CN220867511U - MPCVD equipment cooling substrate table structure - Google Patents

Abstract

The utility model provides a cooling substrate table structure of MPCVD equipment, and belongs to the technical field of microwave plasma chemical vapor deposition. The utility model comprises an external cooling table, a cooling substrate table and a lifting assembly, wherein the cooling substrate table comprises a cooling table and a mounting mechanism, the lower part of the cooling table is connected with a cooling pipe, the mounting mechanism is sleeved in the middle of the cooling pipe, the mounting mechanism comprises a connecting flange and a mounting flange which are connected through a corrugated pipe, the upper part of the mounting mechanism is connected with the lower part of the cooling pipe through the connecting flange and is connected with the bottom of the external cooling table through the mounting flange, the lifting assembly comprises a connecting seat which is connected with the bottom surface of the mounting flange, the lifting seat is arranged below the connecting seat, the cooling pipe penetrates through the connecting seat and the lifting seat and is fixedly connected with the lifting seat, and one side of the bottom surface of the connecting seat is provided with a lifting driving assembly for driving the lifting seat to lift and lower.

Description

MPCVD equipment cooling substrate table structure

Technical Field

The utility model relates to a cooling substrate table structure of MPCVD equipment, and belongs to the technical field of microwave plasma chemical vapor deposition.

Background

Microwave PLASMA CHEMICAL Vapor Deposition (MPCVD) is a method for preparing diamond film on substrate by introducing Microwave generated by Microwave generator into reaction chamber through isolator, ionizing gas molecules in reaction chamber to generate plasma under excitation of Microwave.

At present, the Microwave Plasma Chemical Vapor Deposition (MPCVD) equipment cools a substrate table, but only takes away heat through water inlet and water outlet at the bottom for cooling, so that a plurality of problems exist. The existing mechanism of the substrate table temperature control device by changing water flow mainly comprises a cooling table, an inner cooling pipe, an outer cooling pipe, a CF25 flange, a water outlet and an O-shaped gasket. The upper surface of the cooling table is flush with the plane of the substrate table, the upper end surface of the cooling table is in contact with the molybdenum table for placing crystals, the inner cooling pipe is vertically arranged, the distance between the upper surface and the cooling table is 0.05mm, the cooling table is used for cooling the substrate table by water, the outer cooling pipe is arranged outside the inner cooling pipe and is matched with the inner cooling pipe coaxially, water flows out of the outer cooling pipe, the CF25 flange is connected with the cavity through a standard component to play a fixing role, the water outlet is connected with the tail part of the outer cooling pipe and is used for water flowing out, and the O-shaped gasket plays a role in preventing water leakage between the inner cooling pipe and the water outlet.

The lifting of the substrate table is one of key technologies for controlling diamond cultivation, and the mechanism of the conventional substrate table fine tuning device mainly comprises a cooling substrate table module, a fixed flange, a CF100 copper pad, an ultrahigh vacuum corrugated pipe weldment, an adjusting screw, a servo motor driving module, a bearing, a screw rod, a CF25 copper pad, an adjusting module, a driving flange, a gear, a bearing sleeve, a sealing flange, a guide rail, a motor flange and a motor protection cover.

Firstly, a cooling substrate table module passes through an ultrahigh vacuum corrugated pipe weldment and is fixed on a sealing flange, a CF25 copper pad is arranged on the middle pad and is fixed through bolt connection, then the upper end of ultrahigh vacuum corrugated pipe is installed on a fixing flange, a 3CF100 copper pad is arranged on the middle pad and is fixed through bolt connection, the lower end of ultrahigh vacuum corrugated pipe is fixed on the sealing flange, and a 3CF100 copper pad is arranged on the middle pad and is fixed through bolt connection.

Secondly, a screw rod and a guide rail are fixed on a fixed flange, and then a bearing sleeve is arranged on a driving flange plate, wherein the screw rod penetrates through the bearing sleeve, and the driving flange plate and the fixed flange are connected together and adjusted in relative height.

And installing a servo motor driving module, a bearing and a gear on the motor flange, debugging the position, connecting the motor flange with the fixed flange, and finally realizing the fine tuning function of the substrate table.

The substrate table fine tuning device and the substrate table cooling device mainly have the following defects:

1. The substrate table fine tuning device has large lifting distance and cannot realize the fine tuning function;

2. The substrate table fine adjustment device has large vertical height difference of the substrate table, is not vertical and is easy to eccentric in the vertical moving process;

3. the vertical verticality of the substrate table fine tuning device is difficult to adjust;

4. the substrate table fine adjustment device is difficult to assemble and maintain;

5. the sealing elements in the substrate table fine tuning device are all made of red copper gaskets, and cannot be reused.

6. The existing temperature control device is in rigid connection during installation, cannot adjust the angle, is easy to eccentric during installation and use, and has poor sealing effect, the existing temperature control device is quick in water outlet, the heat exchange area between a substrate table and cooling water is small, and the cooling effect is poor.

Disclosure of utility model

In view of the above-mentioned drawbacks of the prior art, an object of the present utility model is to provide a cooling substrate table structure of an MPCVD apparatus, which is used for solving the problems that the existing cooling substrate table in the prior art cannot perform angle adjustment, and the existing fine adjustment device cannot adjust the substrate table with low precision, and the substrate table is easy to be eccentric during adjustment.

To achieve the above and other related objects, the present utility model provides a structure of an MPCVD apparatus cooling substrate table, including an outer cooling table, a cooling substrate table disposed in the outer cooling table, and a lifting assembly disposed below the outer cooling table for driving the cooling substrate table to lift, the cooling substrate table includes a cooling table and a mounting mechanism, a cavity is disposed in the cooling table, a cooling pipe is connected below the cooling table, the mounting mechanism is sleeved in the middle of the cooling pipe, the mounting mechanism includes a connection flange and a mounting flange, the connection flange and the mounting flange are connected through a bellows, the upper side of the mounting mechanism is connected with the cooling pipe through the connection flange, the lower side of the mounting mechanism is connected with the bottom of the outer cooling table through the mounting flange, the lifting assembly includes a connection seat connected with the bottom surface of the mounting flange, a lifting seat is disposed below the connection seat, the cooling pipe penetrates through the connection seat and the lifting seat and is fixedly connected with the lifting seat, and a lifting driving assembly for driving the lifting seat to lift reciprocally is disposed on one side of the bottom surface of the connection seat.

In one embodiment of the present utility model, the cooling tube comprises an outer cooling tube and an inner cooling tube coaxially disposed, the inner cooling tube extending to above the cooling table interior, the outer cooling tube communicating with the cavity.

In one embodiment of the utility model, the inner cooling tube extends to the upper part of the cooling table and is connected with a disk at the tail end, and the bottom surface of the disk is connected with the cooling table through a supporting rod.

In one embodiment of the utility model, the inner cooling tube cross-sectional area is smaller than the outer cooling tube cross-sectional area.

In an embodiment of the utility model, the lower end of the cooling pipe is connected with the connector, the inner cooling pipe penetrates through the connector, a water outlet is arranged on one side of the connector, the water outlet is communicated with the outer cooling pipe, a plug is arranged at the joint of the lower end of the connector and the inner cooling pipe, and an O-shaped sealing ring and a gasket are arranged between the plug and the connector.

In an embodiment of the utility model, the lifting driving assembly comprises a shell connected with the bottom surface of the connecting seat, a first wedge block is movably arranged in the shell up and down, the first wedge block is connected with the lifting seat, a second wedge block which is matched with the first wedge block and can move freely and horizontally is arranged on one side of the first wedge block, and a motor for driving the second wedge block to move freely and horizontally is arranged on one side of the shell.

In an embodiment of the present utility model, an output end of the motor is connected with a ball screw, a nut matched and connected with the ball screw is arranged inside the second wedge, and the ball screw penetrates through the second wedge and is in threaded connection with the nut.

In an embodiment of the utility model, a through hole for installing the cooling pipe is arranged in the middle of the lifting seat, and a locking nut is arranged at the through hole.

As described above, the MPCVD apparatus cooling substrate table structure of the present utility model has the following advantageous effects:

1. According to the utility model, the adjustable mounting mechanism is arranged in the middle of the cooling substrate table, the angles of the cooling pipes and the cooling table can be arbitrarily adjusted through the corrugated pipes in the mounting mechanism, so that the sealing effect between the cooling table and the outer cooling table is improved, meanwhile, the cross section area of the inner cooling pipe is smaller than that of the outer cooling pipe, the water inlet pressure is larger than the water outlet pressure, the retention time of cooling water in the cavity of the cooling table is long, sufficient heat exchange can be carried out, the inner cooling pipe is fixed by the disc, and when water is inlet, the water is discharged through the inner cooling pipe and then distributed on the disc, so that cooling water is dispersed, the contact area between the cooling water and the cooling table is increased, and the cooling effect is further improved;

2. The lifting assembly is provided with the first wedge block and the second wedge block which are matched, the second wedge block is connected with the motor through the ball screw, the ball screw is driven by the motor to rotate so as to drive the second wedge block to horizontally move, the first wedge block is driven to lift through the horizontal movement of the second wedge block, high-precision lifting is realized, the lifting adjustment accuracy of the cooling substrate table is improved, meanwhile, the guiding assembly is arranged on one side of the lifting driving assembly, the lifting seat is guided by the guiding assembly in the lifting process, the eccentricity of the lifting seat in the lifting process is avoided, the cooling substrate table is ensured to be always vertical in the lifting process, and the lifting assembly is simple in integral structure and easy and convenient to operate.

