CN220468243U

CN220468243U - Combined crucible

Info

Publication number: CN220468243U
Application number: CN202322120249.3U
Authority: CN
Inventors: 刘磊; 蒋立民; 武鹏; 徐凯建
Original assignee: Jiangsu Zhongneng Polysilicon Technology Development Co ltd
Current assignee: Jiangsu Zhongneng Polysilicon Technology Development Co ltd
Priority date: 2023-08-08
Filing date: 2023-08-08
Publication date: 2024-02-09
Anticipated expiration: 2033-08-08

Abstract

The combined crucible provided by the utility model comprises a first crucible and a second crucible, wherein the first crucible comprises a first opening part, a variable diameter part and a second opening part which are arranged from top to bottom, the inner diameter of the first opening part is smaller than that of the second opening part, the first crucible is of a horn-shaped structure with a narrow upper part and a wide lower part, the second crucible is of a straight cylinder type single-opening crucible, the second crucible is arranged outside the first crucible, the combined crucible also comprises a fixing part, the fixing part is arranged inside the second crucible, the fixing part comprises a supporting part, the first crucible is arranged on the supporting part, the contact area of silicon liquid and the crucible is reduced through the cooperation between the first crucible and the second crucible, the pollution degree of the silicon liquid by the crucible is reduced, the energy consumption is reduced, the installation is simple, and the cooperation is firm.

Description

Combined crucible

Technical Field

The utility model relates to a crucible, in particular to a combined crucible.

Background

With the progressive maturity of granular silicon technology, single crystal silicon crystal pulling technology is gradually transitioning from multiple crystal pulling technology (Recharged Czocharlski, RCZ) to continuous crystal pulling technology (Continuous Czocharlski, CCZ), which can effectively increase crystal pulling yield and reduce crucible loss and production cost.

At present, the double-layer crucible crystal pulling technology used by the CCZ technology has the advantages that more than 95% of impurities in the double-layer crucible crystal pulling technology come from diffusion of impurities in a crucible at high temperature in the crystal pulling process, and the larger the area of silicon liquid contacted with the crucible is, the higher the content of various impurities can be caused, so that the quality and the yield of monocrystalline silicon products are seriously influenced.

Disclosure of Invention

The utility model aims to overcome the defects in the prior art, and provides a combined crucible which solves the problem that the current silicon liquid is larger in contact area with the crucible.

In order to solve the technical problems, the utility model is realized by adopting the following technical scheme:

the utility model provides a combined crucible, which comprises a first crucible and a second crucible, wherein the second crucible is arranged outside the first crucible, the first crucible comprises a first opening part, a variable diameter part and a second opening part which are arranged from top to bottom, the inner diameter of the first opening part is smaller than that of the second opening part, the second crucible comprises a third opening part and a first main body part, the inner diameter of the third opening part is larger than or equal to the outer diameter of the second opening part, the combined crucible further comprises a fixing part, the fixing part is arranged inside the second crucible, the fixing part comprises a supporting part, and the second opening part is arranged on the supporting part.

Further, the fixed part is a third crucible, the third crucible is arranged in the second crucible, the third crucible comprises a fourth opening and a second main body part, the supporting part is the fourth opening, the opening direction of the fourth opening is the same as that of the third opening, the outer diameter of the fourth opening is equal to the inner diameter of the third opening, the third crucible is fixedly arranged with the second crucible, and the second opening is arranged on the fourth opening.

Further, the fixed part is a support frame, the support frame comprises two or more support rods, a supporting point is shared between the support rods, the supporting point is arranged at the bottom of the second crucible, the support rods are arranged on the inner wall of the second crucible, and the end parts of the support rods form the supporting parts.

Further, the material of the support frame comprises graphite and/or ceramic and/or silicon carbide.

Further, the fixing component is a convex ring portion, the convex ring portion is fixedly connected with the second crucible, or the convex ring portion and the second crucible are integrally arranged, the convex ring portion extends towards the inside of the second crucible, and the second opening portion is arranged on the convex ring portion.

Further, the second opening portion further includes a connection portion, the connection portion extends along an opening direction of the second opening portion, and the connection portion is disposed on the support portion.

Further, a plurality of communicating holes are provided in the diameter-variable portion of the first crucible.

Further, the wall thickness of the first crucible and the wall thickness of the second crucible are 10 mm-20 mm, and the thickness of the fixing part is 10 mm-20 mm.

After the scheme is adopted, the utility model has the following advantages: the combined crucible provided by the utility model comprises a first crucible and a second crucible, wherein the first crucible comprises a first opening part, a variable diameter part and a second opening part which are arranged from top to bottom, the inner diameter of the first opening part is smaller than that of the second opening part, the first crucible is of a horn-shaped structure with a narrow upper part and a wide lower part, the second crucible is of a straight cylinder type single-opening crucible, the second crucible is arranged outside the first crucible, the combined crucible also comprises a fixing part, the fixing part is arranged inside the second crucible, the fixing part comprises a supporting part, the first crucible is arranged on the supporting part, the contact area of silicon liquid and the crucible is reduced through the cooperation between the first crucible and the second crucible, the pollution degree of the silicon liquid by the crucible is reduced, the energy consumption is reduced, the installation is simple, and the cooperation is firm.

Drawings

FIG. 1 is a schematic view of a structure of a combination crucible provided by the present utility model;

FIG. 2 is an exploded schematic view of the structure of the combination crucible provided in FIG. 1;

FIG. 3 is a cross-sectional view of the construction of the combination crucible provided in FIG. 1;

FIG. 4 is a cross-sectional view of a portion of the construction of the combination crucible provided in FIG. 1;

FIG. 5 is a structural cross-sectional view of a second embodiment of a combination crucible provided by the present utility model;

FIG. 6 is a partial structural top view of a second embodiment of the combination crucible provided in FIG. 5;

FIG. 7 is a structural cross-sectional view of a third embodiment of a combination crucible provided by the present utility model;

fig. 8 is a structural cross-sectional view of another first crucible of the combination crucible provided by the present utility model.

Description of the embodiments

For a better understanding of the objects, structure and function of the present utility model, a combination crucible according to the present utility model will be described in further detail with reference to the accompanying drawings.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first", "a second", etc. may explicitly or implicitly include one or more such feature. In the description of the present utility model, unless otherwise indicated, the meaning of "a plurality" is two or more.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art in a specific case.

According to the present utility model, as shown in fig. 1 to 8, there is provided a composite crucible 100, wherein the composite crucible 100 comprises a first crucible 1 and a second crucible 2, the second crucible 2 is disposed outside the first crucible 1, the first crucible 1 comprises a first opening 11, a reducing portion 12 and a second opening 13 disposed from top to bottom, the inner diameter of the first opening 11 is smaller than the inner diameter of the second opening 13, i.e. the first crucible 1 is a crucible with a horn-shaped structure with a narrow top and a wide bottom, and the inner diameter of the reducing portion 12 is gradually increased from the first opening 11 to the second opening 13 according to the drawings. And the diameter-changing portion 12 of the first crucible 1 is provided with a plurality of communicating holes 14, and the communicating holes 14 are used for entering the second crucible 2 from the communicating holes 14 after the molten material is pulled later. The second crucible 2 includes a third opening 21 and a first body 22, and specifically, the first body 22 includes a straight tube 23 and a curved portion 24, that is, the second crucible 2 is a straight tube type crucible with one open section. The inner diameter of the third opening 21 is larger than or equal to the outer diameter of the second opening 13, the included angle between the diameter-variable portion 12 and the straight tube portion 23 is about 0-45 degrees, the combined crucible 100 further comprises a fixing member 3, the fixing member 3 is arranged in the second crucible 2, the fixing member 3 comprises a supporting portion 31, the second opening 13 is arranged on the supporting portion 31, the second opening 13 further comprises a connecting portion 15 according to fig. 8, the connecting portion 15 extends along the opening direction of the second opening 13, and the connecting portion 15 is arranged on the supporting portion 31. The thickness of the wall of the first crucible 1 and the second crucible 2 is 10 to 20mm, the thickness of the fixing member 3 is 10 to 20mm, and preferably the thickness of the wall of the second crucible 2 is 10, 15 or 20mm, and the thickness of the fixing member 3 is 10, 15 or 20mm.

According to the embodiment shown in fig. 1 to 4, the fixing member 3 is a third crucible 4, the third crucible 4 is disposed inside the second crucible 2, the third crucible 4 includes a fourth opening 41 and a second main body 42, the supporting portion 31 is the fourth opening 41, the opening directions of the fourth opening 41 and the third opening 21 are the same, the outer diameter of the fourth opening 41 is equal to the inner diameter of the third opening 21, the third crucible 4 and the second crucible 2 are fixedly disposed, the second opening 13 is disposed on the fourth opening 41, specifically, in the embodiment, the third crucible 4 is lower than the second crucible 2, the third crucible 4 is disposed as a lining body of the second crucible 2, the position of the fourth opening 41 is located at the straight barrel 23 of the second crucible 2 and is lower than the third opening 21, the formed height difference is set as a step-like, so that the first 1 is lapped on the third crucible 4, or the first 1 is fixed on the third crucible 4, the first crucible 1 and the second crucible 2 are completed, the installation of the third crucible 2 is not firmly deformed, and the combination structure of the third crucible 2 is provided, and the installation of the crucible is not firm in the embodiment, and the installation structure of the third crucible 4 is easier.

According to the embodiment shown in fig. 5 and 6, the fixing component 3 is a supporting frame 5, the supporting frame 5 includes two or more supporting rods 51, a supporting point 52 is shared between the supporting rods 51, the supporting point 52 is arranged at the bottom of the second crucible 2, the supporting rods 51 are arranged on the inner wall of the second crucible 2, and the end parts of the supporting rods 51 form the supporting part 31. Specifically, in the embodiment shown in the drawings, the supporting frame 5 includes two supporting rods 51, the supporting rods 51 are elastic members and are installed on the inner wall of the second crucible 2, the two supporting rods 51 are fixedly arranged, supporting points 52 located at the bottom of the second crucible 2 are formed on the two supporting rods 51 to ensure the supporting balance of the supporting rods 51, the end parts of the supporting rods 51 are rectangular planes, the installation of the first crucible 1 and the second crucible 2 is completed through the welding and fixing of the end parts of the supporting rods 51 by the four end parts of the two supporting rods 51, or the first crucible 1 is lapped on the four end parts to complete the fixing between the two end parts, in addition, in use, the number of the supporting rods 51 can be more than two, the number of the supporting rods 51 is ensured to be installed on the inner wall of the second crucible 2, and the end parts of the supporting rods are formed with spaces convenient for the installation and the fixing with the first crucible 1, so that the number is not particularly limited. In the embodiment of the utility model, the cross-like support frame 5 is used for installation and fixation, and the structure is relatively simple and convenient for installation. The material of the supporting frame 5 comprises one of graphite, tungsten, molybdenum, high-purity quartz, ceramic, silicon carbide and the like, or a mixture of a plurality of materials, and the interior of the army is polluted in the process of melting and crystal pulling.

According to fig. 7, the present utility model provides an embodiment, in which the fixing member 3 is a collar portion 6, the collar portion 6 is fixedly connected to the second crucible 2, or the collar portion 6 is integrally provided with the second crucible 2, the collar portion 6 extends toward the inside of the second crucible 2, and the second opening portion 13 is provided on the collar portion 6. Specifically, in this embodiment, the collar portion 6 and the second crucible 2 are integrally formed, or the collar portion 6 and the second crucible 2 are welded and fixed, the collar portion 6 is located at the position of the straight tube portion 23 of the second crucible 2, extends toward the inside of the second crucible 2, and the protruding portion serves as a supporting portion 31 for overlapping or fixing the first crucible 1 for completing the installation of the first crucible 1 and the second crucible 2.

In summary, the combined crucible 100 provided by the utility model comprises the first crucible 1 and the second crucible 2, the first crucible 1 comprises the first opening 11, the variable diameter portion 12 and the second opening 13 which are arranged from top to bottom, the inner diameter of the first opening 11 is smaller than that of the second opening 13, the first crucible 1 is a crucible with a horn-shaped structure with a narrow top and a wide bottom, the second crucible 2 is a straight-tube type single-opening crucible, the second crucible 2 is arranged outside the first crucible 1, the combined crucible 100 further comprises the fixing part 3, the fixing part 3 is arranged inside the second crucible 2, the fixing part 3 comprises the supporting portion 31, the first crucible 1 is arranged on the supporting portion 31, through the cooperation between the first crucible 1 and the second crucible 2, the contact area of silicon liquid and the crucible is reduced, the pollution degree of the silicon liquid by the crucible is reduced, the energy consumption is reduced, the installation is simple, and the cooperation is firm.

It will be understood that the utility model has been described in terms of several embodiments, and that various changes and equivalents may be made to these features and embodiments by those skilled in the art without departing from the spirit and scope of the utility model. In addition, many modifications may be made to adapt a particular situation or material to the teachings of the utility model without departing from the essential scope thereof. Therefore, it is intended that the utility model not be limited to the particular embodiment disclosed, but that the utility model will include all embodiments falling within the scope of the appended claims.

Claims

1. The utility model provides a modular crucible, modular crucible includes first crucible and second crucible, the second crucible set up in the outside of first crucible, its characterized in that, first crucible includes from top to bottom the first opening that sets up, reducing portion and second opening, the internal diameter of first opening is less than the internal diameter of second opening, the second crucible includes third opening and first main part, the internal diameter of third opening is greater than or equal to the external diameter of second opening, modular crucible still includes fixed part, fixed part set up in the inside of second crucible, fixed part includes supporting part, the second opening set up in on the supporting part.

2. The combination crucible according to claim 1, wherein the fixing member is a third crucible provided in the second crucible, the third crucible includes a fourth opening and a second main body portion, the supporting portion is the fourth opening, the opening directions of the fourth opening and the third opening are the same, the outer diameter of the fourth opening and the inner diameter of the third opening are the same, the third crucible and the second crucible are fixedly provided, and the second opening is provided on the fourth opening.

3. The combination crucible of claim 1, wherein the fixed component is a support frame, the support frame comprises two or more support rods, a support point is shared between the support rods, the support point is arranged at the bottom of the second crucible, the support rods are arranged on the inner wall of the second crucible, and the end parts of the support rods form the support part.

4. A combination crucible according to claim 3, wherein the support frame comprises graphite and/or ceramic and/or silicon carbide.

5. The combination crucible of claim 1, wherein the fixing member is a collar portion, the collar portion is fixedly connected to the second crucible, or the collar portion is integrally provided with the second crucible, the collar portion extends toward the inside of the second crucible, and the second opening portion is provided on the collar portion.

6. The combination crucible according to claim 1, wherein the second opening portion further comprises a connecting portion extending along an opening direction of the second opening portion, the connecting portion being provided on the supporting portion.

7. The combination crucible according to claim 1, wherein the diameter-changing portion of the first crucible is provided with a plurality of communicating holes.

8. The combination crucible of claim 1, wherein the first crucible and the second crucible have a wall thickness of 10mm to 20mm and the stationary member has a thickness of 10mm to 20mm.