CN219210466U

CN219210466U - Liquid droplet discharging device

Info

Publication number: CN219210466U
Application number: CN202223412494.3U
Authority: CN
Inventors: 元经皓; 卢相勳; 郑兴铁
Original assignee: Samsung Display Co Ltd
Current assignee: Samsung Display Co Ltd
Priority date: 2021-12-16
Filing date: 2022-12-15
Publication date: 2023-06-20
Anticipated expiration: 2032-12-15
Also published as: KR20230092092A

Abstract

There is provided a liquid droplet discharging apparatus including: a main discharge portion; and an inspection discharge portion disposed at one side of the main discharge portion, wherein the main discharge portion includes: a main frame; a main table disposed on the main frame and configured to dispose a mother substrate; a dispenser mover disposed on the main table and configured to move in a first direction; and a dispenser configured to move in a first direction by a mover for the dispenser and discharge liquid droplets, wherein the inspection discharge section includes: checking the frame; an inspection stage disposed on the inspection frame and configured to dispose a substrate for a sample and a substrate for inspection; and a sensor capable of obtaining measurement information of the droplet for inspection discharged onto the substrate for inspection by the dispenser and the sample arranged on the substrate for sample, the dispenser being configured to discharge the droplet onto the substrate for inspection when adjacent to the inspection discharge portion.

Description

Liquid droplet discharging device

Technical Field

The present disclosure relates to a droplet discharge method and a droplet discharge apparatus.

Background

Recently, the manufacturing process of various devices includes a process of discharging droplets using a dispenser. For example, the droplet can be applied to various devices such as a flat panel display device.

At this time, in order to reduce the reject ratio of the device to which the liquid droplet is applied, it is necessary to precisely control the amount of liquid droplet discharged. For this reason, it is possible to consider a scheme in which a process user periodically checks equipment, but there is a disadvantage in that the convenience of the process cannot be sufficiently ensured.

Accordingly, there is a need for a droplet discharge system capable of precisely controlling the amount of droplets and improving process convenience.

Disclosure of Invention

The present disclosure has been made to solve the above-described problems, and an object thereof is to provide a liquid droplet discharge method and a liquid droplet discharge apparatus capable of ensuring reliability of a sensor for measuring a liquid droplet value and timely grasping a failure of equipment to prevent unnecessary consumption.

According to an embodiment of the present disclosure, there may be provided a liquid droplet discharging apparatus as follows: the liquid droplet discharging apparatus includes: a main discharge portion; and an inspection discharge portion disposed at one side of the main discharge portion, wherein the main discharge portion includes: a main frame; a main table disposed on the main frame and configured to dispose a mother substrate; a dispenser mover disposed on the main table and configured to move in a first direction; and a dispenser configured to move in the first direction by the dispenser mover and discharge liquid droplets, wherein the inspection discharge section includes: checking the frame; an inspection stage disposed on the inspection frame and configured to dispose a substrate for a sample and a substrate for inspection; and a sensor capable of obtaining measurement information of the droplet for inspection discharged onto the substrate for inspection by the dispenser and the sample arranged on the substrate for sample, the dispenser being configured to discharge the droplet onto the substrate for inspection when adjacent to the inspection discharge portion.

According to an embodiment, a droplet discharge device in which the sample and the droplet have the same light transmittance as each other may be provided.

According to an embodiment, a droplet discharge device that corrects a discharge amount of the droplet of the dispenser based on measurement information on the inspection droplet obtained by the sensor may be provided.

According to an embodiment, a droplet discharge device may be provided in which the position of the sensor is fixed relative to the main discharge.

According to an embodiment, a droplet discharge device in which the sensor is more adjacent to the inspection substrate than the sample substrate may be provided.

According to an embodiment, a droplet discharge device may be provided wherein the sensor comprises a chromatic confocal sensor (CCS: chromatic Confocal Sensor).

According to an embodiment, a droplet discharge device may be provided in which the sample arranged on the sample substrate includes a plurality of samples having different lengths from each other in a direction.

According to an embodiment, a droplet discharge device may be provided in which the sample includes a plurality of samples stacked in order in a thickness direction of the sample substrate.

According to an embodiment, a droplet discharge device in which a difference between light transmittance of the sample and light transmittance of the droplet discharged onto the inspection substrate is equal to or less than a predetermined difference may be provided.

According to an embodiment of the present disclosure, it is possible to provide a liquid droplet discharge method and a liquid droplet discharge apparatus capable of ensuring reliability of a sensor that measures a value of a liquid droplet and timely knowing about a device failure to prevent unnecessary consumption.

Drawings

Fig. 1 is a schematic perspective view showing a droplet discharge device according to an embodiment.

Fig. 2 to 4 are diagrams for explaining a method of measuring the height of a droplet by a sensor according to an embodiment.

Fig. 5 is a block diagram showing a droplet discharge device according to an embodiment.

Fig. 6 and 7 are flowcharts showing a droplet discharge method according to the embodiment.

Fig. 8 to 12 and 15 are plan views schematically showing the droplet discharge method according to the embodiment in terms of process steps.

Fig. 13 and 14 are schematic perspective views showing a droplet discharge method according to an embodiment.

Detailed Description

The present disclosure is capable of numerous modifications and forms, and specific embodiments thereof are shown by way of example in the drawings and will herein be described in detail. However, it is not intended to limit the disclosure to the particular forms disclosed, but it is to be understood to include all modifications, equivalents, and alternatives falling within the spirit and scope of the disclosure.

The terms "first," "second," and the like, may be used to describe various elements, but the elements should not be limited by the terms. The terms are used only to distinguish one component from another. For example, a first component may be named a second component, and similarly, a second component may also be named a first component, without departing from the scope of the claims of the present disclosure. Unless the context clearly indicates otherwise, the singular forms include the plural.

In this disclosure, the terms "comprises" and "comprising" are used to specify the presence of stated features, integers, steps, operations, elements, components, or groups thereof, but do not preclude the presence or addition of one or more other features or integers, steps, operations, elements, components, or groups thereof. Also, in the case where a portion of a layer, a film, a region, a plate, or the like is referred to as being "over" another portion, it includes not only the case of being "immediately over" another portion but also the case of having another portion in between. In this specification, when a portion of a layer, a film, a region, a plate, or the like is formed over another portion (on), the direction is not limited to the upper direction, but includes a case where the layer, the film, the region, the plate, or the like is formed in a side or lower direction. Conversely, where a portion of a layer, film, region, plate, or the like is referred to as being "under" another portion, this includes not only the case of being "immediately under" another portion, but also the case of having another portion in between.

The present disclosure relates to a droplet discharge method and a droplet discharge apparatus. Hereinafter, a droplet discharge method and a droplet discharge device according to embodiments will be described with reference to the drawings.

Referring to fig. 1, a liquid droplet discharge device 1 according to an embodiment may include a main discharge portion MDP and an inspection discharge portion IDP. For example, the main discharging portion MDP may include a main frame 10, a main table 100, a main rail 140, a dispenser 180, and a dispenser mover 190. The inspection discharge unit IDP may include an inspection frame 20, an inspection table 200, an inspection rail 240, and a sensor 280.

The main discharge portion MDP may provide droplets on the mother substrate 160. For example, the mother substrate 160 may be a base member of a device that is desired to be manufactured, and may receive liquid droplets at the main discharge portion MDP. The mother substrate 160 may be a substrate or a film having rigidity or flexibility. The material of the mother substrate 160 is not limited to a specific example.

The liquid droplets may represent a liquid phase fluid. For example, the droplets may be resin (resin) or liquid crystal. However, the present disclosure is not necessarily limited to the foregoing examples, and the liquid droplets may include a variety of liquid-phase fluids.

The main drain MDP may be disposed at one side of the inspection drain IDP. The main discharge portion MDP and the inspection discharge portion IDP may be sufficiently adjacent. For example, when the dispenser 180 is located at one end of the main discharge portion MDP, the dispenser 180 may discharge liquid droplets onto the inspection substrate 460 of the inspection discharge portion IDP.

According to an embodiment, in the main drain MDP, the process direction may be parallel to the first direction DR 1. For example, the mother substrate 160 provided with the droplets may be transferred in a direction parallel and opposite to the first direction DR 1.

The main frame 10 may be a component provided with a configuration of the main discharge portion MDP. The main discharge portion MDP may be configured to be mounted on the main frame 10. For example, a main table 100, a main rail 140, a dispenser 180, and a dispenser mover 190 may be disposed on the main frame 10.

The main table 100 may be disposed on a main rail 140 on the main frame 10. The main table 100 may be configured to move along the main rail 140. For example, the main table 100 may be configured to move in the first direction DR 1.

The main stage 100 may provide an area where the mother substrate 160 is disposed. For example, the mother substrate 160 may be loaded (unloaded) on the master table 100 and unloaded (unloaded) from the master table 100.

The main rail 140 may be disposed on the main frame 10. The main rail 140 may extend in the process direction of the main drain MDP. For example, the main rail 140 may extend in the first direction DR 1. According to an embodiment, the main table 100 and the dispenser mover 190 may move along the main rail 140.

The dispenser 180 is configured to provide droplets. The dispenser 180 may discharge droplets. For example, the dispenser 180 may repeatedly discharge droplets of a specified amount. The dispenser 180 may discharge a single droplet at a time.

In order to improve the process accuracy, it is necessary to precisely control the amount of liquid crystal droplets provided by the dispenser 180. According to an embodiment, the amount of droplets discharged by the dispenser 180 may be precisely controlled, so that the amount of droplets desired by the user may be provided. Details regarding this will be described later.

As the dispenser mover 190 moves, the dispenser 180 may move in the first direction DR 1. The position of the dispenser 180 in the first direction DR1 may be changed by the dispenser mover 190.

