CN219991705U - Evaporation boat and vacuum evaporation equipment - Google Patents

Abstract

The utility model relates to an evaporation boat and a vacuum evaporation device. The evaporation boat comprises a boat body and an impact-resistant piece, wherein the boat body is provided with a liquid collecting groove for collecting evaporation liquid, the impact-resistant piece is arranged on the boat body and is exposed in the liquid collecting groove, and the impact-resistant piece forms a wire feeding surface towards the top surface structure of the notch of the liquid collecting groove; wherein, the impact-resistant piece is a metal component. The evaporation boat and the vacuum evaporation equipment provided by the utility model can relieve the problem that the evaporation boat is easy to discard, so that the service lives of the evaporation boat and the vacuum evaporation equipment can be prolonged.

Description

Evaporation boat and vacuum evaporation equipment

Technical Field

The utility model relates to the technical field of vacuum evaporation, in particular to an evaporation boat and vacuum evaporation equipment.

Background

The working principle of the vacuum evaporation equipment is that the metal wires on the evaporation boat are vaporized and evaporated by heating the evaporation boat under the vacuum condition and deposited on a piece to be coated to be condensed to form a metal film layer.

The quality of the evaporation boat serving as an important working part of the vacuum evaporation equipment has important influence on parameters such as film coating uniformity, film forming quality and the like of a metal film layer.

Conventional evaporation boats are generally made of materials formed by compositing boron nitride and titanium diboride, and metal wires are easy to chemically react with the boron nitride in a high-temperature molten state, so that the areas on the evaporation boat, which are in contact with the metal wires, are corroded. Moreover, during the continuous feeding of the wire, since the wire has a certain initial velocity before contacting the evaporation boat, impact is caused to the above-mentioned corroded area of the evaporation boat during the contact of the wire with the area, and the formation of grooves or pits in the area is further accelerated. Thus, the possibility of scrapping the evaporation boat is increased, and the service life is reduced.

Disclosure of Invention

In view of the above problems, the present utility model provides an evaporation boat and a vacuum evaporation apparatus, which can alleviate the problem that the evaporation boat is easy to be scrapped, so as to improve the service life of the evaporation boat and the vacuum evaporation apparatus.

The utility model provides an evaporation boat, which comprises a boat body and an impact-resistant piece, wherein a liquid collecting groove for collecting evaporation liquid is formed in the boat body;

wherein, the impact-resistant piece is a metal component.

Under this design, the wire is in contact with the top surface of the impact-resistant member during wire feeding. Since the impact-resistant member is a metal member, when the impact-resistant member is in contact with the vapor deposition liquid in a high temperature state, the impact-resistant member is less likely to react with the vapor deposition liquid, and the probability of corrosion at the impact-resistant member is also reduced. Moreover, the metal member has better impact resistance, so that the risk of deformation and damage of the impact resistant piece is reduced under the continuous impact force of the metal wire. Therefore, the risk of forming grooves and pits in the area where the impact-resistant piece is located is reduced, so that the evaporation boat is not easy to discard in the use process, and the service life is prolonged.

In some embodiments, the top surface of the impact member is flush with the bottom wall of the sump.

Compared with the impact-resistant piece which is arranged in the liquid collecting tank in a protruding mode, the top surface of the impact-resistant piece is flush with the bottom wall of the liquid collecting tank, so that resistance of vapor deposition liquid formed by melting the top surface of the impact-resistant piece to be diffused to other areas in the liquid collecting tank is small, and flow of the vapor deposition liquid is not affected. Like this, in the in-process of coating by vaporization, the bottom wall of the groove of collecting tank and the top surface of shock resistance spare all can be covered by the coating by vaporization liquid for the coating by vaporization liquid in each region in the collecting tank can evaporate uniformly, in order to promote the homogeneity of coating by vaporization.

In some embodiments, the geometric center point of the top surface of the impact resistant member and the geometric center point of the bottom wall of the sump are both located on the same line extending in the thickness direction of the boat body.

Through setting up the geometric center point of the top surface of shock resistance spare, all be located along the thickness direction of boat body = the same straight line that extends with the geometric center point of the groove diapire of collecting tank, so, the coating by vaporization liquid after the top surface melting of shock resistance spare can evenly spread all around to each region in the groove diapire of making the collecting tank can be evenly covered the coating by vaporization liquid. Thus, the vapor deposition liquid in each area in the liquid collecting tank can be uniformly vaporized, so that the uniformity of vapor deposition is improved.

In some embodiments, the impact resistant member has a melting point K that satisfies the condition: k is more than or equal to 1800 degrees and less than 3500 degrees.

