CN111649830A - Radiation spectrum-based color CCD self-calibration temperature measuring device and method - Google Patents

Radiation spectrum-based color CCD self-calibration temperature measuring device and method Download PDF

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CN111649830A
CN111649830A CN202010344202.3A CN202010344202A CN111649830A CN 111649830 A CN111649830 A CN 111649830A CN 202010344202 A CN202010344202 A CN 202010344202A CN 111649830 A CN111649830 A CN 111649830A
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temperature
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CN111649830B (en
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黄群星
冯宏
薛志亮
汪守康
周永刚
李廉明
龚俊
王飞
严建华
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Zhejiang University ZJU
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0014—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiation from gases, flames
    • G01J5/0018—Flames, plasma or welding
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/03—Arrangements for indicating or recording specially adapted for radiation pyrometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0801—Means for wavelength selection or discrimination
    • G01J5/0802—Optical filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0803—Arrangements for time-dependent attenuation of radiation signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/80—Calibration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G01J2005/202—Arrays
    • G01J2005/204—Arrays prepared by semiconductor processing, e.g. VLSI

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  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
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Abstract

The invention discloses a radiation spectrum-based colored CCD (charge coupled device) self-calibration temperature measuring device and a method, belonging to the technical field of radiation method temperature measurement, wherein the device comprises a lens group, a beam splitter and a colored CCD which are sequentially arranged along the radiation light wave direction of a measured object; the radiation light wave is divided into two beams by the beam splitter, wherein one beam is transmitted to enter the color CCD, and the other beam is reflected to enter the spectrum measurement module; the color CCD is used for recording a color image of a measuring object, and the spectrum measuring module is used for measuring the spectrum characteristic of the measuring object; the color CCD and the spectrum measuring module are both in communication connection with a computer, and the computer performs self-calibration on the temperature measurement constant of the color CCD and calculates the temperature distribution of a measured object. The system can be calibrated automatically, the device is simple, the temperature measurement accuracy is high, the application scene is wide, and the popularization is easy.

Description

Radiation spectrum-based color CCD self-calibration temperature measuring device and method
Technical Field
The invention relates to the technical field of radiation method temperature measurement, in particular to a color CCD (charge coupled device) self-calibration temperature measurement device and method based on radiation spectrum.
Background
The radiation spectrum of flames generated by burning different fuels is different, and the flames can be divided into two main types, namely luminous flames and transparent flames according to different characteristics of the radiation spectrum of the flames. The inside of the luminous flame contains smoke particles or solid particles, the radiation position of the flame is a continuous spectrum of 0 to infinity, and the flame has radiation in a visible spectrum region; the radiation spectrum of the transparent flame is mostly in the infrared region and is in a band-shaped or linear radiation.
In view of the fact that the flame luminescence mechanism is different and the emitted spectrum has diversity, the flame temperature measurement method is also diversified. The measurement method of the flame temperature can be classified into a contact method and a non-contact method according to whether the temperature sensing element contacts the flame object. The contact method mainly comprises thermocouple, thermal resistor, optical fiber temperature measurement and the like; the non-contact temperature sensor does not need to be in contact with a measured object, so that a temperature field cannot be interfered, the dynamic response characteristic is relatively good, the temperature sensor is suitable for temperature measurement under a high-temperature condition, and the upper temperature measurement limit of the temperature sensor is not limited by the temperature resistance degree of a temperature sensing element. The non-contact temperature sensor mainly comprises acoustic wave temperature measurement, radiation method temperature measurement, laser interference method temperature measurement, spectrum method temperature measurement and the like.
The radiation method temperature measurement method has the advantages of high measurement precision, non-contact, real-time and continuous measurement and high temperature measurement. The planck's radiation law may be replaced by the wien's radiation law in the thermal radiation wavelength range between 400nm and 750nm, and below a temperature range of 3000K:
Figure BDA0002469487530000011
wherein, Ibλ(T) is flame monochromatic radiation energy (w/m)3) λ is the wavelength (m), T is the temperature (K), and (λ, T) is the flame emissivity (dimensionless quantity). C1＝3.741844xl0-16(W·m2)，C2＝0.01438833(W·m2)。
If at two wavelengths lambda1And λ2Simultaneously measuring monochromatic radiant energy emitted from the same point
Figure BDA0002469487530000021
And
Figure BDA0002469487530000022
the temperature at that point can be derived from the ratio of:
Figure BDA0002469487530000023
in the hypothetical sense of the grayness of the flame radiation:
Figure BDA0002469487530000024
is provided with (lambda)1，T)＝(λ2，T)＝TTherefore, a two-color temperature measurement formula can be obtained:
Figure BDA0002469487530000025
this is the basic formula of colorimetric thermometry.
The color CCD camera uses a CCD image sensing chip as a core component, converts light intensity signals obtained on a photosensitive element of the color CCD camera into electric signals, and outputs RGB three-primary-color signals after passing through a series of processing circuits. That is, after the color CCD images the luminous flame, let λR、λG、λBR, G, B respectivelyThe wavelength corresponding to the peak value of the channel spectral response curve, the signal collected by the color image card contains lambdaR、λG、λBCorresponding to the intensity values under 3 wavelengths, the intensity values under two wavelengths are selected and substituted into a colorimetric temperature measurement formula to calculate the temperature T. Actually, due to the characteristics of the CCD device itself, the difference between the measured temperature T and the actual temperature is large due to the difference between the optical/electrical conversion and the a/D conversion of the signal and the shooting conditions. In order to increase the measurement accuracy of the system, the temperature measurement system is generally calibrated by using a blackbody furnace. However, the actual measurement object is complex and changeable, the radiation characteristic is different from that of the blackbody furnace to a certain extent, and the measurement deviation is still large even if the blackbody furnace is used for calibration.
Disclosure of Invention
The invention aims to provide a device and a method for color CCD self-calibration temperature measurement based on radiation spectrum, which realize the self-calibration of a color CCD temperature measurement system and simultaneously improve the measurement precision of the color CCD temperature measurement system.
In order to achieve the above object, in a first aspect, the present invention provides a radiation spectrum-based color CCD self-calibration temperature measuring device, including a lens set, a beam splitter and a color CCD, which are sequentially arranged along a radiation light wave direction of a measurement object;
the radiation light wave is divided into two beams by the beam splitter, wherein one beam is transmitted to the color CCD, and the other beam is reflected to the spectrum measurement module; the color CCD is used for recording a color image of the measuring object, and the spectral measuring module is used for measuring the spectral characteristics of the measuring object;
the color CCD and the spectrum measuring module are in communication connection with a computer, and the computer performs self-calibration on a temperature measuring constant of the color CCD and calculates the temperature distribution of the measuring object.
In order to obtain the radiation spectrum distribution of the measuring object, optionally, in one embodiment, the spectrum measuring module comprises a pinhole diaphragm, a fiber probe, an optical fiber and a spectrometer; the radiation light reflected by the beam splitter passes through the pinhole diaphragm, the optical fiber probe and the optical fiber in sequence and is received by the spectrometer. The pinhole diaphragm is used for controlling the area of the object radiation light entering the optical fiber probe, the optical fiber probe is used for receiving the object radiation light, the optical fiber is used for transmitting the object radiation light, and the spectrometer is used for measuring the radiation spectrum of the object.
In order to utilize a spectrometer to self-calibrate the constant of the color CCD temperature measurement system, optionally, in one embodiment, the optical path of the radiation light passing through the beam splitter to the color CCD is equal to the optical path to the fiber probe; and the radiation light recorded by the center of the color CCD and the radiation light received by the fiber probe are radiation light at the same position of a measuring object.
In order to improve the self-calibration accuracy of the device, optionally, in an embodiment, the pinhole diaphragm is located 1-2 mm in front of the optical fiber probe, the diameter of the pinhole is 8-10 times of the pixel size of the color CCD, and the pinhole is coaxial with the optical fiber probe.
In order to improve the accuracy of temperature calculation from the spectrum, optionally, in one embodiment, the spectrometer has a wavelength range of 380nm to 780nm and a spectral resolution of less than 0.1 nm.
In order to avoid introducing errors due to different transmittances of the radiated light for different wavelengths through the optical elements, optionally, in one embodiment, the transmittances of all the optical elements through which the radiated light waves pass are equal to the transmittance of the visible light.
In order to adjust the size of the measurement field of view, optionally, in one embodiment, the lens group comprises at least one imaging lens.
In a second aspect, the method for color CCD self-calibration temperature measurement based on radiation spectrum provided by the present invention is implemented by the above color CCD self-calibration temperature measurement device, and includes the following steps:
1) before testing, the positions of all components in the color CCD and the spectrum measurement module are calibrated by using laser;
2) during testing, the radiation light wave of a measuring object is split, one beam is recorded by the color CCD, and the other beam enters the spectrum measuring module;
3) calculating a temperature from a radiation spectrum signal of the measurement object; calibrating a system temperature measurement constant of a pixel point corresponding to the color CCD by using the temperature calculated by the spectral signal;
4) and calculating the temperature distribution of the color CCD recording object according to the self-calibration result.
In order to calibrate the positions of the color CCD, the pinhole diaphragm and the optical fiber probe, the monochromaticity of laser is required to be good, the laser forms a light beam with the diameter reaching the micron order after passing through the diaphragm arranged in front of the lens, so that the light beam passes through the optical axis of the lens, a small bright spot can be formed on the color CCD, the color CCD is moved to enable the bright spot to be positioned in the center of the camera, and a bright spot image is recorded. And fine-tuning the precision pinhole diaphragm and the optical fiber probe to maximize the light intensity signal received by the spectrometer, wherein the object radiation light received by the spectrometer corresponds to the object radiation light received by the center of the camera.
In order to provide accurate calibration temperature for the color CCD, the spectral radiation force of different wavelengths measured by a spectrometer is used for fitting a black body radiation curve, and the temperature of a measured object is calculated. Since the radiation of a general object has characteristic spectral lines, errors are introduced when a blackbody radiation curve is fitted, and therefore the wavelength is selected to avoid the characteristic spectral lines.
The formula for calculating the temperature measurement constant in step 3) is as follows:
Figure BDA0002469487530000041
wherein T is a temperature calculated from a radiation spectrum signal of the measurement object; lambda [ alpha ]g，λbThe wavelengths respectively correspond to the peak values of the spectral response curves of the channels of the color CCD camera G, B;
Figure BDA0002469487530000042
respectively the light intensities recorded by the color CCD camera G, B.
In step 4), after the temperature measurement constant C is obtained, the temperature distribution of the measurement object is calculated according to the G, B channel intensity value of each pixel point, and the calculation formula is as follows:
Figure BDA0002469487530000051
wherein, T (x, y) is the temperature of each pixel point of the color CCD.
Compared with the prior art, the invention has the beneficial effects that:
the self-calibration temperature measuring device and the temperature measuring method can realize the self-calibration of the system, and have the advantages of simple device, high temperature measuring accuracy, wide application scene and easy popularization.
Drawings
FIG. 1 is a schematic diagram of a color CCD self-calibration temperature measuring device according to the present invention;
FIG. 2 is a schematic diagram of the optical path of the color CCD self-calibration temperature measuring device according to the present invention;
FIG. 3 is a schematic diagram of the calibration of the position of the optical component of the color CCD self-calibration temperature measuring device of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be further described with reference to the following embodiments and accompanying drawings.
Example 1
Referring to fig. 1 and 2, the color CCD self-calibration temperature measuring device based on radiation spectrum of the present embodiment includes the following parts: the system comprises an imaging lens 2, a beam splitter 4, a color CCD5, a spectrum measuring module and a computer 7, wherein the spectrum measuring module comprises a precision pinhole diaphragm 601, a fiber probe 602, an optical fiber 603 and a spectrometer 604. The imaging lens 2, the beam splitter 4, and the color CCD5 are arranged in this order along the optical path axis 3 of the measurement object 1.
The measurement object 1 radiates visible light waves, and the radiation light waves of the measurement object 1 are collected by the imaging lens 2 and imaged on the recording plane of the color CCD 5. The optical axis of the temperature measuring device is the same as that of the imaging lens 2 and corresponds to the center of the recording plane of the color CCD 5. The beam splitter 4 splits the radiation light wave of the object into two beams, one beam is recorded by the color CCD5, the other beam is received by the spectrum measurement module, the color CCD5 records the color image of the measurement object 1, the color image comprises R, G, B three channels, the spectrum measurement module measures and analyzes the spectral characteristics of the measurement object, the computer 7 processes and analyzes the spectrum of the measurement object 1, the temperature measurement constant of the color CCD5 is calibrated, and the temperature distribution of the measurement object 1 is calculated.
In order to obtain the radiation spectrum distribution of the measurement object, a precision pinhole diaphragm 601 in the spectrum measurement module is used for controlling the area of the object radiation light entering the fiber-optic probe 602, the fiber-optic probe 602 is used for receiving the object radiation light, the optical fiber 603 is used for transmitting the object radiation light, and the spectrometer 604 is used for measuring the radiation spectrum of the object.
In order to utilize the spectrometer to calibrate the constant of the color CCD temperature measurement system, the beam splitter 4 is arranged between the imaging lens 2 and the color CCD5, and the optical path of the object radiation light to the color CCD5 after passing through the beam splitter 2 is equal to the optical path to the fiber probe 602, L in FIG. 21+L2L. The radiation light recorded by the center of the color CCD5 through the optical axis of the temperature measurement system and the radiation light received by the fiber probe 602 are radiation light at the same position of the measurement object.
Before testing, the positions of the color CCD5, the pinhole diaphragm 601 and the fiber probe 602 need to be calibrated, the laser 8 is placed at the measuring object, referring to fig. 3, the monochromaticity of the laser 8 is good, and the diaphragm 9 is placed on the optical path of the laser 8. The laser 8 forms a light beam with the diameter reaching the micron level after passing through the diaphragm 9, so that the light beam passes through the optical axis of the lens, a small bright spot is formed on the color CCD5, and the color CCD5 is moved to enable the bright spot to be positioned at the center of the camera, so that the bright spot image is recorded. The precision pinhole diaphragm 601 and the fiber-optic probe 602 are finely adjusted to maximize the light intensity signal received by the spectrometer 604, and the object radiation light received by the spectrometer corresponds to the object radiation light received by the center of the camera.
During testing, the radiation light wave of a measuring object is divided into two beams, one beam is recorded by the color CCD5, the other beam enters the spectrometer 604 through the pinhole diaphragm 601 and the optical fiber probe 602 in sequence, the temperature is calculated according to the radiation spectrum signal of the measuring object, and the temperature calculated by the spectrum signal of the spectrometer 604 is used for calibrating the system temperature measurement constant of the corresponding pixel point of the color CCD 5. The color CCD5 is then calculated from the self-calibration results to record the temperature distribution of the object.
In order to provide an accurate calibration temperature for the color CCD5, the measurement object temperature is calculated by fitting a black body radiation curve with spectral radiation forces of different wavelengths measured by the spectrometer 604. Since the radiation of a general object has characteristic spectral lines, errors are introduced when a blackbody radiation curve is fitted, and therefore the wavelength is selected to avoid the characteristic spectral lines.
The calculation formula of the constant C of the color CCD temperature measurement system is as follows:
Figure BDA0002469487530000071
wherein T is a temperature calculated from a radiation spectrum signal of the measurement object; lambda [ alpha ]g，λbThe wavelengths respectively correspond to the peak values of the spectral response curves of the channels of the color CCD camera G, B;
Figure BDA0002469487530000072
respectively the light intensities recorded by the color CCD camera G, B.
After a color CCD temperature measurement system constant C is obtained, the temperature distribution of the measurement object is calculated according to the G, B channel intensity value of each pixel point, and the calculation formula is as follows:
Figure BDA0002469487530000073
wherein, T (x, y) is the temperature of each pixel point of the color CCD.
In order to improve the accuracy of temperature calculation according to the spectrum, the wavelength range of the spectrometer 604 is 380 nm-780 nm, and the spectral resolution is less than 0.1 nm. In order to improve the self-calibration accuracy of the color CCD temperature measurement system, a precise pinhole diaphragm 601 is arranged at the front end of the optical fiber probe 602 by 1-2 mm, and the diameter of a pinhole is 8-10 times of the pixel size of the color CCD 5. To adjust the size of the measurement field of view, the imaging lens may be a lens group. In order to avoid errors caused by different transmittances of the radiated light to different wavelengths through the optical elements, the transmittances of all the optical elements through which the radiated light passes in the optical path system to visible light are equal.
Example 2
The temperature measurement method of the embodiment is realized based on the color CCD self-calibration temperature measurement device of the embodiment 1, and comprises the following steps:
(1) before testing, the positions of the color CCD, the pinhole diaphragm and the optical fiber probe are calibrated by using laser;
(2) during testing, a measuring object is placed at the position of laser, radiation light of the measuring object is divided into two beams by a beam splitter after passing through a lens, one beam of radiation light is recorded by a color CCD, and the other beam of radiation light is received by an optical fiber probe after passing through a precise pinhole diaphragm and enters a spectrometer;
(3) calculating a temperature from a radiation spectrum signal of the measurement object;
(4) calibrating a system constant of a pixel point corresponding to the color CCD by using the temperature calculated by the spectral signal;
(5) and calculating the temperature distribution of the color CCD recording object according to the calibration result.

Claims (10)

1. A radiation spectrum-based color CCD self-calibration temperature measuring device is characterized by comprising a lens group, a beam splitter and a color CCD which are sequentially arranged along the radiation light wave direction of a measuring object;
the radiation light wave is divided into two beams by the beam splitter, wherein one beam is transmitted to the color CCD, and the other beam is reflected to the spectrum measurement module; the color CCD is used for recording a color image of the measuring object, and the spectral measuring module is used for measuring the spectral characteristics of the measuring object;
the color CCD and the spectrum measuring module are in communication connection with a computer, and the computer performs self-calibration on a temperature measuring constant of the color CCD and calculates the temperature distribution of the measuring object.
2. The color CCD self-calibration temperature measuring device according to claim 1, wherein the spectrum measuring module comprises a pinhole diaphragm, an optical fiber probe, an optical fiber and a spectrometer; the radiation light reflected by the beam splitter passes through the pinhole diaphragm, the optical fiber probe and the optical fiber in sequence and is received by the spectrometer.
3. The color CCD self-calibration temperature measuring device according to claim 2, wherein the optical path from the radiation light passing through the beam splitter to the color CCD is equal to the optical path to the fiber probe; and the radiation light recorded by the center of the color CCD and the radiation light received by the fiber probe are radiation light at the same position of a measuring object.
4. The color CCD self-calibration temperature measuring device according to claim 2, wherein the pinhole diaphragm is located 1-2 mm in front of the optical fiber probe, the diameter of the pinhole is 8-10 times of the pixel size of the color CCD, and the pinhole is coaxial with the optical fiber probe.
5. The color CCD self-calibration temperature measuring device according to claim 2, wherein the wavelength range of the spectrometer is 380nm to 780nm, and the spectral resolution is less than 0.1 nm.
6. The color CCD self-calibration temperature measuring device of claim 1, wherein all optical elements through which the radiated light waves pass have equal transmittance to visible light.
7. The color CCD self-calibration temperature measuring device of claim 1, wherein the lens set comprises at least one imaging lens.
8. A color CCD self-calibration temperature measurement method based on radiation spectrum is realized by the color CCD self-calibration temperature measurement device of any one of claims 1 to 7, and is characterized by comprising the following steps:
1) before testing, the positions of all components in the color CCD and the spectrum measurement module are calibrated by using laser;
2) during testing, the radiation light wave of a measuring object is split, one beam is recorded by the color CCD, and the other beam enters the spectrum measuring module;
3) calculating a temperature from a radiation spectrum signal of the measurement object; calibrating a system temperature measurement constant of a pixel point corresponding to the color CCD by using the temperature calculated by the spectral signal;
4) and calculating the temperature distribution of the color CCD recording object according to the self-calibration result.
9. The method for self-calibration temperature measurement of a color CCD based on radiation spectrum according to claim 8, wherein the formula for calculating the temperature measurement constant in step 3) is as follows:
Figure FDA0002469487520000021
wherein T is a temperature calculated from a radiation spectrum signal of the measurement object; lambda [ alpha ]g，λbThe wavelengths respectively correspond to the peak values of the spectral response curves of the channels of the color CCD camera G, B;
Figure FDA0002469487520000022
respectively the light intensities recorded by the color CCD camera G, B.
10. The method according to claim 9, wherein in step 4), after obtaining the temperature measurement constant C, the temperature distribution of the measurement object is calculated according to the G, B channel intensity values of each pixel point, and the calculation formula is as follows:
Figure FDA0002469487520000023
wherein, T (x, y) is the temperature of each pixel point of the color CCD.
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