CN219925707U - Grinding fluid flow dividing device - Google Patents
Grinding fluid flow dividing device Download PDFInfo
- Publication number
- CN219925707U CN219925707U CN202321011755.2U CN202321011755U CN219925707U CN 219925707 U CN219925707 U CN 219925707U CN 202321011755 U CN202321011755 U CN 202321011755U CN 219925707 U CN219925707 U CN 219925707U
- Authority
- CN
- China
- Prior art keywords
- tank body
- mounting plate
- spraying
- grinding fluid
- rotary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000012530 fluid Substances 0.000 title claims abstract description 20
- 238000005507 spraying Methods 0.000 claims abstract description 29
- 239000007788 liquid Substances 0.000 claims abstract description 19
- 230000005540 biological transmission Effects 0.000 claims description 14
- 239000007921 spray Substances 0.000 claims description 12
- 239000002002 slurry Substances 0.000 claims description 4
- 238000004891 communication Methods 0.000 claims description 2
- 238000005498 polishing Methods 0.000 abstract description 12
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 description 7
- 229910001195 gallium oxide Inorganic materials 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The utility model relates to the technical field of flow dividing devices and discloses an abrasive liquid flow dividing device which comprises a mounting plate, wherein a tank body is arranged above the mounting plate; the mounting plate is provided with a driving motor for rotating the tank body; the periphery of the tank body is provided with rotary spraying components in a rotary manner; the top of the tank body is rotationally communicated with a liquid supply pipe through a rotary joint. The utility model provides a grinding fluid flow dividing device, which is characterized in that a liquid supply pipe is used for supplying grinding fluid to be sprayed through rotation of a spraying pipe, so that the uniformity of spraying is improved, the grinding fluid is dropped on different positions of a polishing disk, and the uniformity of spraying is improved.
Description
Technical Field
The utility model relates to the field of flow dividing devices, in particular to a grinding fluid flow dividing device.
Background
Gallium oxide has both outstanding light transmittance of sapphire and excellent conductivity of silicon carbide, and can be used for large-size single crystal growth by a melt method, so that the gallium oxide has stronger chemical and thermal stability and wide market prospect. Because of the development needs of high brightness, high efficiency LED technology, gallium oxide surface polishing technology needs to ensure high integrity of the wafer surface: the surface is ultra-smooth, the crystal structure is complete, no defect, no damage and no deterioration layer exist, and the requirement on the surface roughness reaches the sub-nanometer level.
In the existing gallium oxide wafer polishing process, gallium oxide polishing solution is generally sprayed directly on the surface of the gallium oxide wafer, and Chemical Mechanical Polishing (CMP) is performed by matching with a polishing disk. The gallium oxide wafer has the characteristic of hard brittleness, and the phenomenon of scratching and chipping after wafer displacement is easily generated due to uneven spraying of polishing liquid on the polishing disc during polishing.
In order to solve the above problems, the present utility model provides a slurry flow dividing device.
Disclosure of Invention
Object of the utility model
In order to solve the technical problems in the background technology, the utility model provides the grinding fluid flow dividing device, wherein the grinding fluid is supplied by the fluid supply pipe so as to be sprayed through the rotation of the spraying pipe, thereby improving the uniformity of spraying, and the grinding fluid flow dividing device falls on different positions of the polishing disk and improving the uniformity of spraying.
(II) technical scheme
In order to solve the problems, the utility model provides a grinding fluid diversion device, which comprises a mounting plate, wherein a tank body is arranged above the mounting plate;
the mounting plate is provided with a driving motor for rotating the tank body;
the periphery of the tank body is provided with rotary spraying components in a rotary manner;
the top of the tank body is rotationally communicated with a liquid supply pipe through a rotary joint.
Preferably, the rotary spraying assembly comprises a spraying pipe and a transmission disc, wherein the liquid inlet end of the spraying pipe extends into the tank body and is communicated with the tank body in a rotary mode, the transmission disc is fixedly sleeved on the periphery of the spraying pipe and is in transmission connection with the mounting plate, and spray holes are formed in the spraying pipe.
Preferably, a screw rod is fixedly arranged at the liquid inlet end of the spray pipe.
Preferably, the spray holes are obliquely arranged.
Preferably, the periphery of the transmission disc is fixedly sleeved with a rubber ring which is tightly pressed with the mounting plate.
The technical scheme of the utility model has the following beneficial technical effects:
the feed liquor end of feed liquor pipe lets in the lapping liquid, and the lapping liquid enters into the inside of jar body, starts driving motor, and driving motor drives jar body and rotates, and driving disk and mounting panel transmission for the rotation is carried out in the time of spray tube revolution, makes the lapping liquid fall in the different positions of polishing disk, improves the homogeneity of spraying.
Drawings
Fig. 1 is a schematic structural diagram of a slurry flow dividing device according to the present utility model.
Fig. 2 is a schematic top view of a portion of a slurry flow dividing apparatus according to the present utility model.
Reference numerals: 1. a mounting plate; 2. a tank body; 3. a driving motor; 4. rotating the spray assembly; 41. a spray tube; 42. a drive plate; 43. a spray hole; 44. a screw rod; 5. a liquid supply pipe.
Detailed Description
The objects, technical solutions and advantages of the present utility model will become more apparent by the following detailed description of the present utility model with reference to the accompanying drawings. It should be understood that the description is only illustrative and is not intended to limit the scope of the utility model. In addition, in the following description, descriptions of well-known structures and techniques are omitted so as not to unnecessarily obscure the present utility model.
As shown in fig. 1-2, the grinding fluid diversion device provided by the utility model comprises a mounting plate 1, wherein a tank body 2 is arranged above the mounting plate 1;
the mounting plate 1 is provided with a driving motor 3 for rotating the tank body 2;
the periphery of the tank body 2 is provided with rotary spraying components 4 in a rotary manner;
the top of the tank body 2 is communicated with a liquid supply pipe 5 through a rotary joint.
In an alternative embodiment, the rotary spraying assembly 4 comprises a spraying pipe 41 and a transmission disc 42, wherein the liquid inlet end of the spraying pipe 41 extends into the tank body 2 and is in rotary communication with the tank body 2, the transmission disc 42 is fixedly sleeved on the periphery of the spraying pipe 41 and is in transmission connection with the mounting plate 1, and the spraying pipe 41 is provided with a spray hole 43.
The housing of the driving motor 3 is fixedly connected with the mounting plate 1, and the driving shaft of the driving motor 3 is in shaft connection with the tank body 2.
In an alternative embodiment, a screw 44 is fixedly mounted at the liquid inlet end of the spray tube 41.
The rotation of the spray pipe 41 drives the screw 44 to rotate, and the rotation of the screw 44 has an effect of sucking the polishing liquid.
In an alternative embodiment, the orifices 43 are arranged obliquely.
In an alternative embodiment, the outer periphery of the driving disc 42 is fixedly sleeved with a rubber ring pressed against the mounting plate 1.
It should be noted that, the outer circumference of the rubber ring is provided with anti-skid patterns to increase the stability of the transmission between the transmission disc 42 and the support plate 1.
In the utility model, the grinding fluid is introduced from the fluid inlet end of the fluid supply pipe 5, the grinding fluid enters the tank body 2, the driving motor 3 is started, the driving motor 3 drives the tank body 2 to rotate, the transmission disc 42 and the mounting plate 1 are transmitted, the spraying pipe 41 revolves and rotates at the same time, the grinding fluid falls on different positions of the polishing disc, and the spraying uniformity is improved.
It is to be understood that the above-described embodiments of the present utility model are merely illustrative of or explanation of the principles of the present utility model and are in no way limiting of the utility model. Accordingly, any modification, equivalent replacement, improvement, etc. made without departing from the spirit and scope of the present utility model should be included in the scope of the present utility model. Furthermore, the appended claims are intended to cover all such changes and modifications that fall within the scope and boundary of the appended claims, or equivalents of such scope and boundary.
Claims (5)
1. The utility model provides a grinding fluid diverging device, includes mounting panel (1), its characterized in that: a tank body (2) is arranged above the mounting plate (1);
a driving motor (3) for rotating the tank body (2) is arranged on the mounting plate (1);
the periphery of the tank body (2) is provided with rotary spraying components (4) in a rotary mode;
the top of the tank body (2) is rotationally communicated with a liquid supply pipe (5) through a rotary joint.
2. The grinding fluid flow dividing device according to claim 1, wherein the rotary spraying assembly (4) comprises a spraying pipe (41) and a transmission disc (42), the liquid inlet end of the spraying pipe (41) extends into the tank body (2) and is in rotary communication with the tank body (2), the transmission disc (42) is fixedly sleeved on the periphery of the spraying pipe (41) and is in transmission connection with the mounting plate (1), and the spraying pipe (41) is provided with spray holes (43).
3. An abrasive liquid splitting device according to claim 2, characterized in that a screw (44) is fixedly mounted at the liquid inlet end of the spray tube (41).
4. A slurry distribution device according to claim 3, characterized in that the nozzle (43) is inclined.
5. A grinding fluid distribution device according to any of claims 2-4, characterized in that the outer circumference of the driving disc (42) is fixedly sleeved with a rubber ring pressed with the mounting plate (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321011755.2U CN219925707U (en) | 2023-04-27 | 2023-04-27 | Grinding fluid flow dividing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321011755.2U CN219925707U (en) | 2023-04-27 | 2023-04-27 | Grinding fluid flow dividing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219925707U true CN219925707U (en) | 2023-10-31 |
Family
ID=88499069
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321011755.2U Active CN219925707U (en) | 2023-04-27 | 2023-04-27 | Grinding fluid flow dividing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219925707U (en) |
-
2023
- 2023-04-27 CN CN202321011755.2U patent/CN219925707U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant |