CN211522304U - Cooling device of evaporation source and evaporation source - Google Patents
Cooling device of evaporation source and evaporation source Download PDFInfo
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- CN211522304U CN211522304U CN201922492759.7U CN201922492759U CN211522304U CN 211522304 U CN211522304 U CN 211522304U CN 201922492759 U CN201922492759 U CN 201922492759U CN 211522304 U CN211522304 U CN 211522304U
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Abstract
The utility model relates to a display device technical field especially relates to a cooling device and evaporation source of evaporation source. The cooling device of the evaporation source comprises a cooling box, wherein the cooling box is provided with a plurality of cooling grooves which are independent from each other and are used for assembling a crucible; and the cooling component is detachably connected to each inner side wall of the cooling box. The utility model provides a cooling device of evaporation source and the cooling part of evaporation source can dismantle alone, and then can conveniently change.
Description
Technical Field
The utility model relates to a display device technical field especially relates to a cooling device and evaporation source of evaporation source.
Background
The OLED (Organic Light-Emitting Diode) display technology is becoming more and more sophisticated, and its market popularization is becoming a trend. Each film layer constituting the organic electroluminescent device is generally formed by vacuum evaporation coating, and the basic principle of vacuum evaporation coating is that a coating material is placed in an evaporation source of an evaporation device for heating and evaporation, and gas molecules or atoms of the formed coating material are deposited on a substrate to be coated to form the film layer.
Although an evaporation source of an existing evaporation device can manufacture an organic electroluminescent device, in order to meet requirements of high-resolution display, large-size design and the like of the organic electroluminescent device (OLED), evaporation of various organic materials needs to be performed simultaneously, so that efficiency of a coating process applied to large-area glass is improved.
SUMMERY OF THE UTILITY MODEL
The utility model provides a cooling device and evaporation source of evaporation source, the cooling device of this evaporation source and the cooling part of evaporation source can dismantle alone, and then can conveniently change.
The utility model provides a cooling device of evaporation source, include:
a cooling tank provided with a plurality of cooling tanks independent of each other for assembling crucibles;
and the cooling assembly is detachably connected to each inner side wall of the cooling box.
Furthermore, each inner side wall of the cooling box is provided with a plurality of positioning grooves and/or positioning bulges;
the cooling assembly comprises a plurality of cooling plates, and the cooling plates are provided with a plurality of matching grooves and/or a plurality of matching protrusions;
the positioning groove is correspondingly matched with the matching protrusion;
the positioning protrusion is correspondingly matched with the matching groove.
Further, the top of the cooling plate is recessed to form an inlet, and the other is recessed to form an outlet;
wherein, the inside of cooling plate is provided with cooling channel, the import passes through cooling channel with the export intercommunication.
Further, the cooling plate includes:
a first plate body;
the first plate body is detachably connected with the second plate body;
the cooling pipe is arranged between the first plate body and the second plate body, and is provided with an inlet and an outlet.
Furthermore, at least one of the binding surface of the first plate body and the binding surface of the second plate body is provided with an accommodating groove;
the cooling pipe is arranged in the accommodating groove.
Furthermore, one of the binding surface of the first plate body and the binding surface of the second plate body is provided with an annular connecting groove, and the other one is provided with the annular bulge;
the annular connecting groove is correspondingly matched with the annular bulge.
Further, the cooling assembly further comprises a fixing piece;
the fixing piece is connected to the upper end face of the cooling box through a screw, wherein the cooling plate is connected to the inner side wall of the cooling box through the fixing piece.
Further, the fixing piece comprises a first fixing arm, a second fixing arm and a connecting arm, wherein the first fixing arm and the second fixing arm are respectively connected to two ends of the connecting arm;
the end face, away from the inner side wall of the cooling box, of the cooling plate is provided with a first groove body, and the upper end face of the cooling box is provided with a second groove body;
the first fixing arm or the second fixing arm is in limit fit with the first groove body, and the connecting arm is in limit fit with the second groove body.
