CN219266136U

CN219266136U - Slice crystal surface cleanliness factor detection device

Info

Publication number: CN219266136U
Application number: CN202223071994.5U
Authority: CN
Inventors: 黄祥跃; 陈燕平; 孙义林
Original assignee: Fujian Zhizhuo Photoelectric Technology Co ltd
Current assignee: Fujian Zhizhuo Photoelectric Technology Co ltd
Priority date: 2022-11-18
Filing date: 2022-11-18
Publication date: 2023-06-27
Anticipated expiration: 2032-11-18

Abstract

The utility model relates to a slice crystal surface cleanliness detection device, which comprises a detection kitchen provided with a table top, a crystal fixing component fixedly arranged on the table top of the detection kitchen, and a shadowless lamp component which is arranged above the crystal fixing component and has a camera shooting function; the crystal fixing assembly comprises 2 fixing seats fixedly arranged on the detection kitchen table top at intervals, an adsorption disc rotatably connected between the two fixing seats and a vacuum pump connected with the adsorption disc through a pipeline; the adsorption plate is internally provided with a cavity, a plurality of groups of adsorption hole groups formed by adsorption holes are arranged on the front side wall of the adsorption plate at intervals, the adsorption holes are communicated with the cavity of the adsorption plate and used for adsorbing the flaky crystals, and the pipeline is communicated with the cavity of the adsorption plate. The device for detecting the cleanliness of the surface of the flaky crystal can rapidly and conveniently detect the cleanliness of the surface of the wafer, can not damage the light-passing surface of the wafer, can detect the cleanliness of a plurality of wafers at one time, greatly improves the detection efficiency and improves the productivity.

Description

Slice crystal surface cleanliness factor detection device

Technical Field

The utility model relates to the field of crystal processing, in particular to a slice crystal surface cleanliness detection device.

Background

The optical quality of the wafer surface needs to be observed frequently during processing of the optical crystal into a plate-like crystal (i.e., wafer). After the wafers are coated, the inspector needs to perform cleanliness detection on each wafer by means of a light source and a magnifying glass on a detection table. The inspector needs to hold the wafer with one hand and hold the magnifying glass with the other hand, and observe the wafer with the light source, such as some dust or dirt on the surface of the wafer, put down the magnifying glass, then pick up the dust-free cloth with diethyl ether or other volatile solvents to wipe, and then hold the magnifying glass to aim at the light source for observation. According to the detection method, one detector can detect only one wafer at a time, the detection efficiency is low, long-time operation is easy to fatigue, vision can be influenced even, if a large number of wafers are required to be detected, a large number of staff are required to spend a large amount of time, and the detection method often becomes a bottleneck for improving productivity. In summary, it is necessary to design a device for detecting the cleanliness of the surface of a wafer, so as to efficiently detect the cleanliness of the wafer and improve the productivity.

Disclosure of Invention

The utility model aims to provide a slice crystal surface cleanliness detection device which can efficiently detect the surface cleanliness of a wafer, does not damage the light-transmitting surface of the wafer, can greatly improve the detection efficiency and improves the productivity.

The aim of the utility model is realized by the following technical scheme:

the device comprises a detection kitchen provided with a table top, a crystal fixing component fixedly arranged on the table top of the detection kitchen, and a shadowless lamp component which is arranged above the crystal fixing component and has a camera shooting function;

the crystal fixing assembly comprises 2 fixing seats fixedly arranged on the detection kitchen table top at intervals, an adsorption disc rotatably connected between the two fixing seats and a vacuum pump connected with the adsorption disc through a pipeline; the adsorption plate is internally provided with a cavity, a plurality of groups of adsorption hole groups formed by adsorption holes are arranged on the front side wall of the adsorption plate at intervals, the adsorption holes are communicated with the cavity of the adsorption plate and used for adsorbing the flaky crystals, and the pipeline is communicated with the cavity of the adsorption plate.

The adsorption disc comprises an adsorption disc body, wherein the left side wall and the right side wall of the adsorption disc body are respectively provided with a rotating shaft, bearings for allowing the rotating shafts to penetrate are correspondingly arranged on the fixing seats, and a motor connected with the rotating shafts and used for driving the rotating shafts to rotate is arranged on one of the fixing seats.

The adsorption plate is characterized in that an elastic buffer cushion is arranged on the front side wall of the adsorption plate, and a plurality of through holes corresponding to the adsorption holes are formed in the elastic buffer cushion.

The top wall of the detection kitchen is provided with an air inlet pipe, a fan is arranged in the air inlet pipe, and the front side wall of the detection kitchen is provided with an operation window.

The filter screen is detachably connected in the air inlet pipe and is positioned above the fan.

The vacuum pump is arranged in the storage cabinet, and the table top of the detection kitchen is provided with a mounting hole through which a containing pipeline passes.

The shadowless lamp assembly comprises a fixed lamp holder connected with the top wall of the detection kitchen, a connecting shaft connected with the fixed lamp holder and extending downwards, and a bracket A rotatably sleeved on the connecting shaft; the end of the support A is rotationally connected with a secondary support A, one end of the secondary support A is hinged with an arc-shaped connecting pipe, a lamp panel is rotationally connected on the arc-shaped connecting pipe, a plurality of lamp slots are uniformly distributed on the lamp panel, bulbs are arranged in the lamp slots, and a plurality of cameras are further arranged on the lamp panel.

The shadowless lamp assembly further comprises a bracket B which is rotatably sleeved on the connecting shaft; the end of the support B is rotatably connected with a secondary support B, and a display used for being connected with a camera is arranged on the secondary support B.

Compared with the prior art, the utility model has the advantages that:

the device for detecting the cleanliness of the surface of the flaky crystal integrates the wafer fixing and shadowless lamp assembly into a whole, and can detect the cleanliness of a plurality of wafers at one time. The device for detecting the cleanliness of the surface of the flaky crystal can rapidly and conveniently detect the cleanliness of the surface of the wafer, can not damage the light-passing surface of the wafer, can detect the cleanliness of a plurality of wafers at one time, greatly improves the detection efficiency and improves the productivity. In addition, the detection device does not need to hold the wafer by a detector, detects the wafer by aligning the magnifying glass with the light source, directly observes the wafer from the screen, and reduces the eye fatigue of the detector.

Drawings

FIG. 1 is a schematic diagram showing the structure of a device for detecting the cleanliness of a flaky crystal surface according to the present utility model.

Fig. 2 is a schematic structural view of a crystal fixing assembly.

Fig. 3 is a schematic structural view of the shadowless lamp assembly.

FIG. 4 is a schematic view of the wafer structure after the film plating

Fig. 5 is a schematic structural view of a crystal fixing member to which a plate crystal is adsorbed.

Fig. 6 is a schematic view of the state of the crystal when the light passing surface is detected.

Fig. 7 is a schematic view showing a state when detecting the light passing surface under the crystal after the rotation of the adsorption disk.

Description of the reference numerals: 1 detection kitchen, 11 mesa, 12 air-supply line, 121 fan, 122 filter screen, 13 operation window, 14 storage cabinet, 2 crystal fixed subassembly, 21 fixing base, 211 bearing, 22 adsorption disk, 221 pivot, 222 elastic buffer pad, 2221 through-hole, 23 vacuum pump, 24 pipeline, 25 manometer, 26 valve, 27 motor, 3 shadowless lamp subassembly, 31 fixed lamp stand, 32 connecting axle, 33 support A, 34 pair support A, 35 arc connecting pipe, 351 controller, 36 lamp disk, 361 lamp groove, 362 bulb, 363 camera, 37 support B, 38 pair support B, 39 display, 4 wafer.

Detailed Description

The present utility model is described in detail below with reference to the drawings and examples of the specification:

fig. 1 to 7 are schematic views showing an embodiment of a device for detecting cleanliness of a surface of a crystal sheet according to the present utility model.

