CN220867577U - Seed crystal placing device for MPCVD diamond growth - Google Patents
Seed crystal placing device for MPCVD diamond growth Download PDFInfo
- Publication number
- CN220867577U CN220867577U CN202322072483.3U CN202322072483U CN220867577U CN 220867577 U CN220867577 U CN 220867577U CN 202322072483 U CN202322072483 U CN 202322072483U CN 220867577 U CN220867577 U CN 220867577U
- Authority
- CN
- China
- Prior art keywords
- mounting
- seed crystal
- groove
- sealing
- diamond growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 20
- 239000010432 diamond Substances 0.000 title claims abstract description 20
- 239000013078 crystal Substances 0.000 title claims abstract description 19
- 238000000259 microwave plasma-assisted chemical vapour deposition Methods 0.000 title claims abstract description 18
- 238000007789 sealing Methods 0.000 claims abstract description 45
- 238000000151 deposition Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000000087 stabilizing effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses a seed crystal placing device for MPCVD diamond growth, which comprises a limiting tank and a sealing cover, wherein a plurality of mounting grooves are arranged on the limiting tank, upper ejector rods are arranged in the upper ejector grooves through an upper ejector mechanism, an upper top plate is fixedly arranged at the upper tail end of the upper ejector rods, a plurality of mounting plates corresponding to the mounting grooves are arranged on the arc-shaped outer wall of the sealing cover, the mounting plates are connected with the limiting tank through a positioning mechanism, an annular plate is arranged on the sealing cover, and the annular plate is connected with the limiting tank through a sealing mechanism. The utility model realizes the convenient disassembly and assembly of the limiting tank relative to the sealing cover by arranging the components such as the mounting groove, the mounting plate, the positioning rod, the positioning hole, the sealing ring and the like, and the disassembly and assembly of the device are not influenced by the phenomenon of sliding wires without a bolt component.
Description
Technical Field
The utility model relates to the technical field of MPCVD diamond growth, in particular to a seed crystal placing device for MPCVD diamond growth.
Background
The MPCVD device, namely the microwave plasma chemical vapor deposition device, is suitable for diamond production, and is used for depositing diamond films on the surfaces of seed crystals of the tray through plasma reaction gas, so that the seed crystals can be placed on the tray according to an array for realizing mass production, and the upper surface temperature of each seed crystal is required to be kept as consistent as possible in the whole growth process for realizing uniform deposition on the surfaces of each seed crystal to obtain the diamond films.
Reference is made to publication (bulletin) No.: the application discloses a seed crystal placing device for MPCVD diamond growth, which belongs to the technical field of MPCVD diamond growth and comprises a limiting tank, wherein four limiting grooves are formed in the inner wall of the limiting tank, stabilizing blocks are slidably connected to the inner wall of each limiting groove, outer trays are fixedly connected to the outer surfaces of the four stabilizing blocks together, and a plurality of identical fixing grooves are formed in the inner wall of each outer tray. Sealing cover and spacing jar quality inspection among this scheme are connected with the help of the bolt assembly, and the bolt assembly frequently dismantles the in-process and easily takes place smooth silk phenomenon, influences the follow-up dismouting of above-mentioned subassembly and uses, need improve it in order to change the current situation, has consequently redesigned a seed crystal device of putting for MPCVD diamond growth here.
Disclosure of utility model
The utility model aims to solve the defects in the prior art, and provides a seed crystal placing device for MPCVD diamond growth.
In order to achieve the above purpose, the present utility model adopts the following technical scheme:
The utility model provides a seed crystal put device for MPCVD diamond grows, includes spacing jar and sealed lid, install a plurality of mounting grooves on the spacing jar, it is a plurality of the mounting groove inner bottom wall all is equipped with the roof groove, it is equipped with the ejector pin through last roof mechanism to go up the roof inslot, it is equipped with the roof to go up the fixed roof to go up the end, sealed arc outer wall is equipped with the mounting panel that the polylith corresponds with the mounting groove, the mounting panel passes through positioning mechanism and is connected with spacing jar, be equipped with the annular slab on the sealing cover, the annular slab passes through sealing mechanism and is connected with spacing jar.
