CN220825768U - Material taking device and chamfering machine comprising same - Google Patents

Abstract

The utility model relates to the technical field of wafer processing equipment, in particular to a material taking device and a chamfering machine comprising the material taking device. Specifically, the material taking device comprises a lifting assembly, a rotating assembly and a material taking assembly, wherein the rotating assembly comprises a rotary fixing member, a rotary driving mechanism, a rotary shaft and a rotary member, the bottom end and the top end of the rotary shaft are respectively and fixedly connected with the rotary driving mechanism and the rotary member, and the rotary driving mechanism drives the rotary shaft to rotate so as to drive the rotary member and the material taking assembly to rotate. The lifting assembly is used for carrying the rotating assembly and the material taking assembly to move up and down, the rotating assembly is used for carrying the material taking assembly to rotate, so that the material taking device can achieve multi-dimensional material taking, the material taking range of the material taking device is greatly improved, the rotating assembly is arranged to be rotated by the rotating driving mechanism through the rotating shaft and carrying the rotating member and the material taking assembly to rotate, the control precision of the rotating assembly is higher, the material taking assembly is facilitated to smoothly achieve material taking operation, and the working efficiency is improved.

Description

Material taking device and chamfering machine comprising same

Technical Field

The utility model relates to the technical field of wafer processing equipment, in particular to a material taking device and a chamfering machine comprising the material taking device.

Background

Semiconductor wafers are very important materials in various fields such as aerospace, optical fibers, and the like. During processing of wafers, if lapping is directly performed after the wafers are cut from the ingot, chipping is likely to occur, causing wafer scrap, and therefore chamfering of the wafers is required before lapping.

In addition to silicon wafers, silicon carbide wafers, sapphire wafers and the like, when chamfering wafer wafers by the existing equipment, the wafers to be processed need to be removed and transferred onto other devices by the taking device, however, the taking range of the existing taking device is limited, which is not beneficial to the layout of devices (such as edge finding detecting devices, material transferring devices and the like) of the chamfering machine.

Accordingly, there is a need in the art for a new solution to the above-mentioned problems.

Disclosure of utility model

The technical problem that the layout of each device of the chamfering machine is not beneficial is solved in order to solve at least one problem in the prior art, namely, in order to solve the problem that the material taking range of the existing material taking device is limited.

In a first aspect, the application provides a material taking device, which comprises a lifting assembly, a rotating assembly arranged on the lifting assembly and a material taking assembly arranged on the rotating assembly, wherein the lifting assembly is used for moving up and down along a vertical direction with the rotating assembly and the material taking assembly, the rotating assembly is used for rotating along a vertical axis with the material taking assembly, and the material taking assembly is used for taking and placing materials.

In the preferable technical scheme of the material taking device, the rotary assembly comprises a rotary fixing member fixedly connected with the lifting assembly, a rotary driving mechanism fixedly installed on the rotary fixing member, a rotary shaft rotatably installed on the rotary fixing member and a rotary member, the material taking assembly is fixedly installed on the rotary member, the rotary shaft is vertically arranged, the bottom end and the top end of the rotary shaft are respectively fixedly connected with the rotary driving mechanism and the rotary member, and the rotary driving mechanism is used for driving the rotary shaft to rotate so as to drive the rotary member and the material taking assembly to rotate.

In the preferable technical scheme of the material taking device, the material taking device further comprises a drag chain box arranged on the rotary fixing member and a drag chain arranged in the drag chain box, wherein a first end of the drag chain is fixedly connected with the rotary member, a second end of the drag chain is fixedly connected with the drag chain box, a first end of the drag chain is provided with a wire inlet, and a second end of the drag chain is provided with a wire outlet.

In the preferable technical scheme of the material taking device, the drag chain box comprises a side plate and a bottom plate fixedly connected with or integrally arranged with the bottom end of the side plate, the side plate is arranged around the rotating member, the second end of the drag chain is fixedly connected with the inner wall of the side plate, and the bottom plate is fixedly connected with the rotating fixing member.

In the preferable technical scheme of the material taking device, the bottom plate is provided with a through hole for a pipeline to pass through.

In the preferable technical scheme of the material taking device, the rotary member comprises a rotary cylinder and a rotary plate positioned at the top end of the rotary cylinder, the rotary plate is fixedly connected with or integrally arranged with the rotary cylinder, the top end of the rotary shaft penetrates through the bottom plate to be fixedly connected with the rotary plate, the rotary plate is fixedly connected with the material taking assembly, and the first end of the drag chain is fixedly connected with the outer wall of the rotary cylinder.

In the preferable technical scheme of the material taking device, the rotary fixing member comprises a fixing frame fixedly connected with the lifting assembly and a fixing cylinder positioned at the top end of the fixing frame, a part of the rotary shaft is positioned in the fixing cylinder and is rotationally connected with the fixing cylinder, and the rotary driving mechanism is fixedly connected with the fixing frame.

In the preferable technical scheme of the material taking device, the rotary driving mechanism comprises a rotary motor, a speed reducer and a coupler which are sequentially connected, and the coupler is fixedly connected with the bottom end of the rotary shaft.

In a preferred embodiment of the above material taking device, the material taking device further includes an origin switch mounted on the rotation fixing member so as to return to zero calibration of the rotating motor.

In the preferable technical scheme of the material taking device, the lifting assembly comprises a fixed seat, a vertical driving mechanism and a connecting plate, wherein the vertical driving mechanism and the connecting plate are installed on the fixed seat, the connecting plate is fixedly connected with the rotating assembly, and the vertical driving mechanism is connected with the connecting plate and can drive the connecting plate to move up and down along the vertical direction.

The application also provides a chamfering machine, which comprises the material taking device.

Under the condition that the technical scheme is adopted, the material taking device comprises the lifting component, the rotating component and the material taking component, the lifting component can move up and down with the rotating component and the material taking component, the rotating component can rotate with the material taking component, and through the arrangement, the material taking device can achieve multi-dimensional material taking, and the material taking range of the material taking device is greatly improved.

Furthermore, the rotary component is arranged to rotate by the rotary driving mechanism through the rotary shaft with the rotary component and the material taking component, so that the control precision of the rotary component is higher, the material taking component can smoothly realize material taking operation, and the working efficiency is improved.

Furthermore, the utility model can restrict and protect the pipeline of the material taking assembly by arranging the drag chain, thereby improving the reliability of the material taking device.

Still further, the drag chain box of the utility model comprises a side plate and a bottom plate, which is convenient for fixing the drag chain and penetrating the pipeline of the material taking component into the drag chain.

Still further, the utility model facilitates the arrangement of the travelling wires by providing the through holes for the pipelines to pass through on the bottom plate of the drag chain box.

Still further, the rotating member of the utility model is composed of the rotating plate and the rotating cylinder, which is convenient for supporting and fixing the telescopic component and fixing the drag chain.

Still further, the rotary fixing member of the present utility model includes a fixing frame and a fixing cylinder, which is convenient for both fixedly connecting with the lifting assembly and installing the rotary shaft.

Drawings

The technical scheme of the present application is described below with reference to the accompanying drawings. In the accompanying drawings:

FIG. 1 is a schematic view of a reclaimer device of the present application;

FIG. 2 is a schematic view of a lifting assembly of the reclaimer device of the present application;

FIG. 3 is a schematic view of a rotary assembly of the take-off device of the present application;

FIG. 4 is a schematic diagram of a rotating assembly of the take-off device of the present application;

FIG. 5 is a schematic view of a take-off assembly of the take-off device of the present application;

FIG. 6 is a schematic diagram of a second embodiment of a take-off assembly of the take-off device of the present application;

Fig. 7 is a schematic structural view of a material taking assembly of the material taking device of the present application.

List of reference numerals

1. A lifting assembly; 11. a fixing seat; 12. a connecting plate; 13. a lifting motor; 14. a timing belt assembly; 15. a screw rod; 16. a lifting slide block;

2. A rotating assembly; 21. a fixing frame; 22. a rotation shaft; 23. a rotating member; 24. a rotating electric machine; 25. a speed reducer; 26. a coupling; 27. a drag chain box; 28. a drag chain; 29. an origin switch; 231. a rotary drum; 232. a rotating plate; 271. a side plate; 272. a bottom plate;

3. A material taking assembly; 31. a telescopic fixing member; 32. a telescopic driving mechanism; 33. a moving member; 34. a rack; 35. a first rotating shaft; 36. a second rotating shaft; 37. a first transmission mechanism; 38. a second transmission mechanism; 39. a horizontal guide mechanism; 30. a take-out member; 311. a limit switch; 321. a telescopic motor; 322. a third driving pulley; 323. a third driven pulley; 324. a third belt; 325. a translation slider; 331. a moving block; 332. a moving rack; 351. a gear; 371. a first driving pulley; 372. a first driven pulley; 373. a first belt; 381. a second driving pulley; 382. a second driven pulley; 383. a second belt; 391. a horizontal guide rail; 392. a guide block; 301. a body; 302. a connecting block; 3011. and an air suction hole.

Detailed Description

Preferred embodiments of the present utility model are described below with reference to the accompanying drawings. It should be understood by those skilled in the art that these embodiments are merely for explaining the technical principles of the present utility model, and are not intended to limit the scope of the present utility model. For example, although the embodiments described below are described in connection with chamfering machines, the technical solution of the present utility model is equally applicable to other types of processing equipment, such as thinning machines, etc., and such adjustments and changes to the application object do not depart from the principle and scope of the present utility model, and should be limited to the scope of the present utility model.

It should be noted that, in the description of the present application, terms such as "upper", "lower", "left", "right", and the like indicate directions or positional relationships based on the directions or positional relationships shown in the drawings, which are merely for convenience of description, and do not indicate or imply that the apparatus or elements must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present application. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

Furthermore, it should be noted that, in the description of the present application, unless explicitly specified and limited otherwise, the terms "mounted," "configured," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present application can be understood by those skilled in the art according to the specific circumstances.

The chamfering machine comprises a material box and a material taking device, wherein the material box is used for storing wafers, the material taking device can be used for taking out the wafers to be processed on the material box, and the processed wafers can be placed in the material box.

Wherein, be provided with a plurality of storage bits of interval distribution along vertical direction in the magazine, can store a wafer on every storage bit.

As shown in fig. 1, the material taking device of the present utility model includes a lifting assembly 1, a rotating assembly 2 mounted on the lifting assembly 1, and a material taking assembly 3 mounted on the rotating assembly 2, wherein the lifting assembly 1 is used for moving up and down along a vertical direction with the rotating assembly 2 and the material taking assembly 3, the rotating assembly 2 is used for rotating along a vertical axis with the material taking assembly 3, and the material taking assembly 3 is used for taking and placing materials (such as wafers).

When the material is required to be taken from the material box, the rotary component 2 can rotate with the material taking component 3 so as to align the material taking component 3 with the material box, and the lifting component 1 can move up and down with the rotary component 2 and the material taking component 3 so as to align the material taking component 3 with the wafer to be extracted, so that the material taking component 3 can take down the wafer.

As shown in fig. 1 and 2, the lifting assembly 1 of the present utility model includes a fixed seat 11, and a vertical driving mechanism and a connecting plate 12 mounted on the fixed seat 11, wherein the connecting plate 12 is fixedly connected with the rotating assembly 2, and the vertical driving mechanism is connected with the connecting plate 12 and can drive the connecting plate 12 to move up and down along the vertical direction.

Illustratively, as shown in fig. 1 and 2, the fixing base 11 is disposed along a vertical direction, the vertical driving mechanism includes a lifting motor 13, a synchronous belt assembly 14, a screw rod 15 and a lifting slider 16, the connecting plate 12 is fixedly connected or integrally disposed with the lifting slider 16, the screw rod 15 is disposed along the vertical direction, a driving shaft of the lifting motor 13 is connected with a bottom end of the screw rod 15 through the synchronous belt assembly 14 to drive the screw rod 15 to rotate, the screw rod 15 is rotatably mounted on the fixing base 11, and the lifting slider 16 is mounted on the screw rod 15 and can move up and down along the screw rod 15 along with the rotation of the screw rod 15 to drive the rotating assembly 2 and the material taking assembly 3 to move up and down through the connecting plate 12.

It should be noted that the present utility model is not limited to the specific structural form of the vertical driving mechanism, for example, the synchronous belt assembly 14 may be replaced by a gear transmission assembly, or the lifting motor 13 may be directly fixedly connected to the bottom end of the lead screw 15 through a speed reducer, in addition, the lead screw 15 and the lifting slider 16 may be replaced by a gear rack transmission mechanism, etc., and such adjustment and change of the specific structural form of the vertical driving mechanism do not deviate from the principle and scope of the present utility model, and should be limited to the protection scope of the present utility model.

Preferably, as shown in fig. 1 to 3, the rotating assembly 2 of the present utility model includes a rotation fixing member fixedly connected with the lifting assembly 1, a rotation driving mechanism fixedly installed on the rotation fixing member, a rotation shaft 22 rotatably installed on the rotation fixing member, and a rotation member 23, the material taking assembly 3 is fixedly installed on the rotation member 23, the rotation shaft 22 is vertically disposed, and the bottom end and the top end of the rotation shaft 22 are fixedly connected with the rotation driving mechanism and the rotation member 23, respectively, and the rotation driving mechanism is used for driving the rotation shaft 22 to rotate, thereby driving the rotation member 23 and the material taking assembly 3 to rotate.

The rotation fixing member is fixedly connected with the connecting plate 12 of the lifting assembly 1, and the rotation driving mechanism drives the rotation member 23 and the material taking assembly 3 arranged on the rotation member 23 to rotate by driving the rotation shaft 22.

It should be noted that, the present utility model is not limited to the rotation range of the rotation member 23, and those skilled in the art may reasonably define the rotation range of the rotation member 23 according to the positions of the devices of the chamfering machine in practical application, for example, the rotation range of the rotation member 23 may be limited to not more than 90 degrees, or the rotation range of the rotation member 23 may be limited to not more than 180 degrees, or the rotation member 23 may be further rotatable by 360 degrees, etc., which are flexibly adjusted and changed without departing from the principle and scope of the present utility model, and should be limited to the protection scope of the present utility model.

In addition, the present utility model is not limited to the specific configuration of the rotation driving mechanism, and for example, the rotation driving mechanism may be configured as a motor and a speed reducer, or as a motor and a timing belt assembly, or as a motor and a gear assembly, or the like, as long as the rotation shaft 22 can be driven to rotate by the rotation driving mechanism.

Preferably, as shown in fig. 3, the rotary driving mechanism of the present utility model includes a rotary motor 24, a speed reducer 25 and a coupling 26 connected in sequence, the coupling 26 being fixedly connected to the bottom end of the rotary shaft 22.

Illustratively, as shown in fig. 3, the speed reducer 25 is fixedly connected with a rotation fixing member, the rotary motor 24 is installed below the speed reducer 25, the coupling 26 is installed above the speed reducer 25, and the bottom end of the rotary shaft 22 is fixedly connected with the output shaft of the speed reducer 25 through the coupling 26.

Preferably, as shown in fig. 3, the rotation fixing member of the present utility model includes a fixing frame 21 fixedly connected to the lifting assembly 1 and a fixing cylinder (not shown) located at the top end of the fixing frame 21, a portion of the rotation shaft 22 is located in the fixing cylinder and is rotatably connected to the fixing cylinder, and the rotation driving mechanism is fixedly connected to the fixing frame 21.

Illustratively, as shown in fig. 1 and 3, the side of the fixing frame 21 of the rotation fixing member is fixedly connected with the connecting plate 12 of the lifting assembly 1, the bottom of the fixing frame 21 is provided with a fixing hole, the speed reducer 25 is installed in the fixing hole, the top end of the speed reducer 25 extends into the fixing frame 21 through the fixing hole, the top end of the rotation shaft 22 extends out of the top of the fixing cylinder and is fixedly connected with the rotation member 23, the bottom end of the rotation shaft 22 extends out of the bottom of the fixing cylinder and passes through the top of the fixing frame 21 to be fixedly connected with the coupling 26 in the fixing frame 21, the bearing is installed in the fixing cylinder, and the rotation shaft 22 is rotatably connected with the fixing cylinder through the bearing.

Preferably, as shown in fig. 4, the reclaimer device of the present utility model further includes an origin switch 29 mounted on the rotary stationary member for zeroing the rotary motor 24.

Illustratively, an origin switch 29 is mounted on a side wall of the holder 21, the origin switch 29 is a slot type photoelectric, a position where the slot type photoelectric is mounted is an origin position, the rotary shaft 22 is provided with a sensing piece at a position corresponding to the slot type photoelectric, and when the slot type photoelectric detects the sensing piece, the rotary motor 24 is indicated to return to a zero point position.

Preferably, as shown in fig. 3, the material taking device of the present utility model further includes a drag chain box 27 mounted on the rotation fixing member and a drag chain 28 located in the drag chain box 27, a first end of the drag chain 28 is fixedly connected with the rotation member 23, a second end of the drag chain 28 is fixedly connected with the drag chain box 27, a first end of the drag chain 28 has a wire inlet, and a second end of the drag chain 28 has a wire outlet.

The drag chain 28 is used for wiring, the drag chain box 27 is fixedly connected with the top of the fixing frame 21 of the rotary fixing member, and some pipelines (such as a lubricating oil pipe, a vacuum air pipe, a motor wire and the like) of the material taking assembly 3 enter the drag chain 28 from a wire inlet of the drag chain 28 and then extend out from a wire outlet of the drag chain 28, so that the pipelines are restrained and protected through the drag chain 28.

Preferably, as shown in fig. 3, the drag chain case 27 includes a side plate 271 and a bottom plate 272 fixedly connected or integrally provided with a bottom end of the side plate 271, the side plate 271 is provided around the rotary member 23, a second end of the drag chain 28 is fixedly connected with an inner wall of the side plate 271, and the bottom plate 272 is fixedly connected with the rotary fixing member.

The top of the drag chain box 27 is provided with an opening, a circular opening is provided at the center of the bottom plate 272 of the drag chain box 27, the fixing cylinder of the rotation fixing member can just pass through the circular opening, and the bottom plate 272 is fixedly connected with the top surface of the fixing frame 21 of the rotation fixing member.

Preferably, as shown in fig. 3, a through hole (not shown) is provided in the bottom plate 272 of the drag chain case 27 for the passage of a pipeline, which allows the pipeline extending from the outlet of the drag chain 28 to pass through.

Wherein the line extending from the outlet of the drag chain 28 extends downward through a through hole in the base plate 272 and then merges with the motor line of the rotating electric machine 24.

Preferably, as shown in fig. 3, the rotating member 23 of the present utility model includes a rotating drum 231 and a rotating plate 232 located at the top end of the rotating drum 231, the rotating plate 232 is fixedly connected or integrally disposed with the rotating drum 231, the top end of the rotating shaft 22 passes through a bottom plate 272 of the drag chain box 27 and is fixedly connected with the rotating plate 232, the rotating plate 232 is fixedly connected with the material taking assembly 3, and the first end of the drag chain 28 is fixedly connected with the outer wall of the rotating drum 231.

Illustratively, as shown in fig. 3, the top surface of the rotating plate 232 is provided with a flat key, the material taking assembly 3 is provided with a key groove at a position corresponding to the flat key, the flat key on the rotating plate 232 is positioned in the key groove, thereby transmitting power, the rotating cylinder 231 is sleeved outside the fixed cylinder of the rotating fixing member, the first end and the second end of the drag chain 28 are fixedly connected with the rotating cylinder 231 and the side plate 271 of the drag chain box 27, respectively, and the first end of the drag chain 28 can rotate together with the rotating cylinder 231.

Preferably, as shown in fig. 3 to 7, the material taking assembly 3 of the present utility model includes a telescopic fixed member 31 fixedly connected with the rotary assembly 2, and a telescopic driving mechanism 32, a moving member 33, a rack 34, a first rotation shaft 35, a second rotation shaft 36, a first transmission mechanism 37, a second transmission mechanism 38, a horizontal guiding mechanism 39, and a material taking member 30 mounted on the telescopic fixed member 31.

The telescopic driving mechanism 32 is in driving connection with the moving member 33, and can drive the moving member 33 to horizontally move relative to the telescopic fixed member 31, the rack 34 is horizontally arranged and parallel to the moving direction of the moving member 33, the first rotating shaft 35 and the second rotating shaft 36 are both rotatably installed on the moving member 33, the first rotating shaft 35 and the second rotating shaft 36 are both horizontally arranged and are both perpendicular to the rack 34, a first end of the first rotating shaft 35 is provided with a gear 351 meshed with the rack 34, a second end of the first rotating shaft 35 is connected with a first end of the second rotating shaft 36 through a first transmission mechanism 37, a second end of the second rotating shaft 36 is connected with the taking member 30 through a second transmission mechanism 38, the taking member 30 is installed on the moving member 33 and can horizontally move relative to the moving member 33 under the driving of the second transmission mechanism 38, the moving direction of the taking member 30 is consistent with the moving direction of the moving member 33, the horizontal guiding mechanism 39 is installed between the moving member 33 and the taking member 30, and the horizontal guiding mechanism 39 is used for guiding the taking member 30 when the taking member 30 moves relative to the moving member 33.

