CN207137551U - Ion gun cavity vacuumizes the special discharge filter of backing pump - Google Patents
Ion gun cavity vacuumizes the special discharge filter of backing pump Download PDFInfo
- Publication number
- CN207137551U CN207137551U CN201721039592.3U CN201721039592U CN207137551U CN 207137551 U CN207137551 U CN 207137551U CN 201721039592 U CN201721039592 U CN 201721039592U CN 207137551 U CN207137551 U CN 207137551U
- Authority
- CN
- China
- Prior art keywords
- filter
- pipe plug
- filter core
- ion gun
- backing pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
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- Filtering Materials (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
The utility model discloses the special discharge filter that a kind of ion gun cavity vacuumizes backing pump, including filter body, filter body includes cartridge filter, sealed set has left pipe plug and right-hand member to block up to the barrel shell left-hand cylinder mouth and right nozzle of cartridge filter respectively, the right side of left pipe plug and the left side of right pipe plug are boss structure, and the external diameter of boss is less than the filter core internal diameter of cartridge filter；The two-port difference sealing shroud of filter core is mounted in corresponding boss outer peripheral face, and discharge chamber is formed between the outer peripheral face of filter core and the barrel shell inner peripheral surface；The intracavity inter-connection of air inlet and exhaust outlet, air inlet and filter core is offered on left pipe plug, exhaust outlet is connected with the discharge chamber.The utility model can effectively filter out the greasy dirt and bioclastic that ion gun cavity vacuumizes backing pump discharge, avoid the pollution to surrounding environment, while be greatly reduced noise caused by primary pump work.
Description
Technical field
Matrix Assisted Laser Desorption ion gun is the utility model is related to, backing pump is vacuumized more particularly, to ion gun cavity
Special discharge filter.
Background technology
Ion source sample could will make to be in high vacuum state in cavity, then under vacuum cavity environment by laser ionization
Need mechanical pump (backing pump) and turbomolecular pump（Secondary pumps）The common high vacuum for extracting, ion gun cavity could being formed of series connection
Environment, vacuum are about 10-7Mbar levels.But backing pump is mechanical pump（Rotary-vane vaccum pump）, can be produced in its exhaust ports
Greasy dirt, while ion gun can produce some bioclastics when being parsed in the presence of laser ionization, these bioclastics lead to
Cross molecular pump to be drawn to exhaust outlet by mechanical pump again and discharge, the bioclastic of discharge will cause the environment of surrounding certain
Harm.
The content of the invention
The utility model purpose is that providing the ion gun cavity that a kind of sealing is tight, filtering accuracy is high vacuumizes backing pump
Special discharge filter.
To achieve the above object, the utility model takes following technical proposals：
Ion gun cavity described in the utility model vacuumizes the special discharge filter of backing pump, including filter body,
The filter body includes cartridge filter, the barrel shell left-hand cylinder mouth and right nozzle of the cartridge filter respectively sealed set have left pipe plug and
Right-hand member blocks up, and the right side of the left pipe plug and the left side of right pipe plug are boss structure, and the external diameter of the boss is less than described
The filter core internal diameter of cartridge filter；The two-port difference sealing shroud of the filter core is mounted in corresponding boss outer peripheral face, the outer peripheral face of filter core
Discharge chamber is formed between the barrel shell inner peripheral surface；Air inlet and exhaust outlet, the air inlet and filter core are offered on left pipe plug
Intracavity inter-connection, the exhaust outlet is connected with the discharge chamber.
The drain outlet with the filter core intracavity inter-connection, the sewage draining exit of the drain outlet are offered on the right pipe plug
Place's sealing is bolted with blowdown bolt.
The fiber aperture of the filter core is 0.01um.
The utility model advantage is that greasy dirt and biology that ion gun cavity vacuumizes backing pump discharge can be effectively filtered out
Fragment, the pollution to surrounding environment is avoided, while be greatly reduced noise caused by primary pump work.This practicality simultaneously
New structure is simple, small volume, good seal；Accumbency mounting means is taken not increase the height of backing pump in the vertical direction
Degree, overall visual effect are preferable.
Brief description of the drawings
Fig. 1 is front view of the present utility model.
Fig. 2 is Fig. 1 A-A to cross section structure diagram.
Fig. 3 is the schematic diagram that the utility model is assemblied on mechanical pump.
Embodiment
Embodiments of the invention are elaborated below in conjunction with the accompanying drawings, the present embodiment using technical solution of the present invention before
Put and implemented, give detailed embodiment and specific operating process, but protection scope of the present invention is not limited to down
State embodiment.
As shown in Figure 1, 2, ion gun cavity described in the utility model vacuumizes the special discharge filter of backing pump, including
Filter body, filter body include cartridge filter, and the left-hand cylinder mouth of barrel shell 1 of cartridge filter and right nozzle seal be threaded with respectively
Left pipe plug 2 and right-hand member stifled 3, the right side of left pipe plug 2 and the left side of right pipe plug 3 are boss 4,5 structures, two boss 4,5
External diameter is less than the internal diameter of cartridge filter filter core 6, and the fiber aperture of filter core 6 is 0.01um；The two-port of filter core 6 is distinguished sealing shroud and is mounted in
Corresponding boss 4,5 outer peripheral faces, discharge chamber 7 is formed between the outer peripheral face and the inner peripheral surface of barrel shell 1 of filter core 6；Offered on left pipe plug 2
Air inlet 8 and exhaust outlet 9, air inlet 8 are connected for NPT taper threads hole and with filter core inner chamber 10, exhaust outlet 9 and the phase of discharge chamber 7
Connection；The drain outlet 11 being connected with filter core inner chamber 10 is offered on right pipe plug 3, spiral shell is sealed at the sewage draining exit of drain outlet 11
It is connected to blowdown bolt 12.
As shown in figure 3, in use, discharge filter accumbency is arranged on backing pump 13, air inlet 8 turns 3/ by KF25
4NPT crossover subs 14 are connected with the exhaust outlet of backing pump 13, and are fixed by KF25 clips 15.
As shown in Fig. 2 when filter body integrally assembles, barrel shell 1 is set to be in light by screwing left pipe plug 2 and right-hand member stifled 3
Micro- radial compression, so, the air-tight manner of sealing ring 16 seal for wall, and sealing ring 16 is also compression shape when being linked and packed
State, so as to ensure that the sealing inside the high-accuracy filter core 6 of filter body.The outer peripheral face of right-hand member stifled 3 is handled by annular knurl,
Can increasing friction force when mounted, be easy to assembly crewman to install.The fiber aperture of filter core 6 is 0.01um, can efficiently be filtered out
Greasy dirt and bioclastic, the blowdown bolt 12 that right-hand member is blocked up on 3 are used for discharging the greasy dirt for being deposited in the high-accuracy inner chamber of filter core 6 for a long time,
It is easy to attendant to clear up.
In the description of the invention, it is necessary to explanation, the orientation of instruction such as term "left", "right", " interior ", " outer " or
Position relationship is to be based on orientation shown in the drawings or position relationship, is for only for ease of the description present invention and simplifies description, without
It is instruction or implies that signified device or element there must be specific orientation, with specific azimuth configuration and operation, therefore not
It is understood that as limitation of the present invention.
Claims (3)
1. a kind of ion gun cavity vacuumizes the special discharge filter of backing pump, including filter body, it is characterised in that：Institute
Stating filter body includes cartridge filter, and sealed set has left pipe plug and the right side respectively for the barrel shell left-hand cylinder mouth and right nozzle of the cartridge filter
End is stifled, and the right side of the left pipe plug and the left side of right pipe plug are boss structure, and the external diameter of the boss is less than the mistake
The filter core internal diameter of filter cylinder；The two-port difference sealing shroud of the filter core is mounted in corresponding boss outer peripheral face, the outer peripheral face of filter core with
Discharge chamber is formed between the barrel shell inner peripheral surface；Air inlet and exhaust outlet are offered on left pipe plug, the air inlet and filter core
Intracavity inter-connection, the exhaust outlet are connected with the discharge chamber.
2. ion gun cavity vacuumizes the special discharge filter of backing pump according to claim 1, it is characterised in that：It is described
The drain outlet with the filter core intracavity inter-connection is offered on right pipe plug, seals and is bolted with the sewage draining exit of the drain outlet
Blowdown bolt.
3. ion gun cavity according to claim 1 or claim 2 vacuumizes the special discharge filter of backing pump, it is characterised in that：
The fiber aperture of the filter core is 0.01um.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721039592.3U CN207137551U (en) | 2017-08-18 | 2017-08-18 | Ion gun cavity vacuumizes the special discharge filter of backing pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721039592.3U CN207137551U (en) | 2017-08-18 | 2017-08-18 | Ion gun cavity vacuumizes the special discharge filter of backing pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207137551U true CN207137551U (en) | 2018-03-27 |
Family
ID=61666865
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721039592.3U Withdrawn - After Issue CN207137551U (en) | 2017-08-18 | 2017-08-18 | Ion gun cavity vacuumizes the special discharge filter of backing pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207137551U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110368753A (en) * | 2019-07-30 | 2019-10-25 | 无锡雷德环保设备有限公司 | A kind of abnormity high efficient horizontal steam isolating device |
-
2017
- 2017-08-18 CN CN201721039592.3U patent/CN207137551U/en not_active Withdrawn - After Issue
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110368753A (en) * | 2019-07-30 | 2019-10-25 | 无锡雷德环保设备有限公司 | A kind of abnormity high efficient horizontal steam isolating device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20180327 Effective date of abandoning: 20180403 |