CN220927018U - Splicing feeder for circulating materials of single crystal furnace - Google Patents
Splicing feeder for circulating materials of single crystal furnace Download PDFInfo
- Publication number
- CN220927018U CN220927018U CN202322995016.8U CN202322995016U CN220927018U CN 220927018 U CN220927018 U CN 220927018U CN 202322995016 U CN202322995016 U CN 202322995016U CN 220927018 U CN220927018 U CN 220927018U
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- Prior art keywords
- quartz
- nylon
- tube
- tetrafluoro
- single crystal
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- 239000000463 material Substances 0.000 title claims abstract description 21
- 239000013078 crystal Substances 0.000 title claims abstract description 19
- 239000010453 quartz Substances 0.000 claims abstract description 71
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 71
- 239000004677 Nylon Substances 0.000 claims abstract description 68
- 229920001778 nylon Polymers 0.000 claims abstract description 68
- 238000002955 isolation Methods 0.000 claims description 12
- 238000005299 abrasion Methods 0.000 abstract description 4
- 230000000149 penetrating effect Effects 0.000 abstract description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 6
- 235000017166 Bambusa arundinacea Nutrition 0.000 description 5
- 235000017491 Bambusa tulda Nutrition 0.000 description 5
- 241001330002 Bambuseae Species 0.000 description 5
- 235000015334 Phyllostachys viridis Nutrition 0.000 description 5
- 239000011425 bamboo Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000002210 silicon-based material Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 230000007704 transition Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses a splicing feeder for circulating materials of a single crystal furnace, which comprises a quartz cylinder, wherein a nylon cylinder is fixedly arranged at the top of the quartz cylinder, a tetrafluoro cross beam is arranged at the top of the nylon cylinder, a lifting rod is arranged at the middle end of the tetrafluoro cross beam in a penetrating way, a quartz plug and a quartz cone are sequentially arranged at the bottom end of the lifting rod, and a lifting ring is arranged at the top of the lifting rod. The nylon new material is used for replacing a quartz structure, so that the characteristics of high temperature resistance, abrasion resistance, easiness in processing, low cost and the like of the charging barrel are met. Structurally, the charging amount is increased to 150 kg/barrel, and meanwhile, the characteristics of simple charging barrel assembly, convenience in charging, easiness in operation and the like are met.
Description
Technical Field
The utility model relates to the technical field of monocrystalline silicon manufacturing, in particular to a splicing feeder for circulating materials of a monocrystalline furnace.
Background
The RCZ repeated crystal pulling technology is a production technology commonly adopted by single crystal silicon production enterprises at present, namely, continuous production of a plurality of silicon rods is realized through repeated casting of polycrystalline silicon materials. In the process of re-throwing the polycrystalline silicon material, the polycrystalline silicon material is added into a quartz crucible in a single crystal furnace through a feeder, and repeated crystal pulling is carried out after the quartz crucible is filled with the polycrystalline silicon material again.
The currently used feeders are all made of high-purity quartz, the feeders used in the industry have the specifications of 80kg, 100kg, 120kg and the like, if the volume of the feeder is increased again, the diameter of a quartz tube of the feeder is increased, and the feeder cannot pass through the lower port of a guide cylinder in a single crystal furnace; if the diameter of the quartz tube of the feeder is not increased, the length of the quartz tube of the feeder is increased to increase the volume of the feeder, and the quartz tube is too long because the volume of a 150kg feeder is relatively large, so that the quartz tube of the feeder is inconvenient to manufacture and use; in addition, the quartz is fragile in processing technology and physical properties, so that the quartz has a single structural form, and can be realized only by lifting the quartz to meet the requirement of large loading amount, however, the height of the charging barrel is limited by the height from the ground after the auxiliary chamber of the furnace body is unscrewed, and meanwhile, the operation of operators is difficult due to the fact that the charging barrel is too high.
Disclosure of utility model
The utility model aims to provide a splicing feeder for circulating materials of a single crystal furnace, which is characterized in that a nylon cylinder is arranged at the top of a quartz cylinder and is divided into an upper part and a lower part, the inner diameter of the upper part is larger than that of the quartz cylinder, the volume of the whole feeder is increased, and a nylon sheath is arranged outside the top end of a quartz isolation pipe, so that the problems in the prior art are solved.
In order to solve the technical problems, the utility model adopts the following scheme:
A splice feeder for single crystal growing furnace circulation material, includes quartz cylinder the fixed nylon section of thick bamboo that sets up in top of quartz cylinder is equipped with the tetrafluoro crossbeam at the top of nylon section of thick bamboo, and the lifting rod is worn to establish by tetrafluoro crossbeam middle-end, and the bottom of lifting rod is equipped with quartzy end cap and quartz cone in proper order, and the top of lifting rod is equipped with rings.
Preferably, the nylon tube is divided into an upper part and a lower part, the vertical section of the upper part is rectangular, the top end of the upper part extends outwards along the horizontal plane direction to form a first bulge, the periphery of the tetrafluoro cross beam is provided with a second bulge, and the first bulge and the second bulge are fixed through the arrangement of connecting bolts.
Preferably, the vertical section of the lower part of the nylon tube is in an inverted trapezoid shape, the bottom end of the lower part and the top end of the quartz tube are respectively provided with a tetrafluoro limiting disc, and the connecting bolt fixes the lower part of the nylon tube and the top end of the quartz tube through the two tetrafluoro limiting discs.
Preferably, the inner diameter of the bottom end of the lower part of the nylon cylinder is equal to the inner diameter of the quartz cylinder, and the inner diameter of the top end of the lower part of the nylon cylinder is larger than the inner diameter of the quartz cylinder and equal to the inner diameter of the upper part of the nylon cylinder.
Preferably, a through hole is formed in the middle end of the tetrafluoro cross beam, the lifting rod penetrates through the through hole, a quartz isolation tube is arranged on the periphery of the lifting rod, and the quartz isolation tube is located in the nylon tube and the quartz tube.
Preferably, a nylon sheath is arranged below the through hole, the nylon sheath is fixed with the tetrafluoro cross beam through a connecting bolt, and the top of the quartz isolation tube is positioned at the top of the nylon sheath.
The utility model has the beneficial effects that: according to the utility model, the inside of the feeder is fed from top to bottom, the nylon barrel is arranged above the quartz barrel, the lower part of the nylon barrel is provided with the inverted circular table, the transition effect of volume increase is achieved between the upper part of the nylon barrel and the quartz barrel, and the integral structure is upgraded, so that the loading amount is increased to 150kg per barrel; meanwhile, the new nylon material has the characteristics of high temperature resistance, abrasion resistance, easiness in processing and low cost, the charging efficiency is remarkably improved, the working hours are saved, and the cost of the feeder is reduced.
Drawings
FIG. 1 is a schematic diagram of the structure of the present utility model;
FIG. 2 is a cross-sectional view of the present utility model;
Fig. 3 is a schematic view of a partially enlarged structure of fig. 2 according to the present utility model.
Reference numerals: the novel high-strength nylon cable comprises a 1-quartz cylinder, a 2-nylon cylinder, a 20-upper part, a 201-first protrusion, a 21-lower part, a 3-nylon sheath, a 4-hanging ring, a 5-lifting rod, a 6-quartz isolation tube, a 7-tetrafluoro beam, a 70-through hole, a 71-second protrusion, an 8-tetrafluoro limiting disc, a 9-connecting bolt, a 10-quartz plug and an 11-quartz cone.
Detailed Description
The present utility model will be described in further detail with reference to examples and drawings, but embodiments of the present utility model are not limited thereto.
In the description of the present utility model, it should be noted that, directions or positional relationships indicated by terms such as "center", "upper", "lower", "left", "right", "vertical", "longitudinal", "lateral", "horizontal", "inner", "outer", "front", "rear", "top", "bottom", etc., are directions or positional relationships based on those shown in the drawings, or are directions or positional relationships conventionally put in use of the inventive product, are merely for convenience of describing the present utility model and for simplifying the description, and are not indicative or implying that the apparatus or element to be referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be construed as limiting the present utility model.
In the description of the present utility model, it should also be noted that, unless explicitly specified and limited otherwise, the terms "disposed," "configured," "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
Example 1
The embodiment 1 of the utility model relates to a splicing feeder for circulating materials of a single crystal furnace, which comprises a quartz cylinder 1, wherein a nylon cylinder 2 is fixedly arranged at the top of the quartz cylinder 1, a tetrafluoro cross beam 7 is arranged at the top of the nylon cylinder 2, a lifting rod 5 is arranged at the middle end of the tetrafluoro cross beam 7 in a penetrating manner, a quartz plug 10 and a quartz cone 11 are sequentially arranged at the bottom end of the lifting rod 5, and a lifting ring 4 is arranged at the top of the lifting rod 5.