Preferably, the upper ejection mechanism comprises an upper ejection spring arranged in the upper ejection groove, and two ends of the upper ejection spring are respectively and elastically connected with the outer wall of the upper ejector rod and the inner bottom wall of the upper ejection groove.
Preferably, the positioning mechanism comprises a positioning rod arranged on the mounting plate, and a positioning hole corresponding to the positioning rod is formed in the upper end face of the limiting tank.
Preferably, the sealing mechanism comprises a sealing ring arranged on the bottom wall of the annular plate, and a sealing groove corresponding to the sealing ring is arranged on the upper end face of the limiting tank.
Preferably, the vertical section of the mounting groove is L-shaped, and the upper end surface of the annular plate is provided with a handle.
Preferably, the plurality of mounting grooves are distributed at equal intervals relative to the circumference of the limit tank, and the plurality of mounting plates are distributed at equal intervals relative to the circumference of the sealing cover.
The utility model has the beneficial effects that:
1. Through setting up components such as mounting groove, mounting panel, locating lever, locating hole and sealing washer, realized spacing jar for sealed convenient dismouting of lid, and need not with the help of the bolt assembly between the two to do not have smooth silk phenomenon to influence the dismouting of device and use.
2. By arranging the upper ejector rod, the upper top plate and the upper ejector spring, the stability of the positioning rod in the positioning hole is realized.
Drawings
FIG. 1 is a schematic structural view of a limiting tank, a sealing cover and other components;
FIG. 2 is a schematic vertical sectional view of FIG. 1;
FIG. 3 is an enlarged schematic view of the structure at A in FIG. 2;
fig. 4 is a schematic structural view of the upper top plate, the upper ejector rod and the upper ejector spring.
In the figure: 1 a limiting tank, 2 a mounting groove, 3a positioning hole, 4 an upper top plate, 5 an upper ejector rod, 6 a sealing groove, 7 a sealing cover, 8 an annular plate, 9 a sealing ring, 10a handle, 11 a mounting plate, 12 a positioning rod and 13 an upper ejector spring.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments.
Referring to fig. 1-4, a seed crystal placing device for MPCVD diamond growth comprises a limit tank 1 and a sealing cover 7, wherein a plurality of mounting grooves 2 are arranged on the limit tank 1, the inner bottom walls of the mounting grooves 2 are all provided with upper ejector grooves, an upper ejector rod 5 is arranged in each upper ejector groove through an upper ejector rod mechanism, an upper top plate 4 is fixedly arranged at the upper tail end of each upper ejector rod 5, a plurality of mounting plates 11 corresponding to the mounting grooves 2 are arranged on the arc-shaped outer wall of the sealing cover 7, the mounting plates 11 are connected with the limit tank 1 through a positioning mechanism, an annular plate 8 is arranged on the sealing cover 7, and the annular plate 8 is connected with the limit tank 1 through a sealing mechanism.
The upper ejection mechanism comprises an upper ejection spring 13 arranged in the upper ejection groove, two ends of the upper ejection spring 13 are respectively and elastically connected with the outer wall of the upper ejection rod 5 and the inner bottom wall of the upper ejection groove, and the upper ejection spring 13 realizes the upper ejection operation of the upper ejection rod 5.
The positioning mechanism comprises a positioning rod 12 arranged on the mounting plate 11, the upper end surface of the limiting tank 1 is provided with a positioning hole 3 corresponding to the positioning rod 12, and when the positioning rod 12 is positioned in the positioning hole 3, the mounting plate 11 cannot move in the mounting groove 2.
The sealing mechanism comprises a sealing ring 9 arranged on the bottom wall of the annular plate 8, a sealing groove 6 corresponding to the sealing ring 9 is arranged on the upper end face of the limiting tank 1, the depth of the sealing groove 6 is larger than the vertical height of the sealing ring 9, and the sealing groove are matched with each other to ensure tightness.
The mounting groove 2 is L-shaped in vertical section, the upper end surface of the annular plate 8 is provided with a handle 10, and the pressing operation and the rotating lifting operation of the sealing cover 7 relative to the limiting tank 1 are realized by means of the handle 10.
The mounting grooves 2 are distributed at equal intervals in the circumferential direction relative to the limit tank 1, the mounting plates 11 are distributed at equal intervals in the circumferential direction relative to the sealing cover 7, and the mounting plates 11 and the mounting grooves 2 can be connected and separated in a stable fit mode through the equal interval in the circumferential direction.
The present utility model refers to publication (bulletin) No.: CN219195213U is written and only described for the problematic section.
Specific: under the connection state of the limiting tank 1 and the sealing cover 7, the sealing ring 9 is positioned in the sealing groove 6, the mounting plate 11 is positioned in the mounting groove 2 and is close to the position of the positioning hole 3, the positioning rod 12 is inserted into the positioning hole 3, the upper ejection spring 13 realizes the upper ejection operation of the upper ejection rod 5, and the upper ejection plate 4 realizes the upper ejection operation of the mounting plate 11.
When the sealing cover 7 is dismounted relative to the limiting tank 1, the sealing cover 7 is pressed down by the handle 10, the sealing cover 7 drives the mounting plate 11 to descend in the mounting groove 2, the mounting plate 11 presses down the upper plate 4 and drives the positioning rod 12 to be separated from the positioning hole 3, in this state, the sealing cover 7 is rotated relative to the limiting tank 1 by the handle 10, the mounting plate 11 is moved to a position close to the notch of the mounting groove 2, and then the limiting tank 1 can be opened by lifting the sealing cover 7 by the handle 10.
The foregoing is only a preferred embodiment of the present utility model, but the scope of the present utility model is not limited thereto, and any person skilled in the art, who is within the scope of the present utility model, should make equivalent substitutions or modifications according to the technical scheme of the present utility model and the inventive concept thereof, and should be covered by the scope of the present utility model.
Claims (6)
1. The utility model provides a seed crystal put device for MPCVD diamond grows, includes spacing jar (1) and sealed lid (7), its characterized in that, install a plurality of mounting grooves (2) on spacing jar (1), a plurality of diapire all is equipped with the roof groove in mounting groove (2), be equipped with ejector pin (5) through last roof mechanism in the roof groove, the fixed roof (4) that are equipped with of terminal on ejector pin (5), sealed lid (7) arc outer wall is equipped with mounting panel (11) that the polylith corresponds with mounting groove (2), mounting panel (11) are connected with spacing jar (1) through positioning mechanism, be equipped with annular slab (8) on sealed lid (7), annular slab (8) are connected with spacing jar (1) through sealing mechanism.
2. A seed crystal placing device for MPCVD diamond growth according to claim 1, wherein the upper pushing mechanism comprises an upper pushing spring (13) arranged in the upper pushing groove, and two ends of the upper pushing spring (13) are respectively and elastically connected with the outer wall of the upper pushing rod (5) and the inner bottom wall of the upper pushing groove.
3. A seed crystal placement device for MPCVD diamond growth according to claim 2, wherein the positioning mechanism comprises a positioning rod (12) arranged on the mounting plate (11), and the upper end surface of the limiting pot (1) is provided with a positioning hole (3) corresponding to the positioning rod (12).
4. A seed crystal placement device for MPCVD diamond growth according to claim 3, wherein the sealing mechanism comprises a sealing ring (9) arranged on the bottom wall of the annular plate (8), and the upper end surface of the limiting pot (1) is provided with a sealing groove (6) corresponding to the sealing ring (9).
5. A seed crystal placement device for MPCVD diamond growth according to claim 4, wherein the mounting groove (2) is L-shaped in vertical section, and the upper end face of the annular plate (8) is provided with a handle (10).
6. A seed crystal placement device for MPCVD diamond growth according to claim 5, wherein a plurality of the mounting grooves (2) are circumferentially equally spaced relative to the limit pot (1) and a plurality of the mounting plates (11) are circumferentially equally spaced relative to the seal cap (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322072483.3U CN220867577U (en) | 2023-08-03 | 2023-08-03 | Seed crystal placing device for MPCVD diamond growth |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322072483.3U CN220867577U (en) | 2023-08-03 | 2023-08-03 | Seed crystal placing device for MPCVD diamond growth |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220867577U true CN220867577U (en) | 2024-04-30 |
Family
ID=90818598
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322072483.3U Active CN220867577U (en) | 2023-08-03 | 2023-08-03 | Seed crystal placing device for MPCVD diamond growth |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220867577U (en) |
-
2023
- 2023-08-03 CN CN202322072483.3U patent/CN220867577U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant |