CN219850498U

CN219850498U - Efficient spin-coating waste liquid collecting cup

Info

Publication number: CN219850498U
Application number: CN202320907364.2U
Authority: CN
Inventors: 全金花
Original assignee: WUXI YAMAI MICROELECTRONICS CO Ltd
Current assignee: WUXI YAMAI MICROELECTRONICS CO Ltd
Priority date: 2023-04-21
Filing date: 2023-04-21
Publication date: 2023-10-20
Anticipated expiration: 2033-04-21

Abstract

The utility model discloses a high-efficiency spin-coating waste liquid collecting cup, which belongs to the technical field of semiconductor wafer processing and comprises a spin-coating machine, wherein the top end of the spin-coating machine is fixedly connected with a driving shaft, and the bottom end of the driving shaft is in transmission connection with a driver arranged in the spin-coating machine. This efficient spin coating waste liquid collecting cup through setting up collecting cup and second flexible pipe, at spin coating's in-process, the inside extraction equipment of spin coater then can move to through sliding sleeve, collecting cup, the inside photoresist and the developer of flexible pipe extraction collecting pipe of first flexible pipe and second, thereby in extracting collecting cup with photoresist and the developer of collecting, make this collecting cup can collect the photoresist and the developer of drip in real time at the in-process of using, avoid influencing the use of this collecting cup because of photoresist and developer adhere inside the chassis for a long time, can collect photoresist and developer and reuse simultaneously, thereby ensured the environmental protection effect of this collecting cup.

Description

Efficient spin-coating waste liquid collecting cup

Technical Field

The utility model belongs to the technical field of semiconductor wafer processing, and particularly relates to a high-efficiency spin-coating waste liquid collecting cup.

Background

Wafer refers to a silicon wafer used in the manufacture of silicon semiconductor circuits, which is the basic material for manufacturing chips. Along with the development of wafer manufacturing technology in the semiconductor industry, the circuit structure of a chip tends to be complex, the processing difficulty of the chip is gradually increased, in the spin coating process of a wafer, the wafer is placed on a bearing seat to rotate, photoresist and developing solution inevitably splashes onto the surface of an upper spin coating waste liquid collecting cup, most of the spin coating processes at present usually wait for cleaning the inner machine core of equipment after the spin coating of the wafer is finished, so that the condition that the photoresist and the developing solution are easily solidified due to long-time adhesion is caused, the long-term use of the equipment is easily affected, the photoresist and the developing solution are difficult to be recycled for the second time, a large amount of resources are lost, and the cost for processing the wafer is increased.

Disclosure of Invention

In order to overcome the defects, the utility model provides the efficient spin-coating waste liquid collecting cup, and solves the problems that most of spin-coating processes at present usually clean the inner machine core of the equipment after the spin-coating of the wafer is finished, so that the situation that photoresist and developing solution are easily solidified due to long-time adhesion is easy to influence the long-term use of the equipment, the photoresist and the developing solution are difficult to recycle for the second time, a large amount of resources are lost, and the cost for processing the wafer is increased.

In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides an efficient spin coating waste liquid collecting cup, includes spin coater, spin coater's top fixedly connected with drive shaft, the bottom of drive shaft is connected with the inside driver transmission that sets up of spin coater, the outer fixedly connected with chassis of drive shaft, the collecting pipe has been cup jointed outward to the chassis, the collecting pipe is the arc, a plurality of through-hole has been seted up to the inner wall of chassis, the chassis is linked together with the collecting pipe through the through-hole, the outer fixedly connected with of collecting pipe is first flexible pipe, the other end and the return bend of first flexible pipe are linked together, the other end and the top of elastic component of return bend are linked together, the other end and the sealed lid of elastic component are linked together.

As a further aspect of the utility model: the sealing cover is clamped on the collecting cup, the collecting cup is clamped in the fixing assembly, one side of the fixing assembly is fixedly connected with the sliding plate, the sliding plate is slidably connected in the sliding sleeve, a plurality of second springs are arranged in the sliding sleeve, two ends of each second spring are fixedly connected with one side of the inner wall of the sliding sleeve and one side of the sliding plate respectively, and the collecting cup is communicated with extraction equipment arranged in the spin coater through the fixing assembly.

As a further aspect of the utility model: the elastic component includes the flexible pipe of second, flexible pipe has cup jointed first spring outward, the top and the bottom of flexible pipe of second and first spring respectively with the top fixed connection of the bottom of return bend and sealed lid.

As a further aspect of the utility model: the fixed subassembly includes the fixed shell, fixed shell fixed connection is on the fixed chassis, the collection cup joint is in the fixed shell, one side of fixed chassis and the one side fixed connection that the slide corresponds, the slide is linked together through the extraction equipment that sets up in sliding sleeve and the spin coating machine.

As a further aspect of the utility model: the outer fixedly connected with first drive wheel of drive shaft, first drive wheel passes through the drive belt and is connected with the transmission of second drive wheel, the below fixedly connected with pivot of second drive wheel, the pivot has cup jointed the bearing outward, the outer fixedly connected with stiffening rod of bearing, one side fixedly connected with that the stiffening rod corresponds with the spin coater.

As a further aspect of the utility model: the lower part fixedly connected with support frame of stiffening rod, the opposite side fixed connection of support frame is outside the spin coater, the bottom fixedly connected with cam of pivot, be provided with the pulley outward the cam, the cam passes through the mutual overlap joint of pulley and second flexible pipe.

Compared with the prior art, the utility model has the beneficial effects that:

this efficient spin coating waste liquid collecting cup, through setting up collecting cup, first flexible pipe and second flexible pipe, at the in-process of spin coating, because centrifugal force when rotatory, make partial photoresist and developer adhere at the chassis inner wall along with the rotation of chassis easily, the inside extraction equipment of spin coater then can move, thereby through sliding sleeve, collecting cup, the photoresist and the developer in the flexible pipe extraction collecting pipe of first flexible pipe and second, thereby with the photoresist and the developer extraction of collecting in the collecting cup, make this collecting cup collect the photoresist and the developer of drip in real time in the in-process of using, avoid influencing the use of this collecting cup because of photoresist and developer adhere inside the chassis for a long time, can collect photoresist and developer simultaneously and reuse, thereby the environmental protection effect of this collecting cup has been ensured.

This efficient spin coating waste liquid collecting cup, through setting up first spring, second spring and cam, when the drive shaft drives the chassis rotation, the drive shaft then can drive the rotation of second drive wheel through first drive wheel, make the pivot rotate along with the rotation of drive shaft synchronous, make the cam can be along with the rotation of pivot and constantly with the flexible pipe contact of second and promote the flexible pipe of second, can outwards remove when first flexible pipe and slide are pushed by the cam, and when the cam breaks away from the flexible pipe of second, first flexible pipe and slide are then pulled to first spring and slide make it reset, so reciprocating, make first flexible pipe and slide be in the state of high frequency removal, make this collecting cup can avoid photoresist and developer to adhere in the inside of collecting cup through the mode of high frequency vibrations in the in-process of photoresist and developer, and can avoid photoresist and developer to adhere in other pipeline insides, and then this collecting cup has ensured the collecting effect to photoresist and developer, thereby the loss of this collecting cup to the resource has reduced the cost of processing wafer.

This efficient spin-coating waste liquid collecting cup through setting up first spring and fixed shell, when taking out the stock in the collecting cup, only need upwards lift up the flexible pipe of second, and then the flexible pipe of second can drive sealed lid and shift up this moment, can take out the collecting cup from the fixed shell in this moment, just need to shift up sealed lid and put into the fixed shell with the collecting cup in the same way, thereby first spring then can drive sealed lid and shift down and play fixed effect to it when accomplishing the sealing of collecting cup for this collecting cup can dismantle and fix the collecting cup fast, thereby reduced the degree of difficulty of retrieving the stock, improved the suitability of this collecting cup.

Drawings

FIG. 1 is a schematic view of a three-dimensional structure of the present utility model;

FIG. 2 is a schematic view of a spin coater according to the present utility model;

FIG. 3 is a schematic view of a perspective structure of an elastic assembly according to the present utility model;

FIG. 4 is a schematic view of a cam perspective structure of the present utility model;

in the figure: the device comprises a spin coater 1, a driving shaft 2, a chassis 3, a collecting pipe 4, a first telescopic pipe 5, a bent pipe 6, an elastic component 7, a second telescopic pipe 71, a first spring 72, a sealing cover 8, a collecting cup 9, a fixing component 10, a fixing shell 101, a positioning chassis 102, a sliding plate 11, a sliding sleeve 12, a second spring 13, a first driving wheel 14, a driving belt 15, a second driving wheel 16, a rotating shaft 17, a bearing 18, a reinforcing rod 19, a supporting frame 20, a cam 21 and a pulley 22.

Detailed Description

The technical scheme of the patent is further described in detail below with reference to the specific embodiments.

As shown in fig. 1-4, the present utility model provides a technical solution: the utility model provides an efficient spin coating waste liquid collecting cup, including spin coater 1, spin coater 1's top fixedly connected with drive shaft 2, drive shaft 2's bottom and spin coater 1 inside set up the driver transmission be connected, drive shaft 2 outer fixedly connected with chassis 3, collecting pipe 4 has been cup jointed outward to chassis 3, collecting pipe 4 is the arc, a plurality of through-hole has been seted up to chassis 3's inner wall, chassis 3 is linked together through-hole and collecting pipe 4, collecting pipe 4 outer fixedly connected with first flexible pipe 5, the other end and the return bend 6 of first flexible pipe 5 are linked together, return bend 6's the other end and elastic component 7's top are linked together, elastic component 7's the other end and sealed lid 8 are linked together, owing to be provided with collecting pipe 4, make at chassis 3 rotatory in-process, the waste material can get into inside collecting pipe 4 along the through-hole, thereby collect the waste material is avoided the waste material to adhere in chassis 3 inside or the extravagant condition of resource appears.

