CN106929923A - A kind of Quartz stove tube - Google Patents
A kind of Quartz stove tube Download PDFInfo
- Publication number
- CN106929923A CN106929923A CN201511024733.XA CN201511024733A CN106929923A CN 106929923 A CN106929923 A CN 106929923A CN 201511024733 A CN201511024733 A CN 201511024733A CN 106929923 A CN106929923 A CN 106929923A
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- Prior art keywords
- branch pipe
- air
- vent
- vents
- stove
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/16—Feed and outlet means for the gases; Modifying the flow of the gases
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Furnace Details (AREA)
Abstract
The invention provides a kind of Quartz stove tube, including boiler tube body, the first end face of the boiler tube body offers fire door, and the second end face of the boiler tube body is set to stove tail, furnace chamber is provided with the boiler tube body；One end in the furnace chamber near the stove tail is provided with air chamber, and at least one air inlet and at least one gas outlet are offered on the stove tail, and at least one air inlet is connected with the air chamber, and the gas outlet is connected with the furnace chamber；At least one branch pipe that the oriented fire door direction extends is set on the top board of the air chamber, and at least one branch pipe is communicated with the air chamber, and multiple branch pipe air-vents are provided with least one Zhi Guanbi of branch pipe.The present invention solve the problems, such as process gas from stove tail directly to fire door flowing cause air flow method uneven so that process gas can uniformly be flowed into from the surrounding of wafer, so with wafer uniform contact, it is ensured that the uniformity of wafer piece intrinsic parameter.
Description
Technical field
The invention belongs to boiler tube manufacturing technology field, it is related to a kind of Quartz stove tube.
Background technology
Quartz stove tube is one of important technological equipment of operation before integrated circuit production line, and it is mainly used for
Semiconductor is doped, i.e., dopant material is diffused into silicon chip under the high temperature conditions, so as to be varied and controlled
The type of impurity, concentration and distribution in semiconductor, to set up different electrical characteristics regions.
POCl3 pre-deposited is the important procedure in semiconductor crystal wafer manufacturing process, and its technical process is in stone
Realized in English boiler tube.The Quartz stove tube commonly used on current production line only has stove tail air inlet, production operation
When carry the nitrogen in liquid POCl3 source and directly reacted into boiler tube from the air inlet of stove tail, but due to quartz
There is a segment distance boiler tube flat-temperature zone apart from air inlet so that the air flow method between wafer piece is uneven, causes
Wafer piece intrinsic parameter is inconsistent.
The content of the invention
In consideration of it, the invention provides a kind of Quartz stove tube, to improve wafer piece between air flow method it is uniform
Property, lift the uniformity of wafer piece intrinsic parameter.
To achieve the above object, the present invention is adopted the following technical scheme that：
The embodiment of the present invention provides a kind of Quartz stove tube, including boiler tube body, the first end of the boiler tube body
Face offers fire door, and the second end face of the boiler tube body is set to stove tail, stove is provided with the boiler tube body
Chamber；
One end in the furnace chamber near the stove tail is provided with air chamber, and at least one is offered on the stove tail
Air inlet and at least one gas outlet, at least one air inlet are connected with the air chamber, the outlet
Mouth is connected with the furnace chamber；
At least one branch pipe that the oriented fire door direction extends is set on the top board of the air chamber, it is described at least
A piece branch pipe is communicated with the air chamber, and multiple branch pipe air-vents are provided with least one Zhi Guanbi of branch pipe.
Further, the adjacent holes pitch-row of the multiple branch pipe air-vent subtracts successively to the fire door bearing of trend
It is small.
Further, the aperture of the multiple branch pipe air-vent increases successively to the fire door along bearing of trend.
Further, the multiple branch pipe air-vent includes multiple first branch pipe air-vents, multiple second branch pipes
Air-vent and multiple 3rd branch pipe air-vents；The multiple first branch pipe air-vent, multiple second branch pipes are breathed freely
Hole and multiple 3rd branch pipe air-vents are sequentially distributed to the fire door bearing of trend；The multiple first branch pipe is saturating
Stomata equidistantly distributed, the multiple second branch pipe air-vent equidistantly distributed, the multiple second branch pipe is saturating
Stomata equidistantly distributed；The of first spacing of adjacent first branch pipe air-vent, adjacent second branch pipe air-vent
3rd spacing of two spacing and adjacent 3rd branch pipe air-vent is sequentially reduced.
Further, the first aperture of the first branch pipe air-vent, the second aperture of the second branch pipe air-vent
The 3rd aperture with the 3rd branch pipe air-vent increases successively.
Further, the non-region for setting at least one branch pipe of the air chamber top board offers multiple inner panels
Air-vent.
Further, the multiple inner panel air-vent is distributed in the first half of the air chamber top board.
Further, at least one branch pipe is fixed on the upper tube wall of the boiler tube body, it is described at least
A piece branch pipe is towards being provided with multiple branch pipe air-vents on the direction inside the furnace chamber.
Further, at least one air inlet includes the first air inlet and the second air inlet, described first
Air inlet and the second air inlet are located at stove tail middle part or top, and the gas outlet is located under the stove tail
Portion.
Further, the branch pipe is three, and three branch pipes are uniformly fixed on the upper of the boiler tube body
On tube wall.
Compared with prior art, the advantage of technical solution of the present invention is：
The Quartz stove tube that the present invention is provided, sets at least one branch pipe, often in furnace chamber along boiler tube length direction
Root branch pipe towards multiple branch pipe air-vents are provided with the Zhi Guanbi in stove, from the process gas that stove tail air inlet enters
Body can pass through at least one multiple branch pipe air-vents of branch pipe, uniformly flow to wafer, solve process gas
Directly cause the uneven problem of air flow method to fire door flowing from stove tail so that process gas can be from wafer
Surrounding uniformly flow into, and then with wafer uniform contact, it is ensured that the uniformity of wafer piece intrinsic parameter.
Brief description of the drawings
The exemplary embodiment of the present invention or prior art will be described in detail by referring to accompanying drawing below, make ability
The those of ordinary skill in domain becomes apparent from above-mentioned and other feature and advantage of the invention, in accompanying drawing：
Fig. 1 is the front sectional view of Quartz stove tube provided in an embodiment of the present invention；
Fig. 2 is manifold configuration schematic diagram provided in an embodiment of the present invention；
Fig. 3 is the structural representation of air chamber top board provided in an embodiment of the present invention；
Fig. 4 is the side view of Quartz stove tube provided in an embodiment of the present invention.
Specific embodiment
To make the object, technical solutions and advantages of the present invention clearer, hereinafter with reference to the embodiment of the present invention
In accompanying drawing, technical scheme is clearly and completely described by implementation method, it is clear that described
Embodiment be a part of embodiment of the invention, rather than whole embodiments.Based on the implementation in the present invention
Example, the every other implementation that those of ordinary skill in the art are obtained under the premise of creative work is not made
Example, belongs to the scope of protection of the invention.
In description of the invention, it is to be understood that belong to " on ", the orientation or position of the instruction such as D score
Relation is, based on orientation shown in the drawings or position relationship, to be for only for ease of the description present invention and simplify description,
Must be with specific orientation, with specific azimuth configuration rather than the device or element for indicating or imply meaning
And operation, therefore be not considered as limiting the invention.
Fig. 1 gives the front sectional view of Quartz stove tube provided in an embodiment of the present invention.As shown in figure 1, should
Quartz stove tube includes boiler tube body 1, and the first end face of boiler tube body 1 offers fire door (left end of diagram),
The second end face of boiler tube body 1 is set to be provided with furnace chamber 3 in stove tail 2, boiler tube body 1；
Wherein, the one end in furnace chamber 3 near stove tail 2 is provided with air chamber 4, and at least one is offered on stove tail 2
The gas outlet 6 of air inlet 5 and at least one, at least one air inlet 5 is connected with air chamber 4, gas outlet 6 with
Furnace chamber 3 is connected；
At least one branch pipe 8 that oriented fire door direction extends, at least one branch pipe are set on the top board 7 of air chamber 4
8 are communicated with air chamber 4, and multiple (such as Fig. 2 of branch pipe air-vent 10 are provided with least one Zhi Guanbi of branch pipe 8
It is shown).
In the present embodiment, the outside overall structure of Quartz stove tube is cylindrical, the portion circular region of stove tail 2
, to reduce quartz material, manufacture craft, and at least one air inlet 5 can be simplified as the base plate of air chamber 4
On the base plate；The top board 7 of air chamber 4 is oppositely arranged with the base plate, and rounded (as shown in Figure 3).
Exemplary, referring to Fig. 1, the length a of boiler tube body 1 can be 2280mm, boiler tube body 1 it is interior
Footpath b can be 225mm, and the pipe thickness c of boiler tube body 1 can be 5mm, at least one length d of branch pipe 8
Can be 1220mm, the length e of air chamber 4 can be 220mm, at least one air inlet 5 and at least one outlet
6 outwardly length f of mouth can be 100mm, and the spacing of adjacent air inlet 5 can be 15mm.
