CN219549063U - Housing for a vacuum pump, vacuum pump and vacuum system - Google Patents
Housing for a vacuum pump, vacuum pump and vacuum system Download PDFInfo
- Publication number
- CN219549063U CN219549063U CN202190000290.3U CN202190000290U CN219549063U CN 219549063 U CN219549063 U CN 219549063U CN 202190000290 U CN202190000290 U CN 202190000290U CN 219549063 U CN219549063 U CN 219549063U
- Authority
- CN
- China
- Prior art keywords
- vacuum pump
- vacuum
- housing
- pump
- flange
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/12—Casings; Cylinders; Cylinder heads; Fluid connections
- F04B39/121—Casings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/12—Casings; Cylinders; Cylinder heads; Fluid connections
- F04B39/123—Fluid connections
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
The utility model provides a housing for a vacuum pump, in particular a NEG or IGP-NEG combination, comprising: a body defining an interior space to house the vacuum pump, wherein a first flange is connected to the housing, the first flange including an opening to connect the vacuum pump to a container; and a second flange connected to the housing for connecting the housing to an additional vacuum pump at least during regeneration. Further, a movable shielding element is used, which is movable from a first position, in which the opening of the first flange is not obstructed, to a second position, in which the opening is obstructed.
Description
Technical Field
The object of the utility model is a housing for a vacuum pump, and in particular for a non-evaporable getter pump (NEG) or an Ion Getter Pump (IGP) -NEG combination, a vacuum pump having such a housing and a vacuum system having such a vacuum pump.
Background
In many industrial and scientific instruments and systems, it is desirable to have less than 10 -7 Ultra-high vacuum at millibar pressure. In order to create such a vacuum in a vacuum device, it is known to use a combination of different pump types. Thus, the main pump or backing pump is used to generate the flow from the last 10 -1 Millibars to 10 -3 The pressure of mbar acts as a low vacuum. Typically, the main or backing pump is combined with another vacuum pump to create a high vacuum or even includes less than 10 -7 Ultra-high vacuum at millibar pressure. The ultra-high vacuum pump includes an absorption pump to generate a desired pressure. Such absorption pumps include Ion Getter Pumps (IGP) and volumetric getter pumps, i.e. evaporable getter material pumps (NEG). Both types of pumps comprise a getter material, wherein for example during operation of the NEG, and molecules and gas particles from the container of the vacuum device are bound to the surface of the NEG material and thus no longer participate in the pressure inside the vacuum device. As a result of this deposition, the active surface of NEG material contributing to the pumping performance of NEG pumps is reduced. If the active surface of NEG is notAgain, NEG pump performance goes to zero and NEG pump must be regenerated. Regeneration of the getter material is typically performed by heating the getter material. In which a portion of the combined molecules and gas particles are released during the regeneration process and must be removed from the vacuum device by an additional vacuum pump. In particular, during regeneration of the getter material, the molecules and the gas particles released from the getter material may damage the pressure inside the container of the vacuum device. Thus, the pressure increases, which is not desirable. It is therefore well known to include a valve between the vacuum pump and the vessel to separate the vacuum pump from the vessel of the vacuum apparatus during regeneration of NEG material. However, due to this valve, the distance between the vacuum pump and the container increases, thereby decreasing the conductivity of the connection and thus decreasing the pump performance of the vacuum pump, because in the molecular regime the probability of molecules or gas particles entering the vacuum pump is decreased due to the low conductivity.
US 2017/276129 describes a cryopump gas volume estimation apparatus including a cryopump having a gate valve to close the inlet of the cryopump gas inlet.
US 6,186,749 describes a molecular drag pump comprising a rotor housed inside a casing having a suction inlet and a delivery outlet, the pump being associated at its inlet with a valve comprising a valve mechanism inside a valve envelope integral with the casing.
Disclosure of Invention
The object of the present utility model is to provide a housing for a vacuum pump as follows: which improves the conductivity of the vacuum pump and avoids damage to the vacuum inside the container during regeneration of the vacuum pump.
The solution of a given procedure is provided by a housing according to the utility model, a vacuum pump according to the utility model and a vacuum system according to the utility model.
A housing for a vacuum pump, in particular for a NEG or IGP, according to the utility model comprises a body defining an internal space to house said vacuum pump. In particular, the interior space comprises NEG material or NEG or IGP iron getter material, respectively. Further, a first flange is connected to the housing, the first flange including an opening to connect the vacuum pump to a container. Thus, molecules or gas particles from the container may enter the interior space through the opening and then interact with the vacuum pump in the interior space. Further, the body includes a second flange to connect the housing to an additional vacuum pump at least during regeneration. Thus, the second flange may be connected to another vacuum pump only during regeneration in order to pump gas particles and molecules released during the regeneration process, or alternatively, the second flange is used to connect the housing to a backing pump during operation.
According to the utility model, a movable shielding element is used, wherein the shielding element is movable from a first position, in which the opening of the first flange is not obstructed, to a second position, in which the opening is blocked and preferably completely blocked. In particular, the shielding element is arranged inside the inner space and, if in the second position, in front of the opening of the first flange. By means of the shielding element, the conductivity between the vacuum pump and the container is significantly reduced. Thus, during regeneration of the NEG, the shielding element moves into the second position. Due to the low conductivity, molecules or gas particles released from the vacuum pump during regeneration cannot reenter the container and compromise the vacuum inside the container. The gas particles or molecules are more likely to be pumped by the additional vacuum pump connected to the second flange and are more likely.
Preferably, no valve is arranged at the first flange, preferably between the vacuum pump and the container, or no valve is incorporated between the body and the flange. Thanks to the shielding element, the housing for the vacuum pump may be directly connected to the container in order to enhance and improve the conductivity during operation with the shielding element in the first position. No additional components need to be employed between the vacuum pump and the container.
Preferably, the shielding element is a sheet element which can be easily manufactured, wherein the requirements on the shielding element are low, since the shielding element does not need to be completely sealed.
Preferably, the shielding element is guided by a guide rail or track to be movable from the first position to the second position.
Preferably, the shielding element does not comprise a sealing elastomer or the like in order to provide a vacuum tight seal. The object of the utility model is to avoid damage to the vacuum in the container during regeneration of the vacuum pump by means of a shielding element, only the conductivity between the vacuum pump and the container needs to be reduced, since the vacuum pump and the container are in a molecular regime. A complete seal between the interior space of the housing and the container of the vacuum device is neither necessary nor necessary.
Preferably, the shielding element comprises a magnetic element, or alternatively, the shielding element itself may be magnetic and made of a magnetic material. The magnetic element is connected with a magnetic handle outside the body of the housing so as to transmit the movement of the magnetic handle to the shielding element. Thus, by means of the magnetic handle, the shielding element can be moved from the first position to the second position inside the interior space. There is no need to provide any mechanical feed-through contact between the handle and the shielding element outside the body, which would lead to leakage and would require additional effort to seal the movable part. Thus, the magnetic shielding element itself can be moved in a simple manner to control the position of the shielding element due to the magnetic attraction between the magnetic handle and the magnetic element of the shielding element.
Further, the utility model relates to a vacuum pump in a housing as previously described, comprising NEG and/or IGP vacuum pumps.
Further, the utility model relates to a vacuum system comprising a vacuum pump as described previously and a vacuum vessel, wherein the vessel is directly connected to the vacuum pump. In particular, in order to enhance the conductivity between the container and the vacuum pump, no valve is provided between the vacuum pump and the valve.
Drawings
Hereinafter, the present utility model is described in more detail with reference to the embodiments shown in the drawings.
Fig. 1 shows:
embodiments of the housing according to the utility model.
Detailed Description
Said fig. 1 shows a housing according to the utility model comprising a body 10 defining an interior space 12, wherein a vacuum pump (not shown) is arranged in the interior space 12. Further, a first flange 14 is connected to the body 10, wherein a vacuum chamber or container may be connected to the first flange 14. Further, the body comprises a second flange 16 connected to the housing, wherein another vacuum pump may be connected to the second flange 16 as a backing pump or vacuum pump to pump gas particles and molecules released during the regeneration process of the vacuum pump inside the housing. Preferably, the vacuum pump inside the housing is IGP or NEG.
