CN219873430U - boat structure - Google Patents

Abstract

The utility model discloses a boat structure, which comprises two end plates and a grooved bar, wherein the two end plates are arranged at intervals. The groove bars are multiple, two ends of each groove bar are respectively connected with the two end plates, a plurality of tooth grooves which are arranged at intervals along the length direction of each groove bar are arranged on each groove bar, the tooth grooves are used for accommodating sheets, and a circulation groove which penetrates through the tooth grooves along the length direction of each groove bar is also arranged on each groove bar. The circulating grooves penetrating through the tooth grooves along the length direction of the groove rod are formed in the groove rod, so that the exposed area of the sheet is larger, the defects of airflow printing and boat tooth printing on the sheet in the process of carrying out the process are overcome, on the other hand, the circulating grooves can enable the airflow and the heat flow in the tooth grooves to circulate more fully, the defects of airflow printing and boat tooth printing on the sheet in the process of carrying out the process can be further overcome, the diffusion or coating of the periphery of the sheet in the process of carrying out the process is more uniform, and therefore the product quality and the yield are improved.

Description

Boat structure

Technical Field

The utility model relates to the technical field of semiconductor processing equipment, in particular to a boat structure.

Background

The processing of semiconductor or photovoltaic materials is typically accomplished by feeding sheet material into a furnace and reacting at a temperature and pressure and introducing a source of process gas, and during the processing of the semiconductor or photovoltaic material, devices are typically used to load or move the material to be processed, during processing or after processing, such loaded or moved devices are commonly referred to in the industry as quartz boats, graphite boats, boats or baskets.

In the existing photovoltaic apparatus, the boat has a structure as shown in fig. 1-2 below, the boat comprises two end plates 1 and a plurality of grooved bars 2 connected between the two end plates 1, grooves 21 are provided on the grooved bars 2, and during operation, silicon wafers 3 need to be inserted into the grooves 21, i.e., the existing boat holds the silicon wafers 3 through the grooves 21.

The process gas is generally introduced into a thermal field during the processing of the silicon wafer 3 in the semiconductor and general semiconductor industry, and the raw material of the boat is generally a high-temperature and corrosion-resistant material such as quartz silicon carbide. The silicon wafer 3 is loaded in the groove 21 of the grooved bar 2, and the contact part of the four peripheries of the silicon wafer 3 and the side wall of the groove 21 generally generates problems of air flow printing, boat tooth printing and the like, so that the film plating of the silicon wafer 3 is influenced, and the air flow and the heat flow circulation in the middle part of the groove 21 are insufficient, so that the film plating uniformity is poor.

Disclosure of Invention

The utility model aims to provide a boat structure which can better improve the defects of airflow printing and boat tooth printing generated on a sheet in the process of the process, thereby improving the manufacturing yield of the sheet.

In order to achieve the technical effects, the technical scheme of the utility model is as follows:

the utility model discloses a boat structure, comprising: the end plates are two and are arranged at intervals; the groove bars are multiple, two ends of each groove bar are respectively connected with two end plates, each groove bar is provided with a plurality of tooth grooves which are arranged at intervals along the length direction of the groove bars, each tooth groove is used for accommodating sheets, and each groove bar is also provided with a circulation groove which penetrates through the plurality of tooth grooves along the length direction of the groove bars.

In some embodiments, the width of the flow-through channel increases gradually in the direction of the channel bottom towards the channel opening.

In some embodiments, the midline of the flow channel is coincident with the midline of the gullet.

In some embodiments, the tooth slot is an arcuate slot.

In some embodiments, the bottom wall of the tooth slot is provided with a groove extending along the radial direction of the slot bar.

In some embodiments, the groove bar is provided with a plurality of integrally formed boat teeth, the boat teeth are arranged at intervals along the height direction of the groove bar, tooth grooves are defined between the two boat teeth, and the circulation grooves penetrate through the boat teeth.

In some specific embodiments, a chamfer is provided at the junction of the boat tooth and the grooved bar.

In some embodiments, the two end plates are respectively a top plate and a bottom plate, the bottom plate is provided with a void-avoiding groove, and a plurality of groove bars are arranged around the void-avoiding groove.

In some embodiments, the boat structure further comprises a handle member connected to the end plate or the channel bar.

In some specific embodiments, the handle piece comprises a connecting part and a handle part, wherein two ends of the connecting part are respectively connected with the two groove bars, and the handle part is connected to the middle position of the connecting part; or: the handle member includes a boss provided on the end plate.

The boat structure of the utility model has the beneficial effects that: because be equipped with the circulation groove that runs through a plurality of tooth grooves along its length direction on the stick, the area of contact of tooth groove and sheet has been reduced to the existence of circulation groove on the one hand, under the prerequisite that ensures that the sheet can obtain steady support, make the area that the sheet exposes bigger, be favorable to improving the defect that produces air current seal and boat tooth print on the sheet in the technology process of going on, on the other hand circulation groove can make the air current and the heat flow circulation in the tooth groove comparatively abundant, can further improve the defect that produces air current seal and boat tooth print on the sheet in the technology process of going on, the diffusion of the sheet four sides or coating film are more even in the technology process, thereby promote product quality and yields.

Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.

Drawings

FIG. 1 is a schematic structural view of a boat structure of the prior art;

FIG. 2 is an enlarged view of a partial structure of a boat structure of the prior art;

FIG. 3 is a schematic view of the boat structure according to the embodiment of the present utility model;

FIG. 4 is an enlarged schematic view at circle A of FIG. 3;

FIG. 5 is a front view of a boat structure of an embodiment of the present utility model;

FIG. 6 is a side view of a boat structure according to an embodiment of the present utility model;

FIG. 7 is a schematic view in section B-B of FIG. 6;

fig. 8 is an enlarged schematic view at circle C of fig. 7.

Fig. 9 is a schematic view of another tooth slot configuration of the present utility model.

Reference numerals:

in fig. 1-2:

1. an end plate; 2. a grooved bar; 21. a groove; 3. and (3) a silicon wafer.

Fig. 3-9:

100. an end plate; 110. a top plate; 120. a bottom plate; 121. an empty-avoiding groove;

200. a grooved bar; 210. tooth slots; 211. a groove; 220. a flow channel; 230. boat teeth; 240. chamfering;

300. a handle member; 310. a connection part; 320. a handle portion.

Detailed Description

In order to make the technical problems solved, the technical scheme adopted and the technical effects achieved by the utility model more clear, the technical scheme of the utility model is further described below by a specific embodiment in combination with the attached drawings.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.

Furthermore, features defining "first", "second" may include one or more such features, either explicitly or implicitly, for distinguishing between the descriptive features, and not sequentially, and not lightly. In the description of the present utility model, unless otherwise indicated, the meaning of "a plurality" is two or more.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

The specific structure of the boat structure according to the embodiment of the present utility model is described below with reference to fig. 3 to 9.

The utility model discloses a boat structure, which comprises end plates 100 and grooved bars 200, as shown in fig. 3-4, wherein the number of the end plates 100 is two, and the two end plates 100 are arranged at intervals. The number of the grooved bars 200 is plural, two ends of each grooved bar 200 are respectively connected with two end plates 100, each grooved bar 200 is provided with a plurality of tooth grooves 210 which are arranged at intervals along the length direction of the grooved bars, the tooth grooves 210 are used for accommodating sheets, and each grooved bar 200 is also provided with a circulation groove 220 which penetrates through the plurality of tooth grooves 210 along the length direction of the grooved bars.

It can be appreciated that, since the circulation grooves 220 penetrating through the plurality of tooth grooves 210 along the length direction of the groove bar 200 are formed in the groove bar 200, the contact area between the tooth grooves 210 and the sheet is reduced due to the existence of the circulation grooves 220, on one hand, the exposed area of the sheet is larger on the premise of ensuring that the sheet can be stably supported, which is favorable for improving the defects of air flow marks and boat tooth marks generated on the sheet in the process of proceeding the process, and on the other hand, the circulation grooves 220 can enable the air flow and heat flow in the tooth grooves 210 to circulate more fully, and further improve the defects of air flow marks and boat tooth marks generated on the sheet in the process of proceeding the process, and the diffusion or coating film on the periphery of the sheet is more uniform in the process of proceeding the process, thereby improving the product quality and yield.

Alternatively, the end plate 100 is a square plate, and the number of the grooved bars 200 is four. Thus, the sheet can be supported well, thereby ensuring stable progress of the process. Of course, in other embodiments of the present utility model, the shape of the end plate 100 and the number of the channel bars 200 may be selected according to actual needs, and are not limited to the foregoing.

In some embodiments, as shown in fig. 7-8, the width of the flow channel 220 increases gradually in the direction of the channel bottom toward the channel opening. It can be appreciated that the cross section of the circulation groove 220 is formed into a trapezoid, so that the airflow and the heat flow in the tooth slot 210 can circulate more fully, the defects of airflow printing and boat tooth printing generated on the sheet in the process can be further improved, and the diffusion or the coating of the periphery of the sheet in the process can be more uniform, thereby improving the product quality and the yield. Of course, in other embodiments of the present utility model, the flow channel 220 may be formed as a channel body of equal width or other shapes, and is not limited to the trapezoidal channel type of the present embodiment.

In some embodiments, the midline of the flow slot 220 is coincident with the midline of the gullet 210. It can be appreciated that, according to experiments, the contact position between the sheet and the middle of the tooth slot 210 is easier to generate the air flow mark and the boat tooth mark, and in this embodiment, the center line of the circulation slot 220 is overlapped with the center line of the tooth slot 210, so that the middle position of the tooth slot 210 is not contacted with the sheet, and the probability of generating the air flow mark or the boat tooth mark on the sheet is better reduced, thereby improving the product quality and the yield.

In some embodiments, as shown in fig. 4, the gullet 210 is an arcuate slot. It can be understood that the arc-shaped groove can be used for reducing the contact area with the sheet while ensuring that the sheet can be stably clamped, so that the probability of generating air flow marks or boat tooth marks on the sheet is better reduced, and the product quality and the yield are improved. Of course, in other embodiments of the present utility model, the tooth slot 210 may be selected according to actual needs.

In some embodiments, as shown in FIG. 9, the bottom wall of the spline 210 is provided with grooves 211 extending radially along the spline 200. It can be appreciated that during the process, the air flow and the heat flow can be communicated in the groove 211, so that the air flow and the heat flow in the tooth slot 210 can flow sufficiently, and the probability of generating the air flow mark or the boat tooth mark on the sheet is better reduced, thereby improving the product quality and the yield.

In some embodiments, as shown in fig. 3-4, a plurality of integrally formed boat teeth 230 are provided on the grooved bar 200, the plurality of boat teeth 230 are spaced apart along the height of the grooved bar 200, the two boat teeth 230 define a tooth slot 210 therebetween, and the flow channel 220 is provided through the boat teeth 230. It will be appreciated that the use of a plurality of integrally formed boat teeth 230 to define a plurality of tooth slots 210 facilitates the manufacture of the grooved bar 200 and reduces the manufacturing costs of the grooved bar 200.

In some embodiments, as shown in FIG. 4, the connection of the boat teeth 230 to the grooved bars 200 is provided with a chamfer 240. Therefore, the phenomenon of stress concentration at the joint of the boat teeth 230 and the grooved bars 200 can be reduced, so that the probability of breakage of the boat teeth 230 is reduced, and the service life of the grooved bars 200 is prolonged.

In some embodiments, as shown in fig. 3, two end plates 100 are a top plate 110 and a bottom plate 120, respectively, the bottom plate 120 is provided with a void-avoidance groove 121, and a plurality of groove bars 200 are disposed around the void-avoidance groove 121. It will be appreciated that the void-avoidance slots 121 on the one hand reduce the weight of the base plate 120 and thus the weight of the overall boat structure and on the other hand facilitate boat structure positioning.

In some embodiments, as shown in fig. 5-6, the boat structure further includes a handle member 300, the handle member 300 being connected to the end plate 100 or the channel bar 200. It will be appreciated that a user or mechanical arm may carry the boat structure through the handle member 300. The handle member 300 may also serve as a support structure for the boat structure in cooperation with the boat support or support arm, facilitating use and carrying of the boat structure.

In some embodiments, as shown in fig. 3, the handle member 300 includes a connection portion 310 and a handle portion 320, both ends of the connection portion 310 are respectively connected to the two channel bars 200, and the handle portion 320 is connected to a middle position of the connection portion 310. It can be appreciated that the two ends of the connecting portion 310 are respectively connected with the two grooved bars 200, so that the deformation resistance of the boat structure can be improved, the user or the mechanical arm can carry the boat structure through the handle portion 320, and the handle portion 320 can also serve as a supporting structure for cooperation of the boat structure and the boat support or the supporting arm, thereby facilitating use and carrying of the boat structure.

In some specific embodiments, the handle member 300 includes a boss provided on the end plate 100. Thereby, the structure of the handle member 300 is simplified, and the manufacture of the handle member 300 is facilitated.

Examples:

as shown in fig. 3 to 8, the boat structure of the present embodiment includes end plates 100, slot bars 200, and handle members 300, the two end plates 100 are respectively a top plate 110 and a bottom plate 120, and a clearance slot 121 is provided in the bottom plate 120. Four groove bars 200 are arranged around the void-avoiding groove 121, two ends of each groove bar 200 are respectively connected with the top plate 110 and the bottom plate 120, a plurality of integrally formed boat teeth 230 are arranged on each groove bar 200, the boat teeth 230 are arranged at intervals along the height direction of the groove bar 200, tooth grooves 210 are defined between the two boat teeth 230, and a circulation groove 220 penetrating through the boat teeth 230 along the length direction of each groove bar 200 is further arranged on each groove bar 200. The joint of the boat teeth 230 and the slot bars 200 is provided with a chamfer 240, and the center line of the circulation slot 220 is overlapped with the center line of the tooth slot 210. The width of the flow channel 220 increases gradually in the direction of the channel bottom toward the channel opening. The handle member 300 includes a connection portion 310 and a handle portion 320, both ends of the connection portion 310 are respectively connected to the two socket bars 200, and the handle portion 320 is connected to a middle position of the connection portion 310.

As shown in fig. 9, the bottom wall of the tooth slot 210 of the present embodiment may further be provided with a groove 211 extending radially along the slot bar 200.

In the description of the present specification, reference to the term "some embodiments," "other embodiments," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The foregoing is merely exemplary of the present utility model, and those skilled in the art should not be considered as limiting the utility model, since modifications may be made in the specific embodiments and application scope of the utility model in light of the teachings of the present utility model.

Claims (10)

1. Boat structure, its characterized in that includes:

the end plates (100), the number of the end plates (100) is two, and the two end plates (100) are arranged at intervals;

the groove bars (200), groove bars (200) are a plurality of, every both ends of groove bars (200) link to each other with two respectively end plate (100), every be equipped with a plurality of tooth grooves (210) that set up along its length direction interval on groove bars (200), tooth groove (210) are used for holding the sheet, every still be equipped with on groove bars (200) along its length direction run through a plurality of circulation groove (220) of tooth groove (210).

2. The boat structure of claim 1, characterized in that the width of the flow channel (220) gradually increases in the direction of the channel bottom toward the notch.

3. The boat structure of claim 1, characterized in that a center line of the flow channel (220) is disposed coincident with a center line of the tooth slot (210).

4. A boat structure according to any one of claims 1-3, characterized in that the tooth slot (210) is an arc-shaped slot.

5. A boat structure according to any one of claims 1-3, characterized in that the bottom wall of the tooth slot (210) is provided with grooves (211) extending radially along the slot bar (200).

6. A boat structure according to any one of claims 1-3, wherein a plurality of integrally formed boat teeth (230) are provided on the grooved bar (200), a plurality of the boat teeth (230) are arranged at intervals along the height direction of the grooved bar (200), the tooth grooves (210) are defined between two of the boat teeth (230), and the flow grooves (220) are arranged through the boat teeth (230).

7. The boat structure of claim 6, characterized in that a chamfer (240) is provided at the junction of the boat tooth (230) and the grooved bar (200).

8. A boat structure according to any one of claims 1-3, wherein two of said end plates (100) are a top plate (110) and a bottom plate (120), respectively, said bottom plate (120) being provided with a void-avoiding groove (121), a plurality of said groove bars (200) being disposed around said void-avoiding groove (121).

9. A boat structure according to any one of claims 1-3, further comprising a handle member (300), said handle member (300) being connected to said end plate (100) or said channel bar (200).

10. The boat structure according to claim 9, characterized in that the handle member (300) includes a connecting portion (310) and a handle portion (320), both ends of the connecting portion (310) are respectively connected to the two tank bars (200), and the handle portion (320) is connected to a middle position of the connecting portion (310); or:

the handle member (300) includes a boss provided on the end plate (100).