CN220590961U - Ceramic disc cleaning device - Google Patents

Abstract

The utility model relates to a ceramic disc cleaning device which comprises a cleaning mechanism and a material moving mechanism, wherein the cleaning mechanism comprises a cleaning groove and a soaking groove, the cleaning groove comprises a cleaning groove body, an ultrasonic cleaning piece and a circulating assembly, a cleaning cavity and an overflow cavity are arranged in the cleaning groove body, the ultrasonic cleaning piece is arranged in the cleaning cavity, the cleaning cavity is provided with a circulating inlet, the overflow cavity is provided with a circulating outlet, the inlet and the outlet of the circulating assembly are respectively communicated with the circulating outlet and the circulating inlet and are used for pumping liquid in the overflow cavity to the cleaning cavity, the material moving mechanism comprises a driving assembly, a first clamping assembly and a second clamping assembly, the first clamping assembly and the second clamping assembly are arranged on the driving assembly, and the driving assembly is used for driving the first clamping assembly and the second clamping assembly to move in the horizontal direction or the vertical direction so as to move a ceramic disc into or out of the cleaning groove and the soaking groove. The utility model can realize the recycling of overflowed cleaning solution, reduce the cost, realize the vertical ultrasonic cleaning of the ceramic disc and improve the cleaning effect.

Description

Ceramic disc cleaning device

Technical Field

The utility model belongs to the technical field of semiconductor processing, and particularly relates to a ceramic disc cleaning device.

Background

The wafer, i.e., the silicon wafer used in the fabrication of semiconductor chip integrated circuits, is also referred to as a wafer because it has a circular shape. By fabricating various circuit structures on the wafer surface, it can be made into an electronic component with specific electrical functions. In the production process of wafers, it is generally necessary to carry out the process steps of slicing, grinding, polishing, cleaning, etc. At present, in the process of grinding, polishing and the like, a ceramic disc is required to be used as a carrier or a base disc of a wafer, namely, the wafer is attached to the surface of the ceramic disc for processing, and the ceramic disc has high surface flatness and can play a role in providing a reference plane for grinding and polishing the wafer.

In the prior art, after a wafer is attached to the surface of a ceramic disc and subjected to grinding and polishing processes, the ceramic disc needs to be cleaned to remove surface residues, impurities and the like, so that the quality of the wafer is ensured. At present, ultrasonic cleaning can be generally adopted, and in the ultrasonic cleaning process, a ceramic disc generally enters the cleaning device along the horizontal direction, but because the ceramic disc is large in size, the cleaning device needs to occupy a large space, so that the conventional cleaning device is generally complex in structure and low in cleaning efficiency.

Disclosure of Invention

The utility model aims to provide a ceramic disc cleaning device with simple structure and high cleaning efficiency.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

a ceramic disc cleaning device comprising:

and (3) a cleaning mechanism: the cleaning mechanism comprises a cleaning tank and a soaking tank, wherein the cleaning tank and the soaking tank are arranged in the horizontal direction, the cleaning tank comprises a cleaning tank body, an ultrasonic cleaning piece and a circulating assembly, a cleaning cavity is formed in the cleaning tank body, the ultrasonic cleaning piece is arranged in the cleaning cavity, at least one side of the cleaning cavity is provided with an overflow cavity, the cleaning cavity is provided with a circulating inlet, the overflow cavity is provided with a circulating outlet, the circulating assembly is arranged outside the cleaning tank body, the inlet and the outlet of the circulating assembly are respectively communicated with the circulating outlet and the circulating inlet, and the circulating assembly is used for circularly pumping liquid in the overflow cavity into the cleaning cavity;

the material transferring mechanism comprises: the material moving mechanism is arranged on the side part of the cleaning mechanism and comprises a driving assembly, a first clamping assembly and a second clamping assembly, the first clamping assembly and the second clamping assembly are arranged on the driving assembly, and the driving assembly is used for driving the first clamping assembly and the second clamping assembly to move along the horizontal direction or the vertical direction so as to move the ceramic disc into or out of the cleaning tank and the soaking tank.

Preferably, the cleaning tank comprises a first cleaning tank and a second cleaning tank, the soaking tank comprises a first soaking tank and a second soaking tank, and the first cleaning tank, the first soaking tank, the second cleaning tank and the second soaking tank are sequentially arranged along the horizontal direction.

Preferably, the circulation assembly comprises a pumping member and a filtering member, wherein an inlet of the pumping member is communicated with a circulation outlet of the overflow cavity through a first circulation pipeline, an outlet of the pumping member is communicated with a circulation inlet of the cleaning cavity through a second circulation pipeline, and the filtering member is arranged on the second circulation pipeline.

Preferably, the cleaning cavity is further provided with a liquid outlet, the cleaning tank further comprises a liquid outlet assembly, the liquid outlet assembly comprises a liquid outlet pipeline and a liquid outlet control valve, an inlet of the liquid outlet pipeline is communicated with the liquid outlet of the cleaning cavity, and the liquid outlet control valve is arranged on the liquid outlet pipeline.

Preferably, the cleaning tank further comprises a liquid inlet assembly, the liquid inlet assembly comprises a liquid inlet pipeline, and an outlet of the liquid inlet pipeline is inserted into the cleaning cavity.

Preferably, the cleaning tank further comprises a heating element, the heating element is used for heating liquid in the cleaning cavity, a partition plate is arranged in the cleaning cavity, the partition plate separates the cleaning cavity in the vertical direction, through holes penetrating through the partition plate are formed in the partition plate, and the heating element is arranged in the cleaning cavity below the partition plate.

Preferably, the cleaning tank further comprises a placing frame, the placing frame is arranged in the cleaning cavity, a clamping groove is formed in the placing frame, an opening of the clamping groove faces upwards, and the shape of the clamping groove is consistent with that of the outer peripheral surface of the ceramic disc.

Preferably, the cleaning tank further comprises a monitoring assembly, the monitoring assembly comprises a temperature monitoring piece and a liquid level monitoring piece, the temperature monitoring piece and the liquid level monitoring piece are arranged on the cleaning tank body, the temperature monitoring piece is used for monitoring the liquid temperature in the cleaning cavity, and the liquid level monitoring piece is used for monitoring the liquid levels in the cleaning cavity and the overflow cavity.

Preferably, the soaking tank comprises a soaking tank body and a liquid outlet assembly, the soaking tank body is provided with a soaking cavity, at least one side of the soaking cavity is provided with an overflow cavity, the soaking cavity and the overflow cavity are respectively provided with a liquid outlet, the liquid outlet assembly is arranged outside the soaking tank body, an inlet of the liquid outlet assembly is communicated with the liquid outlet of the soaking cavity and the liquid outlet of the overflow cavity, and the liquid outlet assembly is used for discharging liquid in the soaking cavity and the overflow cavity.

Further preferably, the liquid outlet assembly comprises a first liquid outlet pipeline, a second liquid outlet pipeline and a liquid outlet control valve, wherein an inlet of the first liquid outlet pipeline is communicated with a liquid outlet of the soaking cavity, an inlet of the second liquid outlet pipeline is communicated with a liquid outlet of the overflow cavity, an outlet of the second liquid outlet pipeline is communicated with the first liquid outlet pipeline, and the liquid outlet control valve is arranged on the first liquid outlet pipeline and located at the liquid outlet of the soaking cavity.

Preferably, the driving assembly comprises a first driving assembly, a second driving assembly and a third driving assembly, the first clamping assembly is arranged on the first driving assembly, the second clamping assembly is arranged on the second driving assembly, the first driving assembly and the second driving assembly are respectively arranged on the third driving assembly, the first driving assembly and the second driving assembly are respectively used for driving the first clamping assembly and the second clamping assembly to move along the vertical direction, and the third driving assembly is used for driving the first driving assembly and the second driving assembly to move along the horizontal direction.

Still preferably, the third driving component comprises a sliding rail, a first sliding block, a second sliding block, a first driving component and a second driving component, wherein the first sliding block and the second sliding block are slidably arranged on the sliding rail, the first driving component and the second driving component are respectively arranged on the first sliding block and the second sliding block, the first driving component is connected with the first sliding block and is used for driving the first sliding block to move along the horizontal direction, and the second driving component is connected with the second sliding block and is used for driving the second sliding block to move along the horizontal direction.

Further preferably, the first clamping assembly comprises a plurality of first clamping pieces, and the plurality of first clamping pieces are distributed along the horizontal direction and connected with the first driving assembly; the second clamping assembly comprises a second clamping piece, and the second clamping piece is connected with the second driving assembly.

Still further preferably, the first clamping member and the second clamping member each comprise a clamping bracket and a clamping part, the clamping parts are provided with a pair of clamping parts, the clamping parts are arranged on two opposite sides of the clamping bracket, the clamping parts are provided with grooves, and the shapes of the grooves are consistent with those of the outer peripheral surfaces of the ceramic discs.

Due to the application of the technical scheme, compared with the prior art, the utility model has the following advantages:

the cleaning mechanism provided by the utility model is provided with the circulating assembly, so that the overflowed cleaning solution can be recycled, the cost is reduced, the material moving mechanism can automatically move the ceramic disc between the cleaning tank and the soaking tank, the vertical ultrasonic cleaning of the ceramic disc is realized, impurities are facilitated to fall off from the surface of the ceramic disc, the cleaning effect is improved, the degree of automation is high, the cleaning efficiency is higher, the requirement of high-speed production can be met, the structure is simple, the design is ingenious, the use is convenient, and the practicability is good.

Drawings

FIG. 1 is a schematic perspective view of a ceramic disk cleaning device according to the present embodiment;

fig. 2 is a schematic perspective view of a material transferring mechanism in the present embodiment;

fig. 3 is a schematic perspective view of a material transferring mechanism in the present embodiment;

fig. 4 is a schematic perspective view of a cleaning mechanism according to the present embodiment;

fig. 5 is a schematic perspective view of a cleaning mechanism according to the second embodiment;

fig. 6 is a schematic perspective view of a cleaning tank according to the present embodiment;

fig. 7 is a schematic perspective view of a second embodiment of the cleaning tank;

fig. 8 is a perspective view of a third schematic diagram of the cleaning tank of the present embodiment;

fig. 9 is a schematic perspective view of the soaking tank of the present embodiment.

In the above figures:

1. a cleaning tank; 101. a first cleaning tank; 102. a second cleaning tank; 11. a cleaning tank body; 111. cleaning the cavity; 1111. a circulation inlet; 1112. a liquid outlet; 112. an overflow chamber; 1121. a circulation outlet; 113. a partition plate; 12. an ultrasonic cleaning member; 13. a circulation assembly; 131. a first circulation pipe; 132. a second circulation pipe; 133. a pumping member; 134. a filter; 14. a liquid discharge assembly; 141. a liquid discharge pipe; 142. a liquid discharge control valve; 15. a liquid inlet component; 151. a liquid inlet pipe; 16. a heating member; 17. a placing rack; 171. a clamping groove; 18. a monitoring component; 181. a temperature monitoring member; 182. a liquid level monitoring member; 2. a soaking tank; 201. a first soaking tank; 202. a second soaking tank; 21. a soaking tank body; 211. a soaking cavity; 212. an overflow chamber; 22. a liquid outlet component; 221. a first liquid outlet pipe; 222. a second liquid outlet pipe; 223. a liquid outlet control valve; 23. a liquid inlet component; 231. a liquid inlet pipe;

3. a drive assembly; 31. a first drive assembly; 32. a second drive assembly; 33. a third drive assembly; 330. a slide rail; 331. a first slider; 332. a second slider; 333. a first driving member; 334. a second driving member; 4. a first clamping assembly; 41. a first clamping member; 5. a second clamping assembly; 51. a second clamping member; 61. a clamping bracket; 62. a clamping part; 620. a groove.

Detailed Description

The following description of the embodiments of the present utility model will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the utility model are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

In the description of the present utility model, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

The ceramic disc cleaning device comprises a cleaning mechanism and a material moving mechanism, wherein the cleaning mechanism comprises a cleaning tank 1 and a soaking tank 2, the cleaning tank 1 comprises a first cleaning tank 101 and a second cleaning tank 102, the soaking tank 2 comprises a first soaking tank 201 and a second soaking tank 202, and the first cleaning tank 101, the first soaking tank 201, the second cleaning tank 102 and the second soaking tank 202 are sequentially arranged along the horizontal direction; the material moving mechanism is arranged at the side part of the cleaning mechanism and is used for moving the ceramic disc among the first cleaning tank 101, the first soaking tank 201, the second cleaning tank 102 and the second soaking tank 202.

The following details of each component and its connection relation are described in detail:

as shown in fig. 4 and fig. 5, the first cleaning tank 101 and the second cleaning tank 102 have the same structure, that is, the cleaning tank 1 includes a cleaning tank body 11, a placement frame 17, an ultrasonic cleaning member 12, a heating member 16, a circulation assembly 13, a liquid inlet assembly 15 and a liquid discharge assembly 14, the ultrasonic cleaning member 12, the heating member 16 and the placement frame 17 are disposed in the cleaning tank body 11, a ceramic disc can be placed on the placement frame 17, the ultrasonic cleaning member 12 is used for cleaning the ceramic disc, and the heating member 16 is used for heating the liquid in the cleaning tank body 11.

Specifically:

as shown in fig. 6 and 7, the top of the cleaning tank 11 is open, and the cleaning tank 11 has a cleaning chamber 111 and an overflow chamber 112, that is, the cleaning chamber 111 and the overflow chamber 112 are also open at the top, and the overflow chamber 112 is located on at least one side of the cleaning chamber 111, in this embodiment: the overflow cavities 112 are arranged around the cleaning cavity 111, wherein the depth of the overflow cavity 112 positioned at one side of the cleaning cavity 111 is larger than the depth of the rest of the overflow cavities 112. The cleaning chamber 111 is provided with a partition plate 113, the partition plate 113 partitions the cleaning chamber 111 in the vertical direction, the partition plate 113 is provided with a plurality of through holes penetrating the partition plate 113, and the through holes are distributed in a matrix shape, so that the cleaning chambers 111 located above and below the partition plate 113 are communicated.

As shown in fig. 8, the liquid inlet assembly 15 is used for delivering an additive liquid into the cleaning chamber 111, specifically: the liquid inlet assembly 15 comprises a liquid inlet pipeline 151, wherein an outlet of the liquid inlet pipeline 151 is inserted into the cleaning cavity 111 from the top of the cleaning tank 11, and an inlet of the liquid inlet pipeline 151 is positioned outside the cleaning tank 11.

As shown in fig. 6 and 7, the drain assembly 14 is used to drain the liquid in the cleaning chamber 111, specifically: the cleaning cavity 111 is provided with a liquid outlet 1112, namely, the cleaning tank 11 is provided with the liquid outlet 1112 communicated with the cleaning cavity 111; the drain assembly 14 includes a drain pipe 141, and a drain control valve 142, where an inlet of the drain pipe 141 is communicated with a drain port 1112 of the cleaning chamber 111, and the drain control valve 142 is disposed on the drain pipe 141 and is used to control on-off of the drain pipe 141, and the drain control valve 142 may be, for example, a pneumatic butterfly valve, but is not limited to this embodiment.

As shown in fig. 6 and 7, the circulation assembly 13 is used for pumping the liquid in the overflow chamber 112 into the cleaning chamber 111, the cleaning chamber 111 has a circulation inlet 1111, the overflow chamber 112 has a circulation outlet 1121, the circulation assembly 13 is disposed outside the cleaning tank 11, and the inlet and the outlet of the circulation assembly 13 are respectively communicated with the circulation outlet 1121 and the circulation inlet 1111, specifically: the circulation assembly 13 includes a pumping member 133, a filtering member 134, an inlet of the pumping member 133 is communicated with a circulation outlet 1121 of the overflow chamber 112 through a first circulation duct 131, an outlet of the pumping member 133 is communicated with a circulation inlet 1111 of the washing chamber 111 through a second circulation duct 132, and the filtering member 134 is disposed on the second circulation duct 132.

As shown in fig. 8, the rack 17 is disposed in the cleaning chamber 111, specifically, the rack 17 is disposed on the partition 113; the holding frame 17 is provided with a clamping groove 171, the opening of the clamping groove 171 faces upwards, and the shape of the clamping groove 171 is consistent with the shape of the outer peripheral surface of the ceramic disc, namely, the clamping groove 171 is arc-shaped.

As shown in fig. 8, the ultrasonic cleaning members 12 are disposed in the cleaning chamber 111, the ultrasonic cleaning members 12 are provided with a pair, and the pair of ultrasonic cleaning members 12 are respectively disposed at opposite sides of the placement frame 17, so that ultrasonic cleaning is conveniently performed on both sides of the ceramic disk, and cleaning effect is improved; the specific structure and operation of the ultrasonic cleaning member 12 are known in the art and will not be described in detail herein. The heating member 16 is disposed in the cleaning chamber 111, and the heating member 16 is located under the partition 113, specifically, one end of the heating member 16 is inserted into the cleaning chamber 111 from the side of the cleaning tank 11.

In addition, as shown in fig. 6 and 7, the cleaning tank 1 further includes a monitoring assembly 18, the monitoring assembly 18 includes a temperature monitoring member 181 and a liquid level monitoring member 182, and the temperature monitoring member 181 and the liquid level monitoring member 182 are disposed on the cleaning tank 11, specifically: one end of the temperature monitoring member 181 is inserted into the cleaning chamber 111, and the temperature monitoring member 181 is used for monitoring the temperature of the liquid in the cleaning chamber 111; the liquid level monitoring piece 182 is provided with a plurality of, and the one end of liquid level monitoring piece 182 inserts in wash chamber 111 or overflow chamber 112, and liquid level monitoring piece 182 is used for monitoring the liquid level in wash chamber 111, the overflow chamber 112.

As shown in fig. 4 and fig. 5, the first soaking tank 201 and the second soaking tank 202 have the same structure, that is, the soaking tank 2 includes a soaking tank body 21, a liquid outlet component 22 and a liquid inlet component 23, the liquid outlet component 22 and the liquid inlet component 23 are respectively disposed on the soaking tank body 21, and the liquid outlet component 22 is disposed outside the soaking tank body 21.

Specifically:

as shown in fig. 9, the top of the soaking tank 21 is open, and the soaking tank 21 has a soaking cavity 211 and an overflow cavity 212 therein, that is, the soaking cavity 211 and the overflow cavity 212 are also open at the top, and the overflow cavity 212 is located on at least one side of the soaking cavity 211, in this embodiment: an overflow chamber 112 is provided at one side of the cleaning chamber 111.

As shown in fig. 9, the liquid inlet assembly 23 is configured to deliver an addition liquid into the infusion chamber 211, in particular: the liquid inlet assembly 23 comprises a liquid inlet pipeline 231, wherein an outlet of the liquid inlet pipeline 231 is inserted into the soaking cavity 211 from the top of the soaking tank body 21, and an inlet of the liquid inlet pipeline 231 is positioned outside the soaking tank body 21.

As shown in fig. 9, the liquid outlet assembly 22 is used for discharging the liquid in the soaking cavity 211 and the overflow cavity 212, and the inlet of the liquid outlet assembly 22 is communicated with the soaking cavity 211 and the overflow cavity 212, specifically: the soaking cavity 211 and the overflow cavity 212 are respectively provided with a liquid outlet; the liquid outlet assembly 22 comprises a first liquid outlet pipeline 221, a second liquid outlet pipeline 222 and a liquid outlet control valve 223, wherein an inlet of the first liquid outlet pipeline 221 is communicated with a liquid outlet of the soaking cavity 211, an inlet of the second liquid outlet pipeline 222 is communicated with a liquid outlet of the overflow cavity 212, and an outlet of the second liquid outlet pipeline 222 is communicated with the first liquid outlet pipeline 221; the liquid outlet control valve 223 is disposed on the first liquid outlet pipe 221 and located at the liquid outlet of the soaking chamber 211, and the liquid outlet control valve 223 may be, for example, a pneumatic butterfly valve, but is not limited to this embodiment.

Of course, the soaking tank 2 further includes a placement frame, the placement frame of the soaking tank 2 is disposed in the soaking cavity 211, and the structure of the placement frame is consistent with that of the placement frame 17 of the cleaning tank 1, which is not described herein again; the soaking tank 2 further comprises a monitoring component, the structure of the monitoring component of the soaking tank 2 is consistent with that of the monitoring component 18 of the cleaning tank 1, and the details are not repeated here; the soaking tank 2 further includes a heating member disposed in the soaking cavity 211, and the structure of the heating member is identical to that of the heating member 16 of the cleaning tank 1, which is not described herein.

In addition, as shown in fig. 4 and 5, the outlets of the liquid discharge pipe 141 of the first cleaning tank 101, the outlet of the first liquid discharge pipe 221 of the first soaking tank 201, the outlet of the liquid discharge pipe 141 of the second cleaning tank 102, and the outlet of the first liquid discharge pipe 221 of the second soaking tank 202 are communicated, so that the number of outlets is reduced from four to one, and the overall structure is simplified.

As shown in fig. 2 and 3, the material moving mechanism comprises a driving component 3, a first clamping component 4 and a second clamping component 5, wherein the first clamping component 4 and the second clamping component 5 are arranged on the driving component 3, and the driving component 3 is used for driving the first clamping component 4 and the second clamping component 5 to move along the horizontal direction or the vertical direction so as to move the ceramic disc into or out of the cleaning tank 1 and the soaking tank 2.

Specifically:

as shown in fig. 2 and 3, the driving assembly 3 includes a first driving assembly 31, a second driving assembly 32 and a third driving assembly 33, the first clamping assembly 4 is disposed on the first driving assembly 31, the second clamping assembly 5 is disposed on the second driving assembly 32, the first driving assembly 31 and the second driving assembly 32 are respectively disposed on the third driving assembly 33, the first driving assembly 31 is used for driving the first clamping assembly 4 to move in the vertical direction, the second driving assembly 32 is used for driving the second clamping assembly 5 to move in the vertical direction, and the third driving assembly 33 is used for driving the first driving assembly 4 and the second driving assembly 5 to move in the horizontal direction, so as to drive the first clamping assembly 4 and the second clamping assembly 5 to move in the horizontal direction.

As shown in fig. 2 and 3, the third driving assembly 33 includes a slide rail 330, a first slider 331, a second slider 332, a first driving member 333, and a second driving member 334, specifically: the first slider 331 is slidably disposed on the sliding rail 330, the first driving component 31 is disposed on the first slider 331, the first driving member 333 is connected to the first slider 331, and the first driving member 333 is configured to drive the first slider 331 to move on the sliding rail 330 along a horizontal direction, so as to drive the first driving component 31 to move along the horizontal direction, and make the first clamping component 4 also move along the horizontal direction; the second slider 332 is slidably disposed on the sliding rail 330, the second driving assembly 32 is disposed on the second slider 332, the second driving member 334 is connected to the second slider 332, and the second driving member 334 is configured to drive the second slider 332 to move on the sliding rail 330 in a horizontal direction, so as to drive the second driving assembly 32 to move in a horizontal direction, and make the second clamping assembly 5 also move in a horizontal direction.

The first driving assembly 31 and the second driving assembly 32 have the same structure, and can also adopt the structures of a sliding rail, a sliding block and a driving piece similar to the third driving assembly 33 so as to realize that the parts connected with the first driving assembly and the second driving assembly move along the vertical direction, which is not repeated herein; of course, only one embodiment is presented here, but is not limited to this embodiment.

As shown in fig. 2 and 3, the first clamping assembly 4 includes a plurality of first clamping members 41, the first clamping members 41 are disposed, the plurality of first clamping members 41 are distributed along the horizontal direction, and the plurality of first clamping members 41 are connected with the first driving assembly 31, that is, the plurality of first clamping members 41 can synchronously move along the horizontal direction or the vertical direction; in the present embodiment, three first clamping members 41 are provided, and the three first clamping members 41 are commonly connected to the first driving assembly 31 through one connecting rod. The second clamping assembly 5 comprises a second clamping member 51, the second clamping member 51 being connected to the second drive assembly 32.

The first clamping member 41 and the second clamping member 51 have the same structure, and as shown in fig. 2 and 3, each of the first clamping member and the second clamping member includes a clamping bracket 61 and a clamping portion 62, the clamping portion 62 is provided with a pair, and the clamping portions 62 are provided on opposite sides of the clamping bracket 61; the clamping part 62 is provided with a groove 620, the shape of the groove 620 is consistent with the shape of the outer peripheral surface of the ceramic disc, namely, the groove 620 is in an arc shape; a pair of clamping portions 62 can lift and clamp the ceramic disk.

The working procedure of the ceramic disc cleaning device of the present embodiment is specifically described below:

placing ceramic discs on the three first clamping pieces 41 of the first clamping assembly 4, and controlling the first clamping assembly 4 to move in the vertical direction and the horizontal direction through the first driving assembly 31 and the third driving assembly 33 so that the ceramic discs on the first clamping piece 41 closest to the second clamping assembly 5 enter the first cleaning tank 101 for cleaning once; after the completion, the first clamping assembly 4 is controlled by the first driving assembly 31 and the third driving assembly 33 to move along the vertical direction and the horizontal direction, so that the ceramic disc on the first clamping piece 41 closest to the second clamping assembly 5 enters the first soaking tank 201 for one time of soaking, and the ceramic disc on the first clamping piece 41 in the middle enters the first cleaning tank 101 for one time of cleaning; after the completion, the first clamping assembly 4 is controlled by the first driving assembly 31 and the third driving assembly 33 to move along the vertical direction and the horizontal direction, so that the ceramic disc on the first clamping piece 41 closest to the second clamping assembly 5 enters the second cleaning tank 102 for secondary cleaning, the ceramic disc on the first clamping piece 41 in the middle enters the first soaking tank 201 for primary soaking, and the ceramic disc on the first clamping piece 41 farthest from the second clamping assembly 5 enters the first cleaning tank 101 for primary cleaning; after the completion, the first clamping assembly 4 is controlled by the first driving assembly 31 and the third driving assembly 33 to move along the vertical direction and the horizontal direction, so that the ceramic disc on the first clamping piece 41 closest to the second clamping assembly 5 enters the second soaking tank 202 for secondary soaking, the ceramic disc on the first clamping piece 41 in the middle enters the second cleaning tank 102 for secondary cleaning, and the ceramic disc on the first clamping piece 41 farthest from the second clamping assembly 5 enters the first soaking tank 201 for primary soaking; after the completion, the second clamping assembly 5 is controlled by the second driving assembly 32 and the third driving assembly 33 to move along the vertical direction and the horizontal direction, so that the second clamping piece 51 moves out the ceramic disc in the second soaking tank 202, and meanwhile, the first clamping assembly 4 is controlled by the first driving assembly 31 and the third driving assembly 33 to move along the vertical direction and the horizontal direction, so that the ceramic disc in the second cleaning tank 102 moves into the second soaking tank 202 for secondary soaking, and the ceramic disc in the first soaking tank 201 moves into the second cleaning tank 102 for secondary cleaning; after the completion, the second clamping assembly 5 is controlled to move along the vertical direction and the horizontal direction by the second driving assembly 32 and the third driving assembly 33, so that the second clamping piece 51 moves out the ceramic disc in the second soaking tank 202, and meanwhile, the first clamping assembly 4 is controlled to move along the vertical direction and the horizontal direction by the first driving assembly 31 and the third driving assembly 33, so that the ceramic disc in the second cleaning tank 102 moves into the second soaking tank 202 for secondary soaking; after the completion, the second clamping assembly 5 is controlled to move along the vertical direction and the horizontal direction by the second driving assembly 32 and the third driving assembly 33, so that the second clamping piece 51 moves out the ceramic disc in the second soaking tank 202; the three ceramic plates are cleaned once, soaked once, cleaned twice and soaked twice, so that the cleaning efficiency is high, and the cleaning effect is improved.

The above embodiments are provided to illustrate the technical concept and features of the present utility model and are intended to enable those skilled in the art to understand the content of the present utility model and implement the same, and are not intended to limit the scope of the present utility model. All equivalent changes or modifications made in accordance with the spirit of the present utility model should be construed to be included in the scope of the present utility model.

Claims (10)

1. A ceramic dish belt cleaning device, its characterized in that: comprising the following steps:

and (3) a cleaning mechanism: the cleaning mechanism comprises a cleaning tank and a soaking tank, wherein the cleaning tank and the soaking tank are arranged in the horizontal direction, the cleaning tank comprises a cleaning tank body, an ultrasonic cleaning piece and a circulating assembly, a cleaning cavity is formed in the cleaning tank body, the ultrasonic cleaning piece is arranged in the cleaning cavity, at least one side of the cleaning cavity is provided with an overflow cavity, the cleaning cavity is provided with a circulating inlet, the overflow cavity is provided with a circulating outlet, the circulating assembly is arranged outside the cleaning tank body, the inlet and the outlet of the circulating assembly are respectively communicated with the circulating outlet and the circulating inlet, and the circulating assembly is used for circularly pumping liquid in the overflow cavity into the cleaning cavity;

the material transferring mechanism comprises: the material moving mechanism is arranged on the side part of the cleaning mechanism and comprises a driving assembly, a first clamping assembly and a second clamping assembly, the first clamping assembly and the second clamping assembly are arranged on the driving assembly, and the driving assembly is used for driving the first clamping assembly and the second clamping assembly to move along the horizontal direction or the vertical direction so as to move the ceramic disc into or out of the cleaning tank and the soaking tank.

2. The ceramic disk cleaning apparatus of claim 1, wherein: the cleaning tank include first cleaning tank, second cleaning tank, the soaking tank include first soaking tank, second soaking tank, first cleaning tank, first soaking tank, second cleaning tank and second soaking tank set gradually along the horizontal direction.

3. The ceramic disk cleaning apparatus of claim 1, wherein: the circulating assembly comprises a pumping piece and a filtering piece, wherein an inlet of the pumping piece is communicated with a circulating outlet of the overflow cavity through a first circulating pipeline, an outlet of the pumping piece is communicated with a circulating inlet of the cleaning cavity through a second circulating pipeline, and the filtering piece is arranged on the second circulating pipeline.

4. The ceramic disk cleaning apparatus of claim 1, wherein: the cleaning cavity is also provided with a liquid outlet, the cleaning tank further comprises a liquid outlet component, the liquid outlet component comprises a liquid outlet pipeline and a liquid outlet control valve, an inlet of the liquid outlet pipeline is communicated with the liquid outlet of the cleaning cavity, and the liquid outlet control valve is arranged on the liquid outlet pipeline.

5. The ceramic disk cleaning apparatus of claim 1, wherein: the cleaning tank also comprises a heating element, wherein the heating element is used for heating liquid in the cleaning cavity, a partition plate is arranged in the cleaning cavity, the partition plate is used for spacing the cleaning cavity in the vertical direction, a through hole penetrating through the partition plate is formed in the partition plate, and the heating element is arranged in the cleaning cavity below the partition plate.

6. The ceramic disk cleaning apparatus of claim 1, wherein: the cleaning tank also comprises a placing rack, the placing rack is arranged in the cleaning cavity, a clamping groove is formed in the placing rack, an opening of the clamping groove faces upwards, and the shape of the clamping groove is consistent with that of the outer peripheral surface of the ceramic disc.

7. The ceramic disk cleaning apparatus of claim 1, wherein: the cleaning tank also include monitoring component, monitoring component include temperature monitoring piece, liquid level monitoring piece, temperature monitoring piece, liquid level monitoring piece all set up the cleaning tank body on, temperature monitoring piece be used for monitoring the liquid temperature in the cleaning chamber, liquid level monitoring piece be used for monitoring the liquid level in cleaning chamber, overflow chamber.

8. The ceramic disk cleaning apparatus of claim 1, wherein: the driving assembly comprises a first driving assembly, a second driving assembly and a third driving assembly, wherein the first clamping assembly is arranged on the first driving assembly, the second clamping assembly is arranged on the second driving assembly, the first driving assembly and the second driving assembly are respectively arranged on the third driving assembly, the first driving assembly and the second driving assembly are respectively used for driving the first clamping assembly and the second clamping assembly to move along the vertical direction, and the third driving assembly is used for driving the first driving assembly and the second driving assembly to move along the horizontal direction.

9. The ceramic disk cleaning apparatus as recited in claim 8, wherein: the third driving assembly comprises a sliding rail, a first sliding block, a second sliding block, a first driving piece and a second driving piece, wherein the first sliding block and the second sliding block are slidably arranged on the sliding rail, the first driving piece is connected with the first sliding block and used for driving the first sliding block to move along the horizontal direction, and the second driving piece is connected with the second sliding block and used for driving the second sliding block to move along the horizontal direction.

10. The ceramic disk cleaning apparatus as recited in claim 8, wherein: the first clamping assembly comprises a plurality of first clamping pieces which are distributed along the horizontal direction and are connected with the first driving assembly; the second clamping assembly comprises a second clamping piece, and the second clamping piece is connected with the second driving assembly.