CN219122075U - Automatic full-detection equipment for chip - Google Patents

Automatic full-detection equipment for chip Download PDF

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Publication number
CN219122075U
CN219122075U CN202222967165.9U CN202222967165U CN219122075U CN 219122075 U CN219122075 U CN 219122075U CN 202222967165 U CN202222967165 U CN 202222967165U CN 219122075 U CN219122075 U CN 219122075U
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China
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chip
conveying line
conveying
base
manipulator
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CN202222967165.9U
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Chinese (zh)
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何裕雄
吴涛
李丰刚
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Kunshan Aolan Intelligent Equipment Technology Co ltd
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Kunshan Aolan Intelligent Equipment Technology Co ltd
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Abstract

The application belongs to the technical field of chip detection, specifically be an automatic full detection equipment of chip, the on-line screen storage device comprises a base, the both sides that are relative on the base all are equipped with chip box conveying mechanism, be equipped with chip transfer mechanism on the base between two chip box conveying mechanism, be equipped with visual detection mechanism through the support on the base between two chip box conveying mechanism, visual detection mechanism is located the top that the chip transferred mechanism, still be equipped with the manipulator on the base, chip box conveying mechanism's terminal and every chip transfer mechanism all are located the stroke scope of manipulator, still be equipped with the industrial computer on the base, industrial computer signal connection visual detection mechanism, chip box conveying mechanism, the manipulator, chip transfer mechanism, the problem that traditional adoption manual visual inspection leads to the precision low, stability is poor has been solved.

Description

Automatic full-detection equipment for chip
Technical Field
The application belongs to the technical field of chip detection, and particularly relates to chip automatic full-detection equipment.
Background
Based on the increasingly-increased chip output of semiconductor enterprises, sometimes defects are generated on the surface of the chip due to machine or manual errors, and the phenomenon of disqualification occurs in aluminum wire welding, if the defects are not detected, the batch of defective chips flow out, so that a large amount of economic cost loss of the enterprises is caused, and the traditional manual visual inspection obviously cannot adapt to the modern requirements of the enterprises, so that the electronic device has higher stability, repeatability and higher precision.
Disclosure of Invention
The purpose of this application is to prior art's shortcoming, adopts the mode that sets up industrial computer cooperation vision detection mechanism and chip box conveying mechanism, has designed an automatic full detection equipment of chip, can carry out automated inspection to the chip, has solved the tradition and has adopted artifical visual inspection to lead to the precision low, the poor problem of stability.
In order to achieve the above purpose, the present application provides the following technical solutions:
the utility model provides an automatic full inspection equipment of chip, includes the base, the both sides that are relative on the base all are equipped with chip box conveying mechanism, on the base two be equipped with the chip and move and carry the mechanism between the chip box conveying mechanism, on the base two be equipped with visual detection mechanism through the support between the chip box conveying mechanism, visual detection mechanism is located the chip moves and carries the top of mechanism, still be equipped with the manipulator on the base, chip box conveying mechanism's terminal with every the chip moves and carries the mechanism and all be located in the stroke scope of manipulator, still be equipped with the industrial computer on the base, industrial computer signal connection visual detection mechanism chip box conveying mechanism, manipulator, chip move and carry the mechanism.
Preferably, the chip box conveying mechanism comprises a supporting frame, a first conveying line and a second conveying line are arranged on the supporting frame, the first conveying line and the second conveying line are parallel to the upper surface of the base, the second conveying line is located right above the first conveying line, the first conveying line is parallel to the second conveying line, a vertical lifting mechanism is arranged at one end of the first conveying line on the supporting frame, the top end of the lifting mechanism is higher than the height of the second conveying line, a gripper is arranged on the lifting mechanism, and one ends of the first conveying line and the second conveying line, which are close to the lifting mechanism, are all in the stroke range of the gripper.
Preferably, the chip transfer mechanism comprises a third conveying line, the third conveying line is parallel to the upper surface of the base, the third conveying line is perpendicular to the conveying direction of the chip box conveying mechanism, and a chip limiting device is fixedly arranged between two ends of the third conveying line.
Preferably, the chip limiting device comprises a bearing table and a negative pressure device, the bearing table is hollow, a through hole for communicating the bearing table is formed in the upper surface of the bearing table, and an air flow input end of the negative pressure device is communicated with the bearing table.
Preferably, the visual detection mechanism comprises five cameras, each camera is connected with the industrial personal computer through signals, the five cameras are fixed on the support, the shooting surface of one of the five cameras faces the base, the other four cameras are connected with the support through struts and distributed around the camera with the shooting surface facing the base at equal intervals, and the shooting surfaces of the four cameras connected with the support through struts are arranged in opposite directions.
Preferably, the support rod is a telescopic rod.
Preferably, the manipulator comprises a fourth conveying line, the fourth conveying line is perpendicular to the chip box conveying mechanism, the fourth conveying line is parallel to the upper surface of the base, a thumb cylinder is fixedly arranged between two ends of the fourth conveying line, a clamping strip is arranged at the output end of the thumb cylinder, and the fourth conveying line is perpendicular to the conveying direction of the chip box conveying mechanism.
Preferably, the base is provided with a shell, the visual detection mechanism, the chip box conveying mechanism, the manipulator and the chip transfer mechanism are all arranged in the shell, and the surface of the shell is provided with a switch door at the initial end corresponding to each chip box conveying mechanism.
Compared with the prior art, the beneficial effects of this application are:
1. the application adopts the mode of setting up industrial computer cooperation vision detection mechanism and chip box conveying mechanism, has designed an automatic full detection equipment of chip, can carry out automated inspection to the chip, has solved the tradition and has adopted artifical visual inspection to lead to the precision low, the poor problem of stability.
2. This application moves the mechanism as the chip through third transfer chain and chip stop device, can be fixed the chip voluntarily to the negative pressure device that chip stop device adopted compares in ordinary fixture, can not harm the chip and carries the visual inspection mechanism department with the chip.
3. The setting of five cameras in this application can detect the surface on the front and back control and upper portion of chip respectively for the chip is detected more comprehensively.
Drawings
FIG. 1 is a schematic view of the external structure of the present application;
FIG. 2 is a schematic view of the structure of FIG. 1 with the housing removed;
FIG. 3 is a schematic diagram of the structure shown at A in FIG. 2;
FIG. 4 is a schematic view of a manipulator;
FIG. 5 is a schematic diagram of a visual inspection mechanism;
FIG. 6 is a schematic diagram of a chip transfer mechanism;
FIG. 7 is a schematic view of a cartridge transport mechanism;
fig. 8 is a schematic view of the mechanism on the left side of fig. 7.
1, a base; 2. a bracket; 3. a first conveyor line; 4. a second conveyor line; 5. a lifting mechanism; 6. a grip; 7. a third conveyor line; 8. a carrying platform; 9. a negative pressure device; 10. a through hole; 11. a camera; 12. a support rod; 13. a fourth conveyor line; 14. clamping the strip; 15. a thumb cylinder; 16. a housing; 17. opening and closing a door; 18. and (5) supporting frames.
Detailed Description
Referring to fig. 1-8, an automatic full-detection device for chips comprises a base 1, chip box conveying mechanisms are arranged on two opposite sides of the base 1, chip shifting mechanisms are arranged between the two chip box conveying mechanisms on the base 1, visual detection mechanisms are arranged between the two chip box conveying mechanisms on the base 1 through a support 2, the visual detection mechanisms are located above the chip shifting mechanisms, a manipulator is further arranged on the base 1, the terminal end of the chip box conveying mechanism and each chip shifting mechanism are located in the stroke range of the manipulator, an industrial personal computer is further arranged on the base 1, and the industrial personal computer is in signal connection with the visual detection mechanisms, the chip box conveying mechanisms, the manipulator and the chip shifting mechanisms.
In the embodiment, two chip box conveying mechanisms are respectively defined as one for conveying chips which are not detected and one for conveying chips after detection through an industrial personal computer; when the chip-holding device is used, a worker places a material box containing chips on one of the chip box conveying mechanisms, places an empty chip box on the other chip box conveying mechanism, the chip box conveying mechanism for conveying undetected chips conveys the material box containing chips to the stroke range of the manipulator, the manipulator grabs the chips on the visual detection mechanism, and after the visual detection mechanism sends a detection result to the industrial personal computer, the control computer sends a signal to the manipulator; the mechanical arm returns the chips which are qualified in detection to the chip box on the chip box conveying mechanism for conveying the chips which are not detected, and the chips which are unqualified after detection are placed on the chip box conveying mechanism after detection; after each chip in the chip box is detected, the two chip box conveying mechanisms respectively convey the chip boxes containing the chips, at the moment, one chip box conveying mechanism conveys good products, the other chip box conveying mechanism conveys defective products, in the whole process, workers only need to feed the chip boxes and discharge the chips, and the detection is completely carried out by a visual detection mechanism (CCD detection tool) on the machine, so that the problems of low accuracy and poor stability caused by manual visual detection are avoided.
As a preferred mode, as shown in fig. 7 and 8, the chip box conveying mechanism comprises a supporting frame 18, a first conveying line 3 and a second conveying line 4 are arranged on the supporting frame 18, the first conveying line 3 and the second conveying line 4 are parallel to the upper surface of the base 1, the second conveying line 4 is located right above the first conveying line 3, the first conveying line 3 is parallel to the second conveying line 4, a vertical lifting mechanism 5 is arranged at one end of the first conveying line 3 on the supporting frame 18, the top end of the lifting mechanism 5 is higher than the height of the second conveying line 4, a gripper 6 is arranged on the lifting mechanism 5, and one ends, close to the lifting mechanism 5, of the first conveying line 3 and the second conveying line 4 are all in the stroke range of the gripper 6. After the arrangement, a first conveying line 3 on a chip box conveying mechanism is used for conveying chip boxes filled with chips, and an empty chip box is placed on a second conveying line 4 and used for receiving the chips which are qualified after detection; the first conveying line 3 'on the other chip box conveying mechanism is used for placing empty chip boxes, and the second conveying line 4' is used for conveying chip boxes with defective products; this allows to sort each cartridge conveyor such that each cartridge conveyor has a different direction of conveyance, e.g. the direction of conveyance of the first conveyor lines 3 and 3 'is in the range of travel towards the robot and the direction of conveyance of the second conveyor lines 4 and 4' is in the range of travel away from the robot. Wherein the first conveyor lines 3 and 3 'may be rodless cylinders and the second conveyor lines 4 and 4' may be belt conveyed.
Preferably, the chip transferring mechanism comprises a third conveying line 7, the third conveying line 7 is parallel to the upper surface of the base 1, the third conveying line 7 is perpendicular to the conveying direction of the chip box conveying mechanism, and a chip limiting device is fixedly arranged between two ends of the third conveying line 7. The purpose of this arrangement is to use the third conveyor line 7 to convey the chip to be inspected to the vision inspection mechanism for inspection, and the third conveyor line 7 may be a rodless cylinder or a belt conveyor mechanism.
Preferably, the chip limiting device comprises a bearing table 8 and a negative pressure device 9, the bearing table 8 is hollow, a through hole 10 for communicating the inside is formed in the upper surface of the bearing table 8, and the air flow input end of the negative pressure device 9 is communicated with the inside of the bearing table 8. After the arrangement, the chip can be fixed through the bearing table 8 and the negative pressure device 9, and meanwhile, compared with a common clamping mechanism, the negative pressure device 9 does not damage the chip; in practical application, the negative pressure device 9 may directly adopt an air pump, and the air flow input ends of the air pump are communicated with the inside of the bearing table 8.
Preferably, the visual detection mechanism includes five cameras 11, each camera 11 is in signal connection with the industrial personal computer, five cameras 11 are all fixed on the support 2, a shooting surface of one of the five cameras 11 faces the base 1, the other four cameras 11 are all connected with the support 2 through a supporting rod 12 and distributed around the camera 11 of which the shooting surface faces the base 1 at equal intervals, and the shooting surfaces of the four cameras 11 connected with the support 2 through the supporting rod 12 are arranged in opposite directions. The five cameras 11 are arranged to detect the front, back, left, right and upper surfaces of the chip respectively, so that the chip is detected more comprehensively.
Preferably, the strut 12 is a telescopic rod. The setting of telescopic link conveniently adjusts the position of camera 11 for camera 11 can correspond with the chip.
Preferably, as shown in fig. 4, the manipulator includes a fourth conveying line 13, the fourth conveying line 13 is perpendicular to the chip box conveying mechanism, the fourth conveying line 13 is parallel to the upper surface of the base 1, a thumb cylinder 15 is fixedly disposed between two ends of the fourth conveying line 13, a clamping strip 14 is disposed at an output end of the thumb cylinder 15, and the fourth conveying line 13 is perpendicular to a conveying direction of the chip box conveying mechanism. Therefore, the detected chip can be clamped onto the chip box conveying mechanism by using the fourth conveying line 13 as a mechanical arm, and meanwhile, a preset distance exists between the chip box conveying mechanism and the chip limiting device, so that the chip box conveying mechanism and the chip transferring mechanism are prevented from interfering with each other when working.
Preferably, the base 1 is provided with a housing 16, the visual detection mechanism, the chip box conveying mechanism, the manipulator and the chip transfer mechanism are all arranged in the housing 16, and a switch door 17 is arranged on the surface of the housing 16 at the start end of each corresponding chip box conveying mechanism. By providing the housing 16, dust is prevented from entering and contaminating the visual inspection mechanism, the cartridge conveying mechanism, the robot arm, and the chip transfer mechanism.

Claims (8)

1. The utility model provides an automatic full inspection equipment of chip, its characterized in that, includes base (1), the both sides that are relative on base (1) all are equipped with chip box conveying mechanism, be equipped with the chip on base (1) and move and carry the mechanism between two chip box conveying mechanism, be equipped with visual detection mechanism on base (1) through support (2) between two chip box conveying mechanism, visual detection mechanism is located the top that the chip moved and carry the mechanism, still be equipped with the manipulator on base (1), the terminal of chip box conveying mechanism with every the chip moves and carries the mechanism and all be located the stroke scope of manipulator, still be equipped with the industrial computer on base (1), industrial computer signal connection visual detection mechanism chip box conveying mechanism, manipulator, chip move and carry the mechanism.
2. The automatic full-detection device for chips according to claim 1, wherein the chip box conveying mechanism comprises a supporting frame (18), a first conveying line (3) and a second conveying line (4) are arranged on the supporting frame (18), the first conveying line (3) and the second conveying line (4) are parallel to the upper surface of the base (1), the second conveying line (4) is located right above the first conveying line (3), the first conveying line (3) is parallel to the second conveying line (4), a vertical lifting mechanism (5) is arranged at one end of the first conveying line (3) on the supporting frame (18), the top end of the lifting mechanism (5) is higher than the height of the second conveying line (4), a gripper (6) is arranged on the lifting mechanism (5), and one ends, close to the lifting mechanism (5), of the first conveying line (3) and the second conveying line (4) are all in the range of travel of the gripper (6).
3. The automatic full-detection device for chips according to claim 2, wherein the chip transferring mechanism comprises a third conveying line (7), the third conveying line (7) is parallel to the upper surface of the base (1), the third conveying line (7) is perpendicular to the conveying direction of the chip box conveying mechanism, and a chip limiting device is fixedly arranged between two ends of the third conveying line (7).
4. A chip automation full inspection device according to claim 3, wherein the chip limiting device comprises a bearing table (8) and a negative pressure device (9), the bearing table (8) is hollow, a through hole (10) for communicating the inside is formed in the upper surface of the bearing table (8), and the air flow input end of the negative pressure device (9) is communicated with the inside of the bearing table (8).
5. A chip automation full inspection device according to claim 3, characterized in that the visual inspection mechanism comprises five cameras (11), each camera (11) is in signal connection with the industrial personal computer, five cameras (11) are all fixed on the support (2), the shooting surface of one of the five cameras (11) faces the base (1), the other four cameras (11) are all connected with the support (2) through struts (12) and distributed around the camera (11) with the shooting surface facing the base (1) at equal intervals, and the shooting surfaces of the four cameras (11) connected with the support (2) through struts (12) are arranged in opposite directions.
6. The automated full-detection device of claim 5, wherein the support rod (12) is a telescopic rod.
7. The automatic full-detection device for chips according to claim 1, wherein the manipulator comprises a fourth conveying line (13), the fourth conveying line (13) is perpendicular to the chip box conveying mechanism, the fourth conveying line (13) is parallel to the upper surface of the base (1), a thumb cylinder (15) is fixedly arranged between two ends of the fourth conveying line (13), a clamping strip (14) is arranged at the output end of the thumb cylinder (15), and the fourth conveying line (13) is perpendicular to the conveying direction of the chip box conveying mechanism.
8. The automatic full-detection device for chips according to any one of claims 1 to 7, wherein a housing (16) is provided on the base (1), the visual detection mechanism, the chip cartridge conveying mechanism, the manipulator and the chip transfer mechanism are all provided in the housing (16), and a switch door (17) is provided on the surface of the housing (16) at the start end corresponding to each of the chip cartridge conveying mechanisms.
CN202222967165.9U 2022-11-08 2022-11-08 Automatic full-detection equipment for chip Active CN219122075U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202222967165.9U CN219122075U (en) 2022-11-08 2022-11-08 Automatic full-detection equipment for chip

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202222967165.9U CN219122075U (en) 2022-11-08 2022-11-08 Automatic full-detection equipment for chip

Publications (1)

Publication Number Publication Date
CN219122075U true CN219122075U (en) 2023-06-02

Family

ID=86535610

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202222967165.9U Active CN219122075U (en) 2022-11-08 2022-11-08 Automatic full-detection equipment for chip

Country Status (1)

Country Link
CN (1) CN219122075U (en)

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