 and an annular mounting groove 23, the mounting groove 23 penetrates through the inner side wall of the lifting ring 2 and is used for loading the slide ring 7, and the conveying opening 21 is respectively communicated with the outer side wall of the lifting ring 2 and the mounting groove 23; the film spreading ring 3 covers the conveying opening 21 and the mounting groove 23; the film breaking frame 61 is positioned on the inner side of the lifting ring 2.

The driving assembly 62 is connected with the lifting ring 2, and the driving assembly 62 is used for driving the lifting ring 2 to move along the linear direction of the first direction relative to the film breaking frame 61, and driving the film breaking frame 61 to spread the film on the film sheet ring 7 when the lifting ring 2 moves away from the first direction. The specific structure of the driving assembly 62 is not described in detail in this embodiment.

The withhold the subassembly 4 and be located the outside of lift ring 2, the transfer opening 21 is located the lift ring 2 towards the one end of withholding the subassembly 4, withhold the one end of subassembly 4 along the second direction and lift ring 2 pin joint, the roof pressure subassembly 5 is located the one side of withholding the subassembly 4 and deviating from lift ring 2, the one end and the base 1 fixed connection of roof pressure subassembly 5, the other end and the withhold the subassembly 4 swing joint of roof pressure subassembly 5.

The jacking component 5 is used for pushing the buckling component 4 to turn over relative to the lifting ring 2 when the lifting ring 2 moves away from the first direction, so that the other end of the buckling component 4 buckles on one side of the expanding ring 3 facing the first direction and is in contact with the expanding ring 3.

The first direction may be any direction such as upward, leftward or forward; the sheet ring 7 comprises a blue film for loading a chip and a frame for fixing the blue film, wherein the outer contour of the frame can be rectangular, circular or a combination thereof; the shape of the mounting groove 23 is adapted to the shape of the tab ring 7; the width of the transfer opening 21 is adapted to the width of the wafer ring 7; the above-described middle stent ring 3 covering the conveying opening 21 and the mounting groove 23 is represented as the stent ring 3 covering the main portions of the conveying opening 21 and the mounting groove 23; the other end of the jacking component 5 is movably connected with the buckling component 4 specifically, namely, a push rod is used as the jacking component 5, one end of the push rod is fixedly connected with the base 1, and the other end of the push rod is abutted against the outer surface of the buckling component 4; or a push rod and a sliding block are used as the top pressing component 5, wherein one end of the push rod is fixedly connected with the base 1, the other end of the push rod is pivoted with the sliding block along the second direction, and the sliding block is slidably connected with the buckling component 4 along the linear direction where the first direction is located through a slideway arranged along the outer surface of the buckling component 4.

In this embodiment, the first direction is the upward direction, the second direction is the forward direction, and the lifting ring 2, the film expansion ring 3 and the sheet ring 7 are all placed in the horizontal direction; the main body shapes of the lifting ring 2, the film expansion ring 3 and the sheet ring 7 are circular, and the opposite ends of the main body are cut off by parallel straight lines to form residual patterns; the film-breaking frame 61 is in a circular ring shape matched with the inner side wall of the lifting ring 2.

Referring to fig. 3, the stent ring 3 includes: a first circular arc portion 31 and a second circular arc portion 32.

Wherein, the first arc portion 31 and the second arc portion 32 are symmetrically fixed at one side of the expanding ring 3 facing the first direction along the horizontal direction, and opposite ends of the first arc portion 31 and the second arc portion 32 are arranged at intervals to form a first avoiding opening 33. It will be appreciated that the stent ring 3 is formed by two symmetrical circular arc plate-like structures, and two ends of the two plate-like structures respectively form an opening, namely a first avoiding opening 33.

The lifting ring 2 is provided with a second avoiding opening 22 at a position corresponding to the first avoiding opening 33. The second avoidance opening 22 penetrates the lifting ring 2 in a linear direction in which the fourth direction is located. Wherein the fourth direction is perpendicular to the first direction and the second direction, and the bottom surface of the second avoiding opening 22 is located below the bottom surface of the conveying opening 21.

In the present embodiment, the fourth direction is a direction toward the right; the first circular arc portion 31 covers the front end main portions of the transfer opening 21 and the mounting groove 23, and the second circular arc portion 32 covers the rear end main portions of the transfer opening 21 and the mounting groove 23. By providing the first avoiding opening 33 and the second avoiding opening 22, the handling of the sheet ring 7 by the robot arm 64 through the stent ring 3 can be facilitated.

Referring to fig. 4, the membrane expanding device further includes: a slide rail 63 and a robot arm 64. Wherein the sliding rail 63 is fixedly arranged on the outer side of the lifting ring 2; the manipulator 64 is slidingly connected with the slide rail 63 along the linear direction of the fourth direction; the robot arm 64 is used to pull the sheet ring 7 into or out of the mounting groove 23 through the transfer opening 21.

In the present embodiment, the slide rail 63 is fixedly disposed on the front side of the base 1; the robot arm 64 includes: a robot arm 641 and a clamping portion 642. One end of the mechanical arm 641 is slidably connected with the sliding rail 63 along the left-right direction, the other end of the mechanical arm 641 is fixedly connected with the clamping portion 642, the clamping portion 642 can automatically open and close to clamp the horizontally placed sheet ring 7 along the up-down direction, and the specific structure of the clamping portion 642 is not limited in this embodiment. Thus, the mechanical arm 641 can drive the clamping part 642 to move between the two first avoiding openings 33 and the second avoiding opening 22, so that the mechanical arm 64 can complete the loading and unloading of the tablet ring 7 only by moving along the left-right direction, the operation is simple, and the complexity of the movement of the mechanical arm 64 is reduced.

Further, the buckling component 4 can be an L-shaped turnover plate. When buckling and pressing the expansion ring 3, the horizontal part of the turnover plate is abutted against the expansion ring 3, and the vertical part of the turnover plate is connected with the jacking component 5.

In this embodiment, with reference to fig. 5 and 6, the crimping assembly 4 includes: a buckling plate 41 and a trimming pressing rod 42. One end of the buckling plate 41 is pivoted with the lifting ring 2 along the second direction. The other end of the buckling plate 41 is connected with a fine adjustment pressing rod 42 in a threaded manner. The buckling plate 41 abuts against the expanding ring 3 through the fine adjustment pressing rod 42 when buckling the expanding ring 3.

Specifically, the fine adjustment pressing rods 42 penetrate through the other end of the buckling plate 41 along the linear direction where the first direction is located, the fine adjustment pressing rods 42 are screws, the number of the fine adjustment pressing rods 42 is two, and the two fine adjustment pressing rods 42 are arranged along the second direction. When the buckling plate 41 buckles the film expansion ring 3, the two fine adjustment compression rods 42 respectively contact with the portions of the first arc portion 31 and the second arc portion 32 suspended above the conveying opening 21. The degree of compaction of the first arc part 31 and the second arc part 32 on the sheet ring 7 can be adjusted by arranging the fine adjustment compression bar 42, so that uniformity of film expansion is ensured.

Further, the crimping plate 41 includes: a first set screw 411, a crimping sub-plate 412 and a support sub-plate 413. The buckling sub-plate 412 is provided with a first waist-shaped hole 414 along a first direction. One end of the first fixing screw 411 passes through the first waist-shaped hole 414 to be screwed with one end of the support sub-plate 413, so as to fix the buckling sub-plate 412 with the support sub-plate 413.

The other end of the supporting sub-plate 413 is pivoted with the lifting ring 2 along the second direction, and the other end of the buckling sub-plate 412 extends towards the direction of the lifting ring 2 and is in threaded connection with the fine adjustment compression bar 42.

In the present embodiment, the number of the first waist-shaped holes 414 and the first fixing screws 411 is two; the buckling sub-plate 412 is an L-shaped turnover plate; when the expanding ring 3 is buckled and pressed, the horizontal part of the turnover plate is used for supporting the fine adjustment pressing rod 42 so that the fine adjustment pressing rod 42 is abutted against the expanding ring 3, and the vertical part of the turnover plate is connected with the jacking component 5; the supporting sub-plate 413 is a T-shaped plate, the bottom end of the supporting sub-plate 413 is pivoted with a rotating shaft 43 along the second direction, two ends of the rotating shaft 43 are fixedly connected with a fixed block 44, the fixed block 44 is fixedly connected with the lifting ring 2, two ends of the supporting sub-plate 413 extend to two first waist-shaped holes 414 respectively, and the two first fixing screws 411 penetrate through the corresponding first waist-shaped holes 414 to be in threaded connection with the supporting sub-plate 413.

The buckling sub-plate 412 is fixedly connected with the supporting sub-plate 413 through the first waist-shaped hole 414 and the first fixing screw 411, and the position of the buckling sub-plate 412 relative to the supporting sub-plate 413 along the linear direction of the first direction can be adjusted, so that the compression degree of the fine adjustment compression rod 42 on the first arc part 31 and the second arc part 32 is adjusted.

Further, the film expanding device further comprises: a resilient return member 65. One end of the elastic reset piece 65 is connected with the buckling component 4, and the other end of the elastic reset piece 65 is fixedly connected with the fixed block 44 through the inserting hole on the fixed block 44. The elastic reset piece 65 is used for driving the buckling and pressing assembly 4 to turn over towards the direction where the jacking and pressing assembly 5 is located.

The elastic restoring member 65 may be a torsion spring or a V-shaped spring. In the present embodiment, the elastic restoring member 65 is a torsion spring, and the number is two.

Specifically, the two torsion springs are respectively located at the front and rear sides of the supporting sub-plate 413, and are both sleeved on the rotation shaft 43. One end of the torsion spring is connected with the buckling sub-plate 412, and the other end of the torsion spring is fixedly connected with the fixed block 44. Through setting up elastic reset piece 65, can be when drive assembly 62 drives lift ring 2 and remove along first direction, need not to manually stir and withhold subassembly 4 to the direction upset of keeping away from expanding membrane ring 3 to the degree of automation of expanding the membrane has been promoted.

Referring to fig. 7 and 8, the pressing assembly 5 may be a single pressing rod to push the buckling assembly 4 to turn over relative to the lifting ring 2 when the lifting ring 2 moves away from the first direction.

In the present embodiment, the pressing assembly 5 includes: a support bar 51 and a roller 52. One end of the supporting rod 51 is fixedly connected with the base 1. The roller 52 is connected with the buckling sub-plate 412 in a rolling way and pivoted with the other end of the supporting rod 51 along the second direction. The roller 52 is used for pushing the buckling component 4 to turn over relative to the lifting ring 2 when the lifting ring 2 moves away from the first direction, so that the other end of the buckling component 4 buckles on one side of the expanding ring 3 facing the first direction and is in contact with the expanding ring 3.

Specifically, the top of the support rod 51 is provided with a step pin 53. The step pin 53 passes through the first roller 52, the first spacer 54, the support rod 51, the second spacer 54 and the second roller 52 in this order, facing away from the second direction. The rear end of the step pin 53 is fixedly connected with a screw to fix the first roller 52, the first spacer 54, the support rod 51, the second spacer 54 and the second roller 52. The spacer 54 is used for isolating the roller 52 from the support rod 51, so as to ensure that the roller 52 can smoothly rotate.

In this embodiment, the roller 52 is a bearing structure. Through set up gyro wheel 52 and withhold subassembly 4 fixed connection on bracing piece 51, can reduce the friction between roof pressure subassembly 5 and support sub-board 413 when the relative bracing piece 51 of support sub-board 413 removes to guarantee the stability of withhold subassembly 4 withhold to the expanding ring 3.

Further, the supporting rod 51 may be fixedly connected to the base 1, or may be movably connected to the base 1 by being matched with other devices. In the present embodiment, the pressing assembly 5 further includes: a fixing seat 55 and a second fixing screw 56.

Specifically, the fixing seat 55 is provided with a second waist-shaped hole 555, and one end of the second fixing screw 56 passes through the second waist-shaped hole 555 to be in threaded connection with the base 1, so as to fix the fixing seat 55 and the base 1. The second waist-shaped hole 555 can be formed along any direction of the horizontal direction.

In this embodiment, the second waist-shaped hole 555 is formed on the fixing seat 55 along the third direction, and the third direction is perpendicular to the first direction and the second direction, i.e. the third direction is consistent with the fourth direction, and is the right direction.

Specifically, the second fixing screw 56 and the second waist-shaped hole 555 are two in number and are respectively disposed at two opposite ends of the fixing seat 55. By arranging the second waist-shaped holes 555 on the fixing seat 55, the specific position of the buckling component 4 for jacking the membrane expanding ring 3 can be conveniently adjusted, so that the buckling component 4 can use the membrane expanding rings 3 with different models.

Further, the jacking assembly 5 further includes: a locking member 57. The locking member 57 is used for fixing the support rod 51 and the fixing base 55.

Specifically, a sliding hole 554 is formed on a surface of the fixing base 55 facing the first direction. The supporting rod 51 is slidably connected with the fixing seat 55 along the linear direction of the first direction through the sliding hole 554, and the locking piece 57 is movably connected with the fixing seat 55.

It should be noted that, the locking piece 57 may be a positioning pin, and the positioning pin is inserted into the fixing seat 55 through a plurality of positioning holes formed in the support rod 51 along the first direction, and the positioning pin is inserted into the fixing seat 55 through a plurality of insertion holes formed in the fixing seat 55.

In this embodiment, the fixing base 55 includes: a mounting portion 551, a supporting portion 552, and a clasping portion 553.

The support portion 552 and the clasping portion 553 are both located above the mounting portion 551. The second waist-shaped hole 555 is located on the mounting portion 551. The bottom end of the supporting portion 552 is fixedly connected with the mounting portion 551, and the top end of the supporting portion 552 is fixedly connected with one end of the clasping portion 553, so that the clasping portion 553 is in a suspended state.

The sliding hole 554 may be located on the clasping portion 553 entirely, or may be located on the supporting portion 552 on the front half, and located on the clasping portion 553 on the rear half, which is not limited in this embodiment.

One end of the clasping portion 553 facing away from the support portion 552 is provided with a clasping opening 556. The clasping opening 556 extends through the clasping portion 553 in the first direction and communicates with the slide hole 554. One end of the locking piece 57 passes through the enclasping opening 556 and is in threaded connection with the enclasping portion 553, and the other end of the locking piece 57 is positioned outside the enclasping portion 553 and is used for being extruded with the enclasping portion 553.

In this embodiment, the locking member 57 is a screw. Wherein, the part pressed by the enclasping part 553 is the head of the screw; the shaft portion of the screw passes through the enclasping portion 553 on one side of the enclasping opening 556 and is in threaded connection with the enclasping portion 553 on the other side of the enclasping opening 556. By defining the structure of the fixing base 55 and providing the locking member 57, the position of the support rod 51 relative to the fixing base 55 along the linear direction of the first direction can be flexibly adjusted.

In an alternative embodiment, the film expanding device further comprises: and a feeding frame. The feeding frame is fixedly arranged on one side of the lifting ring 2, which is away from the third direction. The feed rack is used to provide horizontally placed sheet loops 7.

