CN220744592U - Feeding device - Google Patents

Abstract

The utility model provides a feeding device. The feeding device comprises a transmission adsorption assembly, a conveying belt, a material taking adsorption assembly and a conveying driving assembly, wherein a plurality of adsorption holes are formed in one end of the transmission adsorption assembly in the second direction at intervals along the first direction, at least part of the conveying belt is arranged on one side of the transmission adsorption assembly, which is provided with the adsorption holes, the material taking adsorption assembly is arranged at one end of the transmission adsorption assembly in the first direction and can move along the second direction relative to at least part of the conveying belt, and the conveying driving assembly is connected with the conveying belt to drive at least part of the conveying belt to move along the first direction away from the material taking adsorption assembly. According to the feeding device disclosed by the utility model, the material is moved onto the conveyor belt through the material taking and adsorbing part, the material is conveyed through the conveyor belt, and the conveying and adsorbing part provides adsorption force for the material on the conveyor belt, so that the material is kept on the conveyor belt, and the conveyor belt can simultaneously convey a plurality of materials, so that the feeding device has higher feeding efficiency.

Description

Feeding device

Technical Field

The utility model relates to the field of feeding equipment, in particular to a feeding device.

Background

In the related art, when the stacked silicon wafers are fed, the silicon wafers are firstly obtained through the suction cup, then the suction cup and the silicon wafers are driven to move through the linear module, the silicon wafers are placed at the designated positions, and the linear module drives the suction cup to return to the position above the stacked silicon wafers so as to obtain and move the next silicon wafer again. However, since the suction cup needs to reciprocate under the driving of the linear module and only one silicon wafer can be moved every time, the silicon wafer feeding efficiency is low.

Disclosure of Invention

The present utility model aims to solve at least one of the technical problems in the related art to some extent. Therefore, the embodiment of the utility model provides a feeding device which moves materials onto a conveyor belt through a material taking and adsorbing part, the materials are conveyed through the conveyor belt, the material on the conveyor belt is provided with adsorption force by a conveying and adsorbing part, so that the materials are kept on the conveyor belt, and the conveyor belt can simultaneously convey a plurality of materials, so that the feeding device has higher feeding efficiency.

The feeding device provided by the embodiment of the utility model comprises:

the conveying adsorption assembly extends along a first direction, one end of the conveying adsorption assembly in a second direction is provided with a plurality of adsorption holes, the adsorption holes are arranged at intervals along the first direction, and the second direction is orthogonal to the first direction;

the conveying belt is at least partially arranged on one side of the conveying adsorption assembly, which is provided with the adsorption hole;

the material taking adsorption piece is arranged at one end of the transmission adsorption piece in the first direction and can move along the second direction relative to at least part of the conveyor belt;

and the conveying driving piece is connected with the conveying belt and is used for driving at least part of the conveying belt to move away from the material taking absorbing piece in the conveying direction.

According to the feeding device disclosed by the embodiment of the utility model, the material taking adsorption piece moves along the second direction relative to the conveyor belt so as to move the adsorbed material onto the conveyor belt, then the conveyor belt is used for conveying the material, the conveying adsorption assembly is used for providing adsorption force for the material on the conveyor belt so as to enable the material to be kept on the conveyor belt, and the material is separated from the conveyor belt when no longer subjected to the adsorption force so as to be placed at a designated position, so that the feeding operation is realized. The conveyor belt can simultaneously convey a plurality of materials, so that the feeding efficiency is high.

In some embodiments, the feeding device further comprises:

the rack is provided with the transmission adsorption assembly, the conveyor belt and the conveying driving piece;

the first telescopic piece is arranged on the frame, and one end of the first telescopic piece is provided with the material taking and absorbing piece so as to drive the material taking and absorbing piece to move along the second direction relative to at least part of the conveying belt.

In some embodiments, the take-off suction member is a bernoulli suction cup; and/or

The feeding device further comprises a first sensor, wherein the first sensor is arranged on the transmission adsorption assembly and used for detecting materials, and the first sensor is electrically connected with the first telescopic piece.

In some embodiments, the transport adsorption assembly includes at least two transport suction pieces, the at least two transport suction pieces are sequentially arranged along the first direction, each transport suction piece has a plurality of the adsorption holes, and each transport suction piece can be independently controlled to be opened and closed.

In some embodiments, the feeding device further comprises at least two vacuum generators, and the at least two vacuum generators are connected with the at least two conveying suction pieces in a one-to-one correspondence manner.

In some embodiments, the adsorption holes include a plurality of first adsorption holes and a plurality of second adsorption holes, the first adsorption holes are located at one end of the transmission adsorption assembly in a third direction, the first adsorption holes are arranged at intervals along the first direction, the second adsorption holes are located at the other end of the transmission adsorption assembly in the third direction, the second adsorption holes are arranged at intervals along the first direction, and the material taking adsorption member is arranged between the first adsorption holes and the second adsorption holes, and the third direction is orthogonal to the first direction and the second direction.

In some embodiments, the conveyor belt comprises a first belt body and a second belt body, the first belt body and the second belt body are arranged at intervals in the third direction and can synchronously convey and move, the first belt body and the second belt body are respectively provided with a plurality of gas through holes arranged at intervals along the first direction, the plurality of gas through holes of the first belt body are communicated with the plurality of first adsorption holes, and the plurality of gas through holes of the second belt body are communicated with the plurality of second adsorption holes.

In some embodiments, the loading device further comprises a cartridge assembly, and the cartridge assembly and the material taking suction member are arranged at intervals in the second direction.

In some embodiments, the cartridge assembly comprises:

a base;

the bearing piece is used for bearing materials, is arranged on the base and can move along the second direction relative to the base;

the second sensor is arranged on the supporting piece and is used for enabling the supporting piece to move along the second direction when materials are detected;

a third sensor for stopping movement of the support in the second direction when material is detected;

the air knife is arranged on the base and is electrically connected with the third sensor;

the limiting pieces are arranged on the base and extend along the second direction, the limiting pieces are multiple, and the limiting pieces encircle the supporting pieces.

In some embodiments, the loading device further comprises a moving member coupled to at least a portion of the cartridge assembly to drive at least a portion of the cartridge assembly toward and away from the take-off absorbent member in a direction orthogonal to the second direction.

Drawings

FIG. 1 is a schematic structural view of a feeding device according to an embodiment of the present utility model;

fig. 2 is a schematic diagram of a part of a structure of a feeding device according to an embodiment of the present utility model;

fig. 3 is a schematic diagram of a part of a structure of a feeding device according to an embodiment of the present utility model;

fig. 4 is a schematic view of the cartridge assembly of fig. 1.

Reference numerals:

1. a transport adsorption assembly; 2. a conveyor belt; 21. a first belt body; 22. a first belt body; 23. a gas through hole; 3. a material taking and absorbing part; 4. a transfer drive; 5. a frame; 6. a first telescopic member; 7. a vacuum generator; 8. a first sensor; 9. a cartridge assembly; 91. a base; 92. a support; 93. a second sensor; 94. a third sensor; 95. an air knife; 96. a limiting piece; 10. and a moving member.

Detailed Description

Reference will now be made in detail to embodiments of the present utility model, examples of which are illustrated in the accompanying drawings. The embodiments described below by referring to the drawings are illustrative and intended to explain the present utility model and should not be construed as limiting the utility model.

The following describes a feeding device according to an embodiment of the present utility model with reference to fig. 1 to 4.

As shown in fig. 1 to 4, the feeding device according to the embodiment of the present utility model includes a conveying and adsorbing assembly 1, a conveyor belt 2, a material taking and adsorbing member 3, and a conveying driving member 4.

The transport adsorption assembly 1 extends along a first direction (left-right direction as shown in fig. 1), one end of the transport adsorption assembly 1 in a second direction (up-down direction as shown in fig. 1) has a plurality of adsorption holes, the plurality of adsorption holes are arranged at intervals along the first direction, and the second direction is orthogonal to the first direction. At least part of the conveyor belt 2 is arranged on the side of the transport adsorption assembly 1 having the adsorption holes. The take-out suction member 3 is provided at one end of the transport suction assembly 1 in a first direction and is movable in a second direction relative to at least part of the conveyor belt 2. A conveyor drive 4 is connected to the conveyor belt 2 for driving at least part of the conveyor belt 2 in a conveying movement away from the take-off absorbent member 3 in a first direction.

Specifically, as shown in fig. 1 to 3, the conveying adsorption assembly 1 is a strip-shaped chamber extending along the left-right direction, the lower end surface of the conveying adsorption assembly 1 is provided with a plurality of adsorption holes, the plurality of adsorption holes are distributed at intervals along the left-right direction, and the adsorption holes can generate upward adsorption force. The both ends are equipped with the band pulley respectively about the transmission subassembly 1, and conveyer belt 2 encircles the periphery at two band pulleys and transmission subassembly 1 to make the part of conveyer belt 2 be located the downside of transmission subassembly 1, conveyer belt 2 links to each other with conveying driving piece 4, under the drive of driving piece 4, and the part conveyer belt 2 that is located the downside of transmission subassembly 1 can be along right direction conveying removal left. The right end of the transmission adsorption component 1 is provided with a material taking adsorption component 3, the material taking adsorption component 3 can move up and down relative to the transmission adsorption component 1 and the conveyor belt 2, and the material taking adsorption component 3 is preferably a Bernoulli sucker.

The feeding device preferably carries out feeding operation on silicon wafers serving as materials, the stacked silicon wafers are placed under the material taking adsorption piece 3, the material taking adsorption piece 3 is driven to move downwards at first, the uppermost silicon wafer in the stacked silicon wafers is adsorbed and obtained, then the material taking adsorption piece 3 carries the silicon wafers to move upwards, the upper end faces of the silicon wafers are enabled to be propped against the conveyor belt 2, at the moment, the adsorption force of the transmission adsorption assembly 1 acts on the silicon wafers, so that the silicon wafers are kept on the conveyor belt 2, the material taking adsorption piece 3 stops adsorbing the silicon wafers, the conveyor belt 2 is started to move leftwards, the silicon wafers are driven to move leftwards, in the process of moving the silicon wafers, the transmission adsorption assembly 1 always acts on the adsorption force on the silicon wafers, so that the silicon wafers are prevented from being separated from the conveyor belt 2, falling down through inertia of the conveyor belt 2 on the silicon wafers, and the silicon wafers can also fall down when the adsorption force acts on the silicon wafers to stop the conveyor belt 2, so that the feeding operation of the silicon wafers is completed. When the material taking adsorption piece 3 transfers the silicon wafer onto the conveyor belt 2, and the conveyor belt 2 conveys and moves the silicon wafer to the left side of the material taking adsorption piece 3, the material taking adsorption piece 3 can move downwards again to adsorb and acquire the next silicon wafer, and the next silicon wafer is transferred onto the conveyor belt 2, so that the conveyor belt 2 can feed a plurality of silicon wafers simultaneously.

According to the feeding device disclosed by the embodiment of the utility model, the material taking adsorption piece moves along the second direction relative to the conveyor belt so as to move the adsorbed material onto the conveyor belt, then the conveyor belt is used for conveying the material, the conveying adsorption assembly is used for providing adsorption force for the material on the conveyor belt so as to enable the material to be kept on the conveyor belt, and the material is separated from the conveyor belt when no longer subjected to the adsorption force so as to be placed at a designated position, so that the feeding operation is realized. The material taking and adsorbing part only moves along the second direction to transfer the material to the conveyor belt and does not move along the first direction along with the conveyor belt, and the conveyor belt can simultaneously convey a plurality of materials, so that the feeding device provided by the embodiment of the utility model has higher feeding efficiency.

The feeding device is preferably suitable for sorting silicon wafers, the silicon wafers are sequentially sorted by being placed on the main conveying line of the silicon wafer sorting machine, when the silicon wafer sorting machine is stopped abnormally, the unsorted silicon wafers on the main conveying line are required to be collected and re-fed to the starting end of the main conveying line, and the feeding device can be matched with the main conveying line of the silicon wafer sorting machine.

It will be appreciated that the transfer suction assembly is not limited to a strip chamber, and in other embodiments, the transfer suction assembly is a plurality of suction nozzles connected by tubing, each suction nozzle forming a suction orifice.

It will be appreciated that the conveyor belt is not limited to encircling the periphery of the transport adsorbent assembly, and in other embodiments the conveyor belt is in the form of a strip extending in a left-right direction, the conveyor belt is disposed below the transport adsorbent assembly, and the left and right ends of the conveyor belt are provided with drums, respectively, by which the conveyor belt is wound and released to move the conveyor belt in a left-handed drive.

It will be appreciated that the take-off suction attachment is not limited to being a bernoulli chuck, and in other embodiments, the take-off suction attachment is a vacuum chuck.

In some embodiments, the feeding device according to the embodiments of the present utility model further includes a frame 5 and a first telescopic member 6. The frame 5 is provided with a transport adsorbing assembly 1, a conveyor belt 2 and a transport drive 4. The first telescopic member 6 is arranged on the frame 5, and one end of the first telescopic member 6 is provided with the material taking absorbing member 3 so as to drive the material taking absorbing member 3 to move along the second direction relative to at least part of the conveyor belt 2.

As shown in fig. 1 and 2, the frame 5 has a plurality of legs extending along the up-down direction, the transmission absorbing assembly 1, the conveyor belt 2 and the transmission driving member 4 are all arranged on the frame 5, the frame 5 is further provided with a first telescopic member 6, the first telescopic member 6 is located above the right end of the transmission absorbing assembly 1, the right end of the transmission absorbing assembly 1 is provided with a through hole penetrating through the transmission absorbing assembly 1 along the up-down direction, the through hole is located below the first telescopic member 6, the cross section area of the through hole is larger than that of the material taking absorbing member 3, the lower end of the first telescopic member 6 is connected with the material taking absorbing member 3 to drive the material taking absorbing member 3 to move along the up-down direction, and the material taking absorbing member 3 can enter the through hole, so that the silicon wafers absorbed by the material taking absorbing member 3 can be abutted against the conveyor belt 2. The legs of the frame 5 provide a space with a certain height below the first telescopic member 6 and the transport adsorption assembly 1, so that stacked silicon wafers can be placed, and a space for the material taking adsorption member 3 to move up and down is provided. Preferably, the first telescopic member 6 is a telescopic cylinder.

It will be appreciated that the transfer adsorption module is not limited to having a through-hole, and in other embodiments, the transfer adsorption module has an inverted U-shaped cross section, and the first telescoping member is disposed within a space defined by the U-shaped perimeter.

In some embodiments, the feeding device according to the embodiments of the present utility model further includes a first sensor 8, where the first sensor 8 is disposed on the transport adsorption assembly 1 for detecting materials, and the first sensor 8 is electrically connected to the vacuum generator 7.

As shown in fig. 1 to 3, the right end of the transmission adsorption assembly 1 is provided with a mounting hole penetrating the transmission adsorption assembly 1 along the up-down direction, a first sensor 8 is embedded in the mounting hole, the first sensor 8 is electrically connected with a first telescopic member 6, and when the first sensor 8 detects that a silicon wafer is arranged below, an electric signal is sent to the first telescopic member 6, so that the first telescopic member 6 starts to reciprocate along the up-down direction, and the stacked silicon wafers are sequentially transferred onto the conveyor belt 2.

In some embodiments, the transport adsorbent assembly 1 includes at least two transport adsorbent members, the at least two transport adsorbent members being arranged in sequence along the first direction, each transport adsorbent member having a plurality of adsorbent holes, and each transport adsorbent member being independently controllable to open and close.

As shown in fig. 1 and 2, the transmission adsorption assembly 1 includes at least two transmission suction pieces, each of the transmission suction pieces is a strip-shaped chamber extending along a left-right direction, a plurality of adsorption holes are formed in a lower end face of each of the transmission suction pieces, the at least two transmission suction pieces are sequentially arranged along the left-right direction, and each of the transmission suction pieces can independently control an on-off state to control start and stop of an adsorption force of the corresponding transmission suction piece.

On the one hand, in the process that the silicon wafer moves leftwards along with the conveyor belt 2, at least two conveying suction pieces can be sequentially opened from right to left and closed after the silicon wafer passes, so that the time for opening the conveying suction pieces is reduced on the premise of keeping the silicon wafer on the conveyor belt 2, and the energy consumption is reduced.

On the other hand, when the silicon wafer moves to the lower part of the leftmost conveying suction piece, the leftmost conveying suction piece can be closed to enable the silicon wafer to separate from the conveyor belt 2 at a designated position and fall down, so that the silicon wafer can fall down to the designated position, and the precision of the silicon wafer feeding position is improved.

It is to be understood that the transfer sorbent assembly is not limited to include at least two transfer sorbent pieces, and in other embodiments, the transfer sorbent assembly is an integral chamber.

In some embodiments, the feeding device according to the embodiments of the present utility model further includes at least two vacuum generators 7, where at least two vacuum generators 7 are connected to at least two transporting suction pieces in a one-to-one correspondence.

As shown in fig. 1-3, at least two vacuum generators 7 are arranged on the frame 5, and the at least two vacuum generators 7 are connected with the at least two transmission suction pieces in a one-to-one correspondence manner, so that the vacuum generators 7 are used for vacuumizing the corresponding transmission suction pieces, and a plurality of adsorption holes of the corresponding transmission suction pieces generate adsorption force, so that the opening and closing of the corresponding transmission suction pieces can be controlled through the opening and closing of the vacuum generators 7.

In some embodiments, the adsorption holes include a plurality of first adsorption holes and a plurality of second adsorption holes, the first adsorption holes are located at one end of the transport adsorption assembly 1 in a third direction (front-rear direction as shown in fig. 1), the first adsorption holes are arranged at intervals along the first direction, the second adsorption holes are located at the other end of the transport adsorption assembly 1 in the third direction, the second adsorption holes are arranged at intervals along the first direction, and the material taking adsorption piece 3 is disposed between the first adsorption holes and the second adsorption holes, and the third direction is orthogonal to the first direction and the second direction.

As shown in fig. 1 to 3, the adsorption holes include a first adsorption hole and a second adsorption hole, the plurality of first adsorption holes are formed in the front end of the transmission adsorption assembly 1, the plurality of first adsorption holes are arranged at intervals in the left-right direction, the plurality of second adsorption holes are formed in the rear end of the transmission adsorption assembly 1, the plurality of second adsorption holes are arranged at intervals in the left-right direction, each transmission adsorption piece is provided with a plurality of first adsorption holes and a plurality of second adsorption holes, and the material taking adsorption piece 3 is arranged on the right-most transmission adsorption piece and is located between the first adsorption hole and the second adsorption hole.

The first adsorption holes are used for providing adsorption force for the front end of the silicon wafer, and the second adsorption holes are used for providing adsorption force for the rear end of the silicon wafer, so that the silicon wafer can maintain a stable posture in the process of conveying and moving along the left-right direction.

In some embodiments, the conveyor belt 2 includes a first belt body 21 and a second belt body 22, where the first belt body 21 and the second belt body 22 are arranged at intervals in a third direction and can synchronously move, the first belt body 21 and the second belt body 22 are each provided with a plurality of gas through holes 23 arranged at intervals along the first direction, the plurality of gas through holes 23 of the first belt body 21 are in communication with the plurality of first adsorption holes, and the plurality of gas through holes 23 of the second belt body 22 are in communication with the plurality of second adsorption holes.

As shown in fig. 1 to 3, the conveyor belt 2 comprises a first belt body 21 and a second belt body 22, the first belt body 21 is arranged around the front end of the transmission adsorption assembly 1, the second belt body 22 is arranged around the rear end of the transmission adsorption assembly 1, the transmission driving member 4 is preferably a rotating motor, the rotating motor is provided with a rotating shaft extending along the front-rear direction, two belt wheels which are arranged at intervals in the front-rear direction are arranged on the rotating shaft, the belt wheels at the front end are connected with the first belt body 21, the belt wheels at the rear end are connected with the second belt body 22 so as to drive the first belt body 21 and the second belt body 22 to synchronously transmit and move through the transmission driving member 4, the plurality of gas through holes 23 which are arranged at intervals along the left-right direction are respectively arranged on the first belt body 21 and the second belt body 22, the plurality of gas through holes 23 of the first belt body 21 are communicated with the plurality of first adsorption holes, and the plurality of gas through holes 23 of the second belt body 22 are communicated with the plurality of second adsorption holes so that adsorption forces generated by the first adsorption holes and the second adsorption holes can act on the silicon wafers through the conveyor belt 2. The take-out absorbent member 3 is disposed between the first belt body 21 and the second belt body 22.

The first belt body 21 is propped against the front end of the silicon wafer, and the second belt body 22 is propped against the rear end of the silicon wafer, so that the silicon wafer is driven to move leftwards in a conveying manner, and the silicon wafer is kept in a stable posture in the conveying and moving process. The silicon wafer obtained by the adsorption of the material taking adsorption part 3 is also convenient to transfer to the conveyor belt 2.

In some embodiments, the feeding device according to the embodiment of the present utility model further includes a cartridge assembly 9, where the cartridge assembly 9 and the material taking suction member 3 are arranged at intervals in the second direction.

As shown in fig. 1, the material box assembly 9 is disposed below the material taking and adsorbing member 3, the material box assembly 9 is used for accommodating a silicon wafer as a material, and the material taking and adsorbing member 3 can adsorb the silicon wafer in the material taking and adsorbing box assembly 9 in the process of moving in the up-down direction.

The material box assembly 9 enables the stacked silicon wafers to have the same position, so that a plurality of silicon wafers after the material taking adsorption piece 3 and the conveyor belt 2 move can be accurately fed at the same position, and position deviation is avoided.

In some embodiments, the cartridge assembly 9 includes a base 91, a support 92, a second sensor 93, a third sensor 94, an air knife 95, and a stop 96. The supporting member 92 is used for carrying materials, and the supporting member 92 is arranged on the base 91 and can move along the second direction relative to the base 91. A second sensor 93 is provided on the support 92, the second sensor 93 being arranged to move the support 92 in a second direction when material is detected. The third sensor 94 is used to stop the movement of the support 92 in the second direction when material is detected. An air knife 95 is provided on the base 91, and the air knife 95 is electrically connected to the third sensor 94. The limiting members 96 are disposed on the base 91 and extend along the second direction, and the limiting members 96 are plural, and the plurality of limiting members 96 are disposed around the supporting member 92.

As shown in fig. 3, the base 91 is horizontally disposed, a second telescopic member extending along an up-down direction is disposed on the base 91, and the second telescopic member is preferably a stepper motor, and the supporting member 92 is disposed on the second telescopic member, so as to move up and down relative to the base 91 under the driving of the second telescopic member, where the supporting member 92 is used to bear stacked silicon wafers, and the supporting member 92 drives the bearing stacked silicon wafers to move up and down, so that the silicon wafers acquired from the supporting member 92 by the material taking adsorption member 3 each time are located at the same height, so that the silicon wafers can be absorbed and acquired by the material taking adsorption member 3 conveniently.

The upper end surface of the supporting member 92 is embedded with a second sensor 93, the second sensor 93 is preferably a proximity switch, the second sensor 93 is electrically connected with the second telescopic member, and after the stacked silicon wafers are placed on the supporting member 92, the second sensor 93 is triggered and sends an electrical signal to the second telescopic member, so that the second telescopic member drives the supporting member 92 to move upwards.

The third sensor 94 may be disposed on the base 91, may be disposed on the frame 5, and has a certain distance from the support 92 in the up-down direction, where the third sensor 94 is higher than the support 92, and the third sensor 94 is electrically connected to the second telescopic member, and the third sensor 94 is preferably an opposite sensor, and the third sensor 94 is used to detect a silicon wafer above the support 92, and when the silicon wafer moves upward under the drive of the support 92 and triggers the detection light of the third sensor 94, the third sensor 94 sends an electrical signal to the second telescopic member, so that the second telescopic member stops moving upward continuously, so that the uppermost silicon wafer on the support 92 is at the same height when being absorbed by the material absorbing member 3.

The front and rear sides of the supporting member 92 are respectively provided with a horizontally arranged air knife 95, the air knives 95 are arranged on the base 91 through the supporting frame, so that the uppermost silicon wafer in the stacked silicon wafers is blown, the uppermost silicon wafer is separated from the next silicon wafer, the material taking and adsorbing member 3 is prevented from sequentially adsorbing and acquiring a plurality of silicon wafers, the air knives 95 are electrically connected with the third sensor 94, and when the third sensor 94 is triggered by the silicon wafers, electric signals are started to the air knives 95, so that the air knives 95 start blowing.

The base 91 is provided with a plurality of limiting members 96 extending along the up-down direction, the limiting members 96 are preferably limiting rods or limiting plates, the limiting members 96 are arranged around the supporting member 92, the limiting members 96 are used for abutting stacked silicon wafers to limit the horizontal position of the silicon wafers relative to the supporting member 92, and the limiting members 96 can move along the front-back direction and the horizontal direction relative to the base 91 so as to enable the supporting member 92 to support silicon wafers with different sizes, including whole silicon wafers and half silicon wafers.

In some embodiments, the loading device according to the embodiments of the present utility model further includes a moving member 10, where the moving member 10 is connected to at least a portion of the cartridge assembly 9 to drive at least a portion of the cartridge assembly 9 to move toward and away from the material taking suction member 3 in a direction orthogonal to the second direction.

As shown in fig. 1, the base 91 is disposed on the moving member 10, the moving member 10 extends in the front-rear direction to drive the base 91 to move in the front-rear direction, and when the base 91 moves to the rear end of the moving member 10, the base 91 and the support 92 are positioned below the material taking suction member 3 so that the material taking suction member 3 can suck and take the silicon wafer on the support 92, and when the base 91 moves to the front end of the moving member 10, the base 91 and the support 92 are away from the material taking suction member 3 in the front-rear direction, at this time, the stacked silicon wafers are conveniently placed on the support 92. The moving member 10 is preferably a linear die set or a telescopic cylinder.

In the description of the present utility model, it should be understood that the terms "center," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," and the like indicate an orientation or a positional relationship based on that shown in the drawings, merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model.

Furthermore, the terms "first," "second," and the like, are used merely for distinguishing between and not for indicating or implying a relative importance or an implicit indication of the number of features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present utility model, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.

In the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; may be mechanically connected, may be electrically connected or may be in communication with each other; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

In the present utility model, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.

For purposes of this disclosure, the terms "one embodiment," "some embodiments," "example," "a particular example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the different embodiments or examples described in this specification and the features of the different embodiments or examples may be combined and combined by those skilled in the art without contradiction.

While the above embodiments have been shown and described, it should be understood that the above embodiments are illustrative and not to be construed as limiting the utility model, and that variations, modifications, alternatives, and variations of the above embodiments may be made by those of ordinary skill in the art without departing from the scope of the utility model.

Claims (10)

1. Feeding device, its characterized in that includes:

the conveying adsorption assembly (1), the conveying adsorption assembly (1) extends along a first direction, one end of the conveying adsorption assembly (1) in a second direction is provided with a plurality of adsorption holes, the adsorption holes are arranged at intervals along the first direction, and the second direction is orthogonal to the first direction;

a conveyor belt (2), wherein at least part of the conveyor belt (2) is arranged on one side of the transmission adsorption assembly (1) with the adsorption holes;

a material taking adsorption piece (3), wherein the material taking adsorption piece (3) is arranged at one end of the transmission adsorption piece (1) in the first direction and can move along the second direction relative to at least part of the conveyor belt (2);

and the conveying driving piece (4) is connected with the conveying belt (2) to drive at least part of the conveying belt (2) to move away from the material taking absorbing piece (3) in the conveying direction.

2. The feeding device of claim 1, further comprising:

a frame (5), wherein the frame (5) is provided with the transmission adsorption assembly (1), the conveyor belt (2) and the conveying driving piece (4);

the first telescopic piece (6), first telescopic piece (6) are established on frame (5), the one end of first telescopic piece (6) is equipped with get material and absorb accessory (3), so that drive get material and absorb accessory (3) for at least part of conveyer belt (2) can follow the second direction removes.

3. The feeding device according to claim 2, wherein the material taking suction member (3) is a bernoulli suction cup; and/or

The feeding device further comprises a first sensor (8), wherein the first sensor (8) is arranged on the transmission adsorption assembly (1) and used for detecting materials, and the first sensor (8) is electrically connected with the first telescopic piece (6).

4. Feeding device according to claim 1, characterized in that the transport adsorption assembly (1) comprises at least two transport suction members, which are arranged in sequence along the first direction, each transport suction member having a plurality of said adsorption holes, and each transport suction member being independently controllable to open and close.

5. The feeding device according to claim 4, further comprising at least two vacuum generators (7), wherein at least two vacuum generators (7) are connected with at least two conveying suction pieces in a one-to-one correspondence.

6. The feeding device according to claim 1, wherein the adsorption holes comprise a plurality of first adsorption holes and a plurality of second adsorption holes, the first adsorption holes are positioned at one end of the transmission adsorption assembly (1) in a third direction, the first adsorption holes are arranged at intervals along the first direction, the second adsorption holes are positioned at the other end of the transmission adsorption assembly (1) in the third direction, the second adsorption holes are arranged at intervals along the first direction, the material taking adsorption member (3) is arranged between the first adsorption holes and the second adsorption holes, and the third direction is orthogonal to the first direction and the second direction.

7. The feeding device according to claim 6, wherein the conveyor belt (2) comprises a first belt body (21) and a second belt body (22), the first belt body (21) and the second belt body (22) are arranged at intervals in the third direction and can synchronously move in a conveying manner, a plurality of gas through holes (23) arranged at intervals in the first direction are formed in the first belt body (21) and the second belt body (22), the plurality of gas through holes (23) of the first belt body (21) are communicated with the plurality of first adsorption holes, and the plurality of gas through holes (23) of the second belt body (22) are communicated with the plurality of second adsorption holes.

8. The loading device according to any one of claims 1-7, further comprising a cartridge assembly (9), wherein the cartridge assembly (9) and the take-off absorbent member (3) are arranged at intervals in the second direction.

9. Feeding device according to claim 8, wherein the cartridge assembly (9) comprises:

a base (91);

a support (92), wherein the support (92) is used for bearing materials, and the support (92) is arranged on the base (91) and can move along the second direction relative to the base (91);

a second sensor (93), the second sensor (93) being arranged on the support (92), the second sensor (93) being adapted to move the support (92) in the second direction when a material is detected;

-a third sensor (94), the third sensor (94) being adapted to stop the movement of the support (92) in the second direction when material is detected;

the air knife (95) is arranged on the base (91), and the air knife (95) is electrically connected with the third sensor (94);

the limiting pieces (96) are arranged on the base (91) and extend along the second direction, the number of the limiting pieces (96) is multiple, and the plurality of the limiting pieces (96) encircle the supporting pieces (92).

10. The feeding device according to claim 8, further comprising a moving member (10), said moving member (10) being connected to at least part of said cartridge assembly (9) for driving at least part of said cartridge assembly (9) towards and away from said take-off suction member (3) in a direction orthogonal to said second direction.