CN219892152U

CN219892152U - Multi-station turntable of wafer spin dryer

Info

Publication number: CN219892152U
Application number: CN202322563801.6U
Authority: CN
Inventors: 陶德华
Original assignee: GUIZHOU HUALONG ELECTRONIC EQUIPMENT CO Ltd
Current assignee: GUIZHOU HUALONG ELECTRONIC EQUIPMENT CO Ltd
Priority date: 2023-09-21
Filing date: 2023-09-21
Publication date: 2023-10-24
Anticipated expiration: 2033-09-21

Abstract

The utility model discloses a multi-station turntable of a wafer spin dryer, and belongs to the field of semiconductor chip processing equipment. The rotary table comprises a clamping device positioned on the surface of a rotary table body; the clamping devices are at least two groups, each group of clamping device comprises four sets of clamps, and each set of clamp consists of a support (1) and a pressing plate (2) which are fixed on the surface of the turntable body (4); all clamps in each group of clamping devices are respectively distributed on circumferences with different diameters from inside to outside by taking the rotation center of the turntable body (4) as the circle center, and four sets of clamps on each circumference are uniformly distributed; the height of each set of clamp supports (1) on each circumference is larger than the height of each clamp pressing plate (2) on the circumference of the adjacent inner layer. The utility model has the advantages of simple structure, convenient processing and manufacturing and low cost, and widens the application range of the equipment; is a rotary disk of a wafer spin dryer which can be compatible with disk carriers with various specifications.

Description

Multi-station turntable of wafer spin dryer

Technical Field

The utility model relates to a turntable of a wafer spin dryer, and belongs to the field of semiconductor chip processing equipment.

Background

In the preparation process of a semiconductor wafer, the wafer is required to be stuck and fixed on a magnetic disk for polishing and cleaning, and then the wafer is dried in a spin-drying and dehydration mode; such as "a wafer dryer (CN 212542372U)". This patent suffers from the following drawbacks:

1) The turntable has only one station, can only adapt to a disk carrier of a certain specification, and has a narrow application range.

2) There is no device for cleaning the cover, and the dirt on the inner wall of the cover may fall on the wafer due to vibration and the like during the spin-drying process, so as to pollute the wafer.

Disclosure of Invention

Aiming at the defects in the prior art, the utility model aims to provide the multi-station turntable of the wafer spin dryer, which can avoid cross contamination and is compatible with disk carriers with various specifications.

In order to achieve the above purpose, the present utility model adopts the following technical scheme: the rotary table comprises a clamping device positioned on the surface of a rotary table body; the clamping devices are at least two groups, each group of clamping device comprises four sets of clamps, and each set of clamp consists of a support and a pressing plate which are fixed on the surface of the turntable body; all clamps in each group of clamping devices are respectively distributed on circumferences with different diameters from inside to outside by taking the rotation center of the turntable body as the circle center, and four sets of clamps on each circumference are uniformly distributed; the height of each set of clamp support on each circumference is larger than the height of each set of clamp pressing plate on the circumference of the adjacent inner layer.

In the technical scheme, the clamps on each circumference are arranged in a staggered manner with the clamps on the adjacent circumference.

The turntable body in the technical scheme is provided with two groups of cleaning devices, and each cleaning device consists of a cleaning pipe vertically fixed on the turntable body through the turntable body, an elbow connected with the lower end of the cleaning pipe and two nozzles communicated with the cleaning pipe.

Further, a counterweight ring fixed by a plurality of supporting columns is arranged above the turntable body in the technical scheme.

Compared with the prior art, the utility model has the following advantages due to the adoption of the technical scheme:

1) The surface of the turntable body is provided with a plurality of clamping stations formed by a plurality of groups of clamping devices, so that the turntable body can realize positioning and clamping on disc carriers with various specifications only by one spin-drying device, and the application range is widened.

2) The spin-drying treatment can be carried out on a plurality of disk carriers with different specifications at the same time, so that the spin-drying efficiency is improved.

3) The cleaning device is added on the turntable body, so that the inner wall of the housing can be cleaned after spin-drying is finished every time, and the defect that the traditional spin-drying equipment is easy to pollute wafers can be effectively overcome.

Drawings

FIG. 1 is a schematic perspective view of the present utility model;

FIG. 2 is a cross-sectional view of the structure of the present utility model;

FIG. 3 is a top view of FIG. 2;

FIG. 4 is a cross-sectional view A-A of FIG. 3;

FIG. 5 is a cross-sectional view B-B of FIG. 3;

FIG. 6 is a schematic diagram of a wafer attached to a disk carrier;

in the figure: support 1, clamp plate 2, nozzle 3, carousel body 4, stand 5, counter weight ring 6, wash pipe 7, elbow 8, disk carrier 9, wafer 10.

Detailed Description

The utility model will be further described with reference to the drawings and specific examples.

As shown in fig. 1 to 5: the surface of the turntable body 4 is provided with two groups of clamping devices, each group of clamping devices comprises four groups of clamps, and each group of clamps consists of a support 1 fixed on the surface of the turntable body 4 and a pressing plate 2 matched with the support 1. All clamps in each group of clamping devices are respectively distributed on circumferences with different diameters from inside to outside by taking the rotation center of the turntable body 4 as the circle center, and four sets of clamps on each circumference are uniformly distributed. The height of the support 1 of each set of clamps on each circumference is larger than the height of the pressing plate 2 of each set of clamps on the circumference of the adjacent inner layer.

In order to facilitate the increase of the operation space, the clamps on each circumference are arranged in a staggered way with the clamps on the adjacent circumference.

In order to facilitate cleaning of the inner wall of the housing (not shown in the figures), the turntable body 4 is provided with two groups of spraying devices; the cleaning device is composed of a cleaning pipe 7 vertically fixed on the turntable body through the turntable body 4, an elbow 8 connected with the lower end of the cleaning pipe, and two nozzles 3 communicated with the cleaning pipe 7.

It should be noted that the elbow 8 is connected to a water supply pipe (not shown) located in the hollow rotating shaft (not shown) through a connection pipe (not shown) fixed to the back of the turntable body 4, and the water supply pipe is connected to a water pump (not shown) through an adapter, so that the water supply pipe, the connection pipe, etc. do not generate torsional interference due to the rotation of the turntable body 4. The structure of the adaptor (not shown in the drawings) is a well-known technology, and the specific structure thereof will not be described herein.

In order to facilitate increasing the moment of inertia and reducing the load of the motor, a counterweight ring 6 is fixed above the turntable body 4 by a plurality of support posts 5.

Working principle:

in use, according to the size, the disk carrier 9 (see fig. 6) with a plurality of wafers 10 adhered on the surface is positioned on four supports 1 on a certain circumference, and the edges of the disk carrier 9 are clamped by four pressing plates 2 on the circumference; and then the motor (not shown in the figure) is powered on.

After the spin-drying is finished, the power supply of the motor is disconnected, a sealing cover (not shown in the figure) of the housing is uncovered, the pressing plate 2 is loosened, and the disk carrier 9 is taken out; and then closing the sealing cover, and switching on the motor and the water pump power supply to flush the inner cavity of the housing.

Claims

1. A multi-station turntable of a wafer dryer comprises a clamping device positioned on the surface of a turntable body; the method is characterized in that: the clamping devices are at least two groups, each group of clamping device comprises four sets of clamps, and each set of clamp consists of a support (1) and a pressing plate (2) which are fixed on the surface of the turntable body (4); all clamps in each group of clamping devices are respectively distributed on circumferences with different diameters from inside to outside by taking the rotation center of the turntable body (4) as the circle center, and four sets of clamps on each circumference are uniformly distributed; the height of each set of clamp supports (1) on each circumference is larger than the height of each set of clamp pressing plates (2) on the circumference of the adjacent inner layer.

2. The multi-station turntable of a wafer spin dryer according to claim 1, wherein: the clamps on each circumference are arranged in a staggered way with the clamps on the adjacent circumference.

3. The multi-station turntable of a wafer spin dryer according to claim 1, wherein: the turntable body (4) is provided with two groups of cleaning devices, and each cleaning device consists of a cleaning pipe (7) vertically fixed on the turntable body through the turntable body (4), an elbow (8) connected with the lower end of the cleaning pipe and two nozzles (3) communicated with the cleaning pipe (7).

4. A multi-station turntable of a wafer spin dryer according to any one of claims 1 to 3, wherein: a counterweight ring (6) fixed by a plurality of supporting columns (5) is arranged above the turntable body (4).