CN220306222U - Transportation carrier - Google Patents

Abstract

The utility model belongs to the technical field of semiconductor loading jigs, and particularly discloses a transport carrier which comprises at least two boats, wherein the boats are used for bearing a substrate, a connecting part is arranged on one boat, and a connecting matching part matched with the connecting part is arranged on the adjacent boat, so that the position degree between the two adjacent boats is ensured. When the boat is used, at least two boats are sequentially clamped, and then are directly conveyed through the boat paddles, so that the action flow of conveying the conveying carrier is simplified, and the conveying efficiency is high without using an additional positioning mechanism. In addition, through the setting of connecting portion and connection cooperation portion for keep certain clearance between two adjacent boat, air current and thermal radiation can pass the clearance thereby evenly flow in the furnace body, improved the homogeneity of base member coating film.

Description

Transportation carrier

Technical Field

The utility model relates to the technical field of semiconductor loading jigs, in particular to a transport carrier.

Background

In the field of processing semiconductor or photovoltaic materials, a sheet material is usually sent into a diffusion furnace to react under a certain temperature and pressure, so that during the processing of the semiconductor or photovoltaic materials, some devices are required to load or move the materials to be processed, during the processing or after the processing, for example, during the processing of a silicon wafer, a high-temperature and high-corrosion reaction environment is usually involved, so that the raw material of a loading jig for manufacturing the silicon wafer is usually a high-temperature and corrosion-resistant material such as quartz or silicon carbide, and the industry usually refers to such a loading jig as a transportation carrier.

Generally, the transport carrier is composed of a boat and a transport carrier support, the boat is placed on the transport carrier support, when the silicon wafers need to be placed in the diffusion furnace for reaction, the transport carrier support with the boat placed thereon is carried through the boat paddle, but when the boat is carried on the transport carrier support, each boat needs to be positioned through the positioning mechanism, and the boat needs to be taken and placed for multiple times, so that the operation flow is complex, the time consumption is long, and the carrying efficiency is low.

Therefore, there is a need for a transportation vehicle that solves the above-mentioned problems.

Disclosure of Invention

The utility model aims to provide a transport carrier which comprises a plurality of small boats, wherein the adjacent two small boats can be accurately positioned at intervals and are arranged on the same straight line, and after the small boats are arranged, the transport carrier is directly transported through a boat paddle, so that the action flow is simplified, no additional positioning mechanism is needed for positioning, and the transport efficiency is improved.

To achieve the purpose, the utility model adopts the following technical scheme:

the present utility model provides a transport vehicle comprising:

the device comprises at least two boats, wherein the boats are used for bearing a substrate, one boat is provided with at least one connecting part, and the other boat is provided with at least one connecting matching part matched with the connecting part.

Optionally, the boat comprises two end plates and a plurality of groove bars, two ends of each groove bar are respectively connected with the two end plates, and at least one end plate is provided with the connecting part or the connecting matching part.

Optionally, the opposite sides of at least one of the end plates are respectively provided with the connecting portion and the connecting mating portion.

Optionally, the connecting parts are arranged on two opposite sides of at least one end plate; or (b)

The opposite sides of at least one end plate are provided with the connecting matching parts.

Optionally, the connection portion is provided with a positioning protrusion, the connection matching portion is provided with a clamping groove, and the positioning protrusion is clamped in the clamping groove.

Optionally, the length of the positioning protrusion is greater than that of the clamping groove, a gap a is formed between two adjacent boats, and the value range of the gap a is 5-15 mm.

Optionally, each slot stick is equipped with a row of slot tooth in the inboard, slot teeth on the slot stick all are located same height, every two slot sticks are a set of, every group slot teeth on the slot stick extend towards one side that is close to each other, and two adjacent slot teeth form the notch between, many slot teeth that are located same height on the slot stick form jointly and insert the accommodation space of establishing the base member.

Optionally, a paddle support ear is arranged on the outer side of the grooved bar, and the paddle support ear is used for hanging each boat on a boat paddle.

Optionally, at least one end plate is provided with a gripping portion, each gripping portion includes a fixed end and an extending end, and the gripping portion is used for carrying the boat.

