CN219393348U - Double-station semiconductor mounting equipment - Google Patents

Abstract

The utility model discloses double-station semiconductor mounting equipment, and relates to the technical field of semiconductor mounting equipment. The chip mounting device comprises at least two groups of feeding alignment assemblies and a mounting platform shared by the two groups of feeding alignment assemblies, wherein the feeding alignment assemblies comprise a conveying line for feeding and discharging products, a feeding assembly for placing chip carrier tapes and adjusting the positions of the chip carrier tapes, a transfer platform for adjusting the positions of chips to be mounted and a chip mounting platform for mounting the chips. The product can be compatible with loading and unloading modes such as wafer, cui Pan, wafer boxes, gel-Pak and the like, can be matched with the same suction nozzle to carry out the same chip mounting and improve the efficiency, can also use the suction nozzles of two different specifications, can be simultaneously compatible with two chips with large difference to carry out mounting, can be simultaneously used for mounting by applying the chips with different specifications, can also be mutually staggered for mounting, and has the advantages of greatly improving the mounting efficiency, simplifying and compacting the structure, and meeting the processing requirements of the manufacturing industry.

Description

Double-station semiconductor mounting equipment

Technical Field

The utility model relates to the technical field of semiconductor mounting equipment, in particular to double-station semiconductor mounting equipment.

Background

Chip mounting is a critical process in the semiconductor packaging process. Almost all kinds of chips required for applications require this process, which plays a key role in assembly costs. The chip mounting apparatus would also benefit from the assembly and packaging business resulting from the above-described trends.

Because different types of chips are different in size, the suction nozzle cannot be commonly used, the existing chip mounting equipment can only mount one type of chips at the same time, when two different types of chips are mounted and stacked, the chip mounting equipment can only move to the next procedure after mounting once and then carry out the other type of chips to carry out iron, the mounting efficiency is poor, the chips can be polluted in the process, small errors can be caused by different times of identification, and meanwhile, the labor expenditure of transferring and inputting is large, so that the production efficiency and the precision of the chip mounting industry are seriously influenced, and the use requirements cannot be met.

Disclosure of Invention

In order to achieve the above purpose, the present utility model provides the following technical solutions: the double-station semiconductor mounting equipment comprises at least two groups of feeding alignment assemblies and a mounting platform shared by the two groups of feeding alignment assemblies, wherein the feeding alignment assemblies comprise a conveying line for feeding and discharging products, a feeding assembly for placing chip carrier tapes and adjusting the positions of the chip carrier tapes, a transfer table for adjusting the positions of chips to be mounted and a module for performing MARK alignment, transfer and mounting on the chips and the products;

the feeding assembly comprises a tray positioning jig for placing the chip carrier tape and a tray four-axis alignment assembly which is arranged at the bottom of the tray positioning jig and used for carrying out X, Y, Z, R axis position adjustment on the tray positioning jig;

the transfer platform comprises a chip carrier for placing chips taken down from the chip carrier tape and a chip triaxial alignment assembly for performing X, Y, R axis position adjustment on the chips;

the mounting platform comprises mounting conveying belts for butt joint of two conveying lines, a positioning cylinder for positioning products and a product double-shaft alignment assembly for carrying out X, Y shaft position adjustment on the products.

As a preferable technical scheme of the utility model, one side of the module is provided with a sucker transfer table and a transfer table linear driving module, wherein the sucker transfer table corresponds to the feeding assembly and the middle rotary table respectively, and the transfer table linear driving module is used for driving the sucker transfer table, and is arranged in the module so as to realize the transfer of chips from the tray positioning jig to the chip carrying table and from the chip carrying table to the mounting conveying belt.

As a preferable technical scheme of the utility model, the module is also provided with a material taking identification camera, a chip position angle adjustment camera and a positioning mounting camera which are respectively corresponding to the material loading assembly, the middle turntable and the mounting platform.

As a preferable technical scheme of the utility model, the four-axis alignment assembly of the charging tray comprises a wafer film expanding table, a charging tray lifting bottom plate positioned below the wafer film expanding table, a lifting motor arranged on one side of the charging tray lifting bottom plate, and at least one screw rod which is rotatably arranged on the charging tray lifting bottom plate and is in transmission connection with the lifting motor through a transmission belt, wherein the surface of the screw rod is sleeved with internal threads of the wafer film expanding table;

the material disc positioning jig is rotationally arranged on the wafer film expansion table, one side of the wafer film expansion table is provided with a material disc rotating motor in transmission connection with the material disc positioning jig through a belt, and R-axis movement of the material disc positioning jig is realized;

the tray lifting bottom plate is provided with a thimble main body with one end extending to the inside of the tray positioning jig and a cylinder for driving the thimble main body to lift.

As a preferable technical scheme of the utility model, the four-axis alignment assembly of the material tray further comprises a first adjusting bottom plate positioned below the material tray lifting bottom plate and a second adjusting bottom plate positioned below the first adjusting bottom plate, wherein an X-axis sliding rail which is in sliding connection with the bottom of the material tray lifting bottom plate is arranged on the first adjusting bottom plate, and a Y-axis sliding rail which is in sliding connection with the bottom of the first adjusting bottom plate is arranged on the second adjusting bottom plate.

As a preferable technical scheme of the utility model, the chip three-axis alignment assembly comprises a chip Y-axis linear module, a chip X-axis linear module and a chip turntable direct-drive motor, wherein the chip Y-axis linear module is positioned at one side of the feeding assembly;

the chip carrier is arranged on the chip turntable direct-drive motor so as to realize the adjustment of the X, Y, R axis position of the chip on the chip carrier.

As a preferable technical scheme of the utility model, the positioning air cylinders are arranged on two sides of the inner wall of the mounting conveyor belt and used for jacking products, clamping plates are arranged on two sides of the top of the mounting conveyor belt and used for being matched with the positioning air cylinders to position the products, and one side of the mounting conveyor belt is provided with a product coarse positioning air cylinder.

As a preferable technical scheme of the utility model, the product double-shaft alignment assembly comprises a product X-shaft linear module arranged at the bottom of the mounting conveyor belt and a product Y-shaft linear module arranged at the bottom of the product X-shaft linear module, and the product Y-shaft linear module is positioned between two transfer tables.

As a preferable technical scheme of the utility model, the utility model also comprises a marble base used for installing the conveying line, the feeding component, the transfer platform, the module and the mounting platform.

Compared with the prior art, the utility model provides double-station semiconductor mounting equipment, which has the following beneficial effects:

this duplex semiconductor mounting equipment through setting up material loading counterpoint subassembly and mounting platform, this product can compatible wafer go up unloading, cui Pan, waffle box, the loading modes such as Ge l-Pak, can match the same suction nozzle, carry out same section chip mounting and improve efficiency, also can use the suction nozzle of two kinds of different specifications, compatible two kinds of chips that the difference is big carry out the dress simultaneously, use the chip of different specifications, carry out the dress simultaneously, also can be crisscross dress each other, multiple mounting methods improves the dress efficiency by a wide margin, the structure is simple, compact, satisfy manufacturing industry processing demand.

Drawings

Fig. 1 is a schematic structural diagram of a dual-station semiconductor mounting apparatus according to the present utility model;

FIG. 2 is an enlarged view of the structure at A in FIG. 1;

fig. 3 is a side view showing the structure of a dual-station semiconductor mounting apparatus according to the present utility model;

FIG. 4 is an enlarged view of the structure at A in FIG. 3;

FIG. 5 is an enlarged view of the structure at B in FIG. 3;

fig. 6 is an enlarged view of the structure at C in fig. 3.

In the figure: 1. a feeding alignment assembly; 11. a conveying line; 111. adjusting the base; 12. a feeding assembly; 121. positioning jig for material tray; 1211. wafer film expanding table; 1212. a material disc rotating motor; 122. the four-axis alignment assembly of the material tray; 123. the tray lifts the bottom plate; 1231. a lifting motor; 1232. a screw rod; 124. adjusting the first bottom plate; 1241. an X-axis sliding rail; 125. adjusting a second bottom plate; 1251. a Y-axis sliding rail; 126. a thimble body; 13. a transfer table; 131. a chip carrier; 132. the chip three-axis alignment assembly; 1321. a chip Y-axis linear module; 1322. a chip X-axis linear module; 1323. the chip turntable directly drives the motor; 14. a module; 141. a sucker transfer table; 142. a transfer table linear driving module; 143. a material taking identification camera; 144. a chip position angle adjusting camera; 145. positioning and mounting a camera; 2. a mounting platform; 21. attaching a conveying belt; 22. positioning a cylinder; 23. a clamping plate; 24. an X-axis linear module of the product; 25. a product Y-axis linear module; 26. a product coarse positioning cylinder; 3. and a marble base.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Referring to fig. 1-6, a dual-station semiconductor mounting apparatus includes at least two sets of feeding alignment assemblies 1 and a mounting platform 2 shared by the two sets of feeding alignment assemblies 1, where the feeding alignment assemblies 1 include a conveying line 11 for feeding and discharging products, a feeding assembly 12 for placing a chip carrier tape and adjusting a position of the chip carrier tape, a transfer table 13 for adjusting a position of a chip to be mounted, and a module 14 for performing MARK alignment, transfer and mounting on the chip and the product.

The loading assembly 12 includes a tray positioning jig 121 for placing a chip carrier tape, and a tray four-axis alignment assembly 122 disposed at the bottom of the tray positioning jig 121 and performing X, Y, Z axis position adjustment on the tray positioning jig 121.

The transfer table 13 includes a chip carrier 131 for placing chips removed from the chip carrier tape, and a chip tri-axial alignment assembly 132 for performing X, Y, R axial position adjustment of the chips.

The mounting platform 2 comprises a mounting conveying belt 21 for butting two conveying lines 11, a positioning air cylinder 22 for positioning products and a product double-shaft alignment assembly for carrying out X, Y shaft position adjustment on the products.

The feeding mode can be a wafer tab e mode or a disc-type mode, the feeding mode can be selected according to requirements, the chip taking and placing mode can be used for sucking or clamping by adopting a clamp to replace a suction nozzle according to requirements of different products, the feeding mode can be flexibly applied to compatibility of different products in the semiconductor mounting industry, when a chip is placed under a chip position angle adjusting camera 144 for position and angle adjustment, a transfer table 13 under the camera can achieve fine adjustment of the position angle and 360-degree angle adjustment direction, the chip can be taken to a mounting platform 2 for mounting, the feeding alignment assemblies 1 on the left side and the right side are advantageous in mounting after stacking mounting and adjustment, the suction nozzles with different specifications can be mounted on equipment while different materials are used, the equipment can be used for stacking mounting or mounting with high efficiency, errors brought by time and process of multiple times of clamping are reduced, and the application prospect is wide.

The product is controlled by an industrial personal computer program, programmable, compatible with two different types of chips, and capable of being identified, taken, corrected and mounted according to a programming sequence, and a platform is compatible with high-precision mounting of the two types of chips.

Through setting up material loading counterpoint subassembly 1 and mounting platform 2, this product can compatible wafer go up unloading, cui Pan, waffle box, loading modes such as Ge l-Pak, can match the same suction nozzle, carry out same section chip mounting and improve efficiency, also can use the suction nozzle of two kinds of different specifications, compatible two kinds of chips that the difference is big carry out the dress simultaneously, use the chip of different specifications, carry out the dress simultaneously, also can be mutually crisscross dress, multiple mounting methods improves the mounting efficiency by a wide margin, the structure is retrencied, compactness, satisfy manufacturing industry processing demand.

