CN213236459U - Flange and reaction tube - Google Patents
Flange and reaction tube Download PDFInfo
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- CN213236459U CN213236459U CN202021834551.5U CN202021834551U CN213236459U CN 213236459 U CN213236459 U CN 213236459U CN 202021834551 U CN202021834551 U CN 202021834551U CN 213236459 U CN213236459 U CN 213236459U
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- flange
- furnace
- reaction tube
- air
- inner cavity
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Abstract
The utility model discloses a flange and reaction tube, wherein, the flange for install the fire door of reaction tube, include: the flange main body is provided with an inner cavity, at least one air inlet part and a plurality of air outlet parts, wherein the air inlet parts are communicated with the inner cavity, and the air outlet parts are respectively communicated with the inner cavity and the furnace mouth; and the switching part is arranged on the flange main body and controls at least one part of the air outlet parts to be opened or closed. The utility model discloses the flange because be provided with the switch portion that opens or close that can control the portion of giving vent to anger on the flange, consequently, after the reaction tube is installed to the flange, can control the air input in the reaction tube.
Description
Technical Field
The utility model relates to a solar cell panel makes technical field, in particular to flange and reaction tube.
Background
An LPCVD (Low Pressure Chemical Vapor Deposition) apparatus is one of Chemical Vapor Deposition (CVD) apparatuses that generates a solid reactant by a Chemical reaction of a mixed gas under a Low Pressure and high temperature condition and deposits the reactant on a surface of a silicon wafer to form a thin film. In the photovoltaic industry, LPCVD equipment can realize the growth of Oxide tunneling layers and Poly-Si layers in TOPCon cell structures.
In the LPCVD apparatus, a reaction tube is one of the core of the entire apparatus, and a known reaction tube is generally configured to introduce gas into a furnace mouth through one tube and to extract gas from a furnace tail, and the reaction gas is introduced from one end of the reaction tube to the other end thereof.
SUMMERY OF THE UTILITY MODEL
The present invention is directed to at least one of the problems of the known art. Therefore, the utility model provides a flange for installing the furnace mouth of reaction tube can control the air input in the reaction tube. Furthermore, the utility model discloses the reaction tube that has this flange has still been proposed.
According to the utility model discloses flange of first aspect embodiment for install the fire door of reaction tube, include: the flange main body is provided with an inner cavity, at least one air inlet part and a plurality of air outlet parts, wherein the air inlet parts are communicated with the inner cavity, and the air outlet parts are respectively communicated with the inner cavity and the furnace mouth; and the switching part is arranged on the flange main body and controls at least one part of the air outlet parts to be opened or closed.
The utility model discloses flange has following beneficial effect at least: the flange is provided with a switch part which can control the opening or closing of the air outlet part, so after the flange is installed on the reaction tube, the air inlet amount in the reaction tube can be controlled.
In some embodiments, the flange body is annular and the internal cavity extends circumferentially of the flange body.
In some embodiments, the flange body comprises: the inner periphery of the base is provided with an annular groove; an annular connecting member welded to an opening of the annular groove to form the inner cavity between the annular groove and the connecting member.
In some embodiments, the gas outlet portions are distributed along a circumferential direction of the flange body.
In some embodiments, the air outlet portions are distributed along a circumferential direction of the connection member.
In some embodiments, each of the gas outlet portions has an internal thread provided therein, and the switching portion includes a plurality of external screw members, each of which is attached to at least a portion of the gas outlet portion.
According to the utility model discloses reaction tube of second aspect embodiment includes: the furnace body is provided with a furnace mouth and a furnace tail; the flange of any one of the preceding claims, mounted to the furnace opening.
The utility model discloses reaction tube has following beneficial effect at least: the flange is provided with a switch part which can control the opening or closing of the air outlet part, so after the flange is installed on the reaction tube, the air inlet amount in the reaction tube can be controlled.
In some embodiments, an air supplement part is arranged at the furnace tail.
In some embodiments, the gas supplementing part comprises a plurality of gas supplementing pipes, and the gas supplementing pipes extend into the furnace body from the furnace tail along the axial direction of the furnace body.
In some embodiments, each of the air supply pipes is arranged at a position in the furnace body, and is adjustable along the axial direction of the furnace body.
Drawings
Fig. 1 is a cross-sectional view of an embodiment of a reaction tube of the present invention.
Fig. 2 is a sectional view at a-a in fig. 1.
Fig. 3 is a partially enlarged view at B in fig. 1.
Fig. 4 is a partially enlarged view at C in fig. 2.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present invention, and should not be construed as limiting the present invention.
In the description of the present invention, it should be understood that the orientation or positional relationship indicated with respect to the orientation description, such as up, down, front, rear, left, right, etc., is based on the orientation or positional relationship shown in the drawings, and is only for convenience of description and simplification of description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
In the description of the present invention, a plurality of means are one or more, a plurality of means are two or more, and the terms greater than, less than, exceeding, etc. are understood as not including the number, and the terms greater than, less than, within, etc. are understood as including the number. If the first and second are described for the purpose of distinguishing technical features, they are not to be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.
In the description of the present invention, unless there is an explicit limitation, the words such as setting, installation, connection, etc. should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above words in combination with the specific contents of the technical solution.
Fig. 1 is a sectional view of an embodiment of a reaction tube 101, fig. 3 is a partial enlarged view of B in fig. 1, fig. 4 is a partial enlarged view of C in fig. 2, and referring to fig. 1 to 4, a flange 100 for mounting to a furnace mouth 102 of the reaction tube 101 according to an embodiment of the first aspect of the present invention includes: the furnace mouth opening and closing device comprises a flange main body 103 and a switch part 104 mounted on the flange main body 103, wherein the flange main body 103 is provided with an inner cavity 105, at least one air inlet part 106 and a plurality of air outlet parts 107, the air inlet part 106 is communicated with the inner cavity 105, and the air outlet parts 107 are respectively communicated with the inner cavity 105 and the furnace mouth 102; the switching section 104 controls at least a part of the plurality of air outlet sections 107 to be turned on or off.
In the present embodiment, since the flange 100 is provided with the opening/closing portion 104 capable of controlling the opening/closing of the gas outlet portion 107, the amount of intake air in the reaction tube 101 can be controlled after the flange 100 is mounted on the reaction tube 101. Specifically, the number of the gas outlet portions 107 that are opened or closed may be selected according to the amount of intake air required in the reaction tube 101, whereby the amount of intake air required in the reaction tube 101 can be controlled.
It is conceivable that the reaction tube 101 is a reaction tube 101 of, for example, an LPCVD apparatus, which is well known to those skilled in the art, and the reaction tube 101 includes a furnace body 108, a quartz outer tube 109 inserted into the furnace body 108, and a quartz inner tube 110 inserted into the quartz outer tube 109. The furnace mouth 102 of the reaction tube 101 is provided with a front flange assembly 111, and the furnace tail 112 of the reaction tube 101 is provided with a rear flange assembly 113. The flange 100 of the present embodiment is mainly used as the front flange assembly 111. In addition, when the inside of the reaction tube 101, the inside of the furnace body 108, the inside of the quartz inner tube 110, or the inside of the quartz outer tube 109 is described, the reaction chamber (reaction furnace) in the reaction tube 101 is referred to unless otherwise specified.
It is contemplated that the air intake portion 106 may include, for example, an air intake aperture 114 and an air intake tube 115 secured to the air intake aperture 114, the air intake aperture 114 communicating, for example, with the outside of the flange body 103 and the interior cavity 105, the air intake tube 115 communicating with a fitting (not shown) of the air intake system. Further, the intake portion 106 may be one or more.
In some embodiments, to adapt to the shape of the reactor tube 101, the flange body 103 is annular, and the inner cavity 105 extends along the circumference of the flange body 103. Specifically, at the furnace opening 102 of the reaction tube 101, a transition mounting assembly 116 may be further provided, the transition mounting assembly 116 is connected with the furnace body 108, the flange 100 is locked to the transition mounting assembly 116 by, for example, bolts, etc., and the inner cavity 105 extends along the circumferential direction of the flange main body 103, for example, is formed in a ring shape surrounding the furnace opening 102.
In some embodiments, the gas outlets 107 are distributed along the circumference of the flange body 103 in order to make the gas inlet of the reaction tube 101 uniform. Specifically, the inner cavity 105 extends along the circumferential direction of the flange main body 103 to form a ring shape surrounding the furnace opening 102, and correspondingly, the gas outlet 107 may also extend along the circumferential direction of the flange main body 103 to form a ring shape surrounding the furnace opening 102 as a whole. Thus, the gas outlet 107 can be vented from the furnace opening 102 in a plurality of different directions, and the gas inlet to the reaction tube 101 can be made uniform.