It should be noted that the univers parameter of boiler tube body 1 can be designed according to the model of diffusion furnace, extremely
Position and wafer that the visual push-and-pull boats of length d of a few branch pipe 8 are placed in boiler tube are located at the position of push-and-pull boat
Depending on putting.
Further, referring to Fig. 2, in such scheme, the adjacent holes pitch-row of multiple branch pipe air-vents is prolonged to fire door
Direction is stretched to be sequentially reduced.
Further, the aperture of multiple branch pipe air-vents 10 increases successively to the fire door along bearing of trend.
Preferably, multiple branch pipe air-vents 10 include that multiple first branch pipe air-vents 11, multiple second branch pipes are saturating
Stomata 12 and multiple 3rd branch pipe air-vents 13；Multiple first branch pipe air-vents 11, multiple second branch pipes are saturating
Stomata 12 and multiple 3rd branch pipe air-vents 13 are sequentially distributed to fire door bearing of trend；Multiple first branch pipes are saturating
The equidistantly distributed of stomata 11, multiple equidistantly distributeds of second branch pipe air-vent 12, multiple second branch pipes are breathed freely
The equidistantly distributed of hole 13；The of first spacing of adjacent first branch pipe air-vent, adjacent second branch pipe air-vent
3rd spacing of two spacing and adjacent 3rd branch pipe air-vent can be sequentially reduced.
In addition, the first aperture of the first branch pipe air-vent 11, the second aperture of the second branch pipe air-vent 12 and
3rd aperture of the 3rd branch pipe air-vent 13 can increase successively.
Exemplary, multiple first branch pipe air-vents 11 can be 10mm from the nearest distance h of air chamber top board 7,
Multiple 3rd branch pipe air-vents 13 can be 6mm, multiple first branch pipes from the minimum distance i of the elongated end of branch pipe 8
Air-vent 11 can be set to 10, and the first aperture can be 4mm, and the pitch-row j of adjacent holes can be 40mm, multiple
Second branch pipe air-vent 12 can be set to 16, and the second aperture can be 6mm, and the pitch-row k of adjacent holes can be 20mm,
Multiple 3rd branch pipe air-vents 13 can be set to 21, and the 3rd aperture can be 8mm, and the pitch-row l of adjacent holes can be
12mm。
Thus, the branch pipe air-vent of varying number, different pitch-rows and/or aperture are set, branch pipe 8 can be made
The flow of the process gas for flowing out everywhere is essentially identical, and then makes air flow method uniform.
Further, referring to Fig. 3, in such scheme, the non-area that at least one branch pipe 8 is set of air chamber top board 7
Domain offers multiple inner panel air-vents 14, so that process gas can uniformly flow out from air chamber top board 7, improves work
Skill efficiency.
Preferably, multiple inner panel air-vents 14 are distributed in the first half of air chamber top board 7, to prevent air chamber top board
After 7 bottom perforate, the gas for being largely deposited on air chamber more flows out from the bottom of air chamber top board 7, causes
Air flow method is uneven.
Exemplary, the diameter of air chamber top board 7 can be 130mm, and the number of multiple inner panel air-vents 14 can be
10, and be uniformly distributed, the aperture of each inner panel air-vent 14 can be 4mm, adjacent inner panel air-vent 14
Pitch-row m can be 10mm.
Preferably, in such scheme, at least one branch pipe 8 is fixed on the upper tube wall of boiler tube body 1, with
Prevent from bending under at least one high temperature of branch pipe 8 sagging；At least one branch pipe 8 is towards the direction inside furnace chamber 3
On be provided with multiple branch pipe air-vents 10 so that from multiple branch pipe air-vents 10 outflow process gas can be direct
Rapidly reach at wafer.The elongated end closing of at least one branch pipe 8, in case a large amount of gases are from elongated end
Outflow, reduces the uniformity of air flow method.
Further, referring to Fig. 4, at least one air inlet includes the first air inlet 15 and the second air inlet 16,
First air inlet 15 and the second air inlet 16 are located at stove tail middle part or top, and gas outlet 6 is located under stove tail
Portion.
Preferably, above-mentioned branch pipe 8 is three, and three branch pipes 8 are uniformly fixed on the upper tube wall of boiler tube body.
