CN219418965U - Blowing and sucking device - Google Patents
Blowing and sucking device Download PDFInfo
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- CN219418965U CN219418965U CN202320053945.4U CN202320053945U CN219418965U CN 219418965 U CN219418965 U CN 219418965U CN 202320053945 U CN202320053945 U CN 202320053945U CN 219418965 U CN219418965 U CN 219418965U
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- blowing
- probe sleeve
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Abstract
The utility model discloses a blowing and sucking device, which comprises: the first plate is connected with the second plate, the second plate is connected with the third plate, the fourth plate is arranged at one end of the third plate, and the fourth plate and the third plate are arranged in a laminated manner; the third plate is provided with a first threaded hole for installing a first air pipe joint, the axis of the first threaded hole is arranged along the X direction, an air hole is further formed in the third plate, a cylindrical hole and a first probe sleeve hole, the axis of which is arranged along the Z direction, are further formed in the third plate, the first probe sleeve hole penetrates through the third plate, the cylindrical hole penetrates through the third plate, and the air hole is connected with the first threaded hole and the cylindrical hole; the fourth plate is provided with a second threaded hole for installing a second air pipe joint, a second probe sleeve hole is further formed in the fourth plate and is connected with the first probe sleeve hole, the second threaded hole penetrates through the fourth plate, and the second probe sleeve hole penetrates through the fourth plate. The blowing and sucking device can achieve the effect of dust prevention and dust removal of crystal oscillator products, and further reduces the bad duty ratio caused by dust.
Description
Technical Field
The utility model relates to the technical field of wafer production equipment, in particular to a blowing and sucking device.
Background
In the prior art, when the crystal oscillator product (wafer) is produced, the purification degree of a production workshop is inevitably provided with point flaws, which has great influence on the quality inspection of the crystal oscillator product, in the statistics of defective products, poor duty ratio is large due to dust reasons, but in actual production, direct contact between the crystal oscillator product and air is avoided, for example, in the process of dispensing, when a base is adsorbed on a dispensing disc, the disc is fully contacted with air in the rotating process, so that dust is caused, and the problem of large defective duty ratio is not solved for a long time.
Disclosure of Invention
In view of the foregoing problems in the prior art, it is an object of the present utility model to provide a blowing and sucking device.
The specific technical scheme is as follows:
a blowing and sucking device, which mainly comprises: a first plate, a second plate, a third plate, and a fourth plate;
the first plate is arranged along the Z direction, the second plate is arranged along the Y direction, the third plate is arranged along the X direction, the first plate is connected with the second plate, one end of the second plate, which is far away from the first plate, is connected with the third plate, the fourth plate is arranged at one end of the third plate, which is far away from the second plate, and the fourth plate and the third plate are stacked along the Z direction;
the first probe sleeve hole penetrates through the third plate, the cylindrical hole penetrates through the third plate, and the air hole is connected with the first threaded hole and the cylindrical hole;
the utility model discloses a gas pipe joint, including fourth board, cylinder hole, second probe trepanning, first probe trepanning, second board is last to be provided with the second screw hole that is used for installing second gas pipe joint, the axis of second screw hole sets up along the Z direction, still be provided with the second probe trepanning in the fourth board, the second probe trepanning with first probe trepanning is joined, wherein, the second screw hole runs through the fourth board, the second probe trepanning runs through the fourth board, wherein, first probe trepanning the cylinder hole the equal axis collineation of second screw hole and second probe trepanning sets up.
In the above-mentioned air blowing and sucking device, the second probe sleeve hole, the first probe sleeve hole and the cylindrical hole are internally provided with a probe sleeve, and the probe sleeve extends into the cylindrical hole from the second probe sleeve hole.
In the above-mentioned air blowing and sucking device, the joint of the first probe sleeve hole and the second probe sleeve hole is provided with a sealing ring.
In the above-mentioned air blowing and sucking device, the diameter of the first probe sleeve hole is smaller than the diameter of the cylindrical hole, the diameter of the air hole is smaller than the diameter of the first threaded hole, and the diameter of the air hole is smaller than the diameter of the cylindrical hole.
In the above-described air blowing and sucking device, the fourth plate and the third plate may be connected by a fastener having an axis disposed in the Z direction.
In one embodiment, the air blower is further characterized in that the fastening member is provided with at least two fastening members respectively provided on opposite sides of the second probe pocket hole on the fourth plate.
In the above-mentioned air blowing and sucking device, still have such characteristic, the second board orientation the one end of first board is provided with the first waist hole that the axis set up along the X direction, the corresponding side of first board is provided with first hole, first board with the second board passes through first connecting piece and is connected, just first board can be relative the second board is along X direction removal, first connecting piece wears to locate first hole and first waist hole.
In the above-mentioned air blowing and sucking device, still have such characteristic, the second board is kept away from the one end of first board is provided with the second waist hole, the second waist hole sets up be located on the side of Y direction on the second board, the corresponding side of third board is provided with the second hole, the third board with the second board passes through the second connecting piece and is connected, just the third board can be relative the second board is followed Y direction and is removed, the second connecting piece wears to locate second hole and second waist hole.
In the above-described air blowing and sucking device, the first plate is provided with a third waist hole whose axis is arranged in the Z direction.
In the above-described air blowing and sucking device, the first plate, the second plate, the third plate, and the fourth plate may be aluminum plates.
The technical scheme has the positive effects that:
according to the air blowing and sucking device provided by the utility model, the second air pipe joint is externally connected with external clean nitrogen, air can be blown to the crystal oscillator product through the second air pipe joint, so that the purpose of cleaning is achieved, the first air pipe joint is externally connected with a vacuumizing structure, air can be sucked and vacuumized to the vicinity of the crystal oscillator product through the first air pipe joint, dust on the crystal oscillator product can be sucked away, the effect of dust prevention and dust removal of the crystal oscillator product can be achieved through sucking air while sucking air, and the bad occupation ratio caused by dust can be reduced.
Drawings
FIG. 1 is a schematic diagram of a blowing and sucking device according to the present utility model;
FIG. 2 is a schematic view of a part of the structure of the air blower in FIG. 1;
fig. 3 is a schematic structural view of the fourth plate in fig. 1.
In the accompanying drawings: 1. a first plate; 13. a third waist hole; 2. a second plate; 3. a third plate; 31. a first threaded hole; 32. a first probe sleeve hole; 33. a cylindrical hole; 34. air holes; 4. a fourth plate; 412. a second probe sleeve hole; 422. and a second threaded hole.
Detailed Description
The present utility model will be further described in detail below with reference to examples, which are provided to illustrate the objects, technical solutions and advantages of the present utility model. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the utility model.
The numbering of components herein, such as "first," "second," etc., is used merely to distinguish between the described objects and does not have any sequential or technical meaning. The terms "coupled" and "connected," as used herein, are intended to encompass both direct and indirect coupling (coupling), unless otherwise indicated. In the description of the present utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element in question must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model.
In the present utility model, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.
Referring to fig. 1 to 3, the present utility model discloses a blowing and sucking device, comprising: a first plate 1, a second plate 2, a third plate 3 and a fourth plate 4;
the first plate 1 is disposed along the Z direction, the second plate 2 is disposed along the Y direction, and the third plate 3 is disposed along the X direction, and it should be noted that the X direction, the Y direction and the Z direction are three directions perpendicular to each other in space, for example, in fig. 1, the X direction and the Y direction are two directions perpendicular to each other in the horizontal direction, and the Z direction is a vertical direction.
The first board 1 is connected with the second board 2, and the one end that first board 1 was kept away from to the second board 2 is connected with the third board 3, and the fourth board 4 sets up in the one end that second board 2 was kept away from to the third board 3, and fourth board 4 and third board 3 range upon range of setting along the Z direction.
One end of the third plate 3, which is away from the second plate 2, is provided with a first threaded hole 31 for installing a first air pipe joint (not shown), the axis of the first threaded hole 31 is arranged along the X direction, an air hole 34 is further arranged inside the third plate 3, a cylindrical hole 33 and a first probe sleeve hole 32, the axis of which is arranged along the Z direction, are further arranged inside the third plate 3, and it is noted that one end of the cylindrical hole 33, which is away from the fourth plate 4, penetrates the third plate 3, and one end of the first probe sleeve hole 32, which is towards the fourth plate 4, penetrates the third plate 3; the air hole 34 connects the first screw hole 31 and the cylindrical hole 33; the fourth plate 4 is provided with a second threaded hole 422 for installing a second air pipe joint, the axis of the second threaded hole 422 is arranged along the Z direction, the fourth plate 4 is internally provided with a second probe sleeve hole 412, the second probe sleeve hole 412 is jointed with the first probe sleeve hole 32, the second threaded hole 422 penetrates through the fourth plate 4, the second probe sleeve hole 412 penetrates through the fourth plate 4, and the axes of the first probe sleeve hole 32, the cylindrical hole 33, the second threaded hole 422 and the second probe sleeve hole 412 are all arranged in a collinear manner.
The crystal oscillator product (may also be referred to as a wafer) is placed below the cylindrical hole 33 of the third plate 3, the second threaded hole 422 is externally connected with a second air pipe connector, the second air pipe connector is externally connected with external clean nitrogen, and air can be blown to the crystal oscillator product through the first probe sleeve hole 32, the cylindrical hole 33, the second threaded hole 422 and the second probe sleeve hole 412, so that the purpose of cleaning is achieved. In order to smoothly perform the blowing, the first probe sleeve hole 32, the cylindrical hole 33, the second screw hole 422, and the second probe sleeve hole 412 need to be connected in a sealing manner, for example, a sealing ring may be provided between the first probe sleeve hole 32 and the second probe sleeve hole 412, and for example, the third plate 3 and the fourth plate 4 may be designed as an integrated structure. Meanwhile, the first threaded hole 31 is externally connected with a first air pipe joint, the first air pipe joint is externally connected with a vacuum device, the air holes 34 are used for sucking vacuum into the cylindrical holes 33 to suck dust blown out of the surface of the wafer, and the dust prevention and dust removal effect of the crystal oscillator product can be achieved by sucking air while sucking air, so that the bad duty ratio caused by dust can be reduced.
Optionally, a probe sleeve (not shown) is disposed within the second probe sleeve bore 412, the first probe sleeve bore 32 and the cylindrical bore 33, the probe sleeve extending from the second probe sleeve bore 412 all the way into the cylindrical bore 33. The probe sleeve can be a thin steel tube. The gas enters the probe sleeve through the second air pipe joint and is blown to the wafer through the probe sleeve, so that dust on the surface of the wafer is blown out. The provision of the probe sleeve allows for a complete sealed air path avoiding adverse effects due to gaps created by the engagement of the second probe sleeve aperture 412 with the first probe sleeve aperture 32. The air and dust blown out from the wafer surface are sucked away in the cylindrical hole 33 through the air hole 34 and the second air pipe joint, and the probe sleeve can also separate the air blowing and sucking paths to avoid mutual interference.
Further, in order to maintain a better seal, the junction of the first probe sleeve hole 32 and the second probe sleeve hole 412 is provided with a sealing ring (not shown), and the sealing ring may be embedded in the third plate 3 and/or the fourth plate 4.
Alternatively, the diameter of the first probe sleeve hole 32 is smaller than the diameter of the cylindrical hole 33, the diameter of the air hole 34 is smaller than the diameter of the first threaded hole 31, and the diameter of the air hole 34 is smaller than the diameter of the cylindrical hole 33. The diameter of the first threaded hole 31 is larger than the diameter of the air hole 34.
Optionally, to achieve the mounting of the crystal oscillator product, the fourth plate 4 is connected to the third plate 3 by fasteners (not shown) whose axes are arranged in the Z direction. Specifically, the fastener is provided with at least two, opposite sides of the second probe sleeve hole 412 provided on the fourth plate 4, respectively. The fastener extends through the fourth plate 4 and into the third plate 3.
Further, one end of the second plate 2 facing the first plate 1 is provided with a first waist hole (not shown) whose axis is arranged along the X direction, the corresponding side of the first plate 1 is provided with a first hole (not shown), the first plate 1 and the second plate 2 are connected by a first connecting piece (not shown), and the first plate 1 can move along the X direction relative to the second plate 2, and the first connecting piece penetrates through the first hole and the first waist hole. Optionally, at least two first waist holes are provided, and the first waist holes are arranged in an array along the X direction.
Further, a second waist hole (not shown) is provided at one end of the second plate 2 far away from the first plate 1, the second waist hole is provided on a side surface of the second plate 2 located in the Y direction, a second hole (not shown) is provided at a corresponding side of the third plate 3, the third plate 3 is connected with the second plate 2 through a second connecting piece (not shown), the third plate 3 can move along the Y direction relative to the second plate 2, and the second connecting piece penetrates through the second hole and the second waist hole. Optionally, at least two second waist holes are provided, and the second waist holes are arranged in an array along the Y direction.
Further, the first plate 1 is provided with a third waist hole 13 whose axis is arranged in the Z direction. Optionally, at least one third waist hole 13 is provided, for example, two third waist holes 13 are provided along the Z direction in the present embodiment. The third waist hole 13 is used for adjusting the position of the whole blowing and sucking device in the Z direction when the whole blowing and sucking device is mounted on the outer structure. Alternatively, the outer structure may be a turntable tooling.
Optionally, the first plate 1, the second plate 2, the third plate 3 and the fourth plate 4 are all aluminum plates.
The blowing and sucking device provided by the utility model is arranged at the next station of the stations in the background technology, can simultaneously achieve the purpose of blowing and sucking the crystal oscillator products, not only can blow away dust in the grooves of the products, but also can adsorb fine particles (dust) attached to the crystal oscillator products, can achieve the effect of dust prevention and dust removal of the crystal oscillator products by sucking air while sucking air, further can reduce the bad occupation ratio caused by dust, and meanwhile, the accessory is made of aluminum, is not easy to damage and has longer service life.
The technical features of the above embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
The foregoing examples illustrate only a few embodiments of the utility model, which are described in detail and are not to be construed as limiting the scope of the utility model. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the utility model, which are all within the scope of the utility model. Accordingly, the scope of protection of the present utility model is to be determined by the appended claims.
Claims (10)
1. A blowing and sucking device, comprising: a first plate, a second plate, a third plate, and a fourth plate;
the first plate is arranged along the Z direction, the second plate is arranged along the Y direction, the third plate is arranged along the X direction, the first plate is connected with the second plate, one end of the second plate, which is far away from the first plate, is connected with the third plate, the fourth plate is arranged at one end of the third plate, which is far away from the second plate, and the fourth plate and the third plate are stacked along the Z direction;
the first probe sleeve hole penetrates through the third plate, the cylindrical hole penetrates through the third plate, and the air hole is connected with the first threaded hole and the cylindrical hole;
the utility model discloses a gas pipe joint, including fourth board, cylinder hole, second probe trepanning, first probe trepanning, second board is last to be provided with the second screw hole that is used for installing second gas pipe joint, the axis of second screw hole sets up along the Z direction, still be provided with the second probe trepanning in the fourth board, the second probe trepanning with first probe trepanning is joined, wherein, the second screw hole runs through the fourth board, the second probe trepanning runs through the fourth board, wherein, first probe trepanning the cylinder hole the equal axis collineation of second screw hole and second probe trepanning sets up.
2. The aspiration device of claim 1 wherein a probe sleeve is disposed within said second probe sleeve bore, said first probe sleeve bore and said cylindrical bore, said probe sleeve extending from said second probe sleeve bore all the way into said cylindrical bore.
3. A blowing and suction device according to claim 2, wherein a sealing ring is provided at the junction of the first and second probe sockets.
4. A blowing and suction device according to claim 3, wherein the diameter of the first probe sleeve hole is smaller than the diameter of the cylindrical hole, the diameter of the air hole is smaller than the diameter of the first threaded hole, and the diameter of the air hole is smaller than the diameter of the cylindrical hole.
5. A blowing and suction device according to claim 4, wherein the fourth plate is connected to the third plate by fasteners having axes disposed in the Z direction.
6. A blower fan assembly according to claim 5, wherein said fastener is provided with at least two of said second probe sockets on said fourth plate on opposite sides thereof.
7. A blowing and suction device according to any one of claims 1 to 6, wherein one end of the second plate facing the first plate is provided with a first waist hole having an axis arranged in the X direction, the corresponding side of the first plate is provided with a first hole, the first plate and the second plate are connected by a first connecting member, and the first plate is movable in the X direction relative to the second plate, the first connecting member being provided through the first hole and the first waist hole.
8. A blowing and sucking device as claimed in claim 7, wherein a second waist hole is provided at an end of said second plate remote from said first plate, said second waist hole is provided on a side of said second plate in the Y direction, a second hole is provided at a corresponding side of said third plate, said third plate is connected to said second plate by a second connecting member, and said third plate is movable in the Y direction with respect to said second plate, and said second connecting member is provided through said second hole and said second waist hole.
9. A blowing and suction device according to claim 8, wherein the first plate is provided with a third waist opening having an axis arranged in the Z direction.
10. The air-breathing apparatus of claim 9 wherein the first plate, the second plate, the third plate and the fourth plate are all aluminum plates.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320053945.4U CN219418965U (en) | 2023-01-09 | 2023-01-09 | Blowing and sucking device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320053945.4U CN219418965U (en) | 2023-01-09 | 2023-01-09 | Blowing and sucking device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219418965U true CN219418965U (en) | 2023-07-25 |
Family
ID=87244036
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320053945.4U Active CN219418965U (en) | 2023-01-09 | 2023-01-09 | Blowing and sucking device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219418965U (en) |
-
2023
- 2023-01-09 CN CN202320053945.4U patent/CN219418965U/en active Active
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