The sealing cover 8 is clamped on the collecting cup 9, the collecting cup 9 is clamped in the fixing assembly 10, one side of the fixing assembly 10 is fixedly connected with the sliding plate 11, the sliding plate 11 is slidably connected in the sliding sleeve 12, a plurality of second springs 13 are arranged in the sliding sleeve 12, two ends of the second springs 13 are respectively fixedly connected with one side of the inner wall of the sliding sleeve 12 and one side of the sliding plate 11, the collecting cup 9 is communicated with extraction equipment arranged in the spin coater 1 through the fixing assembly 10, the elastic assembly 7 comprises a second telescopic tube 71, a first spring 72 is sleeved outside the second telescopic tube 71, and the top ends and the bottom ends of the second telescopic tube 71 and the first spring 72 are respectively fixedly connected with the bottom ends of the bent tubes 6 and the upper part of the sealing cover 8;

due to the arrangement of the collecting cup 9, the first telescopic tube 5 and the second telescopic tube 71, the collecting cup can collect the dropped photoresist and developing solution in real time in the using process, the influence on the use of the collecting cup due to the fact that the photoresist and the developing solution are adhered to the inside of the chassis 3 for a long time is avoided, and meanwhile, the photoresist and the developing solution can be collected and reused, so that the environmental protection effect of the collecting cup is guaranteed.

The fixed subassembly 10 includes fixed casing 101, fixed casing 101 fixed connection is on fixed casing 101, collection cup 9 joint is in fixed casing 101, one side fixed connection that one side of fixed casing 102 corresponds with slide 11, slide 11 is linked together with the extraction equipment that sets up in the spin coater 1 through sliding sleeve 12, because of being provided with slide 11 and sliding sleeve 12, thereby play the effect of guarantee for the horizontal position of fixed casing 101, and can provide the passageway that communicates with spin coater 1 for collection cup 9 and fixed casing 101, ensured the extraction effect to the waste material.

The first driving wheel 14 is fixedly connected to the outside of the driving shaft 2, the first driving wheel 14 is in driving connection with the second driving wheel 16 through a driving belt 15, a rotating shaft 17 is fixedly connected to the lower side of the second driving wheel 16, a bearing 18 is sleeved outside the rotating shaft 17, a reinforcing rod 19 is fixedly connected to the outside of the bearing 18, and due to the fact that a first spring 72 and a fixed shell 101 are arranged, the collecting cup can be quickly detached and fixed to the collecting cup 9, the difficulty of recycling and storing materials is reduced, the applicability of the collecting cup is improved, the reinforcing rod 19 is fixedly connected to one side corresponding to the spin coater 1, a supporting frame 20 is fixedly connected to the lower side of the reinforcing rod 19, the other side of the supporting frame 20 is fixedly connected to the outside of the spin coater 1, a cam 21 is fixedly connected to the bottom end of the rotating shaft 17, a pulley 22 is arranged outside the cam 21, and the cam 21 is mutually overlapped with a second telescopic tube 71 through the pulley 22;

because the first spring 72, the second spring 13 and the cam 21 are arranged, the first telescopic pipe 5 and the sliding plate 11 are in a high-frequency moving state, so that the photoresist and the developing solution can be prevented from adhering to the inside of the collecting cup 9 in the process of photoresist and developing solution through a high-frequency vibration mode, the photoresist and the developing solution can be prevented from adhering to the inside of other pipelines, the collecting effect of the collecting cup on the photoresist and the developing solution is further guaranteed, the loss of the collecting cup on resources is reduced, and the cost for processing wafers is reduced.

The working principle of the utility model is as follows:

when the collecting cup is used, a wafer to be processed is only required to be installed in the chassis 3, and then the spin coater 1 can drive the driving shaft 2 and the chassis 3 to rotate and cooperate with spin coating equipment to process the wafer;

in the spin coating process, due to the centrifugal force during rotation, part of photoresist and developing solution are easy to adhere to the inner wall of the chassis 3 along with the rotation of the chassis 3, and at the moment, the extraction equipment in the spin coater 1 operates, so that the photoresist and developing solution in the collection pipe 4 are extracted through the sliding sleeve 12, the collection cup 9, the first telescopic pipe 5 and the second telescopic pipe 71, and the collected photoresist and developing solution are extracted into the collection cup 9;

when the driving shaft 2 drives the chassis 3 to rotate, the driving shaft 2 drives the second driving wheel 16 to rotate through the first driving wheel 14, so that the rotating shaft 17 rotates synchronously along with the rotation of the driving shaft 2, the cam 21 continuously contacts with the second telescopic tube 71 along with the rotation of the rotating shaft 17 and pushes the second telescopic tube 71, when the first telescopic tube 5 and the sliding plate 11 are pushed by the cam 21, the first telescopic tube 5 and the sliding plate 11 are outwards moved, and when the cam 21 is separated from the second telescopic tube 71, the first spring 72 and the second spring 13 pull the first telescopic tube 5 and the sliding plate 11 to reset, and the first telescopic tube and the sliding plate 11 are reciprocated;

when the stored materials in the collecting cup 9 need to be taken out, only the second telescopic tube 71 needs to be lifted upwards, at the moment, the second telescopic tube 71 drives the sealing cover 8 to move upwards, at the moment, the collecting cup 9 can be taken out of the fixing shell 101, and in the same way, only the sealing cover 8 needs to move upwards and the collecting cup 9 is placed in the fixing shell 101, and the first spring 72 drives the sealing cover 8 to move downwards.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art in a specific case.

While the preferred embodiments of the present patent have been described in detail, the present patent is not limited to the above embodiments, and various changes may be made without departing from the spirit of the present patent within the knowledge of one of ordinary skill in the art.

Claims

1. The utility model provides an efficient spin-coating waste liquid collection cup, includes spin-coating machine (1), its characterized in that: the novel plastic pipe is characterized in that a driving shaft (2) is fixedly connected to the top end of the spin coater (1), the bottom end of the driving shaft (2) is connected with a driver arranged inside the spin coater (1) in a transmission mode, a base plate (3) is fixedly connected to the outside of the driving shaft (2), a collecting pipe (4) is sleeved outside the base plate (3), the collecting pipe (4) is arc-shaped, a plurality of through holes are formed in the inner wall of the base plate (3), the base plate (3) is communicated with the collecting pipe (4) through the through holes, a first telescopic pipe (5) is fixedly connected to the outside of the collecting pipe (4), the other end of the first telescopic pipe (5) is communicated with a bent pipe (6), the other end of the bent pipe (6) is communicated with the top end of an elastic component (7), and the other end of the elastic component (7) is communicated with a sealing cover (8).

2. The efficient spin-on waste collection cup of claim 1, wherein: sealing lid (8) joint is on collecting cup (9), collecting cup (9) joint is in fixed subassembly (10), one side fixedly connected with slide (11) of fixed subassembly (10), slide (11) sliding connection is in sliding sleeve (12), be provided with a plurality of second spring (13) in sliding sleeve (12), and the both ends of a plurality of second spring (13) respectively with one side of sliding sleeve (12) inner wall and one side fixed connection of slide (11), collecting cup (9) are linked together through fixed subassembly (10) and the extraction equipment that sets up in spin-coating machine (1).

3. The efficient spin-on waste collection cup of claim 1, wherein: the elastic component (7) includes flexible pipe (71) of second, flexible pipe (71) overcoat has first spring (72), the top and the bottom of flexible pipe (71) and first spring (72) respectively with the top fixed connection of the bottom of return bend (6) and sealed lid (8).

4. The efficient spin-on waste collection cup of claim 2, wherein: the fixing assembly (10) comprises a fixing shell (101), the fixing shell (101) is fixedly connected to a positioning chassis (102), the collecting cup (9) is clamped in the fixing shell (101), one side of the positioning chassis (102) is fixedly connected with one side corresponding to the sliding plate (11), and the sliding plate (11) is communicated with extraction equipment arranged in the spin coater (1) through a sliding sleeve (12).

5. The efficient spin-on waste collection cup of claim 1, wherein: the novel spin coater is characterized in that a first driving wheel (14) is fixedly connected to the outside of the driving shaft (2), the first driving wheel (14) is in transmission connection with a second driving wheel (16) through a driving belt (15), a rotating shaft (17) is fixedly connected to the lower portion of the second driving wheel (16), a bearing (18) is sleeved outside the rotating shaft (17), a reinforcing rod (19) is fixedly connected to the outside of the bearing (18), and one side, corresponding to the spin coater (1), of the reinforcing rod (19).

6. The efficient spin-on waste collection cup of claim 5, wherein: the lower part fixedly connected with support frame (20) of stiffening rod (19), the opposite side fixedly connected with of support frame (20) is outside spin coater (1), the bottom fixedly connected with cam (21) of pivot (17), pulley (22) are equipped with outward in cam (21), cam (21) overlap joint each other with second flexible pipe (71) through pulley (22).