The conditions are satisfied by setting K: the impact-resistant piece 20 can maintain the shape of the metal wire in the conventional metal wire evaporation process, and has better evaporation reliability, wherein K is less than or equal to 1800 degrees and less than 3500 degrees.

In some embodiments, K satisfies the condition: k is more than or equal to 2200 degrees and less than or equal to 3430 degrees.

In this embodiment, the impact resistant member has superior high temperature resistance and does not react with most common wires used to melt to form vapor deposition. In the process of vapor deposition, the possibility that the impact resistant member and the vapor deposition liquid are subjected to chemical reaction is low, and the deformation and damage possibility caused by the impact of the metal wire is low. Thus, the service life of the evaporation boat can be further prolonged.

In some embodiments, the thermal conductivity of the impact member is T, T satisfying the condition: t is more than or equal to 50W/(m.K) and less than or equal to 200W/(m.K).

The conditions are satisfied by setting T: after the power is applied, heat can be quickly transferred to the impact resistant piece and high temperature is formed, so that the vapor deposition efficiency is improved.

In some embodiments, T satisfies the condition: t is more than or equal to 80W/(m.K) and less than or equal to 180W/(m.K).

The conditions are satisfied by setting T: after the power is applied, heat can be quickly transferred to the impact resistant piece and high temperature is formed, so that the vapor deposition efficiency is improved.

In some embodiments, the impact resistant member is a disc-like structure, the impact resistant member has a diameter R, the boat body has a width D, and D/R satisfies the condition: D/R is more than or equal to 1:0.5 and less than or equal to 1:0.9.

The conditions are satisfied by setting D/R: in general, even if the metal wire swings in the plane of the top surface, the metal wire can basically contact with the top surface of the impact-resistant piece, so that the possibility that the metal wire contacts with the top surface of the impact-resistant piece can be improved, the possibility that the boat forms pits can be reduced, and the evaporation boat 1 has a longer service life.

In addition, under the condition, the volume ratio of the impact-resistant piece in the evaporation boat is proper, and the difference between the resistance of the area where the impact-resistant piece is positioned and the resistance of other areas of the evaporation boat is not too large, so that the current can be uniformly dispersed to the area where the impact-resistant piece is positioned and the other areas of the evaporation boat, and therefore, the temperature distribution of the whole evaporation boat is uniform, and uniform evaporation can be performed.

In some embodiments, the impact member has a thickness H that satisfies the condition: h is more than or equal to 1mm and less than or equal to 4mm.

The thickness H of the impact-resistant piece meets the condition: h is more than or equal to 1mm and less than or equal to 4mm, so that the impact-resistant piece has proper thickness and can resist the mechanical impact of metal wires, the impact resistance of the impact-resistant piece can be improved, and the service life of the evaporation boat is prolonged.

In some embodiments, H satisfies the condition: h is more than or equal to 1mm and less than or equal to 1.5mm.

The thickness H of the impact-resistant piece meets the condition: the thickness of H is more than or equal to 1mm and less than or equal to 1.5mm, so that the impact-resistant piece has proper thickness and can resist mechanical impact of metal wires, the volume ratio of the impact-resistant piece in the evaporation boat is proper, the resistance difference between the area where the impact-resistant piece is positioned and other areas of the evaporation boat is not too large, and thus, current can be uniformly dispersed to the area where the impact-resistant piece is positioned and other areas of the evaporation boat, and therefore, the temperature distribution of the whole evaporation boat is uniform and uniform evaporation can be performed.

In a second aspect, the present utility model provides a vacuum evaporation apparatus comprising an evaporation boat according to any one of the embodiments described above.

The foregoing description is only an overview of the present utility model, and is intended to be implemented in accordance with the teachings of the present utility model in order that the same may be more clearly understood and to make the same and other objects, features and advantages of the present utility model more readily apparent.

Drawings

Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the utility model. Also, like reference numerals are used to designate like parts throughout the figures. In the drawings:

FIG. 1 is a top view of an evaporation boat in accordance with some embodiments of the present utility model;

FIG. 2 is a cross-sectional view of the evaporation boat shown in FIG. 1 along the direction A-A;

fig. 3 is a cross-sectional view of the impact resistant member of the evaporation boat shown in fig. 2.

Reference numerals:

1. an evaporation boat; 10. a boat body; 11. a liquid collecting tank; 12. a bottom wall of the tank; 20. an impact resistant member; 21. a top surface; x, thickness direction; y, length direction; l, central axis; m, a first center point; and N, a second center point.