The dispenser 180 may be fixed to the dispenser mover 190 in a manner of moving in the second direction DR 2. For example, the dispenser 180 may be moved in the second direction DR2 by a rail mounted on the dispenser mover 190.

According to an embodiment, the second direction DR2 represents a direction different from the first direction DR 1. For example, the first direction DR1 and the second direction DR2 may be perpendicular to each other.

The dispenser mover 190 may be configured to move along the main rail 140. For example, the dispenser mover 190 may move in the process direction of the main discharge portion MDP.

The dispenser mover 190 may move the dispenser 180. For example, the dispenser 180 may be coupled to the dispenser mover 190, and the dispenser mover 190 may move the dispenser 180 in the first direction DR 1.

According to an embodiment, the dispenser mover 190 may be a gantry (garry).

The inspection discharging part IDP may be disposed at one side of the main discharging part MDP. As described above, the main discharge portion MDP and the inspection discharge portion IDP may be sufficiently adjacent. According to the embodiment, the main discharge portion MDP and the inspection discharge portion IDP may be sufficiently adjacent, so that the inspection stage 200 may also be moved adjacent to the main discharge portion MDP.

The inspection discharge portion IDP can obtain measurement information for judging the operation state of the dispenser 180. For example, the dispenser 180 may provide the inspection droplet 1200 onto the inspection substrate 460. Also, the inspection discharge portion IDP may determine whether the dispenser 180 is operating normally or not based on the measurement information of the inspection liquid droplet 1200. The measurement information may include numerical (height, etc.) data obtained by the sensor 280.

The inspection frame 20 may be a member provided with a structure of the inspection discharging portion IDP. The inspection frame 20 may be provided with an inspection discharge portion IDP. For example, an inspection table 200 and an inspection rail 240 may be disposed on the inspection frame 20.

Inspection station 200 may be disposed on inspection track 240 on inspection frame 20. Inspection station 200 may be configured to move along inspection track 240. For example, the inspection station 200 may be movable in the second direction DR 2.

The inspection stage 200 may provide an area where the sample substrate 360 and the inspection substrate 460 are arranged. For example, the sample substrate 360 and the inspection substrate 460 may be loaded on the inspection stage 200 and unloaded from the inspection stage 200.

The sample substrate 360 may be disposed on the inspection stage 200. The sample 2200 may be disposed on the sample substrate 360. Sample 2200 may be provided for determining whether sensor 280 is operating properly.

The inspection substrate 460 may be disposed on the inspection stage 200. The inspection liquid droplet 1200 may be disposed on the inspection substrate 460. The inspection droplet 1200 may be a droplet provided for judging whether the dispenser 180 is operating normally or not.

The sample substrate 360 and the inspection substrate 460 may include substances similar to those of the mother substrate 160. For example, the sample substrate 360, the inspection substrate 460, and the mother substrate 160 may include the same substance. Accordingly, in the main discharge portion MDP and the inspection discharge portion IDP, the sample 2200, the droplet 1100, and the inspection droplet 1200 can be provided in a similar manner to the arrangement environment.

The inspection track 240 may be disposed on the inspection frame 20. The inspection rail 240 may extend in a direction in which the sample substrate 360 and the inspection substrate 460 move. For example, the inspection track 240 may extend in the second direction DR 2. According to an embodiment, inspection station 200 may be moved along inspection track 240, whereby sample substrate 360 and inspection substrate 460 may be adjacent to sensor 280.

The sensor 280 can obtain measurement information of the inspection droplet 1200 and the sample 2200. The measurement information may represent numerical data of the inspection droplet 1200 and the sample 2200.

For example, the sensor 280 may obtain height data of the inspection droplet 1200. The sensor 280 may obtain height data for the sample 2200. According to an embodiment, the droplet discharge device 1 (e.g., a processor (processor 420 of fig. 5)) may calculate the volume of the sample 2200 based on the height data obtained by the sensor 280, and may calculate the volume of the inspection droplet 1200.

The position of the sensor 280 may be fixed. For example, the sensor 280 may be coupled to the inspection frame 20. Although not explicitly illustrated in fig. 1, the sensor 280 may be provided in a non-moving manner in combination with another component. The position of the sensor 280 may be fixed with respect to the main drain MDP.

The sensor 280 may be closer to the sample substrate 360 than the inspection substrate 460. Accordingly, the sensor 280 can obtain measurement information on the inspection liquid droplet 1200 after obtaining measurement information on the sample 2200.

In a state where the position of the sensor 280 is fixed, the sample substrate 360 and the inspection substrate 460 can be moved to positions adjacent to the sensor 280.

In this case, after confirming the operation state of the sensor 280 based on the measurement information about the sample 2200 arranged on the sample substrate 360, the sensor 280 can obtain the measurement information about the inspection liquid droplet 1200 arranged on the inspection substrate 460. Accordingly, the reliability of measurement information about the inspection liquid droplet 1200 can be improved. That is, the risk of the inspection accuracy of the sensor 280 being impaired can be reduced.

