CN219508017U

CN219508017U - Self-locking device for coating equipment and coating equipment

Info

Publication number: CN219508017U
Application number: CN202320171245.5U
Authority: CN
Inventors: 请求不公布姓名
Original assignee: Shenzhen Yuansu Photoelectric Technology Co ltd
Current assignee: Shenzhen Yuansu Photoelectric Technology Co ltd
Priority date: 2023-01-16
Filing date: 2023-01-16
Publication date: 2023-08-11
Anticipated expiration: 2033-01-16

Abstract

The utility model relates to the technical field of film preparation equipment, in particular to a self-locking device for film plating equipment and the film plating equipment. The self-locking device for the coating equipment comprises a mounting seat, a bearing frame and a self-locking assembly; the mounting seat is connected with the external component; the bearing frame is used for bearing products and is movably arranged relative to the mounting seat, and at least part of the bearing frame is positioned on the upper side of the mounting seat; the self-locking assembly is movably connected to the mounting seat, at least part of the self-locking assembly is positioned at the bottom of the bearing frame, and when the bearing frame is placed on the self-locking assembly, the self-locking assembly is used for being abutted to the outer side wall of the bearing frame. When the self-locking device of the embodiment is used, the bearing frame with the sample frame is placed on the self-locking assembly, at the moment, the bearing frame can drive the self-locking assembly to move under the action of self gravity, so that the self-locking assembly is abutted to the side wall of the bearing frame, and therefore the self-locking assembly can be fixed on the mounting seat through the self gravity of the bearing frame, and the self-locking device is simple in structure and good in fixing effect.

Description

Self-locking device for coating equipment and coating equipment

Technical Field

The utility model relates to the technical field of film preparation equipment, in particular to a self-locking device for film plating equipment and the film plating equipment.

Background

As a precise and controllable preparation method of thin film materials, ALD technology has become a popular material preparation technology in semiconductor chip manufacture, and is one of the most effective ways to deposit nano-scale thin films. ALD can be classified into conventional thermal ALD, plasma-enhanced ALD, catalytic ALD, and other novel technologies according to the manner of reaction activation. Wherein, because the plasma can provide a reaction atmosphere with high and controllable reactivity for the surface of the substrate at a lower temperature, the plasma has a great promotion effect on promoting the rapid reaction growth of the film, the plasma enhanced ALD stands out and is rapidly developed, and the plasma enhanced ALD has wide application in various fields such as semiconductors and the like.

In the existing ALD self-rotation coating equipment, along with the development of the coating equipment, the rotating mechanism for rotating the supporting body is more and more complex, the required rotating speed is higher and higher, and the circuit-controlled clamping and fixing device arranged in the machine is easy to be corroded and influenced by high temperature and corrosive gas, so that the durability of the reliability of circuit connection is influenced.

Therefore, it is necessary to design a new clamping fixture to change the current situation.

Disclosure of Invention

The utility model provides a self-locking device for coating equipment and the coating equipment, which are used for solving the problems of poor reliability and durability when a clamping and fixing device controlled by a circuit is adopted in the existing coating equipment.

The utility model provides a self-locking device for coating equipment, which comprises:

the mounting seat is connected to the external component;

the bearing frame is used for bearing products, is movably arranged relative to the mounting seat and is at least partially positioned on the upper side of the mounting seat; and

the self-locking assembly is movably connected to the mounting seat, and is at least partially positioned at the bottom of the bearing frame, and when the bearing frame is placed on the self-locking assembly, the self-locking assembly is used for being abutted to the outer side wall of the bearing frame.

According to one embodiment of the utility model, the self-locking assembly comprises a self-locking lever which is rotatably connected to the mounting seat and is provided with at least two movable ends, wherein one movable end is used for being abutted to the bottom of the bearing frame, and the other movable end is used for being abutted to the outer side wall of the bearing frame.

According to one embodiment of the utility model, the self-locking assembly further comprises a reset member connected to the self-locking lever, the reset member being adapted to urge the self-locking lever to move away from the carrier when the carrier is separated from the self-locking assembly.

According to one embodiment of the utility model, the bearing frame is provided with a limit groove, and the self-locking lever is at least partially accommodated in the limit groove and is in sliding contact with the inner wall of the limit groove.