When the wafer needs to be taken and placed, the telescopic driving mechanism 32 drives the moving member 33 to horizontally move, the moving member 33 drives the gear 351 on the first rotating shaft 35 to rotate along the rack 34, the gear 351 drives the first rotating shaft 35 to rotate, the first rotating shaft 35 drives the second rotating shaft 36 to rotate through the first transmission mechanism 37, the second rotating shaft 36 drives the material taking member 30 to horizontally move through the second transmission mechanism 38, and the material taking member 30 has double-stroke telescopic capacity through two-stage transmission.

Preferably, as shown in fig. 6 and 7, the first transmission mechanism 37 includes a first driving pulley 371, a first driven pulley 372, and a first transmission belt 373 connecting the first driving pulley 371 and the first driven pulley 372, the first driving pulley 371 being fixed at a second end of the first rotation shaft 35, and the first driven pulley 372 being fixed at a first end of the second rotation shaft 36.

In the process of driving the moving member 33 to move by the telescopic driving mechanism 32, the first driving pulley 371 rotates along with the first rotation shaft 35, and rotates with the first driven pulley 372 and the second rotation shaft 36 via the first transmission belt 373.

It should be noted that, the first transmission mechanism 37 is not limited to the pulley transmission set described above, for example, the first transmission mechanism 37 may be configured as a gear transmission set or a sprocket transmission set, and such adjustments and changes to the specific structural form of the first transmission mechanism 37 do not deviate from the principle and scope of the present utility model, and should be limited to the protection scope of the present utility model.

Of course, the present application preferably provides the first transmission mechanism 37 as the pulley transmission set described above, which is convenient for arrangement and can reduce cost.

Preferably, as shown in fig. 5 to 7, the second transmission mechanism 38 includes a second driving pulley 381, a second driven pulley 382, and a second transmission belt 383 connecting the second driving pulley 381 and the second driven pulley 382, the second driving pulley 381 is fixed at a second end of the second rotating shaft 36, the second driven pulley 382 is rotatably mounted on the moving member 33, the second driven pulley 382 and the second driving pulley 381 are spaced apart in a horizontal direction parallel to the rack 34, and the second transmission belt 383 is fixedly connected with the take-out member 30.

During the process of driving the moving member 33 to move by the telescopic driving mechanism 32, the second driving pulley 381 rotates along with the second rotating shaft 36, and moves horizontally with the material taking member 30 by the second driving belt 383.

It should be noted that, the second transmission mechanism 38 is not limited to the pulley transmission set described above, for example, the second transmission mechanism 38 may be configured as a sprocket transmission set, and such modifications and changes to the specific structural form of the second transmission mechanism 38 do not deviate from the principle and scope of the present utility model, and should be limited to the protection scope of the present utility model.

Of course, the present application preferably provides the second drive mechanism 38 as a pulley drive train as described above, which reduces both the weight of the take-off assembly 3 and noise.

Preferably, as shown in fig. 5 to 7, the moving member 33 includes a moving block 331 and a moving frame 332, the bottom of the moving block 331 is fixedly connected to the telescopic driving mechanism 32, the first rotating shaft 35 and the second rotating shaft 36 are both mounted on the moving block 331, one end of the moving frame 332 is fixedly connected to or integrally provided with the moving block 331, and horizontally extends in the moving direction of the material taking member 30, and the second driven pulley 382 is rotatably mounted at the other end of the moving frame 332.

As shown in fig. 5 to 7, the moving frame 332 is horizontally disposed along a moving direction thereof, a rear end of the moving frame 332 is fixedly connected with the moving block 331, a front end of the moving frame 332 extends to a front end of the take-out member 30, the second rotating shaft 36 is positioned obliquely above the first rotating shaft 35, and the second driven pulley 382 is rotatably mounted at the front end of the moving frame 332.

Preferably, as shown in fig. 5 to 7, the horizontal guiding mechanism 39 includes a horizontal guide rail 391 disposed parallel to the rack 34 and a guiding block 392 slidably engaged with the horizontal guide rail 391, the horizontal guide rail 391 is fixedly connected with the moving member 33, and the guiding block 392 is fixedly connected with the material taking member 30.

As shown in fig. 5 to 7, a horizontal guide rail 391 is fixed on the top surface of the moving frame 332, a guide block 392 is fixed on the rear end of the material taking member 30, the guide block 392 is buckled on the horizontal guide rail 391, and when the second driving belt 383 moves horizontally with the material taking member 30, the guide block 392 slides along the horizontal guide rail 391 to ensure that the material taking member 30 can move linearly.

In practical applications, the mounting positions of the horizontal rail 391 and the guide block 392 may be exchanged, for example, the horizontal rail 391 may be fixedly connected to the material taking member 30, and the guide block 392 may be fixedly connected to the moving member 33.

It should be noted that the horizontal guiding mechanism 39 is not limited to the above-described structure of the horizontal guide rail 391 and the guide block 392, for example, the horizontal guiding mechanism 39 may be configured as a sliding block and a sliding slot, and such that the specific structure of the horizontal guiding mechanism 39 may be modified and changed without departing from the principle and scope of the present utility model.

Preferably, as shown in fig. 5 to 7, the material taking member 30 includes a body 301 and a connection block 302, the body 301 is in a plate structure, the front end of the body 301 is provided with an air suction hole 3011, an air vent (not shown in the drawings) communicated with the air suction hole 3011 is arranged in the body 301, the air vent is communicated with a vacuum generator of a chamfering machine, and the connection block 302 fixedly connects the rear end of the body 301 with the second transmission mechanism 38.

Illustratively, the body 301 is horizontally disposed along the moving direction thereof, the front end of the body 301 is provided with a plurality of air suction holes 3011, the rear end of the body 301 is fixedly connected with the connecting block 302, the connecting block 302 is fixedly connected with the second driving belt 383 of the second driving mechanism 38, the guide block 392 of the horizontal guiding mechanism 39 is fixedly connected with the connecting block 302, the ventilation slot inside the body 301 is communicated with the vacuum generator through an air pipe, and after the vacuum generator is started, the wafer can be adsorbed at the front end of the body 301.

Preferably, as shown in fig. 5 to 7, the telescopic driving mechanism 32 of the present application includes a telescopic motor 321, a third driving pulley 322, a third driven pulley 323, a third driving belt 324, a horizontal screw (not shown in the drawings), and a translation slider 325 mounted on the horizontal screw, the translation slider 325 is fixedly connected with the moving member 33, the third driving pulley 322 is fixed on a driving shaft of the telescopic motor 321, the third driven pulley 323 is fixed at one end of the horizontal screw, the third driving belt 324 connects the third driving pulley 322 with the third driven pulley 323, the horizontal screw is rotatably mounted on the telescopic fixing member 31 and is disposed in parallel with the rack 34, and the translation slider 325 can move along the horizontal screw with the rotation of the horizontal screw.

Illustratively, the telescopic motor 321 is fixed at the front end of the telescopic fixed member 31, and is disposed side by side with the horizontal screw, the top surface of the translation slider 325 is fixedly connected with the bottom surface of the moving block 331 of the moving member 33, the telescopic motor 321 drives the third driving pulley 322 to rotate, the third driving pulley 322 drives the third driven pulley 323 and the horizontal screw to rotate through the third driving belt 324, and the translation slider 325 moves back and forth along the horizontal screw with the movement of the moving member 33 along with the rotation of the horizontal screw.

It should be noted that, the telescopic driving mechanism 32 of the present utility model is not limited to the specific structural form described above, for example, the "third driving pulley 322+third driven pulley 323+third driving belt 324" may be replaced by a gear driving group or a sprocket rotating group, and the "horizontal screw+translation slider 325" may be replaced by a rack-and-pinion driving mechanism, etc., and such modifications and changes to the specific structural form of the telescopic driving mechanism 32 do not deviate from the principle and scope of the present utility model, and should be limited to the protection scope of the present utility model.

Of course, the telescopic drive mechanism 32 is preferably arranged in the above-described structural form, so that the arrangement is convenient and the cost is reduced.

Preferably, as shown in fig. 6 and 7, the extracting device of the present application further includes a limit switch 311 mounted on the telescopic fixing member 31 to limit the extracting member 30.

As shown in fig. 6 and 7, the limit switch 311 is a slot type photoelectric device, the slot type photoelectric device is mounted at the tail of the telescopic fixed member 31, the moving block 331 of the moving member 33 is provided with a sensing piece, and if the slot type photoelectric device detects the sensing piece during the retraction of the material taking member 30, the telescopic motor 321 is stopped to prevent the material taking member 30 from falling out of the horizontal guide rail 391.

Furthermore, those skilled in the art will appreciate that while some embodiments described herein include some features but not others included in other embodiments, combinations of features of different embodiments are meant to be within the scope of the application and form different embodiments. For example, in the claims of the present application, any of the claimed embodiments may be used in any combination.

Thus far, the technical solution of the present application has been described in connection with the preferred embodiments shown in the drawings, but it is easily understood by those skilled in the art that the scope of protection of the present application is not limited to these specific embodiments. Equivalent modifications and substitutions for related technical features may be made by those skilled in the art without departing from the principles of the present application, and such modifications and substitutions will fall within the scope of the present application.

Claims (10)

1. A material taking device is characterized by comprising a lifting component, a rotating component arranged on the lifting component and a material taking component arranged on the rotating component,

The lifting assembly is used for moving up and down along the vertical direction with the material taking assembly, the rotating assembly is used for rotating around the vertical axis with the material taking assembly, and the material taking assembly is used for taking and placing materials.

2. The take out apparatus of claim 1, wherein the rotating assembly comprises a rotating fixed member fixedly connected with the lifting assembly, a rotary driving mechanism fixedly mounted on the rotating fixed member, a rotating shaft rotatably mounted on the rotating fixed member, and a rotating member, the take out assembly is fixedly mounted on the rotating member, the rotating shaft is vertically arranged, the bottom end and the top end of the rotating shaft are fixedly connected with the rotary driving mechanism and the rotating member respectively, and the rotary driving mechanism is used for driving the rotating shaft to rotate so as to drive the rotating member and the take out assembly to rotate.

3. The reclaimer device of claim 2, further comprising a drag chain box mounted on the rotating stationary member and a drag chain positioned within the drag chain box, a first end of the drag chain being fixedly connected to the rotating member, a second end of the drag chain being fixedly connected to the drag chain box, the first end of the drag chain having a feed inlet, the second end of the drag chain having a feed outlet.

4. A pick-up device as claimed in claim 3, wherein the drag chain case comprises a side plate and a bottom plate fixedly connected to or integrally provided with a bottom end of the side plate, the side plate is provided around the rotary member, a second end of the drag chain is fixedly connected to an inner wall of the side plate, and the bottom plate is fixedly connected to the rotary fixing member.

5. The take-off device of claim 4, wherein the base plate is provided with a through hole through which the pipeline passes.

6. The take out apparatus of claim 4, wherein the rotating member comprises a rotating drum and a rotating plate positioned at the top end of the rotating drum, the rotating plate is fixedly connected or integrally arranged with the rotating drum, the top end of the rotating shaft penetrates through the bottom plate and is fixedly connected with the rotating plate, the rotating plate is fixedly connected with the take out assembly, and the first end of the drag chain is fixedly connected with the outer wall of the rotating drum.

7. The material taking device according to claim 2, wherein the rotary fixing member comprises a fixing frame fixedly connected with the lifting assembly and a fixing cylinder positioned at the top end of the fixing frame, a part of the rotary shaft is positioned in the fixing cylinder and is rotationally connected with the fixing cylinder, and the rotary driving mechanism is fixedly connected with the fixing frame; and/or

The rotary driving mechanism comprises a rotary motor, a speed reducer and a coupler which are sequentially connected, and the coupler is fixedly connected with the bottom end of the rotary shaft.

8. The take-off device of claim 7, further comprising an origin switch mounted on the rotating stationary member for return-to-zero calibration of the rotating electric machine.

9. The take out device of any one of claims 1 to 8, wherein the lifting assembly comprises a fixed base, and a vertical drive mechanism and a connecting plate mounted on the fixed base, the connecting plate is fixedly connected with the rotating assembly, and the vertical drive mechanism is connected with the connecting plate and can drive the connecting plate to move up and down in a vertical direction.

10. A chamfering machine, characterized in that it comprises a material taking device according to any one of claims 1 to 9.