Detailed Description

In order that the above objects, features and advantages of the utility model will be readily understood, a more particular description of the utility model will be rendered by reference to the appended drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present utility model. The present utility model may be embodied in many other forms than described herein and similarly modified by those skilled in the art without departing from the spirit of the utility model, whereby the utility model is not limited to the specific embodiments disclosed below.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present utility model, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.

In the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

In the present utility model, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.

It will be understood that when an element is referred to as being "fixed" or "disposed" on another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like are used herein for illustrative purposes only and are not meant to be the only embodiment.

At present, the application of uniformly coating a metal film layer on a piece to be coated by adopting a vacuum evaporation method is wider. The principle of the vacuum evaporation method is as follows: in a vacuum environment, an evaporation boat of the vacuum evaporation equipment is directly electrified and heated to about 1500 ℃, and metal wires are input, and when the metal wires contact the evaporation boat, the metal wires are liquefied on the surface of the evaporation boat and evaporated in the vacuum environment, so that a piece to be coated, which is arranged towards the evaporation boat, can be coated with a metal film layer with uniform thickness.

Conventional evaporation boats are generally made of materials formed by compositing boron nitride and titanium diboride, and metal wires are easy to chemically react with the boron nitride in a high-temperature molten state, so that the areas on the evaporation boat, which are in contact with the metal wires, are corroded. Moreover, during the continuous feeding of the wire, since the wire has a certain initial velocity before contacting the evaporation boat, impact is caused to the above-mentioned corroded area of the evaporation boat during the contact of the wire with the area, and the formation of grooves or pits in the area is further accelerated. Thus, the possibility of scrapping the evaporation boat is increased, and the service life is reduced.

In order to alleviate the problem that the evaporation boat is easy to discard, the applicant has conducted intensive studies to actually provide an evaporation boat, wherein an impact-resistant member is arranged on the evaporation boat body and is exposed in the liquid collecting tank, the impact-resistant member forms a wire feeding surface towards the top surface structure of the notch of the liquid collecting tank, and the impact-resistant member is a metal member.

When the wire is fed, the metal wire is contacted with the top surface of the impact-resistant piece, and the metal wire and the impact-resistant piece are metal components, so that the possibility of reaction between the impact-resistant piece and the molten metal wire is much smaller than the possibility of reaction between boron nitride and the molten metal wire in a high-temperature state, and the corrosion probability of the contact area between the evaporation boat and the metal wire is reduced. Moreover, the metal member has better impact resistance, so that the risk of deformation and damage of the area, which is contacted with the metal wire, on the evaporation boat is reduced under the continuous impact force of the metal wire, and thus, the risk of forming grooves or pits in the area is reduced, the evaporation boat is not easy to discard, and the service life is prolonged.

Referring to fig. 1, fig. 1 is a top view of an evaporation boat 1 according to some embodiments of the utility model. The embodiment of the utility model provides an evaporation boat 1 and a vacuum evaporation device comprising the evaporation boat 1, wherein the vacuum evaporation device can evaporate and deposit metal wires on the evaporation boat 1 onto a piece to be coated by heating the evaporation boat 1 so as to condense and form a metal film layer. The metal wire may be an aluminum wire, a copper wire, or the like, and the following embodiments are described by taking the metal wire as an example. The piece to be coated can be a flexible substrate, a rigid substrate and the like, and can be specifically arranged according to the requirements.

The vacuum evaporation device may include, but is not limited to, an evaporation boat 1, and may further include a carrying mechanism, a power source, a wire feeding mechanism, and a vacuum pumping mechanism. The bearing mechanism is used for bearing a power supply, a wire feeding mechanism, a vacuumizing mechanism and the evaporation boat 1. The bearing mechanism is provided with an evaporation cavity, and the vacuumizing mechanism is used for vacuumizing air in the evaporation cavity so as to form a vacuum environment in the evaporation cavity. The power supply is electrically connected with the evaporation boat 1 and is used for supplying power to the evaporation boat 1. The piece to be coated and the evaporation boat 1 are arranged in the evaporation cavity, and the wire feeding mechanism is used for conveying metal wires into the evaporation cavity.

In actual operation, the vacuumizing mechanism is used for vacuumizing air in the evaporation cavity so as to form a vacuum environment in the evaporation cavity, the power supply is used for electrifying the evaporation boat 1 and heating the evaporation boat to about 1500 ℃, and the wire feeding mechanism is used for inputting metal wires into the evaporation cavity, and the metal wires are contacted with the evaporation boat 1 and melted to form evaporation liquid. Then, the vapor deposition liquid is liquefied on the surface of the evaporation boat 1, and evaporated in a vacuum atmosphere. When the vaporized vapor deposition liquid contacts with the to-be-coated member arranged towards the evaporation boat 1, the vaporized vapor deposition liquid can be condensed on the surface of the to-be-coated member to form a metal film layer due to the low temperature of the to-be-coated member.

The bearing mechanism can be a combined structure of the supporting table and the box body, and the evaporation cavity is formed in the box body. The wire feeding mechanism can comprise a manipulator capable of performing three-dimensional movement and a wire winding roller, the metal wire is wound on the wire winding roller, and the manipulator clamps one end of the released metal wire and pulls the metal wire to move into the evaporation cavity to feed the metal wire. And the wire winding roller rotates and releases the metal wire in the process of clamping and pulling the metal wire by the manipulator. The evacuation mechanism may be an evacuation pump. Specifically, the carrying mechanism, the power supply, the wire feeding mechanism and the vacuumizing mechanism are all conventional technical means in the art, so that the description is omitted here.

Referring to fig. 1 again, and referring to fig. 2 and 3 simultaneously, fig. 2 is a cross-sectional view of the evaporation boat 1 according to an embodiment of the utility model, and fig. 3 is a cross-sectional view of the impact-resistant member 20 according to an embodiment of the utility model.

In a first aspect, some embodiments of the present utility model provide an evaporation boat 1, where the evaporation boat 1 includes a boat body 10 and an impact-resistant member 20, a liquid collecting tank 11 for collecting vapor deposition liquid is formed on the boat body 10, the impact-resistant member 20 is disposed on the boat body 10 and is exposed in the liquid collecting tank 11, and a top surface 21 of the impact-resistant member 20 disposed towards a notch of the liquid collecting tank 11 is configured to form a wire feeding surface; wherein the impact resistant member 20 is a metal member.

The boat body 10 is generally made of a composite material of boron nitride and titanium diboride. Specifically, the method and the ratio of the boron nitride and the titanium diboride are the prior art, and are not described herein.

The boat body 10 has excellent heat conduction performance and high temperature resistance, and when the power supply is used for powering on the boat body 10, the boat body 10 rapidly heats up and can maintain the shape at a high temperature of about 1500 ℃. The shape of the boat body 10 may be rectangular parallelepiped, cylindrical, or other shapes as desired. Generally, the boat body 10 is selected to be rectangular in shape so as to be convenient to install.

The liquid collection tank 11 is used for collecting vapor deposition liquid, which is a metal liquid formed by melting a metal wire. The wires are contacted with the top surface 21 of the impact-resistant member 20 and then melted to form vapor deposition liquid, which is collected in the liquid collecting tank 11. The top surface 21 of the impact resistant member 20 refers to a surface of the impact resistant member 20 exposed to the inside of the sump 11 and closest to the notch of the sump 11 in the thickness direction X of the boat body 10. The wire feeding surface refers to the surface of the wire feeding mechanism, which is contacted with the metal wire in the wire feeding process, and the top surface 21 of the impact resistant member 20 forms the wire feeding surface, so that the metal wire is contacted with the top surface 21 of the impact resistant member 20 and melted on the top surface 21 in the wire feeding process of the wire feeding mechanism.

The impact resistant member 20 is a metal member which should be made of a metal material having high temperature resistance, good chemical stability and strong thermal conductivity. Specifically, the metal member is required to withstand at least 1500 ℃ and at that temperature, the metal member has sufficient strength to support the wire and hardly reacts chemically with the molten wire and the boat body 10. It will be appreciated that the impact resistant member 20 may be replaced according to the material of the boat 10 and the wire, so as to reduce the risk of the impact resistant member 20 reacting with the boat 10 and the molten wire during the evaporation process. Alternatively, the impact-resistant member 20 may be formed by using a material that does not react with a common material for forming the boat body 10 and a common wire material for forming the vapor deposition liquid by melting at a high temperature of about 1500 ℃. For example, the impact resistant member 20 may be formed of tungsten, molybdenum, or the like.

The impact resistant member 20 is provided in a variety of ways. For example, the impact resistance member 20 may be provided directly on the bottom wall 12 of the sump 11 and all protruding from the bottom wall 12 of the sump. Alternatively, the impact-resistant member 20 may be fitted to the bottom wall 12 of the sump 11 and partially protrude from the bottom wall 12 of the sump. The impact-resistant member 20 protruding from the bottom wall 12 of the sump means that the impact-resistant member 20 comprises a section of the top surface 21 protruding from the bottom wall 12 of the sump 11. Alternatively, the top surface 21 of the impact-resistant member 20 may be disposed flush with the bottom wall 12 of the sump 11. Preferably, the top surface 21 of the impact member 20 is flush with the bottom wall 12 of the sump 11 or, alternatively, the top surface 21 of the impact member 20 is located within the sump 11.

