CN209669393U - A kind of crucible shaft for single crystal furnace seal assembly and crucible axis driving mechanism - Google Patents
A kind of crucible shaft for single crystal furnace seal assembly and crucible axis driving mechanism Download PDFInfo
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- CN209669393U CN209669393U CN201822203225.3U CN201822203225U CN209669393U CN 209669393 U CN209669393 U CN 209669393U CN 201822203225 U CN201822203225 U CN 201822203225U CN 209669393 U CN209669393 U CN 209669393U
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Abstract
The utility model provides a kind of crucible shaft for single crystal furnace seal assembly and crucible axis driving mechanism; it include: device for sealing magnetic fluid, protective case, flexible sealing shroud; device for sealing magnetic fluid is sheathed on the one end of crucible axis far from single crystal growing furnace; protective case and flexible sealing shroud are all connected between single crystal growing furnace bottom and device for sealing magnetic fluid; protective case and flexible sealing shroud are successively sheathed on the outside of crucible axis, and the fusing point of protective case is greater than 1400 degree.The utility model is by being arranged protective case between crucible axis and flexible sealing shroud; it realizes to the isolation between crucible axis and flexible sealing shroud; reduce destruction of the molten silicon to flexible sealing shroud; and avoid flexible sealing shroud rupture and caused by vacuum leak phenomenon, reduce the maintenance cost of single crystal furnace equipment.
Description
Technical field
The utility model relates to monocrystalline silicon manufacturing technology field more particularly to a kind of crucible shaft for single crystal furnace seal assembly and
Crucible axis driving mechanism.
Background technique
Single crystal growing furnace is one kind in inert gas (based on nitrogen, helium) environment, with graphite heater that polysilicon etc. is more
Brilliant material fusing, with the equipment of Grown by CZ Method dislocation-free monocrystalline.
Currently, single crystal furnace equipment includes the crucible axis of rotatable flexible, crucible axis uses sylphon seal, and crucible axis is being driven
Rotary extension is carried out under the driving of dynamic equipment, and by the cooperation of stretching head, the silica crucible institute on crucible axis top will be set
The molten silicon of carrying is stretched as silicon single crystal rod.
In current single crystal growing furnace, since ripple tube wall is relatively thin, and work long hours in high temperature, vacuum state, weld seam is easy
Cracking damage leads to gas leakage.Lead to that bellows service life is low, maintenance replacement cost is high.In addition, leaking in the process of running
When silicon, molten silicon contact bellows can be made, bellows is caused to be burnt, cause vacuum leak.
Utility model content
The utility model provides a kind of crucible shaft for single crystal furnace seal assembly and crucible axis driving mechanism, to solve existing skill
The problems such as in use, bellows is easy to damage for single crystal growing furnace in art, and maintenance cost is caused to increase.
It is according to the present utility model in a first aspect, providing a kind of crucible shaft for single crystal furnace seal assembly, the single crystal growing furnace
Include: with crucible shaft seal assembly
Device for sealing magnetic fluid, protective case and flexible sealing shroud；
The device for sealing magnetic fluid is sheathed on the one end of the crucible axis far from the single crystal growing furnace bottom, the protective case and
The flexible sealing shroud is all connected between the single crystal growing furnace bottom and the device for sealing magnetic fluid, the protective case and described is stretched
Contracting sealing shroud is successively sheathed on the outside of the crucible axis, and the fusing point of the protective case is greater than 1400 degree.
Optionally, the crucible axis includes:
The structure of the protective case is stretching structure.
Optionally, the protective case includes:
The sleeve that multiple internal diameters successively successively decrease；
The smallest sleeve of internal diameter is set to centre, and the sequence that remaining sleeve is sequentially increased according to internal diameter is mutually socketed
Setting, and it is connected to the both ends of the smallest sleeve of the internal diameter.
Optionally, the flexible sealing shroud is bellows.