As a specific technical scheme of this embodiment, a suction cup transfer table 141 corresponding to the feeding assembly 12 and the transfer table 13 and a transfer table linear driving module 142 for driving the suction cup transfer table 141 are disposed on one side of the module 14, the transfer table linear driving module 142 is mounted inside the module 14, so as to realize the transfer of chips from the feed tray positioning jig 121 to the chip carrier 131 and the chip carrier 131 to the mounting conveyor belt 21, a lifting module is further disposed between the suction cup transfer table 141 and the transfer table linear driving module 142, and is used for driving the suction cup transfer table 141 to perform lifting motion, starting the transfer table linear driving module 142 to drive the suction cup transfer table 141 corresponding to the feed tray positioning jig 121 to suck chips from the feed tray carrier belt on the feed tray positioning jig 121, and placing the chips on the transfer table 13 for performing position angle adjustment, so as to match the chip position calibration with the product to be mounted, after the chip position angle adjustment is completed, starting the transfer table linear driving module 142 to drive another suction cup transfer table 141 to suck chips on the product after angle adjustment, and attach chips on the product, and attach two groups of chips can be attached to the same type of chips or two groups of chips simultaneously attached to each other, and the chips can be attached to the same type.

As a specific technical scheme of this embodiment, the module 14 is further provided with a material taking recognition camera 143, a chip position angle adjustment camera 144, and a positioning mounting camera 145, which respectively correspond to the material loading assembly 12, the transfer table 13, and the mounting platform 2, the positioning mounting camera 145 can position the whole position angle (MARK point positioning) of the product first, initially calculate the mechanical coordinates of the mounting position to be calculated, determine whether to take a photograph again according to the requirement of the product, and adjust the position angle of the chip by matching the chip position angle adjustment camera 144 with the chip triaxial alignment assembly 132, so that the initial position of the chip can be recognized when the material is taken by the material taking recognition camera 143.

As a specific technical solution of this embodiment, the four-axis alignment assembly 122 of the tray includes a wafer film expansion table 1211, a tray lifting base 123 located below the wafer film expansion table 1211, a lifting motor 1231 disposed on one side of the tray lifting base 123, and at least one screw rod 1232 rotatably disposed on the tray lifting base 123 and connected with the lifting motor 1231 through a transmission belt, where the surface of the screw rod 1232 is in socket joint with the internal threads of the wafer film expansion table 1211;

the tray positioning jig 121 is rotatably arranged on a wafer film expansion table 1211, one side of the wafer film expansion table 1211 is provided with a tray rotating motor 1212 in transmission connection with the tray positioning jig 121 through a belt, and the tray positioning jig 121R moves axially;

the tray lifting bottom plate 123 is provided with a thimble main body 126 with one end extending to the inside of the tray positioning jig 121 and a cylinder for driving the thimble main body to lift 126, the tray positioning jig 121 is driven to rotate by starting the tray rotation motor 1212, the preliminary position of the chip is determined by matching with the material taking identification camera 143, the lifting motor 1231 is started to drive the screw rod 1232 to rotate, and as the number of the screw rods 1232 is not less than one, the wafer film expanding table 1211 is influenced by the rotation of the screw rod to lift or descend.

As a specific technical scheme of this embodiment, the four-axis alignment assembly 122 of the tray further includes a first adjusting bottom plate 124 disposed below the first tray lifting bottom plate 123 and a second adjusting bottom plate 125 disposed below the first adjusting bottom plate 124, an X-axis sliding rail 1241 slidably connected to the bottom of the first tray lifting bottom plate 123 is disposed on the first adjusting bottom plate 124, and a Y-axis sliding rail 1251 slidably connected to the bottom of the first adjusting bottom plate 124 is disposed on the second adjusting bottom plate 125, and because the X-axis sliding rail 1241 and the Y-axis sliding rail 1251 do not need to be frequently debugged, the X-axis sliding rail 1241 and the Y-axis sliding rail 1251 can be manually adjusted, locked or driven by a linear module.

As a specific technical solution of this embodiment, the chip tri-axial alignment assembly 132 includes a chip Y-axis linear module 1321 located at one side of the feeding assembly 12, a chip X-axis linear module 1322 disposed on the chip Y-axis linear module 1321, and a chip turntable direct-drive motor 1323 disposed on the chip X-axis linear module 1322, the chip carrier 131 is mounted on the chip turntable direct-drive motor 1323, so as to realize the adjustment of the X, Y, R axis position of the chip on the chip carrier 131, the transfer table linear drive module 142 is started to drive the suction cup transfer table 141 corresponding to the tray positioning jig 121 to absorb chips from the tray carrier tape on the tray positioning jig 121, and place the chips on the transfer table 13 for position angle adjustment, and the chip Y-axis linear module 1321, the chip X-axis linear module 1322, and the chip turntable direct-drive motor 1323 are started to cooperate with the chip position angle adjustment camera 144 for position angle adjustment of the chips, so as to match the chip position calibration with the chip mounting position on the product to be mounted.

As a concrete technical scheme of this embodiment, location cylinder 22 installs in the both sides of subsides dress conveyer belt 21 inner wall for the jacking product, the top both sides of subsides dress conveyer belt 21 all are provided with splint 23, are used for the cooperation location cylinder 22 location product, one side of subsides dress conveyer belt 21 is provided with the thick location cylinder 26 of product, and when the product that waits to paste the dress removes to subsides dress conveyer belt 21 through transfer chain 11 on, when the product removes to subsides dress conveyer belt 21, block through the thick location cylinder 26 of product first and carry out thick location, then carry out the product jack-up, start location cylinder 22 jacking product and splint 23 conflict, realize the location to the product.

As a specific technical scheme of this embodiment, the product biax alignment assembly includes a product X-axis linear module 24 disposed at the bottom of the mounting conveyor belt 21 and a product Y-axis linear module 25 disposed at the bottom of the product X-axis linear module 24, where the product Y-axis linear module 25 is located between two transfer tables 13, after the product on the mounting conveyor belt 21 is positioned, the product X-axis linear module 24 and the product Y-axis linear module 25 are started to move the product to the position below the positioning mounting camera 145 for MARK alignment, and after the alignment is completed, the patch operation can be performed.

As a specific technical scheme of this embodiment, the marble base 3 for installing the conveying line 11, the feeding assembly 12, the transfer platform 13, the module 14 and the mounting platform 2 is further included, and an adjusting base 111 is provided at the bottom of the conveying line 11 for adjusting the position of the conveying line 11.

To sum up, this duplex semiconductor mounting equipment, through setting up material loading counterpoint subassembly 1 and mounting platform 2, this product can compatible wafer go up unloading, cui Pan, waffle box, the loading modes such as Ge l-Pak, can match the same suction nozzle, carry out same section chip mounting and improve efficiency, also can use the suction nozzle of two kinds of different specifications, compatible two kinds of chips that the difference is big simultaneously carry out the dress, use the chip of different specifications, carry out the dress simultaneously, also can be crisscross dress each other, multiple mounting methods improves the dress efficiency by a wide margin, the structure is simple, compact, satisfy manufacturing industry processing demand.

It should be noted that in this document, terms such as "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.

Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims (9)

1. The utility model provides a duplex position semiconductor mounting equipment, includes at least two sets of material loading counterpoint subassembly (1) and is used for mounting platform (2) of two sets of material loading counterpoint subassemblies (1) that the sharing is characterized in that: the feeding alignment assembly (1) comprises a conveying line (11) for feeding and discharging products, a feeding assembly (12) for placing chip carrier tapes and adjusting the positions of the chip carrier tapes, a transfer table (13) for adjusting the positions of chips to be mounted and a module (14) for performing MARK alignment, transfer and mounting on the chips and the products;

the feeding assembly (12) comprises a tray positioning jig (121) for placing a chip carrier tape and a tray four-axis alignment assembly (122) which is arranged at the bottom of the tray positioning jig (121) and is used for carrying out X, Y, Z, R axis position adjustment on the tray positioning jig (121);

the transfer table (13) comprises a chip carrier (131) for placing chips removed from a chip carrier tape and a chip triaxial alignment assembly (132) for performing X, Y, R axis position adjustment on the chips;

the mounting platform (2) comprises a mounting conveying belt (21) for butt-jointing two conveying lines (11), a positioning cylinder (22) for positioning products and a product double-shaft alignment assembly for carrying out X, Y shaft position adjustment on the products.

