CN220479616U - Chip dirt dust-sticking device - Google Patents

Abstract

The utility model relates to the technical field of chip dust removing equipment, in particular to a chip dirt dust adhering device. The device comprises a bottom plate, a side vertical plate arranged on the side edge of the bottom plate 1, a servo driving module arranged on the side vertical plate, a servo clamping module driven by the servo driving module, an ESD dust-sticking rod taking unit arranged on the bottom plate, and a dust-sticking rod positioning CCD unit arranged beside the ESD dust-sticking rod taking unit, wherein a height ranging sensor is further arranged beside the servo clamping module, and the dust-sticking rod positioning CCD unit comprises a side CCD detection camera, a bottom CCD detection camera and a CCD light source. The utility model has the advantages that: the front and back working procedures are matched with the automatic positioning of dirt and dust points on the chip, the dust stick is automatically replaced, the dust is automatically adhered, the yield is high, the degree of automation is high, the quality is ensured, the production efficiency is greatly improved, and the clean quality of the chip is also ensured.

Description

Chip dirt dust-sticking device

Technical Field

The utility model relates to the technical field of chip dust removing equipment, in particular to a chip dirt dust adhering device.

Background

Along with development and progress of technology, chips are used in more and more products, chip cleaning is an essential link in the chip manufacturing process, the existing chip cleaning is mostly to manually determine positions of dirt and dust points on the chips under a microscope, and then the dust sticking rod is manually stuck and removed, so that manpower resources are consumed in operation, the production efficiency is low, secondary pollution is easily caused, and the quality of the chips is unstable.

In the prior art, CN202122161594.2, a chip dirt glues dirt device, before the cooperation clearance chip spot, has the restriction to the position of chip incoming material, just can detect the target position, and the location is not accurate enough, consequently in order to guarantee the precision.

Therefore, it is necessary to design a chip dirt and dust-sticking device to solve the above problems.

Disclosure of Invention

The utility model aims to provide a chip dirt dust-sticking device which is used for overcoming the defects in the prior art.

In order to achieve the above purpose, the present utility model adopts the following technical scheme:

the utility model provides a chip dirt glues dirt device, its includes the bottom plate, sets up at the side riser of bottom plate 1 side, sets up servo drive module on the side riser, receive servo drive module driven servo centre gripping module, still including setting up ESD glues dirt stick and gets the material unit on the bottom plate and set up the other gluey dirt stick location CCD unit that glues dirt stick and get the material unit, servo centre gripping module is other still to be provided with high range sensor, gluey dirt stick location CCD unit includes side CCD detection camera, bottom CCD detection camera and CCD light source.

Preferably, the servo driving module comprises an X-axis screw rod module arranged on the side vertical plate, a Z-axis screw rod module driven by the X-axis screw rod module and a mounting seat driven by the Z-axis screw rod module.

Preferably, the servo clamping module is installed on the installation seat through the installation plate, the servo clamping module comprises a servo electric claw, a clamping jaw driven by the servo electric claw and a clamping jaw, and the height ranging sensor is arranged beside the clamping jaw.

Preferably, the ESD dust stick material taking unit comprises a Y-axis servo driving module, a material taking plate mounting seat driven by the Y-axis servo driving module, and a dust stick mounting fixture arranged on the material taking plate mounting seat, wherein a plurality of mounting grooves are formed in the dust stick mounting fixture.

Preferably, the side CCD detection camera is arranged opposite to the CCD light source, and the CCD detection camera and the bottom CCD detection camera are mutually perpendicular.

The beneficial effects of the utility model are as follows: according to the technical scheme, the side CCD detection camera and the bottom CCD detection camera of the dust-sticking rod positioning CCD unit are used in a matched mode to accurately position size information of a rubber head of the dust-sticking rod, such as height information, and the height information is detected by a height ranging sensor arranged beside a servo clamping module, so that the position between the dust-sticking rod and the chip is accurately obtained, and then the servo driving module drives the dust-sticking rod to remove dirt; the front and back working procedures are matched with the automatic positioning of dirt and dust points on the chip, the dust stick is automatically replaced, the dust is automatically adhered, the yield is high, the degree of automation is high, the quality is ensured, the production efficiency is greatly improved, and the clean quality of the chip is also ensured.

Drawings

FIG. 1 is a schematic diagram of a chip dirt dust-sticking device according to the present utility model;

FIG. 2 is a schematic diagram of a second view angle structure of a chip dirt and dust device according to the present utility model;

FIG. 3 is a side view of a chip dirt dust-binding apparatus of the present utility model;

in the figure: 1. a bottom plate; 2. a side vertical plate; 3. a servo driving module; 31. an X-axis screw rod module; 32. a Z-axis screw rod module; 33. a mounting base; 4. a servo clamping module; 41. a mounting plate; 42. a servo electric claw; 43. a clamping jaw; 44. a height ranging sensor; 5. an ESD dust stick material taking unit; 51. a Y-axis servo driving module; 52. a material taking plate mounting seat; 53. dust stick installation tool; 54. a mounting groove; 6. the dust stick positions the CCD unit; 61. a side CCD detection camera; 62. a bottom CCD detection camera; 63. a CCD light source.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

In the description of the present utility model, it should be understood that the terms "upper," "lower," "front," "rear," "left," "right," "top," "bottom," "inner," "outer," and the like indicate or are based on the orientation or positional relationship shown in the drawings, merely to facilitate description of the present utility model and to simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model.

Referring to fig. 1 to 3, a chip dirt dust-sticking device includes a base plate 1, a side vertical plate 2 disposed at a side edge of the base plate 1, a servo driving module 3 disposed on the side vertical plate 2, a servo clamping module 4 driven by the servo driving module 3, an ESD dust-sticking rod taking unit 5 disposed on the base plate 1, and a dust-sticking rod positioning CCD unit 6 disposed beside the ESD dust-sticking rod taking unit 5.

The servo driving module 3 comprises an X-axis screw rod module 31, a Z-axis screw rod module 32 and a mounting seat 33, wherein the X-axis screw rod module 31 is arranged on the side vertical plate 2, the Z-axis screw rod module 32 is driven by the X-axis screw rod module 31, and the mounting seat 33 is driven by the Z-axis screw rod module 32;

the servo clamping module 4 is mounted on the mounting seat 33 through a mounting plate 41, and the servo clamping module 4 comprises a servo electric claw 42, a clamping jaw 43 driven by the servo electric claw 42 and a height ranging sensor 44 arranged beside the clamping jaw 43. The clamping of the clamping jaw 43 is driven by the servo electric claw 42, the height of the chip is interfered by the height ranging sensor 44, and the chip is matched with the servo driving module 3 for use, so that accurate positioning can be ensured, and dirt on the chip is adhered and removed.

The ESD dust stick material taking unit 5 comprises a Y-axis servo driving module 51, a material taking plate mounting seat 52 driven by the Y-axis servo driving module 51, and a dust stick mounting tool 53 arranged on the material taking plate mounting seat 52, wherein a plurality of mounting grooves 54 are formed in the dust stick mounting tool 53, and the ESD dust stick is clamped into the mounting grooves for fixed mounting.

The dust stick positioning CCD unit 6 comprises a side CCD detection camera 61, a bottom CCD detection camera 62 and a CCD light source 63, wherein the side CCD detection camera 61 is opposite to the CCD light source 63, and the CCD detection camera 61 and the bottom CCD detection camera 62 are mutually perpendicular. The side CCD detection camera 61 and the bottom CCD detection camera 62 are matched to accurately position the size information of the glue head, the height and the like of the dust stick, so that the position information can be quickly known.

In this embodiment, after the product flows into the dust-sticking station, the servo driving module 3 drives and shifts to the front of the dust-sticking rod installation tool 53 of the ESD dust-sticking rod material taking unit 5, a clamping jaw is driven by a servo electric claw to automatically clamp a dust-sticking rod, the servo driving module 3 transversely shifts to the dust-sticking rod positioning CCD unit 6, the side CCD detection camera 61 and the bottom CCD detection camera 62 take a photograph of the dust-sticking rod to position, the size and height information of the glue head of the dust-sticking rod are obtained, the servo driving module 3 transversely shifts to the upper part of the chip, the height ranging sensor 44 firstly measures the height of the chip to obtain the height information of the chip, the clamping jaw Z-direction servo module ascends to lower to the position of the dust-sticking point of the chip according to the height information of the chip, the clamping jaw Z-direction servo module ascends, the dust-sticking rod is put into the waste box, and the servo driving module 3 returns to the origin to wait.

The utility model has the advantages that the technical scheme is that the side CCD detection camera and the bottom CCD detection camera of the dust-sticking rod positioning CCD unit are matched for use to accurately position the size information of the glue head of the dust-sticking rod, such as the size information of the height and the like, and the height of the chip is detected by the height ranging sensor arranged beside the servo clamping module, so that the position between the dust-sticking rod and the chip is accurately obtained, and the dust and the dirt are removed by driving the servo driving module; the front and back working procedures are matched with the automatic positioning of dirt and dust points on the chip, the dust stick is automatically replaced, the dust is automatically adhered, the yield is high, the degree of automation is high, the quality is ensured, the production efficiency is greatly improved, and the clean quality of the chip is also ensured.

The foregoing is only a preferred embodiment of the present utility model, but the scope of the present utility model is not limited thereto, and any person skilled in the art, who is within the scope of the present utility model, should make equivalent substitutions or modifications according to the technical scheme of the present utility model and the inventive concept thereof, and should be covered by the scope of the present utility model.

Claims (5)

1. The utility model provides a chip dirt glues dirt device, its includes the bottom plate, sets up at the side riser of bottom plate 1 side, sets up servo drive module, the quilt on the side riser servo drive module driven servo centre gripping module, its characterized in that: the device is characterized by further comprising an ESD dust stick material taking unit arranged on the bottom plate and a dust stick positioning CCD unit arranged beside the ESD dust stick material taking unit, wherein a height ranging sensor is further arranged beside the servo clamping module, and the dust stick positioning CCD unit comprises a side CCD detection camera, a bottom CCD detection camera and a CCD light source.

2. The chip dirt dust-sticking device according to claim 1, wherein: the servo driving module comprises an X-axis screw rod module arranged on the side vertical plate, a Z-axis screw rod module driven by the X-axis screw rod module and a mounting seat driven by the Z-axis screw rod module.

3. The chip dirt dust-sticking device according to claim 2, wherein: the servo clamping module is installed on the installation seat through the installation plate and comprises a servo electric claw, clamping claws driven by the servo electric claw and clamping claws, and the height ranging sensor is arranged beside the clamping claws.

4. The chip dirt dust-sticking device according to claim 1, wherein: the ESD dust stick material taking unit comprises a Y-axis servo driving module, a material taking plate mounting seat driven by the Y-axis servo driving module, and a dust stick mounting tool arranged on the material taking plate mounting seat, wherein a plurality of mounting grooves are formed in the dust stick mounting tool.

5. The chip dirt dust-sticking device according to claim 1, wherein: the side CCD detection cameras are arranged opposite to the CCD light source, and the CCD detection cameras and the bottom CCD detection cameras are mutually perpendicular.