CN220450277U - Evaporation boat and vacuum evaporation equipment comprising same - Google Patents

Abstract

The application relates to an evaporation boat and vacuum evaporation equipment, the evaporation boat includes the boat body, and the collecting tank that is used for collecting the coating by vaporization liquid has all been seted up to the both sides that the boat body set up relatively along self thickness direction. The evaporation boat and the vacuum evaporation equipment provided by the application have longer service life.

Description

Evaporation boat and vacuum evaporation equipment comprising same

Technical Field

The application relates to the technical field of vacuum evaporation, in particular to an evaporation boat and vacuum evaporation equipment

Background

The working principle of the vacuum evaporation equipment is that the metal wires on the evaporation boat are vaporized and evaporated by heating the evaporation boat under the vacuum condition and deposited on a piece to be coated to be condensed to form a metal film layer.

The quality of the evaporation boat serving as an important working part of the vacuum evaporation equipment has important influence on parameters such as film coating uniformity, film forming quality and the like of a metal film layer.

The conventional evaporation boat is provided with a wire feeding region and an evaporation region at one side thereof. The metal wires are contacted with the evaporation boat in the wire feeding area and are melted to form evaporation liquid, the evaporation liquid is diffused to the evaporation area, and the evaporation liquid is mainly vaporized and evaporated in the evaporation area to realize a metal film layer. Because the vaporization and evaporation of the vapor plating liquid in the vapor plating area can take away part of heat in the vapor plating area, the melting phenomenon mainly occurs in the wire feeding area, and the evaporation amount is smaller, so that the temperature of the wire feeding area is higher than that of the vapor plating area, and the wire feeding area is easier to break. In addition, the evaporation liquid formed under the molten state of the metal wire is easy to react with the evaporation boat, so that the wire feeding area of the evaporation boat is corroded, the risk of breakage of the wire feeding area is further accelerated, the evaporation boat is scrapped, and the service life is short.

Disclosure of Invention

In view of the above problems, the application provides an evaporation boat and a vacuum evaporation device, which can relieve the problem that the evaporation boat is easy to discard, so that the service lives of the evaporation boat and the vacuum evaporation device can be prolonged.

In a first aspect, the application provides an evaporation boat, the evaporation boat includes the boat body, and the collecting tank that is used for collecting the coating by vaporization liquid has all been seted up to the both sides that the boat body set up relatively along self thickness direction.

In the actual use process, when a crack is generated in the wire feeding area on one side of the boat body, if the metal wire is continuously melted in the wire feeding area on the side, the crack is rapidly perforated due to high temperature and corrosion of the vapor deposition liquid permeated into the crack, so that the boat body is broken and scrapped. If the boat body is turned over at this time, which is equivalent to restarting a new liquid collecting tank to work, the risk of perforation and scrapping of the boat body is reduced, and the service life of the boat body is prolonged. In addition, as the liquid collecting grooves at the two sides of the boat body can be used, the manufacturing materials of the boat body are saved, and the utilization rate of the boat body is improved.

In some embodiments, the boat body comprises a boat main body and a wire feeding table, both sides of the boat main body, which are oppositely arranged along the thickness direction of the boat body, are provided with liquid collecting tanks, the wire feeding table is arranged on the tank bottom wall of the liquid collecting tank on at least one side of the boat main body in a protruding manner, and one end face of the bottom wall of the tank, which is far away from the wire feeding table, is configured to form a wire feeding face.

The setting of sending the silk platform can increase the thickness of evaporation boat in the position department of sending the silk platform, like this, send silk face department because of high temperature and corrosion crack generation and perforation's risk reduction, evaporation boat's life also further extension.

In some embodiments, the boat body comprises a plurality of boat parts, and both sides of each boat part, which are oppositely arranged along the thickness direction of the boat body, are provided with groove parts;

all the boat parts are sequentially arranged along the longitudinal direction of the boat body and are mutually connected, and groove parts of all the boat parts positioned on the same side of the boat body are spliced to form a liquid collecting groove.

Therefore, under the design, the evaporation boat can be conveniently cleaned, the cleaning efficiency is high, the cleaning difficulty is low, and the cleaning effect is good.

In some of these embodiments, at least two adjacent boat portions are clamped together.

After the evaporation boat is cleaned, all boat parts are connected and spliced again to form a boat body. The connection mode of joint assembly is simple and convenient, is convenient for promote the assembly efficiency of the boat body.

In some embodiments, the surfaces of the two boat parts facing each other in the clamping fit are respectively provided with a clamping convex part and a clamping concave part, and the clamping convex part is embedded in the clamping concave part.

The clamping convex part and the clamping concave part are matched, so that the assembly simplicity can be improved. In addition, after the clamping concave part and the clamping convex part are matched, the surfaces facing each other between the two adjacent boat parts can be closely attached, thereby helping to reduce the risk of vapor deposition liquid penetrating and flowing out from the gap between the surfaces of the adjacent two boat parts facing each other.

In some embodiments, the boat body includes two boat portions, and each of the groove portions on each boat portion has a half groove structure.

The boat body comprises two boat parts, and each groove part on each boat part is of a half-groove structure, so that the number of the boat parts can be effectively reduced, and the boat body can be quickly disassembled, assembled and cleaned.

