CN206000712U - Maintain air extractor and the extract system for stove of furnace pressure balance - Google Patents
Maintain air extractor and the extract system for stove of furnace pressure balance Download PDFInfo
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- CN206000712U CN206000712U CN201621033542.XU CN201621033542U CN206000712U CN 206000712 U CN206000712 U CN 206000712U CN 201621033542 U CN201621033542 U CN 201621033542U CN 206000712 U CN206000712 U CN 206000712U
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- valve
- controller
- extraction sector
- stove
- pressure
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Abstract
The utility model discloses a kind of air extractor maintaining furnace pressure balance, including multiple inputs for connecting valve, common conduit, at least two-way extraction sector and first controller of simply connected extraction sector or stove, the outfan of each valve is connected with common conduit, every road extraction sector is electrically connected with the first controller respectively, also include pressure balancing tank, the input of described pressure balancing tank is connected with common conduit, and the outfan of pressure balancing tank is connected with each road extraction sector.This utility model moment of Open valve when one or more stove needs to maintain pressure balance, other can be avoided to be in the fluctuation maintaining the stove of pressure balance from air pressure.
Description
Technical field
This utility model is related to a kind of air extractor maintaining furnace pressure balance and the extract system for stove.
Background technology
Single crystal growing furnace or polycrystalline furnace operationally, in order that the polysilicon being melted in stove has good growing environment, need
Air pressure in stove to be made maintains a stable value.As shown in figure 1, early stage simply connected of configuration on single crystal growing furnace or polycrystalline furnace is taken out
Mechanism of qi structure, this simply connected extraction sector is a single crystal growing furnace or polycrystalline furnace mates a vacuum pump, and during work, vacuum pump produces
Vacuum force reaches single crystal growing furnace or polycrystalline furnace through the valve opened, and the gas in single crystal growing furnace or polycrystalline furnace is taken away, works as stove
When internal gas pressure reaches 0.008mbar, close valve, determine that single crystal growing furnace or polycrystalline furnace do not leak by inspection, then Open valve
And start single crystal growing furnace or polycrystalline furnace are heated.Protective gas is passed through into stove by gas transmission mechanism simultaneously, controls vacuum pump
Rate of air sucked in required and gas transmission mechanism displacement, make stove internal gas pressure maintain 600mbar.This simply connected extraction sector, once vacuum pump
Exception or damage, will result in furnace pressure extremely, and then make production disruption, cause capacity loss, and simply connected extraction sector
Intermediate pump is constantly in working condition, and its wastes the energy.
In order to increase the safety of extract system, the utility model patent of Publication No. CN203906236U discloses one kind
For the linkage vacuum extractor of polycrystalline furnace, as shown in figure 1, including multigroup vacuum device, multigroup vacuum device and multiple
Polycrystalline furnace 1 corresponds, and vacuum device includes vacuum pump system 2, anti-down manifold solenoid valve 3 and exclusive valve 4, vacuum pump system 2
Vacuum orifice connect anti-down manifold solenoid valve 3 after connect to corresponding polycrystalline furnace 1, the gas outlet of vacuum pump system 2 connects row
Connect after outer valve 4 to evacuating exclusive pipe 5, also include PLC, vacuum pressure sensor 10 and multiple linkage stainless steel ball valve
6, the corresponding linkage stainless steel ball valve 6 of each vacuum device, one end of linkage stainless steel ball valve 6 is attempted by corresponding polycrystalline
Between stove 1 and anti-down manifold solenoid valve 3, the other end is connected together by total evacuation tube 11, and vacuum pressure sensor 10 is arranged on
In total evacuation tube 11, the signal input part of described linkage stainless steel ball valve 6 and anti-down manifold solenoid valve 3 is both connected to PLC control
On device, the signal output part of described vacuum pressure sensor 10 is connected in PLC.Also include the evacuator that links
Structure, this linkage vacuum device includes link vacuum pump system 7, the anti-down manifold solenoid valve 8 of linkage and the exclusive valve 9 that links, described
The other end of multiple linkage stainless steel ball valves 6 is sequentially connected the anti-down manifold solenoid valve 8 of linkage, linkage vacuum pump system after connecting together
Connect to evacuating exclusive pipe 5 after system 7 and the exclusive valve 9 that links, the anti-down manifold solenoid valve of described linkage 8 is also connected to PLC
On.
The work process of above-mentioned linkage vacuum extractor is：When vacuum pressure sensor 10 transmission vacuum pressure instruction
(0.008mbar) to PLC, first it is reached for preferentially with First, such as 1# polycrystalline 1 has reached normal running (operation) conditions,
PLC priority treatment, when follow-up 2#, 3# ... 9# (11# or 13#) reaches successively, with vacuum pressure sensor 10 by phase
The signal answered feeds back to PLC, and PLC is processed by relative importance value and is defined；If when 1# polycrystalline furnace 1 has completed to produce
In the cycle, other linkage polycrystalline furnaces not yet complete, and when normally running, according to the priority treatment principle of PLC, need to automatically switch to
, to ensure the normal operation of polycrystalline furnace 1 evacuation, must not vacuum pump system 2 and run in 2# or 3# or 9# (11# or 13#)
Chaotic situation is controlled to occur；If in running, occur faulty, cause vacuum in the polycrystalline furnace 1 of therein
Degree is unable to reach, and when that is, more than 0.008mbar, warning circuit for lamp or buzzer sound cue circuit have corresponding alarm lamp and carry
Show or the prompting of buzzer sound, until artificially processing and eliminate this warning, and by the corresponding linkage rustless steel of this polycrystalline furnace 1
The closing of ball valve 6 automatically disengages interlocking system and starts the vacuum device of this polycrystalline furnace, to ensure the normal operation of machine；?
In production process, when evacuating, if there is a vacuum pump system 2, the Production requirement that polycrystalline furnace can not be met, can open simultaneously
2 or the operation of multiple stage vacuum pump system, to ensure that producing machine normally runs.Above-mentioned linkage vacuum extractor has following asking
Topic：
1st, vacuum pressure sensor 10 is arranged in total evacuation tube 11, and it is only able to detect the gas in total evacuation tube 11
Pressure, and the air pressure in every polycrystalline furnace can not be detected, therefore, whether each polycrystalline furnace cannot be accorded with by vacuum pressure sensor 10
The feedback of the information closing service condition (air pressure in polycrystalline furnace reaches 0.008mbar) is to PLC.
2nd, above-mentioned total evacuation tube 11 is passed through linkage vacuum pump system 7 and is directly connected with the anti-down manifold solenoid valve 8 that links, and
Each polycrystalline furnace needs due to producing, and there is the polycrystalline furnace of connection quantity different from total evacuation tube 11 or 3 or 5 or 10,
It is currently for example two polycrystalline furnaces maintaining air pressure balance, but in addition has three to also comply with working condition, so, open simultaneously
The linkage stainless steel ball valve 6 being connected with this three polycrystalline furnace, is newly opened the air pressure in the polycrystalline furnace of three and pours in total evacuation
In pipe 11, cause pipeline inner pressure to fluctuate, because the draft that linkage vacuum pump system 7 produces is constant, Liang Taichu is in other
Polycrystalline furnace internal gas pressure in normal work also can form fluctuation, therefore can affect the quality of production.
Content of the invention
One of the purpose of this utility model is to provide a kind of air extractor maintaining furnace pressure balance, this utility model
The moment of Open valve when one or more stove needs to maintain pressure balance, other can be avoided to be in maintenance pressure and to put down
The stove of weighing apparatus state is from the fluctuation of air pressure.
Maintain the air extractor of furnace pressure balance, include multiple inputs for connecting simply connected extraction sector or stove
Valve, common conduit, at least two-way extraction sector and the first controller, the outfan of each valve is connected with common conduit,
Every road extraction sector electrically connect with the first controller respectively, also includes pressure balancing tank, the input of described pressure balancing tank and
Common conduit connects, and the outfan of pressure balancing tank is connected with each road extraction sector.
Each road extraction sector is connected with pressure balancing tank after being connected in parallel again.
It is provided with flow regulating and controlling valve between pressure balancing tank and extraction sector, this flow control valve and the first controller
Electrical connection.
Described each road extraction sector all includes check-valves and vacuum pump, check-valves and vacuum series connection of pumps.
Described pressure balancing tank is provided with first pressure sensor, and first pressure sensor is electrically connected with the first controller.
The two of the purpose of this utility model there is provided a kind of pressure balanced extract system for stove of maintenance, technical side
Case is as follows：
For the extract system of stove, including the simply connected extraction sector being connected with stove, also include maintaining furnace pressure balance
Air extractor.
Preferably, described simply connected extraction sector includes second controller, second pressure sensor, valving, vacuum pump,
Second controller is electrically connected with second pressure sensor, and the outfan of valving is connected with vacuum pump, and valving is also with
Two controller electrical connections.
Preferably, described valving includes pneumatic operated valve, gas control valve and on-off valve, pneumatic operated valve and gas control valve
Series connection, is connected with pneumatic operated valve and gas control valve formed branch circuit parallel connection in the two ends of described on-off valve.
Preferably, it is provided with check-valves between valving and vacuum pump, this check-valves and the first controller or second
Controller electrically connects.
Preferably, described second controller is connected with the first controller and is in communication with each other.
Advantage of the present utility model is：For example currently a stove is evacuated to maintain furnace pressure to balance, and other
When several stoves also reach the condition needing to maintain furnace pressure balance, at this moment, several valves being connected with common conduit can be opened
Door, for example, open the connection quantity of 3 or 5 or 10, in this utility model, due to being additionally arranged pressure balancing tank, this pressure
Dynamic balance tank balances common conduit internal pressure, and presses inside by first pressure sensor the real time measure pressure balancing tank
After power, signal is delivered to the first controller and is processed, and then the first controller passes through the pumping to extraction sector for the flow control valve
Speed is controlled, and how many each stoves of effective guarantee will cause cavity internal pressure cataclysm to change because of load, to guarantee to produce in stove
The quality of product.
This utility model be applicable to the pumping of polycrystalline furnace, the extract system of single crystal growing furnace and other need pressure maintain
Closed system.
Brief description
Fig. 1 is the structural representation of the linkage vacuum extractor for polycrystalline furnace of the prior art；
Fig. 2 is structural representation of the present utility model；
In accompanying drawing, 1 is valve, and 2 is common conduit, and 3 is the first controller, and 4 is check-valves, and 5 is vacuum pump, and 6 is pressure
Compensator, 6a is flow regulating and controlling valve, and 7 is first pressure sensor, and 8 is second pressure sensor, and 9 is vacuum pump, and 10 are
Pneumatic operated valve, 11 is gas control valve, and 12 is on-off valve, and 13 is check-valves.
Specific embodiment
As shown in Fig. 2 the air extractor maintaining furnace pressure balance of the present utility model, it is used for even including multiple inputs
The valve 1 of order connection extraction sector or stove, common conduit 2, at least two-way extraction sector and the first controller 3.Valve 1 is
Electrically operated valve, the outfan of each valve 1 is connected with common conduit 2.Every road extraction sector is made up of check-valves 4 and vacuum pump 5,
Check-valves 4 are connected with vacuum pump 5.Every road extraction sector is electrically connected with the first controller 3 respectively, and the first controller 3 includes PLC
(or single-chip microcomputer or PAC) and several relays (or catalyst), check-valves 4 and vacuum pump 5 are controlled by the first controller,
To control the speed of pumping according to practical situation.Preferably, it is provided with two-way extraction sector in this utility model, a road is as just
Often work uses, and another road, then as standby, if the normal road extraction sector using breaks down or during problem, starts another
One tunnel work.
Also include pressure balancing tank 6, the input of described pressure balancing tank 6 is connected with common conduit 2, described pressure balance
Tank 6 is provided with first pressure sensor 7, and first pressure sensor 7 is electrically connected with the first controller.By first pressure sensor
Atmospheric pressure value in pressure balancing tank 6 is sent to the first controller 3 by 7, and the first controller 3 does to the speed of exhaust according to practical situation
Go out adjustment.The outfan of pressure balancing tank 6 is connected with each road extraction sector it is preferable that after each road extraction sector is connected in parallel
It is connected with pressure balancing tank again.It is provided with flow regulating and controlling valve 6a, this Flow-rate adjustment between pressure balancing tank and extraction sector
Valve 6a is electrically connected with the first controller.
As shown in Fig. 2 the extract system for stove of the present utility model, including the simply connected extraction sector being connected with stove and
The air extractor maintaining furnace pressure balance in above-mentioned embodiment, described stove is single crystal growing furnace or polycrystalline furnace or other stoves,
Stove in present embodiment is polycrystalline furnace.The quantity of stove is multiple, passes sequentially through simply connected extraction sector respectively and valve 1 is connected to
Common conduit 2.Described simply connected extraction sector includes second controller (not shown), second pressure sensor 8, valve dress
Put, vacuum pump 9.Second controller includes PLC (or single-chip microcomputer or PAC) and several relays (or catalyst), the second control
Device processed is electrically connected with second pressure sensor 8, and second controller is connected with the first controller and is in communication with each other.Valving defeated
Go out end to be connected with vacuum pump, valving is also electrically connected with second controller.Described valving includes pneumatic operated valve 10, gas is adjusted
Section valve 11 and on-off valve 12, pneumatic operated valve 10 is connected with gas control valve 11, the two ends of described on-off valve 12 and pneumatic operated valve 10 and
The formed branch circuit parallel connection of gas control valve 11 series connection,.It is provided with check-valves 13, this non-return between valving and vacuum pump 9
Valve 13 is electrically connected with the first controller or second controller, and check-valves 13 can prevent the oil in vacuum pump 9 to be back to furnace chamber
Interior pollution furnace chamber.
Work process of the present utility model is (first) taking No. 1 polycrystalline furnace and the corresponding all parts connecting as a example：Operation is opened
After during the beginning, system first carries out self-inspection, each valve 1 is closed, and can start wherein one tunnel during 40 DEG C of vacuum pump water temperature ＜
Vacuum pump 5 in extraction sector, when vacuum pump 5 starts, sends signal by the PLC in the first controller, by relay simultaneously
Open check-valves 4, be so evacuated to common conduit 2.When first pressure sensor 7 detects inside pressure balancing tank 6
Pressure ＜ 0.1mba, closes check-valves 4, determines that pipeline does not leak by inspection, then reaches first bar of Open valve 1
Part.No. 1 polycrystalline furnace, in technological process, sends signal by the PLC in second controller, starts vacuum pump 9 and opens pneumatic operated valve
10 and gas control valve 11 (on-off valve 12 is closed mode), by vacuum pump 9 to No. 1 polycrystalline stove evacuation, reach in pressure
During 500mbar, open on-off valve 12, and close pneumatic operated valve 10 and gas control valve 11, during evacuation, pressed by second
Force transducer 8 constantly detects to the air pressure in No. 1 polycrystalline furnace, as furnace pressure ＜ 0.008mbar, No. 1 polycrystalline furnace is hunted leak,
If passing through, at this moment, second controller controls the unlatching of gas transmission mechanism that protective gas (as argon) is transported in No. 1 polycrystalline furnace and carries out
Filling, and either on or off on-off valve 12 is repeated according to process, when the atmospheric pressure in No. 1 polycrystalline furnace reaches 600mbar, reach
Second condition of Open valve 1, because two conditions that valve 1 is opened are provided with, at this moment, PLC in the first controller 3
Control valve 1 is opened, and closes vacuum pump 9 and check-valves 13 by the PLC control relay of second controller simultaneously, opens pneumatic
Valve 10, gas control valve 11, so, the argon of No. 1 polycrystalline furnace input reaches through pneumatic operated valve 10, gas control valve 11, valve 1
In common conduit 2, under the vacuum force of extraction sector, gas enters in pressure balancing tank 6, then passes sequentially through check-valves
4th, vacuum pump 5 is discharged, and arrives this, and No. 1 polycrystalline furnace enters pressure and maintains state.No. 2 polycrystalline furnaces, 3 to No. 10 polycrystalline furnaces are with similar
Mode is operated.
After in 1 to No. 10 polycrystalline furnace, any one enters pressure maintenance state, if there is event in the vacuum pump of work at present 5
Barrier, when the pressure that first pressure sensor 7 detects in pressure balancing tank 6 rises ＞ 650mbar, the PLC in the first controller 3
Receive first pressure sensor 7 signal determining hypertonia, the PLC control relay in the first controller 3 starts another road
Vacuum pump 5 in extraction sector, the extraction sector simultaneously closing off guilty culprit one tunnel is it is ensured that system is normally run, and starts sound
Light crossing-signal, until related personnel is processed, eliminates this fault.If two-way extraction sector all breaks down, first pressure passes
When the atmospheric pressure value of sensor 7 and second pressure sensor 8 detection is all higher than 650mba, the PLC in the first controller 3 passes through relay
Two-way extraction sector is controlled to be turned off, meanwhile, the PLC in second controller controls vacuum pump 9 to open, will be right by vacuum pump 9
The protective gas in polycrystalline furnace is answered to take away.For example, each road extraction sector of No. 1 polycrystalline furnace breaks down, at this moment, the first controller
PLC in 3 is turned off by Control each road extraction sector, and second controller then controls vacuum pump 9 to open, by No. 1
Protective gas in polycrystalline furnace is taken away, thus ensureing that the pressure in No. 1 polycrystalline furnace remains unchanged it is ensured that producing normal operation.False
Fault rate as being individually evacuated using simply connected extraction sector is 5%, and at once permissible after being provided with multichannel extraction sector
Fault rate is reduced to 0.25%, by above-mentioned narration, because simply connected extraction sector and multichannel extraction sector are carried out
Association, has therefore substantially prevented the risk that vacuum pump damages and causes, and simply connected extraction sector and multichannel extraction sector is not
With increasing very high hardware cost, but risk can be reduced to zero, improve the safety of system.
In the work process of the example above illustrates, above-mentioned process conditions 0.008mbar and 650mbar can be with production works
Skill demand is arbitrarily changed.
Claims (10)
1. maintain the air extractor of furnace pressure balance, be used for connecting the valve of simply connected extraction sector or stove including multiple inputs
Door, common conduit, at least two-way extraction sector and the first controller, the outfan of each valve is connected with common conduit, often
Road extraction sector electrically connect with the first controller respectively it is characterised in that：Also include pressure balancing tank, described pressure balancing tank
Input is connected with common conduit, and the outfan of pressure balancing tank is connected with each road extraction sector.
2. according to claim 1 maintain furnace pressure balance air extractor it is characterised in that：Each road extraction sector is simultaneously
It is connected with pressure balancing tank after being linked togather again.
3. according to claim 1 maintain furnace pressure balance air extractor it is characterised in that：Pressure balancing tank with
It is provided with flow regulating and controlling valve, this flow control valve is electrically connected with the first controller between extraction sector.
4. according to claim 1 maintain furnace pressure balance air extractor it is characterised in that：Described each road air exhauster
Structure all includes check-valves and vacuum pump, check-valves and vacuum series connection of pumps.
5. according to claim 14 any one maintain furnace pressure balance air extractor it is characterised in that：Institute
State pressure balancing tank and be provided with first pressure sensor, first pressure sensor is electrically connected with the first controller.
6. be used for stove extract system, including the simply connected extraction sector being connected with stove it is characterised in that：Also include as claim
The air extractor maintaining furnace pressure balance described in 1 to 5 any one.
7. the extract system for stove according to claim 6 it is characterised in that：Described simply connected extraction sector includes second
Controller, second pressure sensor, valving, vacuum pump, second controller is electrically connected with second pressure sensor, and valve fills
The outfan put is connected with vacuum pump, and valving is also electrically connected with second controller.
8. the extract system for stove according to claim 7 it is characterised in that：Described valving include pneumatic operated valve,
Gas control valve and on-off valve, pneumatic operated valve is connected with gas control valve, and the two ends of described on-off valve are adjusted with pneumatic operated valve and gas
The formed branch circuit parallel connection of section valve series connection.
9. the extract system for stove according to claim 7 it is characterised in that：Set between valving and vacuum pump
There are check-valves, this check-valves is electrically connected with the first controller or second controller.
10. the extract system for stove according to claim 7 it is characterised in that：Described second controller and the first control
Device processed connects and is in communication with each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621033542.XU CN206000712U (en) | 2016-08-31 | 2016-08-31 | Maintain air extractor and the extract system for stove of furnace pressure balance |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621033542.XU CN206000712U (en) | 2016-08-31 | 2016-08-31 | Maintain air extractor and the extract system for stove of furnace pressure balance |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206000712U true CN206000712U (en) | 2017-03-08 |
Family
ID=58192768
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621033542.XU Expired - Fee Related CN206000712U (en) | 2016-08-31 | 2016-08-31 | Maintain air extractor and the extract system for stove of furnace pressure balance |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206000712U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111336093A (en) * | 2018-12-18 | 2020-06-26 | 夏泰鑫半导体(青岛)有限公司 | Vacuum exhaust system and control method thereof |
| CN113249708A (en) * | 2021-06-30 | 2021-08-13 | 上海陛通半导体能源科技股份有限公司 | Multi-path multi-control type vacuumizing system equipment and vacuumizing method |
| CN115263719A (en) * | 2022-07-29 | 2022-11-01 | 西安奕斯伟材料科技有限公司 | System and method for adjusting vacuum state in crystal pulling furnace |
-
2016
- 2016-08-31 CN CN201621033542.XU patent/CN206000712U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111336093A (en) * | 2018-12-18 | 2020-06-26 | 夏泰鑫半导体(青岛)有限公司 | Vacuum exhaust system and control method thereof |
| CN113249708A (en) * | 2021-06-30 | 2021-08-13 | 上海陛通半导体能源科技股份有限公司 | Multi-path multi-control type vacuumizing system equipment and vacuumizing method |
| CN113249708B (en) * | 2021-06-30 | 2021-09-28 | 上海陛通半导体能源科技股份有限公司 | Multi-path multi-control type vacuumizing system equipment and vacuumizing method |
| CN115263719A (en) * | 2022-07-29 | 2022-11-01 | 西安奕斯伟材料科技有限公司 | System and method for adjusting vacuum state in crystal pulling furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CB03 | Change of inventor or designer information |
Inventor after: Ma Bin Inventor after: Wu Junjie Inventor after: You Chen Inventor after: Zheng Liangjun Inventor before: Ma Bin Inventor before: Wu Junjie Inventor before: You Chen Inventor before: Zheng Junliang |
|
| CB03 | Change of inventor or designer information | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170308 Termination date: 20180831 |
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| CF01 | Termination of patent right due to non-payment of annual fee |