CN216563042U

CN216563042U - Quartz boat

Info

Publication number: CN216563042U
Application number: CN202122795835.9U
Authority: CN
Inventors: 余仲; 杨宝立; 林金雨
Original assignee: Shenzhen Headquarter SC New Energy Technology Corp
Current assignee: Shenzhen Headquarter SC New Energy Technology Corp
Priority date: 2021-11-15
Filing date: 2021-11-15
Publication date: 2022-05-17
Anticipated expiration: 2031-11-15

Abstract

The utility model provides a quartz boat which comprises end plates, fixing parts, supporting parts, reinforcing parts and handheld parts, wherein the supporting parts and the fixing parts form two rows of accommodating spaces, so that the loading quantity of the quartz boat to silicon wafers can be increased; the loading weight of the quartz boat can be increased due to the reinforcing effect of the reinforcing part; due to the structural design of each part, the preparation process of the quartz boat can be simplified.

Description

Quartz boat

Technical Field

The utility model belongs to the technical field of solar cell preparation, and particularly relates to a quartz boat.

Background

Quartz glass products are widely used in the microelectronics industry for integrated circuit chip fabrication due to their excellent physicochemical properties, with more widely used instruments including quartz boats. In the preparation process of the silicon wafer solar cell, a quartz boat is a tool for loading and transferring the silicon wafer, and specifically, the silicon wafer is vertically and densely arranged in a clamping groove of the quartz boat, so that the silicon wafer is subjected to process operation in a reaction chamber; the main applications are as follows: loading silicon wafers in the diffusion and annealing processes of the solar cell, so that the silicon wafers are not contacted with each other, and simultaneously reducing the splitting rate; in addition, quartz boats are also used for the transfer between the respective steps.

The size of the traditional quartz boat is fixed, and only silicon wafers (whole silicon wafers) with specific sizes can be loaded, with the continuous development of the photovoltaic industry, the requirements of increasing the power generation amount of silicon wafer batteries and reducing the internal power loss are continuously improved, half batteries appear, the current of the half batteries is only half of the original current, and therefore the power loss is low. The original quartz boat is not suitable for the production process of the existing half-sheet battery; in addition, because the traditional quartz boat has limited strength, when the quantity of silicon wafers loaded on the traditional quartz boat is high, the quartz boat is easy to deform and crack, and further huge economic loss is brought; most importantly, the existing quartz boat has a structure, so that the preparation process is complicated.

SUMMERY OF THE UTILITY MODEL

The present invention is directed to solving at least one of the problems of the prior art. Therefore, the utility model provides a quartz boat.

The present invention provides in a first aspect a quartz boat comprising:

the end plates comprise a first end plate and a second end plate which are arranged in parallel;

the fixing part is vertically connected with the first end plate and the second end plate; comprises a spacer bar and fixed bars arranged at two sides of the spacer bar;

a support portion vertically connecting the first end plate and the second end plate; comprises at least two parallel supporting rods; the fixed part is positioned on the same side of the plane on which the supporting rod is positioned;

the fixing part and the supporting part are provided with limit grooves;

a reinforcement portion including a separator; the partition plate is arranged between the first end plate and the second end plate, and the supporting part and the reinforcing part are vertical to each other and penetrate through the partition plate; the baffle is integrated into one piece.

The quartz boat according to the embodiment of the utility model has at least the following technical effects:

(1) in the quartz boat provided by the utility model, the holding space of the two silicon wafers can be formed between the supporting part and the fixing part, so that two rows of silicon wafers can be held, and the production efficiency of the silicon wafer solar cell can be improved.

(2) The quartz boat provided by the utility model comprises the reinforcing part, and the specific arrangement of the partition plate avoids the breakage of the support rod caused by overlong quartz boat and excessive loading capacity.

(3) In the quartz boat provided by the utility model, the partition plate is an integral body instead of a welding rod for connecting the fixing part and the supporting part, so that the strength (without welding spots) of the quartz boat is further improved, and the integral partition plate can play a role in fixing and positioning (the supporting part and the fixing part) in the preparation process of the quartz boat.

(4) In the quartz boat provided by the utility model, the isolating rods and the fixing rods in the fixing part, the supporting rods in the supporting part and even the reinforcing rods in the reinforcing part are arranged by penetrating through the partition plate instead of being welded at the partition plate, so that the strength reduction caused by excessive welding points is avoided.

According to some embodiments of the utility model, the spacer rod, the fixing rod and the support rod are provided with a spacing groove.

The limiting grooves are arranged at equal intervals, so that the position of the silicon wafer can be limited, the accurate position of the silicon wafer is guaranteed, and the silicon wafer cannot shift, so that the process operation can be smoothly carried out.

According to some embodiments of the present invention, the distance between the spacer bar and the two fixing bars may be equal or unequal, and may be specifically adjusted according to the size of the silicon wafer to be accommodated.