With continued reference to fig. 3, in some embodiments, to easily form the internal cavity 105 on the flange body 103, the flange body 103 includes: a base 117 and an annular connecting member 118 welded to the base 117, the base 117 having an annular groove 119 formed in an inner periphery thereof, the connecting member 118 being welded to an opening of the annular groove 119 to form the inner cavity 105 between the annular groove 119 and the connecting member 118. Specifically, the annular groove 119 on the inner periphery of the base 117 may be directly machined by, for example, a machine tool, and the annular connecting member 118 may be formed by bending a strip-shaped plate member. By welding the connecting member 118 to the base 117, the inner cavity 105 is formed together with the annular groove 119, which can reduce the difficulty of machining.
In some embodiments, in order to easily open the gas outlet portions 107, the gas outlet portions 107 are distributed along the circumferential direction of the connection member 118. Specifically, the air outlet 107 may be in a through hole shape and distributed along the circumferential direction of the annular connecting member 118, and the through hole of the air outlet 107 may be formed before the strip plate is bent or after the connecting member 118 is bent. By providing the gas outlet portion 107 on the connector 118, the difficulty of processing the gas outlet portion 107 can be reduced.
With continued reference to fig. 4, in some embodiments, to simplify the structure of the switching section 104, each gas outlet portion 107 is internally (e.g., through hole) provided with a respective internal thread, the switching section 104 includes a plurality of external threaded members 120, and each external threaded member 120 is mounted to at least a portion of each of the plurality of gas outlet portions 107. Specifically, the switch portion 104 may be composed of external screw members 120, such as screws, which can be screwed or removed with respect to the gas outlet portion 107, and these external screw members 120 are screwed into at least a part of the gas outlet portion 107, thereby enabling the other part of the gas outlet portion 107 to be normally vented. Further, when the amount of intake air of the reaction tube 101 needs to be adjusted, only a part of these male screws 120 need to be screwed or removed. By providing the male screw 120 attached to the gas outlet portion 107 as the switch portion 104, the structure of the switch portion 104 can be greatly simplified while effectively adjusting the amount of intake gas of the reaction tube 101.
Although the above description has been made with the external screw 120 as the opening/closing unit 104, the present invention is not limited thereto, and the opening/closing unit 104 may include a plurality of rotatable elastic covers (not shown) provided adjacent to the respective air outlets 107, respectively, and the elastic covers may be rotated to close or open the opening/closing unit 104.
With continued reference to FIG. 1, the flange 100 of the various embodiments described above may be used in a reactor tube 101. According to the utility model discloses reaction tube 101 of second aspect embodiment includes: a furnace body 108 and the flange 100, wherein the furnace body 108 has a furnace mouth 102 and a furnace tail 112, and the flange 100 is arranged on the furnace mouth 102.
In the present embodiment, since the flange 100 is provided with the opening/closing portion 104 capable of controlling the opening/closing of the gas outlet portion 107, the amount of intake air in the reaction tube 101 can be controlled after the flange 100 is mounted on the reaction tube 101.
In some embodiments, in order to make the reaction gas uniformly distributed along the axial direction from the furnace mouth 102 to the furnace tail 112, a gas supplementing portion 121 is disposed at the furnace tail 112. Specifically, the gas supplementing portion 121 may be disposed on the rear flange assembly 113 of the furnace tail 112 and extend from the furnace tail 112 into the reaction tube 101, so that gas can be supplemented into the reaction tube 101 from the furnace tail 112, and the content of the reaction gas at one end of the furnace tail 112 in the reaction tube 101 can be increased, so that the reaction gas in the reaction tube 101 is uniformly distributed along the axial direction from the furnace mouth 102 to the furnace tail 112.
In some embodiments, to simplify the structure of the gas supply portion 121, the gas supply portion 121 includes a plurality of gas supply pipes 122, and the gas supply pipes 122 extend from the furnace tail 112 into the furnace body 108 (also referred to as the quartz inner tube 110 or the reaction chamber) along the axial direction of the furnace body 108. Specifically, for example, the gas supply pipes 122 include two pipes, each of which extends from the furnace tail 112 of the quartz inner tube 110 to a position substantially in the middle of the quartz inner tube 110 along the axial direction of the quartz inner tube 110. In addition, the extending positions of the different air supply pipes 122 may be different, and the different air supply pipes 122 may be controlled by different air paths, so that multi-point sectional air supply may be realized, and different flow rates of the reaction gas may be supplied at different positions, thereby further making the gas distribution in the reaction pipe 101 uniform.
In some embodiments, each of the plurality of air supply tubes 122 is configured to be adjustable in position within the furnace body 108 along an axial direction of the furnace body 108. Specifically, the gas supply pipe 122 can be mounted on the furnace tail 112 of the reaction tube 101 by means of, for example, screw locking, and the gas supply pipe 122 can be adjusted along the axial direction of the furnace body 108 by means of unscrewing. In addition, the inflation tube 122 may be adjusted by any known adjustment means while maintaining hermeticity. The position of the air supply pipe 122 in the furnace body 108 can be easily adjusted by setting the air supply pipe 122 to be adjustable along the axial direction of the furnace body 108, so that multi-point sectional air supply can be easily performed as required.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
While embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.
Claims (10)
1. A flange for mounting to a furnace opening of a reaction tube, comprising:
the flange main body is provided with an inner cavity, at least one air inlet part and a plurality of air outlet parts, wherein the air inlet parts are communicated with the inner cavity, and the air outlet parts are respectively communicated with the inner cavity and the furnace mouth;
and the switching part is arranged on the flange main body and controls at least one part of the air outlet parts to be opened or closed.
2. The flange of claim 1, wherein the flange body is annular and the internal cavity extends circumferentially of the flange body.
3. The flange of claim 2, wherein the flange body comprises:
the inner periphery of the base is provided with an annular groove;
an annular connecting member welded to an opening of the annular groove to form the inner cavity between the annular groove and the connecting member.
4. The flange of claim 2, wherein the gas outlet portions are distributed along a circumferential direction of the flange body.
5. The flange according to claim 3, wherein the gas outlet portions are distributed along a circumferential direction of the connecting member.
6. The flange of claim 1, wherein each of the outlet portions has an internal thread disposed therein, and the switching portion includes a plurality of external threaded members, each of the external threaded members being mounted to at least a portion of the outlet portion.
7. A reaction tube, comprising:
the furnace body is provided with a furnace mouth and a furnace tail;
the flange of any one of claims 1 to 6, mounted to the furnace opening.
8. The reaction tube of claim 7, wherein an air supplement part is provided at the furnace tail.
9. The reaction tube according to claim 8, wherein the gas supply portion includes a plurality of gas supply tubes extending from the furnace tail into the furnace body in an axial direction of the furnace body.
10. The reaction tube according to claim 9, wherein each of the air supply tubes is provided at a position in the furnace body adjustable in an axial direction of the furnace body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021834551.5U CN213236459U (en) | 2020-08-26 | 2020-08-26 | Flange and reaction tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021834551.5U CN213236459U (en) | 2020-08-26 | 2020-08-26 | Flange and reaction tube |
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| Publication Number | Publication Date |
|---|---|
| CN213236459U true CN213236459U (en) | 2021-05-18 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202021834551.5U Active CN213236459U (en) | 2020-08-26 | 2020-08-26 | Flange and reaction tube |
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| CN (1) | CN213236459U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115074702A (en) * | 2022-06-02 | 2022-09-20 | 上海微世半导体有限公司 | Method for introducing chemical gas into LPCVD furnace |
| CN115261822A (en) * | 2022-08-11 | 2022-11-01 | 江苏微导纳米科技股份有限公司 | Furnace tube coating equipment |
| CN115287631A (en) * | 2022-08-10 | 2022-11-04 | 江苏微导纳米科技股份有限公司 | Air inlet part, tubular reactor and control method |
| CN117089825A (en) * | 2023-06-01 | 2023-11-21 | 无锡松煜科技有限公司 | Plating chamber with uniform fluid distribution and plating method |
-
2020
- 2020-08-26 CN CN202021834551.5U patent/CN213236459U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115074702A (en) * | 2022-06-02 | 2022-09-20 | 上海微世半导体有限公司 | Method for introducing chemical gas into LPCVD furnace |
| CN115287631A (en) * | 2022-08-10 | 2022-11-04 | 江苏微导纳米科技股份有限公司 | Air inlet part, tubular reactor and control method |
| CN115261822A (en) * | 2022-08-11 | 2022-11-01 | 江苏微导纳米科技股份有限公司 | Furnace tube coating equipment |
| CN115261822B (en) * | 2022-08-11 | 2023-10-13 | 江苏微导纳米科技股份有限公司 | Furnace tube film plating equipment |
| CN117089825A (en) * | 2023-06-01 | 2023-11-21 | 无锡松煜科技有限公司 | Plating chamber with uniform fluid distribution and plating method |
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