2. The duplex semiconductor mounting apparatus according to claim 1, wherein: the automatic feeding device is characterized in that a sucker transfer table (141) and a transfer table linear driving module (142) for driving the sucker transfer table (141) are arranged on one side of the module (14), and the sucker transfer table linear driving module (142) is respectively corresponding to the feeding assembly (12) and the transfer table (13), and the transfer table linear driving module (142) is arranged inside the module (14) so as to realize the transfer of chips from the feeding disc positioning jig (121) to the chip carrier (131) and from the chip carrier (131) to the mounting conveying belt (21).

3. The duplex semiconductor mounting apparatus according to claim 2, wherein: and the module (14) is also provided with a material taking identification camera (143), a chip position angle adjustment camera (144) and a positioning mounting camera (145) which respectively correspond to the material loading assembly (12), the transfer platform (13) and the mounting platform (2).

4. The duplex semiconductor mounting apparatus according to claim 1, wherein: the four-axis alignment assembly (122) of the material disc comprises a wafer film expansion table (1211), a material disc lifting bottom plate (123) positioned below the wafer film expansion table (1211), a lifting motor (1231) arranged on one side of the material disc lifting bottom plate (123) and at least one screw rod (1232) which is rotatably arranged on the material disc lifting bottom plate (123) and is in transmission connection with the lifting motor (1231) through a transmission belt, wherein the surface of the screw rod (1232) is sleeved with internal threads of the wafer film expansion table (1211);

the material disc positioning jig (121) is rotatably arranged on a wafer film expansion table (1211), one side of the wafer film expansion table (1211) is provided with a material disc rotating motor (1212) in transmission connection with the material disc positioning jig (121) through a belt, and R-axis movement of the material disc positioning jig (121) is achieved;

the tray lifting base plate (123) is provided with a thimble main body (126) with one end extending to the inside of the tray positioning jig (121) and a cylinder for driving the thimble main body (126) to lift.

5. The duplex semiconductor mounting apparatus according to claim 4, wherein: the four-axis alignment assembly (122) of the charging tray further comprises a first adjusting bottom plate (124) positioned below the lifting bottom plate (123) of the charging tray and a second adjusting bottom plate (125) positioned below the first adjusting bottom plate (124), an X-axis sliding rail (1241) which is in sliding connection with the bottom of the lifting bottom plate (123) of the charging tray is arranged on the first adjusting bottom plate (124), and a Y-axis sliding rail (1251) which is in sliding connection with the bottom of the first adjusting bottom plate (124) is arranged on the second adjusting bottom plate (125).

6. The duplex semiconductor mounting apparatus according to claim 1, wherein: the chip three-axis alignment assembly (132) comprises a chip Y-axis linear module (1321) positioned at one side of the feeding assembly (12), a chip X-axis linear module (1322) arranged on the chip Y-axis linear module (1321) and a chip turntable direct-drive motor (1323) arranged on the chip X-axis linear module (1322);

the chip carrier (131) is arranged on the chip turntable direct-drive motor (1323) so as to realize the adjustment of the X, Y, R axis position of the chip on the chip carrier (131).

7. The duplex semiconductor mounting apparatus according to claim 1, wherein: the positioning air cylinders (22) are arranged on two sides of the inner wall of the mounting conveyor belt (21) and used for jacking products, clamping plates (23) are arranged on two sides of the top of the mounting conveyor belt (21) and used for being matched with the positioning air cylinders (22) to position the products, and coarse product positioning air cylinders (26) are arranged on one side of the mounting conveyor belt (21).

8. The duplex semiconductor mounting apparatus according to claim 7, wherein: the product biax is aimed at subassembly including setting up in the product X axle straight line module (24) of the dress conveyer belt (21) bottom and setting up in the product Y axle straight line module (25) of product X axle straight line module (24) bottom, product Y axle straight line module (25) are located between two transfer tables (13).

9. The duplex semiconductor mounting apparatus according to claim 1, wherein: the marble machine further comprises a marble base (3) for installing the conveying line (11), the feeding assembly (12), the transfer table (13), the modules (14) and the mounting platform (2).