Optionally, the crucible shaft for single crystal furnace seal assembly further include:
First flange piece and second flange piece；
The first flange piece is arranged between the single crystal growing furnace bottom and the flexible sealing shroud；
The second flange piece is arranged between the device for sealing magnetic fluid and the flexible sealing shroud.
Optionally, one end of the protective case is fixedly connected with the inward flange of the first flange piece, the protective case
The other end is fixedly connected with the inward flange of the second flange piece.
Optionally, the crucible axis includes:
First branch and the second branch；
One end of first branch is provided with taper salient angle, is provided with and the cone in one end of second branch
The matched cone tank of shape salient angle, the taper salient angle with the cone tank for engaging.
Optionally, the cone angle of the taper salient angle is 30 degree.
Optionally, the material of the flexible sealing shroud includes stainless steel, and the material of the protective case includes molybdenum or molybdenum
Tungsten alloy.
Second aspect according to the present utility model, provides a kind of crucible axis driving mechanism, including external driver device and
The crucible shaft for single crystal furnace seal assembly, the external driver device are mechanically connected to the crucible axis.
A kind of crucible shaft for single crystal furnace seal assembly provided by the embodiment of the utility model and crucible axis driving mechanism, packet
Include: device for sealing magnetic fluid, protective case, flexible sealing shroud, device for sealing magnetic fluid are sheathed on one of crucible axis far from single crystal growing furnace
End, protective case and flexible sealing shroud are all connected between single crystal growing furnace bottom and device for sealing magnetic fluid, protective case and flexible sealing shroud
It is successively sheathed on the outside of crucible axis, the fusing point of protective case is greater than 1400 degree.The utility model passes through in crucible axis and flexible sealing
Protective case is set between set, is realized the isolation between crucible axis and flexible sealing shroud, reduces molten silicon to flexible sealing shroud
Destruction, and avoid flexible sealing shroud rupture and caused by vacuum leak phenomenon, reduce the maintenance cost of single crystal furnace equipment.
Detailed description of the invention
It, below will be to the utility model embodiment in order to illustrate more clearly of the technical solution of the utility model embodiment
Attached drawing needed in description is briefly described, it should be apparent that, the accompanying drawings in the following description is only that this is practical new
Some embodiments of type for those of ordinary skill in the art without any creative labor, can be with
It obtains other drawings based on these drawings.
Fig. 1 is a kind of cross-section structure signal of crucible shaft for single crystal furnace seal assembly provided by the embodiment of the utility model
Figure；
Fig. 2 is a kind of appearance diagram of crucible shaft for single crystal furnace seal assembly provided by the embodiment of the utility model；
Fig. 3 is a kind of partial cross section's signal of crucible shaft for single crystal furnace seal assembly provided by the embodiment of the utility model
Figure；
Fig. 4 is a kind of Section A-A signal for crucible shaft for single crystal furnace seal assembly that the utility model embodiment Fig. 2 is provided
Figure；
Fig. 5 is a kind of appearance diagram of flexible sealing shroud provided by the embodiment of the utility model；
Fig. 6 is a kind of section B-B schematic diagram for flexible sealing shroud that the utility model embodiment Fig. 5 is provided.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
It clearly and completely describes, it is clear that the embodiments are a part of the embodiments of the present invention, rather than whole implementation
Example.Based on the embodiments of the present invention, those of ordinary skill in the art are obtained without creative efforts
The every other embodiment obtained, fall within the protection scope of the utility model.
As shown in Figure 1, it illustrates a kind of crucible shaft for single crystal furnace seal assemblies provided by the embodiment of the utility model
The schematic diagram of the section structure, crucible axis 10 pass through single crystal growing furnace bottom 20 and extend outwardly, wherein crucible shaft for single crystal furnace seal assembly packet
It includes: device for sealing magnetic fluid 50, protective case 40 and flexible sealing shroud 30；It is separate that device for sealing magnetic fluid 50 is sheathed on crucible axis 10
The one end at single crystal growing furnace bottom 20, protective case 40 and flexible sealing shroud 30 be all connected to single crystal growing furnace bottom 20 and device for sealing magnetic fluid 50 it
Between, protective case 40 and flexible sealing shroud 30 are successively sheathed on 10 outside of crucible axis, and the fusing point of protective case 40 is greater than 1400 degree.
In the utility model embodiment, referring to Fig. 2, it illustrates a kind of single crystal growing furnaces provided by the embodiment of the utility model
With the appearance diagram of crucible shaft seal assembly, the top of crucible axis 10 can install the earthenware support 103 for being used to support silica crucible,
Silica crucible drives silica crucible rotation and/or lifting for accommodating molten silicon, crucible axis 10.Crucible axis 10 passes through single crystal growing furnace bottom
20, protective case 40, flexible sealing shroud 30 and device for sealing magnetic fluid 50 can turn to crucible axis 10 and single crystal growing furnace bottom 20 jointly
Dynamic sealing.
In embodiments of the present invention, Magneticfluid Seal Technique is developed on the basis of magnetic fluid, works as magnetic current
When body injects the gap in magnetic field, it can be full of entire gap, form a kind of vacuum O-ring seal.Magnetic fluid vacuum evacuation device is
It is made of non-magnetic seat, bearing, magnetic pole, permanent magnet magnetic conductive axis, magnetic fluid, is magnetic under the action of uniform steady magnetic field
Fluid is full of in the space of setting, establishes multi-stage vacuum O-ring seal, to have the function that maintain vacuum environment, at this
In utility model embodiment, device for sealing magnetic fluid is able to achieve rotary seal.
During 10 rotatable elongate of crucible axis or retraction movement, external flexible sealing shroud 30 also can be extended or be contracted therewith
It returns, in general, the maximum tension length for the sealing shroud 30 that stretches can be 900 millimeters, and minimum compressed length can be 200 millis
Rice, to meet the lifting travel of single crystal growing furnace.
In the specific use process, it since the tube wall for the sealing shroud 30 that stretches is very thin, and works long hours in high temperature, vacuum shape
State, operational process up-down stretch compression movement, special operating condition damage that rate is higher, and when the silica crucible on top occurs
When leaking silicon, molten silicon is easily splashed down to flexible sealing shroud 30, and flexible sealing shroud 30 is caused to damage.
Therefore, it in the utility model embodiment, in order to reduce destruction of the molten silicon to flexible sealing shroud 30, and avoids stretching
Contracting sealing shroud 30 rupture and caused by vacuum leak phenomenon, be orderly arranged outside each protective case 40 and flexible sealing shroud in crucible axis 10
30, referring to Fig. 3, it illustrates a kind of partial cross sections of crucible shaft for single crystal furnace seal assembly provided by the embodiment of the utility model
Schematic diagram, wherein protective case 40 will be isolated between crucible axis 10 and flexible sealing shroud 30, maintain the vacuum ring where crucible axis 10
Border, and protective case 40 can be made of refractory metal material, and fusing point is greater than 1400 degree of fusing point of silicon.
Optionally, 40 structure of protective case is stretching structure.
In embodiments of the present invention, in order to meet the lifting travel demand of single crystal growing furnace, protective case 40 can be stretching structure,
Protective case 40 and maximum tension length and minimum compressed length can be with the maximum tension length and minimum of flexible sealing shroud 30
Reduction length is identical.
Specifically, the protective case 40 in the embodiment of the present invention may include a variety of realization structures:
Realize one, referring to Fig. 3, protective case 40 includes: the sleeve 401 that multiple internal diameters successively successively decrease；The smallest sleeve of internal diameter
401 are set to centre, and the sequence that remaining sleeve 401 is sequentially increased according to internal diameter is mutually socketed setting, and is connected to internal diameter most
The both ends of small sleeve 401.
In this implementation, the structure of protective case 40, can be narrow using centre when being fully extended, and both ends are wide to be set
Meter mode can be mutually shifted between adjacent sleeve 401, be realized flexible.It is symmetrical that the structure designs both ends, and saves and occupy sky
Between, wherein the width of the smallest sleeve 401 of internal diameter is greater than the diameter of crucible axis 10, and the quantity of sleeve 401 can be according to reality
Border demand is increased and decreased.
