CN219750776U - Transfer conveyor and wafer cassette storage library - Google Patents

Abstract

The application relates to a transfer conveying device and a wafer box storage warehouse. The wafer box storage warehouse comprises a storage warehouse body and a transfer conveying device, wherein the storage warehouse body is provided with a manual window, the transfer conveying device comprises a first conveying unit and a second conveying unit, the second conveying unit is arranged in the storage warehouse body, the first conveying unit is provided with an operation station positioned outside the storage warehouse body, meanwhile, the first conveying unit comprises a first conveying piece, the first conveying piece can rotate by taking a first axis as a central shaft, the second conveying unit is provided with a first station and a second station which are arranged at intervals, the first station and the operation station are arranged at intervals in the circumferential direction around the first axis, the second conveying piece can reciprocate the first station and the second station, so that workers can interact with the storage warehouse body more in a labor-saving mode to store or take out the wafer box, the access efficiency of the wafer box is improved, and the occurrence of uncontrollable factors in the process of accessing the wafer box is avoided.

Description

Transfer conveyor and wafer cassette storage library

Technical Field

The application relates to the technical field of semiconductor manufacturing equipment, in particular to a transfer conveying device and a wafer box storage library.

Background

With the widespread use of integrated circuits in everyday life, semiconductors have begun to play an increasingly important role in products, and their demands have also been greatly increased, thereby promoting the vigorous development of the global semiconductor market. In order to meet the great demands of integrated circuits, most semiconductor manufacturing enterprises are aimed at improving productivity and yield. Therefore, in semiconductor manufacturing enterprises, wafers for producing integrated circuits are usually transported in batches, but the manual transportation is not only inefficient, but also dangerous, and uncertain factors such as chip pollution, chip collision and breakage exist in the transportation process. Automated material handling systems (AMHS: automatic Material Handling System) have grown and have been widely used in the semiconductor manufacturing industry to address the risks and uncertainties associated with manual handling.

The wafer cassettes loaded with semiconductor wafers are generally stored temporarily in a wafer cassette storage library, a plurality of storage cells are arranged in the wafer cassette storage library, and a stacker is arranged in the storage library to take and place the wafer cassettes in the storage cells. However, during the process of accessing the cassettes, some cassettes require manual intervention in accessing the repository, such as a worker placing the cassette into the repository, and a worker removing the cassette from the repository. Therefore, in order to facilitate manual intervention, a window for manual intervention (called a manual window) can be arranged in the storage library, and in order to solve the risk that a stacker manipulator (a stacker manipulator driving force is large) in the storage library hurts the manual work when the handling manipulator and the manual work process the wafer box simultaneously, a transfer conveying device is arranged at the position of the manual window to convey the wafer box from the manual window to the position of the stacker manipulator so as to be used for butt joint of the manual work and the manipulator of the stacker. However, the existing wafer box storage warehouse is designed to be arranged in the storage warehouse by using a transferring and conveying device, the wafer box filled with wafers is relatively heavy, the wafer box still needs to be placed at a preset positioning device when the wafer box filled with wafers is manually carried by bare hands, the manual operation is more difficult, and a worker still needs to wear a thicker dust-free garment in a dust-free room, so that the carrying difficulty is further increased, uncontrollable factors, such as chip pollution, chip collision breakage, contact with a stacker and the like, easily occur in the process of manually carrying the wafer box into and out of the storage warehouse.

Disclosure of Invention

Therefore, it is necessary to provide a transfer and conveying device capable of accurately docking a wafer cassette with a wafer cassette storage warehouse and capable of being placed at a preset position in a labor-saving manner when the wafer cassette is accessed, and a wafer cassette storage warehouse comprising the transfer and conveying device, aiming at the problems that a worker is laborious in carrying and uncontrollable factors are easy to occur in the process of storing the wafer cassette in the wafer cassette storage warehouse or taking the wafer cassette out of the wafer cassette storage warehouse.

According to one aspect of the present utility model, there is provided a transfer and transport apparatus for transporting a wafer cassette between outside a wafer storage library and inside the wafer storage library, the transfer and transport apparatus comprising:

a first conveying unit having at least one operation station for temporarily storing the wafer cassette, the first conveying unit including a first carrying member for conveying the wafer cassette, the first carrying member being rotatable about a first axis extending in a height direction thereof;

the first conveying unit is arranged adjacent to the first conveying unit, the second conveying unit is provided with a first station and a second station which are arranged at intervals, the first station and the operating station are arranged at intervals in the circumferential direction around the first axis, and the first conveying piece is used for conveying the wafer box between the operating station and the first station; the second conveying unit includes a second conveying member for conveying the wafer cassette, the second conveying member being capable of moving to and from the first station and the second station.

In one embodiment, the first conveying unit comprises a manual operation table and a transfer mechanism arranged on one side of the manual operation table, and the operation station is arranged on the manual operation table; the transfer mechanism comprises a base, and the first carrying piece is movably connected with the base.

In one embodiment, the first carrying member includes a stand column, a carrying tray, and a safety top plate, where the stand column is movably connected to the base, and the carrying tray is fixedly disposed at a lower end of the stand column, and is used for carrying the wafer box; the safe roof is fixed to be located the upper end of stand, bear the weight of the dish the stand with safe roof forms jointly and is used for holding the space that bears of wafer box.

In one embodiment, the transferring mechanism further comprises a lifting seat, a rotating seat and a translation seat, wherein the lifting seat is connected to the base in a lifting manner, the rotating seat is rotatably connected to the lifting seat and can rotate around the first axis, the translation seat is fixedly connected to the rotating seat, and the first carrying piece is arranged on the translation seat in a translatable manner.

In one embodiment, the second conveying unit includes a conveying table, the first station and the second station are disposed on the conveying table, and the second carrying member is movably connected to the conveying table and can reciprocate relative to the conveying table between the first station and the second station; the second carrier member is also capable of being rotatably and liftably connected to the conveyor table about its central axis.