As shown in fig. 1, the device for detecting the cleanliness of the surface of the flaky crystal comprises a detection kitchen 1 provided with a table top 11, a crystal fixing component 2 fixedly arranged on the table top 11 of the detection kitchen 1, and a shadowless lamp component 3 which is arranged above the crystal fixing component 2 and has a camera shooting function;

as shown in fig. 2: the crystal fixing assembly 2 comprises 2 fixing seats 21 which are fixedly arranged on the table top 11 of the detection kitchen 1 at intervals, an adsorption disc 22 which is rotatably connected between the two fixing seats 21, and a vacuum pump 23 which is connected with the adsorption disc 22 through a pipeline 24; the adsorption disc 22 is internally provided with a chamber, a plurality of groups of adsorption hole groups formed by adsorption holes are arranged on the front side wall of the adsorption disc 22 at intervals, the adsorption holes are communicated with the chamber of the adsorption disc 22 and used for adsorbing flaky crystals, and the pipeline 24 is communicated with the chamber of the adsorption disc 22.

The pipeline 24 is provided with a pressure gauge 25 and a valve 26. The upper and lower side walls of the adsorption disc 22 are respectively provided with serial number marks for numbering the adsorption hole groups, and the serial number marks can indirectly number the flaky crystals adsorbed on the adsorption disc 22.

The left and right side walls of the adsorption disc 22 are respectively provided with a rotating shaft 221, the fixing base 21 is correspondingly provided with a bearing 211 for allowing the rotating shaft 221 to penetrate, and one fixing base 21 is provided with a motor 27 which is connected with the rotating shaft 221 and drives the rotating shaft 221 to rotate.

The motor 27 may be a stepper motor or other motors capable of controlling the rotation angle, and may be a rotary cylinder capable of controlling the rotation angle.

The front side wall of the adsorption disc 22 is provided with an elastic buffer pad 222, and the elastic buffer pad 222 is provided with a plurality of through holes 2221 corresponding to the adsorption holes.

The provision of the elastomeric cushion 222 may protect the surface of the crystal from damage.

The top wall of the detection kitchen 1 is provided with an air inlet pipe 12, a fan 121 is arranged in the air inlet pipe 12, and the front side wall of the detection kitchen 1 is provided with an operation window 13.

The air blown out by the fan 121 is introduced into the detection chamber 1 through the air inlet pipe 12, and then is output from the operation window 13. By blowing air by the blower 121, dust around the detecting kitchen 1 can be prevented from entering the detecting kitchen 1, and the whole monitoring area in the detecting kitchen 1 can be kept clean.

A filter screen 122 is detachably connected in the air inlet pipe 12, and the filter screen 122 is located above the fan 121.

The filter screen 122 is arranged to clean the air entering the detection chamber 1 and further keep the whole monitoring area in the detection chamber 1 clean.

The lower part of the table top 11 of the detection kitchen 1 is provided with a storage cabinet 14, the vacuum pump 23 is arranged in the storage cabinet 14, and the table top 11 of the detection kitchen 1 is provided with a mounting hole through which a containing pipeline 24 passes.

As shown in fig. 3: the shadowless lamp assembly 3 comprises a fixed lamp holder 31 connected with the top wall of the detection kitchen 1, a connecting shaft 32 connected with the fixed lamp holder 31 and extending downwards, and a bracket A33 rotatably sleeved on the connecting shaft 32; the end of the support A33 is rotationally connected with a secondary support A34, the secondary support A34 can rotate on a horizontal plane along with the connection position of the secondary support A34 and the support A33, one end of the secondary support A34 is hinged with an arc-shaped connecting pipe 35, the arc-shaped connecting pipe 35 can swing up and down along the hinge point, a lamp panel 36 is rotationally connected onto the arc-shaped connecting pipe 35, the lamp panel 36 can rotate along with the connection point of the lamp panel 36 and the arc-shaped connecting pipe 35, a plurality of lamp slots 361 are uniformly distributed on the lamp panel 36, a bulb 362 (such as an LED bulb) is arranged in the lamp slots 361, and a plurality of cameras 363 are further arranged on the lamp panel 36.

The shadowless lamp assembly 3 further comprises a bracket B37 which is rotatably sleeved on the connecting shaft 32; the end of the bracket B37 is rotatably connected with a secondary bracket B38, and a display 39 used for being connected with a camera 363 is arranged on the secondary bracket B38.

The shadowless lamp assembly 3 can adjust the angle and the position of the lamp panel 36 according to actual conditions, ensure that the camera 363 has sufficient light source when shooting the wafer 4, and simultaneously enable the display 39 to clearly display the surface of the wafer 4.

The bracket A33 and the bracket B37 can rotate around the central axis of the connecting shaft 32; the number of the lamp panels 36, the corresponding brackets a33, the corresponding auxiliary brackets a34 and the corresponding arc-shaped connecting pipes 35 can be set according to actual needs. As shown in fig. 1 and 3, the number of lamp panels 36 in the present embodiment is 2. The camera 363 can automatically zoom.

The arc-shaped connecting pipe 35 is provided with a controller 351, and the controller 351 can control the brightness of the bulb 362 in the lamp panel 36, control the camera 363, control the opening and closing of the bulb 362 and the camera 363, and the like. To ensure heat dissipation, the back of the lamp panel 36 may be provided with heat dissipation holes.

Before detection, the fan 121 is started in advance, the adsorption disc 22 is wiped by diethyl ether, and impurities on the surface of the adsorption disc 22 are removed. Then the motor controls the adsorption disc 22 to rotate, so that the surface of the adsorption disc 22 with the elastic buffer pad 222 is turned upwards. As shown in fig. 4, the front, back, left and right surfaces of the plated sheet crystal (i.e. the wafer 4) are non-light-passing surfaces, and the upper and lower surfaces are light-passing surfaces, so that the wafer 4 is orderly placed on the through hole 2221 area corresponding to the serial number mark from left to right, and the back wall surface of the wafer is in contact with the elastic cushion 222 (as shown in fig. 5); the valve 26 is rotated, the vacuum pump 23 is turned on, vacuum is pumped, after the vacuum degree reaches a certain value, the wafer 4 is firmly adsorbed on the adsorption disc 22, then the adsorption disc 22 is rotated, after each wafer 4 is rotated to extend longitudinally (namely, the light passing surface is located on the upper surface and the lower surface as shown in fig. 6), the lamp disc 36 of the shadowless lamp assembly 3 is adjusted to a proper position, the surface of the wafer 4 can be clearly observed on the display 39 by adjusting the focal length and the amplification factor of the camera 363, if dust, spots or other stains on the crystal corresponding to a certain serial number mark can be directly wiped by using dust-free cloth sprayed with diethyl ether, after the upper light passing surface of each wafer 4 is detected, the motor is started to control the adsorption disc 22 to rotate 180 degrees, so that the lower light passing surface of the wafer 4 faces upwards (as shown in fig. 7), and if dust, spots on the wafer 4 corresponding to a certain serial number mark can be directly wiped by using dust-free cloth sprayed with diethyl ether. After all the wafers 4 are inspected, the motor is started to control the adsorption disc 22 to rotate, so that one surface of the adsorption disc 22 with the elastic buffer pad 222 is turned back to be upward, that is, all the wafers 4 are horizontally laid on the adsorption disc 22, then the valve 26 is slowly opened, so that the suction force of the adsorption disc 22 is gradually reduced, and then the inspected flaky crystals are taken down.

The above operations may then be repeated to perform the next wafer inspection, and the positions of the components of the shadow-free lamp assembly 3 may not be adjusted during the next wafer inspection, because the positions of the components of the shadow-free lamp assembly 3 have been adjusted to the optimal state during the previous wafer inspection.

The device for detecting the cleanliness of the surface of the flaky crystal can detect the cleanliness of a plurality of crystals at one time, does not damage the light-passing surface, can greatly improve the detection efficiency and improves the productivity.

The foregoing is only a preferred embodiment of the present utility model, but the scope of the present utility model is not limited thereto, and any person skilled in the art, who is within the scope of the present utility model, should make equivalent substitutions or modifications according to the technical scheme of the present utility model and the inventive concept thereof, and should be covered by the scope of the present utility model.

Claims

1. The utility model provides a slice crystal surface cleanliness factor detection device which characterized in that: the detecting kitchen comprises a detecting kitchen (1) provided with a table top (11), a crystal fixing component (2) fixedly arranged on the table top (11) of the detecting kitchen (1), and a shadowless lamp component (3) which is arranged above the crystal fixing component (2) and has a camera shooting function;

the crystal fixing assembly (2) comprises 2 fixing seats (21) which are fixedly arranged on the table top (11) of the detection kitchen (1) at intervals, an adsorption disc (22) which is rotatably connected between the two fixing seats (21), and a vacuum pump (23) which is connected with the adsorption disc (22) through a pipeline (24); the adsorption plate (22) is internally provided with a cavity, a plurality of groups of adsorption hole groups formed by adsorption holes are arranged on the front side wall of the adsorption plate (22) at intervals, the adsorption holes are communicated with the cavity of the adsorption plate (22) and used for adsorbing flaky crystals, and the pipeline (24) is communicated with the cavity of the adsorption plate (22).

2. The sheet crystal surface cleanliness detection device according to claim 1, wherein: the adsorption disc is characterized in that rotating shafts (221) are respectively arranged on the left side wall and the right side wall of the adsorption disc (22), bearings (211) for allowing the rotating shafts (221) to penetrate are correspondingly arranged on the fixing seats (21), and a motor (27) connected with the rotating shafts (221) and used for driving the rotating shafts (221) to rotate is arranged on one fixing seat (21).

3. The sheet crystal surface cleanliness detection device according to claim 1, wherein: an elastic buffer pad (222) is arranged on the front side wall of the adsorption disc (22), and a plurality of through holes (2221) corresponding to the adsorption holes are formed in the elastic buffer pad (222).

4. The sheet crystal surface cleanliness detection device according to claim 1, wherein: the top wall of the detection kitchen (1) is provided with an air inlet pipe (12), a fan (121) is arranged in the air inlet pipe (12), and the front side wall of the detection kitchen (1) is provided with an operation window (13).

5. The apparatus for detecting surface cleanliness of a flaky crystal according to claim 4, wherein: the filter screen (122) is detachably connected in the air inlet pipe (12), and the filter screen (122) is positioned above the fan (121).

6. The sheet crystal surface cleanliness detection device according to claim 1, wherein: the utility model discloses a kitchen cabinet is characterized in that a storage cabinet (14) is arranged below a table top (11) of the detection kitchen (1), a vacuum pump (23) is arranged in the storage cabinet (14), and a mounting hole through which a containing pipeline (24) passes is formed in the table top (11) of the detection kitchen (1).

7. The sheet crystal surface cleanliness detection device according to claim 1, wherein: the shadowless lamp assembly (3) comprises a fixed lamp holder (31) connected with the top wall of the detection kitchen (1), a connecting shaft (32) connected with the fixed lamp holder (31) and extending downwards, and a bracket A (33) rotatably sleeved on the connecting shaft (32); the end of the support A (33) is rotationally connected with the auxiliary support A (34), one end of the auxiliary support A (34) is hinged with the arc-shaped connecting pipe (35), a lamp panel (36) is rotationally connected with the arc-shaped connecting pipe (35), a plurality of lamp slots (361) are uniformly distributed on the lamp panel (36), bulbs (362) are arranged in the lamp slots (361), and a plurality of cameras (363) are further arranged on the lamp panel (36).

8. The sheet crystal surface cleanliness detection device according to claim 7, wherein: the shadowless lamp assembly (3) further comprises a bracket B (37) which is rotatably sleeved on the connecting shaft (32); the end of the support B (37) is rotatably connected with a secondary support B (38), and a display (39) connected with a camera (363) is arranged on the secondary support B (38).