CN220270088U - Air inlet structure and hot stove - Google Patents
Air inlet structure and hot stove Download PDFInfo
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- CN220270088U CN220270088U CN202321260567.3U CN202321260567U CN220270088U CN 220270088 U CN220270088 U CN 220270088U CN 202321260567 U CN202321260567 U CN 202321260567U CN 220270088 U CN220270088 U CN 220270088U
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- air outlet
- air
- air inlet
- outlet holes
- outlet hole
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- 238000010438 heat treatment Methods 0.000 claims abstract description 3
- 230000005540 biological transmission Effects 0.000 claims description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 18
- 239000001301 oxygen Substances 0.000 abstract description 18
- 229910052760 oxygen Inorganic materials 0.000 abstract description 18
- 238000009826 distribution Methods 0.000 abstract description 3
- 238000005516 engineering process Methods 0.000 abstract description 3
- 239000004065 semiconductor Substances 0.000 abstract description 3
- 238000005507 spraying Methods 0.000 abstract description 3
- 238000004378 air conditioning Methods 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 23
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 235000012239 silicon dioxide Nutrition 0.000 description 6
- 235000012431 wafers Nutrition 0.000 description 5
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 238000002161 passivation Methods 0.000 description 4
- 239000010453 quartz Substances 0.000 description 4
- 230000002411 adverse Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000006798 recombination Effects 0.000 description 2
- 238000005215 recombination Methods 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 229910008065 Si-SiO Inorganic materials 0.000 description 1
- 229910006405 Si—SiO Inorganic materials 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 230000008707 rearrangement Effects 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000009279 wet oxidation reaction Methods 0.000 description 1
Abstract
The utility model belongs to the technical field of photovoltaic and semiconductor manufacturing, and discloses an air inlet structure and a heating furnace. This inlet structure adopts the setting of straight siphunculus and venthole, and a plurality of ventholes are along the axial distribution of intake pipe, make oxygen partly enter into in the boiler tube through the mouth of pipe of straight siphunculus, and partly enter into in the boiler tube through the venthole with the form of spraying, shunt the lower oxygen of temperature, avoid a large amount of colder oxygen to directly enter into the boiler tube, reduce the interference of air conditioning to the temperature in the boiler tube to reduce the influence to the technology.
Description
Technical Field
The utility model relates to the technical field of photovoltaic and semiconductor manufacturing, in particular to an air inlet structure and a heating furnace.
Background
The silicon dioxide film is widely applied in the fields of semiconductors and solar cells, can be used as a diffusion doped masking layer, effectively reduces surface doping dead layer recombination, simultaneously provides good surface passivation performance, and greatly reduces trap recombination of interfaces;
the silicon wafer oxidation technology is to grow a layer of high-quality silicon dioxide film on the surface of a silicon wafer, and at present, siO is prepared 2 The membrane can be divided into: thermal oxidation, PECVD deposition, wet oxidation at room temperature, wherein Si-SiO is prepared by thermal oxidation 2 The thin film shows very good passivation characteristics in solar cells, and thus is widely used in high-efficiency cells.
Oxygen is required to be introduced in the oxidation of the silicon chip, and the conventional air inlet mode is that oxygen is directly introduced into a furnace mouth or a furnace tail, a large amount of gas with lower temperature is introduced, so that the influence on the temperature in a furnace tube is larger, however, the growth of an oxide layer is more sensitive to the temperature. Thereby adversely affecting the uniformity of the oxide layer and thus directly adversely affecting the performance of the battery product.
Disclosure of Invention
The utility model aims to provide an air inlet structure and a hot furnace, which avoid the influence of low-temperature gas on the temperature in a furnace tube caused by direct and massive input.
To achieve the purpose, the utility model adopts the following technical scheme:
an air intake structure comprising;
the air inlet pipe extends into the furnace tube along one end of the furnace tube, and is a straight through pipe with two open ends;
the air inlet pipe is provided with at least one group of air outlet holes, each group of air outlet holes is composed of a plurality of air outlet holes which are axially distributed along the air inlet pipe, and air flows are scattered through the air outlet holes.
Preferably, two groups of air inlet pipes are arranged, and the two groups of air inlet pipes are symmetrical relative to the axis of the furnace tube.
Preferably, the air outlet hole group comprises a first air outlet hole group and a second air outlet hole group which are arranged along the circumferential direction of the air inlet pipe, the air outlet holes comprise a first air outlet hole and a second air outlet hole, and a plurality of first air outlet holes which are arranged at intervals are axially distributed along the air inlet pipe to form the first air outlet hole group; and a plurality of second air outlet holes which are arranged at intervals are axially distributed along the air inlet pipe to form a second air outlet hole group.
Preferably, the first air outlet holes and the second air outlet holes on the same air inlet pipe are in one-to-one correspondence, and the corresponding first air outlet holes and second air outlet holes are located on the same circumferential line of the air inlet pipe.
Preferably, the central axis of the first air outlet hole and the central axis of the second air outlet hole on the same circumference line form an angle of 90-180 degrees.
Preferably, the diameters of the first air outlet hole and the second air outlet hole are 1mm-1.5mm.
Preferably, the distance between the adjacent first air outlet holes and the distance between the adjacent second air outlet holes are all 8cm-15cm.
Preferably, the air outlet hole is arranged facing the inner wall of the furnace tube.
Preferably, the furnace tube further comprises a connecting piece, wherein the connecting piece is used for connecting the inner wall of the furnace tube with the air inlet tube.
The heat furnace comprises a gas transmission device and the gas inlet structure, wherein the gas transmission device is connected with the gas inlet pipe.
The utility model has the beneficial effects that:
this inlet structure adopts the setting of straight siphunculus and venthole, and a plurality of ventholes are along the axial distribution of intake pipe, make oxygen partly enter into in the boiler tube through the mouth of pipe of straight siphunculus, and partly enter into in the boiler tube through the venthole with the form of spraying, shunt the lower oxygen of temperature, avoid a large amount of colder oxygen to directly enter into the boiler tube, reduce the interference of air conditioning to the temperature in the boiler tube to reduce the influence to the technology.
Drawings
FIG. 1 is a schematic view of an air intake structure of the present utility model;
FIG. 2 is a schematic view of angles of a first gas outlet and a second gas outlet in the present utility model;
FIG. 3 is a schematic diagram of an exemplary quartz boat placement and temperature zone partitioning within a furnace.
In the figure:
1. a furnace tube; 2. an air inlet pipe; 3. an air outlet hole; 31. a first air outlet hole; 32. a second air outlet hole; 4. quartz boat.
Detailed Description
The utility model is described in further detail below with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the utility model and are not limiting thereof. It should be further noted that, for convenience of description, only some, but not all of the structures related to the present utility model are shown in the drawings.
In the description of the present utility model, unless explicitly stated and limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
In the present utility model, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.
In the description of the present embodiment, the terms "upper", "lower", "left", "right", etc., azimuth or positional relationship are based on the azimuth or positional relationship shown in the drawings, and are merely for convenience of description and simplification of operations, and do not indicate or imply that the apparatus or element referred to must have a specific azimuth, be constructed and operated in a specific azimuth, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and the like, are used merely for distinguishing between descriptions and not for distinguishing between them.
On one hand, the traditional conventional air inlet mode in the prior art has the defects that on one hand, cold air is directly and largely input to greatly influence the temperature of a furnace tube; on the other hand, oxygen is directly introduced from the furnace mouth or the furnace tail through a blind pipe and an air outlet hole, but the mode is easy to cause blockage of air inlet replacement. Therefore, the present embodiment provides an air intake structure, the air intake structure has an air intake pipe 2, the air intake pipe 2 is a straight pipe, one end of the air intake pipe 2 extends into the furnace tube 1, the air intake pipe 2 is provided with at least one air outlet hole group, each air outlet hole group is formed by a plurality of air outlet holes 3 distributed along the axial direction of the air intake pipe, and air flow is dispersed through the air outlet holes 3.
The air inlet structure provided by the embodiment adopts the arrangement of the straight-through pipe and the plurality of air outlet holes, so that a part of oxygen enters the furnace tube in a spraying mode through the plurality of air outlet holes, and the rest part enters the furnace tube through the pipe orifice of the straight-through pipe to split a large amount of colder oxygen, so that a large amount of colder oxygen is prevented from being directly introduced into the furnace tube, the interference of cold air on the temperature in the furnace tube is reduced, and the influence on the process is reduced. The air inlet pipe in the air inlet structure provided by the embodiment is arranged through the arrangement, meanwhile, the traditional blind pipe and air outlet hole mode can be avoided, the problem that the air outlet hole is blocked due to amorphous silicon generated by poly deposition in the long-term deposition process is avoided, and therefore air cannot be fed, and the product quality is affected.
