CN219210466U - droplet discharge device - Google Patents

Abstract

A liquid drop discharge device is provided, comprising: a main discharge part; and an inspection discharge part arranged on one side of the main discharge part, wherein the main discharge part includes: a main frame; a main workbench arranged on the side of the main discharge part. on the main frame, and for arranging the mother substrate; the dispenser mover is arranged on the main table, and is configured to move in the first direction; and the dispenser is configured to move along the second direction by the dispenser mover. moving in one direction and discharging liquid droplets, wherein the inspection discharge part includes: an inspection frame; an inspection table arranged on the inspection frame for arranging a sample substrate and an inspection substrate; and a sensor, wherein the The sensor can obtain measurement information of the inspection liquid droplets discharged onto the inspection substrate and the sample arranged on the sample substrate by the dispenser, the dispenser being configured to be connected with the inspection discharge part. The liquid droplets are simultaneously discharged onto the inspection substrate.

Description

droplet discharge device

technical field

The present disclosure relates to a droplet discharge method and a droplet discharge device.

Background technique

More recently, the manufacturing process of various devices includes processes that utilize dispensers to discharge liquid droplets. For example, liquid droplets can be applied to various devices such as flat panel display devices.

At this time, in order to reduce the defect rate of the device using the liquid droplet, it is necessary to precisely control the amount of liquid droplet discharge. For this reason, a scheme in which process users periodically check equipment can be considered, but there is a disadvantage that process convenience cannot be sufficiently ensured.

Accordingly, there is a need for a liquid drop discharge system capable of precisely controlling the amount of liquid droplets and improving process convenience.

Utility model content

The technical problem to be solved by the present disclosure is to provide a droplet discharge method and a droplet discharge device that can ensure the reliability of a sensor that measures the value of a droplet, and can grasp equipment failure in time to prevent unnecessary consumption.

According to an embodiment of the present disclosure, there may be provided a droplet discharge device including: a main discharge part; and an inspection discharge part arranged on one side of the main discharge part, wherein the The main discharge part includes: a main frame; a main workbench arranged on the main frame and used for arranging mother substrates; a dispenser mover arranged on the main workbench and configured to move in a first direction and a dispenser configured to move in the first direction by the dispenser mover and discharge liquid droplets, wherein the inspection discharge part includes: an inspection frame; an inspection table arranged on the inspection frame and for arranging the sample substrate and the inspection substrate; and a sensor, wherein the sensor can obtain the inspection liquid droplets discharged from the dispenser onto the inspection substrate and the liquid droplets arranged on the sample substrate. Measurement information of a sample on a substrate, wherein the dispenser is configured to discharge the droplet onto the inspection substrate when adjacent to the inspection discharge unit.

According to an embodiment, there may be provided a liquid droplet discharge device in which the sample and the liquid droplet have the same light transmittance as each other.

According to an embodiment, there may be provided a droplet discharge device that corrects a discharge amount of the liquid droplet of the dispenser based on measurement information about the inspection liquid droplet obtained by the sensor.

According to an embodiment, there may be provided a droplet discharge device in which the position of the sensor is fixed with respect to the main discharge portion.

According to an embodiment, it is possible to provide a droplet discharge device in which the sensor is more adjacent to the substrate for sample than the substrate for inspection.

According to an embodiment, there may be provided a droplet discharge device in which the sensor includes a color confocal sensor (CCS: Chromatic Confocal Sensor).

According to an embodiment, there may be provided a droplet discharge device in which the sample arranged on the sample substrate includes a plurality of samples whose lengths in one direction are different from each other.

According to an embodiment, there may be provided a droplet discharge device in which the sample includes a plurality of samples sequentially stacked in the thickness direction of the substrate for samples.

According to an embodiment, there may be provided a liquid droplet discharge device in which a difference between the light transmittance of the sample and the light transmittance of the liquid droplet discharged onto the inspection substrate is a predetermined difference or less.

According to an embodiment of the present disclosure, it is possible to provide a droplet discharge method and a droplet discharge device capable of ensuring the reliability of a sensor that measures a value of a droplet, and capable of timely understanding of equipment failure to prevent unnecessary consumption.

Description of drawings

FIG. 1 is a schematic perspective view showing a droplet discharge device according to an embodiment.

2 to 4 are diagrams for explaining a method in which a sensor measures a height of a droplet according to an embodiment.

FIG. 5 is a block diagram illustrating a droplet discharge device according to the embodiment.

6 and 7 are flowcharts illustrating a liquid droplet discharge method according to an embodiment.

8 to 12 and 15 are plan views schematically showing process steps of a liquid droplet discharge method according to an embodiment.

13 and 14 are schematic perspective views illustrating a liquid droplet discharge method according to an embodiment.

Detailed ways

While the present disclosure can be modified in various ways and can have various forms, specific embodiments will be illustrated in the drawings and described in detail herein. However, this is not intended to limit the present disclosure to a specific disclosed form, and it should be understood that all changes, equivalents, and replacements included in the idea and technical scope of the present disclosure are included.

Terms such as "first" and "second" may be used to describe various constituent elements, but the constituent elements should not be limited by the terms. The terms are only used to distinguish one constituent element from another constituent element. For example, a first constituent element may be named a second constituent element without departing from the scope of rights of the present disclosure, and similarly, a second constituent element may also be named a first constituent element. A singular expression includes a plural expression unless a different meaning is clearly indicated in the context.

In the present disclosure, terms such as "comprising" or "having" are used to designate the existence of features, numbers, steps, operations, constituent elements, parts or combinations of these described in the specification, and it should be understood that it does not preclude one or more of them. Existence or possibility of addition of other features, numbers, steps, operations, constituent elements, parts, or combinations of these above. And, where it is mentioned that a part of a layer, film, region, plate, etc. is "on" another part, it includes not only the case of being "immediately above" another part, but also the case where there are other parts in between. situation. Also, in this specification, when it is mentioned that a part of a certain layer, film, region, plate, etc. is formed on another part, the direction of formation is not limited to the upper direction, but also includes Situation formed in side or lower direction. Conversely, where a reference to a layer, film, region, panel, etc. is referred to as being "under" another part, this includes not only being "immediately below" the other part, but also where there are other parts in between. situation.

The present disclosure relates to a droplet discharge method and a droplet discharge device. Hereinafter, a liquid droplet discharge method and a liquid droplet discharge device according to embodiments will be described with reference to the drawings.

FIG. 1 is a schematic perspective view showing a droplet discharge device according to an embodiment.

Referring to FIG. 1 , a droplet discharge device 1 according to an embodiment may include a main discharge part MDP and an inspection discharge part IDP. For example, the main discharge part MDP may include the main frame 10 , the main table 100 , the main rail 140 , the dispenser 180 , and the mover 190 for the dispenser. The inspection discharge part IDP may include an inspection frame 20 , an inspection table 200 , an inspection rail 240 , and a sensor 280 .

The main discharge part MDP may provide liquid droplets on the mother substrate 160 . For example, the mother substrate 160 may be a base part of a device desired to be manufactured, and may receive liquid droplets at the main discharge part MDP. The mother substrate 160 may be a rigid or flexible substrate or film. The material of the motherboard 160 is not limited to a specific example.

A droplet may represent a liquid phase fluid. For example, the liquid droplets may be resin or liquid crystal. However, the present disclosure is not necessarily limited to the foregoing examples, and the droplets may include a variety of liquid phase fluids.

The main discharge part MDP may be arranged at a side of the inspection discharge part IDP. The main discharge part MDP and the inspection discharge part IDP may be sufficiently adjacent. For example, when the dispenser 180 is located at one end of the main discharge part MDP, the dispenser 180 may also discharge liquid droplets onto the inspection substrate 460 of the inspection discharge part IDP.

According to an embodiment, in the main discharge part MDP, the process direction may be parallel to the first direction DR1. For example, the mother substrate 160 provided with liquid droplets may be transferred in a direction parallel to and opposite to the first direction DR1.

The main frame 10 may be a component provided with a configuration of the main discharge part MDP. The configuration of the main discharge part MDP can be attached to the main frame 10 . For example, a main table 100 , a main rail 140 , a dispenser 180 , and a dispenser mover 190 may be arranged on the main frame 10 .

The main workbench 100 may be arranged on the main rail 140 on the main frame 10 . The main table 100 may be configured to move along the main rail 140 . For example, the main table 100 may be configured to move in the first direction DR1.

The main table 100 may provide an area where the mother substrate 160 is arranged. For example, the mother substrate 160 can be loaded on and unloaded from the main table 100 .

The main rail 140 may be disposed on the main frame 10 . The main rail 140 may extend along a process direction of the main discharge part MDP. For example, the main rail 140 may extend along the first direction DR1. According to an embodiment, the main table 100 and the dispenser mover 190 may move along the main rail 140 .

Dispenser 180 is configured to provide liquid droplets. The dispenser 180 may discharge liquid droplets. For example, dispenser 180 may repeatedly discharge a specified amount of liquid droplets. Dispenser 180 may dispense a single droplet at a time.

In order to improve the process accuracy, it is necessary to precisely control the amount of liquid crystal liquid droplets provided by the dispenser 180 . According to an embodiment, the amount of liquid droplets discharged from the dispenser 180 may be finely controlled so that a user's desired amount of liquid droplets may be provided. Details related to this will be described later.

As the dispenser mover 190 moves, the dispenser 180 may move in the first direction DR1. The position of the dispenser 180 in the first direction DR1 can be changed by the dispenser mover 190 .

The dispenser 180 may be fixed to the dispenser mover 190 so as to move in the second direction DR2. For example, the dispenser 180 may move in the second direction DR2 by a rail installed on the dispenser mover 190 .

According to an embodiment, the second direction DR2 indicates a different direction from the first direction DR1. For example, the first direction DR1 and the second direction DR2 may be perpendicular to each other.

The dispenser mover 190 may be configured to move along the main rail 140 . For example, the dispenser mover 190 may move along the process direction of the main discharge part MDP.

The dispenser mover 190 can move the dispenser 180 . For example, the dispenser 180 may be coupled to the dispenser mover 190, and the dispenser mover 190 may move the dispenser 180 in the first direction DR1.

According to an embodiment, the dispenser mover 190 may be a gantry.

The inspection discharge part IDP may be disposed at one side of the main discharge part MDP. As described above, the main discharge part MDP and the inspection discharge part IDP may be sufficiently adjacent. According to an embodiment, the main discharge part MDP and the inspection discharge part IDP may be sufficiently adjacent so that the inspection table 200 may also be moved to be adjacent to the main discharge part MDP.

Checking the discharge part IDP may obtain measurement information for judging the operating state of the dispenser 180 . For example, dispenser 180 may provide inspection droplet 1200 onto inspection substrate 460 . Also, the inspection discharge part IDP may judge whether the dispenser 180 is normally operated or not based on the measurement information of the inspection liquid droplet 1200 . Measurement information may include numerical (altitude, etc.) data obtained by sensors 280 .

The inspection frame 20 may be a component in which the inspection discharge part IDP is provided. The inspection frame 20 may be equipped with an inspection discharge unit IDP. For example, an inspection table 200 and an inspection track 240 may be arranged on the inspection frame 20 .

The inspection table 200 may be arranged on the inspection rail 240 on the inspection frame 20 . The inspection table 200 may be configured to move along the inspection track 240 . For example, the inspection table 200 can move in the second direction DR2.

The inspection table 200 can provide an area where the sample substrate 360 and the inspection substrate 460 are arranged. For example, the sample substrate 360 and the inspection substrate 460 can be loaded on and unloaded from the inspection table 200 .

The sample substrate 360 may be placed on the inspection table 200 . The sample 2200 may be arranged on the sample substrate 360 . The sample 2200 may be equipped to determine whether the sensor 280 is operating normally or not.

The inspection substrate 460 may be arranged on the inspection table 200 . The inspection liquid droplet 1200 may be arranged on the inspection substrate 460 . The inspection liquid drop 1200 may be a liquid drop provided to determine whether the dispenser 180 is operating normally.

The sample substrate 360 and the inspection substrate 460 may include a substance similar to the mother substrate 160 . For example, the sample substrate 360 , the inspection substrate 460 , and the mother substrate 160 may include the same substance. Accordingly, in the main discharge part MDP and the inspection discharge part IDP, the sample 2200, the liquid droplet 1100, and the inspection liquid droplet 1200 can be provided in a manner similar to the arrangement environment.

The inspection rail 240 may be arranged on the inspection frame 20 . The inspection track 240 may extend along the direction in which the sample substrate 360 and the inspection substrate 460 move. For example, the inspection rail 240 may extend along the second direction DR2. According to the embodiment, the inspection table 200 can move along the inspection track 240 , and accordingly, the sample substrate 360 and the inspection substrate 460 can be adjacent to the sensor 280 .

The sensor 280 can obtain measurement information of the inspection liquid droplet 1200 and the sample 2200 . The measurement information may represent numerical data of the inspection liquid droplet 1200 and the sample 2200 .

For example, sensor 280 may obtain height data for inspection drop 1200 . Sensor 280 may obtain height data for sample 2200 . According to an embodiment, the droplet discharge device 1 (for example, a processor (processor 420 of FIG. 5 )) may calculate the volume of the sample 2200 based on the height data obtained by the sensor 280, and may calculate the volume of the inspection droplet 1200.

The position of the sensor 280 may be fixed. For example, sensor 280 may be incorporated into inspection frame 20 . Although not explicitly shown in FIG. 1 , the sensor 280 may be provided in a non-moving manner in combination with another component. The position of the sensor 280 may be fixed with respect to the main discharge part MDP.

The sensor 280 may be closer to the sample substrate 360 than the inspection substrate 460 . According to this, the sensor 280 can obtain the measurement information on the inspection liquid droplet 1200 after obtaining the measurement information on the sample 2200 .

In a state where the position of the sensor 280 is fixed, the sample substrate 360 and the inspection substrate 460 can be moved to positions adjacent to the sensor 280 .

In this case, after confirming the operation state of the sensor 280 based on the measurement information about the sample 2200 arranged on the substrate 360 for the sample, the sensor 280 may obtain a measurement about the liquid droplet 1200 arranged on the substrate 460 for inspection. information. According to this, the reliability of the measurement information on the inspection liquid droplet 1200 can be improved. That is, the risk that the inspection accuracy of the sensor 280 is impaired can be reduced.

According to an embodiment, the sensor 280 may include a color confocal sensor (CCS: Chromatic Confocal sensor).

Hereinafter, referring to FIGS. 2 to 4 , an operation method of the sensor 280 when the sensor 280 is a color confocal sensor CCS will be described.

2 to 4 are diagrams for explaining a method in which a sensor measures a height of a droplet according to an embodiment.

Referring to FIG. 2 , the color confocal sensor CCS may include a light source 282 , an optical lens 284 , a beam splitter 286 , a pinhole 287 and a spectrometer 288 .

The color confocal sensor CCS may include a light source 282 that emits white light. White light may include light of various wavelength bands including the visible light wavelength band. Light emitted from light source 282 may be provided to the upper surface of inspection droplet 1200 through optical lens 284 . For example, a point P on the upper surface of the inspection droplet 1200 whose height is to be measured is marked in FIG. 2 .

The optical lens 284 may separate the supplied light by wavelength, and the focal lengths of the separated lights may be different from each other. For example, long-wavelength light R can form a focus at a relatively far position, and short-wavelength light B can form a focus at a relatively close position.

Among the separated lights, only the light whose focal point corresponds to the position of the upper surface of the inspection liquid droplet 1200 is reflected by the beam splitter 286 and supplied to the spectrometer 288 through the pinhole 287 . Among the split lights, light whose focal point does not correspond to the position of the upper surface of the inspection liquid droplet 1200 may not pass through the pinhole 287 after being reflected by the beam splitter 286 .

Thereafter, the height of the upper surface of the inspection drop 1200 may be calculated based on the light provided to the spectrometer 288 . For example, in a case where the position of the focal point corresponds to the upper surface of the inspection droplet 1200, light of the corresponding wavelength may be provided with high light intensity, and the height of the inspection droplet 1200 may be calculated based on the provided light information.

Referring to FIG. 3 , the sensor 280 may obtain measurement information of the liquid droplet 1200 for inspection in the manner described above. For example, the sensor 280 may measure height data of the inspection droplet 1200 disposed on the inspection substrate 460 .

Referring to FIG. 4 , the sensor 280 may measure heights for the groups 1220 , 1240 spaced apart along the second direction DR2 , respectively. For example, the sensor 280 may measure the height of each of the second points 1242 of the second group 1240 after measuring the height of each of the first points 1222 of the first group 1220 .

The first group 1220 and the second group 1240 may extend along the first direction DR1. The first group 1220 and the second group 1240 may be spaced apart along the second direction DR2.

The first set 1220 may include a first point 1222 and the second set 1240 may include a second point 1242 . The first point 1222 and the second point 1242 may represent positions to be measured by the sensor 280 . For example, each of the first point 1222 and the second point 1242 may correspond to the point P explained with reference to FIG. 2 .

The numbers of the first points 1222 and the second points 1242 can be properly selected according to the process environment and the resolution of the sensor 280 .

For example, sensor 280 may have a resolution per unit length UL. The unit length UL may be a length corresponding to the resolution of the sensor 280 . In this case, the sensor 280 may obtain height information of each of the points 1222, 1242 spaced apart by the unit length UL.

Next, referring to FIG. 5 , description will be given regarding the operational configuration of the droplet discharge device 1 according to the embodiment. FIG. 5 is a block diagram illustrating a droplet discharge device according to the embodiment.

Referring to FIG. 5 , the droplet discharge device 1 according to the embodiment may further include a processor 420 and an alarm unit 440 .

The processor 420 may perform the overall operation of the droplet discharge device 1 . The processor 420 may be implemented as a CPU or a device similar thereto according to hardware, software or a combination thereof. However, the implementation form of the processor 420 is not necessarily limited to a specific example.

The processor 420 may calculate the height of the inspection drop 1200 from the measurement information of the inspection drop 1200 obtained by the sensor 280 . The processor 420 can control the movement of individual components of the droplet discharge device 1 . The processor 420 can determine the operating status of the sensor 280 and the dispenser 180 . For example, processor 420 may determine whether sensor 280 and dispenser 180 are operating properly.

When the processor 420 determines that the sensor 280 and/or the dispenser 180 is in an abnormal state, it may control the alarm unit 440 to output a signal indicating the abnormal state to the user.

However, the example of the operation of the processor 420 is not limited to the foregoing, unless otherwise specified, the operation of the droplet discharge device 1 can be interpreted as being controlled by the processor 420 .

When it is judged by the processor 420 that the sensor 280 and/or the dispenser 180 is in an abnormal state, the alarm part 440 may output a predetermined signal.

For example, the alarm unit 440 may include a display device. In this case, when it is judged that the sensor 280 and/or the dispenser 180 is in an abnormal state, visual information representing the judgment result may be output. Alternatively, the alarm section 440 may include an audio device. In this case, when it is judged that the sensor 280 and/or the dispenser 180 is in an abnormal state, auditory information representing the judgment result may be output.

According to an embodiment, the alarm part 440 is provided so that the user may immediately perform an inspection for the process equipment in case the sensor 280 and/or the dispenser 180 are in an abnormal state. Accordingly, it is possible to reduce the defect rate of the device for supplying liquid droplets.

Hereinafter, referring to FIGS. 6 to 15 , a description will be given regarding a liquid droplet discharge method according to the embodiment. The content that may overlap with the foregoing content will be briefly or omitted from description.

6 and 7 are flowcharts illustrating a liquid droplet discharge method according to an embodiment. FIG. 6 may schematically show a liquid droplet discharge method according to an embodiment, and FIG. 7 is a flowchart for specifically explaining a step (S1600) of judging an operation state of an inspection device among the steps illustrated in FIG. 6 .

8 to 12 and 15 are plan views schematically illustrating process stages of a droplet discharge method according to an embodiment.

13 and 14 are schematic perspective views illustrating a liquid droplet discharge method according to an embodiment.

Referring to FIG. 6 , the droplet discharging method according to the embodiment may include the following steps: the dispenser provides the droplet onto the mother substrate (S1200); the dispenser provides the droplet onto the substrate for inspection (S1400); The operating state of the dispenser (S1600); the supply amount of the liquid droplet is corrected (S1700); and the dispenser supplies the liquid droplet onto the mother substrate based on the corrected supply amount (S1800).

Referring to FIGS. 6 , 8 and 9 , in the step ( S1200 ) of providing the liquid droplets onto the mother substrate by the dispenser, the dispenser 180 may discharge the liquid droplets 1100 onto the mother substrate 160 .

The mother substrate 160 may be provided (or prepared) on the main table 100 . The position of the dispenser 180 may be changed such that the dispenser 180 may be placed at a position on the mother substrate 160 where it is desired to provide the liquid droplets 1100 . Also, the dispenser 180 may provide liquid droplets onto the mother substrate 160 . Droplets 1100 may be disposed on the mother substrate 160 . For ease of illustration, the droplet 1100 is illustrated as having a circular shape, but the present disclosure is not limited thereto.

The sample 2200 may be provided (or prepared) on the sample substrate 360 on the inspection table 200 . At this time, individual droplets may not be arranged on the inspection substrate 460 on the inspection table 200 .

The dispenser 180 may move to a position adjacent to the inspection discharge part IDP (or the inspection table 200 ) after discharging the liquid droplets 1100 onto the mother substrate 160 . For example, the dispenser 180 may move to a position adjacent to the inspection substrate 460 along the first direction DR1.

Referring to FIG. 6 , FIG. 10 and FIG. 11 , in the step ( S1400 ) in which the dispenser provides liquid droplets onto the inspection substrate, the dispenser 180 may discharge the inspection liquid droplets 1200 onto the inspection substrate 460 .

In this step, the dispenser 180 may be configured to be able to discharge the inspection liquid droplets 1200 onto the inspection substrate 460 . For example, a nozzle that discharges liquid droplets from the dispenser 180 may overlap the inspection substrate 460 when viewed from a plane. According to an embodiment, the dispenser 180 may be arranged to protrude from the dispenser mover 190 toward the inspection discharge part IDP, and in this case, the dispenser 180 may more easily provide the inspection liquid droplet 1200 onto the inspection substrate 460 .

However, the present disclosure is not necessarily limited to the aforementioned examples. For example, a configuration may be adopted in which the inspection table 200 moves to the main discharge part MDP so that the dispenser 180 discharges the inspection liquid droplets 1200 onto the inspection substrate 460 (not shown). In this case, a part of the main discharge part MDP and the inspection discharge part IDP are connected by members such as rails, so that the inspection table 200 can be moved.

The dispenser 180 may supply the inspection liquid droplet 1200 onto the inspection substrate 460 such that the inspection liquid droplet 1200 may be disposed on the inspection substrate 460 . After discharging the inspection liquid droplets 1200, the dispenser 180 may be separated from the inspection discharge part IDP.

Referring to FIG. 6, FIG. 12 to FIG. 14, in the step of judging the operation status of the sensor and the dispenser (S1600), information (or data) for confirming the operation status of the sensor 280 and the dispenser 180 may be obtained.

For example, in the step of judging the operating states of the sensor and the dispenser (S1600), it may be judged whether the sensor 280 is operating normally. Also, in this step, it can be judged whether the dispenser 180 is operating normally, and information (or data) for correcting the discharge amount can be obtained so that the supply amount of the liquid droplets 1100 is uniform.

The details of the step ( S1600 ) of judging the operating states of the sensor and the dispenser will be described in detail with reference to FIG. 7 .

Referring to Fig. 7, the step of judging the operating state of the sensor and the dispenser (S1600) may include the steps of: obtaining measurement information of the sample (S1620); comparing the measurement information with the inherent data of the sample (S1640); and judging the measurement of the sample Whether the information is in the normal range (S1660). At this time, when the measurement information of the sample 2200 is in the normal range, the step of judging the operation status of the sensor and the dispenser (S1600) may further include the following steps: obtaining the measurement information of the droplet provided on the inspection substrate 460 ( S1670). In the case that the measurement information of the sample 2200 is not within the normal range, the step of judging the operating status of the sensor and the dispenser (S1600) may further include the following step: providing status information of the sensor (S1680).

In the step of obtaining measurement information of the sample ( S1620 ), the sensor 280 may obtain measurement information of the sample 2200 .

In this step, the inspection table 200 can be moved so that the sample substrate 360 is adjacent to the sensor 280 . Accordingly, the position of the sample 2200 can be changed so that the sensor 280 can obtain measurement information of the sample 2200 . For example, the inspection table 200 may move in the second direction DR2 to reduce the distance between the sample substrate 360 and the sensor 280 .

The sensor 280 can obtain measurement information of the sample 2200 in the first direction DR1. The sensor 280 may obtain measurement information of the sample 2200 in the second direction DR2. The sensor 280 can obtain measurement information of the sample 2200 in the third direction DR3.

For example, when viewed from a plane, the sensor 280 can measure the length data of the sample 2200 in the first direction DR1 and the second direction DR2 as the sample 2200 passes through the measurement range of the sensor 280 . Meanwhile, the sensor 280 can of course use the aforementioned method to measure the height data of the sample 2200 in the third direction DR3.

Sample 2200 may have similar optical properties as inspection drop 1200 . For example, the sample 2200 may have a light transmittance similar to that of the inspection drop 1200 . The sample 2200 may have substantially the same light transmittance as the inspection liquid droplet 1200 . The difference between the light transmittance of the sample 2200 and the light transmittance of the inspection liquid droplet 1200 may be below a predetermined difference. According to an embodiment, the sample 2200 may also include the same substance as the inspection droplet 1200 . At this time, the sample 2200 may be a substance in which the inspection droplet 1200 is solidified. According to an embodiment, when the reliability of the sensor 280 is judged by using the sample 2200 , it may also be interpreted as judging the reliability of the inspection liquid droplet 1200 .

Sample 2200 may include multiple samples. For example, samples 2200 may include a first sample 2220 , a second sample 2240 and a third sample 2260 . For ease of description, the example in which the sample 2200 includes three samples is taken as the basis for description. However, the present disclosure is not limited to the aforementioned examples.

According to an embodiment, the first sample 2220, the second sample 2240, and the third sample 2260 may be arranged sequentially (or side by side) along the second direction DR2. The measurement information of each of the first sample 2220 , the second sample 2240 and the third sample 2260 can be sequentially obtained by the sensor 280 ( FIG. 13 ).

The size of each of the first sample 2220, the second sample 2240, and the third sample 2260 may be different from each other. The first sample 2220 , the second sample 2240 and the third sample 2260 respectively have different lengths along one direction.

For example, first sample 2220 may have a larger size than second sample 2240 . The first sample 2220 may have a longer length in the first direction DR1 than the second sample 2240 . The first sample 2220 may have a longer length in the second direction DR2 than the second sample 2240 . The first sample 2220 may have a longer length in the third direction DR3 than the second sample 2240 .

The second sample 2240 may have a larger size than the third sample 2260 . The second sample 2240 may have a longer length in the first direction DR1 than the third sample 2260 . The second sample 2240 may have a longer length in the second direction DR2 than the third sample 2260 . The second sample 2240 may have a longer length in the third direction DR3 than the third sample 2260 .

Measurement information of the first sample 2220, the second sample 2240, and the third sample 2260 having different sizes may be sequentially obtained, so that measurement information of the sensor 280 for various objects may be obtained. In this case, the reliability of information for judging the precision of the sensor 280 can be improved.

According to an embodiment, the first sample 2220, the second sample 2240, and the third sample 2260 can be stacked sequentially along the thickness direction (for example, the third direction DR3) of the sample substrate 360, and accordingly, the sensor 280 can also obtain the first Measurement information of a sample 2220, a second sample 2240 and a third sample 2260 (FIG. 14). In this case, while obtaining the measurement information of the first sample 2220, the second sample 2240, and the third sample 2260 having various sizes, since the samples along the moving direction (for example, the second direction DR2) of the inspection table 200 The overall length of the 2200 is reduced, allowing for shorter process times.

According to an embodiment, the first sample 2220 , the second sample 2240 and the third sample 2260 may also be sequentially arranged along the first direction DR1 (not shown). In this case, the sensor 280 obtains the measurement information of the first sample 2220 , the second sample 2240 and the third sample 2260 together, so that the process time can be shortened.

According to an embodiment, measurement information of the sample 2200 measured by the sensor 280 may be stored in a memory (not shown) provided in the droplet discharge device 1 . Alternatively, the measurement information of the sample 2200 measured by the sensor 280 may be transferred to an external memory.

In addition, in performing the step of judging the operation state of the sensor and the dispenser (S1600), the mother substrate 160 on which the droplet 1100 is arranged is moved for a subsequent process, and a new mother substrate 160 may be arranged (refer to FIG. 12 ). The subsequently arranged mother substrate 160 may be a mother substrate for being supplied with liquid droplets 1100 after the liquid droplet 1100 supply amount of the dispenser 180 is corrected. However, the present disclosure is not necessarily limited to the aforementioned examples. A new mother substrate 160 may be prepared at an appropriate point in time before the droplet 1100 whose supply amount is corrected is discharged.

Referring to FIG. 7 , in the step of judging whether the measurement information of the sample is within the normal range (S1660), it may be determined whether the measurement information of the sample 2200 obtained by the sensor 280 is within the normal range.

According to an embodiment, inherent measurement data of the sample 2200 may be provided in advance. For example, the length of the sample 2200 in the first direction DR1 , the length in the second direction DR2 and the length in the third direction DR3 may be measured in advance.

In this step, processor 420 may compare intrinsic measurement data of sample 2200 with measurement information of sample 2200 obtained by sensor 280 .

For example, the processor 420 may compare a first intrinsic length of the sample 2200 in the first direction DR1 with a first measured length of the sample 2200 in the first direction DR1 obtained by the sensor 280 . When the difference between the first intrinsic length and the first measured length is below a predetermined difference, the processor 420 may determine that the focus state of the sensor 280 with respect to the first direction DR1 and with respect to the measurement point 1222, A resolution of 1242 is suitable. Here, the first intrinsic length may be a pre-measured length of the sample 2200 in the first direction DR1.

Here, when referring to FIG. 4 , the predetermined difference may be the unit length UL of the sensor 280 . The predetermined difference may be the distance by which adjacent measurement points 1222, 1242 within the same group 1220, 1240 are separated from each other. For example, the distance between adjacent first points 1222 of the first group 1220 may be defined as the predetermined difference. In the case where the predetermined difference is defined as the adjacent distance with respect to the measurement points 1222 , 1242 , a range within an error range apparently generated in the sensor 280 may not be judged as an abnormal state of the sensor 280 .

According to an embodiment, the predetermined difference may also be a multiple of the unit length UL of the sensor 280 . In this case, the range within the error range within the unit length UL that can clearly occur in the sensor 280 may not be determined as an abnormal state of the sensor 280 .

The processor 420 may compare the second intrinsic length of the sample 2200 in the second direction DR2 with the second measured length of the sample 2200 in the second direction DR2 obtained by the sensor 280 . When the difference between the second intrinsic length and the second measured length is below a predetermined difference, the processor 420 may determine that the focus state of the sensor 280 with respect to the second direction DR2 and the movement of the inspection table 200 The control state is appropriate.

The processor 420 may compare the third intrinsic length of the sample 2200 in the third direction DR3 with the third measured length of the sample 2200 in the third direction DR3 obtained by the sensor 280 . In a case where the difference between the third intrinsic length and the third measured length is below a predetermined difference, the processor 280 may determine that the resolution of the sensor 280 in the third direction DR3 is appropriate.

For example, as described with reference to FIG. 2 , the sensor 280 may obtain height information of each of the measurement points 1222 , 1242 in the third direction DR3 . At this time, the reliability of the height information measured for the measurement points 1222 and 1242 can be confirmed by judging the resolution of the sensor 280 in the third direction DR3.

According to an embodiment, the processor 280 may use the aforementioned method to determine that the sensor 280 is in normal operation, or determine that the sensor 280 is in abnormal operation.

Referring to FIG. 7 , in a case where the measurement information of the sample 2200 is not within a normal range, a step of providing status information of the sensor (S1680) may be performed.

According to an embodiment, in the case of judging that the sensor 280 is operating abnormally, the processor 420 may control the alarm part 440 to provide status information of the sensor 280 . For example, in case the alarm part 440 includes a display device, the alarm part 440 may display text and/or an image indicating that the sensor 280 is in abnormal operation to the user. Or, in case the alarm part 440 includes an audio device, the alarm part 440 may output an audio indicating that the sensor 280 is in abnormal operation to the user. However, the present disclosure is not limited to the aforementioned examples, and the alarm part 440 may also include all of a display device and an audio device.

Accordingly, according to the embodiment, the user can easily confirm whether the sensor 280 is operating normally, and can ensure the reliability of the sensor 280 for detecting the liquid droplet 1200 to be executed later. And, finally, the amount of the liquid droplets 1100 provided onto the mother substrate 160 can be precisely controlled, so that process defects can be prevented.

Referring to FIG. 7 , in a case where the measurement information of the sample 2200 is within a normal range, a step of obtaining measurement information provided to a liquid droplet on a substrate for inspection ( S1670 ) may be performed.

In this step, the inspection table 200 may move in the second direction DR2 such that the inspection substrate 460 may be adjacent to the sensor 280 . For example, the inspection liquid droplet 1200 may move along the second direction DR2 so that the sensor 280 may obtain measurement information of the inspection liquid droplet 1200 . Accordingly, the volume of the inspection liquid droplet 1200 can be calculated.

Here, the measurement information of the inspection liquid droplet 1200 is obtained by the sensor 280 that has been judged to be operating normally, so the reliability of the measurement result can be further improved.

Also, the processor 420 may determine whether the dispenser 180 is properly expelling the droplet 1100 . The processor 420 may determine whether the amount of the discharged inspection liquid droplet 1200 corresponds to the amount intended by the user. For example, when the volume of the inspection liquid droplet 1200 is greater than the single discharge volume of the dispenser 180 , the processor 420 may determine that the discharge volume of the dispenser 180 should be increased. When the volume of the inspection liquid droplet 1200 is smaller than the single discharge amount of the dispenser 180 , the processor 420 may determine that the discharge amount of the dispenser 180 should be reduced.

Referring to FIG. 6 and FIG. 15 , in the step (S1800) in which the dispenser provides liquid droplets on the mother substrate based on the corrected supply amount, the processor 420 may correct the amount of liquid droplets 1200 to be provided to the mother substrate based on the amount of the inspection liquid 1200. The discharge volume of the droplet 1100 on the 160.

According to an embodiment, in case it is judged that the discharge amount of the dispenser 180 should be increased, the discharge amount of the dispenser 180 may be increased. In a case where it is determined that the discharge amount of the dispenser 180 should be reduced, the discharge amount of the dispenser 180 may be reduced. The discharge amount of the dispenser 180 can be adjusted by reflecting the difference between the single discharge amount of the dispenser 180 expected by the user and the measured volume of the inspection liquid droplet 1200 .

According to an embodiment, when it is determined that the discharge volume of the dispenser 180 needs to be changed, the processor 420 may also control the alarm part 440 to output visual information and/or audio information indicating that the discharge volume of the dispenser 180 needs to be changed to the user.

Referring to FIG. 6, in the step (S1800) in which the dispenser 180 provides the liquid droplet onto the mother substrate based on the corrected supply amount, the dispenser 180 may discharge the liquid droplet 1100 according to the corrected supply amount to the newly provided (or supply) ) on the mother substrate 160.

According to an embodiment, the dispenser 180 may provide a corrected discharge volume based on the measurement results for the inspection droplet 1200 . Accordingly, a uniform amount of liquid droplets 1100 may be provided on the mother substrate 160 .

According to an embodiment, the aforementioned steps may be repeatedly performed. For example, the step of correcting the supply amount of liquid droplets ( S1700 ) may be continuously performed at a point in time before liquid droplets are provided on the mother substrate 160 , thereby controlling the amount of liquid droplets 1100 disposed on the mother substrate 160 to be uniform. According to this, defective production of the target product to which the droplet 1100 is applied can be prevented. Meanwhile, periodic checks for the discharge amount of the liquid droplets 1100 are not necessarily required, so that process convenience may be provided.

The above has been described with reference to preferred embodiments of the present disclosure, but as long as those skilled in the art or those with common knowledge in the art will understand the ideas and concepts of the present disclosure without departing from the claims described in the claims. Various modifications and changes can be made to the present disclosure within the scope of the technical field.

Claims (9)

1. A droplet discharge device, comprising:

a main discharge portion; and

an inspection discharge portion disposed at one side of the main discharge portion,

wherein the main discharge portion includes:

a main frame;

a main table disposed on the main frame and configured to dispose a mother substrate;

a dispenser mover disposed on the main table and configured to move in a first direction; and

a dispenser configured to move in the first direction by the dispenser mover and discharge droplets,

wherein the inspection discharging portion includes:

checking the frame;

an inspection stage disposed on the inspection frame and configured to dispose a substrate for a sample and a substrate for inspection; and

the sensor is used for detecting the position of the sensor,

wherein the sensor is capable of obtaining measurement information of an inspection liquid droplet discharged from the dispenser onto the inspection substrate and a sample arranged on the sample substrate,

the dispenser is configured to discharge the droplet onto the inspection substrate when adjacent to the inspection discharge section.

2. The droplet discharge apparatus according to claim 1, wherein,

the sample and the droplet have the same light transmittance as each other.

3. The droplet discharge apparatus according to claim 1, wherein,

the discharge amount of the liquid droplet of the dispenser is corrected based on the measurement information on the liquid droplet for inspection obtained by the sensor.

4. The droplet discharge apparatus according to claim 1, wherein,

the position of the sensor is fixed relative to the main drain.

5. The droplet discharge apparatus according to claim 1, wherein,

the sensor is more adjacent to the sample substrate than the inspection substrate.

6. The droplet discharge apparatus according to claim 1, wherein,

the sensor includes a chromatic confocal sensor.

7. The droplet discharge apparatus according to claim 1, wherein,

the sample arranged on the sample substrate includes a plurality of samples having lengths different from each other in a direction.

8. The droplet discharge apparatus according to claim 1, wherein,

the sample includes a plurality of samples stacked in order along a thickness direction of the sample substrate.

9. The droplet discharge apparatus according to claim 1, wherein,

a difference between the light transmittance of the sample and the light transmittance of the droplet discharged onto the inspection substrate is equal to or less than a predetermined difference.

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