GB202001783D0 - Housing for a vacuum pump - Google Patents

Housing for a vacuum pump

Info

Publication number
GB202001783D0
GB202001783D0 GBGB2001783.6A GB202001783A GB202001783D0 GB 202001783 D0 GB202001783 D0 GB 202001783D0 GB 202001783 A GB202001783 A GB 202001783A GB 202001783 D0 GB202001783 D0 GB 202001783D0
Authority
GB
United Kingdom
Prior art keywords
housing
vacuum pump
vacuum
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GBGB2001783.6A
Other versions
GB2591814A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Vacuum LLC
Original Assignee
Edwards Vacuum LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Vacuum LLC filed Critical Edwards Vacuum LLC
Priority to GB2001783.6A priority Critical patent/GB2591814A/en
Publication of GB202001783D0 publication Critical patent/GB202001783D0/en
Priority to US17/760,336 priority patent/US20230070087A1/en
Priority to EP21705274.5A priority patent/EP4103838A1/en
Priority to JP2022600119U priority patent/JP3240566U/en
Priority to CN202190000290.3U priority patent/CN219549063U/en
Priority to PCT/IB2021/051079 priority patent/WO2021161188A1/en
Publication of GB2591814A publication Critical patent/GB2591814A/en
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/12—Casings; Cylinders; Cylinder heads; Fluid connections
    • F04B39/121—Casings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/12—Casings; Cylinders; Cylinder heads; Fluid connections
    • F04B39/123—Fluid connections
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
GB2001783.6A 2020-02-10 2020-02-10 Housing for a vacuum pump Pending GB2591814A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
GB2001783.6A GB2591814A (en) 2020-02-10 2020-02-10 Housing for a vacuum pump
US17/760,336 US20230070087A1 (en) 2020-02-10 2021-02-10 Housing for a vacuum pump
EP21705274.5A EP4103838A1 (en) 2020-02-10 2021-02-10 Housing for a vacuum pump
JP2022600119U JP3240566U (en) 2020-02-10 2021-02-10 housing for vacuum pump
CN202190000290.3U CN219549063U (en) 2020-02-10 2021-02-10 Housing for a vacuum pump, vacuum pump and vacuum system
PCT/IB2021/051079 WO2021161188A1 (en) 2020-02-10 2021-02-10 Housing for a vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2001783.6A GB2591814A (en) 2020-02-10 2020-02-10 Housing for a vacuum pump

Publications (2)

Publication Number Publication Date
GB202001783D0 true GB202001783D0 (en) 2020-03-25
GB2591814A GB2591814A (en) 2021-08-11

Family

ID=69897038

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2001783.6A Pending GB2591814A (en) 2020-02-10 2020-02-10 Housing for a vacuum pump

Country Status (6)

Country Link
US (1) US20230070087A1 (en)
EP (1) EP4103838A1 (en)
JP (1) JP3240566U (en)
CN (1) CN219549063U (en)
GB (1) GB2591814A (en)
WO (1) WO2021161188A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2592653B (en) * 2020-03-05 2022-12-28 Edwards Vacuum Llc Vacuum module and vacuum apparatus and method for regeneration of a volume getter vacuum pump

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH582842A5 (en) * 1974-07-15 1976-12-15 Vat Ag
EP0681130B1 (en) * 1994-05-02 1999-07-07 Korea Atomic Energy Research Institute Valve having magnetic force transmission apparatus
US6217278B1 (en) * 1997-07-25 2001-04-17 Ebara Corporation Turbomolecular pump
FR2776029B1 (en) * 1998-03-16 2000-06-23 Alsthom Cge Alcatel TURBOMOLECULAR PUMP
JP3667202B2 (en) * 2000-07-13 2005-07-06 株式会社荏原製作所 Substrate processing equipment
JP4751635B2 (en) * 2005-04-13 2011-08-17 株式会社日立ハイテクノロジーズ Magnetic field superposition type electron gun
ITMI20090402A1 (en) * 2009-03-17 2010-09-18 Getters Spa COMBINED PUMPING SYSTEM INCLUDING A GETTER PUMP AND A ION PUMP
DE102012105951A1 (en) * 2012-03-30 2013-10-02 Pfeiffer Vacuum Gmbh Pump system for evacuating gas from a plurality of chambers and methods for controlling the pump system
JP6528041B2 (en) * 2015-02-06 2019-06-12 日本電子株式会社 NMR probe
JP6615663B2 (en) * 2016-03-22 2019-12-04 住友重機械工業株式会社 Cryopump, cryopump occluded gas amount estimation device, and cryopump occluded gas amount estimation method
WO2018097325A1 (en) * 2016-11-28 2018-05-31 大学共同利用機関法人高エネルギー加速器研究機構 Non-evaporative getter-coated component, container, manufacturing method, and apparatus
US10704715B2 (en) * 2017-05-29 2020-07-07 Shimadzu Corporation Vacuum pumping device, vacuum pump, and vacuum valve

Also Published As

Publication number Publication date
US20230070087A1 (en) 2023-03-09
JP3240566U (en) 2023-01-19
CN219549063U (en) 2023-08-18
EP4103838A1 (en) 2022-12-21
WO2021161188A1 (en) 2021-08-19
GB2591814A (en) 2021-08-11

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