In operation, the wire feeder feeds wire so that the wire can contact the top surface 21 of the impact member 20. Next, the metal wire is melted at the top surface 21 to form vapor deposition liquid and collected in the liquid collection tank 11. Under the condition that the power supply is continuously electrified, the vapor deposition liquid in the liquid collecting tank 11 is vaporized and is condensed to form a metal film layer after contacting with the to-be-vapor deposition parts which are arranged above the notch of the liquid collecting tank 11 at intervals.

In the conventional evaporation boat 1, the metal wires are melted to form a vapor deposition liquid, and the vapor deposition liquid is likely to react with boron nitride to form a metal nitride in a high temperature state. In this way, corrosion occurs in the area where the boat body 10 contacts the wire. Then, in the process of continuously inputting the metal wire, since the metal wire has a certain initial speed before contacting with the boat body 10 of the evaporation boat 1, the metal wire also can cause mechanical impact on the contacted area on the boat body 10, so that the formation of grooves or pits in the area is further accelerated, the boat body 10 is easy to discard, and the service life is low.

It should be noted that, other areas where the walls of the liquid collecting tank 11 of the boat body 10 are in contact with the vapor deposition liquid will also corrode, but since other areas are not mechanically impacted by the metal wires, the other areas are less likely to form grooves or pits or more slowly. That is, the region of the boat body 10 in contact with the wire is most likely to form grooves or pits.

In the embodiment of the present utility model, the wire is in contact with the top surface 21 of the impact member 20 during wire feeding. Since the impact-resistant member 20 is a metal member, when it contacts the vapor deposition liquid in a high temperature state, the possibility of reacting with the vapor deposition liquid is small, and the probability of corrosion at the impact-resistant member 20 is also reduced. Furthermore, the metallic member itself has superior impact resistance, and the risk of deformation and breakage of the impact-resistant member 20 is reduced under the continuous impact force of the wire. In this way, the risk of forming grooves and pits in the area where the impact-resistant member 20 is located is reduced, so that the evaporation boat 1 is not easy to discard in the use process, and the service life is prolonged.

Taking metal wires as aluminum wires, the boat body 10 of the evaporation boat 1 is made of a material formed by compounding boron nitride and titanium diboride, and is manufactured and molded. In the conventional evaporation boat 1, aluminum wires are melted to form an aluminum liquid (one of the above vapor deposition liquids), and the aluminum liquid reacts with boron nitride to form aluminum nitride in a high temperature state, so that corrosion occurs in a region where the boat body 10 contacts with the aluminum wires. Then, during the continuous wire feeding process, the aluminum wire mechanically impacts the contact area on the boat body 10, thereby further accelerating the formation of grooves or pits in the area.

In the present utility model, however, the aluminum wire is in contact with the top surface 21 of the impact member 20 during wire feeding. Since the impact resistance member 20 is a metal member, it is less likely to react with the molten aluminum when it is in contact with the molten aluminum in a high temperature state, and the probability of corrosion at the impact resistance member 20 is also reduced. Moreover, the metallic member itself has superior impact resistance, and the risk of deformation and breakage of the impact resistant member 20 is reduced under the continuous impact force of the aluminum wire. Thus, the evaporation boat 1 is not easy to discard in the using process, and the service life is prolonged.

In some embodiments of the utility model, the top surface 21 of the impact member 20 is flush with the bottom wall 12 of the sump 11.

That is, the impact resistant member 20 is embedded in the boat body 10, and only the top surface 21 of the impact resistant member 20 is exposed in the sump 11.

Compared with the impact-resistant member 20 protruding into the liquid collection tank 11, by arranging the top surface 21 of the impact-resistant member 20 flush with the tank bottom wall 12 of the liquid collection tank 11, the vapor deposition liquid formed by melting the top surface 21 of the impact-resistant member 20 has smaller resistance to diffuse into other areas in the liquid collection tank 11, so that the flow of the vapor deposition liquid is not affected. In this way, in the evaporation process, the bottom wall 12 of the liquid collecting tank 11 and the top surface 21 of the impact resistant member 20 can be covered by the evaporation liquid, so that the evaporation liquid in each area in the liquid collecting tank 11 can be uniformly evaporated, thereby improving the uniformity of evaporation.

In some embodiments of the present utility model, the geometric center point of the top surface 21 of the impact resistance member 20 and the geometric center point of the tank bottom wall 12 of the liquid collecting tank 11 are all located on the same straight line extending in the thickness direction X of the boat body 10.

The geometrical center point of the top surface 21 of the impact-resistant member 20 is defined as a first center point M and the geometrical center point of the bottom wall 12 of the sump 11 is defined as a second center point N, which in the embodiment where the impact-resistant member 20 is arranged protruding from the bottom wall 12 of the sump 11 is arranged co-linear but spaced from the second center point N. In such an embodiment, the top surface 21 of the impact member 20 is located within the sump 11 but is also spaced from the sump bottom wall 12 of the sump 11.

In embodiments where the top surface 21 of the impact member 20 is flush with the tank bottom wall 12 of the sump 11, the first center point M coincides with the second center point N.

Preferably, the geometric center point of the top surface 21 of the impact resistance member 20 and the geometric center point of the tank bottom wall 12 of the liquid collecting tank 11 are both located on and coincide with the central axis L along the boat body 10.

By providing the geometric center point of the top surface 21 of the impact-resistant member 20 and the geometric center point of the tank bottom wall 12 of the liquid collecting tank 11 on the same straight line extending in the thickness direction X of the boat body 10, the vapor deposition liquid melted at the top surface 21 of the impact-resistant member 20 can be uniformly spread around, so that each region of the tank bottom wall 12 of the liquid collecting tank 11 can be uniformly covered with the vapor deposition liquid. In this way, the vapor deposition liquid in each region in the liquid collecting tank 11 can be vaporized uniformly, so that the uniformity of vapor deposition can be improved.

In some embodiments of the present utility model, the impact member 20 has a melting point K, which satisfies the condition: k is more than or equal to 1800 degrees and less than 3500 degrees.

The higher the melting point of the impact-resistant member 20 is, the less the impact-resistant member 20 is affected by softening deformation by high temperature during vapor deposition, and the impact-resistant member 20 can better maintain its shape and support the wire to melt the wire.

It follows that by setting K the conditions are satisfied: the impact-resistant piece 20 can maintain the shape of the metal wire in the conventional metal wire evaporation process, and has better evaporation reliability, wherein K is less than or equal to 1800 degrees and less than 3500 degrees.

Further, in some embodiments of the utility model, K satisfies the condition: k is more than or equal to 2200 degrees and less than or equal to 3430 degrees.

For example, according to actual needs, any one of tungsten, molybdenum, tantalum and niobium may be selected to make the impact-resistant member 20, or any alloy formed by compounding any two of the above, or any alloy formed by compounding any three of the above may be selected to make the impact-resistant member 20, or any alloy formed by compounding any four of the above may be selected to make the impact-resistant member 20.

The method and the ratio of the tungsten, the molybdenum, the tantalum and the niobium are any two or any three or four, and are not described herein.

In this embodiment, the impact member 20 has superior high temperature resistance and does not react with most common wires used to melt to form vapor deposition solutions. In the vapor deposition process, the impact-resistant member 20 is less likely to chemically react with the vapor deposition liquid and to be deformed and broken by the impact of the wire. In this way, the service life of the evaporation boat 1 can be further prolonged.

In some embodiments of the present utility model, the thermal conductivity of the impact member 20 is T, T satisfying the condition: t is more than or equal to 50W/(m.K) and less than or equal to 200W/(m.K).

The heat of the boat body 10 can be quickly transferred to the impact-resistant member 20 after the power is applied to the members with high heat conductivity, so that the heat can be quickly collected on the impact-resistant member 20 and form high temperature to heat the metal wires.

It follows that by setting T the conditions are satisfied: after the power is applied, heat can be quickly transferred to the impact resistant piece 20 and high temperature is formed, so that the evaporation efficiency is improved.

Further, in some embodiments of the utility model, T satisfies the condition: t is more than or equal to 80W/(m.K) and less than or equal to 180W/(m.K).

Such as any of tungsten and molybdenum.

The conditions are satisfied by setting T: after 80W/(mK) is more than or equal to T and less than or equal to 180W/(mK), and the heat can be quickly transferred to the impact resistant piece 20 and high temperature is formed after the power is on, so that the vapor deposition efficiency is improved.

In some embodiments of the present utility model, the impact member 20 is a disc-like structure, the diameter of the impact member 20 is R, the width of the boat body 10 is D, and D/R satisfies the condition: D/R is more than or equal to 1:0.5 and less than or equal to 1:0.9.

Since the wire is moved during the wire feeding by the wire feeding mechanism, there is a possibility that the position where the wire contacts the top surface 21 of the impact resistance member 20 is changed, and thus it is necessary to provide the impact resistance member 20 to cover a certain range.

Specifically, the diameter of the impact resistant member 20 is not preferably set too small, which tends to result in the wire not being able to contact the top surface 21 of the impact resistant member 20 due to the swinging during wire feeding. In addition, the diameter of the impact member 20 is not set too large, particularly for the following reasons: the resistance of the metal member is smaller than that of the boat body 10 made of a material formed by compounding boron nitride and titanium diboride, and after the evaporation boat 1 is energized, current easily flows to the region where the impact resistant member 20 having a smaller resistance is located, resulting in the temperature of the region where the impact resistant member 20 is located being higher than other regions of the tank bottom wall 12 of the liquid collecting tank 11. The larger the diameter of the impact resistant member 20, the higher the volume ratio of the impact resistant member 20 occupying the evaporation boat 1 is under the condition that the volume of the whole evaporation boat 1 is unchanged, the more concentrated the current is gathered to the area where the impact resistant member 20 is located, so that the higher the temperature of the area where the impact resistant member 20 is located is, and further the uneven temperature distribution of the evaporation boat 1 is caused, and the evaporation boat 1 cannot perform evaporation uniformly. The conditions are satisfied by setting D/R: 1:0.5.ltoreq.D/R.ltoreq.1:0.9, the metal wire can be basically contacted with the top surface 21 of the impact resistant member 20 even if the metal wire swings in the plane of the top surface 21, so that the possibility that the metal wire contacts with the top surface 21 of the impact resistant member 20 can be improved, the possibility that the boat body 10 forms pits can be reduced, and the evaporation boat 1 has a longer service life.

In addition, under such conditions, the volume ratio of the impact-resistant member 20 in the evaporation boat 1 is suitable, and the difference between the resistance of the area where the impact-resistant member 20 is located and the resistance of other areas of the evaporation boat 1 is not too large, so that the current can be uniformly dispersed to the area where the impact-resistant member 20 is located and other areas of the evaporation boat 1, and therefore, the temperature distribution of the entire evaporation boat 1 is uniform, and uniform evaporation can be performed.

In some embodiments of the present utility model, the thickness H of the impact member 20 satisfies the condition: h is more than or equal to 1mm and less than or equal to 4mm.

The thinner the impact resistant member 20 is, the weaker it is against the mechanical impact of the wire. The thicker the impact-resistant member 20, the greater its ability to resist the mechanical impact of the wire.

The conditions are satisfied by setting the thickness H of the impact resistance member 20: h is more than or equal to 1mm and less than or equal to 4mm, so that the impact-resistant piece 20 has proper thickness and can resist the mechanical impact of metal wires, the impact resistance of the impact-resistant piece 20 can be improved, and the service life of the evaporation boat 1 is prolonged.

In some embodiments of the present utility model, the thickness H of the impact member 20 satisfies the condition: h is more than or equal to 1mm and less than or equal to 1.5mm.

In particular, the thickness of the impact-resistant member 20 is not preferably too small, which tends to render it incapable of resisting the mechanical impact of the wire. In addition, the thickness of the impact-resistant member 20 is not too large, and the larger the diameter of the impact-resistant member 20, the higher the volume ratio of the impact-resistant member 20 occupied by the evaporation boat 1 is under the condition that the volume of the evaporation boat 1 is not changed, the more concentrated the current is gathered to the area, so that the higher the temperature of the area where the impact-resistant member 20 is located is, and the evaporation boat 1 cannot perform evaporation uniformly.

And the conditions are satisfied by setting the thickness H of the impact resistance member 20: h is more than or equal to 1mm and less than or equal to 1.5mm, so that the impact-resistant piece 20 has proper thickness and can resist the mechanical impact of metal wires, and the volume ratio of the impact-resistant piece 20 in the evaporation boat 1 is proper, so that the difference between the resistance of the area where the impact-resistant piece 20 is positioned and the resistance of other areas of the evaporation boat 1 is not too large, and thus, the current can be uniformly dispersed to the area where the impact-resistant piece 20 is positioned and the other areas of the evaporation boat 1, and therefore, the temperature distribution of the whole evaporation boat 1 is uniform and uniform evaporation can be performed.

In a second aspect, the present utility model also provides a vacuum evaporation apparatus, which includes the evaporation boat 1 according to any one of the embodiments described above.

Referring to fig. 1 to 3 together, according to some embodiments of the present utility model, an evaporation boat 1 is provided, the evaporation boat 1 includes a boat body 10 and an impact-resistant member 20, a liquid collecting tank 11 for collecting vapor deposition liquid is formed on the boat body 10, the impact-resistant member 20 is disposed on the boat body 10 and is exposed in the liquid collecting tank 11, a top surface 21 of the impact-resistant member 20 disposed towards a notch of the liquid collecting tank 11 is configured to form a wire feeding surface, and the top surface 21 of the impact-resistant member 20 is flush with a bottom wall 12 of the liquid collecting tank 11. Wherein the impact resistant member 20 is a metal member.

In such an evaporation boat 1, since the impact-resistant material 20 is a metal member, when it comes into contact with the vapor deposition liquid in a high temperature state, there is less possibility of reaction with the vapor deposition liquid, and the probability of corrosion at the impact-resistant material 20 is also reduced. Furthermore, the metallic member itself has superior impact resistance, and the risk of deformation and breakage of the impact-resistant member 20 is reduced under the continuous impact force of the wire. In this way, the risk of forming grooves and pits in the area where the impact-resistant member 20 is located is reduced, so that the evaporation boat 1 is not easy to discard in the use process, and the service life is prolonged. In addition, by providing the top surface 21 of the impact-resistant member 20 flush with the bottom wall 12 of the liquid collecting tank 11, the vapor deposition liquid melted and formed on the top surface 21 of the impact-resistant member 20 has less resistance to spread to other areas in the liquid collecting tank 11, so that the flow of the vapor deposition liquid is not affected. In this way, in the evaporation process, the bottom wall 12 of the liquid collecting tank 11 and the top surface 21 of the impact resistant member 20 can be covered by the evaporation liquid, so that the evaporation liquid in each area in the liquid collecting tank 11 can be uniformly evaporated, thereby improving the uniformity of evaporation.

The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.

The above examples illustrate only a few embodiments of the utility model, which are described in detail and are not to be construed as limiting the scope of the claims. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the utility model, which are all within the scope of the utility model. Accordingly, the scope of protection of the present utility model is to be determined by the appended claims.

Claims (11)

1. The evaporation boat is characterized by comprising a boat body (10) and an impact-resistant piece (20), wherein a liquid collecting groove (11) for collecting vapor deposition liquid is formed in the boat body (10), the impact-resistant piece (20) is arranged on the boat body (10) and is exposed in the liquid collecting groove (11), and a top surface (21) of the impact-resistant piece (20) which is arranged towards a notch of the liquid collecting groove (11) is structured to form a wire feeding surface;

wherein the impact resistant member (20) is a metal member.

2. Evaporation boat according to claim 1, characterized in that the top surface (21) of the impact-resistant element (20) is flush with the bottom wall (12) of the sump (11).

3. Evaporation boat according to claim 1, characterized in that the geometrical centre point of the top surface (21) of the impact-resistant member (20) and the geometrical centre point of the tank bottom wall (12) of the liquid collecting tank (11) are all located on the same straight line extending in the thickness direction (X) of the boat body (10).

4. Evaporation boat according to claim 1, characterized in that the impact-resistant element (20) has a melting point K, K satisfying the condition: k is more than or equal to 1800 degrees and less than 3500 degrees.

5. The evaporation boat of claim 4, wherein K satisfies the condition: k is more than or equal to 2200 degrees and less than or equal to 3430 degrees.

6. Evaporation boat according to claim 1, characterized in that the thermal conductivity of the impact-resistant member (20) is T, T satisfying the condition: t is more than or equal to 50W/(m.K) and less than or equal to 200W/(m.K).

7. The evaporation boat of claim 6, wherein T satisfies the condition: t is more than or equal to 80W/(m.K) and less than or equal to 180W/(m.K).

8. Evaporation boat according to claim 1, wherein the impact resistant member (20) has a disc-like structure, the impact resistant member (20) has a diameter R, the boat body (10) has a width D, and D/R satisfies the condition: D/R is more than or equal to 1:0.5 and less than or equal to 1:0.9.

9. Evaporation boat according to claim 1, characterized in that the impact-resistant member (20) has a thickness H that satisfies the condition: h is more than or equal to 1mm and less than or equal to 4mm.

10. The evaporation boat of claim 9, wherein H satisfies the condition: h is more than or equal to 1mm and less than or equal to 1.5mm.

11. A vacuum evaporation apparatus comprising an evaporation boat according to any one of claims 1 to 10.