CN206298662U - Diffusion furnace quartz tube device - Google Patents
Diffusion furnace quartz tube device Download PDFInfo
- Publication number
- CN206298662U CN206298662U CN201621367838.5U CN201621367838U CN206298662U CN 206298662 U CN206298662 U CN 206298662U CN 201621367838 U CN201621367838 U CN 201621367838U CN 206298662 U CN206298662 U CN 206298662U
- Authority
- CN
- China
- Prior art keywords
- quartz tube
- outer layer
- layered
- quartz
- diffusion furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Glass Melting And Manufacturing (AREA)
Abstract
The utility model provides a kind of diffusion furnace quartz tube device, the air inlet pipe of gas is passed through including outer layer quartz ampoule, the layered quartz tube being contained in inside outer layer quartz ampoule and to the outer layer quartz ampoule and layered quartz tube, annular surface and the chamber on the inside of annular surface are provided with the layered quartz tube, the annular surface is provided with the aperture portion of chamber described in insertion, and the aperture portion protrudes into the chamber.The utility model is by setting separate layered quartz tube and outer layer quartz ampoule, so that dismantling, cleaning more convenient, and using aperture portion structure special on layered quartz tube, diffusion uniformity can be improved, and in the case where diffusion furnace constant temperature section length is not changed, quartz boat piece spacing can also be shortened, increase yield.
Description
Technical field
The utility model is related to photovoltaic cell to manufacture field, more particularly to a kind of diffusion furnace quartz tube device.
Background technology
Diffusion furnace is one of important process equipment in photovoltaic cell production technology, and it is mainly used in hot conditions
It is lower that dopant material is diffused into silicon chip, so as to the type of impurity, concentration and distribution in silicon chip is varied and controlled.At present, it is common
Diffusion furnace typically all possesses quartz tube device, from the afterbody air inlet of quartz ampoule, but in actual applications, often because gas flows
Property it is poor, cause furnace gas to mix uneven so that the uniformity of diffused sheet resistance is poor, the photovoltaic cell after sintering
Efficiency reduction.
Utility model content
In view of this, the utility model provides a kind of diffusion furnace quartz tube device, equal to improve photovoltaic cell diffusion
The poor problem of even property.
Specifically, the utility model is achieved by the following technical solution：A kind of diffusion furnace quartz tube device, including
Outer layer quartz ampoule, the layered quartz tube being contained in inside outer layer quartz ampoule and it is passed through to the outer layer quartz ampoule and layered quartz tube
The air inlet pipe of gas, is provided with annular surface and the chamber on the inside of annular surface, the annular table in the layered quartz tube
Face is provided with the aperture portion of chamber described in insertion, and the aperture portion protrudes into the chamber.
Further, the layered quartz tube is respectively provided with the inlet end adjacent with the air inlet pipe with outer layer quartz ampoule, and
Gas mixing chamber is provided between the inlet end of layered quartz tube and the inlet end of outer layer quartz ampoule.
Further, the air inlet pipe is connected to the inlet end of the outer layer quartz ampoule, and connects the gas mixing chamber,
And the air inlet pipe is correspondingly arranged with the center of the outer layer quartz ampoule, the aperture portion is towards the outer layer quartz ampoule
Center is protruded into the chamber.
Further, the aperture portion is set along the circumferencial direction of the annular surface, and along the length of layered quartz tube
Degree directional spreding.
Further, interlayer gap is provided between the layered quartz tube and outer layer quartz ampoule and in interlayer gap
Support member.
Further, diffusion furnace quartz tube device also includes blast pipe, and the height of the blast pipe is less than described
The height of air inlet pipe.
Further, the layered quartz tube is provided with the exhaust end adjacent with the blast pipe, the layered quartz tube
Exhaust end is provided with the extension that the outer layer quartz ampoule extends, the extension by the interlayer gap abut to it is described outward
Layer quartz ampoule so that the end in the interlayer gap is closed by the extension
The utility model is by setting separate layered quartz tube and outer layer quartz ampoule so that dismounting, cleaning are more
It is convenient, and using aperture portion structure special on layered quartz tube, diffusion uniformity can be improved, and do not changing diffusion furnace
In the case of constant temperature section length, quartz boat piece spacing can also be shortened, increase yield.
Brief description of the drawings
Fig. 1 is the structure diagram of diffusion furnace quartz tube device described in the utility model.
Fig. 2 is the internal structure schematic diagram of diffusion furnace quartz tube device described in the utility model.
Fig. 3 is the structural representation of another angle of diffusion furnace quartz tube device described in the utility model.
Specific embodiment
Here exemplary embodiment will be illustrated in detail, its example is illustrated in the accompanying drawings.Following description is related to
During accompanying drawing, unless otherwise indicated, the same numbers in different accompanying drawings represent same or analogous key element.Following exemplary embodiment
Described in implementation method do not represent all implementation methods consistent with the utility model.Conversely, they be only with such as
The example of the consistent apparatus and method of some aspects being described in detail in appended claims, of the present utility model.
The term used in the utility model is the purpose only merely for description specific embodiment, and is not intended to be limiting this reality
With new." one kind ", " described " and " being somebody's turn to do " of singulative used in the utility model and appended claims
It is intended to include most forms, unless context clearly shows that other implications.It is also understood that term used herein " and/
Or " refer to and may be combined comprising one or more associated any or all of project listed.
It will be appreciated that though various information may be described using term first, second, third, etc. in the utility model,
But these information should not necessarily be limited by these terms.These terms are only used for being distinguished from each other open same type of information.For example, not
In the case of departing from the utility model scope, the first information can also be referred to as the second information, and similarly, the second information can also
It is referred to as the first information.Depending on linguistic context, word as used in this " if " can be construed to " ... when " or
" when ... " or " in response to determining ".
As shown in Figure 1 to Figure 3, the utility model discloses a kind of diffusion furnace quartz tube device, including outer layer quartz ampoule 10,
The layered quartz tube 20 being contained in inside outer layer quartz ampoule 10 and the air inlet pipe 30 and blast pipe that access the outer layer quartz ampoule 10
40, wherein, the outer layer quartz ampoule 10 and the cylindrical structure of layered quartz tube 20, the air inlet pipe 30 are used to lead to gas
Enter in the outer layer quartz ampoule 10 and layered quartz tube 20, the following specifically describes the detailed construction of foregoing all parts.
The length of the outer layer quartz ampoule 10 is more than the length of the layered quartz tube 20, and outer layer quartz ampoule 10 and internal layer
Quartz ampoule 20 is equipped with the inlet end and with blast pipe 40 adjacent exhaust end adjacent with the air inlet pipe 30, the outer layer quartz
The inlet end of pipe 10 does not flush setting with the inlet end of layered quartz tube 20, and a gas mixing chamber 11, the gas are provided between the two
Body hybrid chamber 11 is located in outer layer quartz ampoule 10 but outside layered quartz tube 20, and it may be such that gas uniformly mixes, and improve
Diffused sheet resistance uniformity, and the exhaust end of the outer layer quartz ampoule 10 and the exhaust end of layered quartz tube 20 then flush setting.
In addition, chamber 21 is provided with the layered quartz tube 20, and the annular surface of layered quartz tube 20 is provided with largely
The aperture portion 22 of chamber 21 described in insertion, the aperture portion 22 is set along the circumferencial direction of the annular surface, and along internal layer
The length direction distribution of quartz ampoule 20, in the utility model preferred embodiment, the aperture of the aperture portion 22 is preferably 0.5-
1.5cm, pitch of holes is 1.5-3cm, and the gas effciency for so setting is higher, and the aperture portion 22 is further to the chamber
Protruded out in 21, and the distance for protruding out is 1-2cm, is so provided with beneficial to fixed gas flow direction, gas is more quickly flowed to
The middle section of the chamber 21, reaches silicon chip center, increases diffusion uniformity, and do not changing the diffusion furnace constant temperature head of district
In the case of degree, quartz boat piece spacing can also be shortened, increase yield.In order to improve the steadiness of ectonexine quartz ampoule 10, institute
State and interlayer gap 23 and the support member in interlayer gap 23 24, institute are provided between layered quartz tube 20 and outer layer quartz ampoule 10
Stating interlayer gap 23 is available for air-flow by (airflow direction is as shown by the arrows in Figure 2), and the support member 24 is fixed on the outer layer
On the internal face of quartz ampoule 10, for supporting the layered quartz tube 20.The exhaust end of the layered quartz tube 20 is provided with
The extension 25 that the outer layer quartz ampoule 10 extends, the extension 25 has connected layered quartz tube 20 and outer layer quartz ampoule 10
Come so that the end in the interlayer gap 23 is sealed, and improves the air-tightness between inside and outside layer quartz ampoule 10,20.
The air inlet pipe 30 is connected to the inlet end of the outer layer quartz ampoule 10, and connects the gas mixing chamber 11, and
The air inlet pipe 30 is correspondingly arranged with the center of the outer layer quartz ampoule 10, and the blast pipe 40 is connected to the outer layer stone
The exhaust end of English pipe 10, and the height of blast pipe 40 is less than the air inlet pipe 30.
It can be seen that, the utility model is by setting separate layered quartz tube 20 and outer layer quartz ampoule 10 so that dismounting,
Cleaning is more convenient, and using the structure of aperture portion 22 special on layered quartz tube 20, can improve diffusion uniformity, Er Qie
In the case of not changing diffusion furnace constant temperature section length, quartz boat piece spacing can also be shortened, increase yield.
Preferred embodiment of the present utility model is the foregoing is only, is not used to limit the utility model, it is all at this
Within the spirit and principle of utility model, any modification, equivalent substitution and improvements done etc. should be included in the utility model
Within the scope of protection.
Claims (7)
1. a kind of diffusion furnace quartz tube device, it is characterised in that including outer layer quartz ampoule, be contained in inside outer layer quartz ampoule
Layered quartz tube and the air inlet pipe of gas is passed through to the outer layer quartz ampoule and layered quartz tube, is provided with the layered quartz tube
Annular surface and the chamber on the inside of annular surface, the annular surface are provided with the aperture portion of chamber described in insertion, described
Aperture portion protrudes into the chamber.
2. diffusion furnace quartz tube device as claimed in claim 1, it is characterised in that the layered quartz tube and outer layer quartz
Pipe is respectively provided between the inlet end adjacent with the air inlet pipe, and the inlet end of layered quartz tube and the inlet end of outer layer quartz ampoule
It is provided with gas mixing chamber.
3. diffusion furnace quartz tube device as claimed in claim 2, it is characterised in that the air inlet pipe is connected to the outer layer
The inlet end of quartz ampoule, and connect the gas mixing chamber, and the air inlet pipe and the outer layer quartz ampoule center pair
Should set, the aperture portion is protruded into the chamber towards the center of the outer layer quartz ampoule.
4. diffusion furnace quartz tube device as claimed in claim 3, it is characterised in that the aperture portion is along the annular surface
Circumferencial direction set, and along layered quartz tube length direction be distributed.
5. diffusion furnace quartz tube device as claimed in claim 4, it is characterised in that the layered quartz tube and outer layer quartz
Interlayer gap and the support member in interlayer gap are provided between pipe.
6. diffusion furnace quartz tube device as claimed in claim 5, it is characterised in that diffusion furnace quartz tube device is also
Including blast pipe, the height of the height less than the air inlet pipe of the blast pipe.
7. diffusion furnace quartz tube device as claimed in claim 6, it is characterised in that the layered quartz tube be provided with it is described
The adjacent exhaust end of blast pipe, the exhaust end of the layered quartz tube is provided with the extension that the outer layer quartz ampoule extends,
The extension is abutted to the outer layer quartz ampoule by the interlayer gap so that the end in the interlayer gap is by the extension
Section is closed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621367838.5U CN206298662U (en) | 2016-12-13 | 2016-12-13 | Diffusion furnace quartz tube device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621367838.5U CN206298662U (en) | 2016-12-13 | 2016-12-13 | Diffusion furnace quartz tube device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206298662U true CN206298662U (en) | 2017-07-04 |
Family
ID=59213463
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621367838.5U Expired - Fee Related CN206298662U (en) | 2016-12-13 | 2016-12-13 | Diffusion furnace quartz tube device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206298662U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112374734A (en) * | 2020-10-23 | 2021-02-19 | 北京凯德石英股份有限公司 | Large-caliber hoisting ring quartz tube processing tool |
-
2016
- 2016-12-13 CN CN201621367838.5U patent/CN206298662U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112374734A (en) * | 2020-10-23 | 2021-02-19 | 北京凯德石英股份有限公司 | Large-caliber hoisting ring quartz tube processing tool |
| CN112374734B (en) * | 2020-10-23 | 2021-07-13 | 北京凯德石英股份有限公司 | Large-diameter hoisting ring quartz tube processing tool |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102183019B (en) | Micro-combustor | |
| CN102422083A (en) | Combustor | |
| CN206298662U (en) | Diffusion furnace quartz tube device | |
| WO2022127132A1 (en) | Preparation process and device for high-purity low-radiation spherical silicon micropowder for use in 5g base station | |
| CN209199965U (en) | A kind of crystal silicon solar batteries production negative pressure wet oxygen disperser | |
| CN208803162U (en) | Boiler tube component and diffusion furnace | |
| CN106929923A (en) | A kind of Quartz stove tube | |
| CN106044775B (en) | Chassis assembly and polycrystalline silicon reducing furnace for polycrystalline silicon reducing furnace | |
| CN106237880A (en) | A kind of coal mine gas mixing device | |
| CN206846708U (en) | A kind of eddy flow back-diffusion flame burner | |
| CN207918889U (en) | Oxygen mixer | |
| CN205269403U (en) | A structure is disturbed to low flow resistance for flue gas denitration concurrent heating system | |
| CN207778429U (en) | A kind of multi-functional positive and negative diffusion flame burners | |
| CN211837312U (en) | Fluid mixer | |
| CN207922558U (en) | A kind of filtering type gas-heating apparatus | |
| CN207815315U (en) | A kind of flat-flame burner | |
| CN105070783A (en) | Spray pipe for high-temperature diffusion furnace and application thereof | |
| CN208954949U (en) | Vertical diffusion furnace | |
| CN207893758U (en) | A kind of natural gas and air mixing device for burner | |
| CN105402725A (en) | Micro diffuse type combustion apparatus for micro-thermphotoelectric system | |
| CN205821262U (en) | A kind of coal dust even distribution device | |
| CN207103806U (en) | A kind of follow-on casting air-cooling apparatus | |
| CN206626866U (en) | Oil eliminator and there is its air conditioner | |
| CN107166385A (en) | A kind of eddy flow back-diffusion flame burner | |
| CN206056277U (en) | A kind of exhaust structure of whirl-sintering furnace |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: No. 199, deer mountain road, Suzhou high tech Zone, Jiangsu Province Patentee after: Atlas sunshine Power Group Co.,Ltd. Patentee after: CANADIAN SOLAR MANUFACTURING (CHANGSHU) Inc. Address before: No. 199, deer mountain road, Suzhou high tech Zone, Jiangsu Province Patentee before: CSI SOLAR POWER GROUP Co.,Ltd. Patentee before: CANADIAN SOLAR MANUFACTURING (CHANGSHU) Inc. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170704 Termination date: 20211213 |