Drawings

FIG. 1 is a schematic diagram showing a front view of a structure of a cooling substrate stage of an MPCVD apparatus according to an embodiment of the present utility model.

FIG. 2 is a schematic diagram showing the internal structure of a cooled substrate stage of an MPCVD apparatus according to an embodiment of the present utility model.

FIG. 3 is a schematic view showing a structure of a cooled substrate stage of an MPCVD apparatus according to an embodiment of the present utility model.

FIG. 4 is a schematic view showing the internal structure of a cooled substrate stage of an MPCVD apparatus cooling substrate stage structure according to an embodiment of the present utility model.

Wherein, 1, an external cooling table; 2. a lifting assembly; 20. a connecting seat; 21. a nut; 22. a motor; 23. a housing; 24. a second wedge block; 25. a first wedge block; 26. a lifting seat; 27. a lock nut; 3. cooling the substrate table; 30. a cooling table; 31. a connecting flange; 32. a mounting mechanism; 33. a cooling tube; 34. a mounting flange; 35. a water outlet; 36. a connector; 37. a cavity; 38. an outer cooling tube; 39. a disc; 310. an inner cooling tube; 311. a support rod; 312. a bellows; 313. a plug; 4. a guide assembly; 40. a guide rail; 41. a slide seat.

Detailed Description

Further advantages and effects of the present utility model will become apparent to those skilled in the art from the disclosure of the present utility model, which is described by the following specific examples.

Please refer to fig. 1 to 4. It should be understood that the structures, proportions, sizes, etc. shown in the drawings are for illustration purposes only and should not be construed as limiting the utility model to the extent that it can be practiced, since modifications, changes in the proportions, or otherwise, used in the practice of the utility model, are not intended to be critical to the essential characteristics of the utility model, but are intended to fall within the spirit and scope of the utility model. Also, the terms such as "upper," "lower," "left," "right," "middle," and "a" and the like recited in the present specification are merely for descriptive purposes and are not intended to limit the scope of the utility model, but are intended to provide relative positional changes or modifications without materially altering the technical context in which the utility model may be practiced.

Referring to fig. 1, the utility model provides a cooling substrate table structure of an MPCVD apparatus, which comprises an outer cooling table 1, a cooling substrate table 3 arranged in the outer cooling table 1, and a lifting assembly 2 arranged below the outer cooling table 1 and driving the cooling substrate table 3 to lift, wherein the cooling substrate table 3 comprises a cooling table 30 and a mounting mechanism 32, a cavity 37 is arranged in the cooling table 30, a cooling pipe 33 is connected below the cooling table 3, the mounting mechanism 32 is sleeved in the middle of the cooling pipe 33, the mounting mechanism 32 comprises a connecting flange 31 and a mounting flange 34, the connecting flange 31 and the mounting flange 34 are connected through a corrugated pipe 312, the upper part of the mounting mechanism 32 is connected with the cooling pipe 33 through the connecting flange 31, the lower part of the mounting mechanism is connected with the bottom of the outer cooling table 1 through the mounting flange 34, the lifting assembly 2 comprises a connecting seat 20 connected with the bottom surface of the mounting flange 34, a lifting seat 26 is arranged below the connecting seat 20, the cooling pipe 33 penetrates through the connecting seat 20 and the lifting seat 26 and is fixedly connected with the lifting seat 26, a through hole for mounting the cooling pipe 33 is arranged in the middle of the lifting seat 26, a locking nut 27 is arranged at the through hole, the connecting hole is connected with the mounting mechanism 32, the connecting seat is connected with the bottom surface side of the connecting seat 20 is provided with the lifting assembly, and the lifting assembly is driven to lift and reciprocate is arranged;

