CN220439551U - Plasma ion source - Google Patents

Abstract

The utility model relates to a plasma ion source, which comprises a shell, an anode, a cathode, an air channel and a magnetic force piece, wherein the anode is cylindrical, a discharge cavity is formed in a cylindrical inner cavity, the cathode comprises a filament and a binding post, the air channel comprises an air pipe and an air flow seat, the anode is arranged on the air flow seat from the bottom, the top of the air flow seat forms the bottom of the discharge cavity, a plurality of air flow through holes for communicating a circulation cavity with the discharge cavity are formed in the top of the air flow seat, and the magnetic force piece comprises a permanent magnet and an electromagnet. On one hand, the utility model not only can form a wider magnetic field adjusting range, but also can ensure that the gas uniformly passes through the discharge cavity so as to obtain larger ion source working current, and meanwhile, the ionization efficiency and effect are improved; on the other hand, the device is simple in structure and convenient to assemble and disassemble, can realize small-current work and can work in a large-current mode, and the practicability is high.

Description

Plasma ion source

Technical Field

The utility model belongs to the technical field of ion sources, and particularly relates to a plasma ion source.

Background

At present, a conventional ion source consists of a cathode, an anode, a magnetic circuit and a gas supply system, wherein the cathode comprises a filament, the magnetic circuit forms a magnetic field in a discharge chamber, magnetic force lines are emitted from a magnetic pole at the lower part of the cathode to enter a top magnetic pole through the discharge chamber, when the ion source works in a vacuum state, working gas (argon) and reaction gas (such as oxygen) provided by the gas supply system enter the discharge chamber from the bottom of the anode, in short, the working gas or the reaction gas enters a discharge chamber from the bottom of the anode to participate in discharge, the magnetic field is generated in the discharge chamber by the magnet, a compensation or neutralization cathode is arranged at the upper part of the discharge chamber, the working gas (conventionally: argon, the reaction gas can use a plurality of gases such as nitrogen, oxygen or hydrocarbon) of the ion source is required by working, hot electrons are generated after the filament at the upper part of the discharge chamber is heated, when the anode of the ion source is subjected to positive potential +UA, the electrons move to the anode under the action of an electric field, and the electrons move around the magnetic force lines in a spiral track to collide with atoms of the working gas or the reaction gas to ionize.

However, in practical use, there are the following technical drawbacks:

1. the magnetic circuit of the ion source generally adopts a permanent magnet, however, the magnetic field formed by the permanent magnet has a limited adjusting range, so that the final working current of the ion source is small, and the ion source is generally characterized in that: the working current is below 10A;

2. the adoption of the gas flow is relatively dispersed into the discharge chamber, so that the ionization efficiency and the effect generated by collision of atoms of the working gas or the reaction gas are poor.

Disclosure of Invention

The utility model aims to overcome the defects of the prior art and provide an improved plasma ion source.

In order to solve the technical problems, the utility model adopts the following technical scheme:

the utility model provides a plasma ion source, it includes the shell, the positive pole, the negative pole, gas circuit and magnetic force spare, the positive pole is cylindrical form, and the cylindricality inner chamber forms the discharge chamber, the negative pole is including being located filament, the terminal in discharge chamber top, the gas circuit is including extending from top to bottom and upper portion stretches into the trachea in shell chamber, set up on tracheal upper portion and form the air current seat in circulation chamber, the positive pole is installed on the air current seat from the bottom, the bottom in discharge chamber is constituteed at the top of air current seat, the top of air current seat forms a plurality of air current through-holes with circulation chamber and discharge chamber intercommunication, a plurality of air current through-holes are array distribution, magnetic force spare is including the cover and establishes the permanent magnet that is located shell chamber upper portion periphery at the trachea, be located air current seat below and the cover establish the electro-magnet in permanent magnet periphery.

In some embodiments, the permanent magnet comprises a plurality of magnetic rings sleeved on the periphery of the trachea in sequence, wherein the outer contours of the magnetic rings in the up-down direction are aligned. The matching of the permanent magnet and the electromagnet can realize the wider adjusting range of the magnetic field. Specifically, in a magnetic field formed by the electromagnet and the permanent magnet together, the working current formed by the plasma ion source is less than or equal to 20A. In short, a discharge current of 20A or less can be achieved, and therefore, a small current operation can be achieved, and a large current mode can be also achieved.

According to a specific implementation and preferred aspect of the present utility model, the airflow seat comprises a lower seat and an upper seat, wherein a through hole penetrating up and down is formed on the lower seat, the upper seat is inserted into the through hole and forms a seat cavity with the through hole, the upper part of the air pipe is inserted into the through hole, and the insertion end part is separated from the seat cavity to form a circulation cavity; the anode is convenient to disassemble and assemble, the formed flow equalization effect is good, and meanwhile, the anode is installed on the lower seat from the bottom.

In some embodiments, the cross-section of the through hole is "T" shaped, and the insertion end extends upward from the bottom of the "T" shape, wherein the length of the extension is greater than or equal to the distance between the top surface of the insertion end and the bottom surface of the upper seat. At the moment, the flow equalization of the gas can be performed, and the pressure of the gas flow is increased, so that the plasma source can be better emitted to act with the substrate to achieve the purposes of cleaning and auxiliary coating.

Further, the upper seat comprises a seat ring inserted at the upper part of the T shape and a cover plate positioned at the top of the seat ring, wherein the airflow through holes are distributed on the cover plate. The disassembly and the assembly and the current sharing are convenient.

According to a further specific and preferred aspect of the present utility model, the plurality of air flow holes are distributed in an annular array centering on the air pipe; typically, a circle is that is, but may form a plurality of annular arrays according to actual needs; meanwhile, the extending directions of the airflow through holes and the air pipes are consistent.

In some embodiments, the center of the top of the housing is open and a top pole is provided at the open mouth. And the constraint is formed more effectively, and the ionization effect is improved.

In addition, two terminal respectively pass through the setting of wearing out respectively of upper and lower tip through the insulating part from the shell intracavity, and the both ends of filament are connected respectively between the terminal that upper portion was worn out. Or the binding posts are arranged outside the shell, two ends of the filament are connected to the two binding posts, and each binding post is communicated with the circuit through an external wiring.

Due to the implementation of the technical scheme, compared with the prior art, the utility model has the following advantages:

the permanent magnet adopted by the existing ion source not only has limited formed magnetic field adjusting range, but also adopts an air flow mode to ionize uneven air flow by free diffusion or free dispersion, so that the generated ionization effect is poor, the working current provided by the ion source is small and the like. After the ion source is adopted, a magnetic field is formed by matching the permanent magnet and the electromagnet to pass through the discharge cavity, meanwhile, working gas is intensively split through the circulation cavity, and electrons formed by the electric field in the cylindrical discharge cavity are subjected to balanced collision to generate ionization, so that on one hand, the ion source can form a wider magnetic field adjusting range, and the gas uniformly passes through the discharge cavity, so that larger ion source working current can be obtained, and meanwhile, the ionization efficiency and effect are improved; on the other hand, the device is simple in structure and convenient to assemble and disassemble, can realize small-current work and can work in a large-current mode, and the practicability is high.

Drawings

FIG. 1 is a schematic diagram of a magnetic field assembly of an ion source according to the present embodiment;

FIG. 2 is a schematic front view of FIG. 1;

FIG. 3 is a schematic top view of FIG. 2;

FIG. 4 is a schematic cross-sectional view of A-A of FIG. 3;

wherein: 1. a housing;

2. an anode; 20. a discharge chamber;

3. a cathode; 30. a filament; 31. binding posts;

4. an air path; 40. an air pipe; 41. an airflow seat; 410. a lower seat; 411. an upper seat; z1, seat ring; z2, cover plate; a. an air flow through hole;

5. a magnetic member; 50. a permanent magnet; 500. a magnetic ring; 51. an electromagnet;

6. a top pole.

Description of the embodiments

The present utility model will be described in detail with reference to the drawings and the detailed description, so that the above objects, features and advantages of the present utility model can be more clearly understood. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present utility model. The present utility model may be embodied in many other forms than described herein and similarly modified by those skilled in the art without departing from the spirit of the utility model, whereby the utility model is not limited to the specific embodiments disclosed below.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "up", "down", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present utility model and simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.

Furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present utility model, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.

In the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured" and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

In the utility model, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact through an intervening medium. Moreover, a first feature "above" and "over" a second feature may be a first feature directly above or obliquely above the second feature, or simply indicate that the first feature is higher in level than the second feature. The first feature being "under," "under" and "beneath" the second feature may be the first feature being directly under or obliquely under the second feature, or simply indicating that the first feature is less level than the second feature.

It will be understood that when an element is referred to as being "fixed" or "disposed" on another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "up," "down," "left," "right," and similar expressions are used herein for illustrative purposes only and are not meant to be the only embodiment.

As shown in fig. 1 to 4, the plasma ion source of the present embodiment includes a housing 1, an anode 2, a cathode 3, an air path 4 and a magnetic member 5, wherein the anode 2 is cylindrical, and the cylindrical cavity forms a discharge cavity 20, the cathode 3 includes a filament 30 and a terminal 31 located above the discharge cavity 20, the air path 4 includes an air pipe 40 extending up and down and having an upper portion extending into the housing cavity, an air flow seat 41 disposed on the upper portion of the air pipe 40 and forming a circulation cavity, and the magnetic member 5 includes a permanent magnet 50 sleeved on the outer periphery of the air pipe 40, and an electromagnet 51 located below the air flow seat and sleeved on the outer periphery of the permanent magnet 50.

Specifically, the top center of the housing 1 is opened, and a top magnetic pole 6 is provided at the opening, the bottom of the housing 1 is closed to form a housing cavity 10 therein, and the anode 2 is mounted on the airflow seat 41 from the bottom.

In some embodiments, the top of the airflow base 41 forms the bottom of the discharge chamber 20, and the top of the airflow base 41 forms a plurality of airflow through holes a that communicate the circulation chamber with the discharge chamber 20, and the plurality of airflow through holes a are distributed in an array. In this example, the airflow seat 41 includes a lower seat 410 and an upper seat 411, wherein a through hole penetrating up and down is formed on the lower seat 410, the upper seat 411 is inserted into the through hole and forms a seat cavity with the through hole, the upper portion of the air pipe 40 is inserted into the through hole, and the insertion end portion is separated from the seat cavity to form a circulation cavity; anode 2 is mounted from the bottom on lower seat 410. The cross section of the through hole is in a T shape, and the insertion end part extends upwards from the bottom of the T shape, wherein the length of the extending section is larger than the distance between the top surface of the insertion end part and the bottom surface of the upper seat 411.

In this example, the upper seat 411 includes a seat ring z1 inserted in the upper portion of the "T" shape, and a cover plate z2 disposed on top of the seat ring z1, wherein the air flow holes a are distributed on the cover plate z 2. The plurality of air flow holes a are distributed in an annular array with the air pipe 40 as the center, and generally form a circle, but a plurality of annular arrays can be formed according to actual needs; meanwhile, the extending directions of the respective air flow holes a and the air tube 40 coincide.

In some embodiments, the permanent magnet 50 includes a plurality of magnetic rings 500 sequentially sleeved on the outer circumference of the trachea, wherein the outer contours of the magnetic rings 500 in the up-down direction are aligned. The electromagnet 51 is sleeved on the periphery of the permanent magnet 50, and the matching of the permanent magnet and the electromagnet can realize a wider adjusting range of the magnetic field. Specifically, in a magnetic field formed by the electromagnet and the permanent magnet together, the working current formed by the plasma ion source is less than or equal to 20A. In short, a discharge current of 20A or less can be achieved, and therefore, a small current operation can be achieved, and a large current mode can be also achieved.

In addition, two terminal 31 are worn out respectively from the shell intracavity through the upper and lower tip of insulating part and are set up, and the both ends of filament 30 are connected respectively between the terminal 31 that upper portion was worn out, and wherein terminal 31 is the bar copper (of course, the terminal can also set up in the shell outside, and the filament both ends are connected on two terminals, and each terminal passes through external connection and circuit intercommunication, i.e. the filament terminal does not stretch out from ion source bottom, and is changed into direct wiring on ion source shell lateral wall, both saving cost and easy safety maintenance).

In summary, after the ion source is adopted, a magnetic field is formed by matching the permanent magnet and the electromagnet to pass through the discharge cavity, meanwhile, working gas is intensively split through the circulation cavity, and electrons formed by the electric field in the cylindrical discharge cavity are subjected to balanced collision to generate ionization, so that on one hand, the utility model not only can form a wider magnetic field adjusting range, but also can uniformly pass through the discharge cavity when the gas passes through the discharge cavity, so that larger ion source working current can be obtained, and meanwhile, the ionization efficiency and effect are also improved; on the other hand, the device has the advantages of simple structure, convenient disassembly and assembly, realization of small-current operation, high-current mode operation and high practicability; the T-shaped flow equalizing cavity adopted in the third aspect is arranged, so that gas flow equalizing can be performed, and the pressure of gas flowing is increased, so that the plasma source can be better emitted to act with a substrate, and the purposes of cleaning and auxiliary coating are achieved.

The present utility model has been described in detail with the purpose of enabling those skilled in the art to understand the contents of the present utility model and to implement the same, but not to limit the scope of the present utility model, and all equivalent changes or modifications made according to the spirit of the present utility model should be included in the scope of the present utility model.

Claims (10)

1. A plasma ion source comprising a housing, an anode, a cathode, a gas path, and a magnetic member, characterized in that: the positive pole is cylindrical, and the cylindricality inner chamber forms the discharge chamber, the negative pole is including being located filament, the terminal of discharge chamber top, the gas circuit is including extending from top to bottom and upper portion stretches into the trachea of shell chamber, set up tracheal upper portion and form the air current seat in circulation chamber, the positive pole from the bottom install in on the air current seat, the top of air current seat constitutes the end of discharge chamber, the top of air current seat form will circulation chamber with a plurality of air current through-holes of discharge chamber intercommunication, a plurality of air current through-holes are the array and distribute, magnetic force spare is including the cover establish the trachea is located the permanent magnet of shell chamber upper portion periphery, be located air current seat below and cover are established the electro-magnet of permanent magnet periphery.

2. The plasma ion source of claim 1, wherein: the permanent magnet comprises a plurality of magnetic rings which are sequentially sleeved on the periphery of the air pipe, wherein the outer contours of the magnetic rings in the up-down direction are aligned.

3. The plasma ion source of claim 2, wherein: in the magnetic field formed by the electromagnet and the permanent magnet together, the working current formed by the plasma ion source is less than or equal to 20A.

4. The plasma ion source of claim 1, wherein: the air flow seat comprises a lower seat and an upper seat, wherein a through hole which penetrates up and down is formed in the lower seat, the upper seat is inserted into the through hole and forms a seat cavity with the through hole, the upper part of the air pipe is inserted into the through hole, and the insertion end part of the air pipe is separated from the seat cavity to form the circulation cavity; the anode is arranged on the lower seat from the bottom.

5. The plasma ion source of claim 4, wherein: the section of the through hole is in a T shape, the insertion end part extends upwards from the bottom of the T shape, and the length of the extending section is larger than or equal to the distance between the top surface of the insertion end part and the bottom surface of the upper seat.

6. The plasma ion source of claim 5, wherein: the upper seat comprises a seat ring inserted at the upper part of the T shape and a cover plate positioned at the top of the seat ring, wherein the airflow through holes are distributed on the cover plate.

7. The plasma ion source of claim 1 or 6, wherein: the plurality of air flow through holes are distributed in an annular array with the air pipe as the center.

8. The plasma ion source of claim 7, wherein: the extending direction of each airflow through hole is consistent with that of the air pipe.

9. The plasma ion source of claim 1, wherein: the center of the top of the shell is open, and a top magnetic pole is arranged at the opening.

10. The plasma ion source of claim 1, wherein: the two binding posts respectively penetrate through the upper end and the lower end of the insulating piece from the shell cavity, and the two ends of the filament are respectively connected between the binding posts penetrating through the upper part; or the binding posts are arranged on the outer side of the shell, two ends of the filament are connected to the two binding posts, and each binding post is communicated with a circuit through an external wiring.