CN220767237U - Single crystal furnace system - Google Patents

Abstract

The application relates to a single crystal furnace system, which comprises a furnace table device, a circulating pipeline, a cooling device, an air extracting device and a detection module. The furnace table device is provided with an air inlet and a first air outlet, one end of the circulating pipeline is communicated with the air inlet, the other end of the circulating pipeline is communicated with the first air outlet, the cooling device is arranged outside the furnace table device, the air extracting device is arranged on the circulating pipeline and used for extracting air in the furnace table device, so that the air flows back into the furnace table device from the circulating pipeline after being cooled by the cooling device, and the air can be additionally introduced into the furnace from the air inlet, so that more air flows in the circulating pipeline to participate in cooling, and a better cooling effect can be achieved. The detection module is arranged in the cooling device and comprises a gas temperature detector for detecting the temperature of gas in the circulating pipeline, so that a worker can know the cooling temperature in the furnace in real time, the time for disassembling the furnace is precisely controlled, the time for disassembling the furnace is not required to be judged through experience, and dangers in the furnace disassembling process can be avoided.

Description

Single crystal furnace system

Technical Field

The application relates to the technical field of solar photovoltaic, in particular to a single crystal furnace system.

Background

The single crystal furnace is equipment for producing single crystal silicon rod by using Czochralski method under the conditions of inert gas (nitrogen and helium are mainly) environment, using graphite heater to melt polycrystalline material of polycrystalline silicon, etc., and maintaining the temperature in single crystal furnace at about 1400 deg.C, at the same time maintaining the vacuum degree in single crystal furnace at about 10 Torr, and under the conditions of high temperature and high vacuum degree. Because devices such as electrodes and crucible sides in the single crystal furnace are easy to oxidize under high temperature conditions, when the temperature in the single crystal furnace is high, the vacuum condition in the single crystal furnace needs to be maintained unchanged, air is prevented from entering the single crystal furnace, the devices such as the electrodes and the crucible sides in the single crystal furnace are prevented from being oxidized under the high temperature conditions, and after the single crystal furnace is naturally cooled and the temperature is reduced to below 300 ℃, the single crystal furnace is disassembled, so that preparation is made for the production of the next heat.

However, when the single crystal furnace is cooled by adopting an air cooling mode in the prior art, the inert gas in the furnace is simply led out into a cooling pipe to be cooled in the furnace stopping process and then returned to the furnace again, so that the cooling effect is poor, the cooling temperature in the furnace cannot be automatically detected by the existing single crystal furnace system, meanwhile, the relation between the temperature in the furnace and the time is not accurately influenced by the amount of the residual materials in the furnace, the time of stopping the furnace can be up to 300 ℃ or below only by means of manual experience, or a large number of dangerous experiments are summarized, and the furnace can be disassembled when the temperature is not up to 300 ℃ or below, so that unnecessary dangers can be caused.

Disclosure of Invention

Accordingly, it is necessary to provide a single crystal furnace system capable of solving the problems that the cooling effect is poor and the risk is easily generated when the furnace is disassembled due to the temperature in the furnace, which is determined empirically, when the conventional single crystal furnace system is cooled by an air cooling method.

According to one aspect of the present application, there is provided a single crystal furnace system comprising:

the stove device is provided with an air inlet and a first air outlet which are communicated with each other;

one end of the circulating pipeline is communicated with the air inlet, and the other end of the circulating pipeline is communicated with the first air outlet;

a cooling device provided outside the hearth device, for cooling the gas discharged from the inside of the hearth device;

the air extracting device is arranged in the circulating pipeline and is used for extracting the gas in the furnace table device so that the gas flows back into the furnace table device from the circulating pipeline after being cooled by the cooling device;

the detection module is arranged in the cooling device and comprises a gas temperature detector, and the gas temperature detector is used for detecting the temperature of gas in the circulating pipeline.

In one embodiment, the furnace platform device is further provided with a second air outlet communicated with the air inlet, and the single crystal furnace system further comprises a first valve used for controlling the opening and closing of the second air outlet.

In one embodiment, the cooling device has an input end and an output end disposed opposite each other, and the output end is connected to the output end and communicates with the first air outlet, so that the first valve is disposed in parallel with the cooling device.

In one embodiment, the input end and the output end of the cooling device are respectively provided with a second valve, and the second valve or the first valve can be selectively opened so that the gas in the stove table device can be selectively discharged to the external environment from the second gas outlet through the first valve or can flow into the circulating pipeline through the second valve and the cooling device.

In one embodiment, the stove top device comprises a stove top and an exhaust assembly connected to the stove top, and the first air outlet and the second air outlet are respectively formed in the end part, far away from the stove top, of the exhaust assembly.

In one embodiment, the exhaust assembly comprises at least two sub-exhaust pipes and a main exhaust pipe, all the sub-exhaust pipes are arranged in parallel, one end of each sub-exhaust pipe is connected with the stove table, the other end of each sub-exhaust pipe is converged at one end of the main exhaust pipe, the other end of the main exhaust pipe is provided with a first air outlet and a second air outlet, and the first valve is arranged in the main exhaust pipe.

In one embodiment, the cooling device is configured to cool the gas by circulating water; the detection module further comprises a water flow detector and/or a water temperature detector;

the water flow detector is used for detecting the flow of the circulating water; the water temperature detector is used for detecting the water temperature of the circulating water.

In one embodiment, the single crystal furnace system further comprises a control module, wherein the control module is respectively and communicatively connected with the detection module, the cooling device and the air extraction device; the control module can control the air extractor to be closed when the temperature of the gas in the circulating pipeline is reduced to a set value, or control the flow rate of the circulating water based on the flow rate of the circulating water, or control the cooling device to be closed when the water temperature of the circulating water is higher than the set value.

In one embodiment, the detection module further comprises a vacuum degree detector for detecting the pressure in the oven table device and the air pressure in the circulating pipeline; the single crystal furnace system further comprises an alarm module which is in communication connection with the detection module and is used for alarming when the pressure in the furnace platform device exceeds a set value or the circulating pipeline leaks air.

In one embodiment, the circulating pipeline is further provided with a filter tank, the filter tank is arranged at the downstream of the cooling device and at the upstream of the air extracting device, and the filter tank is used for filtering the cooled gas.

According to the single crystal furnace system, the air inlet and the first air outlet are formed in the furnace table device, and the circulating pipeline is arranged, so that one end of the circulating pipeline is communicated with the air inlet, and the other end of the circulating pipeline is communicated with the first air outlet, and when the furnace is stopped, air can be additionally introduced into the furnace from the air inlet, so that more air flows in the circulating pipeline to participate in cooling after being cooled by the cooling device, and a better cooling effect can be achieved; and through setting up detection module in cooling device, utilize detection module's gas temperature detector real-time detection circulating line internal gas's temperature, can make the staff learn the cooling temperature in the stove in real time to the timing of accurate control tear open the stove, need not to judge the time of tearing open the stove through experience, so can ensure that the stove is just tearing open to the stove temperature below reaching 300 ℃, avoided taking place unnecessary danger in tearing open the stove in-process.

Drawings

Fig. 1 is a schematic structural diagram of a single crystal furnace system according to an embodiment of the present disclosure.

Fig. 2 is a schematic structural diagram of an exhaust assembly according to an embodiment of the present disclosure.

Reference numerals illustrate:

10. a single crystal furnace system; 100. a hearth device; 101. an air inlet; 102. a first air outlet; 103. a second air outlet; 110. a stove top; 120. an exhaust assembly; 121. a sub-exhaust pipe; 122. a main exhaust pipe; 200. a circulation pipe; 300. a cooling device; 400. an air extracting device; 500. a first valve; 600. a filter tank.

Detailed Description

In order to make the above objects, features and advantages of the present application more comprehensible, embodiments accompanied with figures are described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. This application is, however, susceptible of embodiment in many other forms than those described herein and similar modifications can be made by those skilled in the art without departing from the spirit of the application, and therefore the application is not to be limited to the specific embodiments disclosed below.

In the description of the present application, it should be understood that, if there are terms such as "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., these terms refer to the orientation or positional relationship based on the drawings, which are merely for convenience of description and simplification of description, and do not indicate or imply that the apparatus or piece referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present application.

Furthermore, the terms "first," "second," and the like, if any, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present application, the terms "plurality" and "a plurality" if any, mean at least two, such as two, three, etc., unless specifically defined otherwise.

In this application, unless explicitly stated and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly. For example, the two parts can be fixedly connected, detachably connected or integrated; can be mechanically or electrically connected; either directly or indirectly, through an intervening medium, may be in communication between two members or in an interactive relationship therebetween, unless otherwise specifically indicated. The specific meaning of the terms in this application will be understood by those of ordinary skill in the art as the case may be.

In this application, unless expressly stated or limited otherwise, the meaning of a first feature being "on" or "off" a second feature, and the like, is that the first and second features are either in direct contact or in indirect contact through an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.

It will be understood that if an element is referred to as being "fixed" or "disposed" on another element, it can be directly on the other element or intervening elements may also be present. If an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used herein, if any, are for descriptive purposes only and do not represent a unique embodiment.

The application provides a single crystal furnace system which is used for producing a single crystal silicon rod by a Czochralski method under the conditions of high temperature and high vacuum degree. It will be appreciated that in other embodiments, the single crystal furnace system of the present application is not limited to producing single crystal silicon rods, but may also produce other types of products, and is not limited herein.

Referring to fig. 1, fig. 1 shows a single crystal furnace system 10 in an embodiment of the present application, where the single crystal furnace system 10 provided in the embodiment of the present application includes a furnace table device 100, a circulation pipeline 200, a cooling device 300, an air extraction device 400, and a detection module (not shown in the drawing), where the furnace table device 100 has an air inlet 101 and a first air outlet 102 that are oppositely disposed, one end of the circulation pipeline 200 is connected to the air inlet 101, the other end is connected to the first air outlet 102, the cooling device 300 is disposed outside the furnace table device 100, the air extraction device 400 is disposed on the circulation pipeline 200, and may be a dry pump or other type of pump, inert gas (such as argon) used in the furnace table device 100 to protect graphite pieces in the furnace from oxidation can be exhausted from the furnace table device 100 under the extraction action of the air extraction device 400, and after cooled by the cooling device 300, the inert gas flows back into the furnace table device 100 through the circulation pipeline 200, so as to achieve the purpose of cooling the furnace table device 100, thereby facilitating the subsequent furnace disassembly for preparing for the next production. The detection module is disposed in the cooling device 300 and is used for detecting the working state and the working parameters of the single crystal furnace system 10 in real time, so that an operator can accurately control the furnace stopping time and the cooling time.

In some embodiments, the furnace stage device 100 comprises a furnace stage 110 and an exhaust assembly 120 connected to the furnace stage 110, wherein the first air outlet 102 is formed at the end of the exhaust assembly 120 away from the furnace stage 110, in addition, the end of the exhaust assembly 120 away from the furnace stage 110 is further provided with a second air outlet 103, and the purpose of the second air outlet 103 is to enable inert gas to continuously flow into the furnace stage 110 from the air inlet 101 of the furnace stage device 100 and flow out from the second air outlet 103 when the single crystal furnace system 10 is in operation, so that graphite pieces in the furnace stage 110 can be protected from oxidization, and impurities generated in the crystal pulling process can be taken away. Preferably, the exhaust assembly 120 is provided with a first valve 500.

In one embodiment, the first valve 500 is disposed in the exhaust assembly 120, and the first valve 500 has a piston rod (not shown) that can extend and retract relative to the exhaust assembly 120, and when the piston rod extends, the second air outlet 103 can be closed, and the inlet end of the first valve 500 is also closed, and when the piston retracts, the second air outlet 103 can be opened, and the inlet end is also opened. In other embodiments, the first valve 500 may be a ball valve with the above function, or may be any other valve with the above function, so long as the opening and closing of the second air outlet 103 can be controlled.

Thus, when the single crystal furnace system 10 is pulling crystal normally, the first valve 500 is opened, the air extractor 400 is closed, the air enters the furnace stage 110 from the air inlet 101, and then is discharged from the second air outlet 103, so that the graphite piece in the furnace stage 110 is protected in a flowing manner, and the air hardly flows into the circulation pipeline 200 due to the closing of the air extractor 400. When the furnace platform 110 needs to be cooled, the air can be additionally introduced into the furnace from the air inlet 101, the air extractor 400 is started, meanwhile, the first valve 500 is closed, the air is not discharged from the second air outlet 103, but passes through the cooling device 300, is cooled by the cooling device 300, enters the circulating pipeline 200 from the first air outlet 102, and flows back to the furnace platform 110 from the air inlet 101, so that the temperature in the furnace platform 110 can be reduced. In the above-mentioned circulation cooling process, more gas flows in the circulation pipe 200 to participate in cooling after being cooled by the cooling device 300, so that a better cooling effect can be achieved.

Specifically, as shown in fig. 2, the exhaust assembly 120 includes two sub-exhaust pipes 121 and a main exhaust pipe 122 that are arranged in parallel, one end of each sub-exhaust pipe 121 is connected to the bottom of the furnace table 110, the other end of each sub-exhaust pipe 121 merges with one end of the main exhaust pipe 122, a first air outlet 102 and a second air outlet 103 are provided at the other end of the main exhaust pipe 122, and a first valve 500 is provided in the main exhaust pipe 122.

It is understood that the number of the sub-exhaust pipes 121 is not limited, and more than two sub-exhaust pipes 121 can be provided, so that by arranging at least two sub-exhaust pipes 121, the gas can be ensured to enter from the gas inlet 101, and the gas flow is more stable when the gas is exhausted from the second gas outlet 103, so that the gas flow is prevented from being unstable due to the fact that only one exhaust pipe is arranged, and the crystal rod shakes in the crystal pulling process, thereby affecting the crystal pulling effect.

It should be further understood that the structure of the furnace stage device 100 is not limited to the structure of the foregoing embodiment, and may be other structures, for example, the furnace stage 110 itself may be provided with the first air outlet 102 and the second air outlet 103, and may be provided with a channel for exhausting air, or the furnace stage device 100 may be provided with only the first air outlet 102 and not the second air outlet 103, and when the furnace stage device 100 pulls the crystal, the gas does not flow in the furnace stage 110, so long as the graphite member in the furnace stage 110 is prevented from being oxidized, and the structure is not particularly limited herein.

In some embodiments, the cooling device 300 is connected to the main exhaust pipe 122 of the oven stage device 100 and is disposed in parallel with the first valve 500. Specifically, the cooling device 300 has an input end and an output end disposed opposite to each other, the first valve 500 has an inlet end and an outlet end disposed opposite to each other, the input end of the cooling device 300 is connected to the inlet end of the first valve 500, the output end of the cooling device 300 is connected to the outlet end of the first valve 500, and the output end of the cooling device 300 communicates with the first air outlet 102, so that the first valve 500 is disposed in parallel with the cooling device 300. In one embodiment, the cooling device 300 is internally circulated with circulating water such that the cooling device 300 is configured to cool the gas exhausted from the oven table 110 by means of circulating water, and the cooled gas is cooled by the circulating water and then returned to the oven table 110 through the circulating pipe 200 to complete the temperature reduction in the oven table 110.

Preferably, a second valve (not shown) is further disposed at the input end and the output end of the cooling device 300, and the second valve may be a solenoid valve, or may be another type of valve, and the second valve or the first valve 500 may be selectively opened, so that the gas in the oven apparatus 100 may be selectively discharged from the second gas outlet 103 to the external environment through the first valve 500, or flow into the circulation pipe 200 through the second valve and the cooling device 300.

Thus, when pulling crystal, the first valve 500 is opened, the second valve is closed, and after gas is exhausted from the furnace table 110, the gas can only be exhausted from the second gas outlet 103 through the first valve 500; when the furnace platform 110 is cooled after the furnace is stopped, the first valve 500 is closed, the second valve is opened, the gas can bypass the first valve 500, and the gas flows into the circulation pipeline 200 for gas circulation after the branch formed by the cooling device 300 is cooled by the cooling device 300.

As described in the background art, the existing single crystal furnace system 10 cannot automatically detect the cooling temperature in the furnace, and the relationship between the temperature in the furnace and the time is not accurately affected by the amount of the residual materials in the furnace, and only the time of stopping the furnace can be determined by means of manual experience, or a large number of dangerous experiments can be summarized, and when the temperature is not lower than 300 ℃, the furnace can be disassembled, which may cause unnecessary danger.

To solve the above-described problems, in one embodiment, the detection module includes a gas temperature detector for detecting the temperature of the gas in the circulation duct 200, and the detected temperature signal is used to detect whether the temperature in the oven table 110 is effectively cooled. Therefore, a worker can know the cooling temperature in the furnace in real time so as to accurately control the time for disassembling the furnace without judging the time for disassembling the furnace through experience, so that the furnace can be disassembled after the temperature in the furnace reaches below 300 ℃, and unnecessary danger in the furnace disassembling process is avoided.

Further, the detection module further comprises a water flow detector and a water temperature detector, wherein the water flow detector is used for detecting the flow of the circulating water in the cooling device 300, and the detected flow signal is used for controlling the flow rate of the circulating water in a feedback manner; the water temperature detector is used for detecting the temperature of the circulating water in the cooling device 300, and the detected temperature signal is used for feedback control of cooling of the circulating water to the cooling device 300 and confirmation of whether the gas passing through the cooling device 300 is effectively cooled.

It will be appreciated that the detection module may also include only one of a water flow detector and a water temperature detector, and may be configured according to specific requirements, and is not limited herein.

In order to perform automatic closed-loop control on the single crystal furnace system 10 based on the detection signal of the detection module, so as to ensure that a worker can accurately grasp the time for detaching the furnace, the single crystal furnace system 10 further comprises a control module (not shown in the figure), and the control module is respectively connected to the detection module, the cooling device 300 and the air extractor 400 in a communication manner; the air extractor 400 is used for receiving the temperature signal detected by the gas temperature detector in the detection module, so as to control the air extractor 400 to continuously operate when the temperature of the gas in the circulation pipeline 200 does not drop to a set temperature (for example, 300 ℃) to provide power for air circulation, and control the air extractor 400 to stop air extraction when the temperature of the gas in the circulation pipeline 200 drops to the set temperature, and prompt a worker to detach the furnace, so that the furnace shutdown process can be controlled to reduce the possibility of danger in the furnace shutdown process. And further, the control module can also control the flow rate of the circulating water based on the flow signal of the circulating water detected by the water flow detector, or control the on-off of the cooling device 300 based on the temperature signal of the circulating water detected by the water temperature detector. Specifically, when the temperature of the circulating water in the cooling device 300 is higher than the set value, it indicates that the circulating water and the high-temperature gas are effectively subjected to heat exchange, that is, the gas is effectively cooled, and at this time, the control module can control the cooling device 300 to be turned off; on the contrary, when the temperature of the circulating water in the cooling device 300 is lower than the set value, it indicates that the effective heat exchange between the circulating water and the high-temperature gas is not completed, and the temperature of the gas is still higher than the set temperature, and it is also necessary to control the cooling device 300 to be kept on to continue cooling the gas passing through the cooling device 300.

Further, the control module is further communicatively connected to the first valve 500 and the second valve, and the control module can control the opening of the second valve and the starting of the air extractor 400 based on the signal for closing the first valve 500, so as to complete the automatic control of the cooling process.

Still further, the detecting module further includes a vacuum degree detector for detecting the pressure in the oven table device 100 and the air pressure in the circulation duct 200, and the detected air pressure is used for feeding back whether the exhaust pipe of the oven table device 100 leaks or not, and feeding back the flowing condition of the air in the circulation duct 200 and whether the feedback air leaks or not in the circulation duct 200. Correspondingly, the single crystal furnace system 10 further comprises an alarm module (not shown in the figure) which is connected to the detection module in a communication manner, wherein the alarm module is used for alarming when the pressure in the furnace platform device 100 exceeds a set value or the circulating pipeline 200 leaks air, so that possible dangerous situations of the single crystal furnace system 10 during working or during furnace shutdown can be early warned, and staff can take measures in time conveniently to avoid accidents.

In addition, as a further improvement to the above embodiment, as shown in fig. 1, a filter tank 600 is further disposed on the circulation pipeline 200, where the filter tank 600 is disposed downstream of the cooling device 300 and upstream of the air extraction device 400, and the filter tank 600 is used for filtering the cooled gas to further eliminate impurities in the gas.

The cooling control flow of the single crystal furnace system 10 provided in the present application will be described with reference to fig. 1 and 2.

First, after the pulling process is completed, the furnace is stopped in the furnace table device 100, and the ingot in the furnace table 110 is taken out.

Then, the first valve 500 is closed, the worker fills the gas into the furnace platform 110, the signal for closing the first valve 500 is fed back to the control module, the control module controls the second valve connected to the inlet end and the outlet end of the first valve 500 according to the signal for closing the first valve 500, so that the input end and the output end of the cooling device 300 are respectively opened, and simultaneously, the control module starts the air extractor 400 according to the signal for closing the first valve 500, and the air extractor 400 extracts the gas in the furnace platform 110, so that the gas can bypass the first valve 500 and pass through the cooling device 300. The cooling device 300 cools the gas by using the circulating water, and the cooled gas passes through the filter tank 600 and the air extractor 400 in sequence and returns to the furnace table 110, thereby forming a circulating cooling process.

Therefore, the single crystal furnace system 10 provided by the application can realize a fully-automatic cooling process after furnace shutdown, shorten the furnace shutdown time, improve the service efficiency of the single crystal furnace system 10, automatically detect the cooling temperature in the furnace, accurately control the time for disassembling the furnace, and also detect the pressure in the furnace in real time, can give an alarm in time when abnormality occurs, has high safety degree, and is automatically operated in the whole process, so that the labor cost can be effectively saved.

Finally, it should be noted that, in order to simplify the description, all possible combinations of the features of the above embodiments may be arbitrarily combined, however, as long as there is no contradiction between the combinations of the features, the description should be considered as the scope of the description.

The above examples only represent a few embodiments of the present application, which are described in more detail and are not to be construed as limiting the scope of the claims. It should be noted that it would be apparent to those skilled in the art that various modifications and improvements could be made without departing from the spirit of the present application, which would be within the scope of the present application. Accordingly, the scope of protection of the present application is to be determined by the claims appended hereto.

Claims (10)

1. A single crystal furnace system, comprising:

a hearth device (100) having an air inlet (101) and a first air outlet (102) which are communicated with each other;

one end of the circulating pipeline (200) is communicated with the air inlet (101), and the other end of the circulating pipeline is communicated with the first air outlet (102);

a cooling device (300) provided outside the furnace table device (100), wherein the cooling device (300) is used for cooling the gas discharged from the furnace table device (100);

the air extracting device (400) is arranged in the circulating pipeline (200), and the air extracting device (400) is used for extracting the gas in the hearth device (100) so that the gas flows back into the hearth device (100) from the circulating pipeline (200) after being cooled by the cooling device (300);

and the detection module is arranged in the cooling device (300) and comprises a gas temperature detector, and the gas temperature detector is used for detecting the temperature of the gas in the circulating pipeline (200).

2. The single crystal furnace system according to claim 1, characterized in that the furnace stage device (100) further has a second gas outlet (103) communicating with the gas inlet (101), the single crystal furnace system (10) further comprising a first valve (500), the first valve (500) being adapted to control the opening and closing of the second gas outlet (103).

3. The single crystal furnace system according to claim 2, wherein the cooling device (300) has an input and an output arranged opposite each other, the output communicating with the first gas outlet (102) such that the first valve (500) is arranged in parallel with the cooling device (300).

4. A single crystal furnace system according to claim 3, characterized in that the input and output of the cooling device (300) are provided with second valves, respectively, the second valve or the first valve (500) being selectively openable to enable the gas in the furnace table means (100) to be selectively discharged from the second gas outlet (103) to the external environment via the first valve (500) or to flow into the circulation duct (200) via the second valve and the cooling device (300).

5. The single crystal furnace system according to claim 2, wherein the furnace stage device (100) comprises a furnace stage (110) and an exhaust assembly (120) connected to the furnace stage (110), and the first air outlet (102) and the second air outlet (103) are respectively formed at ends of the exhaust assembly (120) away from the furnace stage (110).

6. The single crystal growing furnace system according to claim 5, wherein the exhaust assembly (120) comprises at least two sub-exhaust pipes (121) and a main exhaust pipe (122), all the sub-exhaust pipes (121) are arranged in parallel, one end of each sub-exhaust pipe (121) is connected with the furnace table (110), the other end of each sub-exhaust pipe (121) is converged at one end of the main exhaust pipe (122), the other end of the main exhaust pipe (122) is provided with the first air outlet (102) and the second air outlet (103), and the first valve (500) is arranged in the main exhaust pipe (122).

7. The single crystal furnace system according to claim 1, characterized in that the cooling device (300) is configured to cool the gas by circulating water; the detection module further comprises a water flow detector and/or a water temperature detector;

the water flow detector is used for detecting the flow of the circulating water; the water temperature detector is used for detecting the water temperature of the circulating water.

8. The single crystal furnace system according to claim 7, wherein the single crystal furnace system (10) further comprises a control module communicatively connected to the detection module, the cooling device (300) and the air extraction device (400), respectively; the control module can control the air extractor (400) to be closed when the temperature of the air in the circulating pipeline (200) is reduced to a set value, or control the flow rate of the circulating water based on the flow rate of the circulating water, or control the cooling device (300) to be closed when the temperature of the circulating water is higher than the set value.

9. The single crystal furnace system according to claim 1, wherein the detection module further comprises a vacuum level detector for detecting a pressure within the furnace table device (100) and a gas pressure within the circulation pipe (200); the single crystal furnace system (10) further comprises an alarm module which is in communication connection with the detection module and is used for alarming when the pressure in the furnace platform device (100) exceeds a set value or the circulating pipeline (200) leaks air.

10. The single crystal furnace system according to claim 1, wherein a filter tank (600) is further disposed on the circulation pipe (200), the filter tank (600) is disposed downstream of the cooling device (300) and upstream of the air extraction device (400), and the filter tank (600) is used for filtering the cooled gas.