Further, the housing comprises a shielding element 18, the shielding element 18 being movable from a first position as shown in the figures to a second position in front of the opening 20 of the first flange 14. In which the shielding element 18 is guided by a guide rail 22. If the shielding element 18 is in the second position in front of the opening 20 of the first flange 14, a direct path between the container connected to the first flange 14 and the inner space 12 of the housing is blocked. During regeneration of the vacuum pump inside the housing, gas particles or molecules released from the vacuum pump are more likely to leave the interior space 12 through the openings 24 of the second flange 16 than through the openings 20 of the first flange 14. If the opening 20 of the first flange 14 is shielded by the shielding element 18, the shielding element 18 reduces the conductivity between the interior space 12 and the container connected to the first flange 14. The housing of the vacuum pump, the flanges 14, 16 and the flow of gas particles and molecules inside the container are in a molecular flow regime. Thus, the shielding element 18 does not need to completely seal the interior space 12 of the housing from the vacuum vessel. Instead, the shielding element only reasonably reduces the conductivity between the interior space 12 and the container, and more likely, the gas particles and molecules leave the interior space 12 through the opening 24 of the second flange 16 rather than returning to the container connected to the first flange 14, thereby compromising the vacuum inside. Thus, the shielding element constructed as a shielding metal element neither includes a seal nor requires a gapless design to provide a leak-free configuration.
The shield 18 is connected to a magnetic element 26 disposed within the interior space 12 of the housing. The magnetic element 26 is connected to a magnetic handle 28 that is external to the housing and magnetically connected to the magnetic element 26 such that movement of the magnetic handle 28 is transferred to the magnetic element 26 and thereby to the shielding element 18. Thus, by moving the magnetic handle 28 outside the housing, the shielding element 18 can be moved from the first position to the second position. No mechanical feed-through is required for moving the shielding element 18. In particular, the body of the housing is made of a non-magnetic material to allow magnetic coupling of the magnetic handle 28 to the magnetic element 26.
With the present design of the housing, the vacuum pump inside the interior space 12 of the housing can be placed in close proximity to the vacuum vessel connected to the first flange 14. In order to separate the inner space 12 from the vacuum vessel to avoid damage to the vacuum inside the vacuum vessel during regeneration of the vacuum pump, no additional valve needs to be placed between the first flange 14 and the vacuum vessel. Thus, conductivity is enhanced, thereby enhancing pump performance of the vacuum pump inside the housing.
Claims (8)
1. A housing for a vacuum pump, comprising:
a body (10) defining an interior space (12) for accommodating the vacuum pump,
a first flange (14) connected to the body (10) and comprising an opening (20) to connect the vacuum pump to a container, and
a second flange (16) connected to the body (10) to connect the housing to an additional vacuum pump at least during regeneration,
it is characterized in that the method comprises the steps of,
a movable shielding element (18) arranged inside the inner space (12) of the body and movable from a first position, in which the opening of the first flange (14) is not obstructed, to a second position, in which the opening (20) is blocked but does not completely seal the inner space (12) from the container.
2. The housing according to claim 1, characterized in that no valve is arranged at the first flange (14).
3. The housing according to claim 1 or 2, characterized in that the shielding element (18) comprises a magnetic element (26), the magnetic element (26) being connected with a magnetic handle (28) outside the body (10) to transfer the movement of the magnetic handle (28) to the shielding element (18).
4. The housing according to claim 1 or 2, wherein the shielding element is a sheet metal element.
5. The housing according to claim 1 or 2, wherein the shielding element does not comprise a seal.
6. The housing according to claim 1 or 2, characterized in that the vacuum pump is a non-evaporable getter pump (NEG) or an Ion Getter Pump (IGP) -non-evaporable getter pump (NEG) combination.
7. Vacuum pump, characterized in that it comprises a non-evaporable getter pump (NEG) element and/or an Ion Getter Pump (IGP) element and a housing according to any of claims 1 to 6.
8. A vacuum system, characterized in that it comprises a vacuum pump according to claim 7 and a vacuum vessel directly connected to the vacuum pump.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB2001783.6 | 2020-02-10 | ||
| GB2001783.6A GB2591814A (en) | 2020-02-10 | 2020-02-10 | Housing for a vacuum pump |
| PCT/IB2021/051079 WO2021161188A1 (en) | 2020-02-10 | 2021-02-10 | Housing for a vacuum pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219549063U true CN219549063U (en) | 2023-08-18 |
Family
ID=69897038
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202190000290.3U Active CN219549063U (en) | 2020-02-10 | 2021-02-10 | Housing for a vacuum pump, vacuum pump and vacuum system |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20230070087A1 (en) |
| EP (1) | EP4103838A1 (en) |
| JP (1) | JP3240566U (en) |
| CN (1) | CN219549063U (en) |
| GB (1) | GB2591814A (en) |
| WO (1) | WO2021161188A1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2592653B (en) * | 2020-03-05 | 2022-12-28 | Edwards Vacuum Llc | Vacuum module and vacuum apparatus and method for regeneration of a volume getter vacuum pump |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH582842A5 (en) * | 1974-07-15 | 1976-12-15 | Vat Ag | |
| EP0681130B1 (en) * | 1994-05-02 | 1999-07-07 | Korea Atomic Energy Research Institute | Valve having magnetic force transmission apparatus |
| US6217278B1 (en) * | 1997-07-25 | 2001-04-17 | Ebara Corporation | Turbomolecular pump |
| FR2776029B1 (en) * | 1998-03-16 | 2000-06-23 | Alsthom Cge Alcatel | TURBOMOLECULAR PUMP |
| JP3667202B2 (en) * | 2000-07-13 | 2005-07-06 | 株式会社荏原製作所 | Substrate processing equipment |
| JP4751635B2 (en) * | 2005-04-13 | 2011-08-17 | 株式会社日立ハイテクノロジーズ | Magnetic field superposition type electron gun |
| ITMI20090402A1 (en) * | 2009-03-17 | 2010-09-18 | Getters Spa | COMBINED PUMPING SYSTEM INCLUDING A GETTER PUMP AND A ION PUMP |
| DE102012105951A1 (en) * | 2012-03-30 | 2013-10-02 | Pfeiffer Vacuum Gmbh | Pump system for evacuating gas from a plurality of chambers and methods for controlling the pump system |
| JP6528041B2 (en) * | 2015-02-06 | 2019-06-12 | 日本電子株式会社 | NMR probe |
| JP6615663B2 (en) * | 2016-03-22 | 2019-12-04 | 住友重機械工業株式会社 | Cryopump, cryopump occluded gas amount estimation device, and cryopump occluded gas amount estimation method |
| WO2018097325A1 (en) * | 2016-11-28 | 2018-05-31 | 大学共同利用機関法人高エネルギー加速器研究機構 | Non-evaporative getter-coated component, container, manufacturing method, and apparatus |
| US10704715B2 (en) * | 2017-05-29 | 2020-07-07 | Shimadzu Corporation | Vacuum pumping device, vacuum pump, and vacuum valve |
-
2020
- 2020-02-10 GB GB2001783.6A patent/GB2591814A/en active Pending
-
2021
- 2021-02-10 US US17/760,336 patent/US20230070087A1/en active Pending
- 2021-02-10 JP JP2022600119U patent/JP3240566U/en active Active
- 2021-02-10 CN CN202190000290.3U patent/CN219549063U/en active Active
- 2021-02-10 EP EP21705274.5A patent/EP4103838A1/en active Pending
- 2021-02-10 WO PCT/IB2021/051079 patent/WO2021161188A1/en active Application Filing
Also Published As
| Publication number | Publication date |
|---|---|
| US20230070087A1 (en) | 2023-03-09 |
| JP3240566U (en) | 2023-01-19 |
| GB202001783D0 (en) | 2020-03-25 |
| EP4103838A1 (en) | 2022-12-21 |
| WO2021161188A1 (en) | 2021-08-19 |
| GB2591814A (en) | 2021-08-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |