CN220065621U - Ion generating device and ion beam emitter thereof - Google Patents

Abstract

The utility model relates to the technical field of ion beam emission, and discloses an ion generating device and an ion beam emitter thereof. In the utility model, the ion generating device comprises a base, an ionization part and a shell; the ionization component comprises a fixing part and a base part, a first runner and a second runner are arranged on the base, one end of the first runner penetrates through the base to be communicated with the outside, and the other end of the first runner is communicated with the second runner; a filter element is arranged in the first flow passage so as to filter gas flowing into the base, thereby reducing impurities in the gas and reducing the influence of the impurities on the ion purity. The second flow channel comprises a plurality of annular flow channels which are sequentially arranged from inside to outside along the radial direction of the base, and the annular flow channels are mutually communicated, so that gas flowing into the second flow channel through the first flow channel can quickly flow to the innermost annular flow channel and is conveyed to the ionization part for ionization, the flowing speed of the gas is improved, and the generation speed of ions is further improved.

Description

Ion generating device and ion beam emitter thereof

Technical Field

The present utility model relates to the field of ion beam emission, and in particular, to an ion generating device and an ion beam emitter thereof.

Background

In industry, when the surface of a component is uneven and deviates from the target shape (i.e., deviates from the target surface), for example, having too much or too little material, it is necessary to process the surface of the component by a process. In the surface treatment process, the ion beam etching technology has been widely used in the fields of semiconductors, optoelectronics, microelectromechanical systems, and the like, due to the advantages of high precision and high efficiency. The ion beam etching technology is based on the principle that ion beam is bombarded to the surface of material with high energy and high speed to produce chemical reaction or physical change, so as to realize the etching of the surface of material.

The ion beam emitter in the prior art mainly comprises an ion generating device and an ion beam emitting device, wherein the ion generating device mainly comprises a base and an ionization component, the base is used for introducing gas, and the ionization component is used for ionizing the gas and emitting the gas through the ion beam emitting device.

However, the inventors found that there are at least the following problems in the related art: in some cases, etching processing has specific requirements on the ion generation speed of the ion generation device, and in order to meet the requirements on the ion generation speed, the speed of ionized gas of the ionization component is increased by increasing the air inlet speed in the air inlet channel on the base, so that the ion generation speed is increased. However, impurities exist in the gas, and the higher gas inlet speed brings more impurities, so that the purity of the generated ions is influenced.

Disclosure of Invention

The utility model aims to provide an ion generating device which can make the purity of generated ions higher on the premise of meeting the requirement of ion generation speed.

In order to solve the technical problems, an embodiment of the present utility model provides an ion generating device, including a base, an ionization component, and a housing; the base is fixedly connected to one end of the shell, and the ionization component is arranged in the shell; the ionization component comprises a fixing part and a base part, one end of the fixing part is fixedly connected with the base part, and the other end of the fixing part extends towards a direction away from the base part and is fixedly connected with the base; the base is provided with a first flow passage and a second flow passage, one end of the first flow passage penetrates through the base to be communicated with the outside, and the other end of the first flow passage is communicated with the second flow passage; a filter element is arranged in the first flow passage; the second flow channel comprises a plurality of annular flow channels which are sequentially arranged from inside to outside along the radial direction of the base, the annular flow channels are mutually communicated, and the innermost annular flow channel conveys gas flowing in through the first flow channel and the second flow channel to the ionization part for ionization.

Compared with the prior art, the embodiment of the utility model has the advantages that after the gas flowing in from the first flow passage of the base enters the second flow passage, the gas can quickly flow to the innermost annular flow passage and is conveyed to the ionization part for ionization, so that the flow speed of the gas is increased, the generation speed of ions is increased, and the ion generation device meets the requirement of the ion generation speed. And the setting of filter core in the first runner can play the filter effect to the gas that flows into in the base fast to reduce the impurity in the gas, reduce the influence of impurity to ion purity, and then make the ion purity of production higher.

In addition, the filter element is arranged in the other end of the first flow channel; the filter element is far away from one end of the second flow channel and is in an inverted ladder shape, and the inner contour shape of the other end of the first flow channel is matched with the filter element. The arrangement mode can facilitate the installation of the filter element and can also play a role in positioning the filter element.

In addition, the second flow passage further comprises a plurality of connecting flow passages which are sequentially arranged at intervals along the circumferential direction of the base; each connecting runner radially extends along the radial direction of the base, and the plurality of annular runners are mutually communicated through each connecting runner. The arrangement mode enables the gas flowing into the second flow channel to be quickly conveyed to the ionization component for ionization through each connecting flow channel, so that the flowing speed of the gas is further improved, and the generation speed of ions is further improved.

In addition, four guide grooves are formed in the side surface of the base part, which is connected with the fixing part, one end of each guide groove extends to the side wall of the fixing part and radially extends from the side wall of the fixing part along the radial direction of the base part, and the four guide grooves are in a cross shape; a cross-shaped first through hole is formed in one end of the fixing part fixedly connected with the base part, and four openings are formed in the side wall of the fixing part; and, the four openings of the first through hole are respectively communicated with the one ends of the four guide grooves. The four guiding grooves can guide the gas so that the gas can flow into the first through hole more quickly, the first through hole enables the gas to enter the fixing part for ionization, the contact area of the gas and the ionization part is further increased, and the generation speed of ions is further improved.

In addition, a second through hole matched with the fixing part is formed in the end face of the one end of the shell; a clamping groove is formed in the base at a position corresponding to the second through hole; the fixing part passes through the second through hole and is matched with the clamping groove, so that the fixing part is fixedly connected to the base; and the clamping groove is in a step shape, and the outer contour shape of the fixing part is matched with the step-shaped clamping groove. The connecting structure can facilitate the assembly of the ionization component and the base; the design of echelonment joint groove and the fixed part of adaptation with it can be convenient for the location between ionization part and the base to further improve ionization part and the convenience of base installation.

In addition, a clamping boss is arranged on the end face, close to the shell, of the base, and a concave part is arranged on the end face of one end of the shell; the clamping boss stretches into the concave part and is matched with the concave part, and the base is fixedly connected to the shell through the clamping boss matched with the concave part. The arrangement mode can improve convenience of the installation base and the shell.

In addition, the bottom surface of the concave part is tightly attached to the end surface of the clamping boss, and each annular flow passage and each connecting flow passage are grooves formed on the end surface of the clamping boss; a plurality of communication holes which are sequentially arranged along the circumferential direction of the base at intervals are formed between the annular flow channel positioned at the innermost side on the base and the clamping groove, and the clamping groove is communicated with the annular flow channel positioned at the innermost side on the base through the communication holes so as to convey the gas in the second flow channel to the ionization component. Compared with the arrangement mode of the second flow channel formed in the base, the annular flow channels and the connecting flow channels are formed on the end face of the clamping boss in the form of the grooves, so that the second flow channel can be conveniently machined and manufactured, and the production cost of the base is reduced. The bottom surface of the concave part is tightly attached to the end surface of the clamping boss so as to ensure the tightness between the base and the end surface of the shell.

In addition, the ion generating device further comprises an air guide nozzle, one end of the air guide nozzle is embedded in the first flow channel, and the other end of the air guide nozzle extends to the outside of the first flow channel; and a sealing ring is arranged at the joint of the air guide nozzle and the inner wall of the first flow passage. The arrangement of the air guide nozzle can facilitate the communication between the gas supply part and the first runner, and the arrangement of the sealing ring can ensure the tightness of the connection between the gas supply part and the air guide nozzle.

In addition, one end of the fixing part far away from the base part is provided with a pin hole; a pin rod channel is arranged on the base corresponding to the pin hole, one end of the pin rod channel is communicated with the pin hole, and the other end of the pin rod channel penetrates through the base to be communicated with the outside; the ion generating device further comprises a connecting pin rod which passes through the pin rod channel to be matched with the pin hole, so that the fixing part is fixedly connected with the base; and, the pin is made of conductive material. The ionization part of ion generation device is electrified through the connecting pin rod, and the setting of connecting pin rod and pinhole can also further improve the steadiness of being connected between base and the ionization part.

The embodiment of the utility model also provides an ion beam emitter which comprises any one of the ion generating devices. In the ion beam emitter, after the gas flowing in from the first flow passage of the base enters the second flow passage, the gas can flow to the innermost annular flow passage rapidly and is conveyed to the ionization part for ionization, so that the flow speed of the gas is increased, the generation speed of ions is increased, and the ion generation device meets the requirement of the ion generation speed. And the setting of filter core in the first runner can play the filter effect to the gas that flows into in the base fast to reduce the impurity in the gas, reduce the influence of impurity to ion purity, and then make the ion purity of production higher.

Drawings

One or more embodiments are illustrated by way of example and not limitation in the figures of the accompanying drawings, in which like references indicate similar elements, and in which the figures of the drawings are not to be taken in a limiting sense, unless otherwise indicated.

Fig. 1 is a schematic cross-sectional structure of an ion generating device provided according to an embodiment of the present utility model;

fig. 2 is a schematic structural view of a flow channel on a base of an ion generating device according to an embodiment of the present utility model;

fig. 3 is a schematic bottom view of an ionization component of an ion generating device according to an embodiment of the present utility model;

FIG. 4 is a schematic cross-sectional view of the structure of FIG. 3 in the direction A-A;

fig. 5 is a schematic cross-sectional structure of an ion beam emitter provided according to an embodiment of the present utility model.

Reference numerals:

10: a base; 110: a first flow passage; 120: a second flow passage; 121: an annular flow passage; 122: a connecting runner; 130: a clamping groove; 140: the boss is clamped; 150: a communication hole; 160: a pin shaft channel;

20: an ionization member; 210: a fixing part; 211: a first through hole; 212: a pin hole; 220: a base; 221: a guide groove;

30: a housing; 310: a second through hole; 320: a recessed portion;

40: an air guide nozzle;

50: a seal ring;

60: a connecting pin rod;

70: a filter element;

80: an ion beam emitting device.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the present utility model more apparent, embodiments of the present utility model will be described in detail below with reference to the accompanying drawings. However, those of ordinary skill in the art will understand that in various embodiments of the present utility model, numerous technical details have been set forth in order to provide a better understanding of the present utility model. However, the technical solutions claimed in the claims of the present utility model can be realized without these technical details and various changes and modifications based on the following embodiments.

In the embodiments of the present utility model, terms such as "upper", "lower", "left", "right", "front", "rear", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal" and the like indicate azimuth or positional relationship based on that shown in the drawings. These terms are only used to better describe the present utility model and its embodiments and are not intended to limit the scope of the indicated devices, elements or components to the particular orientations or to configure and operate in the particular orientations.

Also, some of the terms described above may be used to indicate other meanings in addition to orientation or positional relationships, for example, the term "upper" may also be used to indicate some sort of attachment or connection in some cases. The specific meaning of these terms in the present utility model will be understood by those of ordinary skill in the art according to the specific circumstances.

Furthermore, the terms "mounted," "configured," "provided," "connected," and "connected" are to be construed broadly. For example, it may be a fixed connection, a removable connection, or a unitary construction; may be a mechanical connection, or an electrical connection; may be directly connected, or indirectly connected through intervening media, or may be in internal communication between two devices, elements, or components. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

Furthermore, the terms "first," "second," and the like, are used primarily to distinguish between different devices, elements, or components (the particular species and configurations may be the same or different), and are not used to indicate or imply the relative importance and number of devices, elements, or components indicated. Unless otherwise indicated, the meaning of "a plurality" is two or more.

Embodiments of the present utility model relate to an ion generating device, see fig. 1 and 2, comprising a base 10, an ionization member 20, and a housing 30; the base 10 is fixedly connected to one end of the shell 30, and the ionization component 20 is arranged in the shell 30; the ionization member 20 includes a fixing portion 210 and a base portion 220, one end of the fixing portion 210 is fixedly connected to the base portion 220, and the other end extends in a direction away from the base portion 220 and is fixedly connected to the base 10; the base 10 is provided with a first flow passage 110 and a second flow passage 120, one end of the first flow passage 110 penetrates through the base 10 to be communicated with the outside, the other end of the first flow passage 110 is communicated with the second flow passage 120, and the first flow passage 110 is internally provided with a filter element 70; the second flow path 120 includes a plurality of annular flow paths 121 disposed sequentially from inside to outside in the radial direction of the base 10, the plurality of annular flow paths 121 are communicated with each other, and the innermost annular flow path 121 delivers the gas flowing in through the first flow path 110 and the second flow path 120 to the ionization member 20 for ionization.

Compared with the prior art, in the embodiment of the utility model, after the gas flowing in from the first flow channel 110 of the base 10 enters the second flow channel 120, the gas can quickly flow to the innermost annular flow channel 121 and be conveyed to the ionization part 20 for ionization, so that the flow speed of the gas is increased, the generation speed of ions is further increased, and the ion generating device meets the requirement of the ion generation speed. The filter element 70 in the first flow channel 110 can filter the gas flowing into the base 10 quickly, so as to reduce impurities in the gas, reduce the influence of the impurities on the ion purity, and further make the generated ion purity higher.

Specifically, the filter element 70 is disposed in the other end of the first flow passage 110; the end of the cartridge 70 remote from the second flow passage 120 is inverted stepped and the other end of the first flow passage 110 has an inner contoured shape that matches the cartridge 70. This arrangement can facilitate the installation of the filter element 70 and can also locate the filter element 70. Also, the filter element 70 may be made of a filterable material such as quartz sand.

The plurality of annular flow passages 121 may form a spiral flow passage in a mode of connecting adjacent annular flow passages 121 end to end, so that the plurality of annular flow passages 121 are mutually communicated, or a communication flow passage may be provided for communicating each annular flow passage 121, or other communication modes may be adopted. In this embodiment, the second flow channel 120 further includes a plurality of connecting flow channels 122 sequentially arranged at intervals along the circumferential direction of the base 10; the connecting flow passages 122 extend radially in the radial direction of the base 10, and the plurality of annular flow passages 121 communicate with each other via the connecting flow passages 122. The arrangement mode enables the gas flowing into the second flow channel 120 from the first flow channel 110 of the base 10 to be quickly conveyed to the ionization component 20 for ionization through each connecting flow channel 122, so that the flow speed of the gas is increased, and the generation speed of ions is further increased.

The fixing portion 210 and the base portion 220 may be connected by a fastening or screwing manner, or may be integrally formed, and in order to facilitate the processing and manufacturing of the ionization member 20, the fixing portion 210 and the base portion 220 in this embodiment are integrally formed. The base 10 and the housing 30 are made of non-conductive materials, and may be specifically made of ceramics, quartz, or the like. The ionization ring is made of conductive materials, and can be graphite, steel and other materials.

The base 10 may be fixedly connected to the housing 30 by means of a clamping connection, a screw connection, or the like, and the fixing portion 210 of the ionization member 20 may be fixedly connected to the base 10 by means of a clamping connection, a screw connection, or the like. The specific connection structure can be adaptively designed according to the actually selected connection mode. In this embodiment, a second through hole 310 adapted to the fixing portion 210 is provided on an end surface of one end of the housing 30; a clamping groove 130 is formed in the base 10 at a position corresponding to the second through hole 310; the fixing portion 210 passes through the second through hole 310 to be matched with the clamping groove 130, so that the fixing portion 210 is fixedly connected to the base 10. The locking groove 130 is stepped, and the outer contour of the fixing portion 210 is adapted to the stepped locking groove 130. Such a connection can facilitate assembly of the ionization member 20 with the base 10. The design of the stepped clamping groove 130 and the fixing part 210 matched with the stepped clamping groove can facilitate the positioning between the ionization part 20 and the base 10, so that the convenience of the installation of the ionization part 20 and the base 10 is further improved. The base 10 is provided with a clamping boss 140 on an end surface close to the housing 30, and a recess 320 is provided on an end surface of one end of the housing 30. The clamping boss 140 extends into the concave portion 320 and is matched with the concave portion 320, and the base 10 is fixedly connected to the shell 30 through the clamping boss 140 matched with the concave portion 320. This arrangement can facilitate assembly of the base 10 and the housing 30.

And, the ionization part 20 can be provided with a conductive wire harness for being electrified with an external power supply, and the base 10 is provided with a through hole which enables the conductive wire harness to pass through and extend to the outside to be connected with the external power supply, and the ionization part 20 can also be electrified with the external power supply through other structures. In the present embodiment, a pin hole 212 is provided at an end of the fixing portion 210 remote from the base portion 220; the base 10 is provided with a pin passage 160 at a position corresponding to the pin hole 212, one end of the pin passage 160 communicates with the pin hole 212, and the other end penetrates the base 10 to communicate with the outside. The ion generating device further includes a connection pin 60, and the connection pin 60 is engaged with the pin hole 212 through the pin passage 160 such that the fixing portion 210 is fixedly connected with the base 10. The pin rod is made of conductive materials, and can be made of steel, cast iron and other materials. One end of the pin rod is in contact with the ionization part 20, and the other end of the pin rod can be connected with an external power supply, so that the ionization part 20 is electrified through the connecting pin rod 60, and the stability of connection between the base 10 and the ionization part 20 can be further improved through the arrangement of the connecting pin rod 60 and the pin hole 212.

More specifically, the annular flow path 121 and the connecting flow path 122 may be passages formed in the base 10, or may be grooves formed in the end surface of the base 10. In this embodiment, in order to facilitate the processing and manufacturing of the second flow channel 120 and thereby reduce the production cost of the base 10, each annular flow channel 121 and each connecting flow channel 122 are grooves formed on the end surface of the clamping boss 140. A plurality of communication holes 150 are provided in the base 10 between the innermost annular flow passage 121 and the engaging groove 130, the communication holes 150 being provided in order at intervals in the circumferential direction of the base 10, and the engaging groove 130 communicates with the innermost annular flow passage 121 of the base 10 via the communication holes 150 to transport the gas in the second flow passage 120 to the ionization member 20. In order to ensure the tightness between the base 10 and the end surface of the housing 30, the bottom surface of the recess 320 is tightly attached to the end surface of the engaging boss 140.

In addition, in order to facilitate the communication between the gas supply component and the first flow channel 110, the first flow channel 110 is provided therein with a gas guiding nozzle 40, one end of the gas guiding nozzle 40 is embedded in the first flow channel 110, and the other end extends to the outside of the first flow channel 110. The sealing ring 50 is disposed at the joint between the air tap 40 and the inner wall of the first flow channel 110 to ensure the tightness of the connection between the air supply part and the air tap 40. The air nozzle 40 may be made of a non-conductive material, specifically, a material such as ceramic or quartz, and the seal ring 50 may be made of a non-conductive flexible material, specifically, a material such as rubber or silica gel.

Further, referring to fig. 3 and 4, a plurality of guide grooves 221 are provided on a side surface of the base 220 to which the fixing portion 210 is coupled, and one end of each guide groove 221 extends to a sidewall of the fixing portion 210 and radially extends from the sidewall of the fixing portion 210 in a radial direction of the base 220. The guide grooves 221 can provide a certain guide effect to the gas flowing out of the second flow passage 120 so that the gas can more rapidly contact the ionization member 20 to increase the generation speed of ions. The guide grooves 221 can increase the contact area between the gas and the base 220 of the ionization member 20, thereby further increasing the ion generation rate. Specifically, the number of the guide grooves 221 may be set to two, four, eight, or the like, and in the present embodiment, the guide grooves 221 are four, and the four guide grooves 221 are in a cross shape; a first through hole 211 in a cross shape is provided in one end of the fixing portion 210 fixedly connected with the base portion 220, and the first through hole 211 forms four openings on a side wall of the fixing portion 210; and, the four openings of the first through hole 211 communicate with one ends of the four guide grooves 221, respectively. The four guide grooves 221 guide the gas to rapidly flow into the first through holes 211, and the gas enters the fixing portion 210 through the first through holes 211 to be ionized, so that the contact area between the gas and the ionization member 20 is further increased, and the generation speed of ions is increased.

The ion generation principle of the ion generation device is as follows: after the connecting pin 60 is connected with an external power supply, the ionization component 20 is in an electrified state, and gas is conveyed to the first flow channel 110 on the base 10 through the gas guide nozzle 40, then conveyed to the ionization component 20 through the second flow channel 120 on the base 10, and is ionized into ions through the ionization component 20. And the gas is inert gas or reaction gas, wherein the inert gas is generally argon, and the type of the reaction gas is determined according to the material of the material etched by the ion beam, namely, the reaction gas can react with the material etched by the ion beam so as to strengthen the etching effect of the surface of the material when the ion beam is emitted to the surface of the material.

Another embodiment of the present utility model further provides an ion beam emitter, referring to fig. 5, including any of the above-mentioned ion generating devices and an ion beam emitting device 80, where the ion beam emitting device 80 is disposed at an end of the housing 30 far away from the ion generating device, and after the ion generating device generates ions, the ion beam is formed by the ion beam emitting device 80 and emitted, so as to bombard a surface of a material to be etched. In the ion beam emitter, the gas of the ion generating device is delivered into the first flow channel 110 of the base 10 through the gas guide nozzle 40, filtered by the filter element 70 and flows into the second flow channel 120, then the gas is rapidly delivered into each annular flow channel 121 through each connecting flow channel 122 of the second flow channel 120, and then the gas in the annular flow channel 121 positioned at the innermost side of the base 10 along the radial direction thereof is delivered to the ionization part 20 for ionization through the communication hole 150. The filter element 70 can filter the gas flowing into the base 10 quickly, so as to reduce impurities in the gas, reduce the influence of the impurities on the ion purity, and enable the generated ion purity to be higher. The design of the second flow path 120 allows gas to be rapidly delivered to the ionization member 20 for ionization, thereby increasing the ionization rate of the ionization member 20 and thus the rate of ion generation. In addition, the ionization member 20 is further provided with a guide groove 221 and a cross-shaped first through hole 211, so that the contact area between the gas and the ionization member 20 can be increased while the gas is guided, and the generation speed of ions can be further improved.

While the foregoing has been provided for the purpose of illustrating the principles and embodiments of the present utility model, there is no intention to limit the utility model to the specific embodiments and applications described.

Claims (10)

1. An ion generating device is characterized by comprising a base, an ionization component and a shell;

the base is fixedly connected to one end of the shell, and the ionization component is arranged in the shell;

the ionization component comprises a fixing part and a base part, one end of the fixing part is fixedly connected with the base part, and the other end of the fixing part extends towards a direction away from the base part and is fixedly connected with the base;

the base is provided with a first flow passage and a second flow passage, one end of the first flow passage penetrates through the base to be communicated with the outside, and the other end of the first flow passage is communicated with the second flow passage; a filter element is arranged in the first flow passage;

the second flow channel comprises a plurality of annular flow channels which are sequentially arranged from inside to outside along the radial direction of the base, the annular flow channels are mutually communicated, and the innermost annular flow channel conveys gas flowing in through the first flow channel and the second flow channel to the ionization part for ionization.

2. The ion generating apparatus of claim 1, wherein the filter element is disposed within the other end of the first flow channel; the filter element is far away from one end of the second flow channel and is in an inverted ladder shape, and the inner contour shape of the other end of the first flow channel is matched with the filter element.

3. The ion generating apparatus of claim 2, wherein the second flow channel further comprises a plurality of connecting flow channels sequentially spaced apart along a circumferential direction of the base; each connecting runner radially extends along the radial direction of the base, and the plurality of annular runners are mutually communicated through each connecting runner.

4. The ion generating apparatus according to claim 3, wherein four guide grooves are provided on a side surface of the base portion to which the fixing portion is connected, one end of each of the guide grooves extends to a side wall of the fixing portion and radially extends from the side wall of the fixing portion in a radial direction of the base portion, and the four guide grooves are in a cross shape;

a cross-shaped first through hole is formed in one end of the fixing part fixedly connected with the base part, and four openings are formed in the side wall of the fixing part; and is also provided with

The four openings of the first through hole are respectively communicated with the one ends of the four guide grooves.

5. The ion generating apparatus according to claim 3 or 4, wherein a second through hole adapted to the fixing portion is provided on an end face of the one end of the housing; a clamping groove is formed in the base at a position corresponding to the second through hole; the fixing part passes through the second through hole and is matched with the clamping groove, so that the fixing part is fixedly connected to the base; and is also provided with

The clamping groove is in a step shape, and the outer contour shape of the fixing part is matched with the step-shaped clamping groove.

6. The ion generating apparatus according to claim 5, wherein a snap boss is provided on an end face of the base close to the housing, a recess is provided on an end face of the one end of the housing,

the clamping boss stretches into the concave part and is matched with the concave part, and the base is fixedly connected to the shell through the clamping boss matched with the concave part.

7. The ion generating apparatus according to claim 6, wherein a bottom surface of the recess portion is closely attached to an end surface of the engagement boss, and each of the annular flow passage and each of the connecting flow passages is a groove formed on the end surface of the engagement boss;

a plurality of communication holes which are sequentially arranged along the circumferential direction of the base at intervals are formed between the annular flow channel positioned at the innermost side on the base and the clamping groove, and the clamping groove is communicated with the annular flow channel positioned at the innermost side on the base through the communication holes so as to convey the gas in the second flow channel to the ionization component.

8. The ion generating apparatus of any of claims 1-4, further comprising a gas nozzle having one end embedded within the first flow channel and another end extending outside the first flow channel; and, in addition, the processing unit,

and a sealing ring is arranged at the joint of the air guide nozzle and the inner wall of the first flow passage.

9. The ion generating apparatus according to any one of claims 1 to 4, wherein an end of the fixing portion remote from the base portion is provided with a pin hole;

a pin rod channel is arranged on the base corresponding to the pin hole, one end of the pin rod channel is communicated with the pin hole, and the other end of the pin rod channel penetrates through the base to be communicated with the outside;

the ion generating device further comprises a connecting pin rod which passes through the pin rod channel to be matched with the pin hole, so that the fixing part is fixedly connected with the base; and is also provided with

The pin is made of conductive material.

10. An ion beam emitter comprising an ion generating device according to any one of claims 1 to 9.