Referring to fig. 3 to 4, the cooling tube 33 includes an outer cooling tube 38 and an inner cooling tube 310 coaxially arranged, the inner cooling tube 310 extends to the upper part inside the cooling table 30, the outer cooling tube 38 is communicated with the cavity 37, the tail end of the inner cooling tube 310 is connected with a disc 39, the bottom surface of the disc 39 is connected with the cooling table 30 through a supporting rod 311, the cross section area of the inner cooling tube 310 is smaller than that of the outer cooling tube 38, the lower end of the cooling tube 33 is connected with a connector 36, the inner cooling tube 310 penetrates through the connector 36, a water outlet 35 is arranged at one side of the connector 36, the water outlet 35 is communicated with the outer cooling tube 38, a plug 313 is arranged at the joint of the lower end of the connector 36 and the inner cooling tube 310, and an O-shaped sealing ring and a gasket are arranged between the plug 33 and the connector 36;

Referring to fig. 2, the lifting driving assembly includes a housing 23 connected to the bottom surface of the connection seat 20, a first wedge block 25 is movably disposed up and down in the housing 23, the first wedge block 25 is connected to a lifting seat 26, a second wedge block 24 that is matched with the first wedge block 25 and moves freely and horizontally is disposed on one side of the first wedge block 25, a motor 22 that drives the second wedge block 24 to move freely and horizontally is disposed on one side of the housing 23, an output end of the motor 22 is connected to a ball screw, a nut 21 that is matched and connected with the ball screw is disposed in the second wedge block 24, and the ball screw penetrates through the second wedge block 24 and is connected with the nut 21 through threads.

The working principle of the MPCVD equipment cooling substrate table structure is as follows:

The cooling substrate table 3 is inserted and arranged in the middle of the outer cooling table 1 when being installed, the uppermost surface of the cooling table 30 in the cooling substrate table 3 is flush with the plane of the substrate table, the upper end surface is contacted with a molybdenum table for placing crystals, the temperature control device is fixed by a mounting flange 34 in a mounting mechanism 32, when cooling is carried out, cooling water flows upwards into an inner cavity 37 of the cooling table 30 through an inner cooling pipe 310, the cooling water flows in a dispersed manner through a disc 39 to fill the cavity 37, the cooling water is fully contacted with the cooling table 30 for heat exchange, the cooled water after heat exchange enters the inner part of the outer cooling pipe 38 through the joint of the cavity 37 and the outer cooling pipe 38 and then is discharged from a water outlet 35, in the cooling process, the retention time of the cooling water in the inner part of the cavity of the cooling table is long, the cooling water can be subjected to full heat exchange, the cooling effect is improved, and a corrugated pipe is arranged between the connecting flange and the mounting flange, and the angles of the cooling table 30 and the cooling pipe 33 can be freely adjusted through flexible connection of the corrugated pipe, so that the eccentric sealing effect caused by the temperature control device in the cooling process is prevented from being poor;

When the lifting assembly 2 is installed, a cooling pipe 33 penetrating through the lower end of the cooling substrate table 3 penetrates through the through holes on the connecting seat 20 and the lifting seat 26, then the cooling pipe 33 is fixedly connected with the lifting seat 26 through a locking nut 27, the connecting seat 8 is connected with the bottom of the outer cooling table 7, during adjustment, a motor 22 drives a ball screw to rotate, the ball screw is connected with a nut 21 in a second wedge block 24, the second wedge block 24 is driven to horizontally move through the cooperation of the ball screw and the nut 21, the second wedge block 24 is matched with the first wedge block 25, the first wedge block 25 is driven to vertically move in the shell 23 during movement of the second wedge block 24, the lifting seat 26 is driven to vertically move through the vertical movement of the first wedge block 25, so that the cooling substrate table 3 is driven to freely move up and down, and during the movement of the lifting seat 26, the lifting seat 26 is connected with a sliding seat 41 through a rotating shaft, and the sliding seat 41 is driven to vertically move along a guide rail 40 so as to guide the movement of the lifting seat 26.

In summary, the adjustable mounting mechanism is arranged in the middle of the cooling substrate table, the angles of the cooling pipes and the cooling table can be adjusted arbitrarily through the corrugated pipes in the mounting mechanism, so that the sealing effect between the cooling table and the outer cooling table is improved, meanwhile, the cross section area of the inner cooling pipe is smaller than that of the outer cooling pipe, the water inlet pressure is larger than the water outlet pressure, the retention time of cooling water in the cavity of the cooling table is long, sufficient heat exchange can be carried out, the inner cooling pipe is fixed by the disc, and when water is fed, the water is discharged through the inner cooling pipe and distributed on the disc, so that cooling water is dispersed, the contact area between the cooling water and the cooling table is increased, and the cooling effect is further improved; the lifting assembly is provided with the first wedge block and the second wedge block which are matched, the second wedge block is connected with the motor through the ball screw, the ball screw is driven by the motor to rotate so as to drive the second wedge block to horizontally move, the first wedge block is driven to lift through the horizontal movement of the second wedge block, high-precision lifting is realized, the lifting adjustment accuracy of the cooling substrate table is improved, meanwhile, the guiding assembly is arranged on one side of the lifting driving assembly, the lifting seat is guided by the guiding assembly in the lifting process, the eccentricity of the lifting seat in the lifting process is avoided, the cooling substrate table is ensured to be always vertical in the lifting process, and the lifting assembly is simple in integral structure and easy and convenient to operate. Therefore, the utility model effectively overcomes various defects in the prior art and has high industrial utilization value.

The above embodiments are merely illustrative of the principles of the present utility model and its effectiveness, and are not intended to limit the utility model. Modifications and variations may be made to the above-described embodiments by those skilled in the art without departing from the spirit and scope of the utility model. Accordingly, it is intended that all equivalent modifications and variations of the utility model be covered by the claims, which are within the ordinary skill of the art, be within the spirit and scope of the present disclosure.

Claims (8)

1. The MPCVD equipment cooling substrate table structure comprises an external cooling table (1), a cooling substrate table (3) arranged in the external cooling table (1) and a lifting component (2) arranged below the external cooling table (1) and used for driving the cooling substrate table (3) to lift, and is characterized in that the cooling substrate table (3) comprises a cooling table (30) and a mounting mechanism (32), a cavity (37) is arranged in the cooling table (30), a cooling pipe (33) is connected below the cooling table (30), the mounting mechanism (32) is sleeved in the middle of the cooling pipe (33), the mounting mechanism (32) comprises a connecting flange (31) and a mounting flange (34), the connecting flange (31) and the mounting flange (34) are connected through a corrugated pipe (312), the upper part of the mounting mechanism (32) is connected with the bottom of the external cooling table (1) through the mounting flange (34), the lifting component (2) comprises a connecting seat (20) connected with the bottom surface of the mounting flange (34), the lower part (26) is connected with the lifting seat (26) through the lifting seat (26) and the lifting seat (26), and a lifting driving component for driving the lifting seat (26) to lift in a reciprocating manner is arranged on one side of the bottom surface of the connecting seat (20).

2. The MPCVD apparatus cooling substrate table structure of claim 1, wherein: the cooling pipe (33) comprises an outer cooling pipe (38) and an inner cooling pipe (310) which are coaxially arranged, the inner cooling pipe (310) extends to the upper part inside the cooling table (30), and the outer cooling pipe (38) is communicated with the cavity (37).

3. The MPCVD apparatus cooling substrate table structure of claim 2, wherein: the inner cooling pipe (310) extends to the upper part of the inner part of the cooling table (30) and is connected with the disk (39) at the tail end, and the bottom surface of the disk (39) is connected with the cooling table (30) through the supporting rod (311).

4. The MPCVD apparatus cooling substrate table structure of claim 2, wherein: the inner cooling tube (310) has a cross-sectional area that is smaller than the cross-sectional area of the outer cooling tube (38).

5. The MPCVD apparatus cooling substrate table structure of claim 2, wherein: the cooling tube (33) lower extreme connection connector (36), interior cooling tube (310) run through connector (36), connector (36) one side sets up delivery port (35), delivery port (35) intercommunication outer cooling tube (38), connector (36) lower extreme and interior cooling tube (310) junction sets up end cap (313), set up O type sealing washer and gasket between end cap (313) and connector (36).

6. The MPCVD apparatus cooling substrate table structure of claim 1, wherein: the lifting driving assembly comprises a shell (23) connected with the bottom surface of the connecting seat (20), a first wedge block (25) is movably arranged in the shell (23) up and down, the first wedge block (25) is connected with the lifting seat (26), a second wedge block (24) which is matched with the first wedge block (25) and moves freely and horizontally is arranged on one side of the first wedge block, and a motor (22) which drives the second wedge block (24) to move freely and horizontally is arranged on one side of the shell (23).

7. The MPCVD apparatus cooling substrate table structure of claim 6, wherein: the output end of the motor (22) is connected with a ball screw, a nut (21) which is matched and connected with the ball screw is arranged in the second wedge block (24), and the ball screw penetrates through the second wedge block (24) and is in threaded connection with the nut (21).

8. The MPCVD apparatus cooling substrate table structure of claim 1, wherein: a through hole for installing a cooling pipe (33) is formed in the middle of the lifting seat (26), and a locking nut (27) is arranged at the through hole.