In one embodiment, the operation station is provided with a plurality of first supporting seats which are arranged around the second axis and used for supporting the wafer box, so that when the wafer box is borne on the first supporting seats, a first supporting gap is formed between the wafer box and the operation station, and the first supporting gap is used for accommodating at least part of the first carrying piece so that the first carrying piece can lift the wafer box upwards at the operation station;

and/or the first station is provided with a plurality of second supporting seats which are arranged around a third axis at intervals, the second station is provided with a plurality of third supporting seats which are arranged around a fourth axis at intervals, the second supporting seats and the third supporting seats are used for supporting the wafer box, so that when the wafer box is borne on the second supporting seats and the third supporting seats, a second supporting gap is formed between the wafer box and the first station, and a third supporting gap is formed between the wafer box and the second station, and the second supporting gap and the third supporting gap are respectively used for accommodating at least part of the second carrying piece, so that the second carrying piece can respectively lift the wafer box at the first station and the second station upwards;

Wherein the second, third and fourth axes are parallel to the first axis.

In one embodiment, the transferring and conveying device further comprises a control unit, wherein the control unit is simultaneously connected with the first conveying unit and the second conveying unit in a communication manner, and the operation station, the first station, the second station, the first conveying member and the second conveying member are respectively provided with at least two sensing elements;

when the wafer box is placed on any one of the operation station, the first station, the second station, the first carrying piece and the second carrying piece, and the corresponding sensing element on any one is triggered at the same time, the triggered sensing element can send a signal representing the placement state of the wafer box to the control unit.

In one embodiment, the plurality of operation stations and the plurality of second conveying units are respectively provided, and the plurality of operation stations and the plurality of first stations of the second conveying units are alternately and alternately arranged at intervals with the first axis as a central axis.

According to another aspect of the present application, there is provided a wafer cassette storage library comprising:

The storage library comprises a storage library body, a storage library and a storage library, wherein the storage library body is provided with at least one manual window communicated with the inside of the storage library body and the outside of the storage library body;

at least one transfer conveying device, wherein the transfer conveying device penetrates through a corresponding artificial window, the first conveying unit is arranged in the storage library body, and the second conveying unit is at least partially arranged outside the storage library body, so that an operation station of the second conveying unit is positioned outside the storage library body.

In one embodiment, each of the artificial windows includes an input port and an output port; the input port is used for storing the wafer box into the storage library body, and the output port is used for outputting the wafer box from the storage library body;

each transferring and conveying device is provided with two operation stations and two second conveying units, wherein one operation station is arranged at the input port and positioned at the outer side of the storage warehouse body, the first station of one second conveying unit is arranged at the input port and positioned at the inner side of the storage warehouse body, the other operation station is arranged at the output port and positioned at the outer side of the storage warehouse body, and the first station of the other second conveying unit is arranged at the input port and positioned at the inner side of the storage warehouse body;

The two opposite sides of the storage body in the width direction of the storage body are respectively provided with one artificial window, wherein one artificial window is used for storing the wafer box into the storage body, and the other artificial window is used for outputting the wafer box from the storage body.

Above-mentioned transfer conveyor and wafer box repository, through being provided with first conveying unit and second conveying unit adjacently in transfer conveyor, and the second conveying unit locates in the repository body, first conveying unit locates the repository body outside at least partially for be used for the operation station of temporary storage wafer box in the first conveying unit is located the repository body outside. Meanwhile, a first carrying piece capable of rotating by taking the first axis as a central shaft is arranged in the first conveying unit, a first station and a second station which are arranged at intervals are arranged in the second conveying unit, and a second carrying piece capable of reciprocating to and from the first station and the second station is arranged, so that the wafer box can be accurately conveyed to the first station positioned at the inner side of the artificial window by the first carrying piece from an operation station positioned at the outer side of the artificial window and then accurately conveyed to the second station by the second carrying piece from the first station; or the wafer box is transferred from the second station to the first station by the second carrying piece and then transferred from the first station positioned at the inner side of the artificial window to the operation station positioned at the outer side of the artificial window by the first carrying piece, so that the wafer box is not carried into the storage warehouse body by bare hands or is carried out from the storage warehouse body by bare hands, workers can store or take out the wafer box more easily, the access efficiency of the wafer box is improved, and the occurrence of uncontrollable factors in the process of accessing the wafer box is avoided.

Drawings

Fig. 1 is an isometric view of a wafer cassette storage library according to an embodiment of the present application.

Fig. 2 is a front view of a wafer cassette storage library according to an embodiment of the present application.

Fig. 3 is a top view of a wafer cassette storage library according to an embodiment of the present application.

Fig. 4 is an isometric view of a transfer and transport device for transporting a wafer cassette according to an embodiment of the present application.

Fig. 5 is a top view of a transfer conveyor according to an embodiment of the present application.

Fig. 6 is a top view of a portion of a transfer conveyor according to an embodiment of the present application.

Fig. 7 is a top view illustrating a first carrier rotated to different positions according to an embodiment of the present application.

Fig. 8 is an isometric view of a first carrier according to an embodiment of the application in a raised position.

Fig. 9 is an isometric view of a first carrier according to an embodiment of the application in a lowered position.

Fig. 10 is an isometric view of a wafer cassette positioned on a first carrier according to an embodiment of the present application.

Fig. 11 is a front view of a wafer cassette placed on a first carrier according to an embodiment of the application.

Fig. 12 is a top view of a first carrier according to an embodiment of the present application.

Fig. 13 is an enlarged schematic view of the area a in fig. 8.

Fig. 14 is an enlarged schematic view of the area B in fig. 5.

Fig. 15 is an enlarged schematic view of region C in fig. 5.

Fig. 16 is an enlarged schematic view of the region D in fig. 5.

Reference numerals illustrate:

10. a wafer cassette store; 100. a repository body; 101. roadway; 102. a storage cell; 103. a manual window; 110. a first sub-store; 120. a second sub-store; 130. a stacker; 200. a transfer conveyor; 201. a first axis; 202. a second axis; 203. a third axis; 204. a fourth axis; 210. a first conveying unit; 211. a manual operation table; 211a, an operating station; 212. a transfer mechanism; 2121. a base; 2122. a first carrying member; 2122a, posts; 2122b, a carrier plate; 2122c, a safety top plate; 2123. a lifting seat; 2124. a rotating seat; 2125. a translation seat; 2126. a carrying space; 213. a first support base; 214. a positioning piece; 215. a sensing element; 216. an RFID identifier; 220. a second conveying unit; 221. a conveyor table; 221a, a first station; 221b, a second station; 2211. a second support base; 2212. a third support base; 222. a second carrying member; 30. a wafer cassette.

Detailed Description

In order that the above objects, features and advantages of the application will be readily understood, a more particular description of the application will be rendered by reference to the appended drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. The present application may be embodied in many other forms than described herein and similarly modified by those skilled in the art without departing from the spirit of the application, whereby the application is not limited to the specific embodiments disclosed below.

In the description of the present application, it should be understood that, if any, these terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., are used herein with respect to the orientation or positional relationship shown in the drawings, these terms refer to the orientation or positional relationship for convenience of description and simplicity of description only, and do not indicate or imply that the apparatus or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the application.

Furthermore, the terms "first," "second," and the like, if any, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present application, the terms "plurality" and "a plurality" if any, mean at least two, such as two, three, etc., unless specifically defined otherwise.

In the present application, unless explicitly stated and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly. For example, the two parts can be fixedly connected, detachably connected or integrated; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art according to the specific circumstances.

In the present application, unless expressly stated or limited otherwise, the meaning of a first feature being "on" or "off" a second feature, and the like, is that the first and second features are either in direct contact or in indirect contact through an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.

It will be understood that if an element is referred to as being "fixed" or "disposed" on another element, it can be directly on the other element or intervening elements may also be present. If an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used herein, if any, are for descriptive purposes only and do not represent a unique embodiment.

Wafers required in the semiconductor manufacturing industry (loaded in cassettes) are typically temporarily stored in a cassette store, because there are waiting or queuing processes between the processing of the chips, and all life cycles of the wafers require an ultra clean environment, so in order to place the wafers that need to be temporarily stored, the wafer manufacturing plant is provided with a cassette store in which the cassettes loaded with wafers are stored, in order to store the cassettes in the cassette store or take out the cassettes in the cassette store, a window for manual intervention (referred to as a manual window) is provided in the cassette store, and a transfer conveyor for manually interfacing with the cassette store is provided at the manual window.

However, as described in the background art, the existing wafer cassette storage warehouse is designed to be a transfer conveying device, the wafer cassettes filled with wafers are relatively heavy, the wafer cassettes still need to be placed at the preset positioning device when the wafer cassettes filled with wafers are manually carried by bare hands, so that the wafer cassettes have great difficulty for manual operation, and workers still need to wear heavy dust-free clothes in a dust-free room, so that the carrying difficulty is further increased, and uncontrollable factors, such as chip pollution, chip collision breakage, collision with a stacker and the like, easily occur in the process of manually carrying the wafer cassettes into and out of the wafer cassette storage warehouse.

In order to solve the problem, the existing wafer box storage warehouse and the transferring and conveying device can be improved, specifically, the transferring and conveying device can be considered to be partially arranged outside the manual window, so that the transferring and conveying device can be utilized to convey the wafer box from outside the manual window to a preset position in the manual window or from a specific position in the manual window to outside the wafer box storage warehouse, and the purpose that a worker can store or take out the wafer box more easily can be achieved.

Based on the above-mentioned considerations, the present inventors have conducted intensive studies and have provided a transfer and transport apparatus for temporarily storing a wafer cassette loaded with a wafer while waiting or queuing for processing between processing processes in the course of semiconductor product production, and a wafer cassette storage library including the transfer and transport apparatus for transporting the wafer cassette from outside the wafer cassette storage library to a predetermined position inside the wafer cassette storage library or from a specific position inside the wafer cassette storage library to outside the wafer cassette storage library.

The transfer and transport device and the structure of the wafer cassette storage library including the transfer and transport device according to the present application will be described below. It will be appreciated that in other embodiments, the transfer and transport device of the present application is not limited to transferring and transporting only wafer cassettes, but may be used to transfer and transport any article to be transferred, and is not limited herein.

Referring to fig. 1 to 3, fig. 1 to 3 are schematic views illustrating a structure of a wafer cassette storage library 10 according to an embodiment of the present application, and the wafer cassette storage library 10 according to an embodiment of the present application includes a storage library body 100 and a transfer and conveying device 200. The storage body 100 is provided with an artificial window 103 communicating the interior of the storage body 100 with the exterior of the storage body 100, the transfer conveying device 200 is arranged on the artificial window 103 in a penetrating manner, that is, a part of the transfer conveying device 200 is arranged outside the storage body 100, the rest part is arranged in the storage body 100, and the transfer conveying device 200 is used for conveying the wafer cassette 30 from the exterior of the artificial window 103 to the interior of the storage body 100 so as to finish the storage of the wafer cassette 30 or is used for conveying the wafer cassette 30 from the interior of the storage body 100 to the exterior of the artificial window 103 so as to finish the taking out of the wafer cassette 30.

Referring to fig. 1 and 3, in a specific embodiment, the storage body 100 includes a first sub-storage 110, a second sub-storage 120 and a stacker 130, where the first sub-storage 110 and the second sub-storage 120 are spaced and oppositely disposed, a tunnel 101 is formed between them, and the first sub-storage 110 and the second sub-storage 120 are respectively provided with a plurality of storage compartments 102 for storing the wafer cassettes 30, the stacker 130 has a manipulator (not shown in the drawings), and the stacker 130 is movably disposed in the tunnel 101, and in view of a distance between an outer side surface of the storage body 100 and the inner stacker 130, the individual storage compartments 102 in the storage body 100 can be modified into a manual window 103 for manually intervening in accessing the wafer cassettes 30, that is, the manual window 103 is opened at a position of one or more storage compartments 102, and a transfer device 200 for temporarily storing and interactively transferring the wafer cassettes 30 can be constructed between a worker and the storage body 100 through the manual window 103, so that the stacker 130 can be moved from the first sub-storage 110 to the storage body 101 to the inner storage body 130 through the manual window 103, and the wafer cassettes 30 can be transferred from the storage body 100 through the manual window 200 to the storage body 100 through the manual window 200, and can be transferred from the storage body 100 to the storage device to the storage compartment 100 through the manual window 102.

