CN219873456U - Pneumatic sucking disc feeding mechanism - Google Patents
Pneumatic sucking disc feeding mechanism Download PDFInfo
- Publication number
- CN219873456U CN219873456U CN202321319035.2U CN202321319035U CN219873456U CN 219873456 U CN219873456 U CN 219873456U CN 202321319035 U CN202321319035 U CN 202321319035U CN 219873456 U CN219873456 U CN 219873456U
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- pneumatic
- chuck
- sucker
- feeding
- fixedly arranged
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- 230000007246 mechanism Effects 0.000 title claims abstract description 38
- 230000005540 biological transmission Effects 0.000 claims abstract description 21
- 238000000926 separation method Methods 0.000 claims description 7
- 235000012431 wafers Nutrition 0.000 abstract description 24
- 239000013078 crystal Substances 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 238000009423 ventilation Methods 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Sheets, Magazines, And Separation Thereof (AREA)
Abstract
The utility model belongs to the technical field of wafer feeding, and particularly relates to a pneumatic sucker feeding mechanism. The feeding frame at the upper end of the feeding belt is driven by the transmission supporting shaft to feed, the ball screw nut table is driven by the ball screw to drive the pneumatic chuck supporting assembly to move left and right, the U-shaped clamp is movably connected with the adjusting plate, the chuck seat arranged below the adjusting plate is detachable from the chuck to be cleaned and maintained, the distance adjusting electric cylinder is arranged on the chuck seat, the height of the chuck seat can be adjusted so that the chuck can adsorb wafers on different height planes, the chuck on the chuck seat is communicated with the small vacuum pump, when the chuck contacts the adsorbed wafers, the chuck can be adsorbed on the adsorbed wafers by opening the electromagnetic control valve, and the angle of the adjusting plate and the chuck seat is driven by the rotating motor to be adjusted.
Description
Technical Field
The utility model belongs to the technical field of wafer feeding, and particularly relates to a pneumatic sucker feeding mechanism.
Background
The starting material for the wafer is silicon, while the crust surface is useful with inexhaustible silicon dioxide. Silicon dioxide ore is refined by an electric arc furnace, chloridized by hydrochloric acid and distilled to prepare high-purity polysilicon, a wafer manufacturing factory is used for melting the polysilicon, seed crystals are planted in the melt, and then the seed crystals are slowly pulled out to form a cylindrical monocrystalline silicon crystal rod, and the process is called as crystal growth because the silicon crystal rod is gradually generated in a molten silicon raw material by the seed crystals with one crystal face orientation. The silicon crystal bar is cut, barreled, sliced, chamfered, polished, laser-etched and packaged to obtain the basic raw material of integrated circuit factory-silicon wafer.
Through searching, chinese patent application document with the Chinese patent application number of CN201921118271.1 discloses a free clamping pneumatic sucker, which comprises: the sucker base, the valve body and the cover plate; the valve body is provided with a plurality of valves; the top of the sucker base is provided with a plurality of ventilation grooves which are communicated with each other; the side wall of the sucker base is provided with an air suction hole which is communicated with the groove; the valve body comprises a pressure lever, a valve core and a spring, the pressure lever is fixed at the top of the valve core, and the valve core is provided with air holes which are arranged in an array by taking the pressure lever as a center; the air holes penetrate through the top and the bottom of the valve core; one end of the spring is fixed at the bottom of the valve core, and the other end of the spring is fixed at the bottom of the ventilation groove; the bottom of the cover plate is provided with a plurality of valve core holes, and the bottom surfaces of the valve core holes are provided with compression bar holes penetrating through the cover plate; the apron is installed at sucking disc base top, and case hole cooperation installation, depression bar run through the depression bar hole to this end protrusion apron top terminal surface.
In view of the above related art, the pneumatic suction cup is provided with a plurality of valve bodies, and a plurality of ventilation grooves are formed, so that in actual working, if a valve body or a valve core hole is blocked, the suction cup cannot work normally to cause failure and cannot be maintained normally, and therefore, a pneumatic suction cup feeding mechanism is required to be designed to deal with the problems.
Disclosure of Invention
Aiming at the defects of the prior art, the utility model discloses a pneumatic sucker feeding mechanism.
The utility model realizes the above purpose through the following technical scheme:
the pneumatic sucker feeding mechanism comprises a base, a movable feeding mechanism is arranged above the base, and a pneumatic sucker executing mechanism is arranged above the movable feeding mechanism.
The pneumatic sucker executing mechanism comprises a pneumatic sucker bearing frame which is transversely and fixedly arranged above the movable feeding mechanism, a first lifting hydraulic cylinder is arranged on the front side and the rear side of the upper side of the pneumatic sucker bearing frame, a pneumatic sucker bearing plate is fixedly arranged at the power telescopic end of the first lifting hydraulic cylinder, a pneumatic sucker supporting component is arranged below the pneumatic sucker bearing plate, and a pneumatic sucker executing component is arranged on the inner side of the pneumatic sucker supporting component.
Preferably, the movable feeding mechanism comprises a transmission support frame fixedly arranged on the front side and the rear side above the base, a feeding component is arranged on the inner side of the transmission support frame, and a transverse moving component is arranged on the front side and the rear side of the feeding component.
Preferably, the pneumatic sucker support assembly comprises an upper connecting plate fixedly arranged below the pneumatic sucker bearing plate, a lower connecting plate is arranged below the upper connecting plate, the upper connecting plate is connected with the lower connecting plate through a separation table, a rotating sleeve is arranged on one side of the separation table and connected with a power end of a rotating motor, a U-shaped clamp is fixedly connected on one side of the rotating sleeve, and an adjusting plate is arranged in the U-shaped clamp.
Preferably, the pneumatic sucker executing assembly comprises a distance adjusting electric cylinder fixedly arranged on one side above the adjusting plate, a sucker seat is fixedly arranged at a power telescopic end of the distance adjusting electric cylinder, a sucker is arranged below the sucker seat, a distance sensor is arranged at the center of the sucker seat, one side of the sucker seat is connected to one end of a vacuum air hose, the other end of the vacuum air hose is connected to a small vacuum pump, and an electromagnetic control valve is arranged on one side of the small vacuum pump.
Preferably, the feeding assembly comprises a transmission supporting shaft fixedly arranged on the opposite face of the transmission supporting frame, a feeding belt is arranged on the outer surface of the transmission supporting shaft, and a feeding frame is fixedly arranged above the feeding belt.
Preferably, the transverse moving assembly comprises a ball screw fixedly arranged on the front side and the rear side above the base, and a ball screw nut table is movably arranged on the outer surface of the ball screw.
The beneficial effects are that:
the utility model discloses a pneumatic chuck feeding mechanism, which is characterized in that a movable feeding mechanism and a pneumatic chuck actuating mechanism are arranged, a pneumatic chuck is used for effectively conveying wafers, a conveying frame at the upper end of a feeding belt is driven by a transmission supporting shaft to feed the wafers, a ball screw nut table is driven by a ball screw to drive a pneumatic chuck supporting assembly to move left and right, a U-shaped clamp is movably connected with an adjusting plate, a chuck seat arranged below the adjusting plate is detachable from the chuck to clean and maintain, a distance adjusting electric cylinder is arranged on the chuck seat, the height of the chuck seat can be adjusted, so that the chuck can adsorb wafers on different height planes, the chuck on the chuck seat is communicated with a small vacuum pump, and when the chuck contacts the adsorbed wafers, the chuck can be adsorbed on the wafers by opening an electromagnetic control valve, and the angle of the adjusting plate and the chuck seat is driven by a rotating motor to adjust, so that the operation is simple and the use is convenient.
Drawings
FIG. 1 is a schematic illustration of an isometric shaft configuration of the present utility model;
FIG. 2 is a schematic elevational view of the present utility model;
FIG. 3 is a first structural schematic of the present utility model;
FIG. 4 is a second schematic structural view of the present utility model;
FIG. 5 is a third structural schematic of the present utility model;
FIG. 6 is a fourth schematic structural view of the present utility model;
fig. 7 is a schematic diagram of the structure at a in fig. 6.
In the figure: 1. a base;
2. a movable feeding mechanism; 201. a transmission support frame; 202. a transmission support shaft; 203. a feeding belt; 204. a first motor; 205. a feeding frame; 206. moving the support frame; 207. a ball screw; 208. a ball screw nut table; 209. a second motor;
3. a pneumatic chuck actuating mechanism; 301. a pneumatic chuck carrier; 302. a first lifting hydraulic cylinder; 303. a pneumatic chuck bearing plate; 304. a connecting stud; 305. a nut; 306. a limit buffer spring; 307. a pneumatic chuck support assembly; 3071. an upper connecting plate; 3072. a separation table; 3073. a lower connecting plate; 3074. a rotating motor; 3075. a rotating sleeve; 3076. a U-shaped card; 3077. an adjusting plate; 308. a small vacuum pump; 309. an electromagnetic control valve; 310. a vacuum air hose; 311. a sucker seat; 312. a suction cup; 313. a distance sensor; 314. distance adjusting electric cylinder.
Description of the embodiments
The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model.
Referring to fig. 1-7, one embodiment provided by the present utility model is: a pneumatic sucking disc feeding mechanism comprises a base 1, wherein a movable feeding mechanism 2 is arranged above the base 1, and a pneumatic sucking disc executing mechanism 3 is arranged above the movable feeding mechanism 2.
In this embodiment: the movable feeding mechanism 2 comprises a transmission support frame 201 fixedly arranged on the front side and the rear side above the base 1, a feeding component is arranged on the inner side of the transmission support frame 201, and a transverse moving component is arranged on the front side and the rear side of the feeding component. The feeding assembly comprises a transmission supporting shaft 202 fixedly arranged on the opposite surface of a transmission supporting frame 201, a feeding belt 203 is arranged on the outer surface of the transmission supporting shaft 202, and a feeding frame 205 is fixedly arranged above the feeding belt 203. The lateral movement assembly comprises a ball screw 207 fixedly arranged on the front side and the rear side above the base 1, and a ball screw nut table 208 is movably arranged on the outer surface of the ball screw 207. One end of the transmission support shaft 202 is connected to the power output end of the first motor 204 through a coupling, the ball screw 207 is connected to the movable support frame 206 through a bearing, and one end of the ball screw 207 is fixedly arranged at the power output end of the second motor 209 through a coupling. The transmission support shaft 202 is matched with the feeding belt 203 for transporting the feeding frame 205, and the ball screw 207 and the ball screw nut table 208 are used for driving the pneumatic chuck actuating mechanism 3 to move left and right.
In this embodiment: the pneumatic chuck executing mechanism 3 comprises a pneumatic chuck bearing frame 301 transversely and fixedly arranged above the movable feeding mechanism 2, a first lifting hydraulic cylinder 302 is arranged on the front side and the rear side above the pneumatic chuck bearing frame 301, a pneumatic chuck bearing plate 303 is fixedly arranged at the power telescopic end of the first lifting hydraulic cylinder 302, a pneumatic chuck supporting component 307 is arranged below the pneumatic chuck bearing plate 303, and a pneumatic chuck executing component is arranged on the inner side of the pneumatic chuck supporting component 307. The pneumatic chuck support assembly 307 comprises an upper connecting plate 3071 fixedly arranged below the pneumatic chuck bearing plate 303, a lower connecting plate 3073 is arranged below the upper connecting plate 3071, the upper connecting plate 3071 is connected with the lower connecting plate 3073 through a separation table 3072, a rotating sleeve 3075 is arranged on one side of the separation table 3072, the rotating sleeve 3075 is connected to the power end of a rotating motor 3074, a U-shaped clamp 3076 is fixedly connected to one side of the rotating sleeve 3075, and an adjusting plate 3077 is arranged in the U-shaped clamp 3076. The pneumatic chuck executing assembly comprises a distance adjusting electric cylinder 314 fixedly arranged on one side above an adjusting plate 3077, a chuck seat 311 is fixedly arranged at the power telescopic end of the distance adjusting electric cylinder 314, a chuck 312 is arranged below the chuck seat 311, a distance sensor 313 is arranged at the center of the chuck seat 311, one side of the chuck seat 311 is connected with one end of a vacuum air hose 310, the other end of the vacuum air hose 310 is connected with a small vacuum pump 308, and an electromagnetic control valve 309 is arranged on one side of the small vacuum pump 308. The upper connecting plate 3071 top is provided with connecting stud 304, and connecting stud 304 surface has nut 305 through threaded connection, and pneumatic chuck loading board 303 top is vertical to be provided with spacing buffer spring 306, and is 90 degrees settings, and base 1 rear side is provided with the vacuum tank, and the vacuum tank top is connected with coupling hose. The chuck 312 is used to pneumatically adsorb the wafer, the distance sensor 313 is used to measure the distance, and the connecting stud 304 cooperates with the nut 305 for connecting and disconnecting the pneumatic chuck support assembly 307.
Working principle: when the wafer conveying device is used, firstly, a wafer to be conveyed passes through a feed port on one side of a base 1, a feed box is moved to a certain height, a ball screw 207 in a transverse moving component drives a ball screw nut table 208 to move, a pneumatic chuck bearing frame 301 arranged above the feed box is simultaneously moved, when the wafer is moved to the upper side of the feed box, a first lifting hydraulic cylinder 302 is started, a pneumatic chuck bearing plate 303 is driven to move downwards, simultaneously, a pneumatic chuck supporting component 307 is moved downwards, a motor 3074 is rotated to drive an adjusting plate 3077 and the angle of a chuck seat 311 to be adjusted, the chuck seat 311 is parallel to the wafer surface to be absorbed, a distance between a chuck 312 on the chuck seat 311 and the wafer surface is adjusted by utilizing a distance adjusting electric cylinder 314, the chuck 312 is tightly contacted with the wafer surface, an electromagnetic control valve 309 is opened, the chuck 312 is adsorbed on the absorbed wafer by utilizing the vacuum degree in a vacuum tank, the small vacuum pump 308 can also keep the vacuum tank to be always at a certain vacuum degree, and when the wafer is conveyed to the upper side of a feeding frame 205, the wafer is in a relaxed state by exhausting, and the wafer falls into the feeding frame 205 for conveying.
Finally, it should be noted that: the foregoing description is only illustrative of the preferred embodiments of the present utility model, and although the present utility model has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described, or equivalents may be substituted for elements thereof, and any modifications, equivalents, improvements or changes may be made without departing from the spirit and principles of the present utility model.
Claims (6)
1. A pneumatic chuck feeding mechanism which is characterized in that: the automatic feeding device comprises a base (1), wherein a movable feeding mechanism (2) is arranged above the base (1), and a pneumatic sucker executing mechanism (3) is arranged above the movable feeding mechanism (2);
the pneumatic sucker executing mechanism (3) comprises a pneumatic sucker bearing frame (301) transversely and fixedly arranged above the movable feeding mechanism (2), a first lifting hydraulic cylinder (302) is arranged on the front side and the rear side above the pneumatic sucker bearing frame (301), a pneumatic sucker bearing plate (303) is fixedly arranged at the power telescopic end of the first lifting hydraulic cylinder (302), a pneumatic sucker supporting component (307) is arranged below the pneumatic sucker bearing plate (303), and a pneumatic sucker executing component is arranged on the inner side of the pneumatic sucker supporting component (307).
2. A pneumatic chuck feed mechanism as in claim 1, wherein: the movable feeding mechanism (2) comprises a transmission supporting frame (201) fixedly arranged on the front side and the rear side above the base (1), a feeding component is arranged on the inner side of the transmission supporting frame (201), and a transverse moving component is arranged on the front side and the rear side of the feeding component.
3. A pneumatic chuck feed mechanism as in claim 1, wherein: the pneumatic sucker support assembly (307) comprises an upper connecting plate (3071) fixedly arranged below the pneumatic sucker bearing plate (303), a lower connecting plate (3073) is arranged below the upper connecting plate (3071), the upper connecting plate (3071) is connected with the lower connecting plate (3073) through a separation table (3072), a rotating sleeve (3075) is arranged on one side of the separation table (3072), the rotating sleeve (3075) is connected to the power end of a rotating motor (3074), a U-shaped clamp (3076) is fixedly connected to one side of the rotating sleeve (3075), and an adjusting plate (3077) is arranged in the U-shaped clamp (3076).
4. A pneumatic chuck feed mechanism as in claim 3, wherein: the pneumatic sucker executing assembly comprises a distance adjusting electric cylinder (314) fixedly arranged on one side above an adjusting plate (3077), a sucker seat (311) is fixedly arranged at the power telescopic end of the distance adjusting electric cylinder (314), a sucker (312) is arranged below the sucker seat (311), a distance sensor (313) is arranged at the center of the sucker seat (311), one side of the sucker seat (311) is connected with one end of a vacuum hose (310), the other end of the vacuum hose (310) is connected with a small vacuum pump (308), and an electromagnetic control valve (309) is arranged on one side of the small vacuum pump (308).
5. A pneumatic chuck feed mechanism as in claim 2, wherein: the feeding assembly comprises a transmission supporting shaft (202) fixedly arranged on the opposite surface of the transmission supporting frame (201), a feeding belt (203) is arranged on the outer surface of the transmission supporting shaft (202), and a feeding frame (205) is fixedly arranged above the feeding belt (203).
6. A pneumatic chuck feed mechanism as in claim 2, wherein: the transverse moving assembly comprises a ball screw (207) fixedly arranged on the front side and the rear side above the base (1), and a ball screw nut table (208) is movably arranged on the outer surface of the ball screw (207).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321319035.2U CN219873456U (en) | 2023-05-29 | 2023-05-29 | Pneumatic sucking disc feeding mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321319035.2U CN219873456U (en) | 2023-05-29 | 2023-05-29 | Pneumatic sucking disc feeding mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219873456U true CN219873456U (en) | 2023-10-20 |
Family
ID=88368729
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321319035.2U Active CN219873456U (en) | 2023-05-29 | 2023-05-29 | Pneumatic sucking disc feeding mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219873456U (en) |
-
2023
- 2023-05-29 CN CN202321319035.2U patent/CN219873456U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant |