CN216947190U

CN216947190U - ALD coating equipment

Info

Publication number: CN216947190U
Application number: CN202220659322.7U
Authority: CN
Inventors: 田玉峰
Original assignee: Xiamen Weimao Technology Co ltd
Current assignee: Xiamen Weimao Technology Co ltd
Priority date: 2022-03-25
Filing date: 2022-03-25
Publication date: 2022-07-12
Anticipated expiration: 2032-03-25

Abstract

The utility model provides an ALD coating device, and relates to the technical field of atomic layer deposition devices. The ALD coating equipment comprises an outer cavity assembly, an inner cavity assembly, a fixing assembly and a connecting assembly. The outer cavity assembly comprises an outer cavity body and a gate valve, wherein the outer cavity body is provided with an accommodating cavity, and the gate valve is jointed with the outer cavity body. The inner cavity assembly comprises an inner cavity body which is detachably arranged in the accommodating cavity. The inner cavity is provided with a reaction cavity for coating reaction and a material opening which is communicated with the reaction cavity and used for taking and placing a product to be coated. The gate valve is used for sealing the material opening. The fixing assembly comprises a positioning member arranged in the accommodating cavity and used for positioning the inner cavity, and a first telescopic jacking member used for being jointed between the inner cavity and the outer cavity. The connecting component is jointed with the outer cavity and is structured as follows: can be jointed with the inner cavity body in a quick-release mode. So that the external device is communicated with the reaction chamber. The steps of mounting and dismounting the inner cavity assembly are simplified, so that the inner cavity assembly can be dismounted and washed more conveniently.

Description

ALD coating equipment

Technical Field

The utility model relates to the technical field of atomic layer deposition equipment, in particular to ALD coating equipment.

Background

Atomic layer deposition (Atomic layer deposition) is a process by which a substance can be deposited on a substrate surface layer by layer as a monoatomic film. In an atomic layer deposition process, the chemical reaction of a new atomic film is directly related to the previous one in such a way that only one layer of atoms is deposited per reaction. Also, the deposited layer has an extremely uniform thickness and excellent uniformity.

An ALD coating process comprising: (1) introducing a precursor A; (2) removing the precursor A in the coating equipment to enable the surface of the wafer plate to adsorb a layer of precursor A; (3) introducing a precursor B; (4) and removing the precursor B in the coating equipment, and reacting the precursor A on the surface of the wafer disc with the precursor B, so that a required atomic layer is coated on the surface of the wafer disc. In the process, the coating/impurities are also formed inside the cavity of the coating equipment, including the side wall of the cavity and the surfaces of various parts inside the cavity, so that the inside of the reaction cavity of the coating equipment needs to be cleaned regularly.

However, the existing coating equipment has a complex structure and is not easy to disassemble and wash.

In view of the above, the applicant has specifically proposed the present application after studying the existing technologies.

SUMMERY OF THE UTILITY MODEL

The utility model provides an ALD coating device, aiming at improving the technical problem.

In order to solve the above technical problems, the present invention provides an ALD coating apparatus, comprising: the outer cavity assembly, the inner cavity assembly, the fixing assembly and the connecting assembly.

The outer cavity assembly comprises an outer cavity body provided with an accommodating cavity and a gate valve jointed to the outer cavity body. The inner cavity assembly comprises an inner cavity body which is detachably arranged in the accommodating cavity. The inner cavity is provided with a reaction cavity for coating reaction and a material opening which is communicated with the reaction cavity and used for taking and placing a product to be coated. Wherein, the gate valve is used for sealing the material opening. The fixing assembly comprises a positioning member arranged in the accommodating cavity and used for positioning the inner cavity, and a first telescopic jacking member used for being jointed between the inner cavity and the outer cavity. The connecting component is jointed with the outer cavity and is structured as follows: can be jointed with the inner cavity body in a quick-release mode. So that the external equipment is communicated with the reaction cavity.

In an alternative embodiment, the connection assembly includes a bellows coupled to the outer cavity and a connection plate coupled to the bellows. The connecting plate is provided with a peripheral through hole which is communicated to the outside of the outer cavity through a corrugated pipe.

The inner cavity body is provided with a sealing plane matched with the connecting plate and a connecting through hole which is positioned on the sealing plane and matched with the peripheral through hole.

The fixing assembly further comprises a second telescopic jacking member which can be jointed between the connecting plate and the outer cavity. The second telescopic jacking member is used for enabling the connecting plate to be in pressure butt joint with the inner cavity, and therefore sealing connection of the peripheral through hole and the connecting through hole is achieved.

In an optional embodiment, the peripheral through holes, the connecting through holes and the corrugated pipes correspond to each other one by one, and the number of the peripheral through holes is at least two. The at least two corrugated pipes are respectively used for connecting the at least two connecting through holes to the outside of the outer cavity in a sealing manner. The two connecting through holes are respectively matched with the two peripheral through holes.

The coupling assembly further includes a first feed tube and a second feed tube. The first feeding pipe and the second feeding pipe are respectively connected with one of the two peripheral through holes in a sealing mode and extend out of the outer cavity through the corrugated pipe.

In an alternative embodiment, the inner chamber assembly further comprises at least two connectors disposed in the inner chamber body. The connecting piece structure is as follows: for engaging an external lifting device to remove the bore assembly from the receiving cavity.

In an alternative embodiment, the sealing plane is disposed at the top of the inner cavity. At least two connectors are coupled to the top of the inner cavity.

At least two connecting pieces are respectively arranged on two sides of the sealing plane. The sealing plane is arranged along the direction of the inner cavity body entering and exiting the accommodating cavity, so that the connecting piece cannot interfere with the connecting assembly when the inner cavity body enters and exits the accommodating cavity.

In an alternative embodiment, the inner chamber includes an inner chamber body and a removable inner chamber cover configured to the inner chamber body. The connecting through hole is arranged on the inner cavity top cover.

The inner cavity assembly further comprises a flow equalizing plate arranged on one side of the inner cavity top cover facing the reaction cavity. A plurality of through holes are distributed on the flow equalizing plate, so that reactants introduced into the reaction cavity can be uniform in the reaction cavity.

In an optional embodiment, the ALD coating apparatus further comprises a heating assembly. The heating assembly comprises a first heating plate arranged in the inner cavity, a first heating rod arranged on the first heating plate and a first thermocouple. The first heating rod and the first thermocouple are electrically connected with external equipment by adopting a quick-connecting plug.

The heating assembly further includes a heat shield disposed at the bottom of the receiving chamber for supporting the interior cavity.

In an alternative embodiment, the positioning member comprises a plurality of positioning blocks arranged at the bottom of the accommodating cavity. And a limiting space for accommodating the inner cavity is formed among the positioning blocks. The locating piece is provided with the direction inclined plane towards spacing space.

In an alternative embodiment, the bottom of the outer cavity is provided with a discharge opening. The bottom of the inner cavity is provided with a discharge through hole matched with the discharge port. The discharge through hole can be connected with the discharge opening in a sealing manner.

In an alternative embodiment, the inner chamber is provided with two material openings and the outer chamber assembly is provided with two gate valves, each for sealing one of the two material openings. The two material openings are used for placing materials and taking out materials respectively.

The outer cavity is provided with a feed inlet, a discharge outlet and an access hole. The feed opening and the discharge opening are respectively opposite to one of the two material openings. The outer chamber assembly further comprises an access door arranged at the access opening. The access hole is used for taking and putting the inner cavity from the accommodating cavity.

By adopting the technical scheme, the utility model can obtain the following technical effects:

through the quick detach structure of the fixed assembly and the connecting assembly, the installation and the dismantling steps of the inner cavity assembly are greatly simplified, so that the inner cavity assembly can be dismantled and washed more conveniently.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.

FIG. 1 is an isometric view of an ALD coating apparatus (access door closed position).

FIG. 2 is an isometric view of an ALD coating apparatus (with the access door open).

FIG. 3 is an exploded view of an ALD coating apparatus.

Fig. 4 is an exploded view of the inner chamber component, securing component and connecting component.

Fig. 5 is an exploded view of the inner chamber assembly.

The labels in the figure are: the device comprises a gate valve 1, an outer cavity 2, a connecting assembly 3, a first telescopic jacking member 4, a material opening 5, an inner cavity 6, a discharge outlet 7, a thermal insulation plate 8, an access door 9, a guide inclined plane 10, a positioning block 11, a second feed pipe 12, a first feed pipe 13, a second telescopic jacking member 14, a corrugated pipe 15, a connecting plate 16, a sealing plane 17, a connecting through hole 18, a connecting piece 19, an inner cavity top cover 20, a flow equalizing plate 21, an inner cavity body 22, a first thermocouple 23, a first heating rod 24, a first heating plate 25 and a discharge channel 26.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings of the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention. Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the utility model, as claimed, but is merely representative of selected embodiments of the utility model. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like, indicate orientations or positional relationships based on those shown in the drawings, merely for convenience of description and simplicity of description, and do not indicate or imply that the device or element so referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, are not to be construed as limiting the present invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. "beneath," "under" and "beneath" a first feature includes the first feature being directly beneath and obliquely beneath the second feature, or simply indicating that the first feature is at a lesser elevation than the second feature.

The utility model is described in further detail below with reference to the following detailed description and accompanying drawings:

as shown in fig. 1 to 5, an embodiment of the present invention provides an ALD coating apparatus, which includes: outer chamber subassembly, inner chamber subassembly, fixed subassembly and coupling assembling 3.

The outer cavity assembly comprises an outer cavity 2 provided with a containing cavity and a gate valve 1 jointed to the outer cavity 2. The inner chamber assembly comprises an inner chamber body 6 which is detachably arranged in the receiving chamber. The inner cavity 6 is provided with a reaction cavity for coating reaction and a material opening 5 which is communicated with the reaction cavity and used for taking and placing a product to be coated. Wherein the gate valve 1 is used to seal the material opening 5. The fixing component comprises a positioning member arranged in the accommodating cavity and used for positioning the inner cavity 6, and a first telescopic jacking member 4 connected between the inner cavity 6 and the outer cavity 2. The connecting assembly 3 is coupled to the outer cavity 2, and is configured to: can be coupled to the inner cavity 6 by means of quick release. So that the external equipment is communicated with the reaction cavity.

Specifically, install push-pull valve 1, coupling assembling 3 on outer cavity 2, set up fixed subassembly detachable between outer cavity 2 and interior cavity 6 for when dismantling interior cavity 6, only need open push-pull valve 1, the connection of disconnection coupling assembling 3, then remove fixed subassembly's fixed relation, just can take out interior cavity assembly from holding the chamber. Through the quick detach structure of fixed subassembly and coupling assembling 3, simplified the installation of inner chamber subassembly greatly and demolishd the step for inner chamber subassembly can be more convenient unpick and wash, have fine practical meaning.

As shown in fig. 3 to 5, based on the above embodiments, in an alternative embodiment of the present invention, the connection assembly 3 includes a bellows 15 coupled to the outer cavity 2 and a connection plate 16 coupled to the bellows 15. The connection plate 16 is provided with peripheral through holes for communication to the outside of the outer chamber 2 through the bellows 15. The inner cavity 6 is provided with a sealing plane 17 adapted to the connecting plate 16, and a connecting through hole 18 located at the sealing plane 17 and adapted to an external through hole. The fixing assembly further comprises a second telescopic jacking member 14 engageable between the connecting plate 16 and the outer cavity 2. The second telescopic member is used for pressing the connecting plate 16 against the inner cavity 6, so that the sealing connection of the peripheral through hole and the connecting through hole 18 is realized. Preferably, the peripheral through holes, the connecting through holes 18 and the corrugated pipes 15 correspond to each other one by one, and the number of the peripheral through holes and the connecting through holes is at least two. At least two bellows 15 are respectively used to hermetically connect at least two connection through holes 18 to the outside of the outer chamber 2. The two connecting through holes 18 are respectively matched with the two peripheral through holes. The connection assembly 3 further comprises a first feed tube 13 and a second feed tube 12. The first feed pipe 13 and the second feed pipe 12 are hermetically connected to one of the two peripheral through holes, respectively, and extend outside the outer cavity 2 through the bellows 15.

Specifically, the inner cavity 6 is provided with five connecting through holes 18, the connecting plate 16 is provided with five peripheral through holes, and the number of the corrugated pipes 15 is four. The top of the inner cavity 6 is provided with five sealing rings which are sleeved on the five connecting through holes 18. The four corrugated pipes 15 are respectively connected with four peripheral through holes; the last external through hole is used for installing a thermocouple to measure the temperature in the reaction chamber. The other four peripheral through holes connected with the corrugated pipes 15 are respectively used for installing the first feeding pipe 13, the second feeding pipe 12, the digital pressure sensor and the vacuum gauge.

The first telescopic jacking member 4 and the second telescopic jacking member 14 are the same in structure, and respectively comprise a stud with a clamping position arranged in the middle and two ejector rods in threaded connection with the two ends of the stud respectively, and the telescopic jacking members extend by rotating the ejector rods and the stud, so that the connecting plate 16 is jacked and connected onto the inner cavity 6, and the inner cavity 6 is jacked and connected into the accommodating cavity.

When the coupling assembly 3 is disassembled, the connection plate 16 and the inner cavity 6 can be separated by simply shortening and removing the second telescopic abutting member 14. When the inner cavity 6 is disassembled, the inner cavity 6 and the outer cavity 2 can be separated only by shortening and taking down the first telescopic jacking member 4 and the second telescopic jacking member 14.

As shown in fig. 3 to 5, based on the above embodiments, in an alternative embodiment of the present invention, the lumen assembly further comprises at least two connectors 19 disposed on the inner cavity 6. The connecting member 19 is configured to: for engaging an external lifting device to remove the bore assembly from the receiving cavity. Preferably, the sealing plane 17 is arranged at the top of the inner cavity 6. At least two connectors 19 are coupled to the top of the inner cavity 6. At least two connecting pieces 19 are respectively arranged on both sides of the sealing plane 17. The sealing plane 17 is arranged in the direction of the entrance and exit of the inner cavity 6 into and out of the receiving cavity so that the connecting member 19 does not interfere with the connecting member 3 when the inner cavity 6 enters and exits the receiving cavity. Optionally, the inner cavity 6 includes an inner cavity body 22 and a removable inner cavity cover 20 disposed on the inner cavity body 22. The connecting through-hole 18 is provided in the cavity cover 20. The inner chamber assembly further comprises a flow equalizing plate 21 disposed on a side of the inner chamber cover 20 facing the reaction chamber. A plurality of through holes are distributed on the flow equalizing plate 21 to make the reactant introduced into the reaction chamber uniform in the reaction chamber.

Specifically, in the present embodiment, the inner cavity 6 is divided into an inner cavity body 22 and an inner cavity top cover 20, which are detachably connected, so as to facilitate the cleaning operation of the inner cavity 6. The number of the connecting pieces 19 is four, the connecting pieces are annular, and the connecting pieces are used for enabling a forklift to stretch into the connecting pieces to perform lifting movement operation. The sealing surface is arranged in the middle of the inner cavity top cover 20 and arranged along the direction that the inner cavity 6 enters and exits the access door 9, and when the inner cavity 6 enters and exits the access door 9, the connecting assembly 3 penetrates through the middle of the connecting piece 19 without collision, so that the connecting assembly has good practical significance.

The first feeding pipe 13 and the second feeding pipe 12 want to convey the precursor in the reaction chamber through the connecting through hole 18 on the inner chamber top cover 20, in order to make the precursor distribute more evenly in the reaction chamber, two layers of flow equalizing plates 21 are arranged below the inner chamber top cover 20 at intervals, the flow equalizing plates 21 are mesh-shaped, after the precursor enters the reaction chamber through the connecting through hole 18, the flow equalizing plates 21 need to be passed when moving downwards, so that the precursor is distributed more evenly. Preferably, the flow equalizing plate 21 is detachably disposed on one side of the inner cavity mandril facing the reaction cavity, so as to be convenient for disassembly and cleaning.

As shown in fig. 4 to 5, based on the above embodiments, in an alternative embodiment of the present invention, the ALD coating apparatus further includes a heating element. The heating assembly includes a first heating plate 25 disposed in the inner cavity 6, a first heating rod 24 disposed on the first heating plate 25, and a first thermocouple 23. The first heating rod 24 and the first thermocouple 23 are electrically connected to external equipment by using a quick plug. The heating assembly further comprises a heat shield 8 arranged at the bottom of the receiving chamber for supporting the inner cavity 6.

Preferably, the heating assembly further comprises a second heating plate arranged on the door plate of the gate valve 1, a second heating rod arranged on the second heating plate, and a second thermocouple. The second heating rod and the second thermocouple are electrically connected with external equipment by adopting a quick-connection plug. Through set up heating element on inner chamber 6 and the door plant, can guarantee that the temperature in the reaction chamber keeps at the best reaction temperature to carry out the coating operation. And the quick-plugging connector is connected with the heating rod and the thermocouple, so that the inner cavity can be quickly disassembled and assembled, the cleaning operation of the inner cavity is facilitated, and the quick-plugging electric heating device has a good practical significance.

As shown in fig. 3, based on the above embodiment, in an alternative embodiment of the present invention, the inner cavity 6 is provided with two material openings 5, the outer cavity assembly is provided with two gate valves 1, and the two gate valves 1 are respectively used for sealing one of the two material openings 5. The two material openings 5 are used for placing materials and taking out materials respectively. The outer cavity 2 is provided with a feed inlet, a discharge outlet and an access hole. The inlet and outlet openings each face one of the two material openings 5. The outer chamber assembly further comprises an access door 9 arranged at the access opening. The access opening is used for taking and putting the inner cavity 6 out of the accommodating cavity. The positioning member includes a plurality of positioning blocks 11 disposed at the bottom of the accommodating chamber. A spacing space for accommodating the inner cavity 6 is formed between the positioning blocks 11. The positioning block 11 is provided with a guide slope 10 facing the limiting space. The bottom of the outer cavity 2 is provided with a discharge opening 7. The bottom of the inner cavity 6 is provided with a discharge through hole 26 matched with the discharge opening 7. The discharge through-hole 26 can be connected in a sealing manner to the discharge opening 7.

Specifically, two material openings 5 are arranged on the inner cavity 6 in a penetrating manner. The positioning component comprises 8 positioning blocks 11 which are respectively arranged at four corners of the inner cavity 6, and the height of the positioning block 11 arranged in front of the material opening 5 is lower than that of the positioning block 11 arranged on the side surface of the material opening 5. Through setting up bin outlet 7 in the bottom of outer cavity 2 for interior cavity 6 just can seal through the mode that the dead weight pushed down, and need not other seal structure, and the dismouting is faster, and is more convenient. The feeding port and the discharging port are respectively used for connecting the material preheating cavity and the material cooling cavity, so that the inner cavity 6 is guaranteed to be always in a proper film coating environment for film coating operation, heating operation and cooling operation are not needed, and the device has good practical significance.

The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. An ALD coating apparatus, comprising:

the outer cavity assembly comprises an outer cavity (2) provided with a containing cavity and a gate valve (1) jointed with the outer cavity (2);

an inner cavity assembly comprising an inner cavity (6) detachably arranged in the accommodating cavity; the inner cavity (6) is provided with a reaction cavity for coating reaction and a material opening (5) communicated with the reaction cavity for taking and placing a product to be coated; wherein the gate valve (1) is used to seal the material opening (5);

the fixing assembly comprises a positioning member arranged in the accommodating cavity and used for positioning the inner cavity (6), and a first telescopic jacking member (4) jointed between the inner cavity (6) and the outer cavity (2); and

a connection assembly (3) coupled to the outer cavity (2) and configured to: can be jointed with the inner cavity (6) in a quick-release way; so that an external device is communicated with the reaction cavity.

2. An ALD coating device according to claim 1, characterized in that said connection assembly (3) comprises a bellows (15) coupled to said outer cavity (2) and a connection plate (16) coupled to said bellows (15); the connecting plate (16) is provided with a peripheral through hole which is communicated with the outside of the outer cavity (2) through the corrugated pipe (15);

the inner cavity (6) is provided with a sealing plane (17) matched with the connecting plate (16) and a connecting through hole (18) which is positioned on the sealing plane (17) and matched with the external through hole;

the fixing assembly further comprises a second telescopic jacking member (14) engageable between the connecting plate (16) and the outer cavity (2); the second telescopic structure jacking piece is used for enabling the connecting plate (16) to be in pressure butt joint with the inner cavity (6), and therefore sealing connection of the peripheral through hole and the connecting through hole (18) is achieved.

3. An ALD coating device according to claim 2, characterized in that the number of the peripheral through holes, the connecting through holes (18) and the bellows (15) is at least two; at least two bellows (15) are respectively used for connecting at least two connecting through holes (18) to the outside of the outer cavity (2) in a sealing way; the two connecting through holes (18) are respectively matched with the two peripheral through holes;

the connection assembly (3) further comprises a first feed tube (13) and a second feed tube (12); the first feeding pipe (13) and the second feeding pipe (12) are respectively connected with one of the two peripheral through holes in a sealing mode and extend out of the outer cavity (2) through a corrugated pipe (15).

4. An ALD coating device according to claim 2, characterized in that said inner chamber assembly further comprises at least two connectors (19) arranged to said inner cavity (6); the connecting piece (19) is configured to: for engaging an external lifting device to remove the lumenal assembly from the receiving cavity.

5. An ALD coating device according to claim 4, characterized in that the sealing plane (17) is arranged on top of the inner cavity (6); the at least two connectors (19) are joined to the top of the inner cavity (6);

the at least two connecting pieces (19) are respectively arranged on two sides of the sealing plane (17); sealed plane (17) are along interior cavity (6) business turn over the direction setting of holding the chamber, so that interior cavity (6) business turn over when holding the chamber connecting piece (19) can not with coupling assembling (3) take place to interfere.

6. An ALD coating apparatus according to claim 2, characterized in that the inner cavity (6) comprises an inner cavity body (22), and a detachable inner cavity top cover (20) arranged on the inner cavity body (22); the connecting through hole (18) is arranged on the inner cavity top cover (20);

the inner cavity assembly also comprises a flow equalizing plate (21) which is arranged on one side of the inner cavity top cover (20) facing the reaction cavity; a plurality of through holes are distributed on the flow equalizing plate (21) so that reactants introduced into the reaction cavity can be uniform in the reaction cavity.

7. The ALD coating apparatus of claim 1, further comprising a heating assembly; the heating assembly comprises a first heating plate (25) arranged in the inner cavity (6), a first heating rod (24) arranged on the first heating plate (25) and a first thermocouple (23); the first heating rod (24) and the first thermocouple (23) are electrically connected to external equipment by adopting a quick plug;

the heating assembly further comprises a heat insulation plate (8) arranged at the bottom of the accommodating cavity for supporting the inner cavity (6).

8. An ALD coating apparatus according to claim 1, characterized in that the positioning member comprises a plurality of positioning blocks (11) disposed at the bottom of the accommodating chamber; a limiting space for accommodating the inner cavity (6) is formed among the positioning blocks (11); the positioning block (11) is provided with a guide inclined plane (10) facing the limiting space.

9. An ALD coating device according to claim 1, characterized in that the bottom of the outer cavity (2) is provided with a discharge opening (7); a discharge through hole (26) matched with the discharge port (7) is formed in the bottom of the inner cavity (6); the discharge through hole (26) can be connected with the discharge opening (7) in a sealing manner.

10. An ALD coating device according to claim 1, characterized in that the inner cavity (6) is provided with two material openings (5), the outer cavity assembly is provided with two gate valves (1), the two gate valves (1) are respectively used for sealing one of the two material openings (5); the two material openings (5) are used for placing materials and taking out the materials respectively;

the outer cavity (2) is provided with a feeding hole, a discharging hole and an access hole; the feed inlet and the discharge outlet respectively face one of the two material openings (5); the outer chamber assembly further comprises an access door (9) arranged at the access opening; the service hole is used for taking and placing the inner cavity (6) from the accommodating cavity.