CN220697508U - Silicon square rod size detection system - Google Patents

Abstract

The utility model relates to a silicon square rod size detection system, which is arranged before a slicing process of a silicon square rod, and comprises: at least one set of detection units configured to at least determine whether the dimensions of the square silicon rod are acceptable; the first conveying unit is communicated with the detection unit, and when the detection unit judges that the size of the square silicon rod is qualified, the square silicon rod with the qualified size is conveyed to a subsequent process through the first conveying unit; and the second transportation unit is communicated with the detection unit, and when the detection unit judges that the square silicon rod is unqualified in size, the square silicon rod with unqualified size is recovered through the second transportation unit.

Description

Silicon square rod size detection system

Technical Field

The utility model relates to the technical field of monocrystalline silicon piece production, in particular to a silicon square rod size detection system.

Background

In the process for preparing the monocrystalline silicon slice, a silicon round rod obtained by pulling a silicon raw material in a monocrystalline furnace is firstly processed into a silicon square rod by mechanical processing, and the silicon square rod flows to a slicing unit to be processed into the silicon slice by mechanical processing.

In the silicon wafer manufacturing process, automatic viscose in a slicing unit flows into a slicing process to process into a silicon wafer, specifically, the silicon square rod is firstly placed on a conveying roller way by manual assistance, appearance detection (visual inspection) is carried out on the silicon square rod, viscose is carried out on the silicon square rod, a viscose plate and a crystal support through a viscose process after detection is finished, and materials (the materials refer to the state after the silicon square rod, the viscose plate and the crystal support are bonded and the like) are conveyed to the slicing process through the conveying roller way after the glue is solidified, and are clamped to an equipment workbench through a mechanical arm to carry out mechanical processing. In the process, as the appearance detection is only carried out on the silicon square rod, the requirement on the dimension precision of the silicon wafer by the slicing unit is extremely high, the silicon square rod with unqualified dimension precision flows into the post-process for processing and dimension detection, the processing abnormality can be caused in the post-process processing process, the silicon wafer with unqualified dimension precision is detected to be subjected to the grade-reducing treatment, and the processing cost is wasted in the process, so that the cost control of the whole slicing unit is affected.

Disclosure of Invention

In view of the above, the present utility model is directed to a silicon square rod size detection system for solving at least one of the above problems.

The aim of the utility model is mainly realized by the following technical scheme:

the utility model provides a silicon square rod size detection system, which is arranged before a slicing process of a silicon square rod, and comprises:

at least one set of detection units configured to at least determine whether the dimensions of the square silicon rod are acceptable;

the first conveying unit is communicated with the detection unit, and when the detection unit judges that the size of the square silicon rod is qualified, the square silicon rod with the qualified size is conveyed to a subsequent process through the first conveying unit;

and the second transportation unit is communicated with the detection unit, and when the detection unit judges that the square silicon rod is unqualified in size, the square silicon rod with unqualified size is recovered through the second transportation unit.

Further, the detection unit comprises a material conveying roller way, a size detection device and a transplanting table;

the size detection device and the transplanting table are arranged on the material conveying roller table, and the size detection device is positioned at the upstream of the transplanting table;

the size detection device is configured to be capable of detecting at least a size of the square silicon rod;

the transplanting stage is configured to be capable of selectively placing the square silicon rod at least in the first transport unit or the second transport unit.

Further, the detection unit further comprises a detection control unit, the detection control unit comprises an input module, a receiving module, a judging module and an output module, the judging module is respectively connected with the input module, the receiving module and the output module, the receiving module is connected with the size detection device, and the output module is connected with the transplanting table.

Further, the input module is configured to be capable of receiving external input of standard dimensions of the square silicon rod;

the receiving module is configured to be capable of receiving the silicon square rod size detected by the size detecting device;

the judging module is configured to judge whether the detected silicon square rod size meets the standard silicon square rod size or not and send a judging result to the output module;

the output module is configured to send a control instruction matched with the judging result to the transplanting station according to the judging result.

Further, the detection unit further comprises a wiping table;

the wiping table is positioned on the material conveying roller way and is positioned at the upstream of the size detection device so as to wipe and check the appearance of the silicon square rod.

Further, a turnover mechanism is arranged on the wiping table;

the turning mechanism is configured to be able to turn at least the square silicon rod on the wiping stage.

Further, the silicon square rod size detection system comprises a plurality of groups of detection units;

the plurality of groups of inspection units are respectively communicated with the first transportation unit and the second transportation unit in a parallel connection mode.

Further, the silicon square rod size detection system comprises two groups of detection units, and the two groups of detection units are communicated with the first transportation unit and the second transportation unit through a connecting roller way;

the second transport unit is located between the two detection units.

Further, the silicon square rod size detection system further comprises a feeding robot, a feeding cart and a recovery cart;

the loading trolley is configured to be capable of conveying at least square silicon rods to be detected;

the recovery cart is configured to be capable of transporting at least a missized silicon square rod;

the feeding robot is configured to be capable of transferring at least the square silicon rod on the feeding cart to the detection unit and to transfer the square silicon rod with an unqualified size on the second transport unit to the recovery cart.

Further, the silicon square rod size detection system also comprises a control unit configured to at least control the working process of the silicon square rod size detection system.

Compared with the prior art, the utility model has at least one of the following advantages: the method is arranged before the slicing process of the square silicon rod, so that whether the size of the square silicon rod meets the requirement is judged, and then the square silicon rod is cut, on one hand, the situation that unqualified square silicon rod is cut is avoided, more silicon material is lost, the cutting time is wasted, and the slicing device is damaged is avoided; on the other hand, the unqualified silicon wafers are recovered, so that cost waste and silicon material loss are avoided.

In the utility model, the technical schemes can be mutually combined to realize more preferable combination schemes. Additional features and advantages of the utility model will be set forth in the description which follows, and in part will be apparent from the description, or may be learned by practice of the utility model. The objectives and other advantages of the utility model may be realized and attained by the structure particularly pointed out in the written description and drawings.

Drawings

The drawings are only for purposes of illustrating particular embodiments and are not to be construed as limiting the utility model, like reference numerals being used to refer to like parts throughout the several views.

FIG. 1 is a schematic diagram of a silicon square rod size detection system according to an embodiment;

fig. 2 is a control block diagram of the detection unit in the embodiment.

Reference numerals:

1-a detection unit; 11-a material conveying roller way; 12-size detection means; 13-a transplanting table; 14-a detection control unit; 141-an input module; 142-a receiving module; 143-a judging module; 144-an output module; 15-a wiping station; 2-a first transport unit; 3-a second transport unit; 4-post-working procedure; 5-connecting a roller way; 6-a feeding robot; 7-feeding carts; 8-recovery cart.

Detailed Description

The following detailed description of preferred embodiments of the utility model is made in connection with the accompanying drawings, which form a part hereof, and together with the description of the embodiments of the utility model, are used to explain the principles of the utility model and are not intended to limit the scope of the utility model.

In describing embodiments of the present utility model, it should be noted that, unless explicitly stated and limited otherwise, the term "coupled" should be interpreted broadly, for example, as being fixedly coupled, as being detachably coupled, as being integrally coupled, as being mechanically coupled, as being electrically coupled, as being directly coupled, as being indirectly coupled via an intermediate medium. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

The terms "top," "bottom," "above … …," "below," and "on … …" are used throughout the description to refer to the relative positions of components of the device, such as the relative positions of the top and bottom substrates inside the device. It will be appreciated that the devices are versatile, irrespective of their orientation in space.

The working surface of the utility model can be a plane or a curved surface, and can be inclined or horizontal. For convenience of explanation, the embodiments of the present utility model are placed on a horizontal plane and used on the horizontal plane, and thus "up and down" and "up and down" are defined.

In one embodiment of the present utility model, a silicon square bar size detection system (hereinafter, may be simply referred to as a detection system) is disclosed, which is disposed before a slicing process of a silicon square bar, as shown in fig. 1 to 2, and includes:

at least one group of detection units 1, wherein the detection units 1 are configured to at least judge whether the size of the square silicon rod is qualified;

a first transporting unit 2, which is communicated with the detecting unit 1, and when the detecting unit 1 judges that the size of the square silicon rod is qualified, the square silicon rod with qualified size is transported to a post process 4 through the first transporting unit 1;

and a second transporting unit 3 which is communicated with the detecting unit 1, and when the detecting unit 1 judges that the silicon square rod is unqualified in size, the silicon square rod with unqualified size is recovered through the second transporting unit 2.

The post-process 4 includes, but is not limited to, a slicing process, that is, the silicon square rod with qualified size can be directly transported to the slicing process through the first transporting unit 1, or can be transported to other processes and then transported to the slicing process, and in practical application, a suitable post-process can be set according to the manufacturing process of the monocrystalline silicon wafer.

The silicon square rod size detection system is arranged before the slicing process of the silicon square rod, namely, the silicon square rod size detection system is positioned at the upstream of the silicon square rod slicing device, so that whether the size of the silicon square rod meets the requirement is judged firstly, and then the silicon square rod is cut; on the other hand, the unqualified silicon wafers are recovered, so that cost waste and silicon material loss are avoided.

According to one embodiment of the utility model, the detection unit 1 comprises a material conveying roller way 11, a size detection device 12 and a transplanting table 13, wherein the size detection device 12 and the transplanting table 13 are arranged on the material conveying roller way 11, and the size detection device 12 is positioned at the upstream of the transplanting table 13.

The size detecting means 12 is configured to be able to detect at least the size of the square silicon rod so that the detecting unit 1 judges whether the size of the square silicon rod is acceptable.

The transplanting station 13 is configured to be able to selectively place at least the square silicon rod on the first transport unit 2 or the second transport unit 3.

The detection unit 1 further comprises a detection control unit 14, the detection control unit 14 comprises an input module 141, a receiving module 142, a judging module 143 and an output module 144, the judging module 143 is respectively connected with the input module 141, the receiving module 142 and the output module 144, the receiving module 142 is connected with the size detection device 12, and the output module 144 is connected with the transplanting table 13.

The input module 141 is configured to receive an external input of standard dimensions of a square silicon rod. The external input includes, but is not limited to, manual input by a worker, input by a smart client, and other input modes, namely, only the input mode of inputting the standard size of the silicon square rod to the detection control unit can be adopted.

The receiving module 142 is configured to receive the silicon square rod size detected by the size detecting device 12, that is, the size detecting device 12 detects the silicon square rod size entering the receiving module 142 and then uploads the data to the receiving module.

The judging module 143 is configured to judge whether the detected square silicon rod size meets the standard square silicon rod size, and send the judgment result to the output module 144. The standard size is not necessarily a definite value, but may be a standard range having a certain width, and the detected square silicon rod size is considered to be acceptable as long as the square silicon rod size falls within the standard range. The judging result comprises two types, wherein one type is that the silicon square rod size is qualified, namely the detected silicon square rod size accords with the standard size of the silicon square rod; and the other is that the size of the square silicon rod is unqualified, namely the detected size of the square silicon rod does not accord with the standard size of the square silicon rod.

The output module 144 is configured to send a control instruction matched with the judging result to the transplanting stage 13 according to the judging result. The control instructions comprise two types, one is to control the transplanting table 13 to transfer the silicon square rod with the detected size to the first transportation unit 2; and the other is to control the transplanting table 13 to transfer the silicon square rods with the detected sizes to the second conveying unit 3. When the output module 144 receives the judgment result that the size of the square silicon rod is qualified, the control instruction controls the transplanting table 13 to transfer the square silicon rod with the size detected to the first transportation unit 2; when the output module 144 receives the judgment result that the size of the square silicon rod is not qualified, the control instruction controls the transplanting table 13 to transfer the square silicon rod with the detected size to the second transportation unit 3.

In this embodiment, the size detection device 12 is covered on a portion of the material conveying roller way 11, that is, the material conveying roller way 11 conveys the square silicon rod with the size to be detected into the size detection device 12 for size detection, and after the detection is completed, the material conveying roller way 11 conveys the square silicon rod onto the transplanting table 13. The transplanting table 13 is positioned at the tail end of the material conveying roller way 11.

It should be noted that any device (or a combination of sensors) capable of performing the size detection of the silicon square bar may be used as the size detection means 12 of the present utility model. Illustratively, the size detection device 12 may be selected from existing size detection equipment (e.g., NXNC-12SEQD-SE 01).

According to a preferred embodiment of the present utility model, the detecting unit further includes a wiping table 15, where the wiping table 15 is located on the material conveying roller table 11 and is located upstream of the size detecting device 12, and the appearance of the square silicon rod is firstly wiped and checked, so that on one hand, the appearance of the square silicon rod is checked, and the square silicon rod entering the size detecting process is ensured to have an intact appearance, so that the square silicon rod with an appearance defect is prevented from entering the subsequent process, and not only is the timely recovery convenient, but also the time and the process waste caused by the defective square silicon rod are avoided; on the other hand, the external surface of the silicon square rod is wiped, so that the subsequent dimension measurement is more accurate, and foreign objects attached to the external wall of the silicon square rod are prevented from affecting the dimension measurement.

For the convenience of staff wiping the square silicon rod on the wiping platform 15, the wiping platform 15 is provided with a turnover mechanism which is configured to at least turn the square silicon rod on the wiping platform. On one hand, the effort for the staff to turn the square silicon rod is saved, the wiping process is more convenient and feasible, and the using body feeling of the detection system is improved; on the other hand, the collision of the silicon square rod possibly caused by misoperation of a worker is avoided, and the loss of the silicon square rod caused by human in the wiping process is reduced.

In order to improve the detection efficiency of the detection system on the square silicon rod, the size detection system of the square silicon rod comprises a plurality of groups of detection units 1, and the plurality of groups of detection units 1 are respectively communicated with the first transportation unit 2 and the second transportation unit 3 in a parallel connection mode, namely the plurality of groups of detection units 1 share the same set of first transportation unit 2 and second transportation unit 3.

Preferably, the multiple groups of detection units 1 detect the sizes of the silicon square rods asynchronously, namely the detection units 1 detect the sizes of the silicon square rods in a peak-shifting mode, on one hand, the possible occurrence that the detected silicon square rods wait for the first conveying unit 2 or the second conveying unit 3 to convey is avoided; on the other hand, the use effect of the first transportation unit 2 and the second transportation unit is improved, and the detection efficiency of the detection system is improved.

Preferably, the plurality of groups of detection units 1 are connected in parallel with the first transport unit 2 and the second transport unit 3 through the connecting roller ways 5, namely, the connecting roller ways 5 are connected with the first transport unit 2, the second transport unit 3 and the material transporting roller ways 11 of all the detection units 1.

In this embodiment, the silicon square rod size detection system includes two groups of detection units, and the two groups of detection units are communicated with the first transportation unit 2 and the second transportation unit 3 through the connecting roller way 5. Preferably, the second transporting unit 3 is located between the two detecting units 1, so as to recover the defective silicon square rods.

For the convenience of silicon square rod material loading and retrieving, silicon square rod size detecting system still includes material loading robot 6, material loading shallow 7 and retrieves shallow 8. The loading trolley 7 is configured to be able to transport at least the square silicon rod to be inspected. The recovery cart 8 is configured to be capable of transporting at least undersized silicon square rods. The loading robot 6 is configured to be capable of transferring at least the square silicon rod on the loading cart 7 to the material conveying roller way 11 of the detection unit 1, and capable of transferring the square silicon rod with unqualified size on the second conveying unit 2 to the recovery cart 8.

Preferably, the loading robot 6, the loading cart 7 and the recovery cart 8 are located near the head end of the material conveying roller way 11.

Preferably, the first transport unit 2 and the second transport unit 3 are both roller structures.

In this embodiment, the first transporting unit 1, the second transporting unit 3, the material transporting roller way 11, and the connecting roller way 5 are all linear roller ways. Preferably, the second transporting unit 3 is arranged in parallel with the transporting roller ways 11 and is positioned between the two transporting roller ways 11, the extension line of the first transporting unit 2 coincides with a certain transporting roller way 11, and the connecting roller way 5 is respectively and vertically connected with the first transporting unit 1, the second transporting unit 3 and the transporting roller ways 11.

The silicon square rod size detection system further includes a control unit configured to at least control the progress of operation of the silicon square rod size detection system.

Specifically, the control unit may control the operation of the detection unit 1, for example: the operation speed of the material conveying track 11, the rotation direction and the rotation speed of the turnover mechanism, the opening and closing of the size detection device 12, the operation of the transplanting table 13 and the like are controlled. The detection control unit 14 may be integrated in the control unit or may be provided separately on the size detection means 12.

The control unit can also control the operation of the first transporting unit 2, the second transporting unit 3, the connecting roller way 5, the feeding robot 6 and the like. If the loading cart 7 and the recovery cart 8 are intelligent carts, both are also controlled by the control unit.

The control unit and the components controlled by the control unit can be connected in a wired or/and wireless mode, and the specific connection mode is reasonably selected according to actual conditions.

The present utility model is not limited to the above-mentioned embodiments, and any changes or substitutions that can be easily understood by those skilled in the art within the technical scope of the present utility model are intended to be included in the scope of the present utility model.

Claims (10)

1. A silicon square rod size detection system, characterized in that it is disposed before a slicing process of a silicon square rod, the silicon square rod size detection system comprising:

at least one set of detection units configured to at least determine whether the dimensions of the square silicon rod are acceptable;

the first conveying unit is communicated with the detection unit, and when the detection unit judges that the size of the square silicon rod is qualified, the square silicon rod with the qualified size is conveyed to a subsequent process through the first conveying unit;

and the second transportation unit is communicated with the detection unit, and when the detection unit judges that the square silicon rod is unqualified in size, the square silicon rod with unqualified size is recovered through the second transportation unit.

2. The silicon square bar size detection system according to claim 1, wherein the detection unit comprises a material conveying roller way, a size detection device and a transplanting table;

the size detection device and the transplanting table are arranged on the material conveying roller table, and the size detection device is positioned at the upstream of the transplanting table;

the size detection device is configured to be capable of detecting at least a size of the square silicon rod;

the transplanting stage is configured to be capable of selectively placing the square silicon rod at least in the first transport unit or the second transport unit.

3. The silicon square bar size detection system according to claim 2, wherein the detection unit further comprises a detection control unit, the detection control unit comprises an input module, a receiving module, a judging module and an output module, the judging module is respectively connected with the input module, the receiving module and the output module, the receiving module is connected with the size detection device, and the output module is connected with the transplanting table.

4. A silicon square bar size detection system according to claim 3, wherein the input module is configured to receive external input of standard silicon square bar sizes;

the receiving module is configured to be capable of receiving the silicon square rod size detected by the size detecting device;

the judging module is configured to judge whether the detected silicon square rod size meets the standard silicon square rod size or not and send a judging result to the output module;

the output module is configured to send a control instruction matched with the judging result to the transplanting station according to the judging result.

5. The silicon square bar size inspection system according to claim 2, wherein the inspection unit further comprises a wiping stage;

the wiping table is positioned on the material conveying roller way and is positioned at the upstream of the size detection device so as to wipe and check the appearance of the silicon square rod.

6. The silicon square bar size detection system according to claim 5, wherein the wiping table is provided with a turnover mechanism;

the turning mechanism is configured to be able to turn at least the square silicon rod on the wiping stage.

7. The silicon square-rod size detection system according to claim 1, wherein the silicon square-rod size detection system comprises a plurality of groups of detection units;

the plurality of groups of inspection units are respectively communicated with the first transportation unit and the second transportation unit in a parallel connection mode.

8. The silicon square rod size detection system according to claim 7, wherein the silicon square rod size detection system comprises two groups of detection units, and the two groups of detection units are communicated with the first transportation unit and the second transportation unit through a connecting roller way;

the second transport unit is located between the two detection units.

9. The silicon square rod size detection system of claim 1, further comprising a loading robot, a loading cart, and a recovery cart;

the loading trolley is configured to be capable of conveying at least square silicon rods to be detected;

the recovery cart is configured to be capable of transporting at least a missized silicon square rod;

the feeding robot is configured to be capable of transferring at least the square silicon rod on the feeding cart to the detection unit and to transfer the square silicon rod with an unqualified size on the second transport unit to the recovery cart.

10. A silicon square rod size detection system according to any one of claims 1 to 9, further comprising a control unit configured to control at least the progress of the operation of the silicon square rod size detection system.