KR20070073397A - Substrate transfer apparatus and system producting carbon nano tube with it - Google Patents

Abstract

A substrate transfer apparatus and a carbon nano tube generating system with the same are provided to prevent the damage of a substrate due to an abrupt variation of temperature of the substrate by minimizing a contact area between the substrate and a blade using a plurality of protrusions formed on an upper surface of the blade. A substrate transfer apparatus(300) includes a blade, an arm and a driving unit. The blade(340) is used for loading a substrate. The arm(320) is used for transferring the blade. The driving unit(365) is used for driving the arm. A plurality of protrusions are formed on an upper surface of the blade, so that the contact area between the substrate and blade is minimized.

Description

SUBSTRATE TRANSFER APPARATUS AND SYSTEM PRODUCTING CARBON NANO TUBE WITH IT}

1 is a configuration diagram illustrating a production system of carbon nanotubes according to the present invention.

FIG. 2 is a diagram illustrating the catalyst coating of FIG. 1.

3 is a plan view taken along the line AA ′ of FIG. 2.

4A to 4C are diagrams for explaining the catalyst application process step by step in the catalyst coating unit.

5 is a plan view illustrating the substrate storage unit and the substrate transfer apparatus of FIG. 1.

6 is a side view of the substrate storage portion.

7 is a perspective view showing a cassette of the substrate storage portion.

8 is a perspective view of the substrate transfer apparatus.

FIG. 9 is an enlarged view of the blade shown in FIG. 8.

10A through 10C illustrate various embodiments of the blade shown in FIG. 8.

11 is a perspective view of a recovery part of FIG. 1.

12 is a plan view of the recovery part of FIG.

13 is a view for explaining the carbon nanotube recovery process in the recovery unit.

14 is a process flow diagram in a system for carbon nanotube production.

* Explanation of symbols for the main parts of the drawings *

100: reaction chamber

200: station

300: substrate transfer device

400: substrate storage

500: catalyst coating unit

600: recovery unit

700: auxiliary substrate transfer device

The present invention relates to a substrate transfer apparatus for use in a system for producing carbon nanotubes.

Carbon nanotubes (carbon nanotubes) is formed by combining three carbon atoms adjacent to one carbon atom to form a hexagonal ring, and the hexagonal ring is a honeycomb-shaped plane is rolled to form a cylindrical or tube.

Carbon nanotubes have properties that can exhibit metallic conductivity or semiconductor conductivity depending on their structure. As a material, it can be widely applied to various technical fields, and it is attracting attention as a new material of the future. For example, carbon nanotubes are applicable to electrodes of electrochemical storage devices such as secondary cells, fuel cells or supercapacitors, electromagnetic shielding, field emission displays, or gas sensors.

Most of these carbon nanotubes consist of small quantities of hand-dependent production. Particularly, a process of applying a catalyst to a synthetic substrate, loading / unloading a synthetic substrate into a reactor, and recovering carbon nanotubes from the synthetic substrate by unloading a synthetic substrate on which carbon nanotubes are synthesized in a reaction tube It is difficult to carry out continuous process and mass production because the back is made by worker.

In addition, the operation of loading / unloading a composite substrate into the reactor is performed by a predetermined substrate transfer member. The substrate transfer member has a blade that supports the bottom surface of the composite substrate, and transfers the composite substrate by mounting the composite substrate on the upper surface of the blade during the process. However, during the process, the temperature of the composite substrate in the reactor is very high, but the blade temperature is relatively very low, and thus, when the substrate transfer member loads / unloads the composite substrate, the composite substrate may be damaged by a sudden temperature change. .

It is an object of the present invention to provide a substrate transfer apparatus for preventing breakage of the composite substrate during loading / unloading of the composite substrate for producing carbon nanotubes.

It is also an object of the present invention to provide a carbon nanotube production system and method capable of mass production of carbon nanotubes.

It is also an object of the present invention to provide an automated carbon nanotube production system and method.

It is also an object of the present invention to provide a system and method for producing carbon nanotubes that can improve the plant operation rate by enabling a continuous process.

Substrate transfer apparatus according to the present invention for achieving the above object comprises a blade on which a composite substrate used for carbon nanotube generation is seated, an arm for transporting the blade, a driving unit for driving the arm, the upper portion of the blade The surface is formed with a plurality of protrusions in contact with the composite substrate.

According to an embodiment of the present invention, the protrusions are pointed contact between the composite substrate and the blade.

According to an embodiment of the present invention, the protrusions are at least one shape selected from the group consisting of hemispheres, truncated cones, cones, or polygonal pyramids.

According to an exemplary embodiment of the present invention, the driving unit includes a plurality of vertical rails, a bracket moving up and down along the vertical rails, a vertical moving member having a moving frame fixedly coupled to the bracket and moving together with the bracket, and a plurality of vertical rails. And horizontal moving members having a moving block which is linearly reciprocated horizontally along the horizontal rails.