Specifically, as shown in fig. 1, mainly through setting up a nylon section of thick bamboo 2 at quartz tube 1 top, use nylon section of thick bamboo 2 to increase the height of whole charging means, and then promoted the volume of charging means in order to satisfy 150kg reinforced demand, adopt nylon section of thick bamboo 2 of nylon material simultaneously, have that the grindability is good, compressive strength is high, long service life's advantage. The problem that the feeder cannot pass through the lower port of the guide cylinder in the single crystal furnace due to the increase of the diameter of the quartz cylinder 1 is avoided. The utility model uses the new nylon material to replace the quartz structure, thereby meeting the characteristics of high temperature resistance, abrasion resistance, easy processing, low cost and the like of the charging barrel. Structurally, the charging amount is increased to 150 kg/barrel, and meanwhile, the characteristics of simple charging barrel assembly, convenience in charging, easiness in operation and the like are met.
Example 2
This embodiment 2 is implemented on the basis of embodiment 1, the nylon tube 2 is divided into an upper portion 20 and a lower portion 21, the vertical section of the upper portion 20 is rectangular, the top end of the upper portion 20 extends outwards along the horizontal plane direction to form a first protrusion 201, the periphery of the tetrafluoro beam 7 is provided with a second protrusion 71, and the first protrusion 201 and the second protrusion 71 are fixed by setting a connecting bolt 9.
Specifically, as shown in fig. 2 and 3, the upper portion 20 and the lower portion 21 are integrally connected, the upper portion 20 of the nylon drum 2 is a hollow cylinder, a first protrusion 201 is formed by extending outwards at the top end of the upper portion, and a second protrusion 71 is formed by crossing tetrafluoro, and a connecting bolt 9 is arranged between the two protrusions for closing or opening the whole feeder for discharging or charging.
Further, the vertical section of the lower part 21 of the nylon tube 2 is in an inverted trapezoid shape, the bottom end of the lower part 21 and the top end of the quartz tube 1 are respectively provided with a tetrafluoro limiting disc 8, and the connecting bolt 9 fixes the lower part 21 of the nylon tube 2 and the top end of the quartz tube 1 through the two tetrafluoro limiting discs 8.
Specifically, the lower portion 21 of the nylon tube 2 is an inverted truncated cone, the vertical section of the nylon tube 2 is inverted trapezoid, the volume of the lower portion 21 is gradually increased, and the lower portion 21 of the nylon tube 2 serves as a transitional accommodating cavity to provide preparation for the increase of the solvent of the whole feeder.
Further, the inner diameter of the bottom end of the lower part 21 of the nylon tube 2 is equal to the inner diameter of the quartz tube 1, and the inner diameter of the top end of the lower part 21 of the nylon tube 2 is larger than the inner diameter of the quartz tube 1 and is equal to the inner diameter of the upper part 20 of the nylon tube 2. Specifically, the lower part 21 of the nylon tube 2 of the inverted circular truncated cone plays a transition role between the quartz tube 1 and the upper part 20 of the nylon tube 2, and gradually transits from the inner diameter size of the quartz tube 1 to the inner diameter size of the upper part 20 of the nylon tube 2 to increase the volume of the nylon tube 2, and the volume of the whole feeder is increased by the increase of the volume of the nylon tube 2 so as to meet the holding weight of 150 kg.
Further, a through hole 70 is formed in the middle end of the tetrafluoro cross beam 7, the lifting rod 5 passes through the through hole 70, a quartz isolation tube 6 is arranged on the periphery of the lifting rod 5, and the quartz isolation tube 6 is located inside the nylon tube 2 and the quartz tube 1. Specifically, the quartz isolation tube 6 is mainly positioned in the nylon tube 2 and the quartz tube 1 to isolate the lifting rod 5, so that the lifting rod 5 is prevented from contacting with circulating materials, and the polysilicon materials are further polluted. The lifting rod 5 slides downwards through the through hole 70 to open the quartz cone 11, and the polysilicon material enters the single crystal furnace from the gap between the quartz cone 11 and the feeder for feeding.
Further, a nylon sheath 3 is arranged below the through hole 70, the nylon sheath 3 and the tetrafluoro cross beam 7 are fixed through a connecting bolt 9, and the top of the quartz isolation tube 6 is positioned at the top of the nylon sheath 3. Specifically, the nylon sheath 3 is mainly used to protect the top periphery of the quartz separator tube 6.
When the single crystal furnace needs to be charged, the charging is carried out from top to bottom in the feeder, the nylon tube 2 is arranged above the quartz tube 1, the lower part 21 of the nylon tube 2 is an inverted circular table, the transition effect of volume increase is achieved between the upper part 20 of the nylon tube 2 and the quartz tube 1, and the whole structure is upgraded, so that the charging amount is increased to 150kg per tube; meanwhile, the new nylon material has the characteristics of high temperature resistance, abrasion resistance, easiness in processing and low cost, the charging efficiency is remarkably improved, the working hours are saved, and the cost of the feeder is reduced.
The foregoing description of the preferred embodiment of the utility model is not intended to limit the utility model in any way, but rather to cover all modifications, equivalents, improvements and alternatives falling within the spirit and principles of the utility model.
Claims (6)
1. A splice feeder for single crystal growing furnace circulation material, its characterized in that, including quartz tube (1) the fixed nylon tube (2) that sets up in top of quartz tube (1), be equipped with tetrafluoro crossbeam (7) at the top of nylon tube (2), lift bar (5) are worn to establish by tetrafluoro crossbeam (7) middle-end, and the bottom of lift bar (5) is equipped with quartz plug (10) and Dan Yingzhui (11) in proper order, and the top of lift bar (5) is equipped with rings (4).
2. The splicing feeder for circulating materials of single crystal furnaces according to claim 1, characterized in that the nylon barrel (2) is divided into an upper portion (20) and a lower portion (21), the vertical section of the upper portion (20) is rectangular, the top end of the upper portion (20) extends outwards along the horizontal plane direction to form a first bulge (201), the periphery of the tetrafluoro cross beam (7) is provided with a second bulge (71), and the first bulge (201) and the second bulge (71) are fixed through the arrangement of a connecting bolt (9).
3. The splicing feeder for circulating materials of single crystal furnaces according to claim 2, wherein the vertical section of the lower part (21) of the nylon tube (2) is inverted trapezoid, the bottom end of the lower part (21) and the top end of the quartz tube (1) are respectively provided with a tetrafluoro limiting disc (8), and the connecting bolt (9) fixes the lower part (21) of the nylon tube (2) and the top end of the quartz tube (1) through the two tetrafluoro limiting discs (8).
4. The splicing feeder for circulating materials of a single crystal furnace according to claim 2, wherein the inner diameter of the bottom end of the lower part (21) of the nylon barrel (2) is equal to the inner diameter of the quartz barrel (1), and the inner diameter of the top end of the lower part (21) of the nylon barrel (2) is larger than the inner diameter of the quartz barrel (1) and equal to the inner diameter of the upper part (20) of the nylon barrel (2).
5. The splicing feeder for circulating materials of the single crystal furnace according to claim 2, wherein a through hole (70) is formed in the middle end of the tetrafluoro cross beam (7), the lifting rod (5) penetrates through the through hole (70), a quartz isolation tube (6) is arranged on the periphery of the lifting rod (5), and the quartz isolation tube (6) is located inside the nylon tube (2) and the quartz tube (1).
6. The splicing feeder for circulating materials of single crystal furnaces according to claim 5, characterized in that a nylon sheath (3) is arranged below the through hole (70), the nylon sheath (3) and the tetrafluoro cross beam (7) are fixed through a connecting bolt (9), and the top of the quartz isolation tube (6) is positioned at the top of the nylon sheath (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322995016.8U CN220927018U (en) | 2023-11-07 | 2023-11-07 | Splicing feeder for circulating materials of single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322995016.8U CN220927018U (en) | 2023-11-07 | 2023-11-07 | Splicing feeder for circulating materials of single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220927018U true CN220927018U (en) | 2024-05-10 |
Family
ID=90961327
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322995016.8U Active CN220927018U (en) | 2023-11-07 | 2023-11-07 | Splicing feeder for circulating materials of single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220927018U (en) |
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2023
- 2023-11-07 CN CN202322995016.8U patent/CN220927018U/en active Active
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