According to one embodiment of the utility model, the bearing frame comprises a bearing bottom plate and two limiting side plates, wherein the two limiting side plates are arranged at intervals and in parallel at the top of the bearing bottom plate, the limiting side plates are detachably connected to the bearing bottom plate, and the limiting grooves are formed in one side, facing each other, of the two limiting side plates.

According to one embodiment of the utility model, the bearing frame further comprises a top plate, the top plate is covered on the top of the limiting side plate, and the top plate is detachably connected to one side, away from the bearing bottom plate, of the limiting side plate.

According to one embodiment of the utility model, the number of the self-locking levers is two, the number of the limit grooves is also two, each self-locking lever is in sliding contact with one limit groove, and the two groups of self-locking levers and the limit grooves are symmetrically arranged on two opposite sides of the bearing frame.

The utility model also provides a coating device, comprising:

a sample holder provided with a holding cavity for holding a sample; and

the self-locking device according to any one of the preceding claims, wherein the sample holder is detachably connected to the carrier of the self-locking device.

According to one embodiment of the utility model, the number of the sample frames is multiple, the bearing frame of the self-locking device is provided with a plurality of mounting grooves, the plurality of mounting grooves are arranged at intervals and in parallel along the vertical direction, the sample frames are in plug-in fit with the mounting grooves, and the plurality of sample frames are arranged in parallel and at intervals.

According to one embodiment of the utility model, the sample rack comprises a rack body and two mounting parts, wherein the two mounting parts are symmetrically arranged on two opposite sides of the rack body, and the mounting parts are in plug-in fit with the mounting grooves.

According to one embodiment of the utility model, the coating equipment further comprises a partner plate, the partner plate is detachably connected to the self-locking device, and the partner plate and the sample rack are arranged at intervals.

According to one embodiment of the utility model, the accompanying plate comprises a plate body and a protruding portion, wherein the plate body is detachably connected to the self-locking device, the protruding portion is protruding on the surface of the plate body, and the protruding portion is arranged at a distance from the sample holder.

The embodiment of the utility model has the following beneficial effects:

when the self-locking device of the embodiment is used, the bearing frame with the sample frame is placed on the self-locking assembly, at the moment, the bearing frame can drive the self-locking assembly to move under the action of self gravity, so that the self-locking assembly is abutted to the side wall of the bearing frame, and therefore the self-locking assembly can be fixed on the mounting seat through the self gravity of the bearing frame, and the self-locking device is simple in structure and good in fixing effect.

In the self-locking device of this embodiment, through setting up self-locking component and loading frame cooperation, can be on loading frame's self gravity effect down with its fixed and mount pad, when being applied to in the autogiration coating film equipment with this self-locking device, can provide stable supporting role for loading frame to it is simple, reliability and durability all can be improved.

Drawings

In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

Wherein:

FIG. 1 is a perspective view of a self-locking device in an embodiment of the utility model;

FIG. 2 is an exploded view of a self-locking device in an embodiment of the utility model;

FIG. 3 is a front view of a self-locking device in an embodiment of the utility model;

FIG. 4 is a cross-sectional view of a sample holder and a companion board according to an embodiment of the present utility model;

fig. 5 is a top view of a companion board of the present utility model;

reference numerals:

10. a self-locking device; 100. a mounting base; 200. a carrier; 210. a load-bearing bottom plate; 220. a limit side plate; 221. a limit groove; 222. a mounting groove; 230. a top plate; 300. a self-locking assembly; 310. self-locking lever; 320. a reset member; 20. a sample holder; 201. a frame body; 2011. a receiving chamber; 202. a mounting part; 30. a companion board; 301. a plate body; 302. a boss.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the present utility model more apparent, the technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings, and it is apparent that the described embodiments are some embodiments of the present utility model, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Referring to fig. 1 and 2, an embodiment of the present utility model provides a self-locking device 10 for a coating apparatus, which includes a mounting base 100, a carrier 200, and a self-locking assembly 300; mount 100 is connected to an external member; the carrier 200 is used for supporting a product, the carrier 200 is movably arranged relative to the mounting seat 100, and the carrier 200 is at least partially positioned on the upper side of the mounting seat 100; the self-locking assembly 300 is movably connected to the mounting base 100, the self-locking assembly 300 is at least partially located at the bottom of the carrier 200, and when the carrier 200 is placed on the self-locking assembly 300, the self-locking assembly 300 is used for abutting against the outer sidewall of the carrier 200.

When the self-locking device 10 of the embodiment is used, the carrier 200 with the sample rack 20 is placed on the self-locking assembly 300, and at this time, the carrier 200 can drive the self-locking assembly 300 to move under the action of self gravity, so that the self-locking assembly 300 is abutted to the side wall of the carrier 200, and therefore, the self-locking device can be fixed on the mounting seat 100 by the self gravity of the carrier 200, and the self-locking device has a simple structure and a good fixing effect.

Specifically, the self-locking assembly 300 includes a self-locking lever 310, the self-locking lever 310 is rotatably connected to the mounting base 100, and the self-locking lever 310 has at least two movable ends, one of which is used for abutting against the bottom of the carrier 200, and the other of which is used for abutting against the outer sidewall of the carrier 200.

Therefore, when the carrier 200 is placed on top of the self-locking lever 310, the carrier 200 can be abutted to the top of one movable end of the self-locking lever 310 under the action of self-gravity, and the self-locking lever 310 is movably connected to the mounting seat 100, so that the self-locking lever 310 can move relative to the mounting seat 100 under the driving action of the carrier 200, and the movable end of the other end of the self-locking lever 310 is abutted to the outer side wall of the carrier 200, so as to clamp and fix the carrier 200. In this embodiment, the self-locking lever 310 is L-shaped, and the L-shaped self-locking lever 310 has two movable ends, and in other embodiments, the self-locking lever 310 may have a Y-shaped structure, or may have more than two movable ends, which is not limited only herein.

Further, the self-locking assembly 300 further includes a reset member 320, where the reset member 320 is connected to the self-locking lever 310, and the reset member 320 is configured to drive the self-locking lever 310 to move away from the carrier 200 when the carrier 200 is separated from the self-locking assembly 300.

In this embodiment, by providing the reset member 320 to cooperate with the self-locking lever 310, when the carrier 200 is placed on the self-locking assembly 300, the reset member 320 generates elastic deformation and stores elastic potential energy under the gravity action of the carrier 200, and after the carrier 200 is separated from the self-locking lever 310, the reset member 320 releases the elastic potential energy and drives the self-locking lever 310 to separate from the carrier 200, so as to realize the unlocking function of the self-locking lever 310.

In an embodiment, the carrier 200 is provided with a limiting groove 221, and the self-locking lever 310 is at least partially accommodated in the limiting groove 221 and is in sliding contact with an inner wall of the limiting groove 221.

Therefore, when the carrier 200 drives the self-locking lever 310 to move, the movement of the self-locking lever 310 can be limited by arranging the limiting groove 221 to be matched with the self-locking lever 310, so that the locking effect of the self-locking lever 310 is ensured.

Specifically, the carrier 200 includes a carrier bottom 210 and two limiting side plates 220, the two limiting side plates 220 are spaced apart and are disposed in parallel on top of the carrier bottom 210, the limiting side plates 220 are detachably connected to the carrier bottom 210, and the limiting grooves 221 are disposed on one side of the two limiting side plates 220 facing each other.

In this embodiment, through setting up the cooperation of the loading bottom plate 210 and the spacing curb plate 220 that can dismantle the connection in order to form the storing space that is used for holding sample frame 20, can select the spacing curb plate 220 of symmetrical size according to the processing demand to be applicable to not unidimensional sample frame 20, simple structure, excellent in use effect.

Further, the carrier 200 further includes a top plate 230, the top plate 230 covers the top of the limiting side plate 220, and the top plate 230 is detachably connected to a side of the limiting side plate 220 away from the bottom plate 210.

Through setting up roof 230 and spacing curb plate 220 and connecting, can make bear frame 200 form stable structure to be convenient for dismouting change, simultaneously, through setting up roof 230 at the top of sample frame 20, can protect sample frame 20, avoid causing the damage to it at the transfer in-process.

Referring to fig. 3, in this embodiment, the bottom plate 210 is spaced from the sample rack 20 at the lowest layer on the carrier 200 to form a bottom space for gas flow, the top plate 230 is spaced from the sample rack 20 at the highest layer on the carrier 200 to form a top space for gas flow, and the sample racks 20 at two adjacent layers are spaced to form a space for gas flow, so that by matching the top space, the space and the bottom space, the gas flow between the sample racks 20 at each layer can be uniformly distributed, thereby improving the uniformity of coating film of the samples on the sample rack 20. In a preferred embodiment, the side surfaces of the carrier base plate 210 and the top plate 230 facing the sample holder 20 may be roughened, thereby providing a reduced risk of particle contamination of the chamber and sample of the plating apparatus due to flaking of the deposited film. In an embodiment, the number of the self-locking levers 310 is two, the number of the limiting grooves 221 is also two, each self-locking lever 310 is in sliding contact with one limiting groove 221, and the two sets of self-locking levers 310 and the limiting grooves 221 are symmetrically arranged on two opposite sides of the carrier 200.

By arranging the two self-locking levers 310 to be respectively matched with the two limiting grooves 221, when the bearing frame 200 is placed on the self-locking assembly 300, the two self-locking levers 310 can be respectively clamped on two opposite sides of the bearing frame 200, so that the clamping effect of the self-locking assembly 300 is improved; in other embodiments, the self-locking lever 310 and the limiting groove 221 may also be provided with four groups, and the four groups are disposed around the bearing frame 200, so that the clamping and fixing stability of the self-locking device 10 may be improved by matching the plurality of groups of self-locking levers 310 and the limiting groove 221, and the use effect is good.

The utility model also provides a film plating device, which comprises a sample rack 20 and the self-locking device 10 in any embodiment, wherein the sample rack 20 is provided with a containing cavity 2011 for containing a sample, and the sample rack 20 is detachably connected with a bearing rack 200 of the self-locking device 10.

It can be understood that, in the coating apparatus of the present embodiment, by providing the self-locking device 10 in the foregoing embodiment, the self-locking device 10 is matched with the carrier 200 by providing the self-locking assembly 300, so that the self-locking device 10 can be fixed on the mounting base 100 under the self-gravity action of the carrier 200, and when the self-locking device 10 is applied to the self-rotating coating apparatus, a stable supporting effect can be provided for the carrier 200, and in addition, the simplicity, the reliability and the durability are improved.

Further, the number of the sample holders 20 is plural, the carrier 200 of the self-locking device 10 is provided with a plurality of mounting slots 222, the plurality of mounting slots 222 are arranged at intervals and in parallel along the vertical direction, the sample holders 20 are in plug-in fit with the mounting slots 222, and the plurality of sample holders 20 are arranged in parallel and at intervals.

By arranging a plurality of sample holders 20 in parallel and at intervals, after the sample holders 20 are mounted in the carrier 200, the mounting positions of the sample holders 20 can be positioned through the mounting grooves 222, and meanwhile, the two sample holders can be compact in structure.

Specifically, the sample rack 20 includes a rack body 201 and two mounting portions 202, the two mounting portions 202 are symmetrically disposed on opposite sides of the rack body 201, and the mounting portions 202 are in plug-in fit with the mounting grooves 222.

It will be appreciated that, when the sample holder 20 is installed, the two mounting portions 202 may be respectively engaged with the two top plates 230, which is simple in structure and convenient to assemble and disassemble.

Further, the coating apparatus further includes a partner board 30, the partner board 30 is detachably connected to the self-locking device 10, and the partner board 30 and the sample holder 20 are disposed at intervals.

In this embodiment, when the sample rack 20 is not fully filled in the self-locking device 10, the accompanying board 30 can be installed in a vacancy on the bearing rack 200, and the interval distance between each layer of the sample rack 20 is ensured to be equal through the interval arrangement of the accompanying board 30 and the sample rack 20, so that the air flow uniformity inside the coating equipment is improved, the coating effect of the coating equipment is ensured, the accompanying board 30 is connected with the bearing rack 200 in a detachable manner, the disassembly convenience of the accompanying board 30 can be improved, and the using effect is good. In some embodiments, roughness may be provided on the surface of the companion plate 30 to reduce the risk of particles contaminating the plating equipment cavity and sample due to flaking of the deposited film.

Specifically, referring to fig. 4 and 5, the accompanying board 30 includes a board body 301 and a protruding portion 302, the board body 301 is detachably connected to the self-locking device 10, the protruding portion 302 is protruding on the surface of the board body 301, and the protruding portion 302 is disposed at a distance from the sample holder 20.

Compared with the embodiment, when the sample rack 20 is provided with the sample, the protrusion 302 can simulate the structure of placing the sample on the sample rack 20 by matching the accompanying board 30 with the protrusion 302 with the sample rack 20, so as to ensure that the distance between the upper surface and the lower surface of the sample rack 20 and the accompanying board 30 is equal, thereby further improving the coating quality of the coating equipment and having good use effect.

In the description of the embodiments of the present utility model, it should be noted that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the embodiments of the present utility model and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the embodiments of the present utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In describing embodiments of the present utility model, it should be noted that, unless explicitly stated and limited otherwise, the terms "coupled," "coupled," and "connected" should be construed broadly, and may be either a fixed connection, a removable connection, or an integral connection, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium. The specific meaning of the above terms in embodiments of the present utility model will be understood in detail by those of ordinary skill in the art.

In embodiments of the utility model, unless expressly specified and limited otherwise, a first feature "up" or "down" on a second feature may be that the first and second features are in direct contact, or that the first and second features are in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.

In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the embodiments of the present utility model. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the different embodiments or examples described in this specification and the features of the different embodiments or examples may be combined and combined by those skilled in the art without contradiction.

Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present utility model, and are not limiting; although the utility model has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present utility model.

Claims

1. A self-locking device for a coating apparatus, comprising:

the mounting seat is connected to the external component;

the self-locking assembly is movably connected to the mounting seat, at least part of the self-locking assembly is positioned at the bottom of the bearing frame, and when the bearing frame is placed on the self-locking assembly, the self-locking assembly is used for being abutted to the outer side wall of the bearing frame; the self-locking assembly comprises a self-locking lever which is rotatably connected to the mounting seat and is provided with at least two movable ends, one movable end is used for being abutted to the bottom of the bearing frame, and the other movable end is used for being abutted to the outer side wall of the bearing frame.

2. The self-locking device for a coating apparatus according to claim 1, wherein the self-locking assembly further comprises a reset member connected to the self-locking lever, the reset member being configured to urge the self-locking lever to move in a direction away from the carrier when the carrier is separated from the self-locking assembly.

3. The self-locking device for a coating apparatus according to claim 1, wherein the carrier is provided with a limiting groove, and the self-locking lever is at least partially accommodated in the limiting groove and is in sliding contact with an inner wall of the limiting groove.

4. The self-locking device for a coating apparatus according to claim 3, wherein the carrier comprises a carrier bottom plate and two limiting side plates, the two limiting side plates are spaced apart and arranged in parallel at the top of the carrier bottom plate, the limiting side plates are detachably connected to the carrier bottom plate, and the limiting groove is formed in one side of the two limiting side plates facing each other.

5. The self-locking device for a coating apparatus according to claim 4, wherein the carrier further comprises a top plate, the top plate is covered on the top of the limiting side plate, and the top plate is detachably connected to a side of the limiting side plate away from the carrier bottom plate.

6. The self-locking device for a coating apparatus according to claim 4, wherein the number of the self-locking levers is two, the number of the limit grooves is also two, each self-locking lever is in sliding contact with one limit groove, and two groups of the self-locking levers and the limit grooves are symmetrically arranged on two opposite sides of the bearing frame.

7. A coating apparatus, characterized by comprising:

a sample holder provided with a holding cavity for holding a sample; and

the self-locking device of any one of claims 1-5, wherein the sample holder is removably coupled to the carrier of the self-locking device.

8. The plating apparatus according to claim 7, wherein the number of the sample holders is plural, the carrier of the self-locking device is provided with a plurality of mounting grooves, the plurality of mounting grooves are arranged at intervals and in parallel along the vertical direction, the sample holders are in plug-in fit with the mounting grooves, and the plurality of sample holders are arranged in parallel and at intervals.

9. The plating apparatus according to claim 8, wherein the sample holder comprises a holder body and two mounting portions, the two mounting portions are symmetrically provided on opposite sides of the holder body, and the mounting portions are in plug-fit with the mounting grooves.

10. The plating apparatus of claim 7, further comprising a companion plate detachably connected to the self-locking device, and the companion plate is spaced apart from the sample holder.

11. The plating apparatus according to claim 10, wherein the accompanying plate comprises a plate body and a protruding portion, the plate body is detachably connected to the self-locking device, the protruding portion is protruding on the surface of the plate body, and the protruding portion is arranged at a distance from the sample holder.