In some of these embodiments, the heat conducting member is in contact between the two boat parts, and the heat conducting member has a heat conductivity greater than that of each boat part in contact therewith.

Because the heat conducting member is contacted between the two boat parts, and the heat conductivity of the heat conducting member is larger than that of each boat part contacted with the heat conducting member, when the heat conducting member is directly contacted with the wire feeding region, the heat of the wire feeding region can be directly transferred to the heat conducting member and is diffused to the outside through the heat conducting member. When the heat conducting piece is contacted with the area which can be covered by the projection of the wire feeding area in the thickness direction of the boat body, under the action of heat transfer, the heat of the wire feeding area can be transferred to the heat conducting piece through the area which can be covered by the projection of the wire feeding area in the thickness direction of the boat body, so that the temperature of the wire feeding area is reduced. Like this, send the temperature in silk region more to be close to the temperature in evaporation zone to can reduce the risk of evaporation coating liquid sputtering, and make the temperature distribution of whole evaporation boat also more even, be convenient for realize even evaporation.

In some of these embodiments, the thermally conductive member is a flexible thermally conductive member.

By arranging the heat conducting member to be a flexible heat conducting member, in the process of clamping the two boat parts, heat conduction can deform and fill a gap between the two boat parts, so that the risk that vapor deposition liquid in the liquid collection tank permeates through the gap between the two boat parts is reduced. In addition, the heat conductive member should be formed using a thinner member as much as possible so as to avoid an excessive gap between the two boat parts, which is clamped between the two heat conductive members.

In some of these embodiments, the thermally conductive member is graphite paper.

The graphite paper has high temperature resistance, corrosion resistance and excellent heat conduction performance. In the process of vapor deposition, the graphite paper does not chemically react with the vapor deposition liquid and the boat body, and can maintain the shape of the graphite paper and realize heat dissipation of the wire feeding area.

In some embodiments, the boat further comprises a supporting seat, wherein the supporting seat is provided with a limiting concave part, and the boat body is limited in the limiting concave part.

Through setting up spacing concave part, when the boat body is spacing in spacing concave part, according to the different forms of spacing portion, spacing portion can carry out spacingly to the boat body along the length direction or the width direction of boat body to reduce the risk that each boat portion moved, thereby make can connect between each boat portion and form a whole. In addition, the boat body is directly inserted into the limiting concave part due to the arrangement of the limiting concave part, so that the assembly is simpler.

In some embodiments, the support base includes a support body and a plurality of limiting portions protruding from the support body, all the limiting parts are sequentially distributed along the circumferential direction of the supporting main body and are enclosed together with the supporting main body to form a limiting concave part.

The forming mode of the supporting seat is simple and convenient by arranging all the limiting parts along the circumferential direction of the supporting main body and enclosing the supporting main body together to form a limiting concave part.

In some embodiments, at least two adjacent limiting portions are arranged at intervals and are enclosed with the supporting main body to form a heat dissipation opening communicated with the limiting concave portion.

Through setting up the thermovent, the heat on the boat body can be through thermovent department transfer to outside to can reduce the risk that the boat body temperature is too high and lead to the coating by vaporization liquid to sputter.

In some of these embodiments, the thermal conductivity of the support base is greater than the thermal conductivity of the boat body.

The heat conductivity that adopts through setting up the supporting seat is greater than the material preparation that the thermal conductivity of the boat body and forms, then the solid part of heat accessible supporting seat on the boat body to and the thermovent on the supporting seat transmits to outside simultaneously, thereby can further promote the radiating efficiency of supporting seat, help further reducing boat body high temperature and lead to the risk of coating by vaporization liquid sputtering.

In a second aspect, the present application provides a vacuum evaporation apparatus comprising an evaporation boat according to any one of the embodiments described above.

The foregoing description is only an overview of the technical solutions of the present application, and may be implemented according to the content of the specification in order to make the technical means of the present application more clearly understood, and in order to make the above-mentioned and other objects, features and advantages of the present application more clearly understood, the following detailed description of the present application will be given.

Drawings

Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the application. Also, like reference numerals are used to designate like parts throughout the figures. In the drawings:

FIG. 1 is a schematic view of the overall structure of an evaporation boat according to one or more embodiments in the present application;

FIG. 2 is a top view of the evaporation boat shown in FIG. 1;

FIG. 3 is an exploded view of the evaporation boat shown in FIG. 1;

fig. 4 is a schematic view of a boat portion having a locking recess in the evaporation boat shown in fig. 1.

Reference numerals:

1. an evaporation boat; 10. a boat body; 11. a liquid collecting tank; 111. a bottom wall of the tank; 12. a boat body; 13. a wire feeding table; 131. feeding silk surface; 14. a boat part; 141. a groove portion; 142. a clamping convex part; 143. a clamping concave part; 20. a heat conductive member; 30. a support base; 31. a limit concave part; 32. a support body; 33. a limit part; 34. a heat radiation port; x, lengthwise direction; y, thickness direction.

Detailed Description

In order to make the above objects, features and advantages of the present application more comprehensible, embodiments accompanied with figures are described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. This application is, however, susceptible of embodiment in many other forms than those described herein and similar modifications can be made by those skilled in the art without departing from the spirit of the application, and therefore the application is not to be limited to the specific embodiments disclosed below.

In the description of the present application, it should be understood that the terms "center," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," etc. indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, are merely for convenience in describing the present application and simplifying the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be configured and operated in a particular orientation, and therefore should not be construed as limiting the present application.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present application, the meaning of "plurality" is at least two, such as two, three, etc., unless explicitly defined otherwise.

In this application, unless specifically stated and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the terms in this application will be understood by those of ordinary skill in the art as the case may be.

In this application, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.

It will be understood that when an element is referred to as being "fixed" or "disposed" on another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like are used herein for illustrative purposes only and are not meant to be the only embodiment.

At present, the application of uniformly coating a metal film layer on a piece to be coated by adopting a vacuum evaporation method is wider. The principle of the vacuum evaporation method is as follows: in a vacuum environment, an evaporation boat of the vacuum evaporation equipment is directly electrified and heated to about 1500 ℃, metal wires are input, and when the metal wires contact the evaporation boat, the metal wires are liquefied on the surface of the evaporation boat and are vaporized and evaporated in the vacuum environment, so that a piece to be coated, which is arranged towards the evaporation boat, can be coated with a metal film layer with uniform thickness.

The conventional evaporation boat is provided with a wire feeding region and an evaporation region at one side thereof. The metal wires are contacted with the evaporation boat in the wire feeding area and are melted to form evaporation liquid, the evaporation liquid is diffused to the evaporation area, and the evaporation liquid is mainly vaporized and evaporated in the evaporation area to realize a metal film layer. Because the vaporization and evaporation of the vapor plating liquid in the vapor plating area can take away part of heat in the vapor plating area, the melting phenomenon mainly occurs in the wire feeding area, and the evaporation amount is smaller, so that the temperature of the wire feeding area is higher than that of the vapor plating area, and the wire feeding area is easier to break. In addition, the evaporation liquid formed under the molten state of the metal wire is easy to react with the evaporation boat, so that the wire feeding area of the evaporation boat is corroded, the risk of breakage of the wire feeding area is further accelerated, the evaporation boat is scrapped, and the service life is short.

In order to reduce the risk that evaporation boat is scrapped easily, extension evaporation boat's life, this application provides an evaporation boat, and this evaporation boat includes the boat body, and the both sides that the boat body set up relatively along self thickness direction all offer the collecting tank that is used for collecting the coating by vaporization liquid.

When the device is actually used, the metal wires are contacted with the wire feeding area in the liquid collecting tank at one side of the boat body so as to enable the metal wires to be melted and form vapor plating liquid, and the vapor plating liquid is diffused to the vapor plating area in the liquid collecting tank and vapor plating is carried out. After a period of use, when the wire feeding area of the liquid collecting groove on one side of the boat body is cracked due to overhigh temperature and corrosion, the evaporation liquid easily permeates into the crack and further corrodes, so that the perforation of the evaporation boat is scrapped. Therefore, when a crack is generated in the wire feeding area of the liquid collecting tank on one side of the boat body, the boat body needs to be turned over and the liquid collecting tank on the other side of the boat body needs to be started. This application is through setting up two liquid collecting tanks, like this, and evaporation boat fracture and the risk of scrapping reduce, and life is also longer.

Referring to fig. 1, fig. 1 is a schematic view of an overall structure of an evaporation boat 1 according to one or more embodiments. The embodiment of the application provides an evaporation boat 1 and vacuum evaporation equipment comprising the evaporation boat 1, wherein the vacuum evaporation equipment can enable metal wires on the evaporation boat 1 to be evaporated and deposited on a piece to be coated by heating the evaporation boat 1 so as to form a metal film layer by condensation. The metal wire may be an aluminum wire, a copper wire, or the like, and the following embodiments are described by taking the metal wire as an example. The piece to be coated can be a flexible substrate, a rigid substrate and the like, and can be specifically arranged according to the requirements.

The vacuum evaporation device may include, but is not limited to, an evaporation boat 1, and may further include a carrying mechanism, a power source, a wire feeding mechanism, and a vacuum pumping mechanism. The bearing mechanism is used for bearing a power supply, a wire feeding mechanism, a vacuumizing mechanism and the evaporation boat 1. The bearing mechanism is provided with an evaporation cavity, and the vacuumizing mechanism is used for vacuumizing air in the evaporation cavity so as to form a vacuum environment in the evaporation cavity. The power supply is electrically connected with the evaporation boat 1 and is used for supplying power to the evaporation boat 1. The piece to be coated and the evaporation boat 1 are arranged in the evaporation cavity, and the wire feeding mechanism is used for conveying metal wires into the evaporation cavity.

In actual operation, the vacuumizing mechanism pumps air in the evaporation cavity to form a vacuum environment in the evaporation cavity, the power supply is used for electrifying the evaporation boat 1 and heating to about 1500 ℃, the wire feeding mechanism is used for inputting metal wires into the evaporation cavity, and the metal wires are contacted with the wire feeding area of the evaporation boat 1 and are melted to form evaporation liquid. Then, the vapor deposition liquid diffuses into the vapor deposition region of the evaporation boat 1 and is vaporized and evaporated mainly in the vapor deposition region. When the vaporized vapor deposition liquid contacts with the to-be-coated member arranged towards the evaporation boat 1, the vaporized vapor deposition liquid can be condensed on the surface of the to-be-coated member to form a metal film layer due to the low temperature of the to-be-coated member.