Further, the outer surface of the cooling box is provided with a heat insulation layer.
The utility model provides an evaporation source, including the aforesaid the cooling device of evaporation source.
The utility model provides a technical scheme can reach following beneficial effect:
the utility model provides a cooling device of evaporation source, this cooling device of evaporation source include cooler bin and cooling module, and wherein, the cooler bin is provided with a plurality of independent cooling tanks each other, and the cooling tank is used for assembling the crucible, and is concrete, all can dismantle on each inside wall of cooler bin and be connected with cooling module. Through independently setting up cooling module to correspond cooling module and to dismantle to connect on each inside wall of cooler bin, make things convenient for cooling module's dismouting and maintenance, improved the cooling device's of this evaporation source functionality, the cost is reduced. Simultaneously, correspond cooling unit and can dismantle the connection on each inside wall of cooler bin, can also make cooling unit form annular region, and then realize the even cooling to crucible and whole evaporation source, the effectual required temperature of ensured evaporation coating process in-process has improved the job stabilization nature of whole evaporation coating process and the qualification rate of product. In addition, through a plurality of independent cooling bath each other, and then realize the independence each other between the crucible to can the multiple material of simultaneous vapor deposition, the effectual mutual doping of having avoided different organic materials improves product quality, simultaneously, also can be used for a material of simultaneous vapor deposition, with the evaporation coating efficiency who improves in the production process.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the technical solutions in the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a cooling device of an evaporation source according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a cooling box according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a cooling plate according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of another cooling plate according to an embodiment of the present invention;
fig. 5 is a schematic structural diagram of a first plate according to an embodiment of the present invention;
fig. 6 is a schematic structural diagram of a second plate according to an embodiment of the present invention;
fig. 7 is a schematic structural diagram of a cooling pipe according to an embodiment of the present invention;
fig. 8 is a schematic structural diagram of a fixing member according to an embodiment of the present invention.
Reference numerals:
1-a cooling box;
11-positioning protrusions;
12-positioning grooves;
13-a second trough body;
14-a cooling tank;
2-a cooling assembly;
21-a cooling plate;
211-mating grooves;
212-a mating projection;
213-a first plate;
213a — an annular connecting groove;
213 b-holding tank;
214-a first trough;
215-a second plate;
215 a-annular boss;
216-a cooling tube;
216 a-inlet;
216 b-outlet;
22-a fixing member;
221-a first fixed arm;
222-a second fixed arm;
223-connecting arm.
Detailed Description
The technical solution of the present invention will be described clearly and completely with reference to the following specific embodiments, which are obviously some, but not all, embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "inside", "outside", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, which are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
As shown in fig. 1, the present embodiment provides a cooling apparatus of an evaporation source, which includes a cooling box 1 and a cooling module 2, wherein the cooling box 1 is provided with a plurality of cooling slots 14 independent of each other, the cooling slots 14 are used for assembling crucibles, and in particular, the cooling module 2 is detachably connected to each inner side wall of the cooling box 1. Through independently setting up cooling module 2 to correspond cooling module 2 and to dismantle to connect on each inside wall of cooler bin 1, make things convenient for cooling module 2's dismouting and maintenance, improved the cooling device's of this evaporation source functionality, the cost is reduced. Simultaneously, correspond cooling module 2 and can dismantle to connect on each inside wall of cooler bin 1, can also make cooling module 2 form the annular region, and then realize the even cooling to crucible and whole evaporation source, the effectual required temperature of ensured among the coating by vaporization process has improved the job stabilization nature of whole coating by vaporization process and the qualification rate of product. In addition, through a plurality of independent cooling tank 14 each other, and then realize the mutual independence between the crucible to can the multiple material of simultaneous vapor deposition, the effectual mutual doping of having avoided different organic materials improves product quality, simultaneously, also can be used for a material of simultaneous vapor deposition, with the evaporation coating efficiency who improves in the production process.
The number of the cooling grooves 14 can be three, four, five, six and the like arranged side by side, and the number of the corresponding crucibles is three, four, five, six and the like, and the specific design number of the cooling grooves 14 and the crucibles is selected according to actual requirements.
In this embodiment, in order to ensure the cooling effect, avoid the heat loss, it is concrete, the surface of cooler bin 1 is provided with the insulating layer, and the insulating layer can avoid the inside temperature of cooler bin 1 to run off in to external environment for cooling efficiency.
Wherein, the thermal insulation layer can be a foam material. In this embodiment, the thermal insulation layer is a micro-nano plate, and the micro-nano partition plate is a porous structure. Therefore, the heat conductivity is reduced, and the heat insulation effect is better. The micro-nano plate is a thermal insulation plate with a plurality of closed nano-scale small holes inside, air inside the small holes is almost static to effectively prevent heat convection, and then heat is transferred in a heat conduction mode, and the heat conduction speed is effectively reduced because the number of the small holes inside the thermal insulation material is very large and the heat is transferred along the hole walls of the small holes.
As shown in fig. 2, specifically, in the present embodiment, each inside wall of the cooling box 1 is provided with a plurality of positioning grooves 12 and positioning protrusions 11, the cooling assembly 2 includes a plurality of cooling plates 21, the cooling plate 21 is provided with a plurality of matching grooves 211 and matching protrusions 212, the positioning grooves 12 and the matching protrusions 212 are correspondingly matched, and the positioning protrusions 11 and the matching grooves 211 are correspondingly matched, so that the assembly between the cooling plate 21 and the cooling box 1 can be facilitated, and the installation efficiency of the cooling plate 21 is improved; simultaneously, set up constant head tank 12 and location arch 11 respectively at the inside wall of cooler bin 1 and can play the effect of preventing staying, efficiency when having improved the staff and carrying out the quality control to spare part.
In this embodiment, each inner side wall of the cooling box 1 may also be provided with a plurality of positioning grooves 11, the cooling assembly 2 includes a plurality of cooling plates 21, the cooling plates 21 are provided with a plurality of matching protrusions 212, this arrangement mode may also facilitate the assembly between the cooling plates 21 and the cooling box 1, and the installation efficiency of the cooling plates 21 is improved, and the above-mentioned design structure is not shown in the drawing.
In this embodiment, each inner sidewall of the cooling box 1 may also be provided with a plurality of positioning protrusions 11, the cooling assembly 2 includes a plurality of cooling plates 21, and the cooling plates 21 are provided with a plurality of matching grooves 211, which also facilitates the assembly between the cooling plates 21 and the cooling box 1, and improves the installation efficiency of the cooling plates 21, and the above-mentioned design structure is not shown in the drawings.
As shown in fig. 3, in particular, in the present embodiment, a design structure of the cooling plate 21 is provided, one of the top and the bottom of the cooling plate 21 is recessed to form an inlet 216a, and the other is recessed to form an outlet 216b, wherein a cooling channel is provided inside the cooling plate 21, the inlet 216a is communicated with the outlet 216b through the cooling channel, and the cooling plate 21 with an integrated structure has better structural strength and longer service life.
In this embodiment, the cooling channels may be bent back to increase the cooling area and improve the cooling effect, and the cooling channels may also be arranged in a staggered manner to form a cooling network, wherein the cooling channels are filled with cooling liquid or other liquid-cooled substances, and the inlet 216a and the outlet 216b are used to realize circulation cooling, thereby ensuring continuous cooling of the entire cooling plate 21.
As shown in fig. 4, in this embodiment, another design structure of the cooling plate 21 is further provided, specifically, the cooling plate 21 includes a first plate 213 body, a second plate 215 body and a cooling pipe 216, the first plate 213 body is detachably connected to the second plate 215 body, wherein the cooling pipe 216 is disposed between the first plate 213 body and the second plate 215 body, so that the split cooling plate 21 is easier to produce, and the difficulty of process production is reduced.
As shown in fig. 7, in the present embodiment, the cooling pipes 216 may be bent in a zigzag manner to increase the cooling area and improve the cooling effect, and the cooling pipes 216 may also be arranged in a staggered manner to form a cooling network, wherein the cooling pipes 216 are filled with cooling liquid or other liquid-cooled substances, the cooling pipes 216 are provided with an inlet 216a and an outlet 216b, and the inlet 216a and the outlet 216b are used for realizing circulation cooling, thereby ensuring continuous cooling of the entire cooling plate 21.
As shown in fig. 5 and 6, in order to reduce the thickness of the cooling plate 21 and reduce the volume of the cooling plate 21, in the embodiment, at least one of the contact surface of the first plate 213 and the contact surface of the second plate 215 is provided with an accommodating groove 213b, and the cooling tube 216 is disposed in the accommodating groove 213b, wherein the accommodating groove 213b can also facilitate the fixing and assembling of the cooling tube 216, and improve the functionality of the cooling plate 21.
As shown in fig. 5 and 6, when the accommodating groove 213b is formed on the attaching surface of the first plate 213, the attaching surface of the second plate 215 is a plane so as to cover the accommodating groove 213b conveniently; similarly, when the contact surface of the second plate 215 is provided with the receiving groove 213b, the contact surface of the first plate 213 is a plane; the binding face of the first plate 213 body and the binding face of the second plate 215 body can also all be provided with the holding groove 213b, and when the first plate 213 body and the second plate 215 body all set up the holding groove 213b, the inner diameter of the cooling tube 216 can be improved, and then the volume of the cooling tube 216 is improved, so that the cooling effect is better.
As shown in fig. 5 and fig. 6, in the present embodiment, one of the abutting surface of the first plate 213 and the abutting surface of the second plate 215 is provided with an annular connecting groove 213a, and the other one is provided with an annular protruding portion 215a, by using the corresponding cooperation of the annular connecting groove 213a and the annular protruding portion 215a, the first plate 213 and the second plate 215 can be quickly positioned and assembled, the installation of the first plate 213 and the second plate 215 is facilitated, and the assembling speed is increased; meanwhile, the groove and the protrusion of the annular structure design have larger attaching area, so that the positioning of the first plate 213 and the second plate 215 is more convenient.
The cooling plate 21 can be detachably connected to the cooling box 1 in various ways such as clamping, hanging magnetic matching and the like. As shown in fig. 8, in this embodiment, while the cooling plate 21 is detachably connected to the cooling box 1, the connection stability of the cooling plate 21 can also be ensured, specifically, the cooling module 2 further includes a fixing member 22, the fixing member 22 is connected to the upper end surface of the cooling box 1 through a screw, wherein the cooling plate 21 is connected to the inner side wall of the cooling box 1 through the fixing member 22, and the fixing member 22 can make the cooling plate 21 more stably and firmly attached to the inner side wall of the cooling box 1.
As shown in fig. 8, further, in order to improve the connection stability of the cooling plate 21, in this embodiment, the fixing member 22 includes a first fixing arm 221, a second fixing arm 222 and a connecting arm 223, the first fixing arm 221 and the second fixing arm 222 are respectively connected to two ends of the connecting arm 223, the end surface of the cooling plate 21 facing away from the inner side wall of the cooling box 1 is provided with a first groove 214, the upper end surface of the cooling box 1 is provided with a second groove 13, specifically, the first fixing arm 221 or the second fixing arm 222 is in limit fit with the first groove 214, the connecting arm 223 is in limit fit with the second groove 13, the contact areas of the first fixing arm 221, the second fixing arm 222 and the connecting arm 223 respectively corresponding to the cooling plate 21 and the cooling box 1 are increased through the first groove 214 and the second groove 13, so that the cooling plate 21 is more firmly attached to the side wall of the cooling box 1 through the fixing member 22, the cooling plate 21 is ensured to be connected with enough stability, and the cooling plate 21 is prevented from loosening and falling.
The present embodiment also provides an evaporation source including the cooling device of the evaporation source described in any of the above embodiments.