Exemplary, the second air inlet 16 may be provided at the center of stove tail, and the first air inlet 15 is arranged on
The surface of two air inlets 16, projection of the one of branch pipe 8 on stove tail can be located at the first air inlet 15
Surface, and with the pitch-row n between the first air inlet 15 can be 25mm, other two branch pipes 8 are in stove tail
On projection can be symmetrically distributed in the both sides of the first air inlet 15, the internal diameter of each branch pipe 8 can be 13mm, branch
The thickness of tube wall can be 4mm.
In addition, temperature control mouthful 17 is additionally provided with stove tail, can be to the temperature in Quartz stove tube by temperature control mouthful 17
It is controlled, temperature control mouthful 17 can be in same level with gas outlet 6.
The Quartz stove tube of the present embodiment is applied to POCl3 pre-deposited doping process.Specifically, Quartz stove tube
It is placed horizontally in diffusion furnace, the fire door of diffusion furnace just seals the fire door of Quartz stove tube, it is right by temperature control mouthful
Temperature in Quartz stove tube furnace chamber is controlled, it is ensured that the temperature range in furnace chamber is sharp at 950 DEG C~1100 DEG C
POCl3 liquid source is carried with high pure nitrogen enter air inlet chamber from the first air inlet, meanwhile, from the second air inlet
A certain amount of oxygen is pressed into, the product after POCl3 pyrolytic generates phosphorus pentoxide gas with oxygen reaction
Body (phosphorus pentoxide distils at 360 DEG C), phosphorus pentoxide gas can be from multiple under the promotion of air-flow
Inner panel air-vent and multiple branch pipe air-vent outflows, so that phosphorus pentoxide gas is not only equal from zone line
Even entrance, and simultaneously from the surrounding of wafer even into, improve the uniformity of furnace chamber interior air-flow distribution,
Finally, the phosphorus pentoxide gas and other gases not reacted with wafer flow out from gas outlet.
Quartz stove tube provided in an embodiment of the present invention, at least one branch is set in furnace chamber along boiler tube length direction
Pipe, every branch pipe enters towards multiple branch pipe air-vents are provided with the Zhi Guanbi in stove from stove tail air inlet
Process gas can pass through at least one multiple branch pipe air-vents of branch pipe, uniformly flow to wafer, solve work
Skill gas directly causes the uneven problem of air flow method from stove tail to fire door flowing so that process gas can be from
The surrounding of wafer is uniformly flowed into, so with wafer uniform contact, it is ensured that the one of wafer piece intrinsic parameter
Cause property.
It is above-mentioned that only the specific embodiment in the present invention is illustrated, but can not be used as protection model of the invention
Enclose, the equivalent change or modification or equal proportion done by every design spirit according in the present invention are amplified or contracted
It is small etc., it is deemed to fall protection scope of the present invention.
Claims (10)
1. a kind of Quartz stove tube, it is characterised in that including boiler tube body, the first end face of the boiler tube body
Fire door is offered, the second end face of the boiler tube body is set to stove tail, furnace chamber is provided with the boiler tube body；
One end in the furnace chamber near the stove tail is provided with air chamber, and at least one is offered on the stove tail
Air inlet and at least one gas outlet, at least one air inlet are connected with the air chamber, the outlet
Mouth is connected with the furnace chamber；
At least one branch pipe that the oriented fire door direction extends is set on the top board of the air chamber, it is described at least
A piece branch pipe is communicated with the air chamber, multiple branch pipes is provided with least one Zhi Guanbi of branch pipe and is breathed freely
Hole.
2. Quartz stove tube according to claim 1, it is characterised in that the multiple branch pipe air-vent
Adjacent holes pitch-row be sequentially reduced to the fire door bearing of trend.
3. Quartz stove tube according to claim 2, it is characterised in that the multiple branch pipe air-vent
Aperture increases successively to the fire door along bearing of trend.
4. Quartz stove tube according to claim 1, it is characterised in that the multiple branch pipe air-vent
Including multiple first branch pipe air-vents, multiple second branch pipe air-vents and multiple 3rd branch pipe air-vents；It is described
Multiple first branch pipe air-vents, multiple second branch pipe air-vents and multiple 3rd branch pipe air-vents are to the fire door
Bearing of trend is sequentially distributed；The multiple first branch pipe air-vent equidistantly distributed, the multiple second branch pipe
Air-vent equidistantly distributed, the multiple second branch pipe air-vent equidistantly distributed；Adjacent first branch pipe is breathed freely
The 3rd of first spacing in hole, the second spacing of adjacent second branch pipe air-vent and adjacent 3rd branch pipe air-vent
Spacing is sequentially reduced.
5. Quartz stove tube according to claim 4, it is characterised in that the first branch pipe air-vent
The first aperture, the second aperture of the second branch pipe air-vent and the 3rd aperture of the 3rd branch pipe air-vent increase successively
Greatly.
6. Quartz stove tube according to claim 1, it is characterised in that the non-setting of air chamber top board
The region of at least one branch pipe offers multiple inner panel air-vents.
7. Quartz stove tube according to claim 6, it is characterised in that the multiple inner panel air-vent
It is distributed in the first half of the air chamber top board.
8. Quartz stove tube according to claim 1, it is characterised in that at least one branch pipe is fixed
In on the upper tube wall of the boiler tube body, at least one branch pipe is towards setting on the direction inside the furnace chamber
It is equipped with multiple branch pipe air-vents.
9. Quartz stove tube according to claim 1, it is characterised in that at least one air inlet
Including the first air inlet and the second air inlet, first air inlet and the second air inlet are located in the stove tail
Portion or top, the gas outlet are located at the bottom of the stove tail.
10. Quartz stove tube according to claim 9, it is characterised in that the branch pipe is three, institute
Three branch pipes are stated uniformly to be fixed on the upper tube wall of the boiler tube body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201511024733.XA CN106929923A (en) | 2015-12-31 | 2015-12-31 | A kind of Quartz stove tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201511024733.XA CN106929923A (en) | 2015-12-31 | 2015-12-31 | A kind of Quartz stove tube |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106929923A true CN106929923A (en) | 2017-07-07 |
Family
ID=59441850
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201511024733.XA Pending CN106929923A (en) | 2015-12-31 | 2015-12-31 | A kind of Quartz stove tube |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106929923A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108172506A (en) * | 2018-02-26 | 2018-06-15 | 通威太阳能（安徽）有限公司 | A kind of pipe tail is convenient for the Quartz stove tube of docking |
| CN114769963A (en) * | 2022-05-12 | 2022-07-22 | 湖州学院 | Furnace tube inner support welding equipment for solar cell silicon wafer diffusion |
| CN115282756A (en) * | 2022-08-17 | 2022-11-04 | 安徽科技学院 | Gaseous high-efficient circulation ammonia removal device in airtight meat products fermentation workshop |
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| CN201793816U (en) * | 2010-09-29 | 2011-04-13 | 常州天合光能有限公司 | Multi-point air inlet device for upper and lower air inlet pipes at tail of phosphorus diffusion furnace |
| CN103290483A (en) * | 2013-06-06 | 2013-09-11 | 北京七星华创电子股份有限公司 | Silicon slice heat treatment reaction tube and silicon slice heat treatment method |
| CN203451647U (en) * | 2013-08-22 | 2014-02-26 | 天威新能源控股有限公司 | Flow equalizing plate for crystalline silicon diffusion and crystalline silicon diffusion process furnace thereof |
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2015
- 2015-12-31 CN CN201511024733.XA patent/CN106929923A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201793816U (en) * | 2010-09-29 | 2011-04-13 | 常州天合光能有限公司 | Multi-point air inlet device for upper and lower air inlet pipes at tail of phosphorus diffusion furnace |
| CN103290483A (en) * | 2013-06-06 | 2013-09-11 | 北京七星华创电子股份有限公司 | Silicon slice heat treatment reaction tube and silicon slice heat treatment method |
| CN203451647U (en) * | 2013-08-22 | 2014-02-26 | 天威新能源控股有限公司 | Flow equalizing plate for crystalline silicon diffusion and crystalline silicon diffusion process furnace thereof |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108172506A (en) * | 2018-02-26 | 2018-06-15 | 通威太阳能（安徽）有限公司 | A kind of pipe tail is convenient for the Quartz stove tube of docking |
| CN108172506B (en) * | 2018-02-26 | 2023-09-26 | 通威太阳能（安徽）有限公司 | Quartz furnace tube with tube tail convenient to butt joint |
| CN114769963A (en) * | 2022-05-12 | 2022-07-22 | 湖州学院 | Furnace tube inner support welding equipment for solar cell silicon wafer diffusion |
| CN114769963B (en) * | 2022-05-12 | 2023-08-08 | 湖州师范学院 | Welding equipment for inner support of furnace tube for diffusion of solar cell silicon wafer |
| CN115282756A (en) * | 2022-08-17 | 2022-11-04 | 安徽科技学院 | Gaseous high-efficient circulation ammonia removal device in airtight meat products fermentation workshop |
| CN115282756B (en) * | 2022-08-17 | 2023-12-12 | 安徽科技学院 | Efficient circulating ammonia removal device for gas in sealed meat product fermentation workshop |
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Application publication date: 20170707 |
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