The bearing mechanism can be a combined structure of the supporting table and the box body, and the evaporation cavity is formed in the box body. The wire feeding mechanism can comprise a manipulator capable of performing three-dimensional movement and a wire winding roller, the metal wire is wound on the wire winding roller, and the manipulator clamps one end of the released metal wire and pulls the metal wire to move into the evaporation cavity to feed the metal wire. And the wire winding roller rotates and releases the metal wire in the process of clamping and pulling the metal wire by the manipulator. The evacuation mechanism may be an evacuation pump. Specifically, the carrying mechanism, the power supply, the wire feeding mechanism and the vacuumizing mechanism are all conventional technical means in the art, so that the description is omitted here.

Referring again to fig. 1, and concurrently to fig. 2 and 3, fig. 2 is a top view of an evaporation boat 1 according to one or more embodiments, and fig. 3 is an exploded view of the evaporation boat 1 according to one or more embodiments. In a first aspect, some embodiments of the present application provide an evaporation boat 1, where the evaporation boat 1 includes a boat body 10, and both sides of the boat body 10 that are oppositely disposed along a thickness direction Y of the boat body are provided with a liquid collecting tank 11 for collecting vapor deposition liquid.

The boat body 10 is generally made of a material formed by compounding boron nitride and titanium diboride. Specifically, the method and the ratio of the boron nitride and the titanium diboride are the prior art, and are not described herein.

The boat body 10 has excellent electric conductivity and high temperature resistance, and when the power supply is used for powering on the boat body 10, the boat body 10 is heated, and the shape of the boat body can be maintained at a high temperature of about 1500 ℃. The shape of the boat body 10 may be rectangular parallelepiped, cylindrical, or other shapes as desired. The boat body 10 is generally provided in a rectangular parallelepiped shape, and the extension direction of the evaporation boat 1 is the same as the extension direction of the workpiece to be evaporated.

The liquid collecting tank 11 is used for collecting vapor deposition liquid, and the liquid collecting tank 11 may be a circular tank, a rectangular tank or other irregular tank structures. In some embodiments, the liquid collecting tank 11 is a rectangular tank, and the rectangular tank extends along the extending direction of the to-be-evaporated workpiece so as to perform evaporation uniformly along the extending direction of the to-be-evaporated workpiece.

In this embodiment, the tank bottom wall 111 of the liquid collecting tank 11 is partitioned into a wire feeding region and a vapor deposition region disposed around the periphery of the wire feeding region, and when the liquid collecting tank 11 has a regular tank structure, the geometric center of the tank bottom wall 111 of the liquid collecting tank 11 is located in the wire feeding region.

In operation, the wire feed mechanism feeds wire so that the wire can contact the wire feed area of the sump 11. Next, the metal wire is melted in the wire feed region to form a vapor deposition liquid, which is collected in the liquid collection tank 11, and the vapor deposition liquid covers the vapor deposition region. Under the condition that the power supply is continuously electrified, the wire feeding area is mainly used for melting metal wires, the vapor deposition area is mainly used for vaporizing vapor deposition liquid, the vaporized vapor deposition liquid is condensed to form a metal film layer after contacting with a to-be-evaporated piece arranged above the notch of the liquid collecting tank 11 at intervals.

In the conventional evaporation boat 1, when the wire feeding area of the sump 11 is cracked due to high temperature and corrosion, the evaporation liquid easily permeates into the cracks and causes further corrosion of the boat body 10, thereby causing perforation rejection of the evaporation boat 1.

In this application, the opposite sides of the boat body 10 are provided with the liquid collecting tanks 11, and when the wire feeding area of the liquid collecting tank 11 on one side generates a crack, but the entire boat body 10 is not perforated, the boat body 10 can be turned over, and the liquid collecting tank 11 on the other side is started to work. The arrangement structure and the use mode of the liquid collecting tanks 11 at the two sides are identical, so that the description thereof is omitted here.

In the actual use process, when a crack is generated in the wire feeding area on one side of the boat body 10, if the metal wire is continuously melted in the wire feeding area on the side, the crack is rapidly perforated due to the high temperature and the corrosion of the vapor deposition liquid permeated into the crack, so that the boat body 10 is broken and scrapped. If the boat 10 is turned over at this time, which corresponds to restarting a new liquid collecting tank 11 for working, the risk of perforation and scrapping of the boat 10 is reduced, and the service life of the boat 10 is prolonged. In addition, since the liquid collecting tanks 11 on both sides of the boat body 10 can be used, the manufacturing materials of the boat body 10 are saved, and the utilization rate of the boat body 10 is improved.

It should be noted that, the vapor deposition area of the bottom wall 111 of the liquid collecting tank 11 and the side wall of the liquid collecting tank 11 are corroded when they are contacted with the vapor deposition liquid, but because the temperature of these areas is lower than that of the wire feeding area, the possibility of cracking and scrapping is lower than that of the wire feeding area. That is, the wire feeding area of the boat body 10 contacting the wire is most likely to form cracks and perforations.

Taking metal wires as aluminum wires, the boat body 10 of the evaporation boat 1 is made of a composite material of boron nitride and titanium diboride, and is formed by way of example, and in a high-temperature state, aluminum wires are melted to form aluminum liquid (one of the vapor deposition liquids) which reacts with boron nitride to generate aluminum nitride, so that the boat body 10 is corroded.

In some embodiments of the present application, the boat body 10 includes a boat main body 12 and a wire feeding table 13, both sides of the boat main body 12 opposite to each other along the thickness direction Y of the boat body 10 are provided with a liquid collecting tank 11, the wire feeding table 13 is protruded from a tank bottom wall 111 of the liquid collecting tank 11 on at least one side of the boat main body 12, and an end surface of the wire feeding table 13, which is far from the protruded tank bottom wall 111, is configured to form a wire feeding surface 131.

The wire feeding surface 131 is a surface of the wire feeding mechanism, which is in contact with the wire during the wire feeding process, and the wire feeding area is an area covered by the wire feeding surface 131, and the vapor deposition area is formed by the bottom wall 111 of the liquid collecting tank 11. In the wire feeding process, the wire is brought into contact with the wire feeding surface 131 and melted to form a vapor deposition liquid, and the vapor deposition liquid flows down by gravity and diffuses into the liquid collection tank 11 to cover the tank bottom wall 111.

The wire feeding table 13 is provided in various manners. For example, the wire feeding stage 13 may be directly provided on the bottom wall 111 of the sump 11, and may be provided so as to protrude from the bottom wall 111. Alternatively, the wire feeding table 13 may be fitted to the bottom wall 111 of the sump 11, and partially protrudes from the bottom wall 111. The part of the wire feeding table 13 protruding from the bottom wall 111 of the tank means that the wire feeding table 13 includes a section of the wire feeding surface 131 protruding from the bottom wall 111 of the liquid collecting tank 11. The wire feeding surface 131 may be located inside the liquid collecting tank 11 or outside the boat body 12. Since the molten vapor deposition liquid is likely to be sputtered when contacting the high-temperature wire feed surface 131, the wire feed surface 131 may be positioned in the liquid collection tank 11 to reduce the risk of the vapor deposition liquid being sputtered to the outside of the liquid collection tank 11.

The wire feeding table 13 may be integrally formed with the boat body 12, so as to reduce the difficulty in forming the boat body 10. Alternatively, the wire feeding table 13 may be formed separately from the boat body 12 by bonding, clamping, or the like, so that the wire feeding table 13 may be replaced when the wire feeding table 13 corrodes and cracks occur.

The tank bottom wall 111 of the liquid collecting tank 11 where the wire feeding stage 13 protrudes from at least one side of the boat body 12 means: the wire feeding stage 13 may be provided on the tank bottom wall 111 of the liquid collecting tank 11 on the side of the boat body 12, or the wire feeding stages 13 may be provided on the tank bottom walls 111 of the liquid collecting tank 11 on both sides of the boat body 12.

The thickness of the evaporation boat 1 at the position where the wire feeding table 13 is arranged can be increased by arranging the wire feeding table 13, so that the risk of cracking and perforation at the wire feeding surface 131 due to high temperature and corrosion is reduced, and the service life of the evaporation boat 1 is further prolonged.

In some embodiments of the present application, the boat body 10 includes a plurality of boat parts 14, and each boat part 14 is provided with a groove part 141 on both sides thereof facing each other in the thickness direction Y of the boat body 10. All the boat parts 14 are sequentially arranged along the longitudinal direction X of the boat body 10 and are mutually connected, and the groove parts 141 of all the boat parts 14 positioned on the same side of the boat body 10 are spliced to form the liquid collecting groove 11.

For example, any two adjacent boat parts 14 may be coupled by clamping, bonding, or other means.

After each evaporation of the evaporation boat 1, the sump 11 of the evaporation boat 1 needs to be cleaned. In this way, the vapor deposition liquid adheres to the wall of the liquid collecting tank 11 and is mixed with the vapor deposition liquid to be used next, so that the risk of low purity of vapor deposition is reduced, and the vapor deposition effect is also improved.

In the cleaning process, the liquid collecting tanks 11 are provided with a notch, so that the sewage after cleaning can be discharged from the notch only. During the discharge, the notch of the liquid collecting tank 11 is inverted downwards so that sewage can be discharged under the action of gravity. However, this arrangement is inconvenient for cleaning and for draining.

On this basis, the boat body 10 is designed to be composed of a plurality of boat parts 14, and each boat part 14 is provided with a groove part 141 for splicing to form a liquid collecting groove 11. The groove parts 141 of all the boat parts 14 located at the same side of the boat body 10 are to be spliced to form the sump 11, and then the top side of each groove part 141 along the thickness direction Y of the boat body 10 should be provided with an opening along one side or both sides of each groove part 141 along the length direction of the boat body 10 except for the portion having the notch of the sump 11 so that two adjacent groove parts 141 located at the same side of the boat body 10 can communicate with each other. In this way, during the cleaning of the evaporation boat 1, the boat body 10 can be directly disassembled and each of the boat parts 14 can be cleaned individually in turn. And in the cleaning process, the groove part 141 which is being cleaned does not need to be inverted, the sewage in the groove part 141 can be controlled to be discharged to the outside through the opening on one side of the groove part 141 which is arranged along the length direction of the boat body 10 while being cleaned, the cleaning operation difficulty is reduced, and the cleaning effect is better.