In the embodiment, in order to convey oxygen from two sides of a silicon wafer, the two groups of the air inlet pipes 2 are arranged, and the two groups of the air inlet pipes 2 are symmetrical relative to the axis of the furnace tube 1, so that the distance between the air inlet pipes 2 and the silicon wafer is equal. The air inlet pipe 2 extends into the furnace tube 1 along one end of the furnace tube 1, and the air inlet pipe 2 exposed outside can be connected with an external air transmission device. It should be noted that, the air inlet pipe 2 may extend into the furnace tube 1 from the furnace tail, or may extend into the furnace tube 1 from the furnace mouth, and the form in which the air inlet pipe 2 extends into the furnace tube 1 is not particularly limited in this embodiment. According to the air inlet structure, two groups of air inlet pipes 2 are arranged on the upper side and the lower side of the furnace tube 1, two paths of air inlet can be realized, and the uniformity of air is further improved. Alternatively, the air inlet ends of the two groups of air inlet pipes 2 can share an external air conveying device, and can be independently connected with the external air conveying device.
In this embodiment, the furnace tube 1 is a straight tube, and the air inlet tube 2 is provided with at least two groups of air outlet holes along the circumferential direction, each group of air outlet holes is formed by a plurality of air outlet holes 3 axially distributed along the air inlet tube 2, and the air flow is dispersed through the air outlet holes 3. Through the arrangement of the straight-through pipe and the air outlet holes 3, a part of oxygen enters the furnace pipe 1 through the pipe orifice of the straight-through pipe, and a part of oxygen enters the furnace pipe 1 through the air outlet holes 3, so that cooler gas is further split, a large amount of cooler gas is prevented from being directly connected into the furnace pipe 1, the interference of the cooler gas on the temperature in the furnace pipe 1 is reduced, and the influence on the process is reduced.
Specifically, the air outlet hole group comprises a first air outlet hole group and a second air outlet hole group which are arranged along the circumferential direction of the air inlet pipe 2, the air outlet holes 3 comprise a first air outlet hole 31 and a second air outlet hole 32, and a plurality of first air outlet holes 31 which are arranged at intervals are axially distributed along the air inlet pipe 2 to form a first air outlet hole group; a plurality of second air outlet holes 32 are arranged at intervals and axially distributed along the air inlet pipe 2 to form a second air outlet hole group. The gas distribution is more uniform through the first gas outlet holes 31 and the second gas outlet holes 32. Preferably, the first air outlet holes 31 and the second air outlet holes 32 on the same air inlet pipe 2 are in one-to-one correspondence, and the corresponding first air outlet holes 31 and second air outlet holes 32 are located on the same circumferential line of the air inlet pipe 2. Thereby further evenly distributing the gas delivered. In order to enlarge the range of the inlet from the outlet hole 3, the central axis of the first outlet hole 31 and the central axis of the second outlet hole 32 on the same circumference line form an angle of 90-180 degrees, preferably 90-120-180 degrees. The diameters of the first air outlet hole 31 and the second air outlet hole 32 are 1mm-1.5mm, preferably 1mm, 1.2mm and 1.5mm; the distance between the adjacent first air outlet holes 31 and the distance between the adjacent second air outlet holes 32 are all 8cm-15cm; preferably 8cm, 10mm, 15cm.
In this embodiment, the gas outlet holes 3 are disposed facing the inner wall of the furnace tube 1, so that the gas can be further dispersed in the furnace tube 1, and the interference of the gas flow on the temperature in the furnace tube 1 is reduced. In order to fix the air inlet pipe 2 conveniently, the air inlet structure further comprises a connecting piece, and the connecting piece is connected with the inner wall of the furnace tube 1 and the air inlet pipe 2. For example, the connecting piece can be a hook arranged on the inner wall of the furnace tube 1, and the air inlet tube 2 is hung on the hook.
The embodiment also provides a heat furnace, which comprises a gas transmission device and the gas inlet structure, wherein the gas transmission device is connected with the gas inlet pipe 2 to transmit oxygen, and the heat furnace can refer to a furnace body with the gas inlet structure, such as a diffusion furnace. The adoption of the air inlet structure improves the air inlet uniformity compared with the traditional way of directly introducing oxygen from a furnace mouth or a furnace tail (without adopting spray holes), and particularly tests are carried out by taking the position and temperature zone division of the quartz boat 4 in the furnace tube 1 in fig. 3 as an example, wherein an arrow is the air inlet direction. The results of the tests of passivated IVOC using the present intake structure with conventional intake are shown below in tables 1 and 2; the PL brightness test results of specific products using the present air intake structure with conventional air intake are shown in tables 3 and 4.
TABLE 1 test results of passivation IVOC for traditional intake
TABLE 2 test results of passivated IVOC using the present intake structure
TABLE 3 PL brightness test results for specific products of traditional air intake
TABLE 4 PL brightness test results for specific products Using the present intake Structure
The brightness range of the upper, middle and lower positions of the quartz boat 4 (containing the silicon wafers to be reacted) can be reduced from 2000 to within 1000, the passivation open-circuit voltage range is reduced from 4mv to 1.3mv, and the reaction of each position can be shown to be more uniform. In addition, the interference of oxygen with lower temperature on the temperature in the furnace tube 1 is improved, and particularly, the temperature fluctuation of the corresponding air outlet positions of the furnace mouth and the furnace tail is obviously improved, as shown in the table 5.
TABLE 5 results of temperature comparison in pipe using the present inlet structure and conventional inlet
It is to be understood that the above examples of the present utility model are provided for clarity of illustration only and are not limiting of the embodiments of the present utility model. Various obvious changes, rearrangements and substitutions can be made by those skilled in the art without departing from the scope of the utility model. It is not necessary here nor is it exhaustive of all embodiments. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the utility model are desired to be protected by the following claims.
Claims (7)
1. An air intake structure, characterized by comprising;
the air inlet pipe (2) extends into the furnace tube (1) along one end of the furnace tube (1), and the air inlet pipe (2) is a straight through pipe with two open ends;
the air inlet pipe (2) is provided with at least one group of air outlet holes, each group of air outlet holes consists of a plurality of air outlet holes (3) axially distributed along the air inlet pipe (2), and air flow is dispersed through the air outlet holes (3);
two groups of air inlet pipes (2) are arranged, and the two groups of air inlet pipes (2) are symmetrical relative to the axis of the furnace tube (1);
the air outlet hole group comprises a first air outlet hole group and a second air outlet hole group which are arranged along the circumferential direction of the air inlet pipe (2), the air outlet holes (3) comprise a first air outlet hole (31) and a second air outlet hole (32), and a plurality of first air outlet holes (31) which are arranged at intervals are axially distributed along the air inlet pipe (2) to form the first air outlet hole group; a plurality of second air outlet holes (32) which are arranged at intervals are axially distributed along the air inlet pipe (2) to form a second air outlet hole group;
the air outlet holes (3) are arranged facing the inner wall of the furnace tube (1).
2. The air inlet structure according to claim 1, wherein the first air outlet holes (31) and the second air outlet holes (32) on the same air inlet pipe (2) are in one-to-one correspondence, and the corresponding first air outlet holes (31) and second air outlet holes (32) are located on the same circumferential line of the air inlet pipe (2).
3. An inlet arrangement according to claim 2, characterized in that the central axis of the first outlet hole (31) is at an angle of 90 ° -180 ° to the central axis of the second outlet hole (32) on the same circumferential line.
4. The air inlet structure according to claim 1, characterized in that the diameters of the first air outlet hole (31) and the second air outlet hole (32) are 1mm-1.5mm.
5. The air inlet structure according to claim 1, wherein the distance between adjacent first air outlet holes (31) and between adjacent second air outlet holes (32) is 8cm-15cm.
6. The air inlet structure according to any one of claims 1 to 5, further comprising a connecting member connecting an inner wall of the furnace tube (1) with the air inlet tube (2).
7. A heating furnace, characterized by comprising a gas transmission device and a gas inlet structure according to any one of claims 1-6, said gas transmission device being connected to said gas inlet pipe (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321260567.3U CN220270088U (en) | 2023-05-23 | 2023-05-23 | Air inlet structure and hot stove |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321260567.3U CN220270088U (en) | 2023-05-23 | 2023-05-23 | Air inlet structure and hot stove |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220270088U true CN220270088U (en) | 2023-12-29 |
Family
ID=89300041
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321260567.3U Active CN220270088U (en) | 2023-05-23 | 2023-05-23 | Air inlet structure and hot stove |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220270088U (en) |
-
2023
- 2023-05-23 CN CN202321260567.3U patent/CN220270088U/en active Active
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