CN218555097U - Substrate bearing structure of Micro-LED substrate rotary cleaning machine - Google Patents

Substrate bearing structure of Micro-LED substrate rotary cleaning machine Download PDF

Info

Publication number
CN218555097U
CN218555097U CN202223092698.3U CN202223092698U CN218555097U CN 218555097 U CN218555097 U CN 218555097U CN 202223092698 U CN202223092698 U CN 202223092698U CN 218555097 U CN218555097 U CN 218555097U
Authority
CN
China
Prior art keywords
micro
framework
substrate
supporting
led substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202223092698.3U
Other languages
Chinese (zh)
Inventor
袁亚鸿
李素华
钟立华
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jiangsu Fulate Automation Equipment Co ltd
Original Assignee
Jiangsu Fulate Automation Equipment Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jiangsu Fulate Automation Equipment Co ltd filed Critical Jiangsu Fulate Automation Equipment Co ltd
Priority to CN202223092698.3U priority Critical patent/CN218555097U/en
Application granted granted Critical
Publication of CN218555097U publication Critical patent/CN218555097U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)

Abstract

The utility model discloses a substrate bearing structure of a Micro-LED substrate rotary cleaning machine, which comprises a shaft sleeve, a framework and a limiting seat, wherein the framework is a circular framework, eight limiting seats are uniformly fixed in the circumferential direction of the framework, and every two of the eight limiting seats form a group; the framework is fixedly connected with the shaft sleeve. The Micro-LED substrate is arranged on the bearing structure and is supported by the limiting seat, and when the Micro-LED substrate rotates, the motor driving the motor seat to rotate is a low-speed motor, so that the substrate cannot be thrown out of the limiting seat due to centrifugal force. The utility model discloses simple structure, during the base plate washing, directly arrange the bearing in with the base plate structurally, need not unnecessary fixed, the convenience of taking improves base plate handling efficiency, supports stably, excellent in use effect.

Description

Substrate bearing structure of Micro-LED substrate rotary cleaning machine
The technical field is as follows:
the utility model relates to a rotatory cleaning machine's of Micro-LED base plate bearing structure.
Background art:
the glass substrate cleaning is the step with the highest repeated use frequency in the Micro LED liquid crystal glass manufacturing process, the surface of the glass substrate must be cleaned before each manufacturing process step to remove pollutants and avoid the generation of a primary oxide film, the existing cleaning modes of the Micro-LED substrate mainly comprise three types, one type is ultrasonic soaking cleaning, namely, the substrate is soaked in cleaning liquid medicine, and then the substrate is cleaned by matching ultrasonic waves. The other is rotary spray cleaning, namely, a substrate is arranged on a supporting seat, the supporting seat rotates, and the substrate on the supporting seat is cleaned by high-pressure spray. The other method is conveying cleaning, wherein the substrate is placed on a driving roller, and cleaning of the substrate is realized by spraying cleaning liquid at high pressure in the conveying process.
When the rotary spraying cleaning is adopted, the substrate needs to be fixed on the rotary seat by the existing rotary cleaning machine, the rotary seat rotates at a low speed, the substrate can not fly out due to centrifugal force, when the rotary seat of the existing fixed substrate is used, the substrate can be damaged by fixing, and in the second aspect, time is wasted due to redundant fixing action, so that a brand new structure needs to be designed for providing the loading and unloading efficiency of the rotary cleaning machine.
The invention content is as follows:
the utility model provides a substrate bearing structure of rotatory cleaning machine of Micro-LED base plate for solve the problem that above-mentioned prior art exists.
The utility model discloses the technical scheme who adopts has:
a substrate bearing structure of a Micro-LED substrate rotary cleaning machine comprises a shaft sleeve, a framework and limiting seats, wherein the framework is a circular framework, eight limiting seats are uniformly fixed in the circumferential direction of the framework, and every two of the eight limiting seats form a group; the framework is fixedly connected with the shaft sleeve.
Furthermore, the limiting seat comprises a supporting seat body and a balancing weight, a right-angle supporting groove is formed in the supporting seat body, and the balancing weight is fixed on the outer wall surface of the supporting seat body.
Furthermore, a first supporting pin is fixed on the right-angle supporting groove.
Furthermore, a plurality of second support pins are fixed on the framework, the upper end surfaces of the second support pins are flush with the upper end surface of the first support pin, and the upper end surface of the first support pin is flush with the upper end surface of the support base body.
Furthermore, a leading-in table is arranged on the top end face of the balancing weight, and the inner wall face of the leading-in table is of a downward inclined plane structure.
Furthermore, the shaft sleeve comprises a connecting sleeve and a blocking sleeve, the inner diameter of the blocking sleeve is larger than the outer diameter of the connecting sleeve, and the upper end faces of the connecting sleeve and the blocking sleeve are fixedly connected with the framework.
Furthermore, a key groove is formed in the axis direction of the blocking sleeve.
The utility model discloses following beneficial effect has:
the Micro-LED substrate is arranged on the bearing structure and is supported by the limiting seat, and when the Micro-LED substrate rotates, the motor driving the motor seat to rotate is a low-speed motor, so that the substrate cannot be thrown out of the limiting seat due to centrifugal force. The utility model discloses simple structure, during the base plate washing, directly arrange the bearing in with the base plate structurally, need not unnecessary fixed, the convenience of taking improves base plate handling efficiency, supports stably, excellent in use effect.
Description of the drawings:
fig. 1 is a structural diagram of the present invention.
Fig. 2 is a structural diagram of the present invention.
Fig. 3 is a structural view of the stopper seat.
Figure 4 is an assembled cross-sectional view of the substrate support structure with the motor and motor mount.
The specific implementation mode is as follows:
the present invention will be further described with reference to the accompanying drawings.
As shown in fig. 1 to 3, the utility model relates to a rotatory cleaning machine's of Micro-LED base plate bearing structure, including axle sleeve 451, skeleton 452 and spacing seat 453, skeleton 452 is circular skeleton, evenly fixes eight spacing seats 453 on the circumferencial direction of skeleton 452, and eight spacing seats 453 are two liang a set of, and when the base plate was placed in skeleton 452, every edge department of base plate was placed in to two spacing seats 453 of every group, skeleton 452 and axle sleeve 451 fixed connection.
The limiting seat 453 comprises a supporting seat body 4531 and a balancing weight 4532, the supporting seat body 4531 is provided with a right-angle supporting groove, the top end face of the supporting seat body 4531 and the step face of the right-angle supporting groove are respectively provided with a first supporting pin 4533 which is vertically arranged, and the balancing weight 4532 is fixed on the outer wall surface of the supporting seat body 4531.
In order to make the substrate fall into the stopper 453, a pull-in table 4534 is provided on a top end surface of the weight block 4532, and an inner wall surface of the pull-in table 4534 has a slope structure inclined downward.
For better supporting the substrate, a plurality of second supporting pins 4535 are further disposed on the framework 452, an upper end surface of the second supporting pins 4535 is flush with an upper end surface of the first supporting pins 4533, and an upper end surface of the first supporting pins 4533 is flush with an upper end surface of the supporting seat 4531.
The utility model provides a shaft sleeve 451 includes adapter sleeve 4511 and spacer 4512, and the internal diameter of spacer 4512 is greater than adapter sleeve 4511's external diameter, and adapter sleeve 4511 and spacer 4512's up end all with skeleton 452 fixed connection, and spacer 4512's axle center direction is equipped with the keyway.
Referring to fig. 4, during assembly, the connecting sleeve 4511 is connected with a rotating shaft of the motor, and the retaining sleeve 4512 is sleeved on the periphery of the upper end face of the motor base 1 to form a primary seal, so that cleaning liquid in the cleaning process is prevented from splashing into the motor base.
During the use, the Micro-LED base plate passes through the manipulator and carries to the bearing structure on to support through spacing seat 453, when rotatory, the pivoted motor of driving motor seat is low-speed motor, because can not lead to the base plate to be thrown away spacing seat because of centrifugal force. The utility model discloses simple structure, during the base plate washs, directly arrange the bearing in with the base plate structurally, need not unnecessary fixed, the convenience of taking supports stably, what need explain is that, when the base plate is placed, should go rotatory bearing structure size according to the size of base plate for four limits that satisfy the base plate just block on two spacing seats of every group, and clearance control between base plate and the spacing seat is in 0.5 mm.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, several modifications can be made without departing from the principle of the present invention, and these modifications should also be regarded as the protection scope of the present invention.

Claims (7)

1. The utility model provides a base plate bearing structure of rotatory cleaning machine of Micro-LED base plate which characterized in that: the anti-theft device comprises a shaft sleeve (451), a framework (452) and limiting seats (453), wherein the framework (452) is a circular framework, eight limiting seats (453) are uniformly fixed in the circumferential direction of the framework (452), and every two of the eight limiting seats (453) form a group; the framework (452) is fixedly connected with the shaft sleeve (451).
2. The substrate support structure of a Micro-LED substrate spin cleaner of claim 1, wherein: spacing seat (453) are including supporting pedestal (4531) and balancing weight (4532), be equipped with the right angle support groove on supporting pedestal (4531), balancing weight (4532) are fixed on the outer wall of supporting pedestal (4531).
3. The substrate support structure of the Micro-LED substrate spin cleaner of claim 2, wherein: and a first supporting pin (4533) is fixed on the right-angle supporting groove.
4. The substrate support structure of the Micro-LED substrate spin cleaner of claim 3, wherein: a plurality of second supporting pins (4535) are fixed on the framework (452), the upper end faces of the second supporting pins (4535) are flush with the upper end faces of the first supporting pins (4533), and the upper end faces of the first supporting pins (4533) are flush with the upper end faces of the supporting seat bodies (4531).
5. The substrate support structure of a Micro-LED substrate spin cleaner of claim 2, wherein: and the top end surface of the balancing weight is provided with an introduction table, and the inner wall surface of the introduction table is of a downward inclined plane structure.
6. The substrate support structure of a Micro-LED substrate spin cleaner of claim 1, wherein: the shaft sleeve (451) comprises a connecting sleeve (4511) and a blocking sleeve (4512), the inner diameter of the blocking sleeve (4512) is larger than the outer diameter of the connecting sleeve (4511), and the upper end faces of the connecting sleeve (4511) and the blocking sleeve (4512) are fixedly connected with the framework (452).
7. The substrate support structure of the Micro-LED substrate spin cleaner of claim 6, wherein: the axis direction of the retaining sleeve (4512) is provided with a key groove.
CN202223092698.3U 2022-11-22 2022-11-22 Substrate bearing structure of Micro-LED substrate rotary cleaning machine Active CN218555097U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202223092698.3U CN218555097U (en) 2022-11-22 2022-11-22 Substrate bearing structure of Micro-LED substrate rotary cleaning machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202223092698.3U CN218555097U (en) 2022-11-22 2022-11-22 Substrate bearing structure of Micro-LED substrate rotary cleaning machine

Publications (1)

Publication Number Publication Date
CN218555097U true CN218555097U (en) 2023-03-03

Family

ID=85325666

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202223092698.3U Active CN218555097U (en) 2022-11-22 2022-11-22 Substrate bearing structure of Micro-LED substrate rotary cleaning machine

Country Status (1)

Country Link
CN (1) CN218555097U (en)

Similar Documents

Publication Publication Date Title
CN201896027U (en) Vacuum sucking disc
CN100540929C (en) Drive axle rolling type radial support apparatus
CN218555097U (en) Substrate bearing structure of Micro-LED substrate rotary cleaning machine
CN101579658A (en) Centrifuge and hanging rack thereof
CN109277933A (en) A kind of silicon wafer outer round surface burnishing device and polishing method
CN111112186A (en) Wafer cleaning equipment
CN214335462U (en) Wafer coating clamp
CN108987330A (en) A kind of one chip cleaning machine and its chuck
CN208977812U (en) A kind of equipment assembling line rotating machine arm
TWI744988B (en) A device for cleaning and etching
CN219892152U (en) Multi-station turntable of wafer spin dryer
CN210546501U (en) High efficiency two-sided brush dish washs frock
CN102403254A (en) Silicon wafer clamping device in single wafer washing equipment
CN209075498U (en) A kind of capsule for medicine automatic Loading equipment
CN109262449B (en) Separated chuck device and wafer grinding process
CN219586172U (en) Vacuum magnetron sputtering coating machine
CN219955858U (en) Ampoule hydro-extracting cage
CN219800794U (en) Wafer spin-drying mechanism and wafer spin-dryer
CN210586015U (en) Brush structure for large-size silicon wafer cleaning machine
CN219787881U (en) 6 cun wafer double-sided polishing planetary wheel
CN219943988U (en) Multi-station pipe body inner and outer cavity synchronous cleaning device capable of being rapidly processed
CN215757585U (en) Large disc with built-in rotary shaft seat and suitable for multi-specification workpiece racks
CN217668727U (en) Polishing wheel for glass machinery
CN218486267U (en) Horizontal centrifuge and transmission mechanism thereof
CN216773777U (en) Automatic USB seat assembling machine

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant