CN206204484U - Annealing device - Google Patents
Annealing device Download PDFInfo
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- CN206204484U CN206204484U CN201621147267.4U CN201621147267U CN206204484U CN 206204484 U CN206204484 U CN 206204484U CN 201621147267 U CN201621147267 U CN 201621147267U CN 206204484 U CN206204484 U CN 206204484U
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- insulated cavity
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- annealing device
- protective element
- heated protective
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Abstract
The utility model discloses a kind of annealing device; reeded upper heat-insulated cavity and lower heat-insulated cavity and lifting moving mechanism are opened including heated protective element, inside; lifting moving mechanism includes vertical lifting bar, moves horizontally band and base; wherein; the connection of vertical lifting bar side upper heat-insulated cavity and lower heat-insulated cavity, upper heat-insulated cavity and lower heat-insulated cavity can be moved up and down along vertical lifting bar；Move horizontally and take equipped with pedestal, move horizontally band and be fixedly installed on base by support base, move horizontally the pedestal with the fixed heated protective element of drive and move left and right.Using annealing device of the present utility model is easy to operate, lowering temperature uniform；In annealing process, while the heated protective element lowered the temperature is removed by lifting from pedestal, it is quickly charged with next heated protective element equipped with monocrystal rod and is annealed, realize continuous quick production, saves energy consumption and time.
Description
Technical field
The utility model is related to a kind of annealing device, more specifically, is related to a kind of lowering temperature uniform, time-consuming and energy consumption
And can quantity-produced portable annealing device.
Background technology
Participate in all referring to single crystalline substrate in semiconductor or solar energy relative production process, the quality of monocrystal rod quality is directly closed
It is tied to the quality of final products.The growth of monocrystal rod is because of the reasons such as thermal field change, thermograde and solid-liquid interface shape, internal meeting
Residual stress is produced, causes lattice to produce very big distortion, therefore, it is necessary to carry out Post isothermal treatment to monocrystal rod to eliminate or reduce
Stress.Annealing is a kind of Technology for Heating Processing, can be effectively reduced the residual thermal stress in crystal.
According to the demand of crystal low defect, monocrystal rod the distributing homogeneity of protective gas in stove, heats up in annealing process
It is harsh with temperature homogeneity in temperature-fall period and the requirement on annealing time, it is necessary to specially design annealing furnace to meet demand, obtain
Obtain high-quality monocrystal material.
Annealing device use of the prior art is passed through protective gas and is annealed, and structure is generally tubular type heating, there is dress
Unload trouble；Cooling is uneven, and half is in air, and half is contacted with heat-insulation layer；When next product annealing is carried out after annealing, behaviour
Bother, expend time and energy consumption the shortcomings of.
The content of the invention
For the drawbacks described above of prior art, the purpose of this utility model is to provide a kind of easy to operate, lowering temperature uniform,
Time-consuming and energy consumption can quick quantity-produced annealing device.
Above-mentioned purpose of the present utility model is achieved through the following technical solutions：
The annealing device that the utility model is provided includes：Heated protective element, heat-insulated cavity and lifting moving mechanism, its
In：
Described heated protective element one end connects vacuum system, other end connection pressure system；
The heat-insulated cavity includes upper heat-insulated cavity and lower heat-insulated cavity, is provided with inside upper heat-insulated cavity and lower heat-insulated cavity
Groove, for the heated protective element that is locked；
The lifting moving mechanism includes vertical lifting bar, moves horizontally band and base, wherein：
The bottom of vertical lifting bar is vertically fixed on base, the connection of vertical lifting bar upper heat-insulated cavity and lower incubation cavity
Body, its side for being arranged on heat-insulated cavity and lower heat-insulated cavity, upper heat-insulated cavity and lower heat-insulated cavity can be along vertical liftings
Bar is moved up and down, and controls the folding of heat-insulated cavity；
Band is moved horizontally for two, the front-end and back-end of heat-insulated cavity, the two ends for moving horizontally band are separately positioned on
It is fixed on base by support base, moves horizontally and take equipped with pedestal, for fixing heated protective element, moves horizontally band band
Moving base is moved left and right, so as to remove and load the heat-insulated cavity by heated protective element.
The step of being annealed with annealing device of the present utility model is as follows：
The two ends for loading the heated protective element of product connect vacuum system by evacuating sealing flange respectively, by air inlet
Sealing flange connects pressure system,
Heated protective element is placed on the pedestal for moving horizontally band, band is moved horizontally in motor control lower band moving base
Moved between the groove of upward heat-insulated cavity and lower heat-insulated cavity；
Upper heat-insulated cavity and lower heat-insulated cavity move up and down closure under the control of cylinder along vertical lifting bar, and heating is protected
In a groove, vacuum system and pressure system carry out evacuation program and inflation procedure to protection element chuck, and temperature-controlling system carries out temperature control
Program, opens heating anneal program；
Heating anneal EP (end of program), upper heat-insulated cavity and lower heat-insulated cavity are upper and lower along vertical lifting bar under the control of cylinder
Mobile to open, heated protective element is moved to away from upper heat-insulated cavity and lower heat-insulated cavity in the drive for moving horizontally band
While being lowered the temperature；
While the heated protective element lowered the temperature is removed by lifting from pedestal, it is quickly charged with next equipped with list
The heated protective element of crystal bar is annealed, and realizes continuous production.
Relative to the tubular annealing equipment of prior art, the utility model annealing device has the following technical effect that：
1) the upper heat-insulated cavity of the utility model annealing device and lower heat-insulated cavity move up and down control along lifting moving bar
The folding of heat-insulated cavity, facilitates the loading and removal of heated protective element, and when removing cooling, heated protective element all exposes
Lowered the temperature under normal temperature state, lowering temperature uniform.
2) band that moves horizontally of the utility model annealing device drives heated protective element to move left and right, easy to operate.
3) after the utility model annealing device is lowered the temperature in annealing process to heated protective element, removed by lifting
While, be quickly charged with it is next annealed equipped with heated protective element, be capable of achieving quick continuous production, save the heating-up time
And energy consumption.
4) the utility model annealing device evacuates sealing flange and inlet seal flange by heated protective in annealing process
Element is sealed, it is ensured that the cleanliness factor in heated protective element, vacuum and atmosphere environmental requirement.
Brief description of the drawings
Fig. 1 is the structural representation of the utility model annealing device.
Fig. 2 is left view under the utility model annealing device soaking condition.
Fig. 3 is left view under the utility model annealing device cooling state.
Fig. 4 is that the internal structure of the utility model annealing device heat-insulated cavity (upper heat-insulated cavity and lower heat-insulated cavity) is illustrated
Figure.
Fig. 5 is the utility model annealing process figure.
Fig. 6 is heating curve figure when the utility model annealing device is heated.
Specific embodiment
Annealing device of the present utility model is more fully described below in conjunction with accompanying drawing.
As Figure 1-4, the annealing device that the utility model is provided includes that heated protective element, heat-insulated cavity and lifting are moved
Motivation structure, wherein：
The preferred high purity quartz pipe 30 of heated protective element, one end of high purity quartz pipe 30 is connected by evacuating sealing flange 33
Vacuum system, the other end connects pressure system by inlet seal flange 34；
Heat-insulated cavity includes being shaped as the upper heat-insulated cavity 13 and lower heat-insulated cavity 14 of cuboid, and upper heat-insulated cavity 13 is with
Cylinder shape groove is provided with inside heat-insulated cavity 14, for the high purity quartz pipe 30 that is locked；
Lifting moving mechanism includes vertical lifting bar 11, moves horizontally band 21 and base 20, wherein：
The bottom of vertical lifting bar 11 is vertically fixed on base 20, and four pulleys 24 are installed in the bottom of base 20, are easy to move back
Fiery equipment is moved integrally.Vertical lifting bar 11 is two and is set in parallel in the one of heat-insulated cavity 13 and lower heat-insulated cavity 14
Side, and connect upper heat-insulated cavity 13 and lower heat-insulated cavity 14.Cylinder 12 is installed on vertical lifting bar 11 to control upper incubation cavity
Body 13 and lower heat-insulated cavity 14 are moved up and down along vertical lifting bar 11, control the folding of heat-insulated cavity；
It is two to move horizontally band 21, is separately positioned on the front-end and back-end of heat-insulated cavity, is moved horizontally with 21 two ends
It is fixed on base 20 by support base 23.Move horizontally equipped with pedestal 22 on band 21, for fixing high purity quartz pipe 30.Level
The two ends of moving belt 21 set motor 25 and carry out controlled level moving belt 21 and moved left and right with moving base 22, so as to by high purity quartz pipe 30
Remove and load heat-insulated cavity.
In annealing device of the present utility model, the structure of upper heat-insulated cavity 13 and lower heat-insulated cavity 14 is distinguished from inside to outside
It is：Aluminum oxide heat-insulation layer 16, cooling water layer 17 and double-deck mullite outer wall layer 18, wherein, edge in the aluminum oxide heat-insulation layer 16
Embedding eight halogen heating pipes 15, are evenly distributed in heat-insulated cavity 13 and lower heat-insulated cavity 14.Upper heat-insulated cavity 13 and lower guarantor
The two ends of warm cavity 14 are equipped with refractory ceramics pad 19.The design of heat-insulated cavity structure causes annealing device of the present utility model
Balanced with thermal field, surface temperature is low, and heating rate is fast, the advantages of energy-conservation.
In annealing device of the present utility model, the preferred high purity quartz pipe of heated protective element, with high temperature resistant, corrosion resistant
Erosion, the advantages of heat endurance is good, light transmission is good.Due to the translucency of high purity quartz pipe, under cooling state, can be without broken
Bad sample local environment directly observes the test situation of sample, be superior to conventional annealing furnace think observation when, it is necessary to sample is taken
The mode for going out.
The step of being annealed with annealing device of the present utility model as shown in Figure 5,6 is as follows：
The one end for loading the high purity quartz pipe 30 of monocrystal rod connects vacuum system by evacuating sealing flange 33, and the other end leads to
The connection pressure system of inlet seal flange 34 is crossed, wherein：
Sealing flange 33 and the preferred stainless steel sealing flange of inlet seal flange 34 are evacuated, it is high temperature resistant, corrosion-resistant.
Vacuum system, is made up of vavuum pump 41, evacuation valve 42, vacuum transducer 43 etc..Detected by vacuum transducer 43
Vacuum in high purity quartz pipe 30, according to working vacuum degree setting value comparison operation, adjusts vavuum pump 41 and vacuum valve 42
Control vacuum.
Pressure system, pressure sensor 1, charge valve 2, pressure regulator valve 3, gas circuit valve 4, gas circuit valve 5, safety valve 6, air bleeding valve 7
Deng composition.Wherein, gas circuit valve 4 and gas circuit valve 5 are set up in parallel.Pressure in high purity quartz pipe 30 is gathered by pressure sensor 1
Value, controls charge valve 2, and gas circuit valve 4 and the atmosphere pressures of the adjustment high purity quartz of gas circuit valve 5 pipe 30.Pressure regulator valve 3 and safety valve 6
Shield, prevent superpressure in high purity quartz pipe 30, can be dropped by air bleeding valve 4 when hypertonia in high purity quartz pipe 30
Pressure.The composition of two-way gas circuit valve can adjust compound annealing atmosphere, it is to avoid atmosphere is single, realize efficiently annealing.