According to an embodiment, the sensor 280 may comprise a chromatic confocal sensor (CCS: chromatic Confocal sensor).

Hereinafter, an operation method with respect to the sensor 280 when the sensor 280 is a chromatic confocal sensor CCS will be described with reference to fig. 2 to 4.

Referring to fig. 2, the chromatic confocal sensor CCS may include a light source 282, an optical lens 284, a beam splitter 286, a pinhole 287, and a spectrometer 288.

The chromatic confocal sensor CCS may include a light source 282 that emits white light. White light may include light in a variety of wavelength bands including the visible wavelength band. Light emitted from the light source 282 may be supplied to the upper surface of the inspection liquid droplet 1200 through the optical lens 284. For example, a point P on the upper surface of the inspection droplet 1200 of which the height to be measured is marked in fig. 2.

The optical lens 284 may separate the supplied light according to wavelength, and the focal lengths of the separated light may be different from each other. For example, the long wavelength light R may form a focus at a relatively far position, and the short wavelength light B may form a focus at a relatively near position.

Of the separated light, only light having a focal point corresponding to the position of the upper surface of the inspection liquid droplet 1200 can be reflected by the beam splitter 286 and then supplied to the spectrometer 288 through the pinhole 287. Of the separated light, light whose focal point does not correspond to the position of the upper surface of the inspection liquid droplet 1200 may not pass through the pinhole 287 after being reflected by the beam splitter 286.

Thereafter, the height of the upper surface of the inspection liquid droplet 1200 can be calculated based on the light supplied to the spectrometer 288. For example, in the case where the position of the focal point corresponds to the upper surface of the inspection liquid droplet 1200, light of the corresponding wavelength may be provided at high light intensity, and the height of the inspection liquid droplet 1200 may be calculated based on the provided light information.

Referring to fig. 3, the sensor 280 can obtain measurement information of the inspection liquid droplet 1200 in the above-described manner. For example, the sensor 280 may measure height data of the inspection liquid droplet 1200 disposed on the inspection substrate 460.

Referring to fig. 4, the sensor 280 may measure heights for the

groups

1220, 1240, respectively, spaced apart along the second direction DR 2. For example, the sensor 280 may measure the height of each of the second points 1242 of the second set 1240 after measuring the height of each of the first points 1222 of the first set 1220.

The first and

second sets

1220 and 1240 may extend in the first direction DR 1. The first and

second sets

1220, 1240 may be spaced apart along the second direction DR 2.

The first set 1220 may include a first dot 1222 and the second set 1240 may include a second dot 1242. The first point 1222 and the second point 1242 may represent positions of measurement objects to be the sensor 280. For example, each of the first point 1222 and the second point 1242 may correspond to the point P described with reference to fig. 2.

The number of first points 1222 and second points 1242 may be appropriately selected according to the process environment and the resolution of the sensor 280.

For example, sensor 280 may have a resolution per unit length UL. The unit length UL may be a length corresponding to the resolution of the sensor 280. In this case, the sensor 280 may obtain height information for each of the

points

1222, 1242 spaced apart by a unit length UL.

Next, with reference to fig. 5, an operation configuration concerning the liquid droplet discharging apparatus 1 according to the embodiment will be described. Fig. 5 is a block diagram showing a droplet discharge device according to an embodiment.

Referring to fig. 5, the droplet discharge device 1 according to the embodiment may further include a processor 420 and an alarm portion 440.

The processor 420 may perform the operation of the droplet discharge device 1 as a whole. The processor 420 may be implemented as a CPU or a similar device according to hardware, software or a combination thereof. However, the implementation of the processor 420 is not necessarily limited to a particular example.

The processor 420 can calculate the height of the inspection droplet 1200 from the measurement information of the inspection droplet 1200 obtained by the sensor 280. The processor 420 may control the movement of the individual components of the droplet discharge device 1. Processor 420 may determine the operational status of sensor 280 and dispenser 180. For example, the processor 420 may determine whether the sensor 280 and the dispenser 180 are operating properly.

When the processor 420 determines that the sensor 280 and/or the dispenser 180 is in an abnormal state, it may control the alarm unit 440 to output a signal indicating the abnormal state to the user.

However, the operation example of the processor 420 is not limited to the foregoing, and the operation of the droplet discharge device 1 may be interpreted as being controlled by the processor 420 unless otherwise specified.

The alarm portion 440 may output a predetermined signal when it is judged by the processor 420 that the sensor 280 and/or the dispenser 180 is in an abnormal state.

For example, the alarm portion 440 may include a display device. In this case, when it is determined that the sensor 280 and/or the dispenser 180 is in an abnormal state, visual information indicating the determination result may be output. Alternatively, the alarm portion 440 may include an audio device. In this case, when it is determined that the sensor 280 and/or the dispenser 180 is in an abnormal state, audible information indicating the determination result may be output.

According to an embodiment, an alarm portion 440 is provided so that a user can immediately perform a check for process equipment in case the sensor 280 and/or the dispenser 180 is in an abnormal state. Accordingly, the reject ratio for the device for supplying droplets can be reduced.

Hereinafter, a droplet discharge method according to an embodiment will be described with reference to fig. 6 to 15. The description of the contents which may be repeated from the foregoing will be omitted or omitted.

Fig. 6 and 7 are flowcharts showing a droplet discharge method according to the embodiment. Fig. 6 may schematically show a droplet discharge method according to an embodiment, and fig. 7 is a flowchart for specifically explaining a step (S1600) of judging an operation state of the inspection device in the steps illustrated in fig. 6.

Fig. 8 to 12 and 15 are plan views schematically showing a droplet discharge method according to an embodiment in terms of process stages.

Referring to fig. 6, the droplet discharging method according to an embodiment may include the steps of: the dispenser provides droplets onto the mother substrate (S1200); the dispenser supplies the droplets onto the inspection substrate (S1400); determining an operation state of the sensor and the dispenser (S1600); correcting the supply amount of the droplet (S1700); and the dispenser supplies the droplets onto the mother substrate based on the corrected supply amount (S1800).

Referring to fig. 6, 8 and 9, in the step of providing droplets onto the mother substrate by the dispenser (S1200), the dispenser 180 may discharge the droplets 1100 onto the mother substrate 160.

The mother substrate 160 may be provided (or prepared) on the main table 100. The position of the dispenser 180 may be changed so that the dispenser 180 may be disposed at a position where it is desired to provide the liquid droplets 1100 on the mother substrate 160. Also, the dispenser 180 may provide droplets onto the mother substrate 160. The droplet 1100 may be disposed on the mother substrate 160. For ease of illustration, droplet 1100 is illustrated as having a circular shape, but the disclosure is not so limited.

Sample 2200 can be provided (or prepared) on sample substrate 360 on inspection station 200. At this time, individual droplets may not be arranged on the inspection substrate 460 on the inspection stage 200.

The dispenser 180 may be moved to a position adjacent to the inspection discharging portion IDP (or the inspection stage 200) after discharging the droplet 1100 onto the mother substrate 160. For example, the dispenser 180 may be moved to a position adjacent to the inspection substrate 460 in the first direction DR 1.

Referring to fig. 6, 10 and 11, in the step of providing droplets onto the inspection substrate by the dispenser (S1400), the dispenser 180 may discharge the inspection droplet 1200 onto the inspection substrate 460.

In this step, the dispenser 180 may be configured to be capable of discharging the inspection droplet 1200 onto the inspection substrate 460. For example, a nozzle that discharges a droplet from the dispenser 180 may overlap with the inspection substrate 460 when viewed from the plane. According to an embodiment, the dispenser 180 may be arranged to protrude from the dispenser mover 190 toward the inspection discharge portion IDP, in which case the dispenser 180 may more easily provide the inspection liquid droplets 1200 onto the inspection substrate 460.

However, the present disclosure is not necessarily limited to the foregoing examples. For example, the following may be used: the inspection stage 200 moves to the main discharge portion MDP, so that the dispenser 180 discharges the inspection droplet 1200 onto the inspection substrate 460 (not shown). In this case, the main discharge portion MDP and a part of the inspection discharge portion IDP are connected by a member such as a rail, so that the inspection stage 200 can be moved.

The dispenser 180 may provide the inspection droplet 1200 onto the inspection substrate 460 such that the inspection droplet 1200 may be disposed on the inspection substrate 460. After the inspection droplet 1200 is discharged, the dispenser 180 may be spaced apart from the inspection discharge portion IDP.

Referring to fig. 6 and 12 to 14, in the step of determining the operation states of the sensor and the dispenser (S1600), information (or data) for confirming the operation states of the sensor 280 and the dispenser 180 may be obtained.

For example, in the step of judging the operation state of the sensor and the dispenser (S1600), it may be judged whether the sensor 280 is normally operated. Also, in this step, it can be judged whether the dispenser 180 is operating normally, and information (or data) for correcting the discharge amount can be obtained so that the supply amount of the liquid droplets 1100 is uniform.

Details of the step (S1600) of determining the operation states of the sensor and the dispenser will be described in detail with reference to fig. 7.

Referring to fig. 7, the step of judging the operation state of the sensor and the dispenser (S1600) may include the steps of: obtaining measurement information of the sample (S1620); comparing the measurement information with intrinsic data of the sample (S1640); and judging whether the measurement information of the sample is in a normal range (S1660). At this time, in the case where the measurement information of the sample 2200 is in the normal range, the step of judging the operation state of the sensor and the dispenser (S1600) may further include the steps of: measurement information of the droplet supplied on the inspection substrate 460 is obtained (S1670). In the case that the measurement information of the sample 2200 is not in the normal range, the step of judging the operation state of the sensor and the dispenser (S1600) may further include the steps of: status information of the sensor is provided (S1680).

In the step of obtaining measurement information of the sample (S1620), the sensor 280 may obtain measurement information of the sample 2200.

In this step, the inspection stage 200 can be moved so that the sample substrate 360 is adjacent to the sensor 280. Accordingly, the position of the sample 2200 may be changed to enable the sensor 280 to obtain measurement information of the sample 2200. For example, the inspection stage 200 may be moved in the second direction DR2, thereby reducing the distance between the sample substrate 360 and the sensor 280.

The sensor 280 may obtain measurement information of the sample 2200 in the first direction DR 1. The sensor 280 may obtain measurement information of the sample 2200 in the second direction DR 2. The sensor 280 may obtain measurement information of the sample 2200 in the third direction DR 3.

For example, as the sample 2200 passes through the measuring range of the sensor 280 when viewed from the plane, the sensor 280 may measure the length data of the sample 2200 in the first direction DR1 and the second direction DR 2. Meanwhile, the sensor 280 may of course measure the height data of the sample 2200 in the third direction DR3 using the aforementioned method.

Sample 2200 may have similar optical properties as examination droplet 1200. For example, the sample 2200 may have a similar light transmittance as the inspection droplet 1200. The sample 2200 may have substantially the same light transmittance as the inspection droplet 1200. The difference between the light transmittance of the sample 2200 and the light transmittance of the inspection liquid droplet 1200 may be less than or equal to a predetermined difference. According to an embodiment, the sample 2200 may also include the same substances as the examination droplet 1200. At this time, the sample 2200 may be a substance solidified by the inspection droplet 1200. According to the embodiment, in the case of judging the reliability of the sensor 280 by using the sample 2200, it can be interpreted as judging the reliability of the inspection liquid droplet 1200.

Sample 2200 can include a plurality of samples. For example, the samples 2200 may include a first sample 2220, a second sample 2240, and a third sample 2260. For ease of illustration, an embodiment in which sample 2200 includes three samples is described. However, the present disclosure is not limited to the foregoing examples.

According to an embodiment, the first sample 2220, the second sample 2240, and the third sample 2260 may be arranged in sequence (or side by side) along the second direction DR 2. Measurement information for each of the first sample 2220, the second sample 2240, and the third sample 2260 may be sequentially obtained by the sensor 280 (fig. 13).

The sizes of each of the first, second, and

third samples

2220, 2240, 2260 may be different from one another. The first sample 2220, the second sample 2240, and the third sample 2260 have lengths different from each other in one direction, respectively.

For example, the first sample 2220 may have a size greater than the second sample 2240. The first sample 2220 may have a longer length in the first direction DR1 than the second sample 2240. The first sample 2220 may have a longer length in the second direction DR2 than the second sample 2240. The first sample 2220 may have a longer length in the third direction DR3 than the second sample 2240.

The second sample 2240 may have a size greater than the third sample 2260. The second sample 2240 may have a longer length in the first direction DR1 than the third sample 2260. The second sample 2240 may have a length in the second direction DR2 longer than the third sample 2260. The second sample 2240 may have a length in the third direction DR3 longer than the third sample 2260.

Measurement information of the first sample 2220, the second sample 2240, and the third sample 2260 having different sizes may be sequentially obtained, so that measurement information of the sensor 280 for various objects may be obtained. In this case, the reliability of information for determining the precision of the sensor 280 can be improved.

According to the embodiment, the first sample 2220, the second sample 2240, and the third sample 2260 may be sequentially stacked in the thickness direction (for example, the third direction DR 3) of the sample substrate 360, and thus the sensor 280 may also obtain measurement information of the first sample 2220, the second sample 2240, and the third sample 2260 together (fig. 14). In this case, the process time can be shortened because the entire length of the sample 2200 in the moving direction (e.g., the second direction DR 2) of the inspection stage 200 is reduced while the measurement information of the first sample 2220, the second sample 2240, and the third sample 2260 having various sizes is obtained.

According to an embodiment, the first sample 2220, the second sample 2240, and the third sample 2260 may also be sequentially arranged along the first direction DR1 (not shown). In this case, the sensor 280 obtains the measurement information of the first sample 2220, the second sample 2240, and the third sample 2260 together, so that the process time can be shortened.

According to an embodiment, measurement information of the sample 2200 measured by the sensor 280 may be stored in a memory (not shown) provided in the droplet discharge device 1. Alternatively, the measurement information of the sample 2200 measured by the sensor 280 may be transferred to an external memory.

In addition, in the step of performing the judgment of the operation state of the sensor and the dispenser (S1600), the mother substrate 160 on which the liquid droplets 1100 are arranged is moved for the subsequent process, and a new mother substrate 160 may be arranged (refer to fig. 12). The mother substrate 160 to be subsequently arranged may be a mother substrate for being provided with the droplet 1100 after the droplet 1100 provision amount of the dispenser 180 is corrected. However, the present disclosure is not necessarily limited to the foregoing examples. The new mother substrate 160 may be provided at an appropriate point in time before the supply amount of the corrected droplet 1100 is discharged.

Referring to fig. 7, in the step of judging whether the measurement information of the sample is in the normal range (S1660), it may be determined whether the measurement information of the sample 2200 obtained by the sensor 280 is in the normal range.

According to an embodiment, intrinsic measurement data of the sample 2200 may be provided in advance. For example, the length of the sample 2200 in the first direction DR1, the length in the second direction DR2, and the length in the third direction DR3 may be measured in advance.

In this step, the processor 420 may compare the intrinsic measurement data of the sample 2200 with the measurement information of the sample 2200 obtained by the sensor 280.

For example, the processor 420 may compare a first inherent length of the sample 2200 in the first direction DR1 with a first measured length of the sample 2200 in the first direction DR1 obtained by the sensor 280. In the case that the difference between the first intrinsic length and the first measured length is below a predetermined difference, the processor 420 may determine that the focus state of the sensor 280 for the first direction DR1 and the resolution for the measurement points 1222, 1242 are suitable. Here, the first inherent length may be a length of the sample 2200 measured in advance in the first direction DR 1.

Here, when fig. 4 is combined, the predetermined difference may be a unit length UL of the sensor 280. The predetermined difference may be a distance separating

adjacent measurement points

1222, 1242 from each other within the

same set

1220, 1240. For example, the distance between adjacent first points 1222 of the first group 1220 may be defined as the predetermined difference. In the case where the predetermined difference is defined as the adjacent distance to the measurement points 1222, 1242, a range within the error range that is significantly generated in the sensor 280 may not be judged as an abnormal state of the sensor 280.

According to an embodiment, the predetermined difference may also be a multiple of the unit length UL of the sensor 280. In this case, a range within an error range within a unit length UL that can be significantly generated in the sensor 280 may not be determined as an abnormal state of the sensor 280.

The processor 420 may compare the second inherent length of the sample 2200 in the second direction DR2 with a second measured length of the sample 2200 in the second direction DR2 obtained by the sensor 280. In the case where the difference between the second intrinsic length and the second measured length is equal to or smaller than a predetermined difference, the processor 420 may determine that the focus state of the sensor 280 for the second direction DR2 and the movement control state of the inspection stage 200 are appropriate.

The processor 420 may compare the third inherent length of the sample 2200 in the third direction DR3 with a third measured length of the sample 2200 in the third direction DR3 obtained by the sensor 280. In the case where the difference between the third inherent length and the third measured length is below a predetermined difference, the processor 280 may determine that the resolution of the sensor 280 in the third direction DR3 is appropriate.

For example, as described with reference to fig. 2, the sensor 280 may obtain height information for each of the measurement points 1222, 1242 in the third direction DR 3. At this time, the reliability of the height information measured for the measurement points 1222, 1242 may be confirmed by judging the resolution of the sensor 280 in the third direction DR 3.

According to an embodiment, the processor 280 may determine that the sensor 280 is in normal operation or that the sensor 280 is in abnormal operation using the aforementioned methods.

Referring to fig. 7, in case that the measurement information of the sample 2200 is not within the normal range, a step of providing state information of the sensor may be performed (S1680).

According to an embodiment, in the case where it is determined that the sensor 280 is in abnormal operation, the processor 420 may control the alarm portion 440 to provide state information of the sensor 280. For example, in the case where the alarm portion 440 includes a display device, the alarm portion 440 may display text and/or images to the user indicating that the sensor 280 is in abnormal operation. Alternatively, in the case where the alarm portion 440 includes an audio device, the alarm portion 440 may output audio indicating that the sensor 280 is in abnormal operation to the user. However, the present disclosure is not limited to the foregoing example, and the alarm portion 440 may further include all of a display device and an audio device.

Accordingly, according to the embodiment, the user can confirm the normal operation or not of the sensor 280 relatively easily, and the reliability of the sensing of the sensor 280 for the inspection liquid droplet 1200 performed later can be ensured. And, eventually, the amount of the liquid droplets 1100 provided onto the mother substrate 160 can be precisely controlled, so that a process defect can be prevented.

Referring to fig. 7, in the case where the measurement information of the sample 2200 is within the normal range, a step of obtaining the measurement information of the droplet supplied onto the inspection substrate may be performed (S1670).

In this step, the inspection stage 200 may be moved in the second direction DR2 so that the inspection substrate 460 may be adjacent to the sensor 280. For example, the inspection droplet 1200 may be moved in the second direction DR2 such that the sensor 280 may obtain measurement information of the inspection droplet 1200. From this, the volume of the inspection droplet 1200 can be calculated.

Here, since the measurement information of the inspection liquid droplet 1200 is obtained by the sensor 280 that has been determined to be operating normally, the reliability of the measurement result can be further improved.

Also, the processor 420 may determine whether the dispenser 180 properly discharges the liquid droplets 1100. The processor 420 may determine whether the amount of the discharged inspection liquid droplet 1200 corresponds to an amount intended by the user. For example, when the volume of the inspection droplet 1200 is larger than the single discharge amount of the dispenser 180, the processor 420 may determine that the discharge amount of the dispenser 180 should be increased. When the volume of the inspection liquid droplet 1200 is smaller than the single discharge amount of the dispenser 180, the processor 420 may determine that the discharge amount of the dispenser 180 should be reduced.

Referring to fig. 6 and 15, in the step (S1800) in which the dispenser supplies the droplets onto the mother substrate based on the corrected supply amount, the processor 420 may correct the discharge amount of the droplets 1100 to be supplied onto the mother substrate 160 based on the amount of the inspection droplet 1200.

According to an embodiment, in the case where it is determined that the discharge amount of the dispenser 180 should be increased, the discharge amount of the dispenser 180 may be increased. In the case where it is determined that the discharge amount of the dispenser 180 should be reduced, the discharge amount of the dispenser 180 may be reduced. The discharge amount of the dispenser 180 may be adjusted by reflecting the difference between the single discharge amount of the dispenser 180 expected by the user and the measured volume of the inspection liquid droplet 1200.

According to an embodiment, in the case where it is determined that the discharge amount of the dispenser 180 needs to be changed, the processor 420 may also control the alarm portion 440 to output visual information and/or audio information indicating that the discharge amount of the dispenser 180 needs to be changed to the user.

Referring to fig. 6, in the step (S1800) in which the dispenser 180 supplies the droplets onto the mother substrate based on the corrected supply amount, the dispenser 180 may discharge the droplets 1100 according to the corrected supply amount onto the newly supplied (or supplied) mother substrate 160.

According to an embodiment, the dispenser 180 can provide a corrected discharge amount based on the measurement result for the inspection liquid droplet 1200. Accordingly, a uniform amount of droplets 1100 can be provided on the mother substrate 160.

According to an embodiment, the foregoing steps may be repeatedly performed. For example, the step of correcting the supply amount of the droplets (S1700) may be continuously performed at a point of time before the droplets are supplied onto the mother substrate 160, thereby controlling the amount of the droplets 1100 arranged on the mother substrate 160 to be uniform. Accordingly, poor production of the object product to which the droplet 1100 is applied can be prevented. Meanwhile, it is not necessary to check the periodicity of the discharge amount of the liquid droplet 1100, so that process convenience can be provided.

While the present disclosure has been described with reference to the preferred embodiments thereof, those skilled in the art or those having ordinary skill in the art will understand that various modifications and changes may be made to the present disclosure without departing from the spirit and scope of the present disclosure as set forth in the appended claims.

Claims

1. A droplet discharge device, comprising:

a main discharge portion; and

an inspection discharge portion disposed at one side of the main discharge portion,

wherein the main discharge portion includes:

a main frame;

a main table disposed on the main frame and configured to dispose a mother substrate;

a dispenser mover disposed on the main table and configured to move in a first direction; and

a dispenser configured to move in the first direction by the dispenser mover and discharge droplets,

wherein the inspection discharging portion includes:

checking the frame;

an inspection stage disposed on the inspection frame and configured to dispose a substrate for a sample and a substrate for inspection; and

the sensor is used for detecting the position of the sensor,

wherein the sensor is capable of obtaining measurement information of an inspection liquid droplet discharged from the dispenser onto the inspection substrate and a sample arranged on the sample substrate,

the dispenser is configured to discharge the droplet onto the inspection substrate when adjacent to the inspection discharge section.

2. The droplet discharge apparatus according to claim 1, wherein,

the sample and the droplet have the same light transmittance as each other.

3. The droplet discharge apparatus according to claim 1, wherein,

the discharge amount of the liquid droplet of the dispenser is corrected based on the measurement information on the liquid droplet for inspection obtained by the sensor.

4. The droplet discharge apparatus according to claim 1, wherein,

the position of the sensor is fixed relative to the main drain.

5. The droplet discharge apparatus according to claim 1, wherein,

the sensor is more adjacent to the sample substrate than the inspection substrate.

6. The droplet discharge apparatus according to claim 1, wherein,

the sensor includes a chromatic confocal sensor.

7. The droplet discharge apparatus according to claim 1, wherein,

the sample arranged on the sample substrate includes a plurality of samples having lengths different from each other in a direction.

8. The droplet discharge apparatus according to claim 1, wherein,

the sample includes a plurality of samples stacked in order along a thickness direction of the sample substrate.

9. The droplet discharge apparatus according to claim 1, wherein,

a difference between the light transmittance of the sample and the light transmittance of the droplet discharged onto the inspection substrate is equal to or less than a predetermined difference.