Therefore, under the design, the evaporation boat 1 can be conveniently cleaned, the cleaning efficiency is high, the cleaning difficulty is low, and the cleaning effect is good.

In some embodiments of the present application, at least two adjacent boat portions 14 are clamped therebetween.

A group of any two adjacent boat parts 14 is defined, wherein the boat parts 14 in a part of the group may be engaged with each other, or the boat parts 14 in each group may be engaged with each other.

The engagement may be performed in various manners, for example, a concave portion and a convex portion that are engaged with each other may be provided on end surfaces of the two adjacent boat parts 14 that are disposed opposite to each other, or a concave portion and a convex portion that are engaged with each other may be provided on both side surfaces of the boat body 10 that extend in the longitudinal direction X of the boat body 10 and are located on the same side between the two adjacent boat parts 14.

After the evaporation boat 1 is cleaned, all the boat parts 14 need to be connected and re-spliced to form the boat body 10. The connection mode of joint assembly is simple and convenient, is convenient for promote the assembly efficiency of the boat body 10.

Referring to fig. 4, fig. 4 is a schematic structural view of a boat portion 14 with a clamping recess 143 in an evaporation boat 1 according to one or more embodiments of the present application. In some embodiments of the present application, the surfaces of the two boat parts 14 facing each other in the snap fit are respectively provided with a snap convex part 142 and a snap concave part 143, and the snap convex part 142 is embedded in the snap concave part 143.

For each set of the boat parts 14 that are engaged by the engagement, one of the two boat parts 14 may be provided with one of the engaging convex part 142 and the engaging concave part 143 facing the surface of the other, and the other one of the engaging convex part 142 and the engaging concave part 143 facing the surface of the other one.

The engagement convex portion 142 and the engagement concave portion 143 are engaged with each other, so that the ease of assembly can be improved. Further, after the engagement of the engagement concave portion 143 and the engagement convex portion 142 is completed, the surfaces of the adjacent two boat parts 14 facing each other can be closely adhered, thereby helping to reduce the risk of vapor deposition liquid penetrating and flowing out through the gap between the surfaces of the adjacent two boat parts 14 facing each other.

In some embodiments of the present application, the boat 10 includes two boat parts 14, and each groove 141 on each boat part 14 has a half-groove structure.

The half groove structure is a groove structure formed by dividing a complete groove structure along the central line of the groove structure, and the complete groove structure can be divided into two half groove structures which are identical or are in a central symmetry structure. For example, taking a slot structure as a circular slot, the centerline is any diameter of the slot structure. For example, the center line may be a center axis of the groove structure extending in the longitudinal direction X, or may be a center axis of the groove structure extending in the width direction.

In this embodiment, since the two boat parts 14 are sequentially arranged along the longitudinal direction X of the boat body 10 and are connected to each other, the two boat parts 14 are identical. The half tank structure is formed by dividing the center axis of the liquid collecting tank 11 extending in the width direction thereof. The two boat parts 14 are separated from each other, and each boat part 14 has a half wire feeding table 13 thereon.

By providing the boat 10 with two boat parts 14 and each groove 141 on each boat part 14 is of half-groove structure, the number of boat parts 14 can be effectively reduced, and the boat 10 can be quickly assembled, disassembled and cleaned.

In some embodiments of the present application, the evaporation boat 1 further includes a heat conductive member 20, the heat conductive member 20 is in contact between the two boat parts 14, and the heat conductive member 20 has a heat conductivity greater than that of each boat part 14 in contact therewith.

Specifically, the heat conductive member 20 is sandwiched between the surfaces of the two boat parts 14 facing each other.

Generally, the geometric center of the wire feeding region and the geometric center of the liquid collecting tank 11 are located on the central axis of the boat 10 extending in the thickness direction Y thereof.

When the heat conductive member 20 is in contact with the space between the two boat parts 14, the heat conductive member 20 is also in contact with the wire feeding region or the region where the wire feeding region can be covered by projection in the thickness direction Y of the boat body 10 after the two boat parts 14 are joined together. For example, the heat conductive member 20 is directly clamped between the two half wire feeding stages 13 on the two boat parts 14 so that the heat conductive member 20 can directly contact the wire feeding region.

In the working process, the temperature of the wire feeding area is higher than that of the vapor deposition area due to heat transfer, so that the wire feeding area is easy to form a high-temperature area, and the vapor deposition liquid is sputtered.

In this application, since the heat conductive member 20 is in contact with the space between the two boat parts 14 and the heat conductive member 20 has a heat conductivity greater than that of each boat part 14 in contact therewith, when the heat conductive member 20 is in direct contact with the wire feeding region, the heat of the wire feeding region can be directly transferred to the heat conductive member 20 and be diffused to the outside through the heat conductive member 20. When the heat conductive member 20 contacts the region that can be covered by the wire feeding region projected in the thickness direction Y of the boat body 10, the heat of the wire feeding region can be transferred to the heat conductive member 20 through the region that can be covered by the wire feeding region projected in the thickness direction Y of the boat body 10 by the heat transfer, so that the temperature of the wire feeding region is reduced. Like this, send the temperature in silk region more to be close to the temperature in evaporation zone to can reduce the risk of evaporation coating liquid sputtering, and make the temperature distribution of whole evaporation boat 1 also more even, be convenient for realize even evaporation. It should be noted that the area that can be covered by the projection of the wire feeding area in the thickness direction Y of the boat body 10 does not include the wire feeding area.

In some embodiments of the present application, the thermally conductive member 20 is a flexible thermally conductive member.

The flexible heat conductive member refers to a heat conductive member having a certain softness and capable of being deformed by pressing. The flexible heat conductive member may be a paper, cloth-like structure formed of a material having high heat conductivity, such as graphite paper, tungsten paper, or the like. Wherein, graphite paper refers to a paper-like structure formed by graphite materials, and tungsten paper refers to a paper-like structure formed by tungsten.

In addition, the heat conductive member 20 has a high melting point and chemical stability, and the heat conductive member 20 can maintain its shape in a high-temperature environment for vapor deposition, and does not chemically react with the vapor deposition liquid and the boat 10.

By providing the heat conducting member 20 as a flexible heat conducting member, the heat conduction can be deformed and fill the gap between the two boat parts 14 during the process of clamping the two boat parts 14, thereby reducing the risk of vapor deposition liquid in the liquid collecting tank 11 penetrating through the gap between the two boat parts 14. In addition, the heat conductive member 20 should be formed using a thinner member as much as possible so as to avoid an excessive gap between the two boat parts 14, which is clamped between the two heat conductive members 20.

In some embodiments of the present application, the thermally conductive member 20 is graphite paper.

The graphite paper has high temperature resistance, corrosion resistance and excellent heat conduction performance. In the vapor deposition process, the graphite paper does not chemically react with the vapor deposition liquid and the boat body 10, and can maintain the shape thereof and realize heat dissipation in the wire feeding area.

In some embodiments of the present application, the evaporation boat 1 further includes a support seat 30, and the support seat 30 is provided with a limiting recess 31, and the boat body 10 is limited in the limiting recess 31.

Wherein, the limit concave part 31 can be a groove structure, a hole structure or other structures. The inner wall surface of the limit concave portion 31 may be completely bonded to the boat body 10, or may be partially bonded to the boat body 10, or may be in point contact with the boat body 10, so that the boat body 10 may be limited to the limit concave portion 31.

The limiting concave portion 31 extends along the length direction of the boat body 10, and the limiting concave portion 31 can limit the boat body 10 along the length direction or the width direction of the boat body 10. Preferably, the limiting recess 31 limits the boat 10 in the length direction of the boat 10.

Since the boat body 10 is formed by splicing the plurality of boat parts 14, if the boat body 10 is rocked, there is a possibility that the connection between any two adjacent boat parts 14 fails. By providing the limiting recess 31, when the boat body 10 is limited in the limiting recess 31, the limiting portion 33 can limit the boat body 10 along the length direction or the width direction of the boat body 10 according to different forms of the limiting portion 33, so as to reduce the risk of moving the boat parts 14, and thus the boat parts 14 can be connected to form a whole. The boat body 10 is simply inserted into the limit concave portion 31 by providing the limit concave portion 31, and the assembly is simpler.

In some embodiments of the present application, the support base 30 includes a support main body 32 and a plurality of limiting portions 33 protruding on the support main body 32, where all the limiting portions 33 are sequentially arranged along a circumferential direction of the support main body 32 and form a limiting recess 31 together with the support main body 32.

The support body 32 has a plate-like structure and is bonded to one side surface of the boat body 10 along the thickness direction Y. The shape of the support body 32 is similar to or the same as the shape of the boat body 10. For example, taking the boat body 10 as a rectangular parallelepiped, the supporting body 32 is a rectangular plate, taking the boat body 10 as a hemispherical shape, and the supporting body 32 is an arc plate.

The stopper 33 may be columnar, rod-shaped, block-shaped, or the like, which extends in the thickness direction Y of the boat body 10.

When all the limiting portions 33 are sequentially arranged along the circumferential direction of the support body 32, any two adjacent limiting portions 33 may be arranged at intervals, or may be arranged in close proximity, and may be specifically arranged according to requirements.

Each of the limiting portions 33 and the supporting body 32 may be integrally formed or may be separately formed. In the case of separate molding, each of the limiting portions 33 may be fixed to the support main 32 by means of adhesion, engagement, screwing, or the like.

By arranging all the limiting parts 33 to be sequentially distributed along the circumferential direction of the supporting body 32 and enclosing the supporting body 32 together to form the limiting concave part 31, the forming mode of the supporting seat 30 is simple and convenient.

In some embodiments of the present application, at least two adjacent limiting portions 33 are disposed at intervals and enclose with the supporting body 32 to form a heat dissipation port 34 communicating with the limiting recess 31.

The two adjacent limit portions 33 are used as a group of limit portions 33, and a part of the limit portions 33 may be enclosed with the support main body 32 to form the heat dissipation opening 34, or each group of limit portions 33 may be enclosed with the support main body 32 to form the heat dissipation opening 34.

By providing the heat radiation ports 34, heat on the boat body 10 can be transmitted to the outside through the heat radiation ports 34, so that the risk of vapor deposition liquid sputtering caused by overhigh temperature of the boat body 10 can be reduced.

In some embodiments of the present application, the thermal conductivity of the support pedestal 30 is greater than the thermal conductivity of the boat body 10.

For example, the support base 30 may be a graphite member or the like, for example, by forming the boat body 10 of a composite material of boron nitride and titanium diboride.

The heat dissipation efficiency of the supporting seat 30 can be further improved by arranging the supporting seat 30 to be made of a material with the heat conductivity larger than that of the boat body 10, so that heat on the boat body 10 can be transmitted to the outside through the solid part of the supporting seat 30 and the heat dissipation opening 34 on the supporting seat 30, and the risk of vapor deposition liquid sputtering caused by overhigh temperature of the boat body 10 can be further reduced.

In a second aspect, the present application provides a vacuum evaporation apparatus comprising an evaporation boat 1 as described in any one of the above.

Referring to fig. 1-4 together, according to some embodiments of the present application, there is provided an evaporation boat 1, the evaporation boat 1 comprising a boat body 10, both sides of the boat body 10 which are arranged oppositely along the thickness direction Y are provided with liquid collecting grooves 11 for collecting vapor deposition liquid.

In such evaporation boat 1, when a crack is generated in the wire feeding area on one side of the boat body 10, the boat body 10 is turned over, which corresponds to restarting a new liquid collecting tank 11 for operation, so that the risk of perforation and scrapping of the boat body 10 is reduced, and the service life of the boat body 10 is prolonged. In addition, since the liquid collecting tanks 11 on both sides of the boat body 10 can be used, the manufacturing materials of the boat body 10 are saved, and the utilization rate of the boat body 10 is improved.

The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.

The above examples only represent a few embodiments of the present application, which are described in more detail and are not to be construed as limiting the scope of the claims. It should be noted that it would be apparent to those skilled in the art that various modifications and improvements could be made without departing from the spirit of the present application, which would be within the scope of the present application. Accordingly, the scope of protection of the present application is to be determined by the claims appended hereto.

Claims (12)

1. The evaporation boat is characterized by comprising a boat body (10), wherein liquid collecting grooves (11) for collecting vapor deposition liquid are formed in two sides of the boat body (10) which are oppositely arranged along the thickness direction (Y) of the boat body;

the boat body (10) comprises a boat main body (12) and a wire feeding table (13), wherein the liquid collecting grooves (11) are formed in two sides of the boat main body (12) which are oppositely arranged along the thickness direction (Y) of the boat body (10), the wire feeding table (13) is arranged on the groove bottom wall (111) of the liquid collecting groove (11) on at least one side of the boat main body (12) in a protruding mode, and one end face of the groove bottom wall (111) of the wire feeding table (13) which is far away from the wire feeding table is formed into a wire feeding face (131);

the boat body (10) comprises a plurality of boat parts (14), and groove parts (141) are formed on two sides of each boat part (14) which are oppositely arranged along the thickness direction (Y) of the boat body (10);

all the boat parts (14) are sequentially arranged along the longitudinal direction (X) of the boat body (10) and are mutually connected, and all the groove parts (141) of the boat parts (14) positioned on the same side of the boat body (10) are spliced to form the liquid collecting groove (11).

2. The evaporation boat according to claim 1, wherein at least two adjacent boat parts (14) are engaged with each other.

3. The evaporation boat according to claim 2, wherein the surfaces of the two boat parts (14) facing each other in the snap fit are provided with a snap convex part (142) and a snap concave part (143), respectively, and the snap convex part (142) is fitted into the snap concave part (143).

4. The evaporation boat according to claim 1, wherein the boat body (10) comprises two boat parts (14), and each of the groove parts (141) on each of the boat parts (14) has a half-groove structure.

5. The evaporation boat according to claim 4, further comprising a heat conductive member (20), the heat conductive member (20) being in contact between the two boat parts (14), and the heat conductive member (20) having a heat conductivity greater than that of each of the boat parts (14) in contact therewith.

6. The evaporation boat according to claim 5, wherein the heat conductive member (20) is a flexible heat conductive member.

7. The evaporation boat according to claim 6, wherein the heat conductive member (20) is graphite paper.

8. The evaporation boat according to claim 1, further comprising a support base (30), wherein a limit concave portion (31) is formed on the support base (30), and the boat body (10) is limited in the limit concave portion (31).

9. The evaporation boat according to claim 8, wherein the support base (30) includes a support body (32) and a plurality of stopper portions (33) protruding from the support body (32), and all of the stopper portions (33) are sequentially arranged in a circumferential direction of the support body (32) and form the stopper recess (31) together with the support body (32).

10. The evaporation boat according to claim 9, wherein at least two adjacent limit portions (33) are provided at intervals and enclose with the support body (32) to form a heat radiation port (34) communicating with the limit recess (31).

11. Evaporation boat according to claim 8, characterized in that the thermal conductivity of the support seat (30) is greater than the thermal conductivity of the boat body (10).

12. A vacuum evaporation apparatus comprising an evaporation boat according to any one of claims 1 to 11.