High purity quartz pipe 30 is placed on and is moved horizontally on the pedestal 22 with 21, moved horizontally with 21 under the control of motor 25
Moved between the groove with the upward heat-insulated cavity 13 of moving base 22 and lower heat-insulated cavity 14；
Upper heat-insulated cavity 13 and lower heat-insulated cavity 14 move up and down closure under the control of cylinder 12 along vertical lifting bar 11,
By the chuck of high purity quartz pipe 60 in a groove, PLC will automatically by judging vacuum and pressure condition, control carry out evacuation program and
Inflation procedure, while temperature-controlling system carries out temperature control program, opens heating anneal program,；Wherein：
The top of vertical lifting bar 11 sets electrical control cabinet, and electrical control cabinet includes operation interface, control button 8, temperature control
Table 32, touch-screen 9 etc..Wherein, the displaying of touch-screen 9 various parameters, such as warning message, can be displayed in by highlighting prominent mode
On touch-screen 9；The vacuum of data record collection, Temperature numerical etc. in pressure value, and high purity quartz pipe 30 can also be checked.This
Annealing device described in utility model is developed based on PLC, is detected and is controlled by instrument and sensor, and by touch-screen
9 displays and operation, high degree of automation, can reduce error, improve efficiency.
Temperature-controlling system, by temp controlled meter 32, thermocouple 31, the composition such as high purity quartz pipe 30 and relay.Thermocouple 31 is set
It is be arranged in parallel on sealing flange 33 is evacuated and with high purity quartz pipe 30, it is ensured that the utility model annealing device rises gentle cooling
Accuracy.Preferably, the selection of temp controlled meter 32 space electricity AI-759P artificial intelligence temperature controllers, cost performance is high, possesses 50 sections of programs
Control function, be capable of achieving any slope heating-cooling control, with redirect (circulation), operation, pause and stop etc. may be programmed/
Operable order, and allow to change program at any time in the control of program runs.It is artificial using the AI for possessing curve matching function
Intelligent adjustment algorithm, can obtain the curve controlled effect of smooth smooth-going.During heating anneal, touch-screen 9 record always and
Displays temperature, vacuum, pressure value and automatic control and adjustment parameter, make annealing device of the present utility model according to the technique of setting
Annealed, and process curve parameter is loaded into by temperature control instrument by touch-screen 9, it is easy to operate, efficiently and accurate.Heating rank
Section heating curve is as shown in Figure 6.
Heating anneal EP (end of program), upper heat-insulated cavity 13 and lower heat-insulated cavity 14 are under the control of cylinder 12 along vertical lifting
Bar 11 moves up and down opening heat-insulated cavity, and high purity quartz pipe 30 is moved to away from upper incubation cavity with 21 drive moving horizontally
One side of body 13 and lower heat-insulated cavity 14 is lowered the temperature；Unlimitedization of high purity quartz pipe 30, is completely exposed at normal temperatures, makes cooling speed
Degree is guaranteed, and realizes heating energy-saving, and lower the temperature rapid purpose
With annealing device of the present utility model, when being annealed according to above-mentioned steps, by the high purity quartz lowered the temperature
While pipe 30 is removed by lifting from pedestal 22, it is quickly charged with next high purity quartz pipe 30 equipped with monocrystal rod and is moved back
Fire, realizes continuous production, time-consuming and energy consumption.
Claims (9)
1. a kind of annealing device, it is characterised in that：Including heated protective element, heat-insulated cavity and lifting moving mechanism, wherein：
Described heated protective element one end connects vacuum system, other end connection pressure system；
The heat-insulated cavity includes upper heat-insulated cavity and lower heat-insulated cavity, and the inside of upper heat-insulated cavity and lower heat-insulated cavity is provided with recessed
Groove, for the heated protective element that is locked；
The lifting moving mechanism includes vertical lifting bar, moves horizontally band and base, wherein：
The bottom of vertical lifting bar is vertically fixed on base, the connection of vertical lifting bar upper heat-insulated cavity and lower heat-insulated cavity, its
The side of heat-insulated cavity and lower heat-insulated cavity is arranged on, upper heat-insulated cavity and lower heat-insulated cavity can be upper and lower along vertical lifting bar
It is mobile, control the folding of heat-insulated cavity；
Band is moved horizontally for two, the front-end and back-end of heat-insulated cavity are separately positioned on, the two ends for moving horizontally band pass through
Support base is fixed on base, is moved horizontally and is taken equipped with pedestal, for fixing heated protective element, is moved horizontally band and is driven base
Seat is moved left and right, so as to remove and load the heat-insulated cavity by heated protective element.
2. annealing device according to claim 1, it is characterised in that：Cylinder is installed come on controlling on the vertical lifting bar
Heat-insulated cavity and lower heat-insulated cavity are moved up and down along vertical lifting bar, are moved horizontally band two ends setting motor and are carried out controlled level movement
The movement of band.
3. annealing device according to claim 1, it is characterised in that：The structure of the upper heat-insulated cavity and lower heat-insulated cavity
It is respectively from inside to outside：Aluminum oxide heat-insulation layer, cooling water layer and double-deck mullite outer wall layer, wherein, the aluminum oxide heat-insulation layer
Inside inlay halogen heating pipe.
4. annealing device according to claim 1, it is characterised in that：The heated protective element is high purity quartz pipe.
5. annealing device according to claim 4, it is characterised in that：The upper heat-insulated cavity and lower heat-insulated cavity are rectangular
Body, the groove is cylinder.
6. annealing device according to claim 1, it is characterised in that：Described heated protective element one end is sealed by evacuating
Flange connects vacuum system, and the other end connects pressure system by inlet seal flange.
7. annealing device according to claim 6, it is characterised in that：Thermocouple is set on the evacuation sealing flange, institute
State thermocouple to be arranged in parallel with heated protective element, control the annealing temperature of annealing device.
8. annealing device according to claim 1, it is characterised in that：The pressure system includes two gas circuits arranged side by side
Valve, the compound annealing atmosphere of regulation.
9. the annealing device according to claim any one of 1-8, it is characterised in that：The base bottom installs pulley, just
In moving integrally for annealing device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621147267.4U CN206204484U (en) | 2016-10-21 | 2016-10-21 | Annealing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621147267.4U CN206204484U (en) | 2016-10-21 | 2016-10-21 | Annealing device |
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| Publication Number | Publication Date |
|---|---|
| CN206204484U true CN206204484U (en) | 2017-05-31 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621147267.4U Active CN206204484U (en) | 2016-10-21 | 2016-10-21 | Annealing device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106435742A (en) * | 2016-10-21 | 2017-02-22 | 北京鼎泰芯源科技发展有限公司 | Annealing equipment and annealing process thereof |
-
2016
- 2016-10-21 CN CN201621147267.4U patent/CN206204484U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106435742A (en) * | 2016-10-21 | 2017-02-22 | 北京鼎泰芯源科技发展有限公司 | Annealing equipment and annealing process thereof |
| CN106435742B (en) * | 2016-10-21 | 2019-06-28 | 珠海鼎泰芯源晶体有限公司 | Annealing device and its annealing process |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20170808 Address after: 100080 Haidian District street, Haidian, building B, block 10, level 340, level 3, Patentee after: Beijing Ding Tai Xinyuan Technology Development Co. Ltd. Address before: 519085 Guangdong province Zhuhai city road two Jinding Industrial Area high-tech zone on the south side of A1 building, Rui Patentee before: Zhuhai Ding Tai Xinyuan crystal Ltd |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20170821 Address after: 519085 Guangdong province Zhuhai city road two Jinding Industrial Area high-tech zone on the south side of A1 building, Rui Patentee after: Zhuhai Ding Tai Xinyuan crystal Ltd Address before: 100080 Haidian District street, Haidian, building B, block 10, level 340, level 3, Patentee before: Beijing Ding Tai Xinyuan Technology Development Co. Ltd. |