TWI458851B - System and method for producing carbon nanotubes - Google Patents

Description

System and method for manufacturing carbon nanotubes

The present invention is directed to systems for making carbon nanotubes and methods therefor.

The carbon nanotube is a hollow cylinder of carbon atoms. The appearance of the carbon nanotubes is a graphite tube such that the side walls are hexagonal carbon rings and they are often formed in large bundles.

Carbon nanotubes are now used for electrodes such as electrochemical storage devices (eg, secondary batteries or ultracapacitors), electromagnetic shielding, field emission displays, or gas sensing, given metal conductivity and semiconductor conductivity depending on the structure. The number one candidate in various technical fields.

technical problem

In general, the production of carbon nanotubes (CNTs) is small because it is still responsible for performing most of its manufacturing steps by hand, including loading or unloading the CNT composite substrate onto the reaction tube. The step of synthesizing the substrate by the CNT, and the step of unloading the substrate from the reaction tube to extract CNTs therefrom. Therefore, it is difficult to perform continuous processes as well as mass production.

Technical solution

An exemplary embodiment of the invention is directed to a system for making carbon nanotubes. In an exemplary embodiment, the system may include: a reaction chamber in which a process of manufacturing a carbon nanotube on a synthetic substrate is performed; a stage portion disposed on one side of the reaction chamber and provided for loading the synthetic substrate into the reaction chamber a first transport body that unloads the synthetic substrate from the reaction chamber; and a substrate accommodating portion in which the synthetic substrate that is to be loaded to the substrate or unloaded from the reaction chamber is waited.

In another exemplary embodiment, a system may include: a reaction chamber in which a process of manufacturing a carbon nanotube on a synthetic substrate is performed; a stage portion disposed on one side of the reaction chamber and provided for loading the composite substrate to a reaction chamber/removal of a first transport body of the synthetic substrate from the reaction chamber; a first transport body installed inside the stage portion for loading the synthetic substrate to the reaction chamber/unloading the composite substrate from the reaction chamber; and a substrate housing portion in which the substrate is accommodated a substrate to be loaded into the reaction chamber or a synthetic substrate unloaded from the reaction chamber is waited therein; a drawing portion for taking out the synthetic substrate from the substrate receiving portion to extract the carbon nanotubes produced on the synthetic substrate; a cover unit configured to coat the composite substrate with a catalyst before accommodating the composite substrate in the substrate receiving portion of the stage portion; and a second transport body for being used between the scooping portion and the substrate receiving portion and A synthetic substrate is transported between the catalyst coating unit and the substrate receiving portion.

An exemplary embodiment of the invention is directed to a method of making a carbon nanotube. In an exemplary embodiment, the method may include: coating a synthetic substrate with a catalyst; loading a substrate coated with a catalyst into a reaction chamber; supplying a source gas to the reaction chamber to synthesize the carbon nanotube with the synthetic substrate; The substrate is unloaded from the reaction chamber; the unloaded synthetic substrate is cooled at a predetermined temperature; and the carbon nanotube is taken from the cooled synthetic substrate.

Favorable effect

As described so far, the present invention has the following advantages: (1) carbon nanotubes can be automatically manufactured; (2) carbon nanotubes can be manufactured in large quantities; (3) carbon nanotubes of synthetic substrates can be synthesized because the process of the reaction chamber is continuously maintained. The rice tubes are continuously synthesized to increase the operating rate of the system; (4) automatically and accurately supply the catalyst to improve process reliability; and (5) automatically pick up the carbon nanotubes to accurately calculate the manufacturing rate.

The invention will now be described more fully hereinafter with reference to the accompanying claims However, the invention may be embodied in many different forms and should not be construed as being limited to the embodiments set forth herein. Rather, the embodiments are provided so that this disclosure will be thorough and complete, and the scope of the invention will be fully disclosed to those skilled in the art. In the drawings, the thickness of layers and regions are exaggerated for clarity. The same numbers in the text designate the same elements.

An example of a system 1 for making a carbon nanotube is illustrated in FIG. System 1 includes a composite substrate 10, a reaction chamber 100, and a pre/post processing chamber.

The composite substrate 10 is used as a substrate in which a carbon nanotube (CNT) is synthesized. The CNT composite substrate may be a germanium wafer, an indium tin oxide (ITO) substrate, an ITO coated glass, a soda lime glass, a corning glass, and an alumina. However, other materials may be used as long as they have sufficient strength to synthesize (grind, manufacture) carbon nanotubes.

The reaction chamber 100 is provided to perform a process of manufacturing a carbon nanotube on the synthetic substrate 10. A pre/post processing chamber is provided to perform a pre-treatment process and a post-treatment process for the composite substrate loaded on/unloaded from the reaction chamber 100. The pretreatment process and the post-treatment process include a process of coating the catalyst 20 on a synthetic substrate, and a process of drawing a carbon nanotube formed on the synthetic substrate. The pre/post processing chamber includes a stage portion 200, a first transport body 300, a substrate housing portion 400, a catalyst coating unit 500, a scooping portion 600, and a second transport body 700.

The stage portion 200 is provided for preventing exposure of the composite substrate unloaded from the reaction chamber 100 to the air. The first transport body 300 loads the synthetic substrate on the reaction chamber 100/unloads the synthetic substrate from the reaction chamber 100. A substrate accommodating portion 400 is provided for accommodating a composite substrate loaded on/unloaded from the reaction chamber 100. A catalyst coating unit 500 is provided for coating the catalyst 20 on the synthetic substrate 10 before loading the composite substrate 10 onto the reaction chamber 100. A scooping portion 600 is provided for extracting the carbon nanotubes produced on the synthetic substrate 10 unloaded from the reaction chamber 100 from the synthetic substrate 10. The second transport body 700 transports the synthetic substrate 10 between the substrate housing portion 400 and the catalyst coating unit 500 and between the substrate housing portion 400 and the scooping portion 600.

In the exemplary embodiment, stage portion 200 is juxtaposed with reaction chamber 100. The stage portion 200 has a first region 240 disposed adjacent to the reaction chamber 100 and a second region 260 disposed opposite the first region 240. The substrate housing portion 400 is disposed within the first region 240, and the first conveyor body 300 is disposed within the second region 260. The reaction chamber 100 and the second region 260 are linearly disposed. The first region 240 has a top region 242 and a bottom region 244. The top region 242 is linearly disposed with the reaction chamber 100 and the second region 260. The bottom region 244 extends from the top region 244 in a first direction 44 that is perpendicular to the second direction 42. The first area 240 and the second area 260 each have a rectangular form. Due to the structure mentioned above, the stage portion 200 as a whole has " In the direction parallel to the second region direction 42, the catalyst coating unit 500, the scooping portion 600, and the second transporting body 700 are disposed adjacent to the table portion 200 based on the top region 242 of the first region 240, and The juxtaposition is juxtaposed at a position opposite to the bottom portion 244. The second transport body 700 is disposed at a position opposite to the first region 240 of the table portion 200. Further, sandwiching between the catalyst application unit 500 and the scooping portion 600 The second transport body 700. Unlike the above, the shape of the stage portion 200 can be modified differently, as well as the placement of the table portion 200, the first transport body 700, the catalyst coating unit 500, and the scooping portion 600.

The elements of the system according to the invention will now be described in detail below.

Referring to FIG. 1, the reaction chamber 100 includes a reaction tube 120, first and second flanges 132 and 134, a heating unit 140, a cooling member 150, and a boat 160. The reaction tube 120 is made of a heat-proof material such as quartz or graphite. In general, the reaction tube 120 has a cylindrical shape. During the process, the reaction chamber 120 can be maintained at a temperature in the range of 500 degrees Celsius to 1,100 degrees Celsius by the heating unit 140.

The first flange 132 is a dished flange that is coupled to the front end of the reaction chamber 120. The second flange 134 is coupled to the rear end of the reaction chamber 120. The gas supply member 180 is coupled to the first flange 132 for supplying source gas into the reaction tube 120. The gas supply member 180 includes a gas supply source 182, a gas supply pipe 184, and a heating unit 186. The gas supply pipe 184 is coupled to the first flange 132 to supply source gas from the gas supply source 182 into the reaction tube 120. The source gas may be at least one selected from the group consisting of acetylene, ethylene, methane, benzene, xylene, carbon monoxide, and carbon dioxide. A valve 184a is mounted on the gas supply pipe 184 for switching the internal path of the gas supply pipe 184 or controlling the flow rate of the source gas. A heating unit 186 is installed at the gas supply pipe 184 for heating the source gas to a set temperature before supplying the source gas into the reaction tube 120. Due to the heating unit 186, the time required to activate the source gas in the reaction tube 120 can be reduced. Thereby, the entire process time can be reduced. After activation by pyrolysis, the source gas reacts with the catalyst coated on the synthetic substrate 10 to produce a carbon nanotube. The exhaust line 189 is coupled to the second flange 134 for discharging the gas remaining inside the reaction tube 120 after the reaction.

Sealing members 132a and 134a are respectively installed at the contact surfaces of the first flange 132 and the reaction tube 120 and at the contact surfaces of the second flange 134 and the reaction tube 120 for sealing the inside of the reaction tube 120 from the outside. Each of the sealing members 132a and 134a may be an O-ring and cooled by a cooling member. The cooling member includes a cooling line 152, a cooling water supply pipe 156, and a sensor 158. Cooling lines 152 are formed inside the first and second flanges 132 and 134. The cooling fluid flows along the cooling line 152. The cooling fluid is cooling water. Alternatively, the cooling fluid can be an inert gas. The cooling water flowing along the cooling line 152 cools the sealing members 132a and 134a to prevent heat inside the reaction tube 120 from damaging the sealing members 132a and 134a.

Referring to FIG. 2, a cooling water supply pipe 156 and a cooling water dip tube (not shown) are coupled to the cooling line 152. A valve 156a is installed on the cooling water supply pipe 156 for switching the internal path of the cooling water supply pipe 156 or controlling the flow rate of the cooling water flowing along the internal path thereof. A sensor 158 is installed at the cooling water supply pipe 156 for measuring the flow rate or temperature of the cooling water flowing along the internal path of the cooling water supply pipe 156. The signal measured by the sensor 158 is transmitted to the controller 159 for controlling the entire system. Controller 159 analyzes the signals transmitted from sensor 158. When the analysis result is that the flow rate or temperature of the cooling water is not within the set range of the set time, the controller 159 stops the system or notifies the user of this fact via the display or the alarm sound. This enables the sealing members 132a and 134a to continuously perform the process for a predetermined period of time even if the cooling water is temporarily not flowing through the cooling water supply pipe 156 at the set flow rate or the set temperature. The set time mentioned above is decided, taking into account the time required to affect the sealing members 132a and 134a when the cooling water is not continuously supplied smoothly.

The heating unit 140 heats the inside of the reaction tube 120 at a process temperature. The heating unit 140 is installed to surround the outer wall of the reaction tube 120. The reaction tube 120 can be heated by heating a heating coil or a heat lamp.

FIG. 3 illustrates a reaction chamber 100 including a heating unit 140 in accordance with an exemplary embodiment of the present invention. For convenience of description, the regions of the reaction tube 120 adjacent to the first and second flanges 132 and 134 are referred to as edge regions 122a and 122b, respectively. Further, the area between the edge regions 122a and 122b is referred to as a central region 124. When the entire area of the reaction tube 120 is heated by a heating unit, the heating temperatures of the edge regions 122a and 122b are lower than the heating temperature of the central portion 124. This is because the edge regions 122a and 122b are affected by the cooling lines 152 installed at the flanges 132 and 134. Therefore, since the synthetic substrate must be supplied only to the central region 124 of the reaction tube 120 to perform the process of synthesizing the substrate 10 at the same temperature, the reaction tube 120 is long.

As illustrated in FIG. 3, the heating unit 140 includes an edge heater 142, a center heater 144, and a heating controller 146. The edge heater 142 heats the edge regions 122a and 122b, and the center heater 144 heats the central region 124. The heating controller 146 independently controls the center heater 144 and the edge heater 142. The edge heater 142 heats the reaction tube 120 at a temperature higher than that of the center heater 144 such that the temperature is equivalently supplied inside the reaction tube 120. The edge heater 142 includes a first heater 142a for heating an edge region 122a adjacent to the first flange 132, and a second heater 142b for heating an edge region 122b adjacent to the second flange 134, which is advantageous There is a case where there is a temperature difference between the edge regions 122a and 122b of the reaction tube 120. In this case, the heating controller 146 independently controls the first heater 142a and the second heater 142b.

At least one boat 160 may be provided to the inside of the reaction tube 120. The boat 160 is of sufficient size such that a plurality of composite substrates 10 can be loaded on the boat 160 in the length direction of the reaction tube 120 (the second direction 42 mentioned above). Optionally, the boat 160 can be sized and configured to support a plurality of composite substrates 10 in a longitudinal and clockwise manner. For example, the boat 160 can be sized and configured to support the two composite substrates 10 longitudinally and to support the two composite substrates 10 clockwise. These boats 160 may be provided for fixed installation or loading/unloading inside the reaction tube 120.

Alternatively, the boat 160 can be sized to support a composite substrate 10. In this case, at least one boat 160 may be provided. In the case where a plurality of boats 160 are provided, such boats are disposed in the longitudinal direction of the reaction tube 120 (the second direction 42 mentioned above), or may be stacked in a direction perpendicular to the first direction 42 Boat.

The support frame 160' may be mounted inside the reaction tube 120 rather than the boat 160, as appropriate. The composite substrate 10 is loaded on the support frame 160'. 4 and 5 are cross-sectional views of the reaction tube 120 to which the support frame 160' is attached, respectively. Referring to FIG. 4, the support frame 160' includes two frames 162 and 164 that are provided to protrude inwardly from the inner wall of the reaction tube 120 toward the reaction tube 120 in the longitudinal direction of the reaction tube 120. The first and second frames 162 and 164 are respectively disposed opposite to support the edge of the composite substrate 10. Guide protrusions 162a and 164a protruding inwardly are provided to the ends of the first and second frames 162 and 164, respectively, for stably supporting the composite substrate 10. A downwardly protruding hitch 10a may be provided for fastening on the guide protrusions 162a and 164a.

The first frame 162 and the second frame 164 may be long enough to load a plurality of composite substrates 10 thereon in the longitudinal direction of the reaction tube 120. One or more support frames 160' may be provided to be spaced apart from each other in the up and down direction. In the case where the reaction tube 120 is provided to have a circular cross section, the two support frames 160' can be mounted up and down. Optionally, at least three support frames can be provided by providing a support frame 160' having a center wider than the edges. Alternatively, as illustrated in FIG. 5, the reaction tube 140a may be provided to have a rectangular cross section, and a plurality of support frames 160' may be provided to be stacked.

In this embodiment, a reaction chamber 100 using hydrocarbon pyrolysis is described in which hydrocarbons are thermally decomposed to produce carbon nanotubes 30. However, it is merely illustrative and various reaction chambers using laser deposition, plasma chemical vapor deposition (plasma CVD), thermochemical CVD, frame synthesis, and arc discharge can be used.

Returning to Figure 1, the stage portion 200 includes a chamber 200a that is isolated from the exterior. A first gate valve 122 is mounted between the stage portion 200 and the reaction chamber 100 to switch paths along which the composite substrate 10 travels. A second gate valve 224 is mounted between the stage portion 200 and the second conveyor body 700 to switch the path along which the composite substrate 10 travels.

A gas supply member 280 is installed at the stage portion 200 for supplying an inert gas such as nitrogen and argon into the stage portion 200. An inert gas is supplied to remove air (especially oxygen) inside the stage portion 200 and maintain the interior of the stage portion 200 in an inert gas atmosphere. This makes it possible to prevent the high temperature carbon nanotube 30 manufactured on the synthetic substrate 10 from being exposed to oxygen when the synthetic substrate 10 is unloaded from the reaction chamber 100 inside the stage portion 200. The gas supply portion 280 is supplied to the first region 240 in which the substrate housing portion 400 is mounted.

In the case where the first gate valve 222 is disposed adjacent to the reaction chamber 100, the first gate valve 222 may be damaged due to radiant heat generated inside the reaction chamber 100. Therefore, the reaction chamber 100 has a length sufficient to prevent damage of the first gate valve 222, which allows the difference between the heating unit 140 and the first gate valve 222 to be sufficiently maintained. However, sufficient length of the reaction chamber 100 results in a proportional increase in the system 1.

In this embodiment, a heat shield member 180 is installed between the first gate valve 222 and the reaction chamber 100 for suppressing the proportional increase of the system 1 and preventing the radiant heat from damaging the first gate valve 222. The heat shield member 190 shields heat transferred from the reaction chamber 100. The heat shield member 190 includes a low thermal conductivity shield 192, such as alumina, and a driver 194 that is provided to drive the shield 192. Alternatively, the shield plate 192 can be made of a typical metal. In this case, a cooling member (not shown) may be provided for preventing heat inside the reaction chamber 120 from damaging the shield plate 192, and improving the shielding efficiency.

When the first gate valve 222 is closed, the shield plate 190 is placed in front of the first gate valve to prevent heat from damaging the first gate valve 222. When the first gate valve 222 is opened, the shield plate 190 is moved to a position that does not block the advancement path of the composite substrate 10.

A catalyst (metal layer) 20 is applied from the catalyst coating unit 500 to the reaction chamber 160 before the synthetic substrate 10 is loaded on the reaction chamber 160. 6 shows the configuration of the catalyst coating unit 500 illustrated in FIG. 1, and FIG. 7 is a top plan view of a cross-sectional view taken along line AA' of FIG.

Referring to FIGS. 6 and 7, the catalyst coating unit 500 includes a catalyst storage tank (funnel) 520, a fixed amount supply portion 560, a brush unit 580, and a stage 590. The composite substrate 10 is loaded on the stage 590 during the process. Catalyst storage tank 520 is disposed on stage 590 and has an output aperture 526a configured to supply a set amount of catalyst 20 to the top surface of composite substrate 10. The brush unit 580 wipes the catalyst 20 supplied to the top surface of the composite substrate 10 so that the catalyst 20 can have a uniform thickness on the top surface of the composite substrate 10.

The stage 590 includes side plates 592 that are spaced apart at predetermined intervals to face the composite substrate 10 and face each other, and a plurality of support protrusions 594 that are mounted to protrude inwardly toward the respective side plates 592 and support the edges of the composite substrate 10. A plurality of support protrusions 594 can be mounted at the respective side panels 592.

The brush unit 580 includes a rail 584, a coating brush 587, and a movable body 588. A guide rail 584 is longitudinally mounted at both sides of the stage 590, and the composite substrate 10 is mounted on the stage 590. The movable body 588 is movably mounted at the rail 584 and linearly moved by the linear motion drive 586. The linear movement of the movable body 588 is performed using a conventional driving method such as a linear motor driving method, a cylinder driving method, and a motor driving method. A coating brush 587 is disposed on the stage 590 for brushing the catalyst such that the catalyst has a uniform thickness over the entire surface of the composite substrate 10. Since both ends of the application brush 587 are connected to the movable body 587, the application brush 587 is slidably traveled by the movable body 588. The application brush 587 can be a metal or non-metal plate having a particular oblique side with respect to the forward direction.

The application brush 587 is moved up and down by the vertical movement unit 589 so that the height of the application brush 587 can be adjusted. This enables the coating thickness of the catalyst 20 supplied to the top surface of the composite substrate 10 to be adjusted. The vertical movement unit 589 includes a top plate 589a fixedly coupled to the top surface of the movable body 588, a bottom plate 589b fixedly coupled to the bottom surface of the movable body 588 to face the top plate 589a, and vertically disposed to connect the top plate 589a to the bottom plate 589b Guide shaft 589c. A bracket 589d is mounted at the guide shaft 589c. The bracket 589d linearly travels up and down along the guide shaft 589c by a driver (not shown). A coating brush 587 is fixedly mounted on the bracket 589d.

The catalyst storage tank 520 supplies the stored catalyst 20 onto the composite substrate 10. The catalyst storage tank 520 has a top surface 522, a side surface 524, and a bottom surface 526 in which an output aperture 526a is formed. The side surface 524 includes a generally vertical upper portion 524a, an intermediate portion 524b extending downwardly from the upper portion 524a and bent inwardly, and a lower vertical portion 524c extending from the intermediate portion 524b. Due to the structure described above, a large amount of catalyst 20 is stored in the space defined by the upper portion 524a as compared to the space defined by the portion 524c below the same height. The shape of the intermediate portion 524b allows the catalyst 20 stored in the space defined by the upper portion 524a to be smoothly supplied to the space defined by the lower portion 524c.

A fixed amount supply unit 560 is installed at the catalyst storage tank 520 for supplying a fixed amount of the catalyst 20 to the top surface of the composite substrate 10. The fixed amount supply unit 560 includes a top shield plate 564 and a bottom shield plate 562 that are configured to define a fixed amount of space into which a fixed amount of catalyst 20 is impregnated. Top and bottom shields 564 and 562 are provided to bottom 524c. A fixed amount of space 568 is disposed on the output aperture 526a of the catalyst storage tank 520. A top shield 564 is provided on the fixed volume 568 and a bottom shield 562 is provided thereunder. The top and bottom shields 564 and 562 are operated by a drive component such as a cylinder 566. When the top shield 564 is closed when the bottom shield 562 is closed, a fixed amount of space 568 is redefined between the bottom and top shields 562 and 564, and a fixed amount of space 568 is filled with a set amount of catalyst 20.

When the bottom shield 562 is opened, the catalyst 20 impregnated into the fixed amount of space 568 is supplied to the top surface of the composite substrate 10 via the output hole 526a. A stirrer 540 is installed at the intermediate portion 542b of the catalyst storage tank 520 for agitating the catalyst 20. The agitating blades 542 of the agitator 540 rotate before supplying the catalyst 20 to the fixed amount of space 568, thereby eliminating unused space inside the catalyst storage tank 520, and inducing the natural supply of the catalyst 20 to the fixed amount of space 568.

The catalyst coating step of the catalyst coating unit 500 will now be described with reference to Figs. 8 to 10. When the composite substrate 10 is loaded on the stage 590 by the second transport body 700, the bottom shield plate 562 is operated by the cylinder 566 to open the bottom of the fixed amount of space when traveling in the side direction. The set amount of the catalyst 20 impregnated into the fixed amount of space 568 is dropped on the top surface of the composite substrate 10 (see Fig. 8). The entire surface of the composite substrate 10 is coated by the catalyst unit 20 accumulated on the top surface of the substrate 10 by the brush unit 580 (see FIGS. 9 and 10). That is, when one end of the synthetic substrate 10 is slidably traveled to the other end thereof, the coating brush 587 conformally coats the entire surface of the composite substrate 10 with the catalyst 20. In order to conformally coat the catalyst 20, a vibrator (not shown) may be mounted for applying minute vibrations to the application brush 587 or the composite substrate 10.

The catalyst 20 may be a powder prepared by mixing a transition metal (for example, iron, platinum, cobalt, nickel, rhodium, or a combination thereof) with a porous substance (for example, MgO, A12O3, or SiO2). Alternatively, catalyst 20 can be a liquid catalyst comprising the materials mentioned above. Where the catalyst 20 is a liquid catalyst, the system can include a catalyst storage tank, a supply line, a fixed amount supply pump mounted on the supply line, and a supply nozzle configured to supply the liquid catalyst to the top surface of the composite substrate.

According to the above embodiment, the coating brush 587 conformally coats the top surface of the composite substrate 10 with the catalyst 20 when traveling on the top surface of the composite substrate 10. Unlike this, the application brush 587 is fixed and the table 590 can travel. Preferably, the application brush 587 travels to reduce the space of the catalyst coating unit 500.

Also according to the above embodiment, the catalyst 20 is independently coated on the synthetic substrate 10 by the catalyst coating unit 500, and the carbon nanotube 30 is fabricated on the synthetic substrate 10 coated with the catalyst 20 inside the reaction chamber 100. Unlike this, the catalyst coating unit can be removed and the catalyst gas and the source gas can be supplied to coat the catalyst inside the reaction chamber and to fabricate the carbon nanotube on the top surface of the synthetic substrate.

11 is a top plan view of the substrate housing portion 400 and the first conveying body 300, and FIG. 12 is a side view of the substrate housing portion 400. The substrate housing portion 400 includes a cassette 420 configured to receive the composite substrate 10, a vertical track 442, a horizontal track 444, and a movable frame 446. Vertical tracks 442 are placed at the corners of the first region 240, respectively. Each of the vertical rails 442 has the shape of a vertical long rod for guiding the up and down movement of the movable frame 446. Brackets 446 are coupled to respective vertical rails 442 and travel up and down along vertical rails 442 by vertical drives (not shown). The respective movable frames 446 are longitudinally provided in the first direction 42 and are disposed facing each other. The movable frame 446 is engaged with the bracket 448 to linearly travel up and down along the vertical rail 442 by the bracket 448. A horizontal rail 444 is fixedly mounted on the movable frame 446. The respective horizontal rails 444 are longitudinally provided in the second direction 44 and are disposed facing each other. A horizontal track 444 is provided through the first region 240. The cassette is mounted on a horizontal track 444 to be movable along the horizontal track 444 in the second direction 44.

As illustrated in Fig. 11, the cassette 420 travels horizontally between the waiting position X1 indicated by the broken line and the loading/unloading position X2 (which is the front of the first gate valve connected to the reaction chamber). The waiting position X1 is present in the bottom region 244 of the first region 240, and the loading/unloading position X2 is present in its top region 242. When the synthetic substrate 10 is loaded into the reaction chamber 100 / the composite substrate 10 is unloaded from the reaction chamber 100, and when the composite substrate 10 is transported by the second transport body 700, the cassette 420 travels to the loading/unloading position X2. Also, when waiting to lower the temperature of the composite substrate 10, the cassette 420 travels to the waiting position X1.

Figure 13 is a perspective view of the cassette 420. The composite substrate to be loaded into the reaction chamber 100 and the composite substrate 10 unloaded from the reaction chamber 100 are housed in the cassette 420. Referring to FIG. 13, the cassette 420 includes a support body 422, a top plate 424, a bottom plate 426, and a vertical shaft 428. The top plate 424 and the bottom plate 426 are rectangular plates that face each other. The vertical axis 428 interconnects the respective corners of the top plate 424 and the bottom plate 426. Therefore, four vertical axes 428 are provided. The support body 422 is mounted at the vertical axis 428 to accumulate and accommodate the composite substrate 10 in the cassette 420. Each of the supports 422 has four support blocks 423 for supporting the corner portions of the composite substrate 10. The support body 422 is divided into two groups, wherein the first group includes the first support body 422a and the second group includes the second support body 422b. The first support 422a supports the composite substrate 10 to be loaded into the reaction chamber 10, and the second support 422b supports the composite substrate 10 unloaded from the reaction chamber 10. In the exemplary embodiment, four first support bodies 422a and four second support bodies 422b are provided, and a first support body 422a is disposed on the second support body 422b.

The space between the second support bodies 422b is larger than the space between the first support bodies 422a, which makes it possible to reduce the entire height of the cassettes 420, and to provide the entire surface of the synthetic substrate sufficient to prevent unloading from the reaction chamber 100. The carbon nanotube 30 contacts the space of the adjacent composite substrate 10.

The composite substrate 10 accommodated at the first support 422a of the cassette 420 is loaded into the reaction chamber 100 by the first transport body. Four composite substrates 10 are loaded on the boat 160 of the reaction chamber 100. The first transport body 300 loads the synthetic substrate one by one to the reaction chamber 100 / unloads the synthetic substrate from the reaction chamber 100.

When the loading of the composite substrate 10 is completed, the process of manufacturing the carbon nanotubes 30 is performed inside the reaction chamber 100. During the process, the other four composite substrates 10 wait at the first support 422a of the cassette 420 after coating with the catalyst.

When the process for manufacturing the carbon nanotubes 30 is completed inside the reaction chamber 100, the high temperature synthetic substrate 10 is unloaded from the reaction chamber 100 by the first transport body 300 to be accommodated at the second support 422b of the cassette. The high temperature composite substrate 10 is cooled at the second support 422b for a predetermined time. The high temperature synthetic substrate 10 is cooled by natural cooling. Alternatively, cooling means such as cooling water may be used to force cooling.

When the synthetic substrate 10 (on which the carbon nanotube 30 is fabricated) is quickly taken out of the reaction chamber 100 (not cooled at a predetermined temperature), the four synthetic substrates 10 to be waited at the first support 422a of the cassette 420 (using The carbon nanotube tube 30) is loaded into the reaction chamber 100. Also, in the reaction chamber 100, when the temperature of the reaction chamber 120 is maintained at the process temperature, the synthetic substrate 10 is quickly loaded to omit the step of raising the reaction tube 120 up to the process temperature.

The synthetic substrate on which the carbon nanotube 30 is made waits at the second support 422b of the cassette 420 until it drops to a predetermined temperature. A cassette 420 is disposed inside the stage portion 200, and the composite substrate 10 waits at the cassette 420. Since the inside of the stage portion 200 is filled with an inert gas, the synthetic substrate 10 waiting at the cassette 420 is not in contact with external air (especially air). When the synthetic substrate processed in the reaction chamber 100 is lowered to a predetermined temperature, no problem occurs. However, if the high temperature synthetic substrate 10 is exposed to room temperature air, the carbon nanotubes 30 produced on the surface of the synthetic substrate 10 are deformed by reaction with oxygen of the air. In order to suppress deformation of the carbon nanotube 30, a stage portion 200 filled with an inert gas is provided for preventing the synthetic substrate 10 unloaded from the reaction chamber 100 from contacting oxygen.

The composite substrate 10 waiting at the second support 422b of the cassette 420 for a predetermined time is transported to the scooping portion 600 via the second transport valve 700 via the second gate valve 224. The drawn synthetic substrate 10 is accommodated at the first support 422a of the cassette after being coated with the catalyst 20 by the catalyst coating unit 500.

In the system according to the invention, eight synthetic substrates are divided into two groups and alternately subjected to a process of synthesizing the carbon nanotubes 30 in the reaction chamber. Thereby, the amount of processing can be increased to achieve mass production.

FIG. 14 is a perspective view of the first transport body 300. The first conveyor body 300 includes an arm 320, a vane 340, and a driver 360. The driver 360 includes a vertical track 362, a horizontal track 364, a movable frame 366, and a movable base 368. Vertical rails 362 are disposed at the corner portions of the second region 260, respectively. Each of the vertical rails 362 has the shape of a longitudinal long rod to guide the up and down movement of the movable frame 366. The bracket 365 is coupled to each of the vertical rails 362 and travels up and down by a vertical drive (not shown). Longer movable frames 366 are provided in the second direction 44 to face each other. The movable frame 366 is engaged with the bracket 365 to linearly move up and down along the vertical rail 362 by the bracket 365. Each of the movable frames 366 has two ends fixedly mounted in the second direction 44 at the facing bracket 365, and the movable frame 366 is moved up and down by the bracket 365. A horizontal rail 364 is fixedly mounted on the movable frame 366. Each of the longer horizontal tracks 364 is provided in the first direction 42. A horizontal track 364 is provided through the second region 260, and the movable base 368 is mounted on the horizontal track 364 to be movable along the horizontal track 364 in the second direction 44. The arm 320 is fixedly mounted to the movable base 368 and provided to be longer in the first direction. A blade 340 is mounted at the end of the arm 320 for supporting the composite substrate 10.

The first conveyor body 300 includes a cooling member 330 that is provided for cooling the arm 320. In the case where the reaction tube 120 is long, the longer arm 320 is used to load/unload the synthetic substrate 10. However, since the inside of the reaction tube 120 is maintained at an extremely high temperature, the reaction tube 120 is thermally expanded when the arm 320 enters the reaction tube 120. Thereby, the composite substrate 10 is loaded on the blade 340 at the offset position not at the set position. When the composite substrate 340 is transported from the set position on the blade 340, the composite substrate can be loaded on the cassette 420 after being offset from the blade 340 or after being offset from the set position.

A cooling member 330 is provided to prevent heat damage to the arm 320 when the arm 320 enters the reaction tube 120. FIG. 15 illustrates a first transport body 300 that is provided for cooling member 330. The cooling member 330 includes a cooling line 332, a cooling water supply pipe 334, and a cooling water dip tube 336. In the longitudinal direction of the arm 320, a cooling line 332 is provided into the arm 320. A cooling water supply pipe 334 is connected to one end of the cooling line 332 for supplying cooling water to the cooling line 332, and a cooling water dip tube 336 is connected to the other end thereof for cooling from the cooling line 332 water. A valve 334a is mounted on the cooling water supply pipe 334 for opening or closing the internal path of the pipe 334 or controlling the flow rate of the cooling water.

The fully processed composite substrate 10 is heated at a high temperature. When the blade 340 waiting at the stage portion 200 contacts the heated synthetic substrate 10 to unload the heated synthetic substrate 10 from the reaction tube 120, the synthetic substrate 10 can be damaged due to a rapid change in temperature. Thus, the contact area between the blade 340 and the composite substrate 10 should be reduced.

Figure 16 is a perspective view of the blade 340 shown in Figure 15. The blade 340 includes a plate 342 having a flat top surface, and a protrusion 344 that protrudes upward from the plate 342 to contact the composite substrate 10. The plate 342 is made of a high-quality heat-proof material because the plate 342 enters the reaction tube 120 during the process to load/unload the synthetic substrate 10. The protrusions 344 are uniformly provided to the corner area or the entire area of the plate 342 for reducing the contact area between the blade and the composite substrate.

As illustrated in FIGS. 17 and 19, each of the protrusions 344a has a shape of a hemisphere or a polygonal pyramid to be in point contact with the composite substrate 10. Alternatively, as illustrated in FIG. 19, each of the protrusions 344a has a shape of a circular truncated cone or a plurality of turns to be in contact with the surface of the composite substrate 10.

The shape of the protrusion 344 can be modified or modified, and it is not limited to the foregoing embodiment. The protrusion 344 is provided for preventing the rapid change of temperature from damaging the composite substrate 10. The protrusions 344 can vary differently in shape, number, and configuration.

The composite substrate cooled at the second support 444 of the cassette 420 for a predetermined time is transported to the scooping portion 600 by the second transport body 700.

20 and 21 are a perspective view and a top plan view, respectively, of the scooping portion 600. Fig. 22 is a view for explaining a drawing procedure of the carbon nanotube 30 in the drawing portion.

Referring to Figures 20 and 22, the scooping portion 600 includes a stage on which the composite substrate 10 is loaded. Under the stage 620, a take-up container 660 is disposed in which the carbon nanotubes 30 taken from the synthetic substrate 10 are stored. A scooping unit 640 is disposed at the stage 620 for wiping the carbon nanotube tube 30 from the top surface of the synthetic substrate 10 to the scooping container 660. The scooping unit 640 includes a guide rail 646 that is attached to the longitudinal direction of the composite substrate 10. A movable body 644 is mounted at the rail 646. The scooping brush 642 is attached to the movable body 644 for wiping the carbon nanotube 30 on the top surface of the synthetic substrate 10 to the scooping when slidably traveling from one side of the synthetic substrate 10 in the longitudinal direction Container 660. The height of the capture brush 642 is adjustable at the movable body 644.

In the above embodiment, it is described that the pick-up brush 642 brushes the catalyst on the composite substrate 10 as it travels. Alternatively, the scooping brush 642 can be fixed and the table can travel. Preferably, the scooping brush 642 travels to reduce the space of the scooping portion 600.

The number of carbon nanotubes 30 stored in the capture container 660 can be measured by drawing the measurement portion 690 provided under the container 660, and the amount is displayed by being connected to the display portion 692 of the measurement portion 690. The number of carbon nanotubes 30 measured by the portion 690 is measured.

The synthetic substrate 10 in which the carbon nanotube tube 30 is drawn is supplied to the catalyst coating unit 500 by the second transport body 700 to withstand the coating process described above. The composite substrate 10 coated with the catalyst is housed at the first support 422a of the cassette 420.

Referring to Fig. 23, a system for mass-producing the carbon nanotubes 30 described above performs a catalyst coating process (S110), a process for manufacturing the carbon nanotubes 30 (S120), a waiting (cooling) process (S130), and a drawing. Process (S140). In S110, when a dose of catalyst 20 is applied from the catalyst storage tank 520 to the top surface of the composite substrate 10, the coating brush 587 of the brush unit 580 conformally disperses the catalyst 20 to its top surface as it travels. The composite substrate 10 coated with the catalyst 20 is housed in the cassette 420 of the substrate housing portion 400 mounted at the stage portion 200 by the first conveying body 300. Shortly after the processed composite substrate 10 is unloaded from the reaction chamber 100, the composite substrate 10 accommodated at the first support 422a of the cassette 420 is loaded onto the boat 160 of the reaction chamber 100 by the first transport body 300. When the loading of the synthetic substrate 10 is completed, a process is performed inside the reaction chamber 100 to manufacture the carbon nanotubes 30 (S120). After the synthetic substrate 10 unloaded from the reaction chamber 100 is accommodated at the second support 422b of the cassette 420, the composite substrate 10 is cooled for a predetermined time (S130). After the predetermined time, the synthetic substrate 10 is taken out of the stage portion 400 to be conveyed to the scooping portion 600 (S140). The synthetic substrate 10 from which the carbon nanotubes 30 are taken in the scooping portion 600 is sent to the catalyst coating portion 500 to be accommodated at the first support 422a of the cassette 420 after being coated with the catalyst 20. The composite substrate 10 processed inside the reaction chamber 100 is repeatedly subjected to the above-mentioned process after being accommodated at the second support 422b of the cassette 420.

Industrial applicability

As described so far, the present invention has the following advantages: (1) carbon nanotubes can be automatically manufactured; (2) carbon nanotubes can be manufactured in large quantities; (3) carbon nanotubes of synthetic substrates can be synthesized because the process of the reaction chamber is continuously maintained. The rice tubes are continuously synthesized to increase the operating rate of the system; (4) automatically and accurately supply the catalyst to improve process reliability; and (5) automatically pick up the carbon nanotubes to accurately calculate the manufacturing rate.

10. . . Synthetic substrate

10a. . . Button

20. . . catalyst

30. . . Carbon nanotube

42. . . Second direction

44. . . First direction

100. . . Reaction chamber

120. . . Reaction tube/reaction chamber

122a. . . Edge area

122b. . . Edge area

124. . . Central region

132. . . First flange

132a. . . Sealing member

134. . . Second flange

134a. . . Sealing member

140. . . Heating unit

140a. . . Reaction tube

142. . . Edge heater

142a. . . First heater

142b. . . Second heater

144. . . Center heater

146. . . Heating controller

150. . . Cooling member

152. . . Cooling line

156. . . Cooling water supply pipe

156a. . . valve

158. . . Sensor

159. . . Controller

160. . . Boat/reaction room

160'. . . Support frame

162. . . First frame

162a. . . Guide protrusion

164. . . Second frame

164a. . . Guide protrusion

180. . . Heat shield member / gas supply member

182. . . Gas supply

184. . . Gas supply pipe

184a. . . valve

186. . . Heating unit

189. . . Exhaust line

190. . . Heat shield member / shield plate

192. . . Shield

194. . . driver

200. . . Desk section

200a. . . room

222. . . First gate valve

224. . . Second gate valve

240. . . First area

242. . . Top area

244. . . Bottom area

260. . . Second area

280. . . Gas supply member / gas supply portion

300. . . First transport body

320. . . arm

330. . . Cooling member

332. . . Cooling line

334. . . Cooling water supply pipe

334a. . . valve

336. . . Cooling water dip tube

340. . . blade

342. . . board

344. . . Protrusion

344a. . . Protrusion

360. . . driver

362. . . Vertical orbit

364. . . Horizontal track

365. . . bracket

366. . . Movable frame

368. . . Movable base block

400. . . Substrate housing portion

420. . . Card

422. . . Support

422a. . . First support

422b. . . Second support

424. . . roof

426. . . Bottom plate

428. . . Vertical axis

442. . . Vertical orbit

444. . . Horizontal track

446. . . Movable frame

448. . . bracket

500. . . Catalyst coating unit / catalyst coating portion

520. . . Catalyst storage tank

522. . . Top surface

524. . . Side surface

524a. . . Upper

524b. . . Middle part

524c. . . Lower part

526. . . Bottom surface

526a. . . Output hole

540. . . Blender

542. . . Stirring wing

560. . . Fixed supply part / fixed quantity supply unit

562. . . Bottom shield

564. . . Top shield

566. . . Cylinder

568. . . Fixed amount of space

580. . . Brush unit

584. . . guide

586. . . Linear mobile drive

587. . . Coating brush

588. . . Movable body

589. . . Vertical mobile unit

589a. . . roof

589b. . . Bottom plate

589c. . . Guide shaft

589d. . . bracket

590. . . station

592. . . Side panel

594. . . Support protrusion

600. . . Capture part

620. . . station

640. . . Capture unit

642. . . Pick up brush

644. . . Movable body

646. . . guide

660. . . Pick up container

690. . . Measurement section

692. . . Display section

700. . . Second transport body

S110. . . step

S120. . . step

S130. . . step

S140. . . step

X1. . . Waiting position

X2. . . Load/unload position

Figure 1 illustrates a system for making a carbon nanotube using a reaction chamber in accordance with the present invention.

Figure 2 illustrates a cooling line configured to cool an O-ring installed at a reaction chamber.

Figure 3 illustrates a heating unit configured to heat a reaction tube.

4 is a cross-sectional view illustrating an example of a reaction chamber in which a support frame is mounted.

Figure 5 is a cross-sectional view showing another example of a reaction chamber in which a support frame is mounted.

Figure 6 is a configuration diagram of the catalyst coating unit illustrated in Figure 1.

Figure 7 is a top plan view of a cross-sectional view taken along line A-A' of Figure 6.

8 to 10 illustrate the catalyst coating step at the catalyst coating unit.

Figure 11 is a top plan view of the substrate housing portion and the first conveyor body illustrated in Figure 1.

Figure 12 is a side view of the substrate housing portion.

Figure 13 is a perspective view of the first transport body.

Figure 14 is a perspective view of the cassette of the substrate housing portion.

Figure 15 illustrates a cooling member configured to cool the arm illustrated in Figure 14.

Figure 16 is a perspective view of the blade illustrated in Figure 15.

17 through 19 illustrate various examples of protrusions formed at the blades.

Figure 20 is a perspective view of the pickup portion.

Figure 21 is a top plan view of the captured portion illustrated in Figure 20.

Figure 22 illustrates the step of drawing a carbon nanotube at the extraction portion.

Figure 23 is a flow chart illustrating the steps of using a system to produce a carbon nanotube.

10. . . Synthetic substrate

42. . . Second direction

44. . . First direction

100. . . Reaction chamber

120. . . Reaction tube

132. . . First flange

132a. . . Sealing member

134. . . Second flange

134a. . . Sealing member

140. . . Heating unit

152. . . Cooling line

160. . . Boat

180. . . Heat shield member / gas supply member

182. . . Gas supply

184. . . Gas supply pipe

184a. . . valve

186. . . Heating unit

189. . . Exhaust line

190. . . Heat shield member / shield plate

192. . . Shield

194. . . driver

200. . . Desk section

200a. . . room

222. . . First gate valve

224. . . Second gate valve

240. . . First area

242. . . Top area

244. . . Bottom area

260. . . Second area

280. . . Gas supply member / gas supply portion

300. . . First transport body

400. . . Substrate housing portion

500. . . Catalyst coating unit / catalyst coating portion

600. . . Capture part

700. . . Second transport body

Claims (26)

A system for manufacturing a carbon nanotube comprising: a reaction chamber in which a process of manufacturing a carbon nanotube on a synthetic substrate is performed; a stage portion disposed at a side of the reaction chamber and provided for Loading a composite substrate to the reaction chamber and unloading the first transport body of the synthetic substrate from the reaction chamber, the first transport body being disposed only on one side of the reaction chamber; and a substrate receiving portion in which the substrate is accommodated The composite substrate to be loaded into the reaction chamber, or the composite substrate unloaded from the reaction chamber, is waiting therein, the substrate receiving portion comprising: a cassette having a first support in which a load is to be loaded a synthetic substrate to the reaction chamber; and a second support in which a synthetic substrate unloaded from the reaction chamber is accommodated, the first support is stacked on the stacked second support, and the The space of the two supports is larger than the space of the first support. A system for manufacturing a carbon nanotube according to claim 1, wherein the stage portion comprises: a chamber that is isolated from the outside to prevent the synthetic substrate unloaded from the reaction chamber from contacting oxygen. The system for manufacturing a carbon nanotube according to claim 2, wherein the stage portion further comprises: a gas supply member configured to supply an inert gas to an internal space of the reaction chamber . The system for manufacturing a carbon nanotube according to claim 1, wherein the height of the cassette is adjustable. The system for manufacturing a carbon nanotube according to claim 1, further comprising: a catalyst coating unit configured to accommodate the substrate in the stage portion of the composite substrate The top surface of the composite substrate is coated with a catalyst in the middle portion. The system for manufacturing a carbon nanotube according to claim 5, wherein the catalyst coating unit comprises: a catalyst storage tank configured to supply a predetermined amount of catalyst to the synthesis An output aperture of a top surface of the substrate; and a brush unit for wiping the catalyst such that the catalyst supplied to the top surface of the composite substrate has uniformity over the entire surface of the composite substrate thickness. The system for manufacturing a carbon nanotube according to claim 6, wherein the catalyst storage tank comprises: a fixed amount supply portion for a predetermined amount to the top surface of the synthetic substrate catalyst. The system for manufacturing a carbon nanotube according to claim 7, wherein the fixed amount supply portion provides a fixed amount of space at which the predetermined amount of catalyst is impregnated into the catalyst storage tank. In the upper portion of the output aperture, and including a movable top shield and a bottom shield; and wherein the impregnated catalyst is when the top shield is opened Supply to the top surface of the composite substrate via the output aperture. The system for manufacturing a carbon nanotube according to claim 7, wherein the brush unit comprises: a guide rail installed in a longitudinal direction of the composite substrate; and a movable body mounted to Moving along the guide rail; and a coating brush disposed on a table for wiping the catalyst such that the catalyst has a uniform thickness over the entire surface of the composite substrate and by the The moving body is slidably advanced, wherein the height of the coating brush is adjustable. The system for manufacturing a carbon nanotube according to claim 1, further comprising: a drawing portion configured to receive the synthetic substrate processed and waiting in the substrate housing portion And drawing a carbon nanotube synthesized on the synthetic substrate. The system for manufacturing a carbon nanotube according to claim 10, wherein the extracting portion comprises: a drawing container in which a carbon nanotube obtained from a synthetic substrate is stored; and a capturing unit And for brushing the carbon nanotube from the top surface of the synthetic substrate to the pick-up container. The system for manufacturing a carbon nanotube according to claim 11, wherein the extraction unit comprises: a pick-up brush for use from the top surface of the synthetic substrate The carbon nanotubes on the top surface of the composite substrate are brushed while one end slidably travels to the other end. The system for manufacturing a carbon nanotube according to claim 1, further comprising: a first gate valve configured to connect the stage portion to the reaction chamber; and a heat shielding member, It is installed between the first gate valve and the reaction chamber to prevent heat transfer inside the reaction chamber to the first gate valve. The system for manufacturing a carbon nanotube according to claim 1, wherein the reaction chamber comprises: a reaction tube configured to provide a space for accommodating a synthetic substrate, the reaction tubes having respective a flange connecting the front end and the rear end; a sealing member provided between the flange and the reaction tube; a heating unit for heating the reaction tube to a predetermined temperature; and a cooling member for Cooling the sealing member, wherein the heating unit comprises: a center heater for heating a central region of the reaction tube; an edge heater for heating the front end adjacent to the reaction tube and the An edge region of the rear end; and a heating controller for independently controlling the center heater and the edge heater. The system for manufacturing a carbon nanotube according to claim 14, wherein the edge heater comprises: a first heater for heating the edge region of the reaction tube adjacent to the flange connected to the front end of the reaction tube; and a second heater for heating adjacent to The edge region of the reaction tube of the flange to which the rear end of the reaction tube is connected, wherein the heating controller independently controls the first heater and the second heater. The system for manufacturing a carbon nanotube according to claim 1, wherein the first conveying body comprises: a blade configured to support the synthetic substrate; and an arm, wherein The blade is fixedly coupled and linearly movable by the driver, wherein the blade comprises: a plate; and a plurality of protrusions projecting upwardly from the plate to contact the composite substrate. The system for manufacturing a carbon nanotube according to claim 1, wherein the first conveying body comprises: a blade configured to be used for the synthetic substrate; and an arm fixed to the blade Coupling and linearly movable by the driver; and a cooling member for cooling the arm to prevent thermal deformation of the arm when the arm enters the reaction chamber. The system for manufacturing a carbon nanotube according to claim 1, wherein the reaction chamber comprises: a reaction tube configured to provide a space for accommodating a synthetic substrate, The reaction tube has a front end and a rear end each connected to the flange; a heating unit for heating the reaction tube to a predetermined temperature; and a support frame provided to the reaction tube for supporting the synthetic substrate The support frame includes a plurality of frames that are provided to protrude inward from the inner wall of the reaction tube toward the reaction tube, and are spaced apart from each other in the up and down direction for supporting a plurality of synthetic substrates . The system for manufacturing a carbon nanotube according to claim 1, wherein the reaction chamber comprises: a reaction tube in which a carbon nanotube is manufactured; a heating unit for heating the reaction tube; a supply tube configured to supply a source gas into the reaction tube; and a heating member for heating the source gas before the source gas is supplied into the reaction tube. A system for manufacturing a carbon nanotube comprising: a reaction chamber in which a process of manufacturing a carbon nanotube on a synthetic substrate is performed; a stage portion connected to one side of the reaction chamber and having an external isolation An internal space to prevent the synthetic substrate unloaded from the reaction chamber from contacting oxygen; a first transport body mounted inside the stage portion for loading a synthetic substrate into the reaction chamber and unloading the synthesis from the reaction chamber a substrate, the first transport body is disposed only on one side of the reaction chamber; and a substrate housing portion in which the chamber to be loaded into the reaction chamber is accommodated a substrate, or the composite substrate unloaded from the reaction chamber, waiting therein; a scooping portion for taking out the synthetic substrate from the substrate receiving portion to extract carbon nanowires fabricated on the synthetic substrate a catalyst coating unit configured to coat a top surface of the synthetic substrate with a catalyst before the synthetic substrate is housed in the substrate receiving portion of the stage portion; and a second transport body, It is used to transport the composite substrate between the scooping portion and the substrate receiving portion and between the catalyst applying unit and the substrate receiving portion. The system for manufacturing a carbon nanotube according to claim 20, wherein the substrate accommodating portion comprises: a cassette having: a first support in which a synthetic to be loaded into the reaction chamber is accommodated a substrate; and a second support in which the composite substrate unloaded from the reaction chamber is contained. The system for manufacturing a carbon nanotube according to claim 21, wherein a space of the second support is larger than a space of the first support. The system for manufacturing a carbon nanotube according to claim 20, wherein the stage portion comprises: a chamber that is isolated from the outside to prevent the synthetic substrate unloaded from the reaction chamber from contacting oxygen; A gas supply member configured to supply an inert gas to an interior space of the chamber. For the manufacture of carbon nanotubes as described in claim 20 The system further comprising: a first gate valve configured to connect the stage portion to the reaction chamber; and a heat shield member mounted to the first gate valve and the reaction chamber To prevent heat transfer inside the reaction chamber to the first gate valve. The system for manufacturing a carbon nanotube according to claim 20, wherein the stage portion comprises: a first region disposed adjacent to the reaction chamber, wherein the substrate receiving portion is disposed And a second region that is collinear based on the reaction chamber at which the first region is disposed to be opposite the reaction chamber, wherein the first transport body is disposed, wherein the first region The region includes: an upper region disposed to be collinear with the reaction chamber and the substrate receiving portion; and a lower region extending from the upper region in a vertical direction of the collinear direction, wherein The substrate housing portion includes a cassette that is provided for receiving a composite substrate and is movable between the upper region and the lower region. The system for manufacturing a carbon nanotube according to claim 25, wherein the catalyst coating unit, the second conveying body, and the drawing portion are disposed outside the table portion, wherein The second transport body is based on the upper region of the first region It is disposed opposite to the lower region and disposed between the catalyst coating unit and the scooping portion.