CN219161486U - Temperature sensor - Google Patents

Temperature sensor Download PDF

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Publication number
CN219161486U
CN219161486U CN202223575429.2U CN202223575429U CN219161486U CN 219161486 U CN219161486 U CN 219161486U CN 202223575429 U CN202223575429 U CN 202223575429U CN 219161486 U CN219161486 U CN 219161486U
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lens
sensing block
light rays
temperature sensor
light
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隋军
韩付海
余朝晃
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Zhongke Xintong Microelectronics Technology Beijing Co ltd
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Zhongke Xintong Microelectronics Technology Beijing Co ltd
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Abstract

The utility model relates to the technical field of measuring devices, and provides a temperature sensor which comprises a light source, a first lens, a spectroscope, a sensing block, a reflecting mirror, a second lens and a CCD sensor array, wherein the first lens is arranged on the light source; the first lens is used for converting light rays emitted by the light source into parallel light rays, the spectroscope is used for dividing the parallel light rays into first light rays capable of irradiating on the reflecting mirror and second light rays capable of irradiating on the sensing block, the first light rays are perpendicular to the second light rays, one end, far away from the spectroscope, of the sensing block is fixed with the relative position of the spectroscope, the second light rays can be reflected on the sensing block, and the volume of the sensing block can expand and contract along with the change of temperature; the second lens is used for amplifying the interference patterns generated by the first light rays and the second light rays and putting the interference patterns into the CCD sensor array; the CCD sensor array generates a current signal after receiving the amplified interference pattern. So set up, solved the lower problem of measurement accuracy of temperature sensor among the prior art.

Description

Temperature sensor
Technical Field
The utility model relates to the technical field of measuring devices, in particular to a temperature sensor.
Background
Conventional temperature sensors measure temperature indirectly by changing a characteristic (e.g., resistance, capacitance, magnetic properties, frequency, thermal noise, etc.) of an object as the temperature changes. The most commonly used temperature sensors are thermal resistance temperature sensors and thermocouple temperature sensors.
The thermal resistance temperature sensor measures temperature by utilizing the principle that the resistance value of a conductor or a semiconductor changes along with the temperature change, and the change of the resistance value is detected by utilizing a detection circuit after the resistance value of the conductor or the semiconductor changes along with the temperature change. Because the coefficient of the resistance value of the conductor or the semiconductor along with the temperature change is limited, the change value of the resistance is smaller when the temperature is changed by one degree centigrade, and the detection circuit is difficult to detect the tiny change of the resistance, so that the measurement precision of the thermal resistance temperature sensor is lower, and is generally 0.15-0.35 degree centigrade.
The thermocouple temperature sensor comprises two conductors of different materials, the two conductors form a closed loop, when temperature gradients exist at two ends of the conductors, current can flow in the loop, at the moment, potential difference exists between the two ends, and after the potential difference is determined by utilizing the induction circuit, the temperature can be determined according to the functional relation between the potential difference and the temperature. However, most of the metal thermocouples have small potential difference caused by temperature change, the sensitivity of the sensing circuit is low, and the change value of the potential difference cannot be accurately detected, so that the measurement accuracy of the thermocouple temperature sensor is low, and is generally 0.5-1 ℃.
Therefore, how to solve the problem of lower measurement accuracy of the temperature sensor in the prior art is an important technical problem to be solved by those skilled in the art.
Disclosure of Invention
The utility model provides a temperature sensor which is used for solving the defect of low measurement accuracy of the temperature sensor in the prior art.
The utility model provides a temperature sensor, which comprises a light source, a first lens, a spectroscope, a sensing block, a reflecting mirror, a second lens and a CCD sensor array, wherein the first lens is arranged on the light source;
the first lens is arranged to convert light rays emitted by the light source into parallel light rays, the spectroscope is arranged to divide the parallel light rays into first light rays capable of irradiating on the reflecting mirror and second light rays capable of irradiating on the sensing block, the first light rays are perpendicular to the second light rays, one end, far away from the spectroscope, of the sensing block is fixed with the relative position of the spectroscope, the second light rays can reflect on the sensing block, and the volume of the sensing block can expand and contract along with the change of temperature;
the second lens is arranged to amplify the interference pattern generated by the first light and the second light and put the interference pattern into the CCD sensor array;
the CCD sensor array is configured to generate a current signal upon receiving the amplified interference pattern.
According to the temperature sensor provided by the utility model, the temperature sensor further comprises a third lens and a fourth lens;
the third lens is arranged between the spectroscope and the reflecting mirror, and is arranged to be capable of converging the first light rays;
the fourth lens is arranged between the spectroscope and the sensing block, and the fourth lens is arranged to be capable of converging the second light rays.
According to the temperature sensor provided by the utility model, the temperature sensor further comprises a total reflection film, wherein the total reflection film is arranged on one surface of the sensing block, which is close to the spectroscope.
According to the temperature sensor provided by the utility model, the temperature sensor further comprises the protective layer, the protective layer is arranged on one side of the sensing block, which is far away from the spectroscope, and the protective layer has heat conducting performance, and the volume of the protective layer is not affected by temperature change.
According to the temperature sensor provided by the utility model, the temperature sensor further comprises a shell, wherein the light source, the first lens, the spectroscope, the sensing block, the reflecting mirror, the second lens and the CCD sensor array are all arranged in the shell, and one surface of the sensing block, which is far away from the spectroscope, extends to the outside of the shell.
According to the temperature sensor provided by the utility model, the CCD sensor array comprises a plurality of CCD sensors, and the CCD sensors are distributed in rows and columns and are closely distributed.
According to one temperature sensor provided by the utility model, the first lens is an achromat.
According to the temperature sensor provided by the utility model, the light source is an LED lamp, a halogen lamp or a laser lamp.
According to the temperature sensor provided by the utility model, the sensing block is made of 40Cr, organic glass or bronze.
According to the temperature sensor provided by the utility model, the protective layer is made of invar alloy.
The utility model provides a temperature sensor which comprises a light source, a first lens, a spectroscope, a sensing block, a reflecting mirror, a second lens and a CCD sensor array. The first lens is used for converting light rays emitted by the light source into parallel light rays, the parallel light rays irradiate the spectroscope, the spectroscope is used for dividing the parallel light rays into first light rays and second light rays, and the first light rays are perpendicular to the second light rays. The first light can be irradiated on the reflector and reflected on the reflector, and the second light can be irradiated on the sensing block and reflected on the sensing block. The first light and the second light are reflected and then meet after passing through the spectroscope to interfere, and an interference pattern is generated. The second lens can amplify the interference patterns generated by the first light and the second light and further put the interference patterns on the CCD sensor array. The interference pattern is stripes with different brightness, wherein the position of the stripe with the largest light intensity is the position with the largest main intensity. The sensing block is fixed with the relative position of the spectroscope at one end far away from the spectroscope, and the volume of the sensing block can expand and contract along with the change of temperature. When the temperature changes, the sensing block expands and contracts correspondingly, the distance between the surface of the sensing block, which is close to the spectroscope, and the spectroscope changes, and the optical path difference between the first light ray and the second light ray changes. The position of the main maximum of the interference pattern is closely related to the optical path difference between the first light and the second light, and when the optical path difference between the first light and the second light is changed, the position of the main maximum of the interference pattern is also changed. After the interference pattern is put on the CCD sensor array, the light intensities sensed by the CCD sensors at different positions in the CCD sensor array are different, and the current signals generated by the CCD sensors at different positions are also different. The position of the dominant maxima of the interference pattern can be determined from the current signal, and the temperature value can be determined from the correspondence of the position of the dominant maxima of the interference pattern to the temperature. So set up, utilize white light interference principle to realize the measurement to the temperature, CCD sensor array has higher sensitivity and resolution ratio and lower distortion to through the amplification processing of second lens to interference pattern, can enlarge the size of interference pattern, and can increase the contrast of bright and dark stripe in the interference pattern, thereby improve the current signal difference that the CCD sensor that is located different positions produced, and then can improve the precision of the biggest position of interference pattern of determining, thereby improved the precision of the temperature value of determining, solved the lower problem of measurement accuracy of temperature sensor among the prior art.
Drawings
In order to more clearly illustrate the utility model or the technical solutions of the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the utility model, and other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a temperature sensor according to the present utility model;
FIG. 2 is a schematic representation of the distribution of the dominant maxima of the interference pattern provided by the present utility model over a CCD sensor array.
Reference numerals:
1. a light source; 2. a first lens; 3. a beam splitter; 4. an induction block; 5. a reflecting mirror; 6. a second lens; 7. a CCD sensor array; 8. a first light ray; 9. a second light ray; 10. a third lens; 11. a fourth lens; 12. a protective layer; 13. and a controller.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the present utility model more apparent, the technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings, and it is apparent that the described embodiments are some embodiments of the present utility model, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
The temperature sensor of the present utility model is described below with reference to fig. 1 to 2.
As shown in fig. 1 to 2, the temperature sensor provided by the embodiment of the utility model comprises a light source 1, a first lens 2, a spectroscope 3, a sensing block 4, a reflecting mirror 5, a second lens 6 and a CCD sensor array 7.
Specifically, the light source 1, the first lens 2, the beam splitter 3, and the reflecting mirror 5 are distributed along a first straight line, which is parallel to the normal of the first lens 2 and the normal of the reflecting mirror 5. The sensing block 4, the beam splitter 3, the second lens 6 and the CCD sensor array 7 are distributed along a second straight line, which is perpendicular to the first straight line and parallel to the normal of the second lens 6. An included angle between the normal line of the spectroscope 3 and the first straight line is 45 degrees, and an included angle between the normal line of the spectroscope 3 and the second straight line is 45 degrees, refer to the figure.
The light source 1 is capable of emitting light having a bandwidth in the range of 50-500 nm. In particular, the light source 1 may be, but is not limited to, an LED lamp, a halogen lamp or a laser lamp. The light emitted from the light source 1 includes a plurality of monochromatic lights having different wavelengths.
The light irradiates the first lens 2, the first lens 2 can convert the light emitted by the light source 1 into parallel light, and the parallel light irradiates the spectroscope 3. The beam splitter 3 is capable of splitting parallel light into a first light 8 and a second light 9, the first light 8 being perpendicular to the second light 9. The light beam transmitted by the beam splitter 3 is a first light beam 8, and the first light beam 8 can irradiate on the reflecting mirror 5 and reflect on the reflecting mirror 5. The light reflected by the beam splitter 3 is a second light 9, and the second light 9 can irradiate on the sensing block 4 and reflect on the sensing block 4. The first light ray 8 and the second light ray 9 are reflected and then meet after passing through the spectroscope 3 to interfere, and an interference pattern is generated. The interference pattern is stripes with different brightness, wherein the position of the stripe with the largest light intensity is the position with the largest main intensity.
The light emitted by the light source 1 can interfere with different monochromatic lights, and the width of bright and dark fringes in interference patterns generated by the monochromatic lights with different wavelengths is different, namely, the interference patterns generated by the monochromatic lights with different wavelengths are different. The interference patterns produced by the individual monochromatic light rays are superimposed on one another to form a final interference pattern, which is the interference pattern produced by the first light ray 8 and the second light ray 9.
The second lens 6 is capable of amplifying the interference pattern generated by the first light beam 8 and the second light beam 9, and further delivering the interference pattern to the CCD sensor array 7.
When the interference patterns produced by the individual monochromatic lights are superimposed, there is a constructive and also a destructive phase. Only interference patterns of monochromatic light whose optical path difference is an even multiple of the wavelength are constructive when superimposed. When the optical path difference is different, the interference patterns generated by the monochromatic light are different in constructive and destructive conditions when being overlapped, so that the final interference patterns obtained after being overlapped are different, and the main maximum positions on the final interference patterns are also different. That is, the main maximum position of the final interference pattern has a close relationship with the optical path difference.
The end of the sensing block 4 far away from the spectroscope 3 is fixed with the relative position of the spectroscope 3, and the volume of the sensing block 4 can expand and contract along with the change of temperature. When the temperature changes, the sensing block 4 expands and contracts correspondingly, the distance between the surface of the sensing block 4, which is close to the spectroscope 3, and the spectroscope 3 changes, and the optical path difference between the first light ray 8 and the second light ray 9 changes.
Since the position of the dominant maxima of the interference pattern is closely related to the optical path difference between the first light ray 8 and the second light ray 9, when the optical path difference between the first light ray 8 and the second light ray 9 is changed, the position of the dominant maxima of the interference pattern is also changed.
After the interference pattern is put on the CCD sensor array 7, the light intensities sensed by the CCD sensors at different positions in the CCD sensor array 7 are different, and the current signals generated by the CCD sensors at different positions are also different. The position of the dominant maxima of the interference pattern can be determined from the current signal, and the temperature value can be determined from the correspondence of the position of the dominant maxima of the interference pattern to the temperature.
So set up, utilize white light interference principle to realize the measurement to the temperature, CCD sensor array 7 has higher sensitivity and resolution ratio and lower distortion to through the amplification processing of second lens 6 to interference pattern, can enlarge the size of interference pattern, and can increase the contrast of bright and dark stripe in the interference pattern, thereby improve the current signal difference that the CCD sensor that is located different positions produced, and then can improve the precision of the biggest position of interference pattern that determines, thereby improved the precision of the temperature value that determines, solved the lower problem of temperature sensor's measurement precision among the prior art.
It should be further noted that, through a great deal of tests on the thermal resistance temperature sensor and the thermocouple temperature sensor in the prior art and the temperature sensor provided by the embodiment, it is found that the measurement precision of the thermal resistance temperature sensor in the prior art is 0.15-0.35 ℃, the measurement precision of the thermocouple temperature sensor is 0.5-1 ℃, and the measurement precision of the temperature sensor provided by the embodiment can reach 0.004 ℃, so that the measurement precision of the temperature sensor is greatly improved.
The expansion and contraction amounts of the sensing block 4 at different temperatures are different, so that the optical path difference between the first light beam 8 and the second light beam 9 is different, and accordingly, the main maximum positions of the generated interference patterns are different. The correspondence between the position of the main maximum of the interference pattern and the temperature can be determined by integrating the correspondence between the position of the main maximum of the interference pattern and the optical path difference between the first light ray 8 and the second light ray 9, the correspondence between the optical path difference between the first light ray 8 and the second light ray 9 and the expansion and contraction amount of the sensing block 4, and the correspondence between the expansion and contraction amount of the sensing block 4 and the temperature.
The functional relation between the position of the dominant maxima of the interference pattern and the temperature is a linear function. When the temperature sensor is assembled, the positions of the light source 1, the first lens 2, the spectroscope 3, the sensing block 4, the reflecting mirror 5, the second lens 6 and the CCD sensor array 7 are determined, then at least one temperature is selected for correction, and a specific functional relation between the position of the main maximum of the interference pattern and the temperature is determined. One temperature is selected as a reference temperature to determine the reference position of the CCD sensor array 7.
When the temperature needs to be measured, the light source 1 is turned on, and after the measurement is finished, the light source 1 is turned off, so that electric energy can be saved. The light source 1 can be turned on or off manually, or the light source 1 can be electrically connected with the controller 13, and the controller 13 can control the light source 1 to be turned on or off.
In this embodiment, the CCD sensor array 7 includes a plurality of CCD sensors, and the plurality of CCD sensors are distributed in rows and columns and are closely arranged.
In a specific embodiment, the above process of determining the position of the dominant maximum of the interference pattern according to the current signal and determining the temperature value according to the correspondence between the position of the dominant maximum of the interference pattern and the temperature may be implemented by the controller 13.
The controller 13 includes a comparison circuit, a first calculation circuit, and a second calculation circuit.
Each CCD sensor is electrically connected with a comparison circuit, and the comparison circuit can compare current signals generated by each CCD sensor to determine the strongest current signal and the position of the CCD sensor corresponding to the strongest current signal. The position of the CCD sensor corresponding to the strongest current signal is the main maximum position of the interference pattern.
The input end of the first calculation circuit is electrically connected with the output end of the comparison circuit, and the first calculation circuit can determine the optical path difference of the first light ray and the second light ray 9 according to the corresponding relation between the main maximum position of the interference pattern and the optical path difference of the first light ray 8 and the second light ray 9.
The optical path difference between the first light ray and the second light ray 9 is consistent with the expansion and contraction amount of the sensing block 4.
The input end of the second calculation circuit is electrically connected with the output end of the first calculation circuit, and the second calculation circuit can determine a temperature value according to the corresponding relation between the optical path difference of the first light ray and the second light ray 9 and the temperature.
The correspondence between the main maximum position of the interference pattern and the optical path difference between the first light ray and the second light ray 9 is well known to those skilled in the art. The optical path difference between the first light ray and the second light ray 9 is the expansion and contraction amount of the sensing block 4, and the corresponding relationship between the expansion and contraction amount and the temperature of the sensing block 4 belongs to the self-characteristics of the material selected by the sensing block 4, which is also a mature prior art for those skilled in the art. The person skilled in the art can determine the amount of expansion and contraction of the displacement of the sensing mass 4 and thus the temperature value of the displacement from the position of the main maximum of the interference pattern.
In the embodiment of the present utility model, the first lens 2 is a convex lens having an achromatic function. When the light emitted by the light source 1 passes through the first lens 2, the first lens 2 converts the light into parallel light, and simultaneously, the achromatic treatment can be performed on the light, so that the definition of interference fringes and the contrast ratio of bright and dark fringes can be improved, and the measurement accuracy of the temperature sensor is improved.
The second lens 6 is a convex lens.
In this embodiment, a material with a higher thermal expansion coefficient is selected as the sensing block 4, and when the temperature changes, the higher the thermal expansion coefficient of the sensing block 4, the larger the expansion amount generated by the sensing block, the larger the influence on the optical path difference between the first light ray 8 and the second light ray 9, so that the position change of the main maximum of the interference pattern is more obvious, and the measurement accuracy of the temperature sensor can be further improved.
Specifically, the material of the sensing block 4 may be, but not limited to, 40Cr, plexiglas or bronze.
In the embodiment of the utility model, the temperature sensor further comprises a third lens 10 and a fourth lens 11.
The third lens 10 is disposed between the beam splitter 3 and the reflecting mirror 5, the first light 8 transmitted by the beam splitter 3 is parallel, and the third lens 10 can converge the first light 8, so that the first light 8 is intensively irradiated on a point of the reflecting mirror 5.
Correspondingly, the fourth lens 11 is disposed between the beam splitter 3 and the sensing block 4, the second light beam 9 reflected by the beam splitter 3 is parallel, and the fourth lens 11 can converge the second light beam 9, so that the second light beam 9 is intensively irradiated on a point of the sensing block 4.
So set up, first light 8 and second light 9 all assemble to the one point of speculum 5 and response piece 4 respectively, can reduce the influence of speculum 5 and response piece 4's surface roughness to the optical path difference of first light and second light, can further improve temperature sensor's measurement accuracy.
The third lens 10 and the fourth lens 11 are convex lenses in the same way.
The reflecting mirror 5 is a total reflecting mirror 5, and when the first light 8 irradiates the reflecting mirror 5, total reflection can occur, thereby ensuring the intensity of the first light 8.
The temperature sensor in this embodiment further includes a total reflection film, where the total reflection film is disposed on a surface of the sensing block 4 near the spectroscope 3, and when the second light beam 9 irradiates on a side of the sensing block 4 near the spectroscope 3, total reflection can occur, so as to ensure intensity of the first light beam 8, so that bright and dark fringes of the interference pattern generated by the first light beam 8 and the second light beam 9 after passing through the spectroscope 3 have higher contrast, and measurement accuracy of the temperature sensor can be further improved.
The size of the sensing block 4 in the normal direction of the fourth lens 11 is 0.1 to 20 mm, and specifically, the size of the sensing block 4 in the normal direction of the fourth lens 11 may be set to 2 mm.
The temperature sensor in the embodiment of the utility model further comprises a protective layer 12, wherein the protective layer 12 is arranged on one side of the sensing block 4 away from the spectroscope 3 and is used for protecting the sensing block 4.
The protective layer 12 has excellent heat conduction performance and can conduct the temperature of the measured object to the sensing block 4.
The volume of the protective layer 12 is not affected by temperature variations, i.e. the thermal expansion coefficient of the protective layer 12 is substantially zero. When the sensing block 4 is contacted with the measured object through the protective layer 12, the protective layer 12 can protect the sensing block 4, and can not generate expansion amount, so that the influence on the optical path difference of the first light ray 8 and the second light ray 9 can be avoided, and the measurement accuracy of the temperature sensor is ensured.
The material of the protective layer 12 in this embodiment may be, but not limited to, invar, which is a nickel-iron alloy with a high thermal conductivity and a very low thermal expansion coefficient, and can maintain a fixed size in a wide temperature range.
The temperature sensor in this embodiment further includes a housing, and the light source 1, the first lens 2, the spectroscope 3, the sensing block 4, the reflecting mirror 5, the second lens 6, the CCD sensor array 7, the third lens 10, the fourth lens 11, and the protective layer 12 are all disposed inside the housing. The sensing block 4 extends to the outside of the casing away from the spectroscope 3, and is used for sensing the temperature of the measured object.
Therefore, the shell is utilized to fix and protect the temperature sensor, so that the stability and the reliability of the temperature sensor can be ensured, and the service life of the temperature sensor can be prolonged.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present utility model, and are not limiting; although the utility model has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present utility model.

Claims (10)

1. The temperature sensor is characterized by comprising a light source, a first lens, a spectroscope, a sensing block, a reflecting mirror, a second lens and a CCD sensor array;
the first lens is arranged to convert light rays emitted by the light source into parallel light rays, the spectroscope is arranged to divide the parallel light rays into first light rays capable of irradiating on the reflecting mirror and second light rays capable of irradiating on the sensing block, the first light rays are perpendicular to the second light rays, one end, far away from the spectroscope, of the sensing block is fixed with the relative position of the spectroscope, the second light rays can reflect on the sensing block, and the volume of the sensing block can expand and contract along with the change of temperature;
the second lens is arranged to amplify the interference pattern generated by the first light and the second light and put the interference pattern into the CCD sensor array;
the CCD sensor array is configured to generate a current signal upon receiving the amplified interference pattern.
2. The temperature sensor of claim 1, further comprising a third lens and a fourth lens;
the third lens is arranged between the spectroscope and the reflecting mirror, and is arranged to be capable of converging the first light rays;
the fourth lens is arranged between the spectroscope and the sensing block, and the fourth lens is arranged to be capable of converging the second light rays.
3. The temperature sensor of claim 1, further comprising a total reflection film disposed on a side of the sensing block adjacent to the beam splitter.
4. The temperature sensor of claim 1, further comprising a protective layer disposed on a side of the sensing block away from the beam splitter, wherein the protective layer has a thermal conductivity, and wherein a volume of the protective layer is not affected by temperature changes.
5. The temperature sensor of claim 1, further comprising a housing, wherein the light source, the first lens, the beam splitter, the sensing block, the reflector, the second lens, and the CCD sensor array are disposed inside the housing, and wherein a face of the sensing block remote from the beam splitter extends outside the housing.
6. The temperature sensor of claim 1, wherein the CCD sensor array comprises a plurality of CCD sensors, the plurality of CCD sensors being arranged in rows and columns and closely spaced.
7. The temperature sensor of claim 1, wherein the first lens is an achromat.
8. The temperature sensor of claim 1, wherein the light source is an LED lamp, a halogen lamp, or a laser lamp.
9. The temperature sensor of claim 1, wherein the sensing mass is 40Cr, plexiglas or bronze.
10. The temperature sensor of claim 4, wherein the protective layer is invar alloy.
CN202223575429.2U 2022-12-30 2022-12-30 Temperature sensor Active CN219161486U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202223575429.2U CN219161486U (en) 2022-12-30 2022-12-30 Temperature sensor

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Application Number Priority Date Filing Date Title
CN202223575429.2U CN219161486U (en) 2022-12-30 2022-12-30 Temperature sensor

Publications (1)

Publication Number Publication Date
CN219161486U true CN219161486U (en) 2023-06-09

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CN202223575429.2U Active CN219161486U (en) 2022-12-30 2022-12-30 Temperature sensor

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CN (1) CN219161486U (en)

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