CN220148305U - Automatic detection center for silicon rod size - Google Patents
Automatic detection center for silicon rod size Download PDFInfo
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- CN220148305U CN220148305U CN202320816940.2U CN202320816940U CN220148305U CN 220148305 U CN220148305 U CN 220148305U CN 202320816940 U CN202320816940 U CN 202320816940U CN 220148305 U CN220148305 U CN 220148305U
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- silicon rod
- detection
- sliding table
- lifting frame
- driving
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- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 64
- 239000010703 silicon Substances 0.000 title claims abstract description 64
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 63
- 238000001514 detection method Methods 0.000 claims abstract description 60
- 238000012545 processing Methods 0.000 claims abstract description 30
- 230000007246 mechanism Effects 0.000 claims abstract description 28
- 238000007599 discharging Methods 0.000 claims abstract description 17
- 230000005540 biological transmission Effects 0.000 claims abstract description 12
- 239000000463 material Substances 0.000 claims description 8
- 239000003638 chemical reducing agent Substances 0.000 claims description 6
- 230000000694 effects Effects 0.000 claims description 2
- 238000005286 illumination Methods 0.000 claims description 2
- 238000003754 machining Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 230000003068 static effect Effects 0.000 abstract description 4
- 238000012546 transfer Methods 0.000 abstract description 4
- 238000010924 continuous production Methods 0.000 abstract description 2
- 238000005516 engineering process Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000000284 resting effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
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Abstract
The utility model discloses an automatic detection center for the size of a silicon rod, which comprises a processing detection device arranged at a processing station of the silicon rod and a sliding table assembly for realizing that the silicon rod is positioned at the processing station, wherein a feeding conveyor 2 and a discharging conveyor 5 are respectively arranged at the front end and the rear end of the sliding table assembly; the conveyor comprises a lifting frame 19, vertical guide rails 18 arranged at two ends of the lifting frame 19, and a belt transmission mechanism arranged on the lifting frame 19; the sliding table assembly comprises a detection sliding table 4 and a driving mechanism for driving the detection sliding table 4 to reciprocate. The utility model realizes the specific processing or detection of the silicon rod in the static state during the processing or detection, simultaneously, the feeding and the discharging of other silicon rods are continuously carried out, and continuous production is realized without stopping the feeding and the discharging mechanisms, thereby achieving the aim of high-efficiency production; in addition, the utility model also realizes the stable transfer of the silicon rod between the conveying platform and the detecting platform.
Description
Technical Field
The utility model relates to a silicon rod processing technology, in particular to a transfer mechanism between three station platforms of feeding, processing and discharging during silicon rod processing or detection.
Background
With the development of the semiconductor industry, the processing technology of the silicon rod is mature, but the existing technology aims at the silicon rod processing, and how to realize automatic production is a problem to be solved. Especially, the conveying of the silicon rod can reduce jolting of the silicon rod; meanwhile, the device can realize specific processing or detection in a static state at a specific processing station, and simultaneously performs feeding and discharging, and continuously performs feeding and discharging operations in a state of no need of stopping, so that the requirement of efficient production is finally met, and the device is a problem to be solved.
Disclosure of Invention
Aiming at the problems, the utility model provides an automatic detection center for the size of a silicon rod, and other improvements are that the silicon rod conveying mode is particularly adopted during the specific processing or detection, in particular, the specific processing or detection under the static state of the silicon rod is realized at the processing or detection station, meanwhile, the feeding and the discharging of other silicon rods are continuously carried out, and the requirement of high-efficiency production is met under the state of no need of shutdown. Meanwhile, the utility model also realizes the stable transfer of the silicon rod between the conveying platform and the detecting platform.
In order to achieve the above purpose, the utility model provides an automatic detection center for the size of a silicon rod, which comprises a processing detection device arranged at a processing station of the silicon rod and a sliding table assembly for realizing that the silicon rod is positioned at the processing station. The front end and the rear end of the sliding table assembly are respectively provided with a feeding conveyor and a discharging conveyor; the sliding table assembly, the feeding conveyor and the discharging conveyor are arranged on a base; the principle of material loading conveyer with the unloading conveyer is unanimous, and the structure includes: the lifting device comprises a lifting frame, vertical guide rails arranged at two ends of the lifting frame and a belt transmission mechanism arranged on the lifting frame; the belt transmission mechanism comprises a driving wheel driven by a driving motor, a driven wheel driven by the driving wheel and a conveyor belt; the conveying belts are a pair of conveying belts which are arranged in parallel on a horizontal plane, and the driving wheel and the driven wheel which synchronously rotate are correspondingly arranged on the two conveying belts respectively; the lifting frame is provided with a lifting mechanism; the sliding table assembly comprises a detection sliding table and a driving mechanism for driving the detection sliding table to reciprocate.
Wherein, keep certain horizontal clearance or elasticity between crane and the perpendicular guide rail that both ends set up to when the crane both ends go up and down asynchronism, can not take place to damage because of rigid connection. In addition, the mesa that detects the slip table with the conveyer belt upper surface is equivalent, and the height of conveyer belt is by the lift of crane is confirmed, and at the during operation, feed mechanism's conveyer belt, the silicon rod on it is to detecting the slip table when shifting, adjusts to the two high unanimity through the crane to realize steady transition. The silicon rod is transferred between the blanking conveyor belt and the detection sliding table in a consistent mode, so that the stable requirement is met.
The lifting mechanism arranged on the lifting frame can be any mechanism for driving the lifting frame body to lift, and the lifting amplitude is small, so that the utility model provides a preferable mode: the lifting mechanism arranged on the lifting frame comprises a wedge block sliding along a horizontal guide rail at the bottom of the lifting frame and a roller wheel supported on the inclined surface at the bottom of the wedge block; the wedge block is connected with a cylinder pull rod driven by a cylinder, so that the sliding on the horizontal guide rail is realized.
Wherein the sliding direction of the wedge block is consistent with the transmission direction of the belt transmission mechanism. And the arrangement mode of the inclined planes at the bottom of the corresponding wedge blocks is used for setting the direction of the inclined planes according to the requirements.
Preferably, the driving mechanism for driving the detection sliding table to reciprocate comprises a linear guide rail for guiding the detection sliding table, a motor for driving the detection sliding table to move and a ball screw for transmission; the motor is provided with a speed reducer.
In a preferred mode, materials with high friction coefficients are paved on the surface of the detection sliding table.
Under the preferred mode, processing detection device is silicon rod size and precision's automatic checkout device, including by the support by servo module drive by slip table slide rail realize gliding industrial camera or sensor or laser rangefinder.
Preferably, the processing detection device comprises an illumination light source.
The utility model realizes the automatic measurement of the silicon rod size, can achieve unmanned operation and improves the accuracy; the continuous automatic detection for 24 hours can be realized, the detection result is uploaded to the MAS, the work efficiency is improved, and the manual input and errors are avoided. The manual work station is reduced, and the efficiency is improved. The utility model is suitable for detecting the range of 150-240 mm of the end face width and 100-1000 mm of the length of the silicon rod.
The utility model has the advantages that the silicon rod conveying mode is particularly processed or detected, the silicon rod is particularly processed or detected in a processing or detecting station in a static state, meanwhile, the feeding and discharging of other silicon rods are continuously carried out, continuous production is realized without stopping a feeding and discharging mechanism, and the aim of high-efficiency production is fulfilled. Meanwhile, the utility model also realizes the stable transfer of the silicon rod between the conveying platform and the detecting platform.
Drawings
FIG. 1 is a schematic view of a three-dimensional structure of an automatic silicon rod size detection center according to the present utility model;
FIG. 2 is a schematic diagram of a front view of an automatic silicon rod size detection center according to the present utility model;
FIG. 3 is a schematic top view of the automatic silicon rod size detection center of FIG. 2;
FIG. 4 is a schematic side view of the automatic silicon rod size detection center of FIG. 2;
FIG. 5 is a schematic view of a structure of a silicon rod size automatic inspection center of the present utility model in which a slide table portion is inspected, wherein the right side is a sectional view;
FIG. 6 is a perspective view of the view in the direction A-A of FIG. 3
FIG. 7 is a schematic top view of the portion of FIG. 6;
FIG. 8 is a schematic view of the structure of the elevation transport mechanism (the loading and unloading conveyors);
FIG. 9 is a schematic top view of the lift mechanism of FIG. 8;
FIG. 10 is a schematic side elevational view of the lift conveyor of FIG. 8;
FIG. 11 is a schematic view of the B-B projection structure of FIG. 8.
1, a base; 2. a loading conveyor; 3. an automatic detection device for the size and the precision of the silicon rod; 4. detecting a sliding table; 5, blanking conveyor; 6. silicon rod (workpiece to be inspected); 10. a driving motor; 11. a driving wheel; 12. driven wheel; 13. a conveyor belt; 15. a cylinder tie rod; 16. wedge blocks; 17. a support block; 18. a vertical guide rail; 19 lifting frames; 21. a motor; 23. a speed reducer; 24. a ball screw; 25. a linear guide rail; 63. roller, 64 cylinder.
Detailed Description
As shown in fig. 1 to 4, in combination with fig. 6 and 7, the automatic silicon rod size detection center of the present utility model comprises a processing detection device arranged at a silicon rod processing station, and a sliding table assembly for realizing that the silicon rod is positioned at the processing station. The front end and the rear end of the sliding table component are respectively provided with a feeding conveyor 2 and a discharging conveyor 5; the sliding table assembly, the feeding conveyor 2 and the discharging conveyor 5 are all arranged on a base 1.
The principle of the feeding conveyor 2 is consistent with that of the discharging conveyor 5, the structure is shown in fig. 8-11, and the conveyor comprises a lifting frame 19, vertical guide rails 18 arranged at two ends of the lifting frame 19, and a belt transmission mechanism arranged on the lifting frame 19. The belt transmission mechanism comprises a driving wheel 11 driven by a driving motor 10, a driven wheel 12 driven by the driving wheel and a conveyor belt 13; the conveying belts 13 are a pair of conveying belts which are arranged in parallel on a horizontal plane, and the driving wheel 11 and the driven wheel 12 which synchronously rotate are correspondingly arranged on the two conveying belts 13 respectively; the lifting frame 19 is provided with a lifting mechanism. The lifting mechanism comprises a wedge block 16 sliding along a horizontal guide rail at the bottom of the lifting frame 19 and a roller 63 supported on the inclined surface at the bottom of the wedge block 16; the wedge 16 is connected to a cylinder rod 15 driven by a cylinder 64 to effect sliding movement in the horizontal rail.
The sliding table assembly, as shown in fig. 5 and fig. 6 and 7, comprises a detection sliding table 4 and a driving mechanism for driving the detection sliding table 4 to reciprocate. The driving mechanism comprises a linear guide rail 25 for guiding the detection sliding table 4, a motor 21 for driving the detection sliding table 4 to move and a ball screw for transmission; the motor 21 is provided with a speed reducer 23. Preferably, a material with a high friction coefficient is paved on the surface of the detection sliding table 4. In addition, the processing detection device of the device is an automatic detection device of the size and the precision of the silicon rod, and comprises an industrial camera or a sensor or a laser ranging device which is supported by a bracket and driven by a servo module to slide by a sliding table and a sliding rail.
In summary, the automatic detection center for the silicon rod size consists of a base 1, a feeding conveyor 2, an automatic detection device 3 for the silicon rod size and precision, a detection sliding table 4, a discharging conveyor 5 and the like. Reference numeral 6 in the drawing denotes a silicon rod (workpiece to be inspected). The detection sliding table and the blanking conveyor are guarantees for realizing automatic detection.
The feeding conveyor consists of a driving motor 10, a speed reducer, a driving wheel 11, a driven wheel 12, two conveying belts 13 which are arranged front and back, an air cylinder, a pull rod 15, a wedge block 16, a supporting block 17, a vertical guide rail 18 and a lifting frame 19.
The detection slipway is arranged between the detection slipway and the upper and lower material conveyer, as shown in fig. 6 and 7, and the detection slipway 4 is arranged between the upper and lower material conveyer. The detection sliding table 4 is driven by a motor 21, a speed reducer 23 and a ball screw 24 to reciprocate left and right on a linear guide rail 25; on both sides of the detection sliding table 4, four conveying belts 13 are arranged.
The silicon rod 6 is matched with other auxiliary facilities and enters the feeding conveyor 2, the motor 10 drives the driving wheel 11 to move the silicon rod 6 leftwards to the left end of the conveyor through the conveying belt 13, and then the silicon rod 6 goes up to the upper surface of the detection sliding table 4.
The processing detection device is an automatic detection device for the size and the precision of a silicon rod, and comprises an industrial camera or a sensor or a laser ranging device which is supported by a bracket and driven by a servo module to slide by a sliding table and a sliding rail. The silicon rod 10 resting on the inspection slide table 4 is inspected. The detection sliding table 4 is made of a material with a high friction coefficient, and clamping is not needed during silicon rod detection. The utility model relates to an automatic detection device for the size and the precision of a silicon rod, which can select detection components in the prior art. The detection sliding table 4 carries the silicon rod to move along the length direction of the silicon rod, and the size detection of different sections 2, 3, 4 and n of the silicon rod is carried out; the utility model can be realized by the related detection device and the configuration control software according to the number of the positions to be detected, and the optimal setting and modification are realized by the menu.
The foregoing is only a preferred embodiment of the present utility model, but the scope of the present utility model is not limited thereto, and any person skilled in the art, who is within the scope of the present utility model, should be covered by the protection scope of the present utility model by making equivalents and modifications to the technical solution and the inventive concept thereof.
Claims (6)
1. The automatic detection center for the size of the silicon rod comprises a processing detection device arranged at a processing station of the silicon rod and a sliding table component for realizing that the silicon rod is positioned at the processing station,
the front end and the rear end of the sliding table assembly are respectively provided with a feeding conveyor (2) and a discharging conveyor (5);
the sliding table assembly, the feeding conveyor (2) and the discharging conveyor (5) are arranged on a base (1);
wherein, the principle of material loading conveyer (2) with unloading conveyer (5) is unanimous, and the structure includes: a lifting frame (19), vertical guide rails (18) arranged at two ends of the lifting frame (19), and a belt transmission mechanism arranged on the lifting frame (19); the belt transmission mechanism comprises a driving wheel (11) driven by a driving motor (10), a driven wheel (12) driven by the driving wheel and a conveyor belt (13); the conveying belts (13) are a pair of conveying belts which are arranged in parallel on a horizontal plane, and the driving wheel and the driven wheel (12) which synchronously rotate are correspondingly arranged on the two conveying belts (13) respectively; the lifting frame (19) is provided with a lifting mechanism;
the sliding table assembly comprises a detection sliding table (4) and a driving mechanism for driving the detection sliding table (4) to reciprocate.
2. The automatic silicon rod size detection center according to claim 1, wherein the lifting mechanism arranged on the lifting frame (19) comprises a wedge block (16) sliding along a horizontal guide rail at the bottom of the lifting frame (19), and a roller (63) supported on the bottom inclined surface of the wedge block (16); the wedge (16) is connected to a cylinder rod (15) driven by a cylinder (64) to effect sliding movement on the horizontal rail.
3. The automatic silicon rod size detection center according to claim 1, wherein the driving mechanism for driving the detection sliding table (4) to reciprocate comprises a linear guide rail (25) for guiding the detection sliding table (4), a motor (21) for driving the detection sliding table (4) to move and a ball screw for transmission; the motor (21) is provided with a speed reducer (23).
4. A silicon rod size automatic detection center according to claim 3, characterized in that the surface of the detection sliding table (4) is paved with a material with a high friction coefficient.
5. The automatic detection center for the size of the silicon rod according to claim 1, wherein the machining detection device is an automatic detection device for the size and the precision of the silicon rod and comprises an industrial camera or a sensor or a laser ranging device which is supported by a bracket and driven by a servo module to slide by a sliding table and a sliding rail.
6. The automatic silicon rod size detection center according to claim 1, wherein the processing detection means includes an illumination light source.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320816940.2U CN220148305U (en) | 2023-04-13 | 2023-04-13 | Automatic detection center for silicon rod size |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320816940.2U CN220148305U (en) | 2023-04-13 | 2023-04-13 | Automatic detection center for silicon rod size |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220148305U true CN220148305U (en) | 2023-12-08 |
Family
ID=89012364
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320816940.2U Active CN220148305U (en) | 2023-04-13 | 2023-04-13 | Automatic detection center for silicon rod size |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220148305U (en) |
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2023
- 2023-04-13 CN CN202320816940.2U patent/CN220148305U/en active Active
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