The working principle of the film expanding device is as follows:

First, the lifting ring 2 is driven so that the mounting groove 23 and the clamp portion 642 are on the same horizontal plane. Then, the driving manipulator 64 moves leftward along the slide rail 63, so that the clamping portion 642 passes through the stent ring 3 through the first avoiding opening 33 and the second avoiding opening 22, and reaches the sheet ring 7 on the feeding frame. Then, the control gripping part 642 grips the right end of the tab ring 7, and drives the robot arm 64 to move the tab ring 7 rightward until the tab ring 7 is completely moved into the mounting groove 23 through the transfer opening 21. Then, the clamping of the tab ring 7 by the clamping portion 642 is released, and the robot 64 is driven to move rightward, so that the clamping portion 642 is separated from the first escape opening 33, thereby completing the installation of the tab ring 7.

Afterwards, the lifting ring 2 is driven to drive the buckling component 4 to move downwards, at the moment, the buckling sub-board moves downwards relative to the jacking component 5, and meanwhile, the supporting sub-board 413 drives the buckling sub-board to turn left under the jacking of the jacking component 5 until the supporting fine-tuning compression bar 42 is in contact with the membrane expanding ring 3, at the moment, the vertical part is in a vertical state, and the roller 52 in the jacking component 5 is positioned on the left side of the vertical part and in contact with the outer surface of the vertical part, as shown in fig. 7. Thereafter, the lifting ring 2 continues to move downwards, the crimping plates 41 move only downwards relative to the jacking assembly 5 and are stationary relative to the stent ring 3.

Meanwhile, in the process of descending the lifting ring 2, the lifting ring 2 moves downwards together with the moving sheet ring 7 and the film expanding ring 3, when the blue film contacts with the top of the film collapsing frame 61, the lifting ring 2 continues to move downwards, and at the moment, the film collapsing frame 61 starts to expand the film of the moving sheet ring 7. After the film expansion is completed, the chip on the film-forming ring 7 is picked up, and then the lifting ring 2 is driven to drive the buckling and pressing assembly 4 to move upwards, when the lifting and pressing assembly rises to a certain height, the supporting sub-plate 413 is pressed against the roller 52 to start to turn left under the action of the elastic reset piece 65 until the lifting and pressing ring 2 moves to an initial position, and at the moment, the buckling and pressing assembly 4 and the supporting assembly are located below the second avoidance opening 22, as shown in fig. 8.

Thereafter, the manipulator 64 is driven to move leftwards again, so that the clamping part 642 clamps the film-expanded sheet ring 7 to move leftwards, and the film-expanded sheet ring 7 is carried away from the lifting ring 2 through the conveying opening 21 until the film-expanded sheet ring 7 moves onto the feeding frame. After the sheet ring 7 is placed on the supply rack, the clamping of the expanded sheet ring 7 by the clamping portion 642 is released, and then the manipulator 64 is driven to move rightward until the clamping portion 642 moves to the right side of the expanded film ring 3, thereby completing unloading of the sheet ring 7.

When the next sheet ring 7 is subjected to film expansion, the sheet ring 7 subjected to film expansion is driven to leave the feeding station in a lifting or translation mode through a driving module on the feeding frame, and the next sheet ring 7 is driven to move to the feeding station. The film can be sequentially spread on the plurality of film rings 7 by the circulation.

The film expanding device is simple in structure, high in automation degree and high in film expanding speed, and the driving assembly 62 drives the lifting ring 2 to move along the linear direction where the first direction is located, so that the lifting ring 2 can move away from the first direction, in the process that the film collapse frame 61 expands the film to the film sheet 7, the jacking assembly 5 jacks the outer side wall of the buckling assembly 4, the buckling assembly 4 is enabled to inwards turn until buckling and pressing one side, facing the first direction, of the film expanding ring 3 and is in contact with the film expanding ring 3, and further, deformation of the part, located at the position of the conveying opening 21, of the film expanding ring 3 to the first direction can be avoided in the process of film expanding, and uniformity of film expanding is affected.

In the description of the present specification, reference to the terms "some embodiments," "other embodiments," "desired embodiments," and the like, means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the application. In this specification, schematic descriptions of the above terms do not necessarily refer to the same embodiment or example.

The technical features of the above embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.

The foregoing examples illustrate only a few embodiments of the application and are described in detail herein without thereby limiting the scope of the application. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the application, which are all within the scope of the application. Accordingly, the scope of protection of the present application is to be determined by the appended claims.

Claims (10)

1. A membrane diffusion device, comprising: the device comprises a base (1), a lifting ring (2), a membrane expanding ring (3), a buckling and pressing assembly (4), a jacking and pressing assembly (5), a membrane collapsing frame (61) and a driving assembly (62);

The film expanding ring (3) is positioned on one side of the lifting ring (2) facing the first direction, the film expanding ring (3) is fixedly connected with the lifting ring (2), a conveying opening (21) and a mounting groove (23) are formed in the surface of the lifting ring (2) facing the first direction, the mounting groove (23) penetrates through the inner side wall of the lifting ring (2) and is used for containing a carrier ring (7), the conveying opening (21) is respectively communicated with the outer side wall of the lifting ring (2) and the mounting groove (23), the film expanding ring (3) covers the conveying opening (21) and the mounting groove (23), and the film collapsing frame (61) is positioned on the inner side of the lifting ring (2);

The driving assembly (62) is connected with the lifting ring (2), and the driving assembly (62) is used for driving the lifting ring (2) to move along the linear direction of the first direction relative to the film breaking frame (61) and driving the film breaking frame (61) to spread the film on the film ring (7) when the lifting ring (2) moves away from the first direction;

The buckling component (4) is located on the outer side of the lifting ring (2), the conveying opening (21) is located at one end, facing the buckling component (4), of the lifting ring (2), one end of the buckling component (4) is pivoted with the lifting ring (2) along a second direction, the jacking component (5) is located at one side, deviating from the lifting ring (2), of the buckling component (4), one end of the jacking component (5) is fixedly connected with the base (1), and the other end of the jacking component (5) is movably connected with the buckling component (4);

The jacking component (5) is used for pushing the buckling component (4) to overturn relative to the lifting ring (2) when the lifting ring (2) moves away from the first direction, so that the other end of the buckling component (4) is buckled and pressed on one side, facing the first direction, of the film expansion ring (3) and is abutted to the film expansion ring (3).

2. The membrane diffusion device of claim 1, further comprising: an elastic restoring member (65);

one end of the elastic reset piece (65) is connected with the buckling component (4), and the other end of the elastic reset piece (65) is connected with the lifting ring (2);

The elastic reset piece (65) is used for driving the buckling and pressing assembly (4) to overturn towards the direction where the jacking and pressing assembly (5) is located.

3. The membrane diffusion device according to claim 1, wherein the crimping assembly (4) comprises: a buckling plate (41) and a fine adjustment pressing rod (42);

One end of the buckling plate (41) is pivoted with the lifting ring (2) along the second direction, and the other end of the buckling plate (41) is in threaded connection with the fine adjustment pressing rod (42);

When the buckling plate (41) buckles the expanding ring (3), the buckling plate is abutted against the expanding ring (3) through the fine-tuning compression rod (42).

4. A membrane diffusion device according to claim 3, wherein the crimping plate (41) comprises: a first fixing screw (411), a buckling sub-plate (412) and a supporting sub-plate (413);

The buckling sub-plate (412) is provided with a first waist-shaped hole (414) along the first direction, and one end of the first fixing screw (411) penetrates through the first waist-shaped hole (414) to be in threaded connection with one end of the supporting sub-plate (413) so as to fix the buckling sub-plate (412) and the supporting sub-plate (413);

The other end of the supporting sub-plate (413) is pivoted with the lifting ring (2) along the second direction, and the other end of the buckling sub-plate (412) extends towards the direction of the lifting ring (2) and is in threaded connection with the fine adjustment pressing rod (42).

5. The membrane diffusion device according to claim 1, wherein the jacking assembly (5) comprises: a support rod (51) and a roller (52);

One end of the supporting rod (51) is fixedly connected with the base (1); the roller (52) is in rolling connection with the buckling component (4) and is pivoted with the other end of the supporting rod (51) along the second direction; the roller (52) is used for pushing the buckling and pressing assembly (4) to overturn relative to the lifting and pressing assembly (2) when the lifting and pressing assembly (2) moves away from the first direction, so that the other end of the buckling and pressing assembly (4) is buckled and pressed on one side, facing the first direction, of the film expansion ring (3) and is abutted to the film expansion ring (3).

6. The membrane diffusion device according to claim 5, wherein the jacking assembly (5) further comprises: a fixing seat (55) and a second fixing screw (56);

The fixing seat (55) is provided with a second waist-shaped hole (555), and one end of the second fixing screw (56) penetrates through the second waist-shaped hole (555) to be in threaded connection with the base (1), so that the fixing seat (55) and the base (1) are fixed.

7. The membrane diffusion device according to claim 6, wherein the jacking assembly (5) further comprises: a locking member (57);

The fixing seat (55) is provided with a sliding hole (554) towards the surface of the first direction, the supporting rod (51) is slidably connected with the fixing seat (55) along the linear direction of the first direction through the sliding hole (554), the locking piece (57) is movably connected with the fixing seat (55), and the locking piece (57) is used for fixing the supporting rod (51) with the fixing seat (55).

8. The membrane diffusion device according to claim 7, wherein the fixing base (55) comprises: a mounting portion (551), a supporting portion (552), and a clasping portion (553);

The supporting part (552) and the enclasping part (553) are both positioned at one side of the mounting part (551) facing the first direction, the second waist-shaped hole (555) is positioned on the mounting part (551), one end of the supporting part (552) is fixedly connected with the mounting part (551), and the other end of the supporting part (552) is fixedly connected with one end of the enclasping part (553) so as to enable the enclasping part (553) to be in a suspended state;

The sliding hole (554) is located on the enclasping portion (553), an enclasping opening (556) is formed in one end, deviating from the supporting portion (552), of the enclasping portion (553), the enclasping opening (556) penetrates through the enclasping portion (553) along the first direction and is communicated with the sliding hole (554), one end of the locking piece (57) penetrates through the enclasping opening (556) and is in threaded connection with the enclasping portion (553), and the other end of the locking piece (57) is located on the outer side of the enclasping portion (553) and is used for being extruded with the enclasping portion (553).

9. The membrane-expanding device according to claim 6, characterized in that the membrane-expanding ring (3) comprises: a first arc part (31) and a second arc part (32);

the first arc part (31) and the second arc part (32) are symmetrically fixed on one side of the film expansion ring (3) facing the first direction, and opposite ends of the first arc part (31) and the second arc part (32) are arranged at intervals to form a first avoidance opening (33);

the lifting ring (2) is provided with a second avoidance opening (22) at a position corresponding to the first avoidance opening (33), the second avoidance opening (22) penetrates through the lifting ring (2) along the linear direction of a fourth direction, and the fourth direction is perpendicular to the first direction and the second direction.

10. The membrane diffusion device of claim 9, further comprising: a slide rail (63) and a manipulator (64);

The sliding rail (63) is fixedly arranged on the outer side of the lifting ring (2), the mechanical arm (64) is connected with the sliding rail (63) in a sliding manner along the linear direction of the fourth direction, and the mechanical arm (64) is used for pulling the sheet ring (7) into or pushing the sheet ring out of the mounting groove (23) through the conveying opening (21).