In this way, not only the interior of the wafer cassette storage library 10 is not affected by manual intervention (such as environmental purification requirements, interference of automated operation, collision, accidental injury, etc.), but also the limited space in the storage library body 100 is fully utilized, and the manual intervention mode is convenient to participate in the access operation of the wafer cassette 30 of the storage library body 100, such as that a worker, MR, AMR, etc. can store the wafer cassette 30 in the storage library body 100 through the manual window 103, or such as that the worker, MR, AMR, etc. can take the wafer cassette 30 from the storage library through the manual window 103, thereby improving the convenience and efficiency of manually intervening the wafer cassette 30 into and out of the wafer cassette storage library 10.

In some embodiments, the number of the manual windows 103 may be one, or two or more, and when the number of the manual windows 103 is two or more, the number of the transferring and conveying devices 200 corresponds to the number of the manual windows 103, and each transferring and conveying device 200 is penetrated through a corresponding one of the manual windows 103.

For example, as shown in fig. 1 and fig. 2, two opposite sides of the storage body 100 in the width direction thereof are respectively provided with an artificial window 103, specifically, the storage body 100 is in a cube structure, the width direction refers to the direction in which the short side of the storage body 100 extends when viewed from the top, that is, the outside of the first sub-storage 110 (i.e., the side far from the second sub-storage 120) is provided with an artificial window 103, and the outside of the second sub-storage 120 (i.e., the side far from the first sub-storage 110) is also provided with an artificial window 103 (not shown in the drawing). It will be appreciated that each manual window 103 may occupy only one storage compartment 102, such that the wafer cassette 30 may be stored in from the manual window 103 and may be retrieved from the same location as the manual window 103; each of the manual windows 103 may further occupy a plurality of the storage cells 102, such that the manual window 103 is elongated in a horizontal direction, and the manual window 103 includes an input port and an output port which are oppositely disposed in the horizontal direction, the input port occupying one of the storage cells 102 for storing the wafer cassette 30 into the library body 100, and the output port occupying another of the storage cells 102 for outputting the wafer cassette 30 from the library body 100; or in another embodiment, one of the manual windows 103 is used to store the wafer cassette 30 into the magazine body 100 and the other manual window 103 is used to output the wafer cassette 30 from the magazine body 100.

Further, as shown in connection with fig. 1 and 4-6, in one embodiment, the transfer conveyor 200 includes a first conveyor unit 210 and a second conveyor unit 220, where the first conveyor unit 210 and the second conveyor unit 220 are disposed adjacent to each other, and the second conveyor unit 220 is disposed inside the storage body 100 of the artificial window 103, i.e., completely inside the storage body 100, and the first conveyor unit 210 is disposed partially or completely outside the storage body 100 of the artificial window 103, i.e., partially or completely outside the storage body 100.

Specifically, as shown in fig. 5 and 6, the first conveying unit 210 has an operation station 211a located outside the manual window 103 in the storage library body 100, and the first conveying unit 210 has a first carrier 2122 for conveying the wafer cassette 30, the first carrier 2122 being rotatable about a first axis 201 extending in a height direction thereof. The second conveying unit 220 has a first station 221a and a second station 221b that are disposed at intervals, the first station 221a and the operation station 211a being disposed at intervals in a circumferential direction about the first axis 201, and the second conveying unit 220 has a second conveyance member 222 that can reciprocate from the first station 221a and the second station 221 b.

Note that, the height direction of the first carrier 2122 is the height direction of the wafer cassette storage library 100, i.e., the direction perpendicular to the horizontal plane.

Thus, through the above arrangement, the first carrier 2122 can transfer the wafer cassette 30 from the operation station 211a outside the storage body 100 to the first station 221a inside the storage body 100, and then the second carrier 222 transfers the wafer cassette 30 from the first station 221a to the second station 221b, so that the wafer cassette 30 can wait for the manipulator of the stacker 130 to further transfer at the second station 221b, thereby completing the storing process of the wafer cassette 30; or after the robot of the stacker 130 takes out the wafer cassette 30 from one of the storage compartments 102 and places it in the second station 221b, the second carrier 222 can transfer the wafer cassette 30 from the second station 221b to the first station 221a, and then the first carrier 2122 transfers the wafer cassette 30 from the first station 221a to the operation station 211a, so as to complete the process of taking out the wafer cassette 30.

In one embodiment, referring to fig. 6, the first conveying unit 210 includes a manual operation table 211 and a transfer mechanism 212 disposed on one side of the manual operation table 211, where the operation station 211a is disposed on the manual operation table 211, and the transfer mechanism 212 includes a base 2121 and a first carrying member 2122 movably connected to the base 2121, as shown in the embodiment of fig. 7 and 8, the base 2121 is cylindrical, and its own central axis is a first axis 201, and the first carrying member 2122 can rotate relative to the base 2121 about the first axis 201 (fig. 7 shows a schematic view in which the first carrying member 2122 rotates to two different positions). Preferably, as shown in fig. 8 and 9, the first carrier 2122 includes a post 2122a and a carrying plate 2122b, the post 2122a is movably connected to the base 2121 and can rotate around a central axis of the base 2121, the carrying plate 2122b is used for carrying the wafer cassette 30, and the carrying plate 2122b is fixedly provided at a lower end of the post 2122a, so that the carrying plate 2122b can rotate together with the post 2122a, thereby being capable of carrying the wafer cassette 30 to rotate in a state where the overall occupied space is minimum, so as to be capable of going back and forth between the operation station 211a and the first station 221 a.

Preferably, in order to reduce the risk of accidental dropping of the wafer cassette 30 from the first carrier 2122 when the wafer cassette 30 is carried by the first carrier 2122, the first carrier 2122 further includes a safety top plate 2122c, and the safety top plate 2122c is fixedly disposed at an upper end of the upright post 2122a, so that the carrying tray 2122b, the upright post 2122a, and the safety top plate 2122c together form a carrying space 2126 for accommodating the wafer cassette 30, and a dimension of the carrying space 2126 in a height direction is slightly larger than a height dimension of the wafer cassette 30, so that the wafer cassette 30 has only a small gap between a top of the wafer cassette 30 and the safety top plate 2122c when the wafer cassette 30 is carried by the first carrier 2122, and so that the wafer cassette 30 is unlikely to be accidentally dropped from the first carrier 2122 under the protection of the safety top plate 2122c when the wafer cassette is carried by the first carrier 210, as shown in fig. 10 and 11.

Still preferably, referring to fig. 8 and 9, in order to enable the first carrier 2122 to grasp the wafer cassette 30 from a specific position or place the wafer cassette 30 in a specific position, the first carrier 2122 further includes a lifting base 2123, a rotating base 2124, and a translating base 2125, and the first carrier 2122 is connected to the base 2121 through the lifting base 2123, the rotating base 2124, and the translating base 2125; wherein, the lifting seat 2123 is connected to the base 2121 in a lifting manner, the rotating seat 2124 is rotatably connected to the lifting seat 2123 and can rotate around the first axis 201, the translating seat 2125 is fixedly connected to the rotating seat 2124, and the first carrying member 2122 is translatably disposed on the translating seat 2125, so that the first carrying member 2122 can be lifted and lowered relative to the base 2121 in addition to being rotatable about the first axis 201 relative to the base 2121, and can also be telescopically translated in a radial direction of the base 2121 as shown in fig. 12 (fig. 12 shows a schematic view of telescopic translation of the first carrying member 2122 to two different positions in the radial direction of the base 2121).

Thus, with the above arrangement, the first carrier 2122 is allowed to flexibly move so as to be able to translate in the radial direction of the base 2121 and approach the wafer cassette 30 to extend below the wafer cassette 30, and to be able to rise until the wafer cassette 30 is safely scooped up, then rotate again to transfer the wafer cassette 30 to the next station, then descend again with the wafer cassette 30, and exit from below the wafer cassette 30, thereby placing the wafer cassette 30 in the station. In this way, the wafer cassette 30 can be automatically moved to the carrier plate 2122b without manually moving the wafer cassette 30, thereby saving labor and facilitating the transfer of the wafer cassette 30.

In a preferred embodiment, please continue to refer to fig. 8 and 9, the base 2121, the lifting seat 2123 and the rotating seat 2124 are nested with each other, i.e. the base 2121, the lifting seat 2123 and the rotating seat 2124 are all cylindrical structures, and the diameters of the three structures are sequentially reduced, so that the lifting seat 2123 is inserted into the base 2121 in a liftable manner, and the rotating seat 2124 is inserted into the lifting seat 2123 in a rotatable manner, thus the volume of the first carrying member 2122 is smaller, and thus smaller space is occupied.

The structure of the first carrier 2122 is not limited to that shown in the drawings, and may be a cylindrical structure in which the lifting base 2123 and the rotating base 2124 are integrated, and may be inserted into the base 2121 so as to be capable of being lifted and lowered, or may be rotated, to achieve the same technical effects, and is not particularly limited herein.

Further, in order to enable the wafer cassette 30 to be fixedly placed on the carrier plate 2122b, as shown in fig. 13, a plurality of (three in the drawing) positioning members 214 (for example, positioning pins, etc.) are disposed on the carrier plate 2122b at intervals along a circumferential direction, and correspondingly, a plurality of grooves matched with the positioning members 214 are formed on the bottom of the wafer cassette 30. When the wafer cassette 30 is placed on the carrier plate 2122b, the wafer cassette 30 can be fixedly placed on the carrier plate 2122b by inserting each positioning member 214 into a corresponding groove, so that the safety of wafers inside the wafer cassette 30 can be ensured.

In order to further ensure that the wafer cassette 30 is stably placed on the carrier plate 2122b, the carrier plate 2122b is further provided with at least two sensor elements 215 (for example, pressing type sensors, etc.), and the number of the sensor elements 215 may be at least two, or may be plural, correspondingly, the transfer conveying device 200 further includes a control unit, which is communicatively connected to the first conveying unit 210, that is, the control unit is communicatively connected to the sensor elements 215, when the wafer cassette 30 is placed on the carrier plate 2122b and is simultaneously pressed onto the sensor elements 215, the sensor elements 215 that are triggered at this time can send a signal indicating the placement state of the wafer cassette 30 to the control unit, preferably, an indicator light with a different color may be provided on the manual operation platform 211, for example, when the sensor elements 215 detect that the wafer cassette 30 is placed stably, the indicator light emits green light, and at the same time, the control element further sends a control signal to control the first conveying unit 210 to perform a next action; when the sensor 215 detects that the wafer cassette 30 is not placed stably, the indicator lights emit red light, and at this time, the position of the wafer cassette 30 needs to be manually adjusted until the placement is stable.

In addition, in order to enable the carrier plate 2122b to extend into the lower side of the wafer cassette 30 so as to be able to scoop up the wafer cassette 30, as shown in fig. 14, a plurality of first supporting seats 213 are further provided at the operation station 211a of the manual operation table 211, which are spaced around the second axis 202 and are parallel to each other, wherein the first supporting seats 213 are used for supporting the wafer cassette 30, and the first supporting seats 213 protrude from the upper side surface of the manual operation table 211 such that when the wafer cassette 30 is placed on the first supporting seats 213, a first supporting gap is formed between the wafer cassette 30 and the upper side surface of the manual operation table 211 (i.e., between the wafer cassette 30 and the operation station 211 a) for accommodating a part or all of the area of the carrier plate 2122 b. When the loading plate 2122b is inserted into the first supporting gap, the loading plate 2122b is positioned under the wafer cassette 30 so that the wafer cassette 30 can be lifted upward.

In order to ensure that the wafer cassette 30 can be firmly and stably placed on the first support seats 213, a positioning member 214 (not shown in fig. 14) and/or a sensing element 215 may also be disposed on each first support seat 213, and the sensing elements 215 are also connected to the control unit in a communication manner, and likewise, when the wafer cassette 30 is placed at the operation station 211a and the sensing element 215 at the operation station is pressed at the same time, the pressed sensing element 215 can also be triggered, so as to send a signal to the control unit for indicating the placement state of the wafer cassette 30, so that the control unit can control the first conveying unit 210 to perform the next action, which is not described herein.

In addition, in order to distinguish between different wafer cassettes 30, a RFID (Radio Frequency Identification) identifier is further provided at the operation station 211a, and when the wafer cassette 30 is placed at the operation station 211a, the RFID identifier 216 can read the ID information of the wafer cassette 30 and report the ID information to the control system.

With continued reference to fig. 5, in one embodiment, the second conveying unit 220 includes a conveying table 221, the first station 221a and the second station 221b are disposed on an upper side of the conveying table 221, and the second conveying member 222 has a disc-shaped structure, which is movably connected to the conveying table 221 and can reciprocate relative to the conveying table 221 between the first station 221a and the second station 221b. Similarly, in order to transfer the wafer cassette 30 without using manpower, the second carrier 222 is rotatably and liftably connected to the conveyor 221 around its central axis, so that the second carrier 222 can rotate around its central axis with respect to the conveyor 221 and can lift with respect to the conveyor 221.

Similar to the first carrier 2122, as shown in fig. 15, in order to firmly fix the wafer cassette 30 on the second carrier 222 when the second carrier 222 carries the wafer cassette 30, a plurality of positioning members 214 are also disposed on the second carrier 222, the plurality of positioning members 214 are disposed at intervals around the central axis of the second carrier 222, and two or more sensor elements 215 are also disposed on the second carrier 222, and the control unit is communicatively connected to the second conveying unit 220, and the positioning members 214 and the sensor elements 215 have the same structure and function as the positioning members 214 and the sensor elements 215 on the carrier 2122b in the first carrier 2122.

Similarly, as shown in fig. 15 and 16, the first station 221a is provided with a plurality of second support seats 2211 spaced around the third axis 203, and the second station 221b is provided with a plurality of third support seats 2212 spaced around the fourth axis 204, as shown in fig. 16, the third axis 203 and the fourth axis 204 are parallel to the first axis 201, and the second support seats 2211 and 2212 respectively protrude from the upper surface of the conveyor 221, such that when the wafer cassette 30 is placed on the second support seats 2211, the bottom surface of the wafer cassette 30 and the upper surface of the conveyor 221 (i.e. between the wafer cassette 30 and the first station 221 a) form a second support gap, and when the wafer cassette 30 is placed on the third support seat 2, the bottom surface of the wafer cassette 30 and the upper surface of the conveyor 221 (i.e. the wafer cassette 30 and the second station 221 b) form a third support gap, and the same as the first support seats 213 respectively, and the second support gap are respectively formed for receiving the wafer cassette 30 and the second support gap 222 at the second station 222 and the upper surface of the second station 221 a. The second support 2211 and the third support 2212 are also respectively provided with a positioning element (not shown in fig. 15 and 16) and a sensing element 215, and the function and the working principle thereof are not described in detail herein.

Thus, when the wafer cassette 30 is placed in the first station 221a or the second station 221b, the second carrying member 222 can lift up the wafer cassette 30 and rotate the wafer cassette 30 by an angle so that the wafer cassette 30 can be transferred to the next station in the correct direction.

It should be noted that, the structure of the first carrier 2122 in the first conveying unit 210 and the structure of the second carrier 222 in the second conveying unit 220 are not limited to the structure described in the above embodiment, and the first carrier 2122 and/or the second carrier 222 may be a mechanical arm or a mechanical clamping jaw, as long as the wafer cassette 30 can be transferred between different stations, but the structure of the first carrier 2122 and the second carrier 222 can save the occupied space of the transfer conveying apparatus 200 to the greatest extent by adopting the structure of the above embodiment.

Further, in order to simultaneously store the wafer cassette 30 and retrieve the wafer cassette 30 at each of the manual windows 103, or to simultaneously store or retrieve the wafer cassettes 30 of different sizes at each of the manual windows 103, the plurality of operation stations 211a and the plurality of second conveying units 220 are provided in plural, and the plurality of operation stations 211a and the plurality of second conveying units 220 are alternately and alternately arranged with each other with the first axis 201 as a central axis. In a specific embodiment, as shown in fig. 5, the manual operation table 211 of the first conveying unit 210 has a semi-cylindrical structure, and two operation stations 211a are disposed on the manual operation table 211, where the two operation stations 211a are symmetrical to each other with a plane perpendicular to a line connecting the first station 221a and the second station 221a and passing through the first axis 201 as a symmetry plane, and the two second conveying units 220 are also symmetrical to each other with the above plane as a symmetry plane, and one of the first station 221a, one of the operation stations 211a, the other operation station 211a, and the other first station 221a are sequentially disposed at intervals in a circumferential direction around the first axis 201.

Thus, by the above arrangement, when two artificial windows 103 are opened at opposite sides of the storage body 100 in the width direction thereof, there are various access manners.

The first access mode is as follows: the two operation stations 211a on the manual operation table 211 in each first conveying unit 210 may be used for temporarily storing two kinds of wafer cassettes 30 (e.g. 10 inches and 12 inches), in which the transfer conveying device 200 corresponding to the manual window 103 on one side is configured to store two kinds of wafer cassettes 30 with different sizes, the transfer conveying device 200 corresponding to the manual window 103 on the other side is configured to take out two kinds of wafer cassettes 30 with different sizes, and in which the two kinds of wafer cassettes 30 with different sizes on one side may be disposed correspondingly or may be disposed in a staggered manner.

The second access mode is: the two operation stations 211a on the manual operation table 211 in each first conveying unit 210 may be used for temporarily storing the wafer cassettes 30 with two different sizes, but the transfer conveying device 200 corresponding to the manual window 103 on each side may be configured to store the wafer cassettes 30 with two different sizes in the storage body 100 or take out the wafer cassettes 30 with two different sizes from the storage body 100.

The third access mode is: in the first conveying unit 210 on one side, two operation stations 211a on the manual operation table 211 are used for temporarily storing the wafer cassette 30 with one size, and in the first conveying unit 210 on the other side, two operation stations 211a on the manual operation table 211 are used for temporarily storing the wafer cassette 30 with the other size, so that on this basis, the first conveying unit 210 on one side can be configured to store the wafer cassette 30 into the storage body 100, the first conveying unit 210 on the other side can be configured to take out the wafer cassette 30 from the storage body 100, or the first conveying unit 210 on each side can be configured to store the wafer cassette 30 into the storage body 100 or take out the wafer cassette 30 from the storage body 100.

The following describes the working procedure of the transfer and conveying apparatus 200 according to the present application, with reference to fig. 6, 14, 15 and 16, taking the first access mode as an example, where the two cases of storing the wafer cassette 30 and taking the wafer cassette 30 out are respectively described below:

1) Stored in the wafer cassette 30

In the first step, the worker places the wafer box 30 on the first supporting seat 213 corresponding to the operation station 211a in the first conveying unit 210, so that the positioning piece 214 on the first supporting seat 213 coincides with the groove on the bottom surface of the wafer box 30, if the sensing element 215 on the first supporting seat 213 is triggered at the same time, to indicate that the wafer box 30 is placed stably, the sensing element 215 sends a signal to the control unit, the control unit controls the indicator lamp on the table top of the manual operation table 211 to light up green light to indicate that the manual placement is completed, otherwise, the indicator lamp lights up red light, and the placement position of the wafer box 30 needs to be adjusted manually (the light source can be arranged on the table top of the manual operation table 211, or can be arranged on the 1/4 cylinder table where the table top is located, that is, the area of the table top can be displayed with light, or the whole 1/4 cylinder table can be arranged with light). The ID information of the wafer cassette 30 is then read using the RFID identifier 216 and reported to the control unit.

In a second step, the control unit issues a control command to control the first carrier 2122 to rotate to a corresponding angle capable of forking the wafer cassette 30, then drives the first carrier 2122 of the transfer mechanism 212 to extend until the positioning member 214 on the carrier 2122b of the first carrier 2122 coincides with the groove area on the bottom surface of the wafer cassette 30, after all the sensor elements 215 on the carrier 2122b are triggered simultaneously, the carrier 2122b withdraws the wafer cassette 30 to a position close to the first axis 201, then the carrier 2122b rotates the wafer cassette 30 to the first station 221a and causes the groove on the bottom surface of the wafer cassette 30 to coincide with the positioning member 214 on the second support 2211 on the first station 221a, and after triggering the corresponding sensor element 215 on the second support 2211, the first carrier 2122 descends a distance (which causes the positioning member 214 on the carrier 2122b to disengage from the groove on the bottom surface of the wafer cassette 30) so that the carrier 2122b of the first carrier 2122 can translate towards the first axis 2122 and again retract to the first station 201 to wait for the new position of the wafer cassette 30 to be retracted.

Third, after the wafer cassette 30 is placed on the second support seat 2211 located at the first station 221a, the second carrying member 222 is lifted upwards, and the positioning member 214 on the second carrying member 222 is matched with the groove on the bottom surface of the wafer cassette 30, the sensor 215 on the second carrying member 222 detects that the wafer cassette 30 is in smooth contact with the tray, the second carrying member 222 carries the wafer cassette 30 to further lift a certain distance, and the wafer carrying member 30 rotates a certain angle (e.g. 135 °) to the angle of the wafer cassette 30 shown in the figure, so that the manipulator of the stacker 130 can conveniently take the wafer cassette 30 in the subsequent station, and then the second carrying member 222 carries the wafer cassette 30 to the second station 221b.

Fourth, at the second station 221b, the second carrying member 222 carries the wafer cassette 30 down to a level with the third support 2212 on the second station 221b, and when the wafer cassette 30 is stably placed on the third support 2212, the second carrying member 222 continues to descend for a certain distance, so that the positioning member 214 on the second carrying member 222 is separated from the groove on the bottom surface of the wafer cassette 30, and then the second carrying member 222 returns horizontally to the first station 221a to wait for carrying a new wafer cassette 30 transferred from the operation station 211 a. The wafer cassette 30 at the second station 221b needs to wait for the stacker 130 to be further removed, and after the stacker 130 takes the wafer cassette 30 and places the wafer cassette 30 into the storage compartment 102 of the storage body 100, the storing operation of the wafer cassette 30 is completed.

2) The wafer cassette 30 is taken out

In the first step, the stacker 130 places the wafer cassette 30 to be taken out at the second station 221b of the second conveying unit 220, after the wafer cassette 30 is stably placed at the second station 221b, the second conveying member 222 is lifted upwards, and the wafer cassette 30 is lifted up by a certain height, so that the bottom of the wafer cassette 30 is higher than the positioning member 214 of the third support seat 2212 on the second station 221b, then the second conveying member 222 carries the wafer cassette 30 to reach the first station 221a, at this time, the second conveying member 222 rotates the wafer cassette 30 by a certain angle (for example, 135 ° to enable the first conveying member 2122 to conveniently take out the wafer cassette 30 in the subsequent step), then the second conveying member 222 descends and places the wafer cassette 30 on the second support seat 2211 of the first station 221a stably, and the sensing element 215 on the second support seat 2211 determines the stable state of the wafer cassette 30, if the wafer cassette 30 is placed stably, the sensing element 215 signals to the control unit, and the control unit further controls the first conveying member 2122 to take out the wafer cassette 30 to be placed on the first station 221 a.

In the second step, after the first carrying member 2122 of the transferring mechanism 212 performs the corresponding lifting and rotating actions, the carrying tray 2122b of the first carrying member 2122 is made to hold up the wafer box 30, the wafer box 30 is held up to a height higher than the positioning member 214 on the first station 221a, and after the wafer box 30 is rotated to reach the operating station 211a of the manual operating table 211 by a certain angle, the carrying tray 2122b drops the wafer box 30, and ensures that the groove at the bottom of the wafer box 30 coincides with the positioning member 214 of the operating station 211a on the manual operating table 211 and simultaneously triggers the sensing element 215, if the placement is stable, the control unit receives the signal of the sensing element 215, and meanwhile, the RFID identifier 216 reads the ID information of the wafer box 30 and the information of the wafer box 30 in the control unit for leaving the warehouse, so as to ensure that the wafer box 30 is the wafer box 30 to be delivered, and after all the wafer boxes 211 are normally turned green and clear on the operating station 211a manual operating station 211a, the wafer box 30 is taken away for further processing, if the information is not coincident, the condition is clear, the control unit receives the signal of the sensing element 215, and if the interference is required. Thereby completing the storing work of the wafer cassette 30.

Therefore, in the transfer and conveying device 200, the second conveying unit 220 is disposed in the storage body 100, and the first conveying unit 210 is at least partially disposed outside the storage body 100, so that the operation station 211a of the first conveying unit 210 for temporarily storing the wafer cassette 30 is located outside the storage body 100. Meanwhile, by arranging the first carrying member 2122 capable of rotating around the first axis 201 in the first carrying unit 210 and arranging the second carrying member 222 capable of moving to and from the first station 221a and the second station 221b in the second carrying unit 220, the wafer cassette 30 can be accurately carried by the first carrying member 2122 from the operation station 211a located outside the manual window 103 to the first station 221a located inside the manual window 103, then accurately carried by the second carrying member 222 from the first station 221a to the second station 221b, or transferred by the second carrying member 222 from the second station 221b to the first station 221a, and then transferred by the first carrying member 2122 from the first station 221a located inside the manual window 103 to the operation station 211a located outside the manual window 103, so that the wafer cassette 30 can be carried into the storage body 100 without hands or the wafer cassette 30 can be carried out from the storage body 100 with hands, thereby enabling a worker to store or take out the wafer cassette 30 more easily, and preventing the occurrence of uncontrolled access of the wafer cassette 30 from occurring in the process.

Finally, it should be noted that, in order to simplify the description, all possible combinations of the features of the above embodiments may be arbitrarily combined, however, as long as there is no contradiction between the combinations of the features, the description should be considered as the scope of the description.

The above examples illustrate only a few embodiments of the application, which are described in detail and are not to be construed as limiting the scope of the claims. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the application, which are all within the scope of the application. Accordingly, the scope of protection of the present application is to be determined by the appended claims.

Claims (10)

1. A transfer conveyor for transporting wafer cassettes between outside a wafer storage library and inside the wafer storage library, the transfer conveyor comprising:

a first conveying unit having at least one operation station for temporarily storing the wafer cassette, the first conveying unit including a first carrying member for conveying the wafer cassette, the first carrying member being rotatable about a first axis extending in a height direction thereof;

The first conveying unit is arranged adjacent to the first conveying unit, the second conveying unit is provided with a first station and a second station which are arranged at intervals, the first station and the operating station are arranged at intervals in the circumferential direction around the first axis, and the first conveying piece is used for conveying the wafer box between the operating station and the first station; the second conveying unit includes a second conveying member for conveying the wafer cassette, the second conveying member being capable of moving to and from the first station and the second station.

2. The transfer conveyor apparatus according to claim 1, wherein the first conveying unit includes a manual operation table and a transfer mechanism provided on one side of the manual operation table, the operation station being provided on the manual operation table; the transfer mechanism comprises a base, and the first carrying piece is movably connected with the base.

3. The transfer conveyor of claim 2, wherein the first handling member comprises a column, a carrier tray, and a safety top plate, the column being movably connected to the base, the carrier tray being fixedly disposed at a lower end of the column, for carrying the wafer cassette; the safe roof is fixed to be located the upper end of stand, bear the weight of the dish the stand with safe roof forms jointly and is used for holding the space that bears of wafer box.

4. The transfer conveyor of claim 2, wherein the transfer mechanism further comprises a lifting base, a rotating base, and a translating base, the lifting base being liftably connected to the base, the rotating base being rotatably connected to the lifting base and rotatable about the first axis, the translating base being fixedly connected to the rotating base, the first conveyance member being translatably disposed on the translating base.

5. The transfer conveyor of claim 1, wherein the second conveyor unit includes a conveyor table, the first station and the second station being disposed on the conveyor table, the second conveyance member being movably coupled to the conveyor table and being capable of reciprocating relative to the conveyor table between the first station and the second station; the second carrier member is also capable of being rotatably and liftably connected to the conveyor table about its central axis.

6. The transfer conveyor of claim 1, wherein the handling station is provided with a plurality of first support seats spaced about a second axis for supporting the wafer cassette such that a first support gap is formed between the wafer cassette and the handling station when the wafer cassette is carried on the first support seats, the first support gap being for receiving at least a portion of the first carrier to enable the first carrier to lift the wafer cassette upwardly at the handling station;

And/or the first station is provided with a plurality of second supporting seats which are arranged around a third axis at intervals, the second station is provided with a plurality of third supporting seats which are arranged around a fourth axis at intervals, the second supporting seats and the third supporting seats are used for supporting the wafer box, so that when the wafer box is borne on the second supporting seats and the third supporting seats, a second supporting gap is formed between the wafer box and the first station, and a third supporting gap is formed between the wafer box and the second station, and the second supporting gap and the third supporting gap are respectively used for accommodating at least part of the second carrying piece, so that the second carrying piece can respectively lift the wafer box at the first station and the second station upwards;

wherein the second, third and fourth axes are parallel to the first axis.

7. The transfer conveyor of claim 1, further comprising a control unit communicatively coupled to the first conveyor unit and the second conveyor unit simultaneously, the operating station, the first station, the second station, the first conveyance member, and the second conveyance member each having at least two sensing elements;

When the wafer box is placed on any one of the operation station, the first station, the second station, the first carrying piece and the second carrying piece, and the corresponding sensing element on any one is triggered at the same time, the triggered sensing element can send a signal representing the placement state of the wafer box to the control unit.

8. The transfer conveyor according to claim 1, wherein the plurality of operation stations and the plurality of second conveyor units are provided alternately and at intervals with the first axis as a central axis.

9. A wafer cassette storage library, comprising:

the storage library comprises a storage library body, a storage library and a storage library, wherein the storage library body is provided with at least one manual window communicated with the inside of the storage library body and the outside of the storage library body;

at least one transfer conveyor according to any one of claims 1-8, said transfer conveyor being arranged through a corresponding one of said artificial windows, said first conveyor unit being arranged in said storage body, said second conveyor unit being arranged at least partially outside said storage body, such that the operating station of said second conveyor unit is arranged outside said storage body.

10. The wafer cassette storage library of claim 9, wherein each of said manual windows comprises an input port and an output port; the input port is used for storing the wafer box into the storage library body, and the output port is used for outputting the wafer box from the storage library body;

each transferring and conveying device is provided with two operation stations and two second conveying units, wherein one operation station is arranged at the input port and positioned at the outer side of the storage warehouse body, the first station of one second conveying unit is arranged at the input port and positioned at the inner side of the storage warehouse body, the other operation station is arranged at the output port and positioned at the outer side of the storage warehouse body, and the first station of the other second conveying unit is arranged at the input port and positioned at the inner side of the storage warehouse body;

the two opposite sides of the storage body in the width direction of the storage body are respectively provided with one artificial window, wherein one artificial window is used for storing the wafer box into the storage body, and the other artificial window is used for outputting the wafer box from the storage body.