According to some embodiments of the present invention, the distance between the two fixing rods and the plane formed by the supporting rod may be equal or unequal, that is, the height of the fixing rod may be adjusted according to the size of the silicon wafer to be accommodated.

According to some embodiments of the utility model, the spacer and fixation rods are at least one of circular, polygonal and rounded polygonal in cross-section.

According to some preferred embodiments of the present invention, the spacer bar and the fixing bar have a polygonal cross-section.

According to some preferred embodiments of the present invention, the cross-section of the spacer bar and the fixing bar is a diamond shape.

According to some embodiments of the utility model, the number of support rods is ≧ 4.

According to some embodiments of the utility model, the support rod has a cross-section that is at least one of circular, polygonal, and rounded polygonal.

According to some embodiments of the utility model, the support rod is circular in cross-section.

According to some embodiments of the present invention, the first end plate is provided with a boat foot a, the second end plate is provided with a boat foot B, and the partition plate is provided with a boat foot C.

According to some embodiments of the utility model, the lowest points of the boat feet A-C are located on the same plane, and play a role in supporting the quartz boat.

According to some embodiments of the utility model, the number of baffles is greater than or equal to 2.

According to some embodiments of the utility model, the partition is provided with holes.

According to some embodiments of the utility model, the holes in the partition may be of any shape.

According to some embodiments of the utility model, the number of holes in the partition is greater than or equal to 2.

The holes reserved in the partition plate can ensure that the airflow is not blocked, the atmosphere is stable and the heating is uniform in the treatment process of the silicon wafer.

According to some embodiments of the utility model, the reinforcement further comprises a reinforcement bar connecting the first end plate, the second end plate and the separator plate perpendicularly.

According to some embodiments of the utility model, the reinforcing rods have a cross-section that is at least one of circular, polygonal, and rounded polygonal.

According to some preferred embodiments of the utility model, the reinforcing rods are circular in cross-section.

The reinforcing rod further promotes the structural stability of whole quartz boat, has restrained its deformation under the bearing effect.

According to some embodiments of the utility model, the reinforcement further comprises a bearing block provided on an inner side surface of the end plate and supporting the support portion.

The bearing block plays a supporting role in the supporting rod, sample damage caused by falling of welding spots between the supporting rod and the end plate is avoided, and the yield of the silicon wafer solar cell in the preparation process is improved.

According to some embodiments of the utility model, in the top view of the quartz boat, two support rods are respectively arranged in two intervals formed by the isolation rods and the fixed rods; the two support rods, the isolation rod and the fixing rod form a containing space of the silicon wafer; the quartz boat is provided with at least two rows of accommodating spaces for silicon wafers.

According to some embodiments of the utility model, the outer side of the end plate is provided with a hand grip.

According to some embodiments of the utility model, the handle extends through the end plate and forms a fixed connection with the bearing block.

The hand-held part provides a bearing point for carrying during the transfer process of the quartz boat.

When handheld portion with during bearing block fixed connection, in the preparation process of quartz boat, can adopt integrated into one piece's quartz piece to pass the end plate, and then form respectively in the end plate both sides bearing block and handheld portion can simplify like this on the one hand the preparation process of quartz boat, the monoblock quartz piece of on the other hand compare in welded connection's bearing block, and intensity is higher, has further promoted the intensity of quartz boat.

According to some embodiments of the utility model, the reinforcement further comprises a reinforcing bar vertically connecting the fixing bar and the reinforcing bar.

The reinforcing ribs can further limit the quartz boat to avoid bearing deformation of the quartz boat.

According to some embodiments of the utility model, the reinforcing bar is juxtaposed with an adjacent one of the support bars.

When the reinforcing rods and the supporting rods are arranged in parallel, the reinforcing rods and the supporting rods can be welded and then connected with the end plates and the partition plates in the preparation process of the quartz boat, the cross sections of the parts welded by the reinforcing rods and the supporting rods are dumbbell-shaped and serve as the reinforcing rods and the supporting rods, and the preparation process of the quartz boat is further simplified.

According to some embodiments of the utility model, the retaining bar is removably connected to the end plate and the spacer plate.

The detachable connection can adjust the size of the silicon wafer accommodating position formed among the fixed rod, the isolation rod and the support rod according to needs, so that the quartz boat is suitable for the preparation process of silicon wafers with more sizes, and the application field of the quartz boat is widened.

According to some embodiments of the utility model, the end plate is provided with end plate rail grooves matching the fixing bars; and the partition plate is provided with a partition plate rail groove matched with the fixing rod.

The rail groove is in a sawtooth shape, and the position of the fixing rod can be adjusted according to the requirement in the production process.

Drawings

FIG. 1 is a schematic view of a quartz boat according to an embodiment of the present invention;

FIG. 2 is a view taken from the A-A direction of the quartz boat shown in FIG. 1;

FIG. 3 is a schematic diagram of the relative positions of the retaining rods and the spacer rods of the quartz boat shown in FIG. 1;

FIG. 4 is a schematic diagram of the structure of the partition plate of the quartz boat shown in FIG. 1;

FIG. 5 is a schematic view of the quartz boat of FIG. 1 after silicon wafers have been transferred;

FIG. 6 is a view of a second quartz boat according to an embodiment of the present invention from the A-A direction;

FIG. 7 is a view from direction A-A of a third quartz boat in accordance with an embodiment of the present invention;

FIG. 8 is a view from the A-A direction of a fourth quartz boat in accordance with an embodiment of the present invention;

reference numerals:

110. a first end plate; 111. a boat foot A; 120. a second end plate; 121. a boat foot B;

210. a fixing rod; 220. a spacer bar;

310. a support rod;

410. a partition plate; 411. an aperture; 412 boat legs C; 420. a reinforcing rod; 430. a bearing block; 440. reinforcing ribs;

500. a hand-held portion;

610. end plate rail grooves;

700. and (3) a silicon wafer.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.

In the description of the present invention, if there are first, second, third, etc. described only for the purpose of distinguishing technical features, it is not to be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.

In the description of the present invention, it should be understood that the orientation or positional relationship referred to in the description of the orientation, such as the upper, lower, left, right, etc., is based on the orientation or positional relationship shown in the drawings, and is only for convenience of description and simplicity of description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.

In the description of the present invention, it should be noted that unless otherwise explicitly defined, terms such as arrangement, installation, connection and the like should be broadly understood, and those skilled in the art can reasonably determine the specific meanings of the above terms in the present invention in combination with the specific contents of the technical solutions.

Unless otherwise specified, all the members mentioned in the description of the embodiments are quartz members.

A quartz boat according to a first aspect of an embodiment of the present invention is described with reference to FIGS. 1 to 5.

A quartz boat comprises end plates, a fixing part, a supporting part, a reinforcing part and a handheld part 500; FIG. 1 is a schematic structural view of the quartz boat in the present embodiment, and FIG. 2 is a view of the quartz boat A-A shown in FIG. 1, particularly showing the projection of the fixing portion, the supporting portion and a portion of the reinforcing portion on the first end plate 110;

the end plates include a first end plate 110 and a second end plate 120 arranged in parallel; the first end plate 110 is provided with a boat foot A111 (not shown, showing the part of the first end plate 110 contacting with the ground); the second end plate 120 is provided with a boat foot B121; the end plate plays a role in supporting the whole quartz boat;

the fixing part vertically connects the first end plate 110 and the second end plate 120; consists of a spacer bar 220 and fixing bars 210 symmetrically arranged at two sides of the spacer bar 220; as shown in the schematic diagram of the relative position of the top view of fig. 3, the cross-sectional shapes of the isolation rods 220 and the fixed rods 210 are rhombus, and the isolation rods 220 and the fixed rods 210 are both provided with grooves matching the thickness of the silicon wafer 700; the fixing part is used for fixing the silicon wafer 700 placed therein so as to prevent the silicon wafer from moving greatly; the distance between the spacer bars 220 and the fixed bars 210 should match the width of the silicon wafer 700;

the support portion vertically connects the first end plate 110 and the second end plate 120; the silicon wafer support structure comprises four support rods 310 arranged in parallel (in production, the number of the support rods 310 can be increased according to the weight of the silicon wafer 700 to be borne, and at least two support rods are required); the supporting rod 310 is arranged below the fixing part in parallel; the cross section of the supporting rod is circular, and one side facing the fixing part is provided with a limiting groove (the shape of the groove is the same as that of the groove arranged on the fixing part in fig. 3); the isolating rod 220, the fixing rod 210 and the two support rods 310 form an accommodating space of the silicon wafer 700;

the reinforcing part consists of a clapboard 410, a reinforcing rod 420, a bearing block 430 and a reinforcing rib 440; the two partition plates 410 are arranged at equal intervals and are arranged between the second end plate 120 and the first end plate 110 in parallel, and the fixing part and the supporting part both penetrate through the partition plates 410; the baffle plate is provided with a hole 411 for gas flowing and a boat foot C412 for supporting; and a through hole for other components to pass through, the specific structure is shown in fig. 4; the reinforcing rods 420 vertically connect the first end plate 110 and the second end plate 120; the cross section is circular, and the fixing rod 210 is arranged right below the supporting rod 310; wherein the fixing rod 210 and the reinforcing rod 420 are vertically connected through the reinforcing rib 440; the bearing block 430 is arranged on the inner side surface of the end plate and supports the end plate; the supporting part is used for improving the strength of the quartz boat and ensuring that the problems of cracking, deformation and the like do not occur on the premise of improving the loading capacity;

the hand-held part 500 is arranged on the outer side of the end plate and is used as a force bearing point (shown in a dotted line part in fig. 2) in the quartz boat transferring process.

When the quartz boat of this embodiment is loaded with silicon wafers 700, the schematic diagram is shown in fig. 5, the quartz boat of this embodiment can increase the loading capacity of the silicon wafers 700 due to the reinforcement of the reinforcement part, and the preparation process of the quartz boat is simplified due to the integral partition plate.

As a second embodiment of the present invention, referring to fig. 6 (the view angle is the same as fig. 2), the difference between the quartz boat shown in fig. 1 and the quartz boat is:

the two handholds 500 respectively penetrate through the first end plate 110 and the second end plate 120 and are fixedly connected with the bearing block 430, so that the handholds 500 and the bearing block 430 are integrally formed in the preparation process of the quartz boat, and the structure is firmer; as seen in fig. 6, the projections of the handle 500 and the bearing block 430 on the first end plate 110 are exactly coincident.

Referring to fig. 7 (the view angle is the same as that of fig. 2), the third embodiment of the present invention specifically differs from the quartz boat shown in fig. 6 in that:

reinforcing bar 420 translates to a position tangential to support bar 310 while reinforcing bar 440 still holds bar 210 and reinforcing bar 420 vertically at the same time; thus, in the preparation process of the quartz boat, the reinforcing rod 420 and one adjacent supporting rod 310 can be welded to form a part with a dumbbell-shaped section, and then the part is assembled with other parts, so that the preparation process of the quartz boat is simplified.

Referring to fig. 8 (the view angle is the same as that of fig. 2), the fourth embodiment of the present invention specifically differs from the quartz boat shown in fig. 6 in that:

in the quartz boat shown in FIG. 8, the fixing rods 210 are detachably connected with the end plate and the partition plate 410; and the reinforcing ribs 440 are omitted;

the detachable connection is realized in a way that a serrated end plate rail groove 610 is formed in the end plate, and a partition plate rail groove with the same shape as the end plate rail groove 610 is formed in the partition plate 410; due to the fixing effect of the spacer rods 220, the supporting parts and the reinforcing rods 420 on the quartz boat, the quartz boat is not deformed during the process of moving the fixing rods 210.

By adjusting the structure of the existing quartz boat, the utility model improves the loading capacity of the quartz boat to the silicon wafers 700, improves the strength of the quartz boat and widens the adaptability of the same quartz boat to the silicon wafers 700 with different sizes.

The embodiments of the present invention have been described in detail with reference to the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge of those skilled in the art without departing from the gist of the present invention.

Claims

1. A quartz boat, comprising:

end plates comprising a first end plate (110) and a second end plate (120) arranged in parallel;

the fixing part is vertically connected with the first end plate (110) and the second end plate (120), and comprises an isolating rod (220) and fixing rods (210) arranged on two sides of the isolating rod (220);

a support portion vertically connecting the first end plate (110) and the second end plate (120), the support portion comprising at least two support rods (310) arranged in parallel; the fixed parts are positioned on the same side of the plane of the support rod (310);

a reinforcement comprising a separator (410); the partition plate (410) is arranged between the first end plate (110) and the second end plate (120), and the supporting part and the reinforcing part are vertical to each other and penetrate through the partition plate (410); the baffle (410) is integrally formed.

2. The quartz boat of claim 1, wherein the spacer rods (220), the retaining rods (210) and the support rods (310) are provided with retaining grooves.

3. The quartz boat of claim 1, wherein the first end plate (110) has a boat foot a (111), the second end plate (120) has a boat foot B (121), and the partition plate (410) has a boat foot C (412).

4. The quartz boat of claim 1, wherein the stiffeners further comprise stiffening rods (420), the stiffening rods (420) vertically connecting the first end plate (110), the second end plate (120), and the spacer plates (410).

5. The quartz boat of claim 1, wherein the reinforcing portion further comprises a bearing block (430), the bearing block (430) being disposed on an inner surface of the end plate and supporting the supporting portion.

6. The quartz boat of claim 5, wherein the end plates are provided with a hand grip (500) on the outside.

7. The quartz boat of claim 6, wherein the handle (500) extends through the end plate to form a fixed connection with the bearing block (430).

8. The quartz boat of claim 4, wherein the stiffener is further provided with a stiffener (440), the stiffener (440) vertically connecting the securing bar (210) and the stiffener bar (420).

9. The quartz boat of any of claims 1 to 8, wherein the retaining bars (210) are removably attached to the end plates and the spacer plates (410).

10. The quartz boat of claim 9, wherein the end plates are provided with end plate rail slots (610) matching the retaining bars (210); and a partition plate rail groove matched with the fixing rod (210) is arranged on the partition plate (410).