Optionally, the connection part is a link pin, the connection matching part is a bolt hole, and the link pin is inserted in the bolt hole.

The beneficial effects of the utility model are as follows:

the utility model provides a transport carrier which comprises at least two boats, wherein the boats are used for bearing a substrate, a connecting part is arranged on one boat, and a connecting matching part matched with the connecting part is arranged on the adjacent boat, so that the position degree between the two adjacent boats is ensured. When the boat is used, at least two boats are sequentially arranged along the first direction, and the connecting part of the next boat is clamped in the connecting matching part of the previous boat, so that the distances between the adjacent boats are the same, the positioning is accurate, then the boats are directly transported through the boat paddles, the motion flow of transporting carriers is simplified, and an additional positioning mechanism is not needed, so that the transporting efficiency is improved. In addition, through the setting of connecting portion and connection cooperation portion for keep certain clearance between two adjacent boat, air current and thermal radiation can pass the clearance thereby evenly flow in the furnace body, improved the homogeneity of base member coating film.

Drawings

FIG. 1 is a schematic view of a transportation vehicle according to a first embodiment of the present utility model;

FIG. 2 is an enlarged view of a portion of FIG. 1 at A;

FIG. 3 is a schematic view of a boat according to a first embodiment of the present utility model;

FIG. 4 is a partial enlarged view at B in FIG. 3;

FIG. 5 is a schematic view of a boat according to a third embodiment of the present utility model;

FIG. 6 is a side view of a boat provided in a third embodiment of the utility model;

fig. 7 is a schematic view illustrating the structure of a transportation carrier and a boat provided in the third embodiment of the present utility model;

fig. 8 is a partial enlarged view at C in fig. 7.

In the figure:

100. a boat; 110. an end plate; 111. a first tank body; 112. a first protrusion; 113. a gripping part; 114. a second tank body; 115. a second protrusion; 130. a grooved bar; 131. groove teeth; 1311. an accommodating space; 132. a paddle support ear; 200. a paddle; 300. terminal fixture of the carrying boat.

Detailed Description

The utility model is described in further detail below with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the utility model and are not limiting thereof. It should be further noted that, for convenience of description, only some, but not all of the structures related to the present utility model are shown in the drawings.

In the description of the present utility model, unless explicitly stated and limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

In the present utility model, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.

In the description of the present embodiment, the terms "upper", "lower", "left", "right", and the like are orientation or positional relationships based on those shown in the drawings, merely for convenience of description and simplicity of operation, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the utility model. Furthermore, the terms "first," "second," and the like, are used merely for distinguishing between descriptions and not for distinguishing between them.

Example 1

As shown in fig. 1-4, the present embodiment provides a transport carrier, which includes at least two boats 100, wherein the boats 100 are used for carrying substrates, at least one connection portion is provided on one of the boats 100, and at least one connection mating portion mated with the connection portion is provided on the other boat 100, so as to ensure the positional degree between two adjacent boats 100. When the boat 100 needs to be carried, the boat 100 is directly carried through the boat paddle 200, the conventional process of carrying the boat 100 to the boat support is omitted, the boats 100 are arranged on the same straight line by using the positioning mechanism, and the boat support is carried by using the boat paddle 200, in the embodiment, the boats 100 are positioned by mutually matched connecting parts and connecting matching parts, so that the distance between two adjacent boats 100 is accurate, the position between the two adjacent boats 100 is ensured, the action process is simplified, and the carrying efficiency is improved without using an additional positioning mechanism. In addition, through the arrangement of the connecting part and the connecting matching part, a certain gap is maintained between the two adjacent boats 100, and air flow and heat radiation can pass through the gap so as to uniformly flow in the furnace body, thereby improving the uniformity of substrate coating.

Each boat 100 in this embodiment includes two end plates 110 and four slot bars 130, the four slot bars 130 are respectively disposed at four corners of the end plates 110, two ends of each slot bar 130 are respectively connected with the two end plates 110, and at least one end plate 110 is provided with a connection portion or a connection mating portion. Further, a row of slot teeth 131 is disposed on the inner side of each slot bar 130, the slot teeth 131 on each slot bar 130 are located at the same height, each two slot bars 130 are a group, the slot teeth 131 on each group of slot bars 130 extend toward one side close to each other, a notch is formed between two adjacent slot teeth 131, and the notches on the same height on the plurality of slot bars 130 together form a containing space 1311 for inserting a substrate. For example, the substrate may be a silicon wafer or the like.

Specifically, for convenience of explanation, the end plate 110 located above is denoted as a first end plate, the end plate 110 located below is denoted as a second end plate, a containing space 1311 for placing silicon wafers is formed between the first end plate and the second end plate, a connection matching portion is arranged on one of the boats 100, a connection portion is arranged on the adjacent boat 100, and the connection portion is clamped in the connection matching portion, so that the distance between the two adjacent boats 100 is the same, positioning is accurate, and the position degree between the two adjacent boats 100 is ensured.

In some embodiments, the connection portion and the connection mating portion may be provided only on opposite sides of the first end plate, respectively, so that the connection portion on the latter boat 100 may be snapped into the corresponding connection mating portion of the former boat 100. Further, the number of the connecting parts is the same as that of the connecting matching parts, and at least one connecting part and at least one connecting matching part are arranged. For example, the connection portion and the connection mating portion are each provided as one example, but in other embodiments, the connection portion may be provided as two or three, and accordingly, the connection mating portion may be provided as two or three, which is not limited to this embodiment.

Of course, in some embodiments, the connection portion and the connection mating portion may be provided only on opposite sides of the second end plate, so that the connection portion on the next boat 100 may be snapped into the corresponding connection mating portion of the previous boat 100. The number of the connecting parts is the same as that of the connecting matching parts, and at least one connecting part and at least one connecting matching part are arranged.

More preferably, in some embodiments, the connecting portions and the connecting mating portions may be disposed on two opposite sides of the first end plate and two opposite sides of the second end plate, and the connecting portions on the first end plate and the connecting mating portions on the second end plate are disposed on the same side, so that the connecting portions and the connecting mating portions on the first end plate and the second end plate are alternately disposed, so as to further ensure the position degree between the two adjacent boats 100, and the centers of all the boats 100 are located on the same straight line, that is, the accommodating space 1311 where the substrate is placed is also located on the same straight line.

Further, the number of the connecting parts and the connecting matching parts on the first end plate is the same, the number of the connecting parts and the connecting matching parts on the second end plate is the same, and at least one connecting part and at least one connecting matching part on the first end plate and the second end plate are respectively arranged. For example, the first end plate, the second end plate, and the connection mating portion are each provided as one example, but in other embodiments, the connection portion may be provided as two or three, and accordingly, the connection mating portion may be provided as two or three, which is not limited to this embodiment.

As an alternative scheme, foretell connecting portion can set up to the location arch, and connection cooperation portion can set up to the draw-in groove, fixes a position through the location arch and the draw-in groove of mutually supporting, convenient operation, and the location is accurate, and processing is easy, and the cost is lower.

In this description, the five boats 100 are sequentially arranged along the first direction (the first direction is the X-axis direction shown in fig. 1 or 3), and the positioning protrusions and the clamping grooves of the five boats 100 are also arranged along the first direction, and the positioning protrusions of the next boat 100 are clamped in the clamping grooves of the previous boat 100, so that the five boats 100 in this embodiment are all arranged along the first direction and are located on the same straight line.

Each boat 100 includes a first end plate, a second end plate, and four grooved bars 130, the grooved bars 130 are arranged in two groups, each group of grooved bars 130 includes two grooved bars 130 arranged along a first direction, two grooved bars 130 in each group are arranged along a second direction (the second direction is a Y-axis direction shown in fig. 1 or 3), two ends of all grooved bars 130 are respectively connected with the first end plate and the second end plate, a row of grooved teeth 131 are arranged on the inner side of each grooved bar 130, the grooved teeth 131 are arranged along a third direction (the third direction is a Z-axis direction shown in fig. 1 or 3), the grooved teeth 131 on two grooved bars 130 in each group extend towards one side close to each other, the grooved teeth 131 on two groups of grooved bars 130 are all located at the same height, so that a notch is formed between two adjacent grooved teeth 131, the notches on the four grooved bars 130 at the same height form a containing space 1311 jointly, that is, in other containing spaces are all arranged in each boat 100, and the silicon wafers can be placed on the boat 1311 in the third direction.

Further, the clamping groove comprises a first groove body 111 and a second groove body 114, the positioning protrusion comprises a first protrusion 112 and a second protrusion 115, the first groove body 111 and the first protrusion 112 are respectively arranged on two opposite sides of the first end plate, and the first protrusion 112 of the next boat 100 is clamped in the first groove body 111 of the previous boat 100. The second groove 114 and the second protrusion 115 are respectively disposed on two opposite sides of the second end plate, and the second groove 114 on the second end plate and the first protrusion 112 on the first end plate are disposed on the same side, and the second protrusion 115 of the previous boat 100 is clamped in the second groove 114 of the next boat 100. For convenience of description, the first boat 100 is denoted as a first boat, and the second boat 100 adjacent to the first boat is denoted as a second boat, that is, the first protrusion 112 on the first end plate of the second boat is clamped in the first groove 111 of the first end plate of the first boat, and the second protrusion 115 on the second end plate of the first boat is clamped in the second groove 114 on the second end plate of the second boat, thereby improving the stability of fixing between the two adjacent boats 100.

Further, the length of the positioning protrusion is greater than that of the clamping groove, so that a gap a is formed between two adjacent boats 100, air flow and heat radiation can uniformly flow in the furnace body through the gap a, and uniformity of film coating is improved. Preferably, the gap a has a value in the range of 5mm to 15mm. For example, the gap a may be set to 5mm, 8mm, 10mm, 12mm, 15mm, or the like, and will not be described in detail herein.

Continuing with the first boat and the second boat as examples, the length of the first projection 112 on the second boat is greater than the length of the first groove 111 on the first boat, thereby forming a gap a, preferably 10mm, between the first end plate of the first boat and the first end plate of the second boat, and the length of the second projection 115 on the first boat is greater than the length of the second groove 114 on the second boat, thereby forming a gap a, preferably 10mm, between the second end plate of the first boat and the second end plate of the second boat. Thereby forming a gap a, preferably 10mm, between the first end plate of the first boat and the first end plate of the second boat. Because the silicon wafer is brittle, fragments are easily caused when collision occurs, and the arrangement of the gap a can keep the silicon wafers on the adjacent first boat and second boat at a certain distance, so that the silicon wafers are not easy to collide with each other, and the yield of the silicon wafers is ensured. In addition, when the transportation carrier is placed into the furnace body for heating reaction, through the arrangement of the gap a, air flow can flow between the first boat and the second boat more smoothly, and further evenly spread to the surfaces of the silicon wafers placed on the first boat and the second boat, heat transfer in a thermal field of the furnace body is more uniform, a film coating process of the silicon wafers is facilitated, the thickness of a boron/phosphorus diffusion layer on the surfaces of the silicon wafers is more uniform, and the sheet resistance of a finished product can be in an optimal value range.

With continued reference to fig. 3 and 4, the cross section of the slot teeth 131 on the slot bar 130 in this embodiment is triangular, and the bottom wall of the slot is disposed along a first direction so that wafers may be inserted from one side of the boat 100 in the first direction when placed.

Further, in order to facilitate transportation of the boat 200, a paddle support 132 is provided on the outer side of each groove bar 130, the paddle support 132 may be fixed on the groove bar 130 by welding, and the arrangement of the paddle support 132 facilitates transportation of the boat 100 by workers. More preferably, compared with the technical scheme that only one boat ear is provided in the prior art, in this embodiment, the paddle support ears 132 are respectively arranged on two sides of each boat 100 of the transport carrier, and the paddle support ears 132 on two sides are respectively contacted with the supporting parts on two sides of the boat paddle 200, so that the boat paddle 200 can better support the boat 100, the boat 100 can be placed more stably, each boat 100 is stably suspended on the boat paddle 200, and the boat 100 is not easy to collide with the silicon wafer or the boat 100 in the process of carrying and moving.

More preferably, in this embodiment, the paddle support 132 is a round bar with a circular cross-section. Of course, the position of the boat 200 corresponding to the paddle support 132 may be provided with a limit groove, which is semi-arc, so that the peripheral side wall of the paddle support 132 can be attached to the boat 100 more stably, and the problem that the paddle support 132 is easy to collapse is solved.

Example two

The present embodiment provides a transport carrier, which is different from the transport carrier in the first embodiment in that: for convenience of explanation, three boats 100 are taken as examples, and are respectively denoted as a first boat, a second boat and a third boat, wherein the first boat and the third boat have the same structure, and the second boat and the first boat and the third boat have different structures.

Specifically, in some embodiments, the opposite sides of the first end plate of the first boat are provided with connection portions, and the opposite sides of the first end plate of the second boat are provided with connection mating portions, so that the connection portion of the first boat can be clamped on the connection mating portion on one side of the second boat, and the connection portion of the third boat can be clamped on the connection mating portion on the other side of the second boat. Similarly, a greater number of boats 100 may be provided, with the same configuration of boats 100 being spaced apart.

Of course, the opposite sides of the second end plate of the first boat may also be provided with connection portions, and the opposite sides of the second end plate of the second boat may be provided with connection mating portions, so that the connection portion of the first boat may be clamped on the connection mating portion of one side of the second boat, and the connection portion of the third boat may be clamped on the connection mating portion of the other side of the second boat.

More preferably, in some embodiments, the connecting portions may be disposed on two opposite sides of the first end plate of the first boat, the connecting engaging portions are disposed on two opposite sides of the second end plate of the first boat, the connecting engaging portions are disposed on two opposite sides of the first end plate of the second boat, the connecting portions are disposed on two opposite sides of the second end plate of the second boat, and the structure of the third boat is the same as that of the first boat, so that the connecting portions of the first boat, the second boat and the third boat and the connecting engaging portions can be clamped with each other, and the first boat, the second boat and the third boat are sequentially connected. Similarly, a greater number of boats 100 may be provided, with the same configuration of boats 100 being spaced apart.

Of course, at least one connecting portion or one connecting mating portion is provided on the same side of the end plate 110 of the boat 100, so long as the same number of connecting portions and connecting mating portions on two adjacent end plates 110 are ensured.

The rest of the structures in this embodiment are the same as those in the first embodiment, and will not be described here again.

Example III

In this embodiment, as shown in fig. 5-8, the transport carrier includes at least two boats 100, for example, twelve boats 100 are illustrated here, when in use, twelve boats 100 are sequentially arranged along a first direction (the first direction is the X-axis direction shown in fig. 7), and positioning protrusions and clamping grooves of twelve boats 100 are also arranged along the first direction, and positioning protrusions of a next boat 100 are clamped in clamping grooves of a previous boat 100, so that a plurality of boats 100 are arranged along the first direction and positioned on the same straight line, when in need of being carried, the boats 100 can be carried together by the paddles 200, so that the conventional process of carrying the boats 100 to a boat holder is omitted, each boat 100 is arranged on one straight line by using the positioning mechanism, and then the boat holder is carried by the paddles 200.

In addition, compared with the boat 100 of the first embodiment, in this embodiment, the first groove 111 and the first protrusion 112 are provided only on two opposite sides of the first end plate, and the first protrusion 112 of the next boat 100 is engaged in the first groove 111 of the previous boat 100. The second end plate is relieved of the provision of the second channel 114 and the second projection 115.

Further, a gripping portion 113 is provided on the first end plate of each boat 100 in the present embodiment, and the gripping portion 113 is used for carrying the boat 100. Illustratively, in some embodiments, the gripping portion 113 may be provided as two gripping ears, each of which includes a fixed end and an extending end, the fixed end is connected with the first end plate, the extending end is connected with the fixed end, the extending ends of the two gripping ears are provided in a direction in which the extending ends of the two gripping ears approach each other in an L-shape. When the boat 100 needs to be carried, the boat-carrying end jig 300 can be inserted between the two grabbing ears to grab the boat 100, so that the boat-carrying end jig 300 can conveniently carry the boat 100, and the carrying efficiency is improved.

Of course, in some embodiments, the gripping portion 113 may also be configured as a gripping ear, where the gripping ear includes a fixed end and two extending ends, one end of the fixed end is connected to the first end board, the other end is connected to the two extending ends, the two extending ends extend in opposite directions, and a T-shape is disposed between the fixed end and the two extending ends. When the boat 100 needs to be carried, the boat end jig 300 can clamp the two extending ends of the gripping lugs so as to grip the boat 100, thereby carrying the boat 100 and improving the carrying efficiency.

The rest of the structures in this embodiment are the same as those in the first embodiment, and will not be described here again.

Example IV

The present embodiment provides a transport carrier, which is different from the transport carrier in the first embodiment in that: the connecting part on the boat 100 in the transport carrier is provided with a linking pin, the connecting matching part is provided with a bolt hole, and when two adjacent boats 100 need to be matched, the linking pin on the next boat 100 can be inserted into the corresponding bolt hole on the previous boat 100, so that the connection between the two adjacent boats 100 is completed. Further, the number of the linking pins and the connecting parts on the adjacent two boats 100 is the same as that of the pin holes, and the linking pins and the connecting parts are in one-to-one correspondence with the pin holes.

For example, the link pin and the bolt hole are each provided as one example, but in other embodiments, the link pin may be provided as two or three, and the bolt hole may be provided as two or three accordingly, which is not limited in this embodiment.

The rest of the structures in this embodiment are the same as those in the first embodiment, and will not be described here again.

It is to be understood that the above examples of the present utility model are provided for clarity of illustration only and are not limiting of the embodiments of the present utility model. Various obvious changes, rearrangements and substitutions can be made by those skilled in the art without departing from the scope of the utility model. It is not necessary here nor is it exhaustive of all embodiments. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the utility model are desired to be protected by the following claims.

Claims (10)

1. A transportation vehicle, comprising:

at least two boats (100), wherein the boats (100) are used for bearing substrates, one boat (100) is provided with at least one connecting part, and the other boat (100) is provided with at least one connecting matching part matched with the connecting part.

2. The transport vehicle according to claim 1, characterized in that the boat (100) comprises two end plates (110) and a plurality of channel bars (130), each channel bar (130) being connected at both ends to two of the end plates (110), at least one end plate (110) being provided with the connection or the connection mating portion.

3. A transportation vehicle according to claim 2, characterized in that at least one of the end plates (110) is provided with the connection portion and the connection mating portion, respectively, on opposite sides.

4. The transport vehicle according to claim 2, characterized in that at least one of the end plates (110) is provided with the connection on opposite sides; or (b)

The connecting fitting parts are arranged on two opposite sides of at least one end plate (110).

5. The transport vehicle according to any of claims 1-4, wherein the connection part is provided as a positioning protrusion and the connection mating part is provided as a clamping groove, the positioning protrusion being clamped in the clamping groove.

6. The transport vehicle according to claim 5, wherein the length of the positioning protrusion is greater than the length of the clamping groove, a gap a is formed between two adjacent boats (100), and the value of the gap a ranges from 5mm to 15mm.

7. The transport vehicle according to any one of claims 2-4, characterized in that a row of groove teeth (131) is provided on the inner side of each groove bar (130), the groove teeth (131) on the groove bars (130) are all located at the same height, every two groove bars (130) are a group, the groove teeth (131) on each group of groove bars (130) extend towards one side close to each other, a notch is formed between two adjacent groove teeth (131), and the notches on the same height on the groove bars (130) jointly form a containing space (1311) for inserting the substrate.

8. The transport vehicle according to any of claims 2-4, characterized in that the outside of the channel bars (130) is provided with paddle holders (132), the paddle holders (132) being used to suspend each boat (100) from a boat paddle (200).

9. A transport vehicle according to any of claims 2-4, characterized in that at least one of the end plates (110) is provided with a gripping portion (113), which gripping portion (113) is used for carrying the boat (100).

10. The transport vehicle of any of claims 1-4, wherein the connection portion is a link pin, the connection mating portion is a latch hole, and the link pin is inserted into the latch hole.