The carbon nanotube generation system according to the present invention for achieving the above object is a reaction chamber in which a carbon nanotube generation process is performed on a synthetic substrate, a station unit installed to be connected to the reaction chamber, and installed inside the station unit, A substrate transfer device for loading / unloading composite substrates into / from the reaction chamber, the substrate transfer device comprising: a blade on which a substrate used for producing carbon nanotubes is seated, an arm for transferring the blade, and driving the arm; Including a driving unit, a plurality of protrusions are formed on the upper surface of the blade in contact with the substrate.

According to an embodiment of the present invention, the carbon nanotube generation system is a recovery unit for recovering the carbon nanotubes produced on the synthetic substrate by withdrawing the synthetic substrate from the substrate storage, the synthesis of carbon nanotubes recovered from the recovery unit A catalyst coating unit for applying a catalyst to the surface of the substrate, a substrate storage unit for the synthetic substrates to be loaded into the reaction chamber and the synthetic substrates unloaded from the reaction chamber, the recovery unit, the catalyst coating unit, and the substrate The apparatus further includes an auxiliary substrate transfer device that is responsible for transferring the composite substrate between the storage units.

According to an embodiment of the present invention, the protrusions are pointed contact between the composite substrate and the blade.

According to an embodiment of the present invention, the protrusions are at least one shape selected from the group consisting of hemispheres, truncated cones, cones, or polygonal pyramids.

According to an exemplary embodiment of the present invention, the driving unit includes a plurality of vertical rails, a bracket moving up and down along the vertical rails, a vertical moving member having a moving frame fixedly coupled to the bracket and moving together with the bracket, and a plurality of vertical rails. Horizontal rails, and a horizontal moving member having a moving block for linear reciprocating horizontally along the horizontal rail.

Hereinafter, with reference to the accompanying drawings will be described in detail a substrate transfer apparatus and a carbon nanotube production system having the same according to an embodiment of the present invention. Embodiment of the present invention may be modified in various forms, the scope of the present invention is not limited to the embodiments described below. This embodiment is provided to more completely explain the present invention to those skilled in the art. Accordingly, the shape of elements in the figures is exaggerated to emphasize clear explanation.

(Example)

Hereinafter, an embodiment of the present invention will be described in more detail with reference to FIGS. 1 to 12. The present invention provides a carbon nanotube production system 1 capable of automated and mass production. 1 is a schematic view showing an example of a carbon nanotube production system of the present invention. Referring to FIG. 1, the system 1 has a composite substrate 10, a reaction chamber 100, and a post-process chamber.

The synthetic substrate 10 is used as a base plate on which carbon nanotubes (30 in FIG. 7) are synthesized. The composite substrate 10 on which the carbon nanotubes 30 are synthesized includes a silicon wafer, an induim tin oxide (ITO) substrate, coated glass (ITO-coated glass), soda-lime glass, corning glass, alumina, and the like. This can be used. However, if the carbon nanotubes 30 have sufficient rigidity to synthesize (grow, produce), various types of synthetic substrates may be used in addition to the above-described substrates.

The reaction chamber 100 performs a process of generating carbon nanotubes 30 on the composite substrate 10, and the pre- and post-processing chambers are used for the composite substrate 10 loaded / unloaded from / to the reaction chamber 100. Pretreatment and post-treatment processes are carried out. The pretreatment step and the post-treatment step include a step of applying the catalyst 20 to the substrate, a step of recovering the carbon nanotubes 30 generated on the synthetic substrate, and the like. The pre- and post-processing chamber includes a station unit 200, a first transfer device 300, a substrate storage unit 400, a catalyst coating unit 500, a recovery unit 600, and a second transfer device 700.

The station unit 200 prevents the composite substrate 10 unloaded from the reaction chamber 100 from being exposed to the atmosphere. The first transfer device 300 loads / unloads the composite substrate into / from the reaction chamber 100. Substrate storage 400 stores a composite substrate that is loaded or unloaded into / from reaction chamber 100. The catalyst applicator 500 performs a process of applying the catalyst 20 on the synthetic substrate 10 before the synthetic substrate 10 is loaded into the reaction chamber 100. The recovery unit 600 performs a process of recovering the carbon nanotubes 30 generated on the synthetic substrate 10 unloaded from the reaction chamber 100 from the synthetic substrate 10. The second transfer device 700 transfers the synthetic substrate 10 between the substrate storage unit 400, the catalyst application unit 500, and the recovery unit 600.

According to an example, the station unit 200 is disposed side by side with the reaction chamber 100 on one side of the reaction chamber 100. The station unit 200 has a first area 240 and a second area 260. The first region 240 is disposed adjacent to the reaction chamber 100, and the substrate storage 400 is positioned in the first region 240. The second region 260 is provided in a direction opposite to the reaction chamber 100 with respect to the first region 240 and the first transfer device 300 is located. The reaction chamber 100 and the second region 260 are disposed in the same direction in the first direction 42. The first region 240 has an upper region 242 and a lower region 244. The upper region 242 is a region located on the same line as the reaction chamber 100 and the second region 260, and the lower region 244 is a second perpendicular to the first direction 42 from the upper region 244. It is an area extending in the direction 44. The first region 240 and the second region 260 are generally rectangular in shape. Due to the above structure, the station 200 has a generally '-' shape. The catalyst applicator 500, the recovery part 600, and the auxiliary substrate transfer device 400 are positioned adjacent to the station part 200, and have a lower area based on the upper area 242 of the first area 240. It is disposed side by side in a direction parallel to the first direction 42 at a position opposite to the (244). The auxiliary substrate transfer apparatus 400 is disposed at a position opposite to the first region 240 of the station unit 200. In addition, the auxiliary substrate transfer device 400 is located between the catalyst applying unit 500 and the recovery unit 600.

Next, each component of the system of the present invention will be described in detail.

Referring to FIG. 1, the reaction chamber 100 has a reaction tube 120 made of a heat resistant material such as quartz or graphite. Reactor 120 may be provided in a substantially cylindrical shape. Flanges 132 and 134 for sealing the inside of the reactor 120 from the outside are installed at the front and bottom of the reactor 120. In the reactor 120, a boat 160 on which the synthetic substrates 10 are placed is installed. Outside the reactor 120, a heating unit 140 for heating the reactor 120 to the process temperature is installed. As the heating part 140, a heating wire having a coil shape may be used to surround the outer wall of the reactor 120. Reactor 120 during the process may be maintained at approximately 500-1100 degrees Celsius (℃).

Only one boat 160 may be provided in the reactor 120, or a plurality of boats 160 may be provided. The boat 160 is provided with a sufficiently large size so that a plurality of synthetic substrates 10 may be placed in one boat 160 along the longitudinal direction of the reactor 120 (the first direction 42 described above). . Optionally, the boat 160 may have a size and a structure capable of supporting the plurality of composite substrates 10 in the vertical direction and the longitudinal direction, respectively. According to an example, the boats 160 have a size and a structure capable of supporting the composite substrate 10 two vertically and two longitudinally. The boats 160 may be fixedly installed in the reactor 120.

In addition, the boat 160 may be provided in a size capable of supporting one composite substrate 10. In this case, one or more boats 160 may be provided. When a plurality of boats 160 are provided, a plurality of boats 160 may be disposed along the longitudinal direction of the reactor 120 (first direction 42 described above), or optionally perpendicular to the first direction 42. It can be stacked in one vertical direction.

The flange 132 installed at the front end of the reactor 120 is equipped with a gas inlet port 182 into which source gas supplied from a gas supply unit (not shown) is injected. As the source gas, at least one selected from the group consisting mainly of acetylene, ethylene, methane, benzene, xylene, carbon monoxide and carbon dioxide may be used. The source gas is decomposed into radicals by pyrolysis, and these radicals react with a catalyst applied on a synthetic substrate to synthesize carbon nanotubes.

The flange 134 installed at the other end of the reactor 120 is equipped with a gas exhaust port 184 for discharging residual gas inside the reactor 120 after the reaction.

In the present embodiment, a reaction chamber 100 having a structure to which pyrolysis of hydrocarbon is applied by pyrolyzing hydrocarbons to produce carbon nanotubes 30 is described as an example, but this is only one example. In the system 100 of the present invention, a reaction chamber having a structure to which various generation methods such as laser deposition, plasma chemical vapor deposition, thermochemical vapor deposition, and flame synthesis can be applied may be used.

The station unit 200 includes a chamber 200a isolated from the outside. A first gate valve 222 is installed between the station unit 200 and the reaction chamber 100 to open and close a passage through which the composite substrate 10 moves, and the station unit 200 and the auxiliary substrate transfer device 700 are installed therein. The second gate valve 224, which opens and closes the passage through which the composite substrate 10 moves between them, is installed between them.

The station unit 200 is provided with a gas supply member 280 for supplying an inert gas such as nitrogen, argon, and the like into the station unit 200. The inert gas removes air (particularly oxygen) inside the station unit 200 and maintains an inert gas atmosphere inside the station unit 200. This prevents the hot carbon nanotubes 30 generated on the composite substrate 10 from contacting with oxygen when the composite substrate 10 is unloaded from the reaction chamber 100 in the station unit 200. The gas supply member 280 is preferably provided in the first region 240.

When the first gate valve 222 is disposed adjacent to the reaction chamber 100, the first gate valve 222 may be damaged by radiant heat in the reaction chamber 100. In order to prevent this, the length of the reaction chamber 100 may be sufficiently long so that the distance between the heating unit 140 and the first gate valve 222 is sufficiently maintained. In this case, however, the system 1 becomes larger due to the increase in the length of the reaction chamber 100.

According to the present embodiment, the heat between the first gate valve 222 and the reaction chamber 100 to prevent the system 1 from being enlarged and to prevent the first gate valve 222 from being damaged by radiant heat. The blocking member 190 is installed. As the heat blocking member 190, a blocking plate of a material having a low thermal conductivity such as alumina for blocking radiant heat transmitted from the reaction chamber 100 to the first gate valve 222 may be used. For example, when the barrier plate is used as a general metal material, cooling water may be supplied to increase thermal deformation and barrier efficiency of the barrier plate.

The blocking member 190 is positioned in front of the first gate valve 222 while the first gate valve 222 is closed. When the first gate valve 222 is opened, the blocking member 190 moves the movement path of the composite substrate 10. Move to a location that does not interfere.

Before the synthetic substrate 10 is loaded into the reaction chamber 160, the catalyst 20 (metal film) is applied to the upper surface of the reaction chamber 160 in the catalyst applying unit 500. FIG. 2 is a configuration diagram of the catalyst applicator 500 shown in FIG. 1, and FIG. 3 is a plan view of the catalyst applicator 500 viewed from the top after cutting along the line A-A 'of FIG. 2.

2 and 3, the catalyst applicator 500 includes a catalyst storage tank (hopper) 520, a metering supply 560, a brush unit 580, and a stage 590. During the process, the synthetic substrate 10 is placed on the stage 590. The catalyst storage tank 520 is disposed above the stage 590 and has a discharge port 526a for supplying a predetermined amount of the catalyst 20 to the upper surface of the synthetic substrate 10. The brush unit 580 spreads the catalyst 20 supplied to the upper surface of the synthetic substrate 10 to a uniform thickness on the upper surface of the synthetic substrate 10.

The stage 590 is installed to protrude inwardly to the side plates 592 and the respective side plates 592 which are arranged to face each other at a predetermined interval so that the composite substrate 10 is located therebetween, and thus the edge of the composite substrate 10. It has a plurality of support protrusions 594 supporting the area. A plurality of support protrusions 594 may be installed on each side plate 592.

The brush unit 580 includes a guide rail 584, an application brush 587, and a movable body 588. The guide rails 584 are installed in the longitudinal direction on both sides of the stage 590 on which the composite substrate 10 is placed. The movable body 588 is movably installed on the guide rail 584, and the movable body 588 is linearly moved by a known linear movement driver 586 such as a linear motor drive method, a cylinder drive method, and a motor drive method. The coating brush 587 is positioned above the stage 590, and spreads the catalyst 20 in a uniform thickness on the entire surface of the synthetic substrate 10. Both ends of the coating brush 587 are connected to the movable body 588 and are moved in a slide manner together with the movable body 588. The application brush 587 may be provided in a plate shape having a specific inclined surface with respect to the advancing direction.

The coating brush 587 is vertically moved by the vertical mover 589 so that the coating brush 587 can be adjusted in height on the movable body 588 according to the coating thickness of the catalyst 20 applied on the upper surface of the synthetic substrate 10. Is moved to. The vertical mover 589 includes an upper plate 589a fixedly coupled to the upper end of the movable body 588, a lower plate 589b fixedly coupled to the lower end of the movable body 588 to face the upper plate 589a, and an upper plate 589a and the lower plate 589b. ) Has a guide shaft 589c disposed vertically. The guide shaft 589c is linearly moved up and down along the guide shaft 589c by a driver (not shown), and a bracket 589d to which the application brush 587 is fixedly mounted is provided.

The catalyst storage tank 520 supplies the catalyst 20 stored therein onto the synthetic substrate 10. Catalyst storage tank 520 has an upper surface 522, a side 524, and a lower surface 526 with an outlet 526a formed therein. Side 524 has a generally vertical upper portion 524a, an intermediate side portion 524b extending downwardly therefrom and inclined inwardly downward, and a lower portion 524c extending generally vertically downwardly therefrom. . Due to the above-described structure, a large amount of catalyst 20 is stored in the space provided by the upper portion 524a in a region corresponding to the same height as compared to the space provided by the lower portion 524c. Due to the shape of the intermediate side portion 524b described above, the catalyst 20 in the space provided by the upper portion 524a is smoothly supplied into the space provided by the lower portion 524c.

The catalyst storage tank 520 is provided with a quantitative supply unit 560 for supplying the catalyst 20 by the amount set to the upper surface of the synthetic substrate 10. The metered feeder 560 has an upper barrier plate 564 and a lower barrier plate 562 that can provide a quantitative space 568 in which a set amount of catalyst 20 can be contained. The upper blocking plate 564 and the lower blocking plate 562 are provided at the lower side 524c. The metering space 568 is located above the outlet 526a of the catalyst storage tank 520, the upper blocking plate 564 is provided to the top of the metering space 568, the lower blocking plate 562 is the metering space ( 568). The upper block plate 564 and the lower block plate 562 are operated by driving means such as the cylinder 566. When the upper block 564 is closed while the lower block 562 is closed, the quantitative space 568 filled with the amount of catalyst 20 set between the lower block 562 and the upper block 564 is filled. Is provided again.

When the lower blocking plate 562 is opened, the catalyst 20 contained in the metering space 568 is supplied to the upper surface of the synthetic substrate 10 through the discharge port 526a. On the other hand, an agitator 540 for stirring the catalyst 20 is installed in the middle side portion 524b of the catalyst storage tank 520. The stirring blade 542 of the stirrer 540 rotates before the catalyst 20 is supplied to the quantitative space to remove the empty space inside the catalyst storage tank 520 and at the same time, the catalyst 20 naturally moves to the quantitative space 568. Has a role of inducing supply.

4A to 4C are diagrams for explaining the catalyst application process in the catalyst applying unit 500 step by step. 4A to 4C, when the composite substrate 10 is placed on the stage 590 by the second transfer device 700, the lower blocking plate 562 is operated by the cylinder 566 to move laterally. While moving, the lower part of the quantitative space 568 is opened, and the set amount of the catalyst 20 contained in the quantitative space 568 falls to the upper surface of the synthetic substrate 10 (FIG. 4A). Catalyst 20 stacked on the upper surface of the synthetic substrate 10 is applied to the entire surface of the synthetic substrate 10 by a brush unit 580 in a uniform thickness (Figs. 4b, 4c). That is, the application brush 587 uniformly applies the catalyst 20 to the entire surface of the synthetic substrate 10 while slidingly moving from one end to the other end of the synthetic substrate 10 together with the moving body 588. In this case, a vibrator (not shown) may be additionally provided to apply a fine vibration to the application brush 587 or the synthetic substrate 10 for uniform application of the catalyst 20. Here, the catalyst 20 may be in the form of a powder in which transition metals such as iron, platinum, cobalt, nickel, and yttrium, and alloys thereof, and porous materials such as Mg0, Al203, and Si02 are mixed. Or it may be a liquid catalyst 20 containing such a material. When the catalyst 20 is in a liquid phase, it may include a catalyst storage tank, a supply line, a pump for quantitative supply installed on the supply line, and a supply nozzle for supplying the liquid catalyst 20 to the upper surface of the synthetic substrate.

In the above-described example, it has been described that the catalyst 20 is uniformly coated on the synthetic substrate 10 while the application brush 587 moves. Alternatively, the application brush 587 is fixed and the stage can be moved. However, in order to reduce the space of the catalyst coating unit 500, it is preferable that the coating brush 587 is moved as in the above-described example.

In addition, in the above-described example, the catalyst 20 is applied on the synthetic substrate 10 separately from the catalyst applying unit 500, and in the reaction chamber 100 on the synthetic substrate 10 to which the catalyst 20 is applied. It has been described as generating carbon nanotubes 30. Alternatively, however, the catalyst applicator may be removed, and the catalyst gas and the source gas may be supplied in the reaction chamber to apply the catalyst and generate carbon nanotubes on the synthetic substrate.

5 is a plan view of the substrate storage unit 400 and the substrate transfer device 300, Figure 6 is a side view of the substrate storage unit. 5 and 6, the substrate storage unit 400 includes a cassette 420 for storing the composite substrate 10, vertical rails 442, horizontal rails 444, and moving frames 446. Have The vertical rails 442 are disposed at corners of the first region 240, respectively. The vertical rails 442 have a long rod shape in the vertical direction and guide the vertical movement of the moving frame 446. Each vertical rail 442 is coupled with a bracket 448 that is moved up and down by a vertical drive (not shown) along the vertical rail 442. Each moving frame 446 is provided long along the first direction 42 and is disposed to face each other. The moving frame 446 is fixedly coupled to the bracket 448 and linearly moves up and down along the vertical rail 442 together with the bracket 448. Both ends of each moving frame 446 are fixed to brackets facing each other in the first direction 42, and the moving frames 446 are moved up and down together with the bracket 448. The horizontal rail 444 is fixedly installed on the moving frame 446. Each horizontal rail 444 is provided long along the second direction 44, and the horizontal rails 444 are disposed to face each other. The horizontal rail 444 is provided over the entire area of the first region 240, and the cassette 420 is mounted on the horizontal rail 444 to be movable in the second direction 44 along the horizontal rail 444.

As shown in Fig. 5, the cassette 420 is moved horizontally between the standby position indicated by the dotted line and the loading / unloading position X2 indicated by the solid line (just before the first gate valve 222 connected to the reaction chamber). do. The standby position X1 is a position in the lower region 244 of the first region 240 and the loading / unloading position X2 is a position in the upper region 242 of the first region 240. The cassette 420 is loaded / unloaded position (X2) when loading / unloading the composite substrate 10 into / from the reaction chamber 100 and when transferring the composite substrate 10 by the second transfer device 700. Is moved to, and when waiting to lower the temperature of the composite substrate 10 is moved to the standby position (X1).

7 is a perspective view of the cassette 420. The composite substrate 10 to be loaded into the reaction chamber 100 and the composite substrates 10 unloaded from the reaction chamber 100 are stored in the cassette 420. Referring to FIG. 7, the cassette 420 has supports 422, an upper plate 424 and a lower plate 426, and vertical axes 428. The upper plate 424 and the lower plate 426 are generally provided in a rectangular shape and are disposed to face each other up and down. The vertical axes 428 connect four corner portions of the upper plate 424 and the lower plate 426 facing each other. Support portions 422 supporting the composite substrate 10 are installed on the vertical axis 428 so that the composite substrate 10 is stacked and stored in the cassette 420. Each support 422 has four support blocks 423 for supporting the edge of the composite substrate 10. The supports 422 are grouped into two groups. The supports 422a (hereinafter referred to as the first support) belonging to the first group support the composite substrates 10 to be loaded into the reaction chamber 100, and the supports 422b (hereinafter referred to as the second support) belonging to the second group react. The unloaded composite substrates 10 are supported from the chamber 100. In an example, four first support parts 422a and four second support parts 422b are provided, and the first support parts 422a are provided to be positioned above the second support parts 422b.

The vertical space between the second supports 422b is wider than the vertical space between the first supports 422a. Due to the structure described above, the carbon nanotubes 30 (CNT) generated on the upper surface of the unloaded synthetic substrate 10 from the reaction chamber 100 are in contact with the adjacent composite substrate 10 while reducing the overall height of the cassette 420. It can provide enough space to prevent it.

The composite substrates 10 stored in the first supporting portions 422 of the cassette 420 are loaded into the reaction chamber 100 by the substrate transfer device 300. Four synthetic substrates 10 are placed in the boat 160 of the reaction chamber 100. The substrate transfer device 300 sequentially loads and unloads a composite substrate into / from the reaction chamber 100 one by one. When the loading of the synthetic substrates 10 is completed, a process for generating the carbon nanotubes 30 is performed in the reaction chamber 100. During the process in the reaction chamber 100, another four composite substrates 10 are waiting for the first support portion 422 of the cassette 420 after applying the catalyst in the catalyst coating portion 500. When the production process of the carbon nanotubes 30 in the reaction chamber 100 is completed, the synthetic substrate 10 in a high temperature state is unloaded from the reaction chamber 100 by the substrate transfer device 300 to remove the cassette 420. The high temperature synthetic substrate 10 is stored in the second support part 422b and is cooled by the second support part 422b for a predetermined time. Cooling is achieved by natural cooling. Optionally, forced cooling may be performed using a cooling means such as cooling water or the like. On the other hand, the composite substrates 10 on which the carbon nanotubes 30 have been generated are rapidly removed from the reaction chamber 100 without waiting for the temperature to drop to a certain temperature. When withdrawn, four synthetic substrates (synthetic substrates waiting for generation of the carbon nanotubes 30) 10 which are waiting at the first support 422a of the cassette 420 are loaded into the reaction chamber 100. As such, in the reaction chamber 100, the temperature increase process for increasing the process temperature of the reactor 120 may be omitted by rapidly loading the composite substrates 10 while the temperature of the reactor 120 maintains the process temperature.

The composite substrates 10 on which the carbon nanotubes 30 are formed are waited at the second support portions 422b of the cassette 420 until they fall below a predetermined temperature. The cassette 420 on which the synthetic substrates 10 are located is located inside the station unit 200. Since the inside of the station part 200 is filled with inert gas, the synthetic substrates 10 waiting in the cassette 420 are not in contact with outside air (especially oxygen). For example, the synthesis substrate 10 that has been processed in the reaction chamber 100 may not be in a state where the temperature falls below a predetermined temperature. However, when the synthesis substrate 10 is exposed to the atmosphere at room temperature in a high temperature state, the surface of the synthesis substrate 10 The produced carbon nanotubes 30 react with oxygen in the atmosphere to cause deformation. In the present invention, in order to prevent such a problem, the unloaded synthetic substrate 10 in the reaction chamber 100 is provided with a station part 200 filled with an inert gas as described above so as not to come into contact with oxygen.

Meanwhile, the composite substrates 10 waited for a predetermined time in the second support parts 422b of the cassette 420 are transferred to the recovery part 600 by the second transfer device 700 through the second gate valve 224. Transferred. After the carbon nanotubes 30 have been recovered from the recovery part 600, the synthetic substrate 10 is coated with the catalyst 20 from the catalyst applicator 500, and again, the first support part 422a of the cassette 420. ) Is stored.

As described above, in the system of the present invention, a total of eight synthetic substrates are divided into two groups, and thus the carbon nanotube 30 synthesis process is continuously performed in the reaction chamber alternately, and thus the throughput can be expected to be improved, thereby allowing mass production. There is this.

FIG. 8 is a perspective view of the substrate transfer apparatus, and FIG. 9 is an enlarged view of the blade 340 shown in FIG. 8. 10A to 10C illustrate various embodiments of the protrusions 344 illustrated in FIG. 8.

Referring to FIG. 8, the substrate transfer apparatus 300 includes an arm 320, a blade 340, and a driver 360 supporting the composite substrate 10.

Arm 320 is fabricated in a rod shape. The arm 320 is moved up and down and horizontally by the driving unit 360. A blade 340 is installed at the front end of the arm 320. The arm 320 is driven by the driving unit 360 to cause the blade 340 to linearly move between the upper portion of the boat 160 and the station 200 of the reactor 120. The arm 320 may be provided with a cooling line (not shown) through which a cooling fluid flows so that the arm 320 is not damaged by heat generated from the reactor 120 during the process.

Referring to FIG. 9, the blade 340 includes a body 342 and a protrusion 344. The body 342 has a flat shape with a flat top surface. Since the body 342 is introduced into the reactor 120 for loading / unloading of the composite substrate 10 during the process, it is preferable that the body 342 is made of a material having excellent heat resistance.

In addition, a plurality of protrusions 344 are disposed on the upper surface of the body 342 to support the composite substrate 10. Since the synthesized substrate 10 has been heated to a high temperature, the blade 340 waiting at the station unit 200 at room temperature may come into contact with each other to unload the high temperature synthesized substrate 10 from the reactor 120. At this time, the synthetic substrate 10 may be damaged by a sudden temperature change. Therefore, it is preferable that each of the protrusions 344 has a minimum area of contact with the composite substrate 10.

According to one embodiment of the present invention, the protrusions 344a are formed to be in point contact with the composite substrate 10. For example, referring to FIG. 10A, each of the protrusions 344a has a hemispherical shape. That is, each of the protrusions 344a protrudes in a hemispherical shape from the upper surface of the body 342, and makes point contact with the vertex of the protrusion 344a and the bottom surface of the composite substrate 10.

Alternatively, referring to FIG. 10B, each of the protrusions 344b has a conical shape. Thus, the blade 340 makes point contact between the vertices of each of the protrusions 344b and the bottom surface of the composite substrate 10 during the loading / unloading of the composite substrate 10.

Alternatively, each of the protrusions 344 may be selectively provided in a polygonal pyramid shape to be in point contact with the composite substrate 10.

According to the exemplary embodiment described above, the blades 340 are formed with protrusions 344 supporting the synthetic substrate 10 in point contact with the synthetic substrate 10. Therefore, since the composite substrate 10 heated to a high temperature during the process has a minimum contact area when it contacts the blade 340 at room temperature, breakage of the composite substrate 10 due to a sudden temperature change can be prevented.

Here, according to another embodiment of the present invention, the protrusion 344 may be in surface contact with the composite substrate 10. Referring to FIG. 10C, each of the protrusions 344c has a truncated cone shape. Thus, the blade 340 is in surface contact with the upper surface of the projection 344c when in contact with the composite substrate 10. It is possible to prevent scratches in contact with the composite substrate 10 of the protrusion 344c having such a shape, and to prevent the composite substrate 10 from sliding. However, since the projection 344c is for preventing the composite substrate 10 from being damaged by a sudden temperature change when it is in contact with the composite substrate 10, the upper surface of the projection 344c is the contact area with the composite substrate 10. It is desirable to reduce the In addition, the projection 344c may optionally be provided in a polyhedron shape.

The shape of the protrusion 344 may be variously modified and changed, and is not limited due to the above-described embodiments. In particular, the protrusion 344 is to prevent the composite substrate 10 from being damaged by a sudden temperature change, and the shape, number, and arrangement of the protrusion 344 may be variously applied.

The driving unit 160 includes a vertical conveying member 361 and a horizontal conveying member 365. The vertical transfer member 361 moves the arm 320 described above up and down. To this end, the vertical conveying member 361 has vertical rails 362, a bracket 363, and a moving frame 364. The vertical rails 362 are disposed at corners of the second region 260, respectively. The vertical rails 362 have a long rod shape in the vertical direction and guide the vertical movement of the moving frame 364. Each vertical rail 362 is coupled with a bracket 363 moved up and down by a vertical drive (not shown) along the vertical rail 362. Each moving frame 364 is elongated along the second direction 44 and disposed to face each other. The moving frame 364 is fixedly coupled to the bracket 363 and linearly moved up and down along the vertical rail 362 together with the bracket 363. Both ends of each of the moving frames 364 are fixed to the brackets 363 which are opposed to each other in the second direction 44, respectively, and the moving frames 364 are moved up and down together with the brackets 363. The vertical transfer member 361 having the above-described configuration moves the arm 320 up and down.

The horizontal conveying member 365 linearly reciprocates the arm 320 horizontally. To this end, the horizontal conveying member 365 includes a horizontal rail 366 and a moving block 367. The horizontal rail 366 is fixedly installed on the moving frame 364. Each horizontal rail 366 is provided elongated in the first direction 42. The horizontal rail 366 is provided over the entire area of the second region 260, and the movable block 367 is mounted on the horizontal rail 366 to be movable in the second direction 44 along the horizontal rail 366. . The movable block 367 is fixedly provided with an arm 320 installed along the first direction 42. The arm 320 is equipped with a blade 340 for supporting the composite substrate 10. The horizontal conveying member 362 having the above-described configuration linearly reciprocates the arm 320 horizontally.

The composite substrates 10 that have been cooled for a predetermined time in the second support parts 444 of the cassette 420 are transferred to the recovery part 600 by the second transfer device 700 through the second gate valve 224. Transferred.

11 and 12 are a perspective view and a plan view of a recovery unit, respectively, and FIG. 13 is a view for explaining a carbon nanotube 30 recovery process in the recovery unit.

11 to 13, the recovery unit 600 has a stage 620 on which the composite substrate 10 is placed. At the bottom of the stage 620 is a recovery container 660 in which the carbon nanotubes 30 recovered from the synthetic substrate 10 are stored. In addition, the stage 620 is provided with a recovery unit 640 for sweeping the carbon nanotubes 30 into the recovery container 660 on the upper surface of the synthetic substrate 10. The recovery unit 640 is provided with a guide rail 646 installed in the longitudinal direction of the composite substrate 10. The movable body 644 is installed in the guide rail 646, and the recovery brush 642 is installed in the movable body 644. The recovery brush 642 sweeps the carbon nanotubes 30 on the upper surface of the synthetic substrate 10 into the recovery container 660 while slidingly moving in one direction from one side of the synthetic substrate 10. The recovery brush 642 may be adjustable in height in the movable body 644.

In the above-described example, it has been described that the catalyst 20 is swept out on the synthetic substrate 10 while the recovery brush 642 is moved. Alternatively, however, the recovery brush 642 can be fixed and the stage can be moved. However, in order to reduce the space of the recovery unit 600, it is preferable that the recovery brush 642 is moved as in the above-described example.

The synthetic substrate 10 from which the carbon nanotubes 30 have been recovered is provided to the catalyst applying unit 500 by the second transfer device 700, and then passes through the aforementioned catalyst coating process. It is accommodated in 422a.

Here, referring to Figure 14, the process proceeds in the system for mass production of carbon nanotubes 30 having such a configuration is the catalyst coating step (S110), carbon nanotubes 30 production step (S120), cooling (standby ) Step S130 and recovery step S140. In the catalyst application step S110, when the catalyst 20 corresponding to a single coating amount is supplied from the catalyst storage tank 520 to the upper surface of the synthetic substrate 10, the application brush 587 of the brush unit 580 is moved. The catalyst 20 is evenly distributed over the synthetic substrate 10. The composite substrate 10 having the catalyst 20 coated thereon is accommodated in the cassette 420 of the substrate storage unit 400 installed in the station unit 200 by the second transfer device 700. The composite substrate 10 accommodated in the first supporting portion 422a of the cassette 420 is formed by the first transfer device 300 immediately after the composite substrate 10 which has been processed from the reaction chamber 100 is unloaded. Loaded into boat 160 of 100. When the loading of the synthetic substrate 10 is completed, a process for generating the carbon nanotubes 30 is performed in the reaction chamber 100 (S120). Meanwhile, the synthetic substrates 10 unloaded from the reaction chamber 100 are accommodated in the second support part 422b of the cassette 420 and then cooled for a predetermined time (S130). After a certain time, the synthetic substrate 10 is drawn out of the station unit 400 and moved to the recovery unit 600 (S140). After the recovery of the carbon nanotubes 30 from the recovery unit 600, the synthetic substrate 10 is moved to the catalyst applying unit 500 again and is stored in the first support part 422a of the cassette 420 after the catalyst application. After completing the process in the reaction chamber 100, the synthetic substrates 10 are stored in the second support portion 422b of the cassette, and are then repeatedly performed.

* According to the present invention, the substrate transfer device can be contacted with a minimum area when in contact with the composite substrate, the composite substrate is broken by a sudden temperature change when the substrate transfer device performs loading / unloading of the composite substrate. prevent.

In addition, the present invention can automate the production process of carbon nanotubes.

In addition, according to the present invention, carbon nanotubes can be produced in large quantities.

In addition, according to the present invention, since the process temperature of the reaction chamber can be maintained continuously, the carbon nanotube synthesis of the composite substrate can be continuously performed, thereby improving the facility operation rate.

In addition, according to the present invention, it is possible to control the temperature of the reactor in which the production of the carbon nanotubes by zone can increase the production yield of the carbon nanotubes.

Claims (8)

In the substrate transfer apparatus for the production of carbon nanotubes, Blades on which synthetic substrates used to create carbon nanotubes are seated. An arm for conveying the blade, Including a drive for driving the arm, And a plurality of protrusions formed on the upper surface of the blade in contact with the substrate. The method of claim 1, The protrusions, Substrate transfer apparatus, characterized in that the composite substrate and the blade is formed so that the point contact. The method of claim 1, The protrusions, At least one selected from the group consisting of hemispheres, truncated cones, cones, or polygonal pyramid. The method according to any one of claims 1 to 3, The driving unit, A vertical moving member having a plurality of vertical rails, brackets moved up and down along the vertical rails, and moving frames fixedly coupled to the brackets and moved together with the brackets; And a horizontal moving member having a plurality of horizontal rails and a moving block linearly reciprocating horizontally along the horizontal rail. A reaction chamber in which carbon nanotubes are produced on a synthetic substrate; A station unit installed to be connected to the reaction chamber; A substrate transfer device installed inside the station unit to load / unload composite substrates into / from the reaction chamber, The substrate transfer device, The blades on which the substrates used to create the carbon nanotubes are seated. An arm for conveying the blade, Including a drive for driving the arm, And a plurality of protrusions formed on the upper surface of the blade in contact with the substrate. The method of claim 5, The carbon nanotube generation system, A recovery part for extracting the synthetic substrate from the substrate storage part and recovering the carbon nanotubes generated in the synthetic substrate; A catalyst coating unit for applying a catalyst to the surface of the synthetic substrate from which the carbon nanotubes are recovered from the recovery unit; A substrate storage unit on which synthetic substrates to be loaded into the reaction chamber and synthetic substrates unloaded from the reaction chamber are held; And a secondary substrate transfer device for transferring a synthetic substrate between the recovery unit, the catalyst applying unit, and the substrate storage unit. The method according to claim 5 or 6, The protrusions, Carbon substrate forming system, characterized in that the substrate and the blade is formed to be in point contact. The method of claim 7, wherein The driving unit, A vertical moving member having a plurality of vertical rails, brackets moved up and down along the vertical rails, and moving frames fixedly coupled to the brackets and moved together with the brackets; And a horizontal moving member having a plurality of horizontal rails and a moving block linearly reciprocating horizontally along the horizontal rail.

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