CN219218133U

CN219218133U - Vapor deposition vacuum ion coating machine

Info

Publication number: CN219218133U
Application number: CN202222906108.XU
Authority: CN
Inventors: 刘畅; 杨兵; 徐勇斌; 王俊见
Original assignee: Changzhou Mairuiting Coating Technology Co ltd
Current assignee: Changzhou Mairuiting Coating Technology Co ltd
Priority date: 2022-11-02
Filing date: 2022-11-02
Publication date: 2023-06-20
Anticipated expiration: 2032-11-02

Abstract

The utility model discloses a vapor deposition vacuum ion plating machine which comprises a plating machine body, a box door, a plating frame and a driving structure, wherein the shape of the box door is the same as that of the plating machine body, one side of the box door is rotationally connected with the corresponding side of the plating machine body, a supporting rod and a limiting sealing block are arranged at the bottom of the inner side of the box door, a fixed clamping block is arranged at the top of the inner side of the box door, an open adapting chute is arranged on the fixed clamping block, a limiting sliding rod is arranged at the top of the supporting rod, a first gear is fixedly arranged in the middle of the bottom of the plating frame, an adapting hole is arranged at the axis of the first gear, a rotary clamping rod is arranged in the middle of the top of the plating frame, an adapting clamping block is arranged at the top of the rotary clamping rod and is clamped with the adapting chute, the adapting hole is clamped with the limiting sliding rod, a second gear is arranged at the top of the limiting sealing block, the first gear is meshed with the second gear, and the second gear is meshed with the driving structure. The vapor deposition vacuum ion coating machine is convenient for cleaning the inside of the coating machine.

Description

Vapor deposition vacuum ion coating machine

Technical Field

The utility model relates to a vapor deposition vacuum ion coating machine, and belongs to the field of coating machines.

Background

The vacuum coating machine mainly refers to a type of coating film which needs to be performed under a higher vacuum degree, and particularly comprises various types including vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, ion beam sputtering and the like, wherein the evaporation coating film generally heats a target material to evaporate surface components in an atomic group or ion form. And deposited on the surface of the substrate to form a thin film through a film forming process (scattered-island structure-vagal structure-lamellar growth). For sputtering type coating films, the method can be simply understood as that electrons or high-energy laser are utilized to bombard a target material, surface components are sputtered in the form of atomic groups or ions and finally deposited on the surface of a substrate, the film is finally formed through a film forming process, the inside of the coating machine needs to be cleaned regularly in the long-term use process of the coating machine, and the existing equipment is troublesome to detach an internal coating frame during cleaning and troublesome to clean.

Disclosure of Invention

The utility model aims to provide a vapor deposition vacuum ion coating machine which is convenient to adjust the cleaning inside the coating machine.

The utility model provides a technical scheme for solving the technical problems, which is as follows: the utility model provides a vapor deposition vacuum ion coating machine, includes coating machine main part, chamber door, coating frame and drive structure, one side opening of coating machine main part, the shape of chamber door is the same with the coating machine main part shape, one side opening of chamber door, opening one side of chamber door with opening one side of coating machine main part sets up relatively, one side of chamber door with the corresponding one side rotation of coating machine main part is connected, the inboard bottom of chamber door is equipped with bracing piece and spacing sealing block, the inboard top of chamber door is equipped with fixed fixture block, be equipped with open-ended adaptation spout on the fixed fixture block, the bracing piece top is equipped with spacing slide bar, the fixed first gear that is equipped with in the middle of the bottom of coating frame, the axle center department of first gear is equipped with the adaptation hole, be equipped with rotatory clamping lever in the middle of the top of coating frame, rotatory clamping lever is equipped with the adaptation fixture block, rotatory clamping lever and adaptation spout joint, adaptation hole and spacing slide bar joint, the top of spacing sealing block is equipped with the second gear, first gear with the second gear meshing, the middle part is equipped with the second gear and extends to the one end of sealing rod outside the sealing box, the extension from the chamber door is connected to the outer side of sealing bar.

The rotary connecting part of one side of the box door and the corresponding side of the film plating machine main body is provided with a connecting rotating rod, one side of the film plating machine main body, which is far away from the connecting rotating rod, is provided with a fixed block, one side of the box door, which is far away from the connecting rotating rod, is provided with a locking block, the middle part of the fixed block is provided with a rotary block, the rotary block is rotationally connected with the fixed block, and the rotary block is provided with a threaded rod.

One end of the threaded rod is fixedly connected with the rotating block, the locking threaded sleeve is arranged at the other end of the threaded rod, a locking groove is formed in the locking block, one end, far away from the rotating block, of the threaded rod is clamped with the locking groove through rotation of the rotating block, and the locking threaded sleeve abuts against one end, far away from the rotating block, of the locking block.

The fixed fixture block is arranged in an L shape in a side view direction.

The height of the coating frame is smaller than the distance between the supporting rod and the fixed clamping block.

The vapor deposition vacuum ion coating machine also comprises a fixed bottom plate, wherein a supporting block is arranged at the top of the fixed bottom plate, and the top of the supporting block is fixedly connected with the bottom of the coating machine main body.

The outer surface of the box door is provided with a handle and an observation window.

The utility model has the positive effects that:

in actual use, the vapor deposition vacuum ion plating machine can conveniently connect and lock the plating machine main body with the box door in the corresponding arrangement state of the locking screw sleeve, the fixed block, the rotating block and the threaded rod, and simultaneously can conveniently install and fix the plating rack in the corresponding arrangement state of the first gear, the supporting rod, the limiting slide rod, the adapting hole, the rotating clamping rod, the adapting clamping block, the fixed clamping block and the adapting slide groove, and can conveniently detach the plating rack, thereby conveniently cleaning the inner sides of the plating machine main body and the box door.

Drawings

The vapor deposition vacuum ion plating machine of the present utility model is further described below with reference to the accompanying drawings.

Fig. 1 is a schematic overall structure of the present embodiment.

FIG. 2 is a schematic diagram of the overall side view of the present embodiment

Fig. 3 is a schematic view of the inner structure of the door of the present embodiment.

Fig. 4 is a schematic view of a mounting structure of a coating frame according to the present embodiment.

The above reference numerals are as follows:

the coating machine comprises a fixed bottom plate 1, a supporting block 2, a coating machine body 3, a box door 4, a handle 5, an observation window 6, a locking screw sleeve 7, a fixed block 8, a rotating block 9, a threaded rod 10, a driving structure 11, a connecting rotating rod 12, a coating frame 13, a rotating clamping rod 14, an adapting clamping block 15, a fixed clamping block 16, a second gear 17, a first gear 18, a supporting rod 19, a limiting sliding rod 20, a limiting sealing block 21, an adapting sliding groove 22 and an adapting hole 23.

Detailed Description

Examples

Referring to fig. 1 to 4, a vapor deposition vacuum ion plating machine of this embodiment includes a plating machine body 3, a door 4, a plating rack 13 and a driving structure 11, wherein one side of the plating machine body 3 is opened, the shape of the door 4 is the same as that of the plating machine body 3, one side of the door 4 is opened, one side of the door 4 is opposite to one side of the opening of the plating machine body 3, one side of the door 4 is rotatably connected with the corresponding side of the plating machine body 3, and a handle 5 and an observation window 6 are provided on the outer surface of the door 4.

The bottom of the inner side of the box door 4 is provided with a supporting rod 19 and a limiting sealing block 21, the top of the inner side of the box door 4 is provided with a fixed clamping block 16, the fixed clamping block 16 is provided with an open-ended adaptive chute 22, and the fixed clamping block 16 is arranged in an L shape in the side view direction.

The top of the supporting rod 19 is provided with a limiting sliding rod 20, a first gear 18 is fixedly arranged in the middle of the bottom of the film coating frame 13, an adapting hole 23 is formed in the axis of the first gear 18, a rotary clamping rod 14 is arranged in the middle of the top of the film coating frame 13, and an adapting clamping block 15 is arranged at the top of the rotary clamping rod 14.

The height of the film coating frame 13 is smaller than the distance between the supporting rod 19 and the fixed clamping block 16, the rotary clamping rod 14 is clamped with the adapting sliding groove 22, the adapting hole 23 is clamped with the limiting sliding rod 20, and the film coating frame 13 can be conveniently detached, so that the film coating machine main body 3 and the inside of the box door 4 can be conveniently cleaned at the later stage.

The top of spacing sealing block 21 is equipped with second gear 17, and first gear 18 and second gear 17 meshing, and the middle part of second gear 17 is equipped with the adaptation pole, and the adaptation pole passes from spacing sealing block 21 middle part and extends outside chamber door 4, and drive structure 11 is connected with the one end that the adaptation pole extends outside chamber door 4.

The rotation junction of one side of chamber door 4 and the corresponding one side of coating machine main part 3 is equipped with connects bull stick 12, and one side that the coating machine main part 3 kept away from and connects bull stick 12 is equipped with fixed block 8, and one side that chamber door 4 kept away from and connects bull stick 12 is equipped with latch segment 24, and the middle part of fixed block 8 is equipped with rotatory piece 9, and rotatory piece 9 rotates with fixed block 8 to be connected, is equipped with threaded rod 10 on the rotatory piece 9.

One end of the threaded rod 10 is fixedly connected with the rotating block 9, the locking threaded sleeve 7 is arranged at the other end of the threaded rod 10, a locking groove is formed in the locking block 24, the threaded rod 10 can rotate through the rotating block 9 to enable one end, far away from the rotating block 9, of the threaded rod 10 to be clamped with the locking groove, and the locking threaded sleeve 7 abuts against one end, far away from the rotating block 9, of the locking block 24.

The vapor deposition vacuum ion plating machine of the embodiment further comprises a fixed bottom plate 1, wherein a supporting block 2 is arranged at the top of the fixed bottom plate 1, and the top of the supporting block 2 is fixedly connected with the bottom of the plating machine main body 3.

In the vapor deposition vacuum ion plating machine of this embodiment, when in use, the adapting hole 23 at the lower end of the plating rack 13 is aligned with the limit slide bar 20, then the rotary clamping bar 14 is clamped in the adapting slide slot 22, then the adapting hole 23 is clamped with the limit slide bar 20, the arranged adapting clamping block 15 is attached in the groove at the upper end of the adapting slide slot 22, then an object to be plated can be placed at the upper end of the plating rack 13, then the box door 4 can be closed, the box door 4 and the plating machine body 1 are locked under the corresponding arrangement state of the locking threaded sleeve 7, the fixed block 8, the rotary block 9 and the threaded rod 10, then the driving structure 11 is controlled by an external device to drive the second gear 17 to rotate, and then the second gear 17 drives the first gear 18 and the plating rack 13 to rotate, thereby plating the object.

In the vapor deposition vacuum ion plating machine of this embodiment, during cleaning, the plating frame 13 is pushed upwards, and after the limit slide bar 20 and the adapting hole 23 are separated, the plating frame 13 can be taken out, and then the inside of the plating machine main body 3 and the box door 4 can be cleaned.

It should be understood that the above-described embodiments are merely examples for clearly illustrating the embodiments of the present utility model, and are not limiting of the embodiments of the present utility model. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. While remaining within the scope of the utility model, obvious variations or modifications are incorporated by reference herein.

Claims

1. A vapor deposition vacuum ion coating machine is characterized in that: the novel coating machine comprises a coating machine main body (3), a box door (4), a coating frame (13) and a driving structure (11), wherein one side of the coating machine main body (3) is provided with an opening, the shape of the box door (4) is the same as that of the coating machine main body (3), one side of the opening of the box door (4) is provided with an opening opposite to one side of the opening of the coating machine main body (3), one side of the box door (4) is rotatably connected with the corresponding side of the coating machine main body (3), the bottom of the inner side of the box door (4) is provided with a supporting rod (19) and a limiting sealing block (21), the top of the inner side of the box door (4) is provided with a fixed clamping block (16), an open adapting sliding groove (22) is arranged on the fixed clamping block (16), a limiting sliding rod (20) is arranged at the top of the supporting rod (19), a first gear (18) is fixedly arranged in the middle of the bottom of the coating frame (13), an adapting hole (23) is formed in the axle center of the first gear (18), a rotary clamping rod (14) is arranged in the middle of the top of the coating frame (13), the rotary clamping rod (14) is provided with the adapting sliding groove (20), and the adapting rod (22) is connected with the limiting sliding rod (20), the top of spacing sealing block (21) is equipped with second gear (17), first gear (18) with second gear (17) meshing, the middle part of second gear (17) is equipped with the adaptation pole, the adaptation pole passes from spacing sealing block (21) middle part and extends outside chamber door (4), drive structure (11) with the adaptation pole extends to the outer one end of chamber door (4) and is connected.

2. The vapor deposition vacuum ion plating machine according to claim 1, wherein: one side of chamber door (4) with the rotation junction of corresponding one side of coating machine main part (3) is equipped with connects bull stick (12), one side that connecting bull stick (12) was kept away from to coating machine main part (3) is equipped with fixed block (8), one side that connecting bull stick (12) was kept away from to chamber door (4) is equipped with latch segment (24), the middle part of fixed block (8) is equipped with rotatory piece (9), rotatory piece (9) are connected with rotation of fixed block (8), be equipped with threaded rod (10) on rotatory piece (9).

3. The vapor deposition vacuum ion plating machine according to claim 2, wherein: one end of the threaded rod (10) is fixedly connected with the rotating block (9), the locking threaded sleeve (7) is arranged at the other end of the threaded rod (10), a locking groove is formed in the locking block (24), the threaded rod (10) can rotate through the rotating block (9) to enable one end, far away from the rotating block (9), of the threaded rod (10) to be clamped with the locking groove, and the locking threaded sleeve (7) and the locking block (24) are abutted against one end, far away from the rotating block (9).

4. The vapor deposition vacuum ion plating machine according to claim 1, wherein: the fixed clamping block (16) is arranged in an L shape in a side view direction.

5. The vapor deposition vacuum ion plating machine according to claim 1, wherein: the height of the film coating frame (13) is smaller than the distance between the supporting rod (19) and the fixed clamping block (16).

6. The vapor deposition vacuum ion plating machine according to any of claims 1 to 5, wherein: the coating machine further comprises a fixed bottom plate (1), wherein a supporting block (2) is arranged at the top of the fixed bottom plate (1), and the top of the supporting block (2) is fixedly connected with the bottom of the coating machine main body (3).

7. The vapor deposition vacuum ion plating machine according to any of claims 1 to 5, wherein: the outer surface of the box door (4) is provided with a handle (5) and an observation window (6).