CN220761391U - Laser processing precision calibration device and laser processing system - Google Patents

Laser processing precision calibration device and laser processing system Download PDF

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Publication number
CN220761391U
CN220761391U CN202321699178.0U CN202321699178U CN220761391U CN 220761391 U CN220761391 U CN 220761391U CN 202321699178 U CN202321699178 U CN 202321699178U CN 220761391 U CN220761391 U CN 220761391U
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laser
positioning system
laser processing
ccd
visual
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赵彦君
叶树铃
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Shenzhen Qinghong Laser Technology Co ltd
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Shenzhen Qinghong Laser Technology Co ltd
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Abstract

The application provides a laser processing precision calibration device, including laser processing unit and CCD vision positioning system, CCD vision positioning system's vision imaging reflection light path with laser processing unit's laser galvanometer scanning light path is coaxial. According to the laser processing precision checking device, the visual imaging reflection light path of the CCD visual positioning system and the laser galvanometer scanning light path of the laser processing unit are coaxially arranged, so that the positioning precision of a product processing carrier and the precision of the laser processing system can be checked, and the production quality and the production efficiency can meet the requirements of lean production.

Description

Laser processing precision calibration device and laser processing system
Technical Field
The utility model relates to a laser processing precision checking device, and belongs to the technical field of laser processing systems.
Background
The existing TOPCON boron doped laser processing mainly adopts a laser galvanometer processing mode, namely, a laser beam generated by a laser device is expanded and shaped through an external light path system and then focused on the surface of a product through a high-speed galvanometer and an F-theta field lens for laser scanning processing. In the process, the precision and stability of each link determine the processing precision and precision stability of the final product. Such as deviation of light attenuation and light spot of a laser, micro deformation or looseness of an optical device and a mounting part thereof in an external light path system, temperature drift of a galvanometer system, correction precision of a BOX, or super-error of motion precision of a product processing carrier, etc., can cause deviation or even bad processing precision of the product.
In normal production of the existing processing system, the precision and stability of the whole laser processing system can be confirmed only through means of first inspection, spot check and the like, automatic check cannot be carried out, and the production quality and the production efficiency can not meet the requirements of lean production.
Therefore, finding a laser machining precision calibration device, which can test the positioning precision of a product machining carrier and the precision of a laser machining system, is a technical problem to be solved urgently by those skilled in the art.
Disclosure of Invention
In view of the above-mentioned shortcomings of the prior art, an object of the present utility model is to provide a device for checking laser machining precision, by which the purpose of checking the positioning precision of a product machining stage and the precision of a laser machining system is achieved.
According to an embodiment of the present utility model, there is provided a first scheme of: the device comprises a laser processing unit and a CCD visual positioning system, wherein a visual imaging reflection light path of the CCD visual positioning system is coaxial with a laser galvanometer scanning light path of the laser processing unit.
Further, the laser processing precision checking device further comprises a transparent mirror capable of reflecting laser and transmitting visible light, and a visual imaging reflection light path of the CCD visual positioning system is coaxial with a laser galvanometer scanning light path of the laser processing unit through the transparent mirror.
Further, visible light is transmitted through the transflector to the CCD visual positioning system.
Further, the laser processing unit comprises a laser, an external light path and a galvanometer field lens, and laser emitted by the laser reaches the galvanometer field lens through the external light path.
Further, the visual imaging reflected light of the galvanometer field lens is transmitted by the transreflective lens to reach the CCD visual positioning system, and the laser emitted by the laser is emitted by the external light path and is reflected by the transreflective lens to the galvanometer field lens.
Further, the laser processing unit further comprises a beam shaping lens group, and the laser emitted by the laser is emitted out through the external light path, reflected to the beam shaping lens group through the transparent mirror and finally reaches the galvanometer field lens.
Further, the laser processing precision checking device further comprises a product processing carrier, and a CCD visual mark point is arranged on the product processing carrier.
Further, at least one CCD visual marker point is located in the center of the product processing stage, and at least one CCD visual marker point is located at the edge of the product processing stage.
Further, the laser processing precision checking device further comprises a motor and a CCD visual mark point imaging light source, and the motor is connected with the product processing carrier.
Further, the CCD visual mark point imaging light source adopts a backlight source or a side light source or a coaxial light source.
Further, the CCD visual mark point imaging light source adopts a backlight source and is arranged below the product processing carrier.
Further, the laser processing precision checking device further comprises a CCD visual positioning system installation seat and a CCD visual positioning system adjusting seat, wherein the CCD visual positioning system installation seat is installed on the laser processing unit, the CCD visual positioning system adjusting seat is installed on the CCD visual positioning system installation seat, and the CCD visual positioning system is installed on the CCD visual positioning system adjusting seat.
According to an embodiment of the present utility model, there is provided a second scheme of: a laser machining system comprising a laser machining accuracy checking device as claimed in any one of the preceding claims.
Compared with the prior art, the technical scheme that this application provided provides a laser processing precision calibration device, with the coaxial setting of CCD vision positioning system's vision imaging reflection light path and laser processing unit's laser galvanometer scanning light path, can verify product processing carrier positioning accuracy and laser processing system precision for production quality and production efficiency can both satisfy lean production's requirement.
Drawings
FIG. 1 is a view showing the overall construction of a laser machining accuracy calibration device according to the present utility model;
FIG. 2 is a schematic diagram showing a detailed structure of a laser machining precision calibration device according to the present utility model;
reference numerals:
a product processing stage 10, a CCD visual positioning system 20, a laser 30.
Detailed Description
In order to better understand the technical solutions in the present application, the following description will clearly and completely describe the technical solutions in the embodiments of the present application in conjunction with the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only some embodiments of the present application, not all embodiments. All other embodiments, which can be made by one of ordinary skill in the art without undue burden from the present disclosure, are within the scope of the present disclosure.
It is noted that when an element is referred to as being "fixed" or "disposed on" another element, it can be directly on the other element or be indirectly disposed on the other element; when an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.
It is to be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate or are based on the orientation or positional relationship shown in the drawings, merely to facilitate description of the present application and simplify description, and do not indicate or imply that the devices or components referred to must have a particular orientation, be configured and operated in a particular orientation, and thus should not be construed as limiting the present application.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present application, the meaning of "a plurality" or "a number" is two or more, unless explicitly defined otherwise.
It should be understood that the structures, proportions, sizes, etc. shown in the drawings are for illustration purposes only and should not be construed as limiting the scope of the present disclosure, since any structural modifications, proportional changes, or dimensional adjustments made by those skilled in the art should not be made in the present disclosure without affecting the efficacy or achievement of the present disclosure.
According to an embodiment of the present utility model, there is provided a first aspect of: as shown in fig. 1, the laser processing precision checking device comprises a laser processing unit and a CCD vision positioning system 20, wherein a vision imaging reflection light path of the CCD vision positioning system 20 is coaxial with a laser galvanometer scanning light path of the laser processing unit.
In this technical scheme, it should be noted that, with the visual imaging reflection light path of CCD visual positioning system 20 with the coaxial setting of laser galvanometer scanning light path of laser processing unit, can verify product processing carrier positioning accuracy and laser processing system precision for production quality and production efficiency can both satisfy the requirement of lean production.
Specifically describing, in the embodiment of the present utility model, as shown in fig. 1 and 2, the laser processing precision calibration device further includes a transparent mirror 34 capable of reflecting laser light and transmitting visible light, and the visual imaging reflection light path of the CCD visual positioning system 20 is coaxial with the laser galvanometer scanning light path of the laser processing unit through the transparent mirror 34.
Specifically, in an embodiment of the present utility model, visible light is transmitted through the transflector 34 to the CCD visual positioning system 20.
It should be noted that, a lens 34 is added to reflect laser and transmit visible light, so that the CCD vision positioning system 20 can be integrated into a laser processing unit through the lens 34 to construct a coaxial CCD vision positioning system, in the TOPCon boron doped laser processing system, a set of lens 34, that is, reflect laser to transmit visible light, and a set of CCD vision positioning system 20 is added before the galvanometer, so that the vision imaging reflected light is coaxial with the scanning light path of the laser galvanometer.
Specifically describing, in the embodiment of the present utility model, the laser processing unit includes a laser 30, an external optical path 31, and a galvanometer field lens 32, where the laser light emitted from the laser 30 reaches the galvanometer field lens 32 through the external optical path 31.
The laser beam emitted from the laser 30 reaches the galvanometer field lens 32 through the external optical path 31, so that the laser processing of the product can be realized.
Specifically describing, in the embodiment of the present utility model, the visual imaging reflected light of the galvanometer field lens 32 is transmitted through the transflector 34 to reach the CCD visual positioning system 20, and the laser light emitted from the laser 30 is emitted through the external light path 31 and reflected to the galvanometer field lens 32 through the transflector 34.
It should be noted that, the additional arrangement of the lens mirror 34 can reflect laser and transmit visible light, so that the CCD vision positioning system 20 can be integrated into the laser processing unit through the lens mirror 34, and the visual imaging reflection light path of the CCD vision positioning system 20 and the laser galvanometer scanning light path of the laser processing unit are coaxially arranged, thereby achieving the purpose of constructing a coaxial CCD vision positioning system.
It should be noted that, the coaxial CCD visual positioning system keeps the laser processing point of the laser processing unit consistent with the CCD visual positioning coordinate system of the CCD visual positioning system 20, and this can be confirmed by self-checking, that is, the laser light emits a point on the calibration board, and the CCD visual positioning system 20 recognizes that the position of the point coordinate does not change in the CCD visual coordinate system. If this agreement deviates, indicating that the laser processing unit or the CCD visual positioning system 20 itself has changed, a readjustment is required to restore the normal state.
Specifically describing, in the embodiment of the present utility model, the laser processing unit further includes a beam shaping lens set 35, and the laser light emitted from the laser 30 is emitted from the external optical path 31, reflected by the transflector 34 to the beam shaping lens set 35, and finally reaches the galvanometer field lens 32.
By constructing the laser path, laser processing of the product is achieved.
Specifically describing, in the embodiment of the present utility model, the laser processing precision calibration device further includes a product processing carrier 10, where a CCD visual mark point is disposed on the product processing carrier 10.
It should be noted that, the CCD visual mark point is set on the product processing stage 10, so that the CCD visual positioning of the CCD visual positioning system 20 can be realized.
Specifically, in the embodiment of the present utility model, as shown in fig. 2, at least one CCD visual mark point 11 is located at the center of the product processing stage 10, and at least one CCD visual mark point 15 is located at the edge of the product processing stage 10.
It should be noted that, the CCD visual Mark point is also called a CCD identification Mark point, two Mark points are set on the product processing carrier 10, and one is close to the center of the product processing carrier 10, namely, the CCD visual Mark point 11, for checking the temperature drift stability of the galvanometer system; one is located at the edge of the product processing stage 10, namely a CCD visual marker point 15, for calibrating the BOX calibration accuracy of the galvanometer.
Specifically describing, in the embodiment of the present utility model, the laser processing precision calibration device further includes a motor 12 and a CCD visual mark point imaging light source, where the motor 12 is connected to the product processing stage 10.
Specifically, in an embodiment of the present utility model, the electric machine 12 is preferably a DD motor.
It should be noted that, the product processing stage 10 may be driven to rotate by the motor 12, and the CCD visual imaging efficiency may be improved by the CCD visual marker point imaging light source.
Specifically describing, in the embodiment of the present utility model, the CCD visual mark point imaging light source adopts a backlight source or a side light source or a coaxial light source.
Specifically describing the embodiment of the present utility model, the CCD visual mark point imaging light source is a backlight 13, and is installed below the product processing stage 10.
It should be noted that, the CCD visual mark point imaging light source is preferably a backlight source 13, on one hand, the visual imaging effect is good, on the other hand, a position is given out above the product, and a dust extraction box is conveniently arranged between the product and the F-theta field lens.
Specifically describing, in the embodiment of the present utility model, the laser processing precision checking device further includes a CCD vision positioning system mounting seat 22 and a CCD vision positioning system adjusting seat 21, where the CCD vision positioning system mounting seat 22 is mounted on the laser processing unit, the CCD vision positioning system adjusting seat 21 is mounted on the CCD vision positioning system mounting seat 22, and the CCD vision positioning system 20 is mounted on the CCD vision positioning system adjusting seat 21.
It should be noted that the CCD visual positioning system mounting base 22 is a mounting base of the CCD visual positioning system 20.
It should be noted that, the position of the CCD vision positioning system 20 may be adjusted by the adjusting seat 21 of the CCD vision positioning system, so that the visual imaging reflection optical path of the CCD vision positioning system 20 may be kept coaxial with the laser galvanometer scanning optical path of the laser processing unit.
The utility model provides a laser processing precision calibration device, which has the following calibration principle:
the precision checking mainly adopts a fixed template and the ratio difference;
firstly, a fixed template is calibrated with CCD visual marking points 11 and 15 under the normal state of the precision of a laser system, and a coaxial CCD visual positioning system 20 determines the position information of two Mark points (namely the CCD visual marking points 11 and 15) as a comparison template;
secondly, in each automatic checking, the coaxial CCD visual positioning system 20 recognizes the Mark point position, and compares the Mark point position with a comparison template, if the comparison value is the same or slightly different but the difference is within a set allowable value, the checking is passed, otherwise, the processing system is prompted to have abnormal precision, and further analysis and processing are needed.
The utility model realizes the functions of the fixed template and the ratio difference by adopting the known existing CCD vision positioning system, such as a commonly used 500 ten thousand pixel camera or a 200 ten thousand pixel camera of the Kangwei vision, and can realize the functions of the fixed template and the ratio difference.
According to an embodiment of the present utility model, there is provided a second aspect of: a laser machining system comprising a laser machining accuracy checking device as claimed in any one of the preceding claims.
The laser processing precision checking device is applied to a laser processing system, so that the processing precision and the processing efficiency of the laser processing system are improved, and the requirements of lean production are met.
Example 1
The device comprises a laser processing unit and a CCD visual positioning system 20, wherein a visual imaging reflection light path of the CCD visual positioning system 20 is coaxial with a laser galvanometer scanning light path of the laser processing unit.
Example 2
Repeating the embodiment 1, the laser processing precision calibration device further comprises a transparent mirror 34 capable of reflecting laser light and transmitting visible light, and the visual imaging reflection light path of the CCD visual positioning system 20 is coaxial with the laser galvanometer scanning light path of the laser processing unit through the transparent mirror 34.
Example 3
Example 2 is repeated except that the laser processing unit includes a laser 30, an external optical path 31, and a galvanometer field lens 32, and the laser light emitted from the laser 30 reaches the galvanometer field lens 32 through the external optical path 31.
Example 4
Example 3 is repeated, except that the visual imaging reflected light of the galvanometer field lens 32 is transmitted through the transflector 34 to reach the CCD visual positioning system 20, and the laser light emitted from the laser 30 is emitted through the external light path 31 and reflected through the transflector 34 to the galvanometer field lens 32.
Example 5
Embodiment 3 is repeated except that the laser processing unit further includes a beam shaping lens set 35, and the laser light emitted from the laser 30 is emitted from the external optical path 31, reflected by the transflector 34 to the beam shaping lens set 35, and finally reaches the galvanometer field lens 32.
Example 6
Embodiment 1 is repeated except that the laser processing precision checking device further comprises a product processing carrier 10, and a CCD visual mark point is arranged on the product processing carrier 10.
Example 7
Example 6 was repeated except that at least one CCD visual marker point 11 was located in the center of the product processing stage 10 and at least one CCD visual marker point 15 was located at the edge of the product processing stage 10.
Example 8
Example 6 was repeated except that the laser machining precision calibration device further included a motor 12 and a CCD visual mark point imaging light source, and the motor 12 was connected to the product machining stage 10.
Example 9
Embodiment 1 is repeated except that the laser processing precision checking device further comprises a CCD vision positioning system mounting seat 22 and a CCD vision positioning system adjusting seat 21, the CCD vision positioning system mounting seat 22 is mounted on the laser processing unit, the CCD vision positioning system adjusting seat 21 is mounted on the CCD vision positioning system mounting seat 22, and the CCD vision positioning system 20 is mounted on the CCD vision positioning system adjusting seat 21.
Example 10
Example 1 was repeated except that a laser machining system comprising a laser machining accuracy check device as described in any one of the above.
On one hand, a coaxial CCD visual positioning system is constructed, in the TOPCON boron doped laser processing system, a set of CCD visual positioning system 20 is added before a galvanometer through a set of transparent and reflecting mirrors 34, namely, reflected laser is transmitted to visible light, so that visual imaging reflected light is coaxial with a laser galvanometer scanning light path; on the other hand, a CCD is arranged to identify Mark points, two Mark points are arranged on the product processing carrier 10, one is close to the center of the product processing carrier 10, and the other is positioned at the edge of the product processing carrier 10.
The laser processing precision checking device and the laser processing system provided by the utility model are combined with a coaxial CCD vision system and a laser galvanometer processing system, two Mark points of the product processing carrier 10 are positioned through the CCD vision positioning system 20, the precision checking of the processing system is automatically carried out, the positioning precision of the product processing carrier 10 and the precision of the laser processing system can be checked, the processing precision of a final product can be ensured only if the two precision are in a normal state, and as long as any one deviation occurs, the CCD vision positioning system 20 can calculate the difference and give out a judging result, and the precision checking of the laser processing system can be realized.
The utility model provides a laser processing precision calibration device and a laser processing system, wherein a coaxial CCD vision system is integrated before a laser external light path system vibration lens, vision imaging light rays are coaxial with a laser light path, and a focus is kept consistent.
The utility model provides a laser processing precision checking device and a laser processing system.
The laser processing precision checking device and the laser processing system provided by the utility model can be applied to laser processing automation equipment, and particularly can be applied to photovoltaic TOPCON boron doped laser processing equipment.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present utility model. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the utility model. Thus, the present utility model is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (9)

1. The laser processing precision checking device is characterized by comprising a laser processing unit and a CCD visual positioning system, wherein a visual imaging reflection light path of the CCD visual positioning system is coaxial with a laser galvanometer scanning light path of the laser processing unit;
the laser processing precision checking device further comprises a transparent mirror capable of reflecting laser and transmitting visible light, and a visual imaging reflection light path of the CCD visual positioning system is coaxial with a laser galvanometer scanning light path of the laser processing unit through the transparent mirror.
2. The apparatus according to claim 1, wherein the laser processing unit includes a laser, an external optical path, and a galvanometer field lens, and the laser light emitted from the laser reaches the galvanometer field lens through the external optical path.
3. The device for calibrating the laser processing precision according to claim 2, wherein the visual imaging reflected light of the galvanometer field lens is transmitted by the transreflective lens to reach the CCD visual positioning system, and the laser emitted by the laser is emitted by the external light path and is reflected by the transreflective lens to the galvanometer field lens.
4. The device according to claim 2, wherein the laser processing unit further comprises a beam shaping lens group, and the laser light emitted from the laser is emitted from the external optical path, reflected by the transflector to the beam shaping lens group, and finally reaches the galvanometer field lens.
5. The laser machining precision checking device according to claim 1, further comprising a product machining stage on which a CCD visual mark point is provided.
6. The laser machining precision calibration device of claim 5, wherein at least one CCD visual mark point is located at a center of the product machining stage and at least one CCD visual mark point is located at an edge of the product machining stage.
7. The laser machining precision calibration device according to claim 5, further comprising a motor and a CCD visual mark point imaging light source, the motor being connected to the product machining stage.
8. The laser machining precision checking device according to claim 1, further comprising a CCD vision positioning system mount and a CCD vision positioning system adjustment mount, the CCD vision positioning system mount being mounted on the laser machining unit, the CCD vision positioning system adjustment mount being mounted on the CCD vision positioning system mount, the CCD vision positioning system being mounted on the CCD vision positioning system adjustment mount.
9. A laser processing system, characterized by: comprising a laser machining precision checking device according to any one of claims 1 to 8.
CN202321699178.0U 2023-06-29 2023-06-29 Laser processing precision calibration device and laser processing system Active CN220761391U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202321699178.0U CN220761391U (en) 2023-06-29 2023-06-29 Laser processing precision calibration device and laser processing system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202321699178.0U CN220761391U (en) 2023-06-29 2023-06-29 Laser processing precision calibration device and laser processing system

Publications (1)

Publication Number Publication Date
CN220761391U true CN220761391U (en) 2024-04-12

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Application Number Title Priority Date Filing Date
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Country Link
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