The evaporation source has the same advantages as the cooling device of the evaporation source described in any of the above embodiments, and the above description is omitted here for brevity.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A cooling device of an evaporation source, comprising:
a cooling box (1), wherein the cooling box (1) is provided with a plurality of cooling tanks (14) independent of each other, and the cooling tanks (14) are used for assembling crucibles;
the cooling assembly (2) is detachably connected to each inner side wall of the cooling box (1).
2. A cooling device of an evaporation source according to claim 1, characterized in that each inner side wall of the cooling box (1) is provided with a plurality of positioning grooves (12) and/or positioning protrusions (11);
the cooling assembly (2) comprises a plurality of cooling plates (21), the cooling plates (21) are provided with a plurality of matching grooves (211) and/or a plurality of matching protrusions (212);
the positioning groove (12) is correspondingly matched with the matching protrusion (212);
the positioning protrusion (11) is correspondingly matched with the matching groove (211).
3. The cooling device of an evaporation source according to claim 2, wherein the top of the cooling plate (21) is recessed to form an inlet (216a) and the other is recessed to form an outlet (216 b);
wherein the cooling plate (21) is provided inside with a cooling passage through which the inlet (216a) communicates with the outlet (216 b).
4. The cooling device of an evaporation source according to claim 2, wherein the cooling plate (21) comprises:
a first plate (213) body;
a second plate (215) body, the first plate (213) body being detachably connected to the second plate (215) body;
a cooling pipe (216), the cooling pipe (216) being disposed between the first plate (213) body and the second plate (215) body, and the cooling pipe (216) being provided with an inlet (216a) and an outlet (216 b).
5. The cooling device of an evaporation source according to claim 4, wherein at least one of the bonding surface of the first plate (213) body and the bonding surface of the second plate (215) body is provided with a receiving groove (213 b);
the cooling pipe (216) is disposed in the accommodation groove (213 b).
6. The cooling device of an evaporation source according to claim 4, wherein one of the abutting surface of the first plate (213) body and the abutting surface of the second plate (215) body is provided with an annular coupling groove (213a), and the other is provided with an annular protrusion (215 a);
the annular connecting groove (213a) and the annular convex part (215a) are correspondingly matched.
7. A cooling arrangement of an evaporation source according to claim 2, characterized in that the cooling module (2) further comprises a fixing member (22);
the fixing piece (22) is connected to the upper end face of the cooling box (1) through a screw, wherein the cooling plate (21) is connected to the inner side wall of the cooling box (1) through the fixing piece (22).
8. The cooling device of the evaporation source according to claim 7, wherein the fixing member (22) comprises a first fixing arm (221), a second fixing arm (222) and a connecting arm (223), the first fixing arm (221) and the second fixing arm (222) are respectively connected to two ends of the connecting arm (223);
a first groove body (214) is arranged on the end face of the cooling plate (21) deviating from the inner side wall of the cooling box (1), and a second groove body (13) is arranged on the upper end face of the cooling box (1);
the first fixing arm (221) or the second fixing arm (222) is in limit fit with the first groove body (214), and the connecting arm (223) is in limit fit with the second groove body (13).
9. A cooling device of an evaporation source according to claim 1, characterized in that the outer surface of the cooling box (1) is provided with a thermal insulation layer.
10. An evaporation source, characterized by comprising a cooling device of the evaporation source according to any of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922492759.7U CN211522304U (en) | 2019-12-31 | 2019-12-31 | Cooling device of evaporation source and evaporation source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922492759.7U CN211522304U (en) | 2019-12-31 | 2019-12-31 | Cooling device of evaporation source and evaporation source |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211522304U true CN211522304U (en) | 2020-09-18 |
Family
ID=72468332
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201922492759.7U Active CN211522304U (en) | 2019-12-31 | 2019-12-31 | Cooling device of evaporation source and evaporation source |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211522304U (en) |
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2019
- 2019-12-31 CN CN201922492759.7U patent/CN211522304U/en active Active
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