It realizes that two, protective case 40 can be used the sleeve that multiple internal diameters successively successively decrease and mutually be socketed connection, forms scalable knot
Structure, the structure are similar to telescopic antenna common in life.
Realize that three, protective case 40 can also be designed to bellows structure, but the design difficulty of processing and higher cost.
In conclusion a kind of crucible shaft for single crystal furnace seal assembly provided by the embodiment of the utility model, comprising: magnetic fluid
Sealing device, protective case, flexible sealing shroud, device for sealing magnetic fluid are sheathed on the one end of crucible axis far from single crystal growing furnace, protective case
And flexible sealing shroud is all connected between single crystal growing furnace bottom and device for sealing magnetic fluid, protective case and flexible sealing shroud are successively sheathed on
On the outside of crucible axis, the fusing point of protective case is greater than 1400 degree.The utility model between crucible axis and flexible sealing shroud by being arranged
Protective case realizes the destruction that the isolation between crucible axis and flexible sealing shroud is reduced to molten silicon to flexible sealing shroud, and
Avoid flexible sealing shroud rupture and caused by vacuum leak phenomenon, reduce the maintenance cost of single crystal furnace equipment.
Optionally, the sealing shroud 30 that stretches is bellows.Bellows, which refers to, to be connected with foldable wrinkle piece along folding retractable direction
The tubular, flexible element being connected into.Bellows is widely used in single crystal furnace equipment, is mainly used for realizing flexible sealing shroud 30
It is flexible, meet the lifting travel demand of single crystal growing furnace.
Optionally, referring to Fig. 4, a kind of crucible shaft for single crystal furnace provided it illustrates the utility model embodiment Fig. 2 is close
The Section A-A schematic diagram of sealing assembly, crucible axis 10 includes: the first branch 101 and the second branch 102, with further reference to Fig. 1, In
One end of first branch 101 is provided with taper salient angle, is provided with and the matched taper of taper salient angle in one end of the second branch 102
Slot, taper salient angle with cone tank for engaging.
Optionally, referring to Fig.1, the cone angle of taper salient angle is 30 degree.
In the utility model embodiment, crucible axis 10 may include: the first branch 101 and the second branch 102, wherein
First branch 101 can be graphite support bar, graphite pressure pin can anti-oxidant, high temperature resistant, thermal conductivity it is strong, for mounted thereto
Silica crucible heated, melt silicon.In addition, the second branch 102 is with transmission device for connecting, by driving force export to
First branch 101 drives 101 rotatable elongate of the first branch or retraction.
Further, it stretches the steady of stroke to meet crucible axis 10,30 can be arranged in one end of the first branch 101
The taper salient angle of degree is provided with and the matched cone tank of taper salient angle, taper salient angle and cone tank in one end of the second branch 102
The engagement installation of crucible axis 10 is completed in engagement, so that crucible axis 10 guarantees preferably concentricity in single crystal growing furnace operational process.
Optionally, referring to Fig. 5, it illustrates a kind of appearance signals of flexible sealing shroud provided by the embodiment of the utility model
Figure, single crystal growing furnace further include: first flange piece 60 and second flange piece 70；The setting of first flange piece 60 is at single crystal growing furnace bottom 20 and stretches
Between sealing shroud 30；Second flange piece 70 is arranged between device for sealing magnetic fluid 50 and flexible sealing shroud 30.
Optionally, referring to Fig. 5, single crystal growing furnace further include: second flange piece 70；Second flange piece 70 is arranged in magnet fluid sealing
Between device 50 and flexible sealing shroud 30.
Optionally, referring to Fig. 6, it illustrates a kind of B-B of the utility model embodiment Fig. 5 flexible sealing shroud provided to cut
Face schematic diagram, one end of protective case 30 and the inward flange of first flange piece 60 are tightly connected, the other end of protective case 30 and second
The inward flange of flange plate 70 is tightly connected.
In the utility model embodiment, first flange piece 60 is set between single crystal growing furnace bottom 20 and flexible sealing shroud 30；
The second flange piece 70 between device for sealing magnetic fluid 50 and flexible sealing shroud 30, can be in order to flexible sealing shroud 30 and single crystal growing furnace
Disassembly between bottom 20 and device for sealing magnetic fluid 50.In addition, the inward flange of one end of protective case 30 and first flange piece 60 is solid
Fixed connection, the other end of protective case 30 is fixedly connected with the inward flange of second flange piece 70, so that maintaining the position of protective case 30
Fixation is set, and maintains vacuum environment locating for crucible axis 10.
Optionally, the material of flexible sealing shroud 30 includes stainless steel, and the material of protective case 40 includes that molybdenum or molybdenum tungsten close
Gold.Specifically, flexible sealing shroud 30 can be manufactured using the stainless steel materials of 0.2-0.3 mm of thickness, protective case 40 can be adopted
It is manufactured with refractory metal (molybdenum or molybdenum and tungsten alloy, 2600 DEG C of fusing point or more) plate of 1 mm of thickness.Meet when single crystal growing furnace works
Hot environment demand.
The embodiment of the invention also provides a kind of crucible axis driving mechanisms, including external driver device and single crystal growing furnace crucible
Shaft seal assembly, external driver device are mechanically connected to crucible axis.External driver device can drive crucible axis to be rotated, real
The lifting of existing crucible axis.
In conclusion a kind of crucible shaft for single crystal furnace seal assembly provided by the embodiment of the utility model and crucible axis driving
Mechanism, comprising: device for sealing magnetic fluid, protective case, flexible sealing shroud, device for sealing magnetic fluid are sheathed on crucible axis far from monocrystalline
One end of furnace, protective case and flexible sealing shroud are all connected between single crystal growing furnace bottom and device for sealing magnetic fluid, protective case and flexible
Sealing shroud is successively sheathed on the outside of crucible axis, and the fusing point of protective case is greater than 1400 degree.The utility model is by crucible axis and stretching
Protective case is set between contracting sealing shroud, is realized the isolation between crucible axis and flexible sealing shroud, reduces molten silicon to flexible
The destruction of sealing shroud, and avoid flexible sealing shroud rupture and caused by vacuum leak phenomenon, reduce the dimension of single crystal furnace equipment
Accomplish this.
It is apparent to those skilled in the art that for convenience and simplicity of description, the system of foregoing description,
The specific work process of device and unit, can refer to corresponding processes in the foregoing method embodiment, and details are not described herein.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
Made any modifications, equivalent replacements, and improvements etc., should be included in the utility model within the spirit and principle of utility model
Protection scope within.
Above description is only a specific implementation of the present invention, but the protection scope of the utility model is not limited to
In this, anyone skilled in the art within the technical scope disclosed by the utility model, can readily occur in variation
Or replacement, it should be covered within the scope of the utility model.Therefore, the protection scope of the utility model should be wanted with right
Subject to the protection scope asked.
Claims (10)
1. a kind of crucible shaft for single crystal furnace seal assembly, crucible axis passes through single crystal growing furnace bottom and extends outwardly, which is characterized in that the list
Brilliant furnace crucible shaft seal assembly includes:
Device for sealing magnetic fluid, protective case and flexible sealing shroud；
The device for sealing magnetic fluid is sheathed on the one end of the crucible axis far from the single crystal growing furnace bottom, the protective case and described
Flexible sealing shroud is all connected between the single crystal growing furnace bottom and the device for sealing magnetic fluid, the protective case and it is described stretch it is close
Big envelope is successively sheathed on the outside of the crucible axis, and the fusing point of the protective case is greater than 1400 degree.
2. crucible shaft for single crystal furnace seal assembly according to claim 1, which is characterized in that
The structure of the protective case is stretching structure.
3. crucible shaft for single crystal furnace seal assembly according to claim 2, which is characterized in that the protective case includes:
The sleeve that multiple internal diameters successively successively decrease；
The smallest sleeve of internal diameter is set to centre, and the sequence that remaining sleeve is sequentially increased according to internal diameter is mutually socketed and sets
It sets, and is connected to the both ends of the smallest sleeve of the internal diameter.
4. crucible shaft for single crystal furnace seal assembly according to claim 1, which is characterized in that
The flexible sealing shroud is bellows.
5. crucible shaft for single crystal furnace seal assembly according to claim 1, which is characterized in that the crucible shaft for single crystal furnace
Seal assembly further include:
First flange piece and second flange piece；
The first flange piece is arranged between the single crystal growing furnace bottom and the flexible sealing shroud；
The second flange piece is arranged between the device for sealing magnetic fluid and the flexible sealing shroud.
6. crucible shaft for single crystal furnace seal assembly according to claim 5, which is characterized in that
The inward flange of one end of the protective case and the first flange piece is tightly connected, the other end of the protective case with it is described
The inward flange of second flange piece is tightly connected.
7. crucible shaft for single crystal furnace seal assembly according to claim 1, which is characterized in that the crucible axis includes:
First branch and the second branch；
One end of first branch is provided with taper salient angle, is provided in one end of second branch convex with the taper
The matched cone tank in angle, the taper salient angle with the cone tank for engaging.
8. crucible shaft for single crystal furnace seal assembly according to claim 7, which is characterized in that the cone angle of the taper salient angle
It is 30 degree.
9. crucible shaft for single crystal furnace seal assembly according to any one of claims 1 to 8, which is characterized in that it is described stretch it is close
The material of big envelope includes stainless steel, and the material of the protective case includes molybdenum or molybdenum and tungsten alloy.
10. a kind of crucible axis driving mechanism, the crucible shaft for single crystal furnace including external driver device and as described in power 1 to 9 is any
Seal assembly, the external driver device are mechanically connected to the crucible axis.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822203225.3U CN209669393U (en) | 2018-12-26 | 2018-12-26 | A kind of crucible shaft for single crystal furnace seal assembly and crucible axis driving mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822203225.3U CN209669393U (en) | 2018-12-26 | 2018-12-26 | A kind of crucible shaft for single crystal furnace seal assembly and crucible axis driving mechanism |
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| Publication Number | Publication Date |
|---|---|
| CN209669393U true CN209669393U (en) | 2019-11-22 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822203225.3U Active CN209669393U (en) | 2018-12-26 | 2018-12-26 | A kind of crucible shaft for single crystal furnace seal assembly and crucible axis driving mechanism |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114076197A (en) * | 2022-01-19 | 2022-02-22 | 江苏邑文微电子科技有限公司 | Vacuum sealing rotary lifting system and semiconductor equipment |
| CN114197059A (en) * | 2021-12-14 | 2022-03-18 | 西安奕斯伟材料科技有限公司 | Single crystal furnace |
| CN114210959A (en) * | 2021-12-15 | 2022-03-22 | 中国航发动力股份有限公司 | Vacuum casting furnace main shaft lifter protection device |
| CN114351241A (en) * | 2022-01-07 | 2022-04-15 | 苏州轻装工力机电有限公司 | Rotating assembly and crucible driving mechanism for single crystal furnace |
-
2018
- 2018-12-26 CN CN201822203225.3U patent/CN209669393U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114197059A (en) * | 2021-12-14 | 2022-03-18 | 西安奕斯伟材料科技有限公司 | Single crystal furnace |
| CN114210959A (en) * | 2021-12-15 | 2022-03-22 | 中国航发动力股份有限公司 | Vacuum casting furnace main shaft lifter protection device |
| CN114351241A (en) * | 2022-01-07 | 2022-04-15 | 苏州轻装工力机电有限公司 | Rotating assembly and crucible driving mechanism for single crystal furnace |
| CN114076197A (en) * | 2022-01-19 | 2022-02-22 | 江苏邑文微电子科技有限公司 | Vacuum